M439259 101年.06月27日 五、新型說明： 【新型所屬之技術領域】 [0001] 本創作是有關於一種撕膜設備及其撕膜頭，且特別 是有關於一種利用膠帶撕除膜片的撕膜設備及其撕膜頭 【先前技術】 [0002] 習知的撕膜設備通常是採用滾筒結構，如日本特許 公開號第2007-094044號的專利所示，此種滾筒上環繞 有膠帶，其運作方式為，先將貼附有膜片的基板固定在 載台上，並使滾筒接觸基板的邊緣，讓滚筒上的膠帶黏 住基板上的膜片，接著讓滾筒朝基板的另一側邊緣滾動 ’在滾動的過程中，膜片會被膠帶循序從基板上撕除， 並且同步纏繞在滚筒上。在基板尺寸較大的情況下，撕 除膜片時所需使用的滾筒也會對應基板尺寸而加大，同 時’環繞在滾筒上的膠帶面積也會隨之增加，且較大的 滚筒需要更大馬力的驅動裝置以及更多的空間，因此在 撕膜設備的機構設計上需要更多考量，而更大面積的膠 帶意謂需要消耗更大量的耗材，從而提高成本。另外， 使用過的膠帶因為被層層纏繞，也增加回收再利用的難 度。由此觀之，習知的撕膜設備並未揭露更進一步的解 決方案。 【新型内容】 有鑑於此，本創作的目的在提出一種撕膜設備及其 撕膜頭，其藉由模擬人工撕除膜片的動作，以提高撕除 膜片的致率與適用性，以因應不同尺寸的膜片撕除製程 10120535#單編號 A〇101 第3頁/共21頁 1013242653-0 M439259 為達到上述目的，本創作提出一種撕膜頭，適用於 透過撕膜帶撕除基板上所貼附的膜片的撕膜設備，撕膜 頭包括壓頭本體與膠頭本體。壓頭本體的兩端具有相對 立的第一端面與第二端面，第一端面與第二端面對應於 撕膜帶，壓頭本體的内部具有容置空間，容置空間向下 延伸貫通壓頭本體的底面。膠頭本體設置於容置空間且 向下凸伸有接觸部於壓頭本體之外，接觸部具有朝向下 的接觸面，第一端面、接觸面與第二端面形成撕膜帶的 滑動軌道，藉此’接觸面可向下抵壓撕膜帶於基板上的 膜片的一角，接著壓頭本體朝向遠離基板的預定方向移 動’而連帶撕除所述膜片。 本創作還提出一種撕膜設備，適用於透過撕膜帶撕 除基板上所貼附的膜片，撕膜設備包括撕膜頭、傳動裝 置與基板“。傳動裝置㈣設置有致料，致動部的 下方連接撕膜頭，致動部的上方配置撕膜帶收放機構。 基板載台可移動的配置於撕膜頭的下方，藉此，撕膜帶 2撕膜帶收放機構進料，並循序通過第—端面、接觸面 與第二端面之後由撕膜帶收放機構收料。基板載台上方 固持有基板且移動至接觸部下方的預定位置，接觸面透 過致動部帶動而向下抵壓撕膜帶於基板上的膜片的角落 ，接著致動部帶動壓頭本體朝向遠離基板的預定方向移 動，而連帶撕除所述膜片。 本創作所提出的一種撕膜設備及其撕膜頭，僅需用 約略相等於所述接觸面大小的撕膜帶，就能撕除基板上 咖咖和喊2張膜片，見無論基板的尺寸，皆只需用同樣大小的M439259 101.06.27月五日. New description: [New technical field] [0001] The present invention relates to a tear film device and a tear film head thereof, and in particular to a film peeling off film Tear film device and tear film head thereof [Prior Art] [0002] A conventional tear film device is generally a roller structure, as shown in the patent of Japanese Laid-Open Patent Publication No. 2007-094044, which is surrounded by a tape. The operation mode is that the substrate to which the diaphragm is attached is first fixed on the stage, and the roller is brought into contact with the edge of the substrate, the tape on the roller is adhered to the film on the substrate, and then the roller is directed to the other of the substrate. Side edge rolling ' During the rolling process, the diaphragm is sequentially peeled off the substrate by the tape and wound on the drum in synchronization. In the case of a large substrate size, the roller used to remove the diaphragm will also increase corresponding to the size of the substrate, and the area of the tape surrounding the roller will also increase, and the larger roller needs to be more The high-powered drive and more space require more consideration in the design of the tear-off device, and the larger-area tape means that a larger amount of consumables are consumed, which increases the cost. In addition, the used tape is also difficult to recycle and reuse because it is entangled in layers. From this point of view, the conventional tear film device does not disclose a further solution. [New content] In view of this, the purpose of this creation is to propose a tear film device and a tear film head thereof, which simulates the action of artificially tearing off the film to improve the rate and applicability of the tear film. According to the different size of the film tear-off process 10120535# single number A〇101 page 3 / 21 pages 1013242653-0 M439259 In order to achieve the above purpose, the present invention proposes a tear film head suitable for tearing off the substrate through the tear film tape The tear film device of the attached film, the tear film head includes a head body and a glue head body. The two ends of the indenter body have opposite first end faces and second end faces. The first end face and the second end face correspond to the tear film strip. The inside of the indenter body has a receiving space, and the receiving space extends downwardly through the indenter. The bottom