TWM473518U - Probe card - Google Patents

Description

Probe card

This creation is related to the probe card, especially a probe card that uses a coupler.

With the development of portable wireless communication products, related high-frequency semiconductor components have also flourished in response to the trend. However, whether the functional characteristics of the high-frequency semiconductor component is good or not will be related to the quality of the final portable wireless communication product. Therefore, the high-frequency probe card becomes an important tool for detecting high-frequency semiconductor components.

For example, Taiwan's new type M431327 discloses a high-frequency test probe card, which discloses the use of an attenuator or a coaxial cable to simulate an actual use environment, thereby achieving the purpose of testing a component to be tested by using the high-frequency test probe card.

As shown in FIG. 1, in the loopback architecture, a conventional probe card 90 is used to test the device under test (DUT) 95, and the device under test 95 has a transfer contact TX. And a receiving contact RX, the self-sending loop means that the transmitting contact TX of the device under test 95 transmits a signal, and the signal is transmitted to the receiving contact RX via an external line (such as the probe card 90 of FIG. 1). The measuring component 95 performs signal detection by itself. The probe card 90 has a transmitting probe 91 and a receiving probe 92. When the self-feeding loop test is performed, the transmitting probe 91 is in contact with the transmitting contact TX, and the receiving probe 92 is in contact with the receiving contact RX. A component 93 is typically coupled between the pin 91 and the receiving probe 92 to simulate line attenuation in the test loop. The element 93 is selected from a cable, an attenuator, a jumper or a capacitor. Among them, the use of cables requires a large space to be reserved, resulting in wasted space. Using attenuators, jumpers or capacitors, it is not possible to transmit test signals to the tester for testing when performing a self-loop test.

It can be seen from the foregoing that the conventional probe card 90 can only perform the self-send loop test using the above-mentioned various line attenuation simulations, and the other transmission points TX or the connection only for the device under test 95. Other demand tests for the receiving point RX (such as high-frequency signal testing, DC level testing, etc., which can be performed for actual needs) are not possible. As shown in Figure 2, the architecture of the self-sending loop is applied to another conventional probe card. The probe card 90a of Fig. 2 is also capable of performing the above-described demand test in addition to the self-feeding loop test. The probe card 90a is connected to the two electric wires 94a in the line and utilizes the excess pins of the electric port 94a. Connected to two tester channels 96a, 97a. Wherein, when performing the self-transmission loop test, the two electric wires 94a are switched to short-circuit between the transmitting probe 91a and the receiving probe 92a to test the device to be tested 95a; In other requirements test, the two switches 94a need to be separately switched to connect the transmitting probe 91a and the receiving probe 92a to the two test machine channels 96a, 97a, respectively, to test the transmitting contacts of the device under test 95a. And receiving contacts. However, the use of the electric raft 94a also requires a fixed space size, and it is a mechanical switching mode, and has a problem of service life. Furthermore, the price of the high frequency switched power cymbal 94a doubles as the frequency increases.

Moreover, when in the high-frequency test, as shown in FIG. 3, in the conventional DC and high-frequency AC architecture, the tester channel 96b is usually insufficient due to the lack of the tester channel 96b, so that the traditional probe is required. The direct current (DC) probe 91b of the pin card 90b is formed in parallel with the transmission path of the high frequency alternating current (HF) probe 92b, resulting in a decrease in the transmission frequency of the transmission path. Therefore, it is usually necessary to down-clock to get an accurate test.

The probe card of the present invention is used to detect a component to be tested. The probe card has a coupler module, a first matching impedance, a first pin and a second pin. The first matching impedance is electrically connected to the coupler module. The first needle is electrically connected to the coupler module. The second needle is electrically connected to the coupler module. Since the coupler module has the advantages of small size and long life, the complexity of the probe card of the present invention is lower than that of the conventional probe card described above.

Preferably, the coupler module has a first directional coupler. The first directional coupler has a first path and a second path spaced alongside the first path. The first path has a first endpoint and a second endpoint. The second path has a third endpoint and a fourth endpoint. The first endpoint is on the same side as the fourth endpoint. The second end point and the third end point are on the same side. The first end point and the third end point are signals transmitted by means of coupling path. The second end point and the fourth end point are coupled as a path for signal transmission. The first matching impedance is electrically connected to one of the end points of the second path. The first needle is electrically connected to one end of the first path, and the second needle is electrically connected to another end of the second path, so that the probe card can perform a self-transmission loop test on the device to be tested or High frequency test.

