M358303 五、新型說明： 【新型所屬之技術領域】 本創作係«-種晶粒檢測治具結構，尤指―種可供快速檢測 多量之晶粒，使檢測作業更為方便、快速之晶粒檢測治具。 【先前技術】 按；一般之LED、RFID、Driver IC、Smart 卡 1C·..等晶粒由於 日盈微小化’古數量繁多之晶粒於出廠後，若其中出現少量之瑕疲 品，由於需將所有的晶粒重新檢測一遍，將瑕疵品挑出，方可保證 晶粒之品質。因此，使得重測的作業相當麻煩且耗工費時，是以， 晶圓業者通常將整批晶粒予以報廢後，再重新生產以確保品質，故 而常造成晶圓業者少者佶萬多者仟萬之損失，因此，如何將存在瑕 疫品之整批晶粒於驗速時間重測，鱗低損失，實以為晶圓業者 所極思研發。申請人有鏗於此，乃秉持從事該·❹年之經驗， 經不斷研究、實驗，遂開發—種，祈使晶圓之晶粒的檢測更為方便、 快捷。 【新型内容】 本創作之主要目的，即在提供一種晶粒檢測治具結構，使多量 之晶粒的檢測得以方便、快速，以提高檢測作業之效率，降低因瑕 疵品所造成之損失。 前述之晶粒檢測治具結構，係包含一底座及一置於該底座之月 體’其中，該底座係設有一概呈方狀之凹陷部，於該凹陷部的四個 側邊分別設有延伸部，凹陷部的表面則設有複數個水平、垂直定位 M358303 肋；該片體係對應於底座之凹陷部，其設有複數個長孔，使片體置 於底座之凹陷部，使待檢測之晶粒置於片體之長孔中，藉由片體之 斜狀滑移，將不同之尺寸之晶粒限位於長孔側緣及水平、垂直定位 肋’以利於檢測設備之逐-檢測，進而使晶粒之檢測更為方便、快 速。 前述之晶粒檢測治具結構，其中該底座凹陷部之各水平、垂直 定位肋的内緣表面，係設有複數個貫穿底座之通孔，俾於底座之底 部連接真空設備’藉由通似真空將晶粒吸住構成定位，以利於檢 測作業。 前述之晶粒檢測治具結構，其中該底座凹陷部之各水平、垂直 定位肋’其找水平定㈣之内緣邊，係魅直定位肋之内緣邊呈 直線對齊，以利於晶粒之定位。 前述之晶粒檢測治具結構，其中該底座凹陷部之各水平定位肋 係與垂直定位肋構成適當之間隔距離，以消除因晶粒倒角所可能形 成之位置誤差。 【實施方式】 請同時參閱第-圖及第二圖，並配合第三圖及第四圖，本創作 主要係包含一底座1及一置於該底座1之片體2，其中，該底座工 係設有-概呈方狀之_部1 1，於該凹陷部丄丄的四個側邊分別 設有第-延伸部！2及第二延伸部1 3，凹陷部i w表面則設有 複數個水平定位肋i 4及垂直定位肋！5，各水平定位肋丨4係與 垂直疋位肋15構成適當之間隔距離，且其中該水平定位肋1 *之 M358303 内緣邊，係麵直定位肋1 5之内緣輕直線對齊，各水平、垂直 定位肋14、15的内緣表面，則設有複數個貫穿底座1之通孔丄 6 ； 該片體2，其形狀係對應於座體1之凹陷部11，其側邊分別 設有向外延伸之第—位移部2!及第二位移部2 2，表面則設有對 應於底座1水平定位肋丄4及垂直定位肋丄5之複數個長孔2 3 ; 藉由前述構件的組合，該片體2係置於底座2之凹陷部11 , 於底座1之底部連接真空設備，使待檢測之晶粒置於片體2之長孔 2 3中藉由片體2之斜狀滑移，將不同之尺寸之晶粒限位於長孔 23側緣及水平、垂直定位肋14、15 ,再藉由通孔16以真空 將晶粒吸住構成定位，以利於檢測設備之逐—檢測，進而使晶粒之 檢測更為方便、快速。 請同時參_五®及第六圖，她合第—圖，本創作於實際使 用時’係將片體2置於底座2之凹陷部1丄，使其第一位移部21 及第二位移部2 2分別置於凹陷部11之第—延伸部12及第二延 伸部13 ’並於底座i之底部連接真空設備。使待檢測之晶粒3置 於片體2之長孔2 3中，藉由片體2之第一、第二位移部2丄、2 2沿第-、第二延伸部！3之位移’使片體2構成斜狀之滑移，將 bb粒3限位於長孔2 3側緣及水平、垂直定位肋1 4、1 5。再藉 由通孔16以真空將晶粒吸住構成定位，其中，由於該水平定位肋 14之内緣邊，係與垂直定位肋丄5之内緣邊呈直線對齊，以利於 晶粒3之定位。且由於水平定位肋！4係與垂直定位肋i 5構成適 5 M358303 當之間隔距離’以消除因晶粒3倒角所可能形成之位置誤差（如第 五圖所示）。 而當較小尺寸之晶粒4置人時，該片體2則以向上斜狀之滑 移’以供將不同之尺寸之晶粒4限位於長孔2 3側緣及水平、垂直 定位肋1 4、1 5 (如第五圖所示）。再藉由通孔i 6以真空將晶粒 吸住構成定位，以概檢測設備之逐-檢測，進崎晶粒之檢測更 為方便、快速。 综上所述，本創作以設有定位肋之底座，配合設有對應突肋長 孔之片體’構成晶粒檢測治具結構，使多量之晶粒的檢測得以方便、 快速，以提高檢測作業之效率，降低因瑕疯品所造成之損失。為一 實用之雖’誠屬-俱新紐之創作，爰依法提出專利之中請，祈 釣局予以審查’早日賜准專利，至感德便。 【圖式簡單說明】 第一圖係本創作之立體分解圖。 第二圖係本創作之片體平面圖。 第三圖係本創作之底座平面圖。 第四圖係本創作之水平、垂直定位肋立體圖。 第五'六圖係本創作使用實施例圖。 M358303 【主要元件符號說明】 1 ·底座 11·凹陷部 12·第一延伸部 13·第二延伸部 14·水平定位肋 15·垂直定位肋 1 6 ·通孔 2 ·片體 21·第一位移部 2 2 *第二位移部 2 3 ·長孔 3 ·晶粒M358303 V. New description: 【New technology field】 This creation department «- kinds of grain inspection fixture structure, especially the species can be used to quickly detect a large number of grains, making the inspection operation more convenient and fast. Test fixture. [Prior Art] Press; general LED, RFID, Driver IC, Smart Card 1C·.. and other crystal grains due to the daily surplus of tiny crystals of a large number of ancient crystals after leaving the factory, if there is a small amount of fatigue, due to It is necessary to re-test all the crystal grains and pick out the defects to ensure the quality of the crystal grains. Therefore, the retesting operation is quite cumbersome and time consuming. Therefore, the wafer manufacturer usually scraps the entire batch of crystal grains and then reproduces them to ensure the quality. Therefore, the number of wafer manufacturers is often reduced. The loss of 10,000, therefore, how to re-test the entire batch of plague products in the test speed, low loss of scale, really think that the wafer industry is thinking and research. Applicants are here to do so, and they are engaged in the experience of this year, through continuous research, experiments, and development, to make the detection of wafer grains more convenient and fast. [New content] The main purpose of this