surface of the body. The rubber head body is disposed in the accommodating space and has a contact portion protruding outwardly from the ram body, the contact portion has a downward facing contact surface, and the first end surface, the contact surface and the second end surface form a sliding track of the tear film strip. Thereby, the 'contact surface can press down the tear film to a corner of the diaphragm on the substrate, and then the head body moves toward a predetermined direction away from the substrate' to tear off the film. The present invention also proposes a tear film device suitable for tearing off a film attached on a substrate through a tear film strip, the tear film device including a tear film head, a transmission device and a substrate. The transmission device (4) is provided with a material, an actuation portion The tear film head is connected to the lower side, and the tear film tape retracting mechanism is disposed above the actuating portion. The substrate stage is movably disposed under the tear film head, whereby the tear film strip 2 tear film strip retracting mechanism feeds, And sequentially passing through the first end surface, the contact surface and the second end surface, and receiving the material by the tear film retracting mechanism. The substrate holder holds the substrate above the substrate and moves to a predetermined position below the contact portion, and the contact surface is driven by the actuation portion. Pressing the tear film down on the corner of the film on the substrate, and then the actuating portion drives the head body to move away from the substrate in a predetermined direction, and the film is peeled off. The tear film device proposed by the present invention And the tear film head, only need to use the tear film strip which is about equal to the size of the contact surface, can tear off the coffee beans on the substrate and shout 2 membranes, no matter the size of the substrate, only need the same size
第4頁/共21 I 1013242653-0 M439259 101年.06月27日核正替換頁 撕除帶就能撕除整張膜片。另外，撕膜帶收放機構亦可 將撕膜帶回收再利用。較之習知技術，本創作以精心設 計的撕膜頭取代滚輪，同時搭配對應的裝置，使撕膜設 備的結構不但能更加單純化還能提高適用性，並且也能 有效減少耗材用量而降低了成本。 為讓本創作之目的、特徵和優點能使該領域具有通 常知識者更易理解，下文舉一較佳實施例，並配合所附 圖式，作詳細說明如下。 • [0004] • 【實施方式】 請同時參閱圖1與圖2，圖1所繪示為本創作一較佳實 施例之撕膜設備的立體圖，圖2所繪示為本創作一較佳實 施例之撕膜設備的側視圖。撕膜設備10包括傳動裝置100 、撕膜頭200、基板載台300與膜片回收裝置400。傳動 裝置100滑動設置有致動部110，並且傳動裝置100配置 有可讓致動部110沿著Z軸上下滑動的第一滑動部130與可 讓致動部110沿著Y軸左右滑動的第二滑動部140。在本實 施例中，第一滑動部130與第二滑動部140可為固設於傳 動裝置100上的滑軌，且致動部110上具有相應於第一滑 動部130與第二滑動部140的滑動卡合機構，並且透過傳 動裝置100的馬達（圖中未繪示）牽引，使致動部110可 因應所需而被控制在Y-Z平面上進行移動。在其他實施例 中，還可透過不同的滑動與卡合機構使致動部進行移動 ，並且亦可修改傳動裝置的設計使致動部具有三維空間 的移動能力。 [0005] 致動部110的下方連接有撕膜頭200，致動部110的 ΗΠ腦产單編請01 第5頁/共21頁 1013242653-0 M439259 101年06月27日接正替換頁 上方配置有撕膜帶收放機構12〇。基板載台3〇〇是透過載 台傳動裝置（圖中未繪示），可移動的配置於撕膜頭2〇〇 的下方。膜片回收裝置40 0配置於基板載台3〇〇的下方， 更具體來說是配置於基板載台3〇〇的下方且靠近傳動裝置 100的第二滑動部140的末端位置。 [0006] 請同時參閱圖1至圖4，圖3所繪示為本創作一較佳實 施例之撕膜頭的爆炸圖，圖4所繪示為本創作一較佳實施 例之致動部的爆炸圖。撕膜頭2〇〇的主要構件包括壓頭基 座210、止轉汽缸111、壓頭本體220與膠頭本體230 »壓 頭基座210固接於致動部no且透設有由壓頭基座21〇的 頂面延伸至其底面的基座通孔214，止轉汽缸ill配置為 固定於基座通孔214的上部，且止轉汽缸m朝向基座通 孔214的下部連接有止轉元件112❶壓頭基座21〇的底面 的一侧緣向下延伸有基壁213，除此之外的其餘底面部份 為限位面211。壓頭本體220透過樞接部212可旋轉的樞 接於基壁213，而位於壓頭本體220的頂面的壓板225則 配置於限位面211下方，使壓頭本體22〇相對於壓頭基座 210，以樞接部212為軸心而具有Y-Z平面上的旋轉能力 ’且限位面211會藉由抵擋壓板225而限制壓頭本體22〇 的旋轉幅度。 [0007] 壓頭基座210與壓頭本體220具有相對立的兩端，其 中，朝向y方向者為第一端面，第一端面凹設有對應於撕 膜帶11的第一限位槽221 ;朝向負y方向者為第二端面， 第二端面凹設有對應於撕膜帶U的第二限位槽222。