Preferably, the probe card also has a third matching impedance. The coupler module also includes a second directional coupler. The second directional coupler has a third path and a fourth path spaced alongside the third path. The third path has a fifth endpoint and a sixth endpoint. The fourth path has a seventh endpoint and an eighth endpoint. The fifth endpoint and the eighth endpoint are on the same side. The sixth end point and the seventh end point are on the same side. The fifth endpoint and the seventh endpoint are coupled by way of signal transmission. The sixth endpoint and the eighth endpoint are coupled by way of signal transmission. The seventh endpoint of the fourth path is electrically connected to the third endpoint of the second path. The third matching impedance is electrically connected to the eighth end of the fourth path. The second needle is electrically connected to the fifth end of the third path. The first and second couplers are also respectively connected to the two channels of the testing machine, so that the probe card performs a self-transmission loop test and a DC level test on the device to be tested.

10, 30, 40, 50‧‧ ‧ probe card

11, 41‧‧‧ coupler module

12, 42, 52‧‧‧ first matching impedance

13‧‧‧Second matching impedance

14, 44, 54‧‧ first needle

15, 45, 55‧‧‧ second needle

16, 46, 56‧‧‧ first directional coupler

161, 361, 461, 561‧‧ first path

162, 462, 562‧‧‧ second path

47‧‧‧Second Directional Coupler

471‧‧‧ third path

472‧‧‧fourth path

43‧‧‧ third matching impedance

20, 20a, 20b, 20c, 95‧‧‧ components to be tested

21, 21a, 21b, 21c, 22, 22a, 22b, 22c‧‧‧ joints

7a‧‧‧Vertical probe card

71a, 71b‧‧‧ Printed circuit boards

72a, 72b‧‧‧ space converter

73a‧‧‧Multilayer board

74a‧‧‧Electrical film

75a‧‧ ‧ probe holder

76a, 74b‧‧‧ probe

7b‧‧‧Cantilever probe card

73b‧‧‧cantilever probe set

80, 80a, 80b, 80c‧‧‧ test machine channel

90, 90a, 90b‧‧‧ traditional probe card

91, 91a, 91b, 92, 92a, 92b‧‧ ‧ probe

93‧‧‧ components

94a‧‧‧Electricity

95, 95a‧‧‧ components to be tested

96a, 96b, 97a‧‧‧ test machine channel

N1‧‧‧ first endpoint

N2‧‧‧ second endpoint

N3‧‧‧ third endpoint

N4‧‧‧ fourth endpoint

N5‧‧‧ fifth endpoint

N6‧‧‧ sixth endpoint

N7‧‧‧ seventh endpoint

N8‧‧‧ eighth endpoint

Figures 1 to 3 are schematic views showing the application of a conventional probe card to test an element to be tested, respectively.

Figure 4 is a schematic view showing the application of the probe card of the first preferred embodiment of the present invention.

Figure 5 is a schematic view showing the application of the probe card of the second preferred embodiment of the present invention.

Figure 6 is a schematic view showing the application of the probe card of the third preferred embodiment of the present invention.

Figure 7 is a schematic view showing the application of the probe card of the fourth preferred embodiment of the present invention.

Figure 8 is a schematic diagram showing a vertical probe card.

Figure 9 is a schematic view showing a cantilever probe card.

As shown in FIG. 4, the figure shows a schematic diagram of a first preferred embodiment of the present probe card electrically connected to a device under test (DUT), which is a loopback architecture. The probe card 10 of the present invention includes a coupler module 11, a first matching impedance 12, a second matching impedance 13, a first pin 14, and a second pin 15.

The coupler module 11 has a first directional coupler 16 . The first directional coupler 16 has a first path 161 and a second path 162 spaced apart from the first path 161. The first path 161 has a first endpoint N1 and a second endpoint N2. The second path 162 has a third endpoint N3 and a fourth endpoint N4. The first endpoint N1 and the fourth endpoint N4 are on the same side. The second endpoint N2 and the third endpoint N3 are on the same side. The first directional coupler 16 has a characteristic that a path between the first end point N1 and the third end point N3 is transmitted by a coupling mode, and the second end point N2 and the fourth end are The point N4 is a path for signal transmission by means of coupling.

