TWI902781B - 具有電力回收之輸入阻抗網路 - Google Patents

具有電力回收之輸入阻抗網路

Info

Publication number
TWI902781B
TWI902781B TW110113252A TW110113252A TWI902781B TW I902781 B TWI902781 B TW I902781B TW 110113252 A TW110113252 A TW 110113252A TW 110113252 A TW110113252 A TW 110113252A TW I902781 B TWI902781 B TW I902781B
Authority
TW
Taiwan
Prior art keywords
power
voltage
circuit
current
coupled
Prior art date
Application number
TW110113252A
Other languages
English (en)
Chinese (zh)
Other versions
TW202211290A (zh
Inventor
吉狄翁 封扎爾
Original Assignee
新加坡商Ａｅｓ全球公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 新加坡商Ａｅｓ全球公司 filed Critical 新加坡商Ａｅｓ全球公司
Publication of TW202211290A publication Critical patent/TW202211290A/zh
Application granted granted Critical
Publication of TWI902781B publication Critical patent/TWI902781B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32174—Circuits specially adapted for controlling the RF discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32174—Circuits specially adapted for controlling the RF discharge
    • H01J37/32183—Matching circuits
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M1/00—Details of apparatus for conversion
    • H02M1/0003—Details of control, feedback or regulation circuits
    • H02M1/0009—Devices or circuits for detecting current in a converter
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M7/00—Conversion of AC power input into DC power output; Conversion of DC power input into AC power output
    • H02M7/42—Conversion of DC power input into AC power output without possibility of reversal
    • H02M7/44—Conversion of DC power input into AC power output without possibility of reversal by static converters
    • H02M7/48—Conversion of DC power input into AC power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
    • H02M7/53—Conversion of DC power input into AC power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
    • H02M7/537—Conversion of DC power input into AC power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H7/00—Multiple-port networks comprising only passive electrical elements as network components
    • H03H7/38—Impedance-matching networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H7/00—Multiple-port networks comprising only passive electrical elements as network components
    • H03H7/52—One-way transmission networks, i.e. unilines

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Power Engineering (AREA)
  • Amplifiers (AREA)
  • Inverter Devices (AREA)
  • Plasma Technology (AREA)
  • Dc Digital Transmission (AREA)
TW110113252A 2020-04-13 2021-04-13 具有電力回收之輸入阻抗網路 TWI902781B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US202063009049P 2020-04-13 2020-04-13
US63/009,049 2020-04-13

Publications (2)

Publication Number Publication Date
TW202211290A TW202211290A (zh) 2022-03-16
TWI902781B true TWI902781B (zh) 2025-11-01

Family

ID=78006524

Family Applications (1)

Application Number Title Priority Date Filing Date
TW110113252A TWI902781B (zh) 2020-04-13 2021-04-13 具有電力回收之輸入阻抗網路

Country Status (7)

Country Link
US (2) US11876460B2 (enExample)
EP (1) EP4136812A4 (enExample)
JP (1) JP2023521998A (enExample)
KR (1) KR102899304B1 (enExample)
CN (1) CN117678204A (enExample)
TW (1) TWI902781B (enExample)
WO (1) WO2021211582A1 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11114279B2 (en) * 2019-06-28 2021-09-07 COMET Technologies USA, Inc. Arc suppression device for plasma processing equipment
JP2023521998A (ja) 2020-04-13 2023-05-26 エーイーエス グローバル ホールディングス， プライベート リミテッド 電力回収を伴う入力インピーダンスネットワーク
US11705822B2 (en) 2021-04-13 2023-07-18 Advanced Energy Industries, Inc. Voltage clamp and current clamp systems with power recovery
US11711022B2 (en) * 2021-04-13 2023-07-25 Advanced Energy Industries, Inc. Series stack switch circuit with voltage clamping and power recovery
JP2025501754A (ja) * 2021-12-23 2025-01-23 エーイーエス グローバル ホールディングス， プライベート リミテッド 電圧グランピングおよび電力回収を伴う直列スタックスイッチ回路
JP7227662B1 (ja) 2022-05-27 2023-02-22 本多通信工業株式会社 電磁気妨害低減装置及び電気回路の設計方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201832466A (zh) * 2016-11-17 2018-09-01 日商達誼恆股份有限公司 驅動電路以及阻抗整合裝置
US10404242B1 (en) * 2017-03-02 2019-09-03 Rockwell Collins, Inc. High power RF limiter