限位 面211靠近第一限位槽221的部份呈現水平態樣，其靠近 1012〇535产單編號 A0101 第6頁/共21頁 1013242653-0 M439259 [0008]Page 4 of 21 I 1013242653-0 M439259 101. June 27th Nuclear Replacement Page The entire film can be removed by tearing off the tape. In addition, the tear film tape retracting mechanism can also recycle the tear film tape. Compared with the prior art, this design replaces the roller with a well-designed tear film head, and the corresponding device makes the structure of the tear film device not only more simplistic but also improves the applicability, and can also effectively reduce the consumption of the consumables. The cost. To make the objects, features, and advantages of the present invention more comprehensible to those of ordinary skill in the art, a preferred embodiment will be described below and in conjunction with the accompanying drawings. [0004] • [Embodiment] Please refer to FIG. 1 and FIG. 2 together, FIG. 1 is a perspective view of a tear film device according to a preferred embodiment of the present invention, and FIG. 2 is a preferred embodiment of the present invention. A side view of a tear film device. The tear film device 10 includes a transmission device 100, a tear film head 200, a substrate stage 300, and a film recovery device 400. The transmission device 100 is slidably provided with an actuation portion 110, and the transmission device 100 is provided with a first sliding portion 130 that allows the actuation portion 110 to slide up and down along the Z axis and a second sliding portion that allows the actuation portion 110 to slide left and right along the Y axis. The sliding portion 140. In the embodiment, the first sliding portion 130 and the second sliding portion 140 can be a sliding rail fixed on the transmission device 100 , and the actuation portion 110 has a corresponding corresponding to the first sliding portion 130 and the second sliding portion 140 . The sliding engagement mechanism is pulled through the motor (not shown) of the transmission device 100, so that the actuation portion 110 can be controlled to move on the YZ plane as needed. In other embodiments, the actuator can be moved through different sliding and engaging mechanisms, and the design of the transmission can be modified to provide the actuator with a three-dimensional movement capability. [0005] The tearing head 200 is connected to the lower side of the actuating portion 110, and the camphor part of the actuating portion 110 is 01. Page 5 of 21 1013242653-0 M439259 On June 27, 101, the replacement page is replaced. A tear film retracting mechanism 12 is disposed. The substrate stage 3 is transmitted through the stage transmission (not shown) and is movably disposed below the tear film head 2 。. The diaphragm recovery device 40 0 is disposed below the substrate stage 3A, more specifically, at a position below the substrate stage 3A and near the end position of the second sliding portion 140 of the transmission 100. [0006] Please refer to FIG. 1 to FIG. 4 simultaneously. FIG. 3 is an exploded view of a tear film head according to a preferred embodiment of the present invention, and FIG. 4 is a schematic view showing an actuation portion of a preferred embodiment of the present invention. Explosion map. The main components of the tear film head 2 包括 include a ram base 210, a rotation preventing cylinder 111, a ram body 220 and a rubber body 230. The ram base 210 is fixed to the actuating portion no and is provided with a pressure head. The top surface of the base 21〇 extends to the base through hole 214 of the bottom surface thereof, the rotation preventing cylinder ill is disposed to be fixed to the upper portion of the base through hole 214, and the rotation preventing cylinder m is connected to the lower portion of the base through hole 214. A side wall 213 extends downward from a side edge of the bottom surface of the turret base 21 〇, and the remaining bottom surface portion is a limiting surface 