TWM525927U - Manufacturing equipment for glass substrate - Google Patents

Manufacturing equipment for glass substrate Download PDF

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Publication number
TWM525927U
TWM525927U TW104212123U TW104212123U TWM525927U TW M525927 U TWM525927 U TW M525927U TW 104212123 U TW104212123 U TW 104212123U TW 104212123 U TW104212123 U TW 104212123U TW M525927 U TWM525927 U TW M525927U
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Taiwan
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glass substrate
cutting
end surface
surface processing
manufacturing
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TW104212123U
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Chinese (zh)
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Osamu Ikai
Hironori Ise
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Avanstrate Inc
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Publication of TWM525927U publication Critical patent/TWM525927U/en

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  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)

Description

玻璃基板之製造設備 Glass substrate manufacturing equipment

本創作係關於一種用於液晶顯示器或電漿顯示器等平板顯示器之玻璃基板之製造設備。 The present invention relates to a manufacturing apparatus for a glass substrate of a flat panel display such as a liquid crystal display or a plasma display.

用於液晶顯示器或電漿顯示器等平板顯示器(以下稱為「FPD」)之玻璃基板採用厚度較薄例如為0.5~0.7mm之玻璃板。該FPD用玻璃基板例如於第1代為300×400mm之尺寸,而於第10代已成為2850×3050mm之尺寸。 A glass substrate for a flat panel display such as a liquid crystal display or a plasma display (hereinafter referred to as "FPD") is a glass plate having a thin thickness of, for example, 0.5 to 0.7 mm. The glass substrate for FPD has a size of, for example, 300 × 400 mm in the first generation, and has a size of 2,850 × 3050 mm in the 10th generation.

於使用此種薄板來製造大尺寸之FPD用玻璃基板時,較佳地使用溢流下拉法或浮式法。例如,於專利文獻1中揭示有使用溢流下拉法之玻璃基板之製造設備。即,於專利文獻1中係利用搬送輥(拉伸輥)夾持自成形體中溢出之平板玻璃,於向下方拉下之過程中進行緩冷,藉此製造玻璃基板。 When such a thin plate is used to manufacture a glass substrate for a large-sized FPD, an overflow down-draw method or a floating method is preferably used. For example, Patent Document 1 discloses a manufacturing apparatus for a glass substrate using an overflow down-draw method. In other words, in the case of the patent document 1, the sheet glass which overflows from the molded object is pinched by the conveyance roller (drawing roll), and the glass substrate is manufactured by slow-cooling in the process of pulling down.

藉由此種溢流下拉法等所製造之板狀之玻璃基板被切割為特定之尺寸。玻璃基板之切割係藉由使用切割器等於切割部位形成切割線(切縫)並沿該切割線斷裂而進行。關於此種切割裝置,例如揭示於專利文獻2等。 The plate-shaped glass substrate produced by such an overflow down-draw method or the like is cut into a specific size. The cutting of the glass substrate is performed by forming a cutting line (cutting) along the cutting portion by using a cutter and breaking along the cutting line. Such a cutting device is disclosed, for example, in Patent Document 2 and the like.

又,對如上所述般玻璃基板經切割之端面進行倒角研削等端面加工。關於此種端面加工裝置,例如揭示於專利文獻3等。 Further, the end surface of the glass substrate which has been cut as described above is subjected to end face processing such as chamfer grinding. Such an end surface processing apparatus is disclosed, for example, in Patent Document 3 and the like.

[先前技術文獻] [Previous Technical Literature] [專利文獻] [Patent Literature]

[專利文獻1]國際公開第2012/132425號 [Patent Document 1] International Publication No. 2012/132425

[專利文獻2]日本專利特開2012-171867號公報 [Patent Document 2] Japanese Patent Laid-Open Publication No. 2012-171867

[專利文獻3]日本專利特開2014-087879號公報 [Patent Document 3] Japanese Patent Laid-Open Publication No. 2014-087879

先前,於玻璃基板之端面加工中,於加工前進行用以使玻璃基板之端面位置對齊之對準。例如,於使用進行如圖4所示之倒角研削加工之端面加工裝置(詳情於下文敍述)進行端面加工之情形時,藉由形成有研削槽22之研削輪21相對移動而對加工前經對準之玻璃基板1進行端面加工。 Previously, in the end surface processing of a glass substrate, alignment for aligning the end faces of the glass substrate was performed before processing. For example, in the case of performing end surface processing using the end surface processing apparatus (described in detail below) which performs chamfer grinding as shown in FIG. 4, the grinding wheel 21 formed with the grinding groove 22 is relatively moved to be processed before processing. The aligned glass substrate 1 is subjected to end surface processing.

然而,玻璃基板之對準係藉由對保持於搬送台30上之玻璃基板1自搬送台30露出之端面1a按壓而進行調整。於玻璃基板之情形時,自搬送台30露出之端部撓曲,因此難以提高對準之精度。尤其,於薄板之玻璃基板之情形時,亦存在端部之撓曲量較大、玻璃基板之位置調整較為困難、無法對準之情況。 However, the alignment of the glass substrate is adjusted by pressing the end surface 1a of the glass substrate 1 held on the transfer table 30 from the transfer table 30. In the case of a glass substrate, the end portion exposed from the transfer table 30 is deflected, so that it is difficult to improve the accuracy of alignment. In particular, in the case of a glass substrate of a thin plate, there is a case where the amount of deflection of the end portion is large and the position of the glass substrate is difficult to adjust and cannot be aligned.

上述專利文獻3中記載了獲取2點之玻璃基板之端面之位置資訊,且對於連接其位置之2點間使研削輪移動而進行加工之方法,但於如上所述般撓曲之端部,難以準確地獲取位置資訊,因此即便藉由此種先前方法,亦難以提高對準精度。 Patent Document 3 describes a method of acquiring the positional information of the end surface of the glass substrate at two points, and moving the grinding wheel between two points of the position, but the end portion of the deflection is as described above. It is difficult to accurately acquire position information, and therefore it is difficult to improve the alignment accuracy even by such a prior method.

隨著近年之FPD之高精細化,對於FPD用玻璃基板之品質要求日益嚴格,較先前更需要製造時之嚴密之控制。 With the high definition of FPD in recent years, the quality requirements for the glass substrate for FPD have become increasingly strict, and the strict control of manufacturing is required more than before.

因此,本創作之目的在於提供一種不進行端面加工前之對準,便可高精度地進行端面加工,從而能夠製造出高品質之玻璃基板之玻璃基板之製造設備。 Therefore, the object of the present invention is to provide a manufacturing apparatus for a glass substrate capable of producing a high-quality glass substrate by performing end surface processing with high precision without alignment before end surface processing.

本創作等人為解決先前之技術問題進行了深入之研究,結果想 到了具有以下構成之創作。 This author and others have conducted in-depth research to solve the previous technical problems, and the results I have come to the creation with the following composition.