Family Cites Families (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2790600B2 (ja) 1993-08-30 1998-08-27 三菱電機株式会社 電力変換装置
US5606284A (en) 1994-08-26 1997-02-25 Matsushita Electric Industrial Co., Ltd. Automatic gain control device for producing constant amplitude output signal
US6469919B1 (en) * 1999-07-22 2002-10-22 Eni Technology, Inc. Power supplies having protection circuits
US20020180552A1 (en) * 2001-05-29 2002-12-05 Bennett Jeffrey H. Input power limiter for a microwave receiver
CN1781134A (zh) * 2003-04-29 2006-05-31 皇家飞利浦电子股份有限公司 等离子体显示面板的能量恢复装置
JP4430531B2 (ja) 2004-12-28 2010-03-10 株式会社日立製作所 双方向絶縁型ｄｃ−ｄｃコンバータ
US7286060B2 (en) 2005-08-12 2007-10-23 Roberts Retrovalve, Inc. Indicators for vacuum tube replacement devices
US7529107B2 (en) * 2006-09-27 2009-05-05 Osram Sylvania, Inc. Power supply and electronic ballast with voltage clamping circuit
WO2010013344A1 (ja) 2008-08-01 2010-02-04 三菱電機株式会社 交流直流変換装置、交流直流変換装置の制御方法、電動機駆動装置、圧縮機駆動装置、空気調和機、ヒートポンプ式給湯機
WO2010036980A1 (en) * 2008-09-27 2010-04-01 Witricity Corporation Wireless energy transfer systems
US20120235504A1 (en) * 2008-09-27 2012-09-20 Kesler Morris P Tunable wireless energy transfer for sensors
US8823303B2 (en) 2008-12-01 2014-09-02 Mitsubishi Electric Corporation Alternating-current direct-current converter and electric motor driver
US8344559B2 (en) 2009-05-05 2013-01-01 Advanced Energy Industries, Inc. Multi-feed RF distribution systems and methods
US9065426B2 (en) * 2011-11-03 2015-06-23 Advanced Energy Industries, Inc. High frequency solid state switching for impedance matching
US8982523B2 (en) * 2011-02-25 2015-03-17 Cambium Networks, Ltd Bias voltage circuit for biasing a transient suppression device and apparatus using same
US8929107B2 (en) * 2011-10-21 2015-01-06 Power Integrations, Inc. Active surge protection in a power supply
US9019669B1 (en) * 2012-12-19 2015-04-28 Pmc-Sierra Us, Inc. Distributed electrostatic discharge protection circuit
US9620337B2 (en) 2013-01-31 2017-04-11 Lam Research Corporation Determining a malfunctioning device in a plasma system
US9755423B2 (en) 2014-03-13 2017-09-05 Infineon Technologies Ag Overvoltage protection for a synchronous power rectifier
JP5797313B1 (ja) * 2014-08-25 2015-10-21 株式会社京三製作所 回生サーキュレータ、高周波電源装置、及び高周波電力の回生方法
US20160380425A1 (en) 2015-06-26 2016-12-29 Sunpower Corporation Snubber circuit, power converter and methods of operating the same
US10720894B2 (en) 2016-04-15 2020-07-21 Cape Peninsula University Of Technology Inverse Class-F power amplifier
US10367350B2 (en) 2016-06-30 2019-07-30 Infineon Technologies Ag Central combined active ESD clamp
US10148188B2 (en) 2016-09-06 2018-12-04 Fairchild Semiconductor Corporation Clamp voltage detection and over-voltage protection for power supply topologies
CN106341925B (zh) 2016-09-21 2018-05-08 深圳市芯飞凌半导体有限公司 Led驱动芯片、可色温调节的led驱动电源系统及led灯具
EP3646249B1 (en) * 2017-06-28 2022-07-27 Lenlok Holdings, LLC Energy harvesting rfid circuit, energy harvesting rfid tag, and associated methods
EP3514907B1 (en) 2018-01-18 2024-08-28 Hitachi Energy Ltd Crowbar device and multistage crowbar apparatus
EP3763041A1 (en) 2018-03-05 2021-01-13 AES Global Holdings, Pte. Ltd. Pin diode driver with energy recovery
CN208316381U (zh) 2018-04-18 2019-01-01 广东希塔变频技术有限公司 电源充电控制电路
WO2019217892A1 (en) * 2018-05-10 2019-11-14 Advanced Energy Industries, Inc. Precision digital to analog conversion in the presence of variable and uncertain fractional bit contributions
US10587206B1 (en) 2018-08-17 2020-03-10 Texas Instruments Incorporated Clamp control based on a converter output supply voltage mode and a converter input supply voltage mode
JP7112952B2 (ja) * 2018-12-26 2022-08-04 株式会社ダイヘン インピーダンス整合装置及びインピーダンス整合方法
JP7177579B2 (ja) 2019-08-27 2022-11-24 東芝三菱電機産業システム株式会社 半導体スイッチングユニット
JP2023521998A (ja) 2020-04-13 2023-05-26 エーイーエス グローバル ホールディングス， プライベート リミテッド 電力回収を伴う入力インピーダンスネットワーク
EP4280443A4 (en) 2021-01-21 2024-03-13 Huawei Digital Power Technologies Co., Ltd. RESONANT AC TO DC CONVERTER, ELECTRONIC DEVICE AND ADAPTER
US11711022B2 (en) 2021-04-13 2023-07-25 Advanced Energy Industries, Inc. Series stack switch circuit with voltage clamping and power recovery
US11705822B2 (en) 2021-04-13 2023-07-18 Advanced Energy Industries, Inc. Voltage clamp and current clamp systems with power recovery

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201832466A (zh) * 2016-11-17 2018-09-01 日商達誼恆股份有限公司 驅動電路以及阻抗整合裝置
US20190288683A1 (en) * 2016-11-17 2019-09-19 Daihen Corporation Drive Circuit and Impedance Matching Device
US10404242B1 (en) * 2017-03-02 2019-09-03 Rockwell Collins, Inc. High power RF limiter

Also Published As

Publication number Publication date
US12237778B2 (en) 2025-02-25
JP2023521998A (ja) 2023-05-26
US20210320594A1 (en) 2021-10-14
WO2021211582A1 (en) 2021-10-21
US20240154541A1 (en) 2024-05-09
US11876460B2 (en) 2024-01-16
CN117678204A (zh) 2024-03-08
EP4136812A4 (en) 2024-04-17
EP4136812A1 (en) 2023-02-22
TW202211290A (zh) 2022-03-16
KR20230003521A (ko) 2023-01-06
KR102899304B1 (ko) 2025-12-12

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