TWM514004U - Integrated circuit inspection device and inspection equipment - Google Patents

Description

Integrated circuit detection device and detection device

The present invention relates to a detecting device, and more particularly to a detecting device and a detecting device for an integrated circuit.

With the development of technology, many information electronic products are designed in a light, short, and short direction, but the functions they have can only be increased but not reduced. Under such circumstances, the electronic circuits are integrated and made into Integrated circuit (IC) that can perform a variety of functions. Due to the complicated structure in the integrated circuit, the line width is narrow, the manufacturing has certain difficulty, and the required manufacturing cost is high, and the relative quality and yield are required. Control is also becoming more important. Before the factory is assembled, it must pass the test of the test machine. The test machine mainly includes a test socket and a test circuit board. After the test socket is used to place the integrated circuit, the integrated circuit passes through the test socket. It is electrically connected to the test board for detection.

The detecting device for the integrated circuit mainly includes a base and a cover pivotally connected to the base. The base is provided with a recess, and a conductive structure is disposed in the recess, and a bottom surface of the cover is provided with a pressing force. a unit, wherein the conductive structure is provided with a positioning portion fixed to the integrated circuit to be tested, and a plurality of through holes corresponding to the position of the bottom solder ball of the integrated circuit to be tested are disposed in the positioning portion, and the through hole is used for socket fixing The solder ball of the integrated circuit to be tested is positioned on the positioning portion of the integrated circuit to be tested, and a conductive portion for conducting the integrated circuit to be tested and the test circuit board is disposed under the positioning portion, and the integrated circuit to be tested is pressed by The pressing of the unit is conducted in contact with the conductive portion, and is measured by guiding the conductive member in the conductive portion to the test circuit board.

However, although the detecting device for the integrated circuit has a detection effect, there is a case where the pressing unit is pressed against the integrated circuit, and the probe of the conductive portion is broken. In addition, the positioning part is generally convenient for the integrated circuit to be easily inserted, and the cooperation between the two is relatively loose, which often leads to inaccurate alignment of the integrated circuit and the probe, and needs to be improved.

One of the aims of the present invention is to provide a detection device and a detection device for an integrated circuit, which can achieve rapid positioning and accurate retention.

In order to achieve the above object, the present invention provides a detecting device for an integrated circuit, comprising a carrier, a clamping positioning mechanism and a cover plate, the carrier is mounted with a probe station; the clamping positioning mechanism comprises a lower base a seat, an elastic body, an upper base and a pair of elastic clamping arms, the lower base being disposed corresponding to the probe station, the elastic body being elastically clamped between the probe table and the lower base, the upper portion The base is superposed on the lower base, and the upper base is provided with a wafer receiving slot, and the pair of elastic clamping arms are movably disposed in the wafer receiving groove; the cover is fixed to the carrying base, the cover The plate is provided with an opening at a position corresponding to the groove of the wafer, and a sliding structure is provided between the pair of elastic clamping arms and the cover plate to enable the pair of elastic clamping arms to be fixed to the integrated circuit.

In order to achieve the above object, the present invention provides an apparatus for detecting an integrated circuit, comprising a carrier, a plurality of clamping positioning mechanisms and a cover plate, the carrier is mounted with a plurality of probe stations; each of the clamping positioning mechanisms Corresponding to each of the probe station assemblies, each of the clip positioning mechanisms includes a lower base, an elastic body, an upper base and a pair of elastic clamp arms, the lower base corresponding to the probe station configuration, The elastic body is elastically clamped between the probe station and the lower base, the upper base is superposed on the lower base, and a wafer receptacle is disposed on the upper base, and the pair of elastic clamp arms Removably disposed in the chip pocket; the cover is fixed to the carrier, and the cover is respectively provided with an opening at a position corresponding to each of the chip pockets. And a sliding structure is disposed between each of the elastic clamping arms and the cover plate so that each of the elastic clamping arms can be respectively fixed to the integrated circuit.

The creation also has the following effects: the sliding structure is arranged between the cover plate and the elastic clamping arm, and when the base is pressed down, the elastic clamping arms can be simultaneously driven to clamp the integrated circuit, and the use is further increased. Convenience. By setting the V-shaped groove of the T-shaped moving block, the diagonal of the integrated circuit can be accurately positioned.