(構成1之創作) (Creation of Composition 1)

本創作係一種玻璃基板之製造設備,其特徵在於包括:切割裝置,其將成形為板狀之玻璃基板切割為特定之寬度;端面加工裝置,其對切割後之玻璃基板之端面實施端面加工;及搬送台,其供載置上述玻璃基板;且上述切割裝置具有將上述玻璃基板切割為上述寬度之切割機構,一面於將上述玻璃基板載置於上述搬送台上之狀態下,使上述玻璃基板與上述搬送台一體地沿玻璃基板搬送路徑移動,一面於上述端面加工前不進行上述端面之對準下,藉由上述切割機構將上述玻璃基板切割為上述寬度。 The present invention relates to a glass substrate manufacturing apparatus, comprising: a cutting device for cutting a glass substrate formed into a plate shape into a specific width; and an end surface processing device for performing end surface processing on an end surface of the cut glass substrate; And a transfer table for mounting the glass substrate; wherein the dicing device has a dicing mechanism for cutting the glass substrate into the width, and the glass substrate is placed on the transfer table in a state where the glass substrate is placed on the transfer table The glass substrate is cut into the width by the cutting mechanism without moving the alignment of the end faces before the end surface processing, by moving integrally along the glass substrate transport path with the transfer table.

(構成2之創作) (Creation of Composition 2)

如構成1之玻璃基板之製造設備,其特徵在於,上述切割裝置進而包括切割台,上述切割機構係以於上述玻璃基板之特定之切割位置處形成切割線之方式於上述玻璃基板之第一面上移動,上述切割台係於上述玻璃基板之與上述第一面相反之第二面上以與上述玻璃基板對向之方式配置。 A manufacturing apparatus for a glass substrate according to the first aspect, wherein the cutting device further comprises a cutting table, wherein the cutting mechanism forms a cutting line at a specific cutting position of the glass substrate on a first side of the glass substrate Moving upward, the cutting table is disposed on a second surface opposite to the first surface of the glass substrate so as to face the glass substrate.

(構成3之創作) (Creation of Composition 3)

如構成1之玻璃基板之製造設備,其特徵在於,上述端面加工裝置包括研削輪、以及驅動上述研削輪之驅動機構及控制機構,於上述研削輪,形成有遍及其周面之水平方向全周而向內側凹陷之研削槽,上述研削槽具有能夠對於上述玻璃基板之端面形成特定之倒角面之形狀。 In the manufacturing apparatus of the glass substrate of the first aspect, the end surface processing apparatus includes a grinding wheel and a driving mechanism and a control mechanism for driving the grinding wheel, and the grinding wheel is formed in a horizontal direction over the entire circumference of the grinding wheel. The grinding groove recessed inwardly has a shape in which a specific chamfered surface can be formed on an end surface of the glass substrate.

(構成4之創作) (Creation of Composition 4)

如構成1玻璃基板之製造設備,其特徵在於,上述搬送台於設置於上述玻璃基板搬送路徑之行駛軸上移動。 In the manufacturing apparatus which comprises a glass substrate, the said conveyance stage moves on the travel axis provided in the said glass substrate conveyance path.

(構成5之創作) (Creation of Composition 5)

如構成1至4中任一項之玻璃基板之製造設備,其特徵在於,藉 由上述切割機構而形成之切割線與上述端面加工裝置之加工點位於沿上述玻璃基板搬送路徑之同一條線上。 A manufacturing apparatus for a glass substrate according to any one of 1 to 4, characterized in that The cutting line formed by the cutting mechanism and the processing point of the end surface processing apparatus are located on the same line along the glass substrate transport path.

(構成6之創作) (Creation of Composition 6)

如構成1至4中任一項之玻璃基板之製造設備,其特徵在於,於所要切割之玻璃基板之至少一端具有厚度與上述玻璃基板之中央區域不同之外側區域,上述切割機構將上述外側區域切割去除。 The apparatus for manufacturing a glass substrate according to any one of claims 1 to 4, characterized in that at least one end of the glass substrate to be cut has an outer side region having a thickness different from a central region of the glass substrate, and the cutting mechanism has the outer region Cut and remove.

(構成7之創作) (Creation of Composition 7)

如構成1至4中任一項之玻璃基板之製造設備,其特徵在於,上述端面加工裝置包括導引機構,該導引機構用於將上述玻璃基板之端面導引至上述端面加工機構。 The apparatus for manufacturing a glass substrate according to any one of claims 1 to 4, wherein the end surface processing apparatus includes a guiding mechanism for guiding an end surface of the glass substrate to the end surface processing mechanism.

(構成8之創作) (constituting the creation of 8)

如構成7之玻璃基板之製造設備,其特徵在於,上述導引機構係用於將上述玻璃基板之兩端部分別導引至上述研削輪之上述研削槽之導引用台,上述導引用台於上述搬送台之兩側配置於相對於上述搬送台隔開固定距離之位置上。 In the manufacturing apparatus of the glass substrate of the seventh aspect, the guiding means is configured to guide both end portions of the glass substrate to the guiding table of the grinding groove of the grinding wheel, and the guiding table is Both sides of the transfer table are disposed at a position separated from the transfer table by a fixed distance.

(構成9之創作) (Creation of Composition 9)

如構成1至4中任一項之玻璃基板之製造設備,其特徵在於,上述切割機構係相對於上述玻璃基板面旋轉移動之刀輪。 The apparatus for manufacturing a glass substrate according to any one of the first to fourth aspect, wherein the cutting mechanism is a cutter wheel that is rotationally moved with respect to a surface of the glass substrate.

(構成10之創作) (constituting the creation of 10)

如構成2之玻璃基板之製造設備,其特徵在於,上述切割台由能夠隨上述切割機構之移動而移動之球狀或圓筒狀之構件形成。 In the manufacturing apparatus of the glass substrate of the second aspect, the cutting table is formed of a spherical or cylindrical member that can move in accordance with the movement of the cutting mechanism.

根據本創作,藉由上述構成,無需進行端面加工前之對準,不進行對準,便可高精度地進行端面加工。藉此,能夠製造高品質之玻璃基板。 According to the present configuration, according to the above configuration, it is possible to perform the end surface processing with high precision without performing alignment before the end face processing and without performing alignment. Thereby, a high quality glass substrate can be manufactured.