211. The pressure head body 220 is pivotally connected to the base wall 213 through the pivoting portion 212, and the pressure plate 225 located on the top surface of the pressure head body 220 is disposed below the limiting surface 211, so that the pressure head body 22 is opposite to the pressing head. The base 210 has a rotation capability in the YZ plane with the pivoting portion 212 as an axis, and the limiting surface 211 limits the rotation amplitude of the indenter body 22 by resisting the pressing plate 225. The indenter base 210 and the indenter body 220 have opposite ends, wherein the first end surface is opposite to the y direction, and the first end surface is recessed with a first limiting slot 221 corresponding to the tear film strip 11 The second end face is recessed toward the negative y direction, and the second limit groove 222 corresponding to the tear film strip U is recessed in the second end face. The portion of the limiting surface 211 near the first limiting slot 221 presents a horizontal state, which is close to 1012〇535. The order number is A0101. Page 6 of 21 1013242653-0 M439259 [0008]
[0009] 101年06月2'7日按正替換頁 第二限位槽222的部份呈現朝z方向逐漸抬高的曲面態樣 。基座通孔214配置為靠近第二限位槽222，亦即基座通 孔214的下方開口位於限位面211的曲面部份。壓頭本體 220的内部具有容置空間226，容置空間226向下延伸貫 通壓頭本體220的底面。另外，本實施例所述之撕膜帶π 為用於撕除膜片的工業膠帶。 膠頭本體230設置於容置空間226中且向下凸伸有接 觸部231於壓頭本體之外，容置空間226與膠頭本體230 在水平方向，亦即在X-Y平面上的橫截面的大小形狀相匹 配，且容置空間226在垂直方向上具有對應於膠頭本體 230的讓位空間229。讓位空間229中設置有彈性元件232 ，.彈性元件232連接壓頭本體220與膠頭本體230。膠頭 本體230上配置有定位孔233，壓頭本體220的兩側具有 相對立的兩侧板224，側板224上配置有對應於定位孔 233的限位孔227，限位孔227為長條形，並透過一限位 軸體228穿設於定位孔233與限位孔227以連接膠頭本體 230與壓頭本體220 »如此一來，膠頭本體230可於容置 空間226中沿Z轴上下移動，並且限位孔227與限位軸體 228可互相配合以限制膠頭本體23〇的最大移動幅度，同 時，讓位空間229中的彈性元件232可提供緩衝的作用。 接觸部231具有朝向下的接觸面234，且朝向第—限 位槽221往上斜切有斜面235。另外，第一限位槽221與 斜面235之間，以及第二限位槽222與接觸面234之間， 分別配置有對應於撕膜帶n的滾輪233。第—限位槽22ι '斜面235、接觸面234與第二限位槽222形成撕膜帶u 第7頁/共21頁 10120535^單编號 A〇101 1013242653-0 M439259 101年06月27日修正替換頁 的滑動執道，滾輪233可使撕膜帶11更順暢的滑動於所述 滑動轨道中。 [0010] 側板240鄰近壓頭本體220的底面與第一端面之一角 ，亦即侧板240位於y方向與負z方向之一角，配置有抵壓 部250，抵壓部250具有朝向下的抵壓面251，抵壓面251 靠近第一端面的部份朝上彎曲，並且抵壓面251對應於限 位面211。 [0011] 撕膜帶收放機構120具有容置撕膜帶11的第一捲輪 121與第二捲輪122，第一捲輪121對應於第一限位槽221 且容置有進料用的撕膜帶11，第二捲輪122對應於第二限 位槽222且容置有使用後而收料的撕膜帶11。撕膜頭200 還具有第一撕膜帶止動件261與第二撕膜帶止動件262， 第一撕膜帶止動件261配置於撕膜頭200的第一端面，第 二撕膜帶止動件262配置於撕膜頭200的第二端面。在撕 膜的過程中，第一撕膜帶止動件261與第二撕膜帶止動件 262，分別抵住位於第一限位槽221與第二限位槽222上 的撕膜帶11而使其固定，以利於執行撕膜作業。 [⑻ 12] 請同時參閱圖1至圖6，圖5所繪示為本創作一較佳實 施例之撕膜頭的侧視圖，圖6所繪示為本創作一較佳實施 例之撕膜頭的移動示意圖。本實施例的撕膜設備10之撕 膜方法概述如下：撕膜帶11由第一捲輪121進料，並循序 通過第一限位槽221、斜面235、接觸面234與第二限位 槽222之後由第二捲輪122收料，第一撕膜帶止動件261 與第二撕膜帶止動件262分別抵持固定位於第一限位槽 221與第二限位槽222上的撕膜帶11，連帶穩固位於接觸 10120535^^ A0101 第8頁/共21頁 1013242653-0 jj-439259 面234上的撕膜帶11。同時’基板載台300透過 台傳動裝置移動至基板供應端，接受並固持貼附有待撕 除膜片501的基板500於基板載台300上方，接著基板栽 台300移動至撕膜頭200下方的預定位置，以執行撕除膜 片的流程。在本實施例中，所述移動至預定位置還包括 了基板載台300在Χ-Υ平面上旋轉一預定角度，使膜片 501的對角線對齊接觸部231，且膜片501的一角對齊接 觸面234。 [0013] 接著，撕膜頭200透過致動部110帶動而使接觸面[0009] On June 2, 2011, the second replacement slot 222 is in the form of a curved surface that gradually rises in the z direction. The pedestal through hole 214 is disposed adjacent to the second limiting groove 222, that is, the lower opening of the pedestal through hole 214 is located at a curved portion of the limiting surface 211. The interior of the indenter body 220 has an accommodation space 226, and the accommodation space 226 extends downwardly through the bottom surface of the indenter body 220. In addition, the tear film tape π described in this embodiment is an industrial tape for peeling off the film. The plastic body 230 is disposed in the accommodating space 226 and has a contact portion 231 protruding outwardly from the ram body. The accommodating space 226 and the plastic body 230 