The end points of the first directional coupler 16 that are not required to be used directly connect the impedance of the system, and the impedance of the system referred to herein is the impedance value designed by the internal circuit of the first directional coupler 16. In the present embodiment, the first matching impedance 12 is electrically connected to the fourth end point N4 of the second path 162 of the first directional coupler 16. The second matching impedance 13 is electrically connected to the second end point N2 of the first path 161 of the first directional coupler 16, and the second end point N2 and the fourth end point N4 are not used. Generally, the The first matching impedance 12 and the second matching impedance 13 are 50 ohms, but are not limited thereto.

The first pin 14 is electrically connected to the first end point N1 of the first path 161 of the first directional coupler 16. The second pin 15 is electrically connected to the third end point N3 of the second path 162 of the first directional coupler 16.

The tip of the first needle 14 contacts the contact 21 of the element under test 20, and the tip of the second needle 15 contacts the contact 22 of the measuring element 20. The contact 21 of the device under test 20 is a transmitting end for outputting a test signal. The contact 22 of the device under test 20 is a receiving end for receiving a test signal output by the contact 21. The first needle 14 serves as a probe for contacting the contact 21, and thus may be referred to as a transfer (TX) probe. The second needle 15 serves as a probe for contacting the contact 22, so it can be called a receiving (RX) probe.

In this embodiment, the test mode of the self-sending loop is as follows. The contact 21 of the device under test 20 outputs the test signal, and the test signal is transmitted to the first end point N1 via the first pin 14; The test signal is coupled to the third endpoint N3 by the first endpoint N1; finally, the test signal is transmitted to the second pin 15 by the third endpoint N3, and then transmitted by the second pin 15 to The contact 22 is.

The coupling coefficient C between the first endpoint N1 and the third endpoint N3 can be calculated by using Equation 1 to design a coupling coefficient suitable for the present creation, wherein the P1 and P3 systems in Equation 1 respectively represent the first The power of the first and third endpoints; the loss L between the first endpoint N1 and the second endpoint N2 can also be calculated by using Equation 2, wherein P1 and P2 in Equation 2 represent the first and The power of the second endpoints N1, N2. Since the probe card 10 of the present invention uses the first and second matching impedances 12, 13 to provide test impedance, and the physical size of the first directional coupler 16 is smaller than the cable and the attenuator, the present invention The probe card 10 is small in size compared to conventional cable or attenuators.

As shown in FIG. 5, this figure is a schematic view showing a second preferred embodiment of the probe card 30 of the present invention. The main difference between the second preferred embodiment and the first preferred embodiment is that the probe card 30 of the present invention does not have the second matching impedance, but the second of the first path 361 of the probe card 30. The terminal N2 is electrically connected to the channel 80 of a tester to test whether the function of the contact 21a of the device under test 20a is normal. It should be noted that since the tester channel 80 itself can provide a matching impedance, during the self-feed loop test, the test mode of the first embodiment is the same, and the contact 21a of the device under test 20a sends a test signal. The test signal will pass through the first terminal N1, and then the test signal is coupled to the third terminal N3 and transmitted to the contact 22a of the device under test 20a. The second end point N2 of the first path 361 is not used, so the second end point N2 is the impedance provided by the test machine channel 80, and the second end point N2 of the first path 361 is to the test machine. No additional second matching impedance is required between the channels 80.

When performing other demand tests (such as high frequency signal test, DC level test, etc.) of the transfer contact 21a of the device under test 20a, a signal is transmitted by the contact 21a via the first end point N1 and the second end point. N2 to test machine channel 80. As such, the probe card 30 of the present invention can perform not only self-transmission loop testing, but also additional endpoints that can be electrically coupled to the tester channel 80 for electrical testing.

As shown in Fig. 6, this figure is a schematic view showing a third preferred embodiment of the probe card 40 of the present invention. The coupler module 41 of the probe card 40 is compared to the first preferred embodiment. There is a first directional coupler 46 and a second directional coupler 47. The structure, characteristics and design manner of the first directional coupler 46 are the same as those of the first preferred embodiment, and details are not described herein again. The second directional coupler 47 has a third path 471 and a fourth path 472 spaced alongside the third path 471. The third path 471 has a fifth endpoint N5 and a sixth endpoint N6. The fourth path 472 has a seventh endpoint N7 and an eighth endpoint N8. The fifth endpoint N5 and the eighth endpoint N8 are on the same side. The sixth endpoint N6 and the seventh endpoint N7 are on the same side. The fifth end point N5 and the seventh end point N7 are coupled by a coupling mode, and the sixth end point N6 and the eighth end point N8 are coupled by a signal. The path passed.