creation is to provide a structure for the detection of a crystal grain, which enables the detection of a large number of crystal grains to be convenient and fast, so as to improve the efficiency of the inspection operation and reduce the loss caused by the defective product. The structure of the above-mentioned die detecting fixture comprises a base and a moon body disposed in the base, wherein the base is provided with a square-shaped recessed portion, and the four sides of the recessed portion are respectively provided The surface of the recessed portion is provided with a plurality of horizontal and vertical positioning M358303 ribs; the sheet system corresponds to the recessed portion of the base, and the plurality of long holes are provided, so that the sheet body is placed in the recessed portion of the base to be detected The crystal grains are placed in the long holes of the sheet body, and the different sizes of the crystal grains are limited to the side edges of the long holes and the horizontal and vertical positioning ribs by the oblique sliding of the sheet body to facilitate the detection-by-detection of the detecting device. In turn, the detection of the crystal grains is more convenient and rapid. In the foregoing structure of the die inspection fixture, the inner edge surface of each horizontal and vertical positioning rib of the recessed portion of the base is provided with a plurality of through holes penetrating through the base, and the vacuum device is connected to the bottom of the base. The vacuum sucks the dies to form a position to facilitate the inspection operation. In the foregoing structure of the crystal detecting fixture, wherein the horizontal and vertical positioning ribs of the recessed portion of the base are positioned to the inner edge of the horizontal (four), and the inner edge of the fascia straight positioning rib is linearly aligned to facilitate the grain Positioning. The foregoing grain detecting fixture structure, wherein each of the horizontal positioning ribs of the recessed portion of the base forms an appropriate distance from the vertical positioning rib to eliminate a positional error which may be formed due to the chamfering of the die. [Embodiment] Please refer to both the first and second figures, and in conjunction with the third and fourth figures, the present invention mainly comprises a base 1 and a sheet 2 placed on the base 1, wherein the base is There is a _ section 1 in a square shape, and a first extension is provided on each of the four sides of the depression !! 2 and the second extension portion 1 3, the surface of the recess portion i w is provided with a plurality of horizontal positioning ribs i 4 and vertical positioning ribs! 5, each of the horizontal positioning ribs 4 and the vertical clamping ribs 15 form a suitable separation distance, and wherein the inner edge of the horizontal positioning rib 1 * M358303, the inner edge of the straight surface positioning rib 15 is lightly aligned, each The inner edge surfaces of the horizontal and vertical positioning ribs 14 and 15 are provided with a plurality of through holes 贯穿6 penetrating the base 1; the sheet body 2 has a shape corresponding to the recessed portion 11 of the base body 1, and the side edges thereof are respectively provided The first displacement portion 2! and the second displacement portion 22 are outwardly extended, and the surface is provided with a plurality of long holes 2 3 corresponding to the horizontal positioning rib 4 and the vertical positioning rib 5 