TWI911359B - 使用質譜測定法監測自由基粒子濃度 - Google Patents

使用質譜測定法監測自由基粒子濃度

Info

Publication number
TWI911359B
TWI911359B TW110147914A TW110147914A TWI911359B TW I911359 B TWI911359 B TW I911359B TW 110147914 A TW110147914 A TW 110147914A TW 110147914 A TW110147914 A TW 110147914A TW I911359 B TWI911359 B TW I911359B
Authority
TW
Taiwan
Prior art keywords
free radical
flow channel
test chamber
aperture
particles
Prior art date
Application number
TW110147914A
Other languages
English (en)
Chinese (zh)
Other versions
TW202236347A (zh
Inventor
成隆 楊
建敏 劉
詹姆士 布雷西
Original Assignee
美商Ｍｋｓ儀器股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 美商Ｍｋｓ儀器股份有限公司 filed Critical 美商Ｍｋｓ儀器股份有限公司
Publication of TW202236347A publication Critical patent/TW202236347A/zh
Application granted granted Critical
Publication of TWI911359B publication Critical patent/TWI911359B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/0027—Methods for using particle spectrometers
    • H01J49/0031—Step by step routines describing the use of the apparatus
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/62—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode
    • G01N27/622—Ion mobility spectrometry
    • G01N27/623—Ion mobility spectrometry combined with mass spectrometry
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/28—Static spectrometers
    • H01J49/282—Static spectrometers using electrostatic analysers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Electrochemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Molecular Biology (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
TW110147914A 2020-12-23 2021-12-21 使用質譜測定法監測自由基粒子濃度 TWI911359B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US202063130257P 2020-12-23 2020-12-23
US63/130,257 2020-12-23

Publications (2)

Publication Number Publication Date
TW202236347A TW202236347A (zh) 2022-09-16
TWI911359B true TWI911359B (zh) 2026-01-11

Family

ID=80050861

Family Applications (1)

Application Number Title Priority Date Filing Date
TW110147914A TWI911359B (zh) 2020-12-23 2021-12-21 使用質譜測定法監測自由基粒子濃度

Country Status (7)

Country Link
US (2) US11971386B2 (https=)
EP (1) EP4268261A1 (https=)
JP (1) JP2024501279A (https=)
KR (1) KR20230123998A (https=)
CN (1) CN116635976A (https=)
TW (1) TWI911359B (https=)
WO (1) WO2022140740A1 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022256295A1 (en) * 2021-06-01 2022-12-08 Inficon, Inc. Method of detecting radicals using mass spectrometry
US20230411129A1 (en) * 2022-06-15 2023-12-21 Applied Materials, Inc. Closed-loop control of plasma source via feedback from laser absorption species sensor
JP2026508739A (ja) * 2022-11-16 2026-03-12 エムケーエス インコーポレイテッド プロセスツール診断のためのラジカル検知
US20250308867A1 (en) * 2024-03-29 2025-10-02 Tokyo Electron Limited High-performance adaptable sampling system

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US20140374583A1 (en) * 2013-06-24 2014-12-25 Agilent Technologies, Inc. Electron ionization (ei) utilizing different ei energies
US20200185210A1 (en) * 2018-12-05 2020-06-11 Shimadzu Corporation Mass spectrometer
TW202043725A (zh) * 2019-03-25 2020-12-01 日商亞多納富有限公司 氣體分析裝置gas analyzer

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JP2006501620A (ja) 2002-09-30 2006-01-12 東京エレクトロン株式会社 プラズマ処理システムとともに光学系を使用するための装置及び方法
JP5469823B2 (ja) 2008-04-25 2014-04-16 アジレント・テクノロジーズ・インク プラズマイオン源質量分析装置
GB2470294B (en) 2009-05-13 2014-02-26 Micromass Ltd Surface coating on sampling cone of mass spectrometer
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US20140374583A1 (en) * 2013-06-24 2014-12-25 Agilent Technologies, Inc. Electron ionization (ei) utilizing different ei energies
US20200185210A1 (en) * 2018-12-05 2020-06-11 Shimadzu Corporation Mass spectrometer
TW202043725A (zh) * 2019-03-25 2020-12-01 日商亞多納富有限公司 氣體分析裝置gas analyzer

Also Published As

Publication number Publication date
US12265057B2 (en) 2025-04-01
US20240264116A1 (en) 2024-08-08
US20220196597A1 (en) 2022-06-23
WO2022140740A1 (en) 2022-06-30
EP4268261A1 (en) 2023-11-01
CN116635976A (zh) 2023-08-22
TW202236347A (zh) 2022-09-16
KR20230123998A (ko) 2023-08-24
JP2024501279A (ja) 2024-01-11
US11971386B2 (en) 2024-04-30

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