1‧‧‧Detection device

10‧‧‧Hosting

11‧‧‧Probe station

12‧‧‧Elastic probe

13‧‧‧ screw holes

20‧‧‧ pinch positioning mechanism

21‧‧‧Lower base

211‧‧‧ Rectangular board

212‧‧‧ corner column

213‧‧‧Perforation

214‧‧‧ Guide hole

22‧‧‧ Elastomers

23‧‧‧Upper base

231‧‧‧ wafer pocket

232‧‧‧ guiding slot

233‧‧‧Positioning column

24‧‧‧Flexible clamp arm

241‧‧‧T-type moving block

242‧‧‧V-groove

243‧‧‧ jack

244‧‧‧First slope

245‧‧‧elastic thimble

30‧‧‧ Cover

31‧‧‧ openings

32‧‧‧Bump

321‧‧‧second slope

33‧‧‧through hole

A‧‧‧Sliding structure

8‧‧‧Integrated circuit

1A‧‧‧Testing equipment

100‧‧‧ bearing seat

300‧‧‧ cover

Fig. 1 is an exploded view of the detecting device of the integrated circuit of the present invention.

Fig. 2 is another exploded perspective view of the detecting device of the integrated circuit of the present invention.

Fig. 3 is a view showing the combined appearance of the detecting device of the integrated circuit of the present invention.

Fig. 4 is a plan view showing the detection device of the present invention applied to an integrated circuit.

Figure 5 is a cross-sectional view taken along line 5-5 of Figure 4.

Figure 6 is a cross-sectional view taken along line 6-6 of Figure 4.

Fig. 7 is a cross-sectional view showing the clip positioning mechanism of the present invention being depressed.

Figure 8 is a cross-sectional view showing the other direction in which the clip positioning mechanism of the present invention is depressed.

Fig. 9 is a perspective view showing the combination of the detecting devices of the integrated circuit of the present invention.

The detailed description and technical content of the present invention are described below with reference to the drawings, but the drawings are only for reference and explanation, and are not intended to limit the creation.

Referring to FIG. 1 to FIG. 3 , the present invention provides an apparatus for detecting an integrated circuit. The detecting device 1 of the integrated circuit mainly includes a carrier 10 , a clamping mechanism 20 and a cover 30 .

The carrier 10 is substantially a hollow rectangular body, and a probe station 11 is mounted therein, and a plurality of elastic probes 12 are disposed on the probe station 11, and a screw hole is respectively disposed at a corner end of the top surface of the carrier 10. 13.

The clamping positioning mechanism 20 is mounted corresponding to the probe station 11 of the carrier 10, and the clamping positioning mechanism 20 mainly comprises a lower base 21, an elastic body 22, an upper base 23 and a pair of elastic clamping arms 24, wherein the lower base The seat 21 includes a rectangular plate 211 and a corner post 212 extending upward from the four end corners of the rectangular plate 211. The elastic body 22 can be a coil spring which is sleeved on the outer periphery of the probe base 11 and has an elastic body. The two ends of the hole 22 are respectively elastically abutted between the probe table 11 and the rectangular plate 211; and a plurality of through holes 213 corresponding to the elastic probes 12 are sleeved in the middle portion of the rectangular plate 211, and are respectively located at the periphery of each of the through holes 213. The area is provided with a plurality of guiding holes 214.

The upper base 23 is overlapped with the rectangular plate 211 of the lower base 21, and the upper base 23 is also substantially a rectangular block. A chip receptacle 231 is defined in the middle portion, and a pair of angular positions on the bottom surface of the upper base 23 A guiding slot 232 is formed, and a plurality of positioning posts 233 are respectively connected to the two sides of the guiding slot 232. The positioning posts 233 are respectively connected to the guiding holes 214.

Each of the elastic clamping arms 24 mainly includes a T-shaped moving block 241 and an elastic thimble 245. Each of the T-shaped moving blocks 241 is respectively mounted in the guiding groove 232 and operably movable in the guiding slot 222. The bottom end of the movable block 241 is formed with a V-shaped groove 242, and the top end is provided with a receiving hole 243. One end of the elastic thimble 242 is inserted into the insertion hole 243, and is elastically clamped between the T-shaped moving block 241 and the corner post 212. .