1‧‧‧玻璃基板 1‧‧‧ glass substrate

1a‧‧‧玻璃基板之端面 1a‧‧‧End face of glass substrate

2‧‧‧除製品區域之外之端部 2‧‧‧Ends other than the product area

10‧‧‧切割裝置 10‧‧‧ cutting device

11‧‧‧切割機構 11‧‧‧ cutting mechanism

12‧‧‧切割台 12‧‧‧ cutting table

20‧‧‧端面加工裝置 20‧‧‧End face processing device

21‧‧‧研削輪 21‧‧‧ grinding wheel

22‧‧‧研削槽 22‧‧‧ Grinding trough

30‧‧‧搬送台 30‧‧‧Transportation station

40‧‧‧導引用台 40‧‧‧Guide

50‧‧‧虛線 50‧‧‧ dotted line

60‧‧‧行駛軸 60‧‧‧Travel axle

A‧‧‧箭頭 A‧‧‧ arrow

ST1‧‧‧步驟 ST1‧‧‧ steps

ST2‧‧‧步驟 ST2‧‧‧ steps

ST3‧‧‧步驟 ST3‧‧‧ steps

ST4‧‧‧步驟 ST4‧‧‧ steps

ST5‧‧‧步驟 ST5‧‧‧ steps

ST6‧‧‧步驟 ST6‧‧‧ steps

ST7‧‧‧步驟 ST7‧‧‧ steps

圖1係示出玻璃基板之製造設備之流程之一例之圖。 Fig. 1 is a view showing an example of a flow of a manufacturing apparatus of a glass substrate.

圖2係示出進行本創作中之切割步驟至端面加工步驟之裝置之一實施形態之俯視圖。 Fig. 2 is a plan view showing an embodiment of an apparatus for performing the cutting step to the end surface processing step in the present creation.

圖3係示出進行本創作中之切割步驟至端面加工步驟之裝置之一實施形態之前視圖。 Fig. 3 is a front elevational view showing one embodiment of the apparatus for performing the cutting step to the end surface processing step in the present creation.

圖4係示出用於端面加工步驟之端面加工裝置之一例之立體圖。 Fig. 4 is a perspective view showing an example of an end surface processing apparatus for an end surface processing step.

以下,對本創作之實施形態進行詳細說明。 Hereinafter, the embodiment of the present creation will be described in detail.

(玻璃基板之製造設備之整體概要) (Overall outline of manufacturing equipment for glass substrates)

圖1係示出玻璃基板之製造設備之流程之一例之圖。 Fig. 1 is a view showing an example of a flow of a manufacturing apparatus of a glass substrate.

玻璃基板之製造設備主要具有:熔融步驟(ST1)、澄清步驟(ST2)、攪拌(均質化)步驟(ST3)、供給步驟(ST4)、成形步驟(ST5)、冷卻步驟(ST6)、及切割步驟(ST7)。 The manufacturing apparatus of the glass substrate mainly has a melting step (ST1), a clarification step (ST2), a stirring (homogenization) step (ST3), a supply step (ST4), a forming step (ST5), a cooling step (ST6), and cutting. Step (ST7).

於熔融步驟(ST1)中,藉由將供給至未圖示之熔解槽內之玻璃原料熔解,獲得熔融玻璃。於澄清步驟(ST2)中,使用澄清劑進行熔融玻璃之澄清。 In the melting step (ST1), molten glass is obtained by melting a glass raw material supplied into a melting tank (not shown). In the clarification step (ST2), clarification of the molten glass is carried out using a clarifying agent.

於攪拌(均質化)步驟(ST3)中,使用攪拌器等旋轉工具攪拌未圖示之攪拌槽內之熔融玻璃,藉此進行玻璃成分之均質化。 In the stirring (homogenization) step (ST3), the molten glass in the stirring tank (not shown) is stirred by a rotary tool such as a stirrer to homogenize the glass component.

於供給步驟(ST4)中,經均質化之熔融玻璃自上述攪拌槽通過特定之配管而供給至未圖示之成形裝置。 In the supply step (ST4), the homogenized molten glass is supplied from a predetermined tank to the molding apparatus (not shown) through the specific agitation tank.

該成形裝置例如為利用上述溢流下拉法之成形裝置,進行成形步驟(ST5)及冷卻步驟(ST6)。 This molding apparatus is, for example, a molding apparatus using the above-described overflow down-draw method, and performs a molding step (ST5) and a cooling step (ST6).

於成形步驟(ST5)中,將熔融玻璃成形為平板玻璃,製作平板玻璃流。於使用溢流下拉法之情形時,平板玻璃之流動方向為鉛垂下方。於冷卻步驟(ST6)中,成形後流動之平板玻璃形成為所需之厚度,以不會產生因冷卻導致之翹曲、變形之方式進行冷卻。 In the molding step (ST5), the molten glass is formed into a flat glass to prepare a flat glass flow. In the case of using the overflow down-draw method, the flow direction of the flat glass is vertically below. In the cooling step (ST6), the flat glass which is formed after the formation is formed to have a desired thickness so as to be cooled without causing warpage or deformation due to cooling.

於切割步驟(ST7)中,自上述成形裝置所供給之平板玻璃被切割為特定之長度,藉此獲得板狀之玻璃基板。 In the cutting step (ST7), the flat glass supplied from the above forming apparatus is cut to a specific length, thereby obtaining a plate-shaped glass substrate.

又,將切割後之玻璃基板進而切割為特定之尺寸,從而製作目標尺寸之玻璃基板。之後,進行玻璃基板端面之加工(研削、研磨等)及玻璃基板之清洗,進而檢查泡或脈理等缺陷之有無後,將檢查合格品之玻璃基板作為最終製品進行捆包、出貨。 Further, the cut glass substrate is further cut into a specific size to prepare a glass substrate of a target size. After that, the glass substrate end surface is processed (grinding, polishing, etc.) and the glass substrate is cleaned, and after the presence of defects such as bubbles or pulsations, the glass substrate of the inspection product is packaged and shipped as a final product.

本創作係關於一種將上述切割為板狀之玻璃基板進而切割為特定之尺寸(寬度)從而製作目標尺寸之玻璃基板之切割步驟與於切割步驟後對玻璃基板端面實施倒角等研削加工之端面加工步驟等一系列步驟中之改良,詳情於下文中敍述。 The present invention relates to a cutting step of cutting a glass substrate cut into a plate shape into a specific size (width) to produce a target size, and a grinding step of chamfering the end surface of the glass substrate after the cutting step. Improvements in a series of steps, such as processing steps, are described in more detail below.

本實施形態中所製造之玻璃基板較佳地用於例如液晶顯示器用玻璃基板、有機EL顯示器用玻璃基板、覆蓋玻璃。又,該玻璃基板除此之外亦可作為俄攜帶型終端機器等之顯示器或殼體用之覆蓋玻璃、觸控面板、太陽電池之玻璃基板或覆蓋玻璃而使用。尤其於液晶顯示器用玻璃基板較佳。 The glass substrate produced in the present embodiment is preferably used for, for example, a glass substrate for a liquid crystal display, a glass substrate for an organic EL display, or a cover glass. Further, the glass substrate can be used as a cover glass for a portable terminal device or a cover glass for a housing, a touch panel, a glass substrate for a solar cell, or a cover glass. In particular, a glass substrate for a liquid crystal display is preferred.