The seventh end point N7 of the fourth path 472 is electrically connected to the third end point N3 of the second path 462. The first matching impedance 42 is electrically connected to the fourth end point N4 of the first path 461. The probe card 40 further includes a third matching impedance 43 electrically coupled to the eighth end point N8 of the fourth path 472. The first pin 44 is electrically connected to the first end point N1 of the first path 461, and the second pin 45 is electrically connected to the fifth end point N5 of the third path 471.

The probe card 40 of the present invention is used to electrically connect the tester channels 80a, 80b and a device under test 20b. The two channels 80a, 80b of the testing machine are electrically connected to the second end point N2 of the first directional coupler 46 and the sixth end point N6 of the second directional coupler 47, respectively. The first pin 44 and the second pin 45 are respectively electrically connected to the two contacts 21b, 22b of the device under test 20b. The first pin 44 is a probe, and the second pin 45 is a receiving probe. The definition and function of the needle and the receiving probe are the same as those described above, and will not be described herein. In practical applications, the probe card 40 is operable to test other requirements of the self-feed loop test or the contacts 21b, 22b of the component 20b to be tested.

When the self-transmission loop test is performed in this embodiment, the contact 21b of the device under test 20b sends a test signal to be coupled to the third terminal N3 via the first terminal N1 of the first directional coupler 46, and then the test signal The third end point N3 is transmitted to the seventh end point N7, and finally the test signal is coupled to the fifth end point N5 by the seventh end point N7, and enters the contact point 22b of the device under test 20b. The second end point N2, the fourth end point N4, the sixth end point N6, and the eighth end point N8 are not used, so the system impedance needs to be electrically connected, the system impedance referred to here, the second end point N2 and the The four-terminal N4 needs to be connected to the impedance value designed by the internal circuit of the first directional coupler 46, and the sixth end point N6 and the eighth end point N8 need to be connected to the impedance value designed by the internal circuit of the second directional coupler 47. The fourth end point N4 is connected to the first matching impedance 42, and the eighth end point N8 is connected to the third matching impedance 43. The tester channels 80a, 80b can provide matching impedances of the second endpoint N2 and the sixth endpoint N6, respectively.

When the present embodiment performs other requirements tests of the contacts 21b, 22b of the device under test 20b (such as high-frequency signal test, DC level test, etc., the tests that can be performed according to actual needs are within this range, and this embodiment is When the DC level test is taken as an example, the contact 21b of the device under test 20b transmits a signal to the tester channel 80a, and the tester channel 80a transmits a DC signal to the contact 22b of the device under test 20b. The DC signal sent from the contact 21b is transmitted to the second end point N2 by the first end point N1 of the first path 461 to output the test machine channel 80a, and the DC signal sent from the test machine channel 80b is used by The sixth end point N6 of the third path 471 transmits the fifth end point N5 and is output to the contact point 22b.

It is to be noted that the first and second directional couplers 46, 47 can be tested by self-feeding loops in the manner described above or with the tester to test the contacts 21b, 22b of the component 20b to be tested. The probe card 40 of the present invention does not need to use the probe card 90a structure of FIG. 2, that is, the electric loop is not required to be used as the self-sending loop architecture, and the self-sending loop test or the test of the respective components of the device to be tested can be tested. Therefore, there is no problem that the power consumption loss caused by the mechanical switching contact is generated, and the probe card 40 of the present invention uses the electronic components and circuits such as the first and second directional couplers 46 and 47. In the signal path of the test, only the transmission and reaction of the electrical signal are used, and no mechanical switching is used. Therefore, compared with the probe card 40 using the electric cymbal as the test circuit, the probe card 40 of the present invention is tested. The response speed is relatively fast.

As shown in Fig. 7, this figure is a schematic view showing a fourth preferred embodiment of the probe card 50 of the present invention. The first matching impedance 52 of the first directional coupler 56 of the probe card 50 is electrically coupled to the third end point N3 of the second path 562. The first pin 54 is electrically connected to the first end point N1 of the first path 561. The second pin 55 is electrically connected to the fourth end point N4 of the second path 562. The first and second pins 54, 55 are electrically connected to the two contacts 21c, 22c of the device under test 20c, respectively. The second end point N2 of the first path 561 is connected to the test machine channel 80c. In practice, the positions of the first end point N1 and the second end point N2 of the first path 561 of the first directional coupler 56 can be reversed, and after the first and second end points N1, N2 are reversed, The third and fourth endpoints N3 and N4 are also compliant, and are not limited to those illustrated in FIG.