are in a horizontal direction, that is, a cross section on the XY plane. The size and shape match, and the accommodating space 226 has a yield space 229 corresponding to the head body 230 in the vertical direction. An elastic member 232 is disposed in the space 229, and the elastic member 232 connects the indenter body 220 and the head body 230. A positioning hole 233 is disposed on the head body 230. The two sides of the indenter body 220 have opposite side plates 224. The side plate 224 is provided with a limiting hole 227 corresponding to the positioning hole 233. The limiting hole 227 is long. The shank body 228 is disposed in the accommodating space 226 and the shank body 230 is disposed through the locating hole 233 and the limiting hole 227. The shaft moves up and down, and the limiting hole 227 and the limiting shaft body 228 can cooperate to limit the maximum movement amplitude of the plastic body 23, and at the same time, the elastic member 232 in the space 229 can provide a buffering effect. The contact portion 231 has a contact surface 234 facing downward, and a slope 235 is obliquely cut upward toward the first stopper groove 221 . Further, between the first limiting groove 221 and the inclined surface 235, and between the second limiting groove 222 and the contact surface 234, a roller 233 corresponding to the tear tape n is disposed. The first limit groove 22 ι 'bevel 235 , the contact surface 234 and the second limit groove 222 form a tear film strip u page 7 / total 21 pages 10120535 ^ single number A 〇 101 1013242653-0 M439259 June 27, 101 By correcting the slide of the replacement page, the roller 233 allows the tear film strip 11 to slide more smoothly in the slide track. [0010] The side plate 240 is adjacent to a corner of the bottom surface of the indenter body 220 and the first end surface, that is, the side plate 240 is located at an angle between the y direction and the negative z direction, and is provided with a pressing portion 250, and the pressing portion 250 has a downward facing The pressing surface 251, the portion of the pressing surface 251 close to the first end surface is curved upward, and the pressing surface 251 corresponds to the limiting surface 211. [0011] The tear film retracting mechanism 120 has a first reel 121 and a second reel 122 that accommodate the tear film strip 11. The first reel 121 corresponds to the first limiting slot 221 and accommodates the feeding. The tear film strip 11 and the second reel 122 correspond to the second limiting groove 222 and accommodate the tear film strip 11 which is collected after use. The tear film head 200 further has a first tear film strip stopper 261 and a second tear film strip stopper 262. The first tear film strip stopper 261 is disposed on the first end surface of the tear film head 200, and the second tear film The belt stopper 262 is disposed on the second end surface of the tear film head 200. In the process of tearing the film, the first tear film strip stopper 261 and the second tear film strip stopper 262 respectively abut the tear film strip 11 on the first limiting groove 221 and the second limiting groove 222, respectively. And it is fixed to facilitate the tear film operation. [(8) 12] Please refer to FIG. 1 to FIG. 6 at the same time. FIG. 5 is a side view of a tear film head according to a preferred embodiment of the present invention, and FIG. 6 is a tear film of a preferred embodiment of the present invention. Schematic diagram of the movement of the head. The tear film method of the tear film device 10 of the present embodiment is summarized as follows: the tear film strip 11 is fed by the