又,玻璃基板之寬度方向及縱向之長度例如為500mm~3500mm,較佳為為1000mm~3500mm,更佳為2000mm~3500mm。 Further, the length in the width direction and the longitudinal direction of the glass substrate is, for example, 500 mm to 3500 mm, preferably 1000 mm to 3500 mm, and more preferably 2000 mm to 3500 mm.

(玻璃基板之組成) (composition of glass substrate)

作為上述用途之玻璃基板之玻璃組成,為鋁矽酸鹽玻璃、硼鋁矽酸鹽玻璃,進而為無鹼玻璃、微鹼玻璃,例如可較佳地列舉出以下玻璃。再者,以下所示之組成之含有率以莫耳%表示。 The glass composition of the glass substrate for the above-mentioned use is an aluminosilicate glass or a boroaluminosilicate glass, and further an alkali-free glass or a slightly alkali glass. For example, the following glass is preferably used. Further, the content ratio of the composition shown below is expressed in mol%.

SiO2 55~75%、Al2O3 5~20%、B2O3 0~15%、RO 5~20%(其中,R為Mg、Ca、Sr及Ba中之包含於玻璃基板之所有元素)、R'2O 0~0.4%(其中,R'為Li、Na及K中之包含於玻璃基板之所有元素)。 SiO 2 55~75%, Al 2 O 3 5~20%, B 2 O 3 0~15%, RO 5~20% (where R is all contained in the glass substrate of Mg, Ca, Sr and Ba) Element), R' 2 O 0 to 0.4% (wherein R' is all of the elements contained in the glass substrate of Li, Na, and K).

當然,於本創作中,不必限定玻璃基板之玻璃組成,而為任意。 Of course, in the present creation, it is not necessary to limit the glass composition of the glass substrate, and it is arbitrary.

接下來,對本創作中之切割步驟至端面加工步驟、及該一系列步驟中較佳地使用之裝置進行說明。 Next, the cutting step to the end surface processing step in the present creation, and the apparatus preferably used in the series of steps will be described.

圖2係示出進行本創作中之切割步驟至端面加工步驟之裝置之一實施形態之俯視圖。又,圖3係示出進行本創作中之切割步驟至端面加工步驟之裝置之一實施形態之前視圖。 Fig. 2 is a plan view showing an embodiment of an apparatus for performing the cutting step to the end surface processing step in the present creation. Further, Fig. 3 is a front view showing an embodiment of an apparatus for performing the cutting step to the end surface processing step in the present creation.

自上述之例如利用溢流下拉法之成形裝置而供給之連續之平板玻璃被切割為特定之長度,並自連續之平板玻璃中分離出1片玻璃。藉由切割去除形成於分離出之玻璃之兩端之具有厚度之外側區域(所謂之邊料),獲得玻璃基板1。所獲得之板狀之玻璃基板1一面吸附保持於搬送台30上,一面被搬送至切割步驟,並為了成為面板製造商所使用之尺寸而被切割四邊。此處,藉由切割裝置10,於基板兩端部之特定之切割位置處形成切割線(切割步驟)。 The continuous flat glass supplied from the above-described forming apparatus, for example, by the overflow down-draw method, is cut to a specific length, and one piece of glass is separated from the continuous flat glass. The glass substrate 1 is obtained by cutting away the outer side region (so-called edge material) having a thickness formed at both ends of the separated glass. The obtained plate-shaped glass substrate 1 is adsorbed and held on the transfer table 30, and is conveyed to the cutting step, and is cut into four sides in order to be used by the panel manufacturer. Here, by the cutting device 10, a cutting line is formed at a specific cutting position at both end portions of the substrate (cutting step).

繼而,如上所述般於基板兩端部之切割位置處形成有切割線之玻璃基板1係其外側區域(製品區域外之端部2)沿其切割線斷裂,形成為特定之尺寸,而製作目標尺寸之玻璃基板(端部切割)。 Then, as described above, the glass substrate 1 on which the cut lines are formed at the cutting positions of the both end portions of the substrate is formed such that the outer region (the end portion 2 outside the product region) is broken along the cutting line to be formed into a specific size, and is produced. Target size glass substrate (end cut).

繼而,經過以上說明之切割步驟而製作之目標尺寸之玻璃基板1進而一面吸附保持於搬送台30上,一面被搬送至接下來之端面加工步驟。此處,藉由端面加工裝置20,對玻璃基板1之被切割之端面實施例如倒角研削加工(端面加工步驟)。 Then, the glass substrate 1 of the target size produced by the cutting step described above is further adsorbed and held on the transfer table 30, and is transported to the subsequent end surface processing step. Here, the end surface of the glass substrate 1 to be cut is subjected to, for example, chamfer grinding (end surface processing step) by the end surface processing apparatus 20.

於本實施形態中,上述玻璃基板1一面吸附保持於搬送台30上,一面於上述步驟間搬送,尤其特徵性構成在於,一面於將上述玻璃基板1保持於搬送台30上之狀態下,使上述玻璃基板1與上述搬送台30一體地沿玻璃基板搬送路徑移動,一面實施上述切割步驟及端面加工步驟。於本實施形態中,上述搬送台30構成為於設置於上述玻璃基板搬送路徑之行駛軸60上移動。圖2中之箭頭A表示玻璃基板之搬送方向。上述行駛軸60例如為軌道,上述搬送台30於該軌道上移動。 In the present embodiment, the glass substrate 1 is conveyed and held on the transfer table 30 while being transported between the steps, and is particularly characterized in that the glass substrate 1 is held on the transfer table 30 while being placed on the transfer table 30. The glass substrate 1 and the transfer table 30 are integrally moved along the glass substrate transport path, and the cutting step and the end surface processing step are performed. In the present embodiment, the transfer table 30 is configured to move on the travel shaft 60 provided on the glass substrate transport path. Arrow A in Fig. 2 indicates the conveyance direction of the glass substrate. The travel axis 60 is, for example, a rail, and the transport table 30 moves on the rail.

接下來,對上述切割裝置進行說明。 Next, the above cutting device will be described.

上述切割裝置10設有:切割機構11,其係以於玻璃基板1之特定之切割位置處形成切割線之方式於玻璃基板1之一面上移動;及切割台12,其係於玻璃基板1之另一面上以與上述切割機構11對向之方式配置。此處,切割台12之與搬送台30之位置關係可根據被要求之玻璃基板之製品尺寸,與切割機構11之位置一起適當調整。 The cutting device 10 is provided with a cutting mechanism 11 that moves on one side of the glass substrate 1 by forming a cutting line at a specific cutting position of the glass substrate 1, and a cutting table 12 that is attached to the glass substrate 1. The other surface is disposed to face the cutting mechanism 11 described above. Here, the positional relationship between the cutting table 12 and the transfer table 30 can be appropriately adjusted in accordance with the size of the desired glass substrate and the position of the cutting mechanism 11.