The cover plate 30 is a rectangular plate body corresponding to the connection of the aforementioned carrier 10, and a rectangular opening 31 for exposing the upper base 23 is opened in the middle portion of the cover plate 30. In addition, a first inclined surface 244 is formed on each of the two wings of the T-shaped moving block 241, and the opening 31 of the cover 30 extends at a corresponding angular end. a pair of protrusions 32, which are disposed corresponding to the two side wings of the T-shaped moving block 241, and a second inclined surface 321 is disposed at a position corresponding to the first inclined surface 244 of the protrusion 32, wherein the second slope 321 The first bevel 244 is opposite to the oblique direction and is in sliding contact with each other, and constitutes a sliding structure A of the present invention (as shown in FIG. 6). Further, a through hole 33 is defined in each corner end of the cover plate 30, and each of the through holes 33 is disposed corresponding to the screw hole 13 of the carrier 10 for screwing a screw member such as a screw.

Referring to FIG. 4 to FIG. 6 , the detecting device 1 of the present invention can be applied to the detection of an integrated circuit 8 . In the operation, each elastic probe 12 is first electrically connected to a detecting machine (not shown). The integrated circuit 8 is placed in the wafer pocket 231 of the upper pedestal 23, and since the outer shape of the integrated circuit 8 is substantially similar to the outer shape of the wafer pocket 231, the corner ends of the integrated circuit 8 are formed correspondingly. At the corner end position of the wafer pocket 231, the integrated circuit 8 is not electrically connected to each of the elastic probes 12 at this time.

Referring to FIG. 7 and FIG. 8 , when the upper base 23 is pressed downward, each T-shaped moving block 241 is pushed by the elastic thimble 245 while the first inclined surface 244 slides along the second inclined surface 321 . Each of the T-shaped moving blocks 241 will be positioned with its V-shaped groove 242 corresponding to a set of diagonals of the integrated circuit 8; then, in the process of the upper base 23 sinking downward, the integrated circuit 8 will be The elastic probes 12 are electrically connected to each other, so that various performance parameters of the integrated circuit 8 are known.

Referring to FIG. 9 , the present invention further provides an apparatus for detecting an integrated circuit. The detecting device 1A mainly includes a carrier 100 , a plurality of clamping and positioning mechanisms 20 , and a cover 300 . The carrier 100 is mounted with a plurality of probes. The stage 11, each probe station 11 is provided with a plurality of elastic probes 12 (see Fig. 1). Each of the clamping and positioning mechanisms 20 is disposed corresponding to each of the probe stations 11. Since each of the clamping and positioning mechanisms 20 is the same as the clamping and positioning mechanism 20 of the foregoing embodiment, the description thereof will not be repeated. The cover plate 300 is fixed above the bearing base 100. The cover plate 300 is respectively provided with an opening 31 (refer to FIG. 1) at a position corresponding to each of the chip receiving slots 231, and is disposed between each elastic clamping arm 24 and the cover 300. Have elastic clips The arm 24 can clamp a fixed sliding structure to the integrated circuit 8 (see FIG. 8), so that the majority of the integrated circuit 8 can be detected at the same time, thereby improving the detection performance.

In summary, the detection device and testing equipment of the integrated circuit of the present invention can achieve the intended purpose of use, and solve the lack of conventional knowledge, and because of the novelty and progress, fully comply with the requirements of the new patent application, To file an application in accordance with the Patent Law, please check and grant the patent in this case to protect the rights of the creator.

1‧‧‧Detection device

10‧‧‧Hosting

20‧‧‧ pinch positioning mechanism

21‧‧‧Lower base

212‧‧‧ corner column

213‧‧‧Perforation

214‧‧‧ Guide hole

22‧‧‧ Elastomers

23‧‧‧Upper base

231‧‧‧ wafer pocket

232‧‧‧ guiding slot

233‧‧‧Positioning column

24‧‧‧Flexible clamp arm

241‧‧‧T-type moving block

242‧‧‧V-groove

243‧‧‧ jack

244‧‧‧First slope

245‧‧‧elastic thimble

30‧‧‧ Cover

31‧‧‧ openings

32‧‧‧Bump

321‧‧‧second slope

33‧‧‧through hole

Claims (14)