The two contacts 21c and 22c are a direct current (DC) terminal and an alternating current high frequency (HF) terminal. The first pin 54 serves as a probe for contacting the contact 21c, so it is called direct current (DC). Probe. This second needle 55 serves as a probe for the contact contact 22c, and is called an alternating current high frequency (HF) probe.

The tester channel 80c is for outputting a direct current signal and an alternating high frequency signal. The DC signal is transmitted to the first end point N1 of the first path 561 by the second end point N2 of the first path 561, and is output to the contact 21c of the device under test 20c. The alternating high frequency signal is coupled to the fourth end point N4 of the second path 562 by the second end point N2 of the first path 561, and is output to the contact 22c of the device under test 20c. The third terminal N3 is not used, so the system impedance needs to be electrically connected. The system impedance referred to herein refers to the impedance value designed by the third terminal N3 to be connected to the internal circuit of the first directional coupler 56.

Since the characteristics of the directional coupler are only for AC high frequency signal coupling, the DC signal at the second terminal N2 is not coupled to the fourth terminal N4 of the second path 562. Similarly, the DC signal cannot be coupled between the first endpoint N1 and the third endpoint N3.

In this embodiment, the high frequency means that the frequency is greater than or equal to 1 Ghertz (Hz). As can be seen from the foregoing description, the second end point N2 of the first path 561 of the first directional coupler 56 can receive the DC signal or the AC high frequency signal sent by the test machine channel 80c, indicating that the test machine channel is shared. 80c.

Compared with the prior art, this embodiment uses the first directional coupler 56 to separate the direct current and the alternating current signal, thereby maintaining the conduction of the direct current signal and taking into consideration the bandwidth of the alternating high frequency signal test. Since the first directional coupler 56 has the aforementioned signal transmission characteristics, when the alternating high frequency signal is transmitted, the alternating high frequency signal is coupled from the second end point N2 to the fourth end point N4 and transmitted to The second pin 55, the first pin 54 and the second pin 55 are electrically connected to the first end point N1 and the fourth end point N4 of the first directional coupler 56, respectively, but the first end point N1 and the fourth end The point N4 is not electrically connected to each other. Therefore, the first pin 54 and the second pin 55 are not formed in parallel, resulting in impedance mismatch. Therefore, when the probe card 50 of the present invention is shared with the test machine channel 80c, The matching impedance value of the transmission path is more stable than the conventional probe card, and the down-conversion test is not required, so that the efficiency of the transmission path can be maintained at an optimum state.

Moreover, when the frequency is higher, the size of the first directional coupler 56 can be designed to be smaller, so the probe card 50 of the present invention is more suitable for being applied to the probe card than the prior art. Frequency test environment.

In summary, the probe card of the present invention is suitable for various test environments, and The number of directional couplers of the coupler module can be adjusted according to the actual requirements of the test. Therefore, the number and combination of the directional couplers of the coupler module are not limited to the foregoing embodiments.

In practice, the structure of the probe card can be divided into a vertical probe card (VPC) (as shown in FIG. 8) and a cantilever probe card (CPC) (as shown in FIG. 9). As shown in Fig. 8, the vertical probe card 7a includes a printed circuit board (PCB) 71a, a space transformer 72a, and a probe head (PH) 75a. The space converter 72a is electrically connected to the printed circuit board 71a and the probe holder 75a, and is located between the printed circuit board 71a and the probe holder 75a. The main structure of the space transformer 72a is based on a multiple layer 73a, which may be a multiple layer ceramic (MLC) or a multiple layer organic (MLO) or other material. The space converter 72a further includes a conductive film (TF) 74a. In addition to the internal circuit of the multilayer board 73a, the circuit design of the conductive film 74a may be added to expand the circuit layout design of the space converter 72a. The conductive film 74a is adjacent to the probe holder 75a. It should be noted that the first pin and the second pin in the foregoing embodiments are disposed on the probe 76a of the probe holder 75a, and the directional coupler of the coupler module can be directly formed on the conductive film 74a. In the above, the stability of the probe card test can be increased, and if there is a design error, the conductive film 74a can be removed and reworked.