較佳為,上述切割機構11相對於玻璃基板面旋轉移動,具體而言,較佳為例如刀輪之類的切割工具。再者,圖2及圖3中例示出上述刀輪。 Preferably, the cutting mechanism 11 is rotationally moved with respect to the surface of the glass substrate, and specifically, a cutting tool such as a cutter wheel is preferable. Furthermore, the cutter wheel described above is exemplified in FIGS. 2 and 3.

又,較佳為,上述切割台12為隨上述切割機構11移動(較佳為旋轉移動)一起移動之構成。於此情形時,上述切割台12之尺寸設為承受來自上述切割機構11之負荷而進行穩定之切割所需之尺寸即可。作為上述切割台12,例如可使用SUS製之壓盤或於該壓盤貼附有樹脂製之墊(例如胺基甲酸酯墊等)之台等。又,上述切割台12可並非如壓盤者,亦可為例如能夠以與上述切割機構11對向之方式隨上述切割機構11移動而一起移動之球狀或輪狀(圓筒狀)之構件。 Further, it is preferable that the cutting table 12 is configured to move together with the movement (preferably, rotational movement) of the cutting mechanism 11. In this case, the size of the cutting table 12 may be a size required to receive a stable load from the load of the cutting mechanism 11. As the cutting table 12, for example, a platen made of SUS or a table made of a resin pad (for example, a urethane pad or the like) may be attached to the platen. Further, the cutting table 12 may not be a platen, and may be, for example, a spherical or wheel-shaped (cylindrical) member that can move together with the cutting mechanism 11 so as to oppose the cutting mechanism 11 . .

再者,上述切割台12亦可設為固定於特定之位置之構成,但於此情形時,由於僅上述切割機構11移動,因此切割台12之長度(基板搬送方向之長度)需設置得較形成切割線之玻璃基板1之沿搬送方向之邊之長度更長。 Further, the cutting table 12 may be configured to be fixed at a specific position. However, in this case, since only the cutting mechanism 11 is moved, the length of the cutting table 12 (the length of the substrate conveying direction) needs to be set. The length of the side of the glass substrate 1 forming the cut line in the transport direction is longer.

又,亦可設為如下之構成:同時固定上述切割機構11及切割台12之位置,使玻璃基板1移動。 Further, a configuration may be adopted in which the positions of the cutting mechanism 11 and the cutting table 12 are fixed at the same time, and the glass substrate 1 is moved.

再者,除了具備上述切割機構11及切割台12以外,切割裝置10亦具備未圖示之驅動控制上述切割機構11及切割台12之驅動機構及控制機構。 Further, in addition to the cutting mechanism 11 and the cutting table 12, the cutting device 10 further includes a driving mechanism and a control mechanism that drive and control the cutting mechanism 11 and the cutting table 12 (not shown).

於上述構成中,上述切割機構11沿玻璃基板1之特定之切割位置 (例如圖2中之沿虛線50之位置)於玻璃基板1之一面上一面施加特定之負荷一面移動,從而形成切割線。此時,於切割機構11之刀尖壓入之方向上對玻璃基板面施加負荷。另一方面,上述切割台12可於玻璃基板1之另一面上承受來自上述切割機構11之負荷,穩定地形成切割線。 In the above configuration, the cutting mechanism 11 is along a specific cutting position of the glass substrate 1. (for example, the position along the broken line 50 in Fig. 2) is moved while applying a specific load on one surface of the glass substrate 1, thereby forming a dicing line. At this time, a load is applied to the surface of the glass substrate in the direction in which the cutting edge of the cutting mechanism 11 is pressed. On the other hand, the cutting table 12 can receive the load from the cutting mechanism 11 on the other surface of the glass substrate 1, and stably form the cutting line.

又,於以可隨上述切割機構11之移動而一起移動之球狀或輪狀(圓筒狀)之構件形成上述切割台12之情形時,於切割玻璃基板1時,由於藉由上述球狀或輪狀構件之周面之頂點部承受來自上述切割機構11之負荷(按壓力),因此施加於切割機構11之刀尖之力集中於垂直方向上,因此能夠形成深度(切入量)穩定之切割線。 Further, when the cutting table 12 is formed of a spherical or wheel-shaped (cylindrical) member that can move together with the movement of the cutting mechanism 11, the glass substrate 1 is cut by the spherical shape. Or the apex portion of the circumferential surface of the wheel member receives the load (pressing force) from the cutting mechanism 11, so that the force applied to the cutting edge of the cutting mechanism 11 is concentrated in the vertical direction, so that the depth (cut amount) can be stabilized. Cutting line.

接下來,對上述端面加工裝置20進行說明。 Next, the above-described end surface processing apparatus 20 will be described.

圖4係示出用於端面加工步驟之端面加工裝置之一例之立體圖。以下,參照圖4及上文提及之圖2、圖3進行說明。 Fig. 4 is a perspective view showing an example of an end surface processing apparatus for an end surface processing step. Hereinafter, description will be made with reference to Fig. 4 and Figs. 2 and 3 mentioned above.

上述端面加工裝置20係於其內部具有整體由圓筒狀之磨石製成之研削輪21及其驅動機構及控制機構等。於研削輪21,形成有遍及其周面之水平方向全周而向內側凹陷之研削槽22,該研削槽22具有能夠相對於玻璃基板之端面形成特定之倒角面之形狀。作為構成研削輪21之磨石,只要係能夠用於普通玻璃之研削加工之磨石即可,不論其種類。研削輪21構成為例如能夠沿圖4中所示之箭頭方向旋轉。 The end surface processing apparatus 20 has a grinding wheel 21 which is entirely made of a cylindrical grindstone, a drive mechanism, a control mechanism, and the like. The grinding wheel 21 is formed with a grinding groove 22 which is recessed all the way in the horizontal direction of the circumferential surface thereof, and the grinding groove 22 has a shape capable of forming a specific chamfered surface with respect to the end surface of the glass substrate. The grindstone constituting the grinding wheel 21 may be any type of grindstone that can be used for grinding of ordinary glass, regardless of its type. The grinding wheel 21 is configured to be rotatable, for example, in the direction of the arrow shown in FIG.

上述端面加工裝置20設置為其研削輪21與玻璃基板1之兩側端面1a分別對置。並且,端面加工裝置20朝向保持於搬送台30上而移動來之玻璃基板1之兩端面1a之各者,壓抵旋轉之研削輪21,藉此研削端面1a,進行倒角加工。再者,亦可設為如下之構成:暫且停止玻璃基板1之移動,朝向玻璃基板1之兩端面1a之各者,壓抵旋轉之研削輪21,進而使研削輪21沿玻璃基板1之端面1a移動。 The end surface processing apparatus 20 is provided such that the grinding wheel 21 and the both end faces 1a of the glass substrate 1 face each other. Then, the end surface processing apparatus 20 presses the grinding wheel 21 against the rotating grinding wheel 21 toward the both end faces 1a of the glass substrate 1 which are moved by the conveyance table 30, and grinds the end surface 1a, and performs chamfering processing. In addition, the glass substrate 1 may be temporarily stopped, and the grinding wheel 21 may be pressed against the rotating grinding wheel 21 toward the both end faces 1a of the glass substrate 1, and the grinding wheel 21 may be placed along the end surface of the glass substrate 1. 1a moves.