A detecting device for an integrated circuit includes: a carrier having a probe station; a clamping mechanism including a lower base, an elastic body, an upper base and a pair of elastic clamping arms, the lower base Corresponding to the probe station configuration, the elastic body is elastically clamped between the probe table and the lower base, the upper base is superposed on the lower base, and a wafer capacity is disposed on the upper base a slot, the pair of elastic clip arms are movably disposed in the wafer pocket; a cover plate is fixed to the carrier, the cover plate is provided with an opening at a position corresponding to the chip pocket, and the pair of elastic clamp arms A sliding structure is provided between the cover plate for enabling the pair of elastic clip arms to be clamped to the integrated circuit. The detecting device of the integrated circuit of claim 1, wherein the probe table is provided with a plurality of elastic probes, and the lower base comprises a rectangular plate, and the rectangular plate is opened for each elastic probe to pass through. The plural perforation. The detecting device of the integrated circuit of claim 2, wherein the lower base further comprises a corner post extending upward from each corner end of the rectangular plate, the elastic clamping arm comprising a T-shaped moving block and an elastic thimble. The elastic thimble is elastically clamped between the T-shaped moving block and the corner post. The detecting device of the integrated circuit of claim 3, wherein the bottom end of the T-shaped moving block is formed with a V-shaped groove, and a top end of the T-shaped moving block is provided with a socket for inserting the elastic thimble. The detecting device of the integrated circuit of claim 3, wherein a pair of studs respectively extend at corresponding corner ends of the opening of the cover, the pair of studs being disposed on opposite sides of the T-shaped moving block, The sliding structure includes a first inclined surface formed on the T-shaped moving block and a second inclined surface formed on the protruding post. The second inclined surface and the first inclined surface are opposite to each other and are in sliding contact with each other. The detecting device of the integrated circuit of claim 3, wherein the upper base is provided with a guiding slot that communicates with the wafer pocket, and the T-shaped moving block is mounted in the guiding slot and is operatively movable. The detecting device of the integrated circuit of claim 2, wherein the rectangular plate of the lower base is provided with a plurality of guiding holes, and the upper base is connected with a plurality of positioning posts that are respectively connected to the guiding holes. The invention relates to a detection device for an integrated circuit, comprising: a carrier, a plurality of probe stations are mounted; a plurality of clamping and positioning mechanisms are respectively arranged corresponding to the probe stations, and each of the clamping positioning mechanisms comprises a lower base and a An elastic body, an upper base and a pair of elastic clamping arms, the lower base being disposed corresponding to the probe station, the elastic body being elastically clamped between the probe table and the lower base, the upper base stack Connected to the lower base, and a wafer receiving slot is disposed on the upper base, the pair of elastic clamping arms are movably disposed in the wafer receiving slot; a cover plate is fixed to the carrying base, and the cover is An opening is respectively disposed at a position corresponding to each of the chip pockets, and a sliding structure is disposed between each of the elastic clip arms and the cover plate to enable each of the elastic clip arms to be respectively fixed to the integrated circuit . The detecting device of the integrated circuit of claim 8, wherein the probe table is provided with a plurality of elastic probes, and the lower base comprises a rectangular plate, and the rectangular plate is opened for each elastic probe to pass through. The plural perforation. The detecting device of the integrated circuit of claim 9, wherein the lower base further comprises a corner post extending upward from each corner end of the rectangular plate, the elastic clamping arm comprising a T-shaped moving block and an elastic thimble. The elastic thimble is elastically clamped between the T-shaped moving block and the corner post. The detecting device of the integrated circuit of claim 10, wherein the bottom end of the T-shaped moving block is formed with a V-shaped groove, and a top end of the T-shaped moving block is provided with a socket for inserting the elastic ejector pin. The detecting device of the integrated circuit of claim 10, wherein a pair of studs respectively extend at corresponding corner ends of the opening of the cover, the pair of studs being disposed on opposite sides of the T-shaped moving block, The sliding structure includes a first inclined surface formed on the T-shaped moving block and a second inclined surface formed on the protruding post. The second inclined surface and the first inclined surface are opposite to each other and are in sliding contact with each other. The detecting device of the integrated circuit according to claim 10, wherein the upper base is provided with a guiding groove that communicates with the groove of the wafer, and the T-shaped moving block is mounted in the guiding groove and is operatively movable. The detecting device of the integrated circuit of claim 9, wherein the rectangular plate of the lower base is provided with a plurality of guiding holes, and the upper base is connected with a plurality of positioning posts that are respectively connected to the guiding holes.