first reel 121, and sequentially passes through the first limiting groove 221, the inclined surface 235, the contact surface 234 and the second limiting groove. After the 222 is received by the second reel 122, the first tear film strip stopper 261 and the second tear film strip stopper 262 are respectively fixedly fixed on the first limiting slot 221 and the second limiting slot 222. The tear film strip 11 is attached to the tear film strip 11 on the surface 234 of the contact 10120535^^ A0101 page 8/21 page 1013242653-0 jj-439259. At the same time, the substrate carrier 300 is moved to the substrate supply end through the stage transmission device, and the substrate 500 to which the film 501 to be removed is attached is received and held above the substrate stage 300, and then the substrate stage 300 is moved below the tear film head 200. The position is predetermined to perform the process of tearing off the diaphragm. In this embodiment, the moving to the predetermined position further includes rotating the substrate stage 300 on the Χ-Υ plane by a predetermined angle such that the diagonal line of the diaphragm 501 is aligned with the contact portion 231, and the corner of the diaphragm 501 is aligned. Contact surface 234. [0013] Next, the tear film head 200 is driven by the actuating portion 110 to make the contact surface
234向下抵壓撕膜帶11於基板500上的膜片501的一角， 同時’止轉>又缸111驅動止轉元件112向下抵住壓板225 ’使壓頭本體220無法旋轉❶接著致動部11〇帶動壓頭本 體220往y方向以相對慢速稍微移動一預定距離，同時止 轉汽赶111驅動止轉元件112往上回縮，此時壓頭本體 220會透過極接部212逆時鐘旋轉一角度，以致壓板225 被限位面21 i抵住，同時接觸面234往上拉起膜片5〇1的 一角且順勢轉由抵壓部250的抵壓面251抵壓膜片501。 此設計是模擬人工撕除膜片，用指腹抵壓膜片的一角而 順著指腹弧度撕起膜片的過程。此時，&膜頭2〇〇呈現如 圖6所示的態樣。接著，致動部11〇沿著γ軸與2軸朝預定 10120535^^^ 方向移動，同時，接觸面234透過撕膜帶U連接並拉持著 膜片501的一角，朝預定方向拉起並撕除膜片5〇1。在撕 除過程中，位於斜面235上的撕膜帶Π並不會接觸到膜片 5〇1，僅有位於接觸面234上的撕膜帶U會黏貼住膜片 5〇1的一角，以確保膜片501被撕除時的初始位置被限制 ，接觸面234的範圍，提高撕除效率。另外，所述預定方 1013242653-0 M439259 101年06月27日核正替換頁 向與致動部帶動壓頭本體22Q的移動速是根據不同- 尺寸與黏力的撕膜帶、膜片與基板而進行調整。 [0014] 被撕除的膜片501會位於骐片回收裝置_的上方。 而膜片回收裝置400具有可移動的夾具41〇與第一膜片感 應器420，夹具410會移動至被撕除的膜片如的下方， 並夾持膜㈣丨往下拉，使"5Q1脫離撕膜頭_後， 夾具410會放鬆使膜片501掉至回收交 w吹合器（圖中未繪示） 中。第-膜片感應器420用以感測夾具41〇是否夾持有膜 片5(Π ’若無’則表示膜片5〇1並未被撕除，則致動部 11〇回到準備撕膜的位置，且撕膜帶收放機構12〇會再進 - -段撕膜帶11 ’使接觸面234上的撕膜帶llit帶移動，而 因此置換一段新的撕膜帶U於接觸面234上。在其他實施 例中’撕賴亦可設置第二㈣錢^，當接觸面抵壓 在膜片的一角，且致動部往y方向稍微移動所述預定距離 時，若第二膜片感應器感測到膜片的一角未被撕起，則 如前所述再重新進行一次。 [0015] 在本實施例中，基板500旋轉至預定角度是透過基板 ί 載台300的作動，在其他實施例中，亦可透過撕膜頭來進 行旋轉，只需修改撕膜頭的結構，就能使其具有在χ-γ平 面上的旋轉能力，此種修改當屬本領域具通常知識者所 熟知，在此不再贅述。在本實施例中，彈性元件232為彈 簧，用以提供缓衝；壓頭本體220與膠頭本體230的材質 為鋁合金，用以提高剛性；接觸部231與抵壓部250的材 質為聚氨酯（polyurethane，PU)，因而當接觸部231 與抵壓部250抵壓基板500時，使接觸面234可更緊密的 10120535产單編號 A0101 第10頁/共21頁 1013242653-0 M439259234 presses down the tear film strip 11 at a corner of the diaphragm 501 on the substrate 500, while the 'stop rotation> and the cylinder 111 drives the rotation preventing member 112 downward against the pressing plate 225' so that the indenter body 220 cannot be rotated. The actuating portion 11 〇 drives the ram body 220 to move a predetermined distance in the y direction at a relatively slow speed, and at the same time, the slamming stop 111 drives the rotation preventing member 112 to retract upward, and the ram body 220 passes through the pole portion. The counterclockwise rotation is performed at an angle such that the pressure plate 225 is resisted by the limiting surface 21 i, and the contact surface 234 pulls up a corner of the diaphragm 5 〇 1 and rotates against the pressing surface 251 of the pressing portion 250 to press the film. Slice 501. This design simulates the process of manually tearing off the membrane and tearing the membrane along the radius of the finger pad by pressing the corner of the membrane with the fingertips. At this