再者,圖2、圖3中示出之導引用台40係於搬送台30之兩側配置 於隔開固定距離程度之位置上,且用於將玻璃基板1之兩端部(兩端面1a)分別導引至上述研削輪21之研削槽22之導引構件。尤其,當玻璃基板1為薄板時,由於兩端部撓曲,因此需要用於將玻璃基板1之兩端部分別導引至上述研削輪21之導引構件。亦即,上述導引用台40係於玻璃基板1之端部之高度方向上進行定位之機構。作為導引構件,例如可使用基於液體之懸浮吸附面板。該導引用台40可根據玻璃基板兩端部之撓曲量,於上下方向移動地進行調整,從而可將玻璃基板1之兩端部分別適當地導引至上述研削輪21之加工點。又,該導引用台40之與搬送台30之位置關係可根據切割後之玻璃基板之製品尺寸,與端面加工裝置20之位置一起進行適當調整。 Furthermore, the guide table 40 shown in FIGS. 2 and 3 is disposed on both sides of the transfer table 30. At a position separated by a fixed distance, the guide members for guiding the both end portions (both end faces 1a) of the glass substrate 1 to the grinding grooves 22 of the grinding wheel 21, respectively. In particular, when the glass substrate 1 is a thin plate, since both end portions are deflected, a guide member for guiding both end portions of the glass substrate 1 to the grinding wheel 21 is required. In other words, the guiding table 40 is a mechanism for positioning in the height direction of the end portion of the glass substrate 1. As the guiding member, for example, a liquid-based suspension adsorption panel can be used. The guide table 40 can be adjusted to move in the vertical direction according to the amount of deflection of both end portions of the glass substrate, so that both end portions of the glass substrate 1 can be appropriately guided to the processing points of the grinding wheel 21. Further, the positional relationship between the guide table 40 and the transfer table 30 can be appropriately adjusted in accordance with the size of the product of the glass substrate after cutting, together with the position of the end surface processing device 20.

如此,若玻璃基板1之兩端面1a中之一個之加工結束,則將玻璃基板1旋轉90度,對兩端面中之另一個同樣地進行。 When the processing of one of the both end faces 1a of the glass substrate 1 is completed, the glass substrate 1 is rotated by 90 degrees, and the other of the both end faces is performed similarly.

如上所述般進行玻璃基板1之切割線形成、端部切割、端面加工,但如上所述,於本實施形態中,特徵性構成在於,上述玻璃基板1一面吸附保持於搬送台30上一面進行搬送,一面於將上述玻璃基板1保持於搬送台30上之狀態下,使上述玻璃基板1與上述搬送台30一體地沿玻璃基板搬送路徑移動,一面實施上述切割步驟及端面加工步驟。並且,於本實施形態中,設為如下構成:為了使上述玻璃基板1與上述搬送台30一體地沿玻璃基板搬送路徑移動,上述搬送台30於設置於玻璃基板搬送路徑之行駛軸60上移動。 As described above, the dicing line formation, the end dicing, and the end surface processing of the glass substrate 1 are performed as described above. However, in the present embodiment, the glass substrate 1 is adsorbed and held on the transfer table 30 while being held. In the state in which the glass substrate 1 is held on the transfer table 30, the glass substrate 1 and the transfer table 30 are integrally moved along the glass substrate transport path, and the cutting step and the end surface processing step are performed. In the present embodiment, in order to move the glass substrate 1 and the transfer table 30 integrally along the glass substrate transport path, the transfer table 30 moves on the travel axis 60 provided on the glass substrate transport path. .

根據上述構成,切割步驟中之加工點(切割線形成位置)與端面加工步驟中之加工點設置於沿玻璃基板搬送路徑之同一條線上。亦即,於上述切割步驟中,藉由使玻璃基板1與上述搬送台30一體地移動,形成平行於上述玻璃基板搬送路徑之切割線,並沿該切割線切割端部。然後,繼而,藉由使玻璃基板1與上述搬送台30一體地於玻璃基板搬送路徑上移動,而於上述端面加工步驟中,將端面加工之加工點 設置於上述切割線形成位置之延長線上,從而實施端面加工。因此,無需先前之端面加工前之對準,不進行對準,便可高精度地進行端面加工。又,由於能夠減少端面加工時之加工餘量,無需向研削輪21施加過度之負荷便可進行加工,因此亦可延長工具之壽命。 According to the above configuration, the machining point (cutting line forming position) in the cutting step and the machining point in the end surface processing step are provided on the same line along the glass substrate conveying path. That is, in the dicing step, the glass substrate 1 and the transfer table 30 are integrally moved to form a dicing line parallel to the glass substrate transport path, and the end portion is cut along the dicing line. Then, by moving the glass substrate 1 and the transfer table 30 integrally on the glass substrate transfer path, the processing point of the end face processing is performed in the end face processing step. The end surface processing is performed by being disposed on an extension line of the above-described cutting line forming position. Therefore, the end face processing can be performed with high precision without the alignment before the previous end face machining without alignment. Further, since the machining allowance at the time of end face machining can be reduced, it is possible to perform machining without applying an excessive load to the grinding wheel 21, and thus the life of the tool can be extended.

於本實施形態中,上述搬送台30為於設置於上述玻璃基板搬送路徑之行駛軸60上移動之構成,但上述行駛軸60可設置為例如行進方向精度±30μm、高度方向精度±40μm。 In the present embodiment, the transport table 30 is configured to move on the travel axis 60 provided on the glass substrate transport path. However, the travel axis 60 may be provided with, for example, a traveling direction accuracy of ±30 μm and a height direction accuracy of ±40 μm.

例如,於形成上述切割線之步驟中,存在上述行駛軸60之高度方向精度影響切割線之直線性之情形。若玻璃基板1於高度方向變動,則有如未穩定地形成切割線,切割線未達到期望之深度,或者上述切割機構11滑動而無法形成切割線等之虞。 For example, in the step of forming the above-described cutting line, there is a case where the accuracy of the height direction of the traveling shaft 60 affects the linearity of the cutting line. When the glass substrate 1 is changed in the height direction, the cutting line is not stably formed, the cutting line does not reach a desired depth, or the cutting mechanism 11 is slid, and a cutting line or the like cannot be formed.