As shown in Fig. 9, the cantilever probe card 7b includes a printed circuit board 71b and two cantilever probe sets 73b. The first pin and the second pin in the foregoing embodiments are respectively the probes 74b in the two cantilever probe sets 73b, and the coupler module and the matching impedances are preferably formed directly on the printing. On the circuit board 71b, to reduce the manufacturing cost.

In the foregoing embodiments, the present invention is to test the difference in requirements according to the foregoing embodiments by providing a first directional coupler on the probe card, for example, only performing a self-feed loop test, or DC and AC. Signals are separated, etc., and different circuit designs are performed in order to meet the test requirements of the foregoing embodiments. The same point is that the probe card is modified based on the following design, that is, the probe card is electrically connected to one end of the second path of the first directional coupler with the first matching impedance, and the first pin is electrically connected. One end of the first path of the first directional coupler, the second pin is electrically connected to another end of the second path of the first directional coupler.

In addition, although the matching impedance of each of the foregoing preferred embodiments is 50 ohms For example, in practice, the matching impedance is designed according to the conditions of the actual test environment, so it is not limited to the above 50 ohms.

10‧‧‧ probe card

11‧‧‧ Coupler Module

12‧‧‧First matching impedance

13‧‧‧Second matching impedance

14‧‧‧first needle

15‧‧‧second needle

16‧‧‧First Directional Coupler

161‧‧‧First path

162‧‧‧Second path

20‧‧‧Device under test

21, 22‧‧‧Contacts

N1‧‧‧ first endpoint

N2‧‧‧ second endpoint

N3‧‧‧ third endpoint

N4‧‧‧ fourth endpoint

Claims (13)

A probe card includes: a coupler module; a first matching impedance electrically connected to the coupler module; a first pin electrically connected to the coupler module; and a second pin Connect the coupler module. The probe card of claim 1, wherein the coupler module has a first directional coupler, the first directional coupler having a first path and a first side of the first path a second path, the first path has a first end point and a second end point, the second path has a third end point and a fourth end point, and the first end point and the fourth end point are On the same side, the second end point and the third end point are on the same side, and the first end point and the third end point are coupled as a signal transmission path, and the second end point and The fourth end point is a path for signal transmission by means of coupling. The probe card of claim 2, wherein the first matching impedance is electrically connected to one of the end points of the second path, the first needle is electrically connected to one of the end points of the first path, the second The needle is electrically connected to another end of the second path. The probe card of claim 3, wherein the first matching impedance is electrically connected to a fourth end of the second path, the first pin is electrically connected to the first end of the first path The second needle is electrically connected to the third end of the second path. The probe card of claim 4, wherein the first needle transmits a probe, and the second needle receives the probe. The probe card of claim 4 or 5, wherein the second end is for electrically connecting to a test machine channel, and if the first pin receives a signal, the signal is to be used by the first end A point is coupled to the third endpoint output or transmitted by the first endpoint to the second endpoint. The probe card of claim 4 or 5, further comprising a second matching impedance, The second matching impedance is electrically connected to the second end of the first path. The probe card of claim 4, further comprising a third matching impedance, wherein the coupler module further comprises a second directional coupler, the second directional coupler having a third path and The third path is spaced apart by a fourth path, the third path has a fifth end point and a sixth end point, the fourth path has a seventh end point and an eighth end point, the fifth end The point and the eighth end point are on the same side, the sixth end point and the seventh end point are on the same side, and the fifth end point and the seventh end point are coupled as signals a path to be transmitted, wherein the sixth end point and the eighth end point are paths that are signaled by a coupling manner, and the seventh end point of the fourth path is electrically connected to the third end point of the second path, The third matching impedance is electrically connected to the eighth end of the fourth path, and the second pin is electrically connected to the fifth end of the third path. The probe card of claim 8, wherein the second end of the first directional coupler and the sixth end of the second directional coupler are respectively connected to two of a test machine aisle. The probe card of claim 8, wherein the first needle transmits a probe, and the second needle receives the probe. The probe card of claim 3, wherein the first matching impedance is electrically connected to a third end of the second path, the first pin is electrically connected to the first end of the first path The second needle is electrically connected to the fourth end of the second path. The probe card of claim 11, wherein the first needle is a DC probe and the second needle is an AC probe. The probe card of claim 11 or 12, wherein the second end of the first path is for electrically connecting to a test machine channel, wherein the test machine channel is for outputting a DC signal and a An AC signal transmitted from a second end of the first path to a first end of the first path, the AC signal being coupled by a second end of the first path to a fourth end of the second path end point.