time, the & film head 2 〇〇 exhibits the appearance as shown in Fig. 6. Then, the actuating portion 11 is moved along the γ axis and the 2 axis in a predetermined direction of 10120535^^^, while the contact surface 234 is connected through the tear film tape U and pulls a corner of the diaphragm 501, and is pulled up in a predetermined direction. Peel off the membrane 5〇1. During the tearing process, the tear film tape on the inclined surface 235 does not contact the film 5〇1, and only the tear film tape U on the contact surface 234 adheres to a corner of the film 5〇1 to The initial position when the diaphragm 501 is torn off is ensured, and the range of the contact surface 234 is increased to improve the tearing efficiency. In addition, the predetermined side 1013242653-0 M439259 June 27, 101, the replacement of the page to move the head body 22Q with the actuation speed is based on different - size and adhesion of the tear film strip, diaphragm and substrate And make adjustments. [0014] The torn membrane 501 will be located above the sputum recovery device. The diaphragm recovery device 400 has a movable clamp 41 〇 and a first diaphragm sensor 420. The clamp 410 moves to the underside of the torn membrane, and clamps the membrane (4) to pull down, so that "5Q1 After exiting the tear film head _, the clamp 410 is relaxed to cause the diaphragm 501 to fall into the recovery w-blender (not shown). The first diaphragm sensor 420 is configured to sense whether the clamp 51 is clamped with the diaphragm 5 (Π 'if no' indicates that the diaphragm 5〇1 is not torn, the actuation portion 11 is returned to the ready to tear The position of the film, and the tear film retracting mechanism 12 will re-enter the - tear film strip 11 ' to move the tear film strip llit tape on the contact surface 234, thus replacing a new tear film strip U on the contact surface In other embodiments, 'the tearing may also set the second (four) money ^, when the contact surface is pressed against a corner of the diaphragm, and the actuating portion is slightly moved by the predetermined distance in the y direction, if the second film The sheet sensor senses that a corner of the diaphragm is not torn, and then repeats it again as described above. [0015] In the embodiment, the substrate 500 is rotated to a predetermined angle to be transmitted through the substrate 375. In other embodiments, the tearing head can also be rotated, and the structure of the tearing head can be modified to have the ability to rotate on the χ-γ plane. Such modification is a common knowledge in the field. As is well known, it will not be described here. In this embodiment, the elastic member 232 is a spring for providing cushioning; The material of the body 220 and the plastic body 230 is aluminum alloy for improving rigidity; the material of the contact portion 231 and the pressing portion 250 is polyurethane (PU), so that the contact portion 231 and the pressing portion 250 against the substrate 500 When the contact surface 234 can be made closer 10120535 production order number A0101 page 10 / total 21 page 1013242653-0 M439259