對此,以使玻璃基板1之端部自吸附保持並搬送玻璃基板1之搬送台30突出特定量以上,至少5mm以上、例如30mm以上之方式設置,藉此利用上述突出之區域吸收因上述行駛軸60之直線性導致之於搬送台30上之上下之變動,並且藉由導引構件將玻璃基板1之端面穩定地支持於加工點處,因此能夠抑制影響傳遞至切割線之形成區域。 On the other hand, the end portion of the glass substrate 1 is placed at a distance of at least 5 mm or more, for example, 30 mm or more, from the transfer table 30 that is adsorbed and held by the glass substrate 1 so as to absorb the end portion of the glass substrate 1 by the above-mentioned protruding region. The linearity of the shaft 60 causes a change in the upper and lower sides of the transfer table 30, and the end surface of the glass substrate 1 is stably supported at the processing point by the guide member, so that the formation region affected by the transfer to the dicing line can be suppressed.

又,考慮到如下情形:受上述行駛軸60於行進方向之起伏之影響,會產生因端面加工導致之端面之品質不穩定之問題。於此種情形時,例如藉由測定端面加工後之玻璃基板之端面之直線性,並控制上述研削輪21之X軸方向(亦即玻璃基板之面內且與基板搬送方向正交之方向),能夠提高加工精度,使端面品質穩定。例如,測定加工後之端面之形狀,並根據測定出之端面之形狀,算出加工步驟中研削輪相對於玻璃基板之軌跡即加工線,並根據算出之加工線,算出用於對端面進行均勻加工之調整線,於算出調整線之情形時,以研削輪21相對於玻璃基板之軌跡沿上述調整線之方式進行X軸方向之控制,加工端面(本申請人之前提交之日本專利特願2014-115299)。 Further, it is considered that the influence of the undulation of the traveling shaft 60 in the traveling direction causes a problem that the quality of the end surface due to the end surface processing is unstable. In such a case, for example, the linearity of the end surface of the glass substrate after the end surface processing is measured, and the X-axis direction of the grinding wheel 21 (that is, the direction perpendicular to the substrate transport direction in the plane of the glass substrate) is controlled. It can improve the processing precision and stabilize the end face quality. For example, the shape of the end surface after the processing is measured, and the processing line of the grinding wheel with respect to the glass substrate in the processing step is calculated based on the shape of the measured end surface, and the end surface is uniformly processed according to the calculated processing line. In the case of calculating the adjustment line, the X-axis direction is controlled by the trajectory of the grinding wheel 21 with respect to the glass substrate along the adjustment line, and the end surface is processed (Japanese Patent Application No. 2014- filed by the present applicant) 115299).

於本創作中,上述玻璃基板1之厚度例如為0.01mm~1.0mm。又,本創作尤其適用於板厚為0.3mm以下(例如,0.05mm~0.3mm)之薄板之玻璃基板之製造。 In the present creation, the thickness of the glass substrate 1 is, for example, 0.01 mm to 1.0 mm. Moreover, the present invention is particularly suitable for the manufacture of a glass substrate having a sheet thickness of 0.3 mm or less (for example, 0.05 mm to 0.3 mm).

玻璃基板越薄,則切割線之形成越不穩定,又,端部易撓曲,先前於端面加工前進行之對準越困難,但對於此種薄板之玻璃基板之製造,本創作效果顯著。即便為先前之對準困難之薄板之玻璃基板之端面加工,亦可不進行對準,而對切割後之端面高精度地進行加工。尤佳為,適用於板厚為0.2mm以下之玻璃基板之製造,進而較佳為,適用於板厚為0.1mm以下之玻璃基板之製造。 The thinner the glass substrate is, the more unstable the formation of the dicing line is, and the end portion is easily deflected. The previous alignment before the end surface processing is more difficult, but the creation effect is remarkable for the manufacture of the glass substrate of the thin plate. Even if the end surface of the glass substrate of the sheet which has been previously difficult to be aligned is processed, the end surface after the dicing can be processed with high precision without alignment. More preferably, it is suitable for the production of a glass substrate having a thickness of 0.2 mm or less, and is preferably applied to the production of a glass substrate having a thickness of 0.1 mm or less.

如以上所說明般,根據本創作,於將成形為板狀之玻璃基板載置於搬送台上之狀態下,使玻璃基板與搬送台一體地沿玻璃基板搬送路徑移動,藉此,於切割步驟中藉由切割機構所形成之切割線與端面加工步驟中之端面加工之加工點位於沿玻璃基板搬送路徑之同一條線上,因此,無需先前進行之端面加工前之對準,不進行對準,便可高精度地進行端面加工。藉此,可製造高品質之玻璃基板。 As described above, in the state in which the glass substrate formed into a plate shape is placed on the transfer table, the glass substrate and the transfer table are integrally moved along the glass substrate transport path, thereby performing the cutting step. The cutting line formed by the cutting mechanism and the processing point of the end surface processing in the end surface processing step are located on the same line along the glass substrate transport path, so that alignment before the end surface processing is not required, and alignment is not performed. End face machining can be performed with high precision. Thereby, a high quality glass substrate can be manufactured.

以上,對本創作之一實施形態進行了說明,但本創作並不限定於上述實施形態,可於不脫離本創作之主旨之範圍內,進行各種改良或變更。 In the above, the embodiment of the present invention has been described. However, the present invention is not limited to the above-described embodiments, and various modifications and changes can be made without departing from the spirit of the invention.

(變化例) (variation)

於上述實施形態中,首先切割去除形成於從自成形裝置供給之連續之平板玻璃中分離出之1片玻璃之兩端之、具有厚度之外側區域(所謂之邊料),為使獲得之玻璃基板1進而形成為特定之尺寸,藉由上述切割步驟進行切割。作為此種實施形態之變化例,可設為如下之構成:對於上述自連續之平板玻璃中分離出之1片玻璃,不首先切割去除上述之所謂邊料,而係為使其直接形成為特定之製品尺寸而藉由上述切割步驟進行切割。於此情形時,於切割步驟中,切割除了包括 上述邊料之製品區域之外之端部。 In the above embodiment, first, the outer side region (so-called edge material) having a thickness formed on both ends of one glass separated from the continuous flat glass supplied from the forming device is cut and removed, so that the obtained glass is obtained. The substrate 1 is further formed into a specific size, and is cut by the above-described cutting step. As a variation of the embodiment, a configuration may be adopted in which one of the glass separated from the continuous flat glass is directly cut into a specific one without first cutting and removing the so-called edge material. The product size is cut by the above cutting step. In this case, in the cutting step, the cutting is included in addition to The end of the above-mentioned edge material outside the product area.