of the base 1; The combination of the body 2 is placed in the recessed portion 11 of the base 2, and a vacuum device is connected to the bottom of the base 1, so that the die to be detected is placed in the long hole 2 3 of the body 2 by the inclination of the body 2. Sliding, the different sizes of the crystal grains are limited to the side edges of the long holes 23 and the horizontal and vertical positioning ribs 14, 15 , and then the holes are sucked by the through holes 16 to form a positioning, so as to facilitate the detection equipment. - Detection, which makes the detection of the die more convenient and fast. Please refer to _5® and the sixth figure at the same time. She is in the same figure. In the actual use, the film is placed in the depression 1 of the base 2 to make the first displacement portion 21 and the second displacement. The portions 2 2 are respectively placed on the first extension portion 12 and the second extension portion 13' of the recessed portion 11 and connected to the vacuum device at the bottom of the base i. The die 3 to be inspected is placed in the long hole 2 3 of the sheet body 2, and the first and second displacement portions 2丄, 2 2 of the sheet body 2 are along the first and second extension portions! The displacement of 3 causes the sheet 2 to form a skewed slip, and the bb pellet 3 is limited to the side edge of the long hole 23 and the horizontal and vertical positioning ribs 14 and 15. Then, the die is positioned by vacuuming the through holes 16 , wherein the inner edge of the horizontal positioning rib 14 is linearly aligned with the inner edge of the vertical positioning rib 5 to facilitate the die 3 Positioning. And because of the horizontal positioning rib! The 4 series and the vertical positioning rib i 5 constitute a suitable spacing distance of the M 353303 to eliminate the positional error that may be formed due to the chamfering of the die 3 (as shown in Fig. 5). When the smaller size of the die 4 is placed, the body 2 is inclined upwardly to allow the different sizes of the die 4 to be located at the side edge of the long hole 2 3 and the horizontal and vertical positioning ribs. 1 4, 1 5 (as shown in the fifth figure). Then, by using the through hole i 6 to vacuum the crystal grain to form a positioning, the detection of the device is more convenient and fast. In summary, the creation of the base with the positioning ribs and the sheet body corresponding to the long holes of the corresponding ribs constitutes the structure of the crystal detection fixture, so that the detection of a large number of crystal grains is convenient and fast, so as to improve the detection. The efficiency of the work, reducing the damage caused by the madness. For the sake of practicality, the creation of 'sincerely----------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------- [Simple description of the diagram] The first diagram is a three-dimensional exploded view of the creation. The second picture is a plan view of the creation of the piece. The third picture is a plan view of the base of the creation. The fourth picture is a perspective view of the horizontal and vertical positioning ribs of the present creation. The fifth 'six diagrams' use of the embodiment diagram. M358303 [Description of main component symbols] 1 · Base 11 · Depression 12 · First extension 13 · Second extension 14 · Horizontal positioning rib 15 · Vertical positioning rib 1 6 · Through hole 2 · Sheet 21 · First displacement Part 2 2 * second displacement part 2 3 · long hole 3 · grain