101年06月27日梭正替換頁 貼合膜片501而產生更好的黏著效果，以及使接觸面234 與抵壓面251在抵壓基板500的過程中不易對基板500造 成損傷。在其他實施例中，彈性元件、壓頭本體、膠頭 本體、接觸部與抵壓部亦可採用其他種具備同等功效的 元件與材質，並不限於本實施例所揭露之範圍。 [0016] 雖然本創作已以較佳實施例揭露如上，然其並非用 於限定本創作，任何熟習此技藝者，在不脫離本創作之 精神和範圍内，當可作些許之更動與潤飾，因此本創作 之保護範圍當視後附之申請專利範圍所界定者為準。 【圖式簡單說明】 [0017] 圖1為本創作一較佳實施例之撕膜設備的立艟圖。 [0018] 圖2為本創作一較佳實施例之撕膜設備的側視圖。 [0019] 圖3為本創作一較佳實施例之撕膜頭的爆炸圖。 [0020] 圖4為本創作一較佳實施例之致動部的爆炸圖。 [0021] 圖5為本創作一較佳實施例之撕膜頭的侧視圖。 [0022] 圖6為本創作一較佳實施例之撕膜頭的移動示意圖。 【主要元件符號說明】 [0023] 10 ： 撕膜設備 11 ： 撕膜帶 [0024] 100 :傳動裝置 110 :致動部 [0025] 111 :止轉汽缸 112 :止轉元件 [0026] 120 :撕膜帶收放機構 121 :第一捲輪 [0027] 122 :第二捲輪 130 :第一滑動部 10120535^^^^* A〇101 ^ 11 I / ^ 21 I 1013242653-0 M439259 [0028] 140 ： 第二滑動部 [0029] 210 ： 壓頭基座 [0030] 212 ： 棍接部 [0031] 214 ： 基座通孔 [0032] 221 ： 第一限位槽 [0033] 223 ： 滾輪 [0034] 225 ： 壓板 [0035] 227 ： 眼位孔 [0036] 229 ： 讓位空間 [0037] 231 ： 接觸部 [0038] 233 ： 定位子L [0039] 235 ： 斜面 [0040] 25.1 ： 抵壓面 [0041] 262 ： 第二撕膜帶止動件 [0042] 400 ： 膜片回收裝置 [0043] 420 ： 第一膜片感應器 [0044] 501 ： 膜片 101年06月27日按正替換π 200 :撕膜頭 211 :限位面 213 :基壁 220 :壓頭本體 222 :第二限位槽 224 :側板 226 :容置空間 228 :限位軸體 230 :膠頭本體 232 :彈性元件 234 :接觸面 250 :抵壓部 261 :第一撕膜帶止動件 | 300 :基板載台. 410 :夾具 500 :基板 ΗΠ20535严编號 Α0101 第12頁/共21頁 1013242653-0On June 27, 101, the shuttle replacement sheet is bonded to the diaphragm 501 to produce a better adhesion effect, and the contact surface 234 and the pressing surface 251 are less likely to cause damage to the substrate 500 during the process of pressing the substrate 500. In other embodiments, the elastic member, the indenter body, the head body, the contact portion and the pressing portion may adopt other components and materials having the same function, and are not limited to the scope disclosed in the embodiment. [0016] Although the present invention has been disclosed in the above preferred embodiments, it is not intended to limit the present invention, and those skilled in the art can make some modifications and refinements without departing from the spirit and scope of the present invention. Therefore, the scope of protection of this creation is subject to the definition of the scope of the patent application attached. BRIEF DESCRIPTION OF THE DRAWINGS [0017] FIG. 1 is a perspective view of a tear film apparatus according to a preferred embodiment of the present invention. 2 is a side view of a tear film device in accordance with a preferred embodiment of the present invention. 3 is an exploded view of a tear film head according to a preferred embodiment of the present invention. [0020] FIG. 4 is an exploded view of the actuation portion of the preferred embodiment of the present invention. [0021] FIG. 5 is a side elevational view of a tear film head in accordance with a preferred embodiment of the present invention. [0022] FIG. 6 is a schematic view showing the movement of the tear film head according to a preferred embodiment of the present invention. [Main component symbol description] [0023] 10 : tear film device 11 : tear film tape [0024] 100 : transmission device 110 : actuation portion [0025] 111 : rotation stop cylinder 112 : rotation stop member [0026] 120 : tear Film retracting mechanism 121: first reel [0027] 122: second reel 130: first sliding portion 10120535^^^^* A〇101 ^ 11 I / ^ 21 I 1013242653-0 M439259 [0028] : Second sliding portion [0029] 210 : Indenter base [0030] 212 : Sticking portion [0031] 214 : Base through hole [0032] 221 : First limiting groove [0033] 223 : Roller [0034] 225 : Platen [0035] 227 : Eye position hole [0036] 229 : Repose space [0037] 231 : Contact part [0038] 233 : Positioner L [0039] 235 : Bevel [0040] 25.1 : Abutment surface [0041 ] 262 : Second tear film with stopper [0042] 400 : Diaphragm recovery device [0043] 420 : First diaphragm sensor [0044] 501 : The diaphragm is replaced by π 200 on June 27, 2011: The tearing film head 211: the limiting surface 213: the base wall 220: the pressing head body 222: the second limiting groove 224: the side plate 226: the accommodating space 228: the limiting shaft body 230: the plastic head body 232: the elastic element 234: contact surface 250: pressing portion 261: a first film having a tear stopper | 300: substrate holder 410: clip 500: Yan substrate ΗΠ20535 Α0101 Page number 12 / of 21 1013242653-0.