如本變化例,若帶有邊料,則由於基板之剛性較高,因此自單片切割至進入加工步驟之處理相對較為容易。尤其,於自0.2mm以下之薄玻璃片中分離出之玻璃基板中,不切割邊料而搬送、操作至加工裝置,藉此能夠於保持玻璃剛性之狀態下進行處理,因此較佳。 According to the present variation, if the edge material is provided, since the rigidity of the substrate is high, the process from the single sheet cutting to the processing step is relatively easy. In particular, in the glass substrate separated from the thin glass piece of 0.2 mm or less, it is preferable to carry out the processing without being cut and trimming the material to the processing apparatus while maintaining the rigidity of the glass.

1‧‧‧玻璃基板 1‧‧‧ glass substrate

1a‧‧‧玻璃基板之端面 1a‧‧‧End face of glass substrate

2‧‧‧除製品區域之外之端部 2‧‧‧Ends other than the product area

10‧‧‧切割裝置 10‧‧‧ cutting device

11‧‧‧切割機構 11‧‧‧ cutting mechanism

12‧‧‧切割台 12‧‧‧ cutting table

21‧‧‧研削輪 21‧‧‧ grinding wheel

22‧‧‧研削槽 22‧‧‧ Grinding trough

30‧‧‧搬送台 30‧‧‧Transportation station

40‧‧‧導引用台 40‧‧‧Guide

50‧‧‧虛線 50‧‧‧ dotted line

60‧‧‧行駛軸 60‧‧‧Travel axle

Claims (10)

一種玻璃基板之製造設備,其特徵在於包括:切割裝置(10),其將成形為板狀之玻璃基板切割為特定之寬度;端面加工裝置(20),其對切割後之玻璃基板之端面實施端面加工;及搬送台(30),其供載置上述玻璃基板;且上述切割裝置具有將上述玻璃基板切割為上述寬度之切割機構(11),一面於將上述玻璃基板載置於上述搬送台上之狀態下,使上述玻璃基板與上述搬送台一體地沿玻璃基板搬送路徑移動,一面於上述端面加工前不進行上述端面之對準下,藉由上述切割機構將上述玻璃基板切割為上述寬度。 A manufacturing apparatus for a glass substrate, comprising: a cutting device (10) for cutting a glass substrate formed into a plate shape into a specific width; and an end surface processing device (20) for performing an end surface of the glass substrate after the cutting End surface processing; and a transfer table (30) for mounting the glass substrate; and the dicing device has a cutting mechanism (11) for cutting the glass substrate into the width, and placing the glass substrate on the transfer table In the upper state, the glass substrate is moved along the glass substrate transport path integrally with the transfer table, and the glass substrate is cut into the width by the cutting mechanism without the alignment of the end faces before the end surface processing. . 如請求項1之玻璃基板之製造設備,其中上述切割裝置(10)進而包括切割台(12),上述切割機構(11)係以於上述玻璃基板之特定之切割位置處形成切割線之方式於上述玻璃基板之第一面上移動,上述切割台(12)係於上述玻璃基板之與上述第一面相反之第二面上以與上述玻璃基板對向之方式配置。 The manufacturing apparatus of the glass substrate of claim 1, wherein the cutting device (10) further comprises a cutting table (12), wherein the cutting mechanism (11) forms a cutting line at a specific cutting position of the glass substrate. The first surface of the glass substrate is moved, and the cutting table (12) is disposed on a second surface opposite to the first surface of the glass substrate so as to face the glass substrate. 如請求項1之玻璃基板之製造設備,其中上述端面加工裝置(20)包括研削輪(21)以及驅動上述研削輪之驅動機構及控制機構,於上述研削輪,形成有遍及其周面之水平方向全周而向內側凹陷之研削槽(22),上述研削槽具有能夠對於上述玻璃基板之端面形成特定之倒角面之形狀。 The apparatus for manufacturing a glass substrate according to claim 1, wherein the end surface processing device (20) includes a grinding wheel (21) and a driving mechanism and a control mechanism for driving the grinding wheel, and the grinding wheel is formed at a level of the circumferential surface thereof. The grinding groove (22) which is recessed toward the inner side in the entire direction, and the grinding groove has a shape capable of forming a specific chamfered surface with respect to the end surface of the glass substrate. 如請求項1之玻璃基板之製造設備,其中 上述搬送台(30)於設置於上述玻璃基板搬送路徑之行駛軸(60)上移動。 The manufacturing apparatus of the glass substrate of claim 1, wherein The transfer table (30) moves on a travel shaft (60) provided on the glass substrate transport path. 如請求項1至4中任一項之玻璃基板之製造設備,其中藉由上述切割機構(11)而形成之切割線與上述端面加工裝置(20)之加工點位於沿上述玻璃基板搬送路徑之同一條線上。 The manufacturing apparatus of the glass substrate according to any one of claims 1 to 4, wherein a cutting line formed by the cutting mechanism (11) and a processing point of the end surface processing apparatus (20) are located along the glass substrate conveying path The same line. 如請求項1至4中任一項之玻璃基板之製造設備,其中於所要切割之玻璃基板之至少一端具有厚度與上述玻璃基板之中央區域不同之外側區域,上述切割機構將上述外側區域切割去除。 The apparatus for manufacturing a glass substrate according to any one of claims 1 to 4, wherein at least one end of the glass substrate to be cut has an outer side region having a thickness different from a central portion of the glass substrate, and the cutting mechanism cuts the outer region . 如請求項1至4中任一項之玻璃基板之製造設備,其中上述端面加工裝置包括導引機構(40),該導引機構(40)用於將上述玻璃基板之端面導引至上述端面加工機構。 The apparatus for manufacturing a glass substrate according to any one of claims 1 to 4, wherein the end surface processing apparatus includes a guiding mechanism (40) for guiding an end surface of the glass substrate to the end surface Processing organization. 如請求項7之玻璃基板之製造設備,其中上述導引機構係用於將上述玻璃基板(1)之兩端部(1a)分別導引至上述研削輪(21)之上述研削槽(22)之導引用台(40),上述導引用台(40)於上述搬送台(30)之兩側配置於相對於上述搬送台(30)隔開固定距離之位置上。 The apparatus for manufacturing a glass substrate according to claim 7, wherein the guiding mechanism is for guiding the both end portions (1a) of the glass substrate (1) to the grinding grooves (22) of the grinding wheel (21), respectively. The guiding table (40), the guiding table (40) is disposed at a position spaced apart from the transfer table (30) by a fixed distance on both sides of the transfer table (30). 如請求項1至4中任一項之玻璃基板之製造設備,其中上述切割機構係相對於上述玻璃基板面旋轉移動之刀輪。 The apparatus for manufacturing a glass substrate according to any one of claims 1 to 4, wherein the cutting mechanism is a cutter wheel that is rotationally moved with respect to the surface of the glass substrate. 如請求項2之玻璃基板之製造設備,其中上述切割台由能夠隨上述切割機構之移動而移動之球狀或圓筒狀之構件形成。 A manufacturing apparatus for a glass substrate according to claim 2, wherein said cutting table is formed of a spherical or cylindrical member movable with the movement of said cutting mechanism.
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