KR102899304B1 - 전력 복원을 사용하는 입력 임피던스 네트워크들 - Google Patents

전력 복원을 사용하는 입력 임피던스 네트워크들

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Publication number
KR102899304B1
KR102899304B1 KR1020227039667A KR20227039667A KR102899304B1 KR 102899304 B1 KR102899304 B1 KR 102899304B1 KR 1020227039667 A KR1020227039667 A KR 1020227039667A KR 20227039667 A KR20227039667 A KR 20227039667A KR 102899304 B1 KR102899304 B1 KR 102899304B1
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KR
South Korea
Prior art keywords
power
circuit
voltage
coupled
current
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KR1020227039667A
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English (en)
Korean (ko)
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KR20230003521A (ko
Inventor
질 기디언 밴
Original Assignee
에이이에스 글로벌 홀딩스 피티이 리미티드
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Publication of KR20230003521A publication Critical patent/KR20230003521A/ko
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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32174—Circuits specially adapted for controlling the RF discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32174—Circuits specially adapted for controlling the RF discharge
    • H01J37/32183—Matching circuits
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M1/00—Details of apparatus for conversion
    • H02M1/0003—Details of control, feedback or regulation circuits
    • H02M1/0009—Devices or circuits for detecting current in a converter
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M7/00—Conversion of AC power input into DC power output; Conversion of DC power input into AC power output
    • H02M7/42—Conversion of DC power input into AC power output without possibility of reversal
    • H02M7/44—Conversion of DC power input into AC power output without possibility of reversal by static converters
    • H02M7/48—Conversion of DC power input into AC power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
    • H02M7/53—Conversion of DC power input into AC power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
    • H02M7/537—Conversion of DC power input into AC power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H7/00—Multiple-port networks comprising only passive electrical elements as network components
    • H03H7/38—Impedance-matching networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H7/00—Multiple-port networks comprising only passive electrical elements as network components
    • H03H7/52—One-way transmission networks, i.e. unilines

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Power Engineering (AREA)
  • Amplifiers (AREA)
  • Inverter Devices (AREA)
  • Plasma Technology (AREA)
  • Dc Digital Transmission (AREA)
KR1020227039667A 2020-04-13 2021-04-13 전력 복원을 사용하는 입력 임피던스 네트워크들 Active KR102899304B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US202063009049P 2020-04-13 2020-04-13
US63/009,049 2020-04-13
PCT/US2021/027081 WO2021211582A1 (en) 2020-04-13 2021-04-13 Input impedance networks with power recovery

Publications (2)

Publication Number Publication Date
KR20230003521A KR20230003521A (ko) 2023-01-06
KR102899304B1 true KR102899304B1 (ko) 2025-12-12

Family

ID=78006524

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020227039667A Active KR102899304B1 (ko) 2020-04-13 2021-04-13 전력 복원을 사용하는 입력 임피던스 네트워크들

Country Status (7)

Country Link
US (2) US11876460B2 (enExample)
EP (1) EP4136812A4 (enExample)
JP (1) JP2023521998A (enExample)
KR (1) KR102899304B1 (enExample)
CN (1) CN117678204A (enExample)
TW (1) TWI902781B (enExample)
WO (1) WO2021211582A1 (enExample)

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US11114279B2 (en) * 2019-06-28 2021-09-07 COMET Technologies USA, Inc. Arc suppression device for plasma processing equipment
JP2023521998A (ja) 2020-04-13 2023-05-26 エーイーエス グローバル ホールディングス， プライベート リミテッド 電力回収を伴う入力インピーダンスネットワーク
US11705822B2 (en) 2021-04-13 2023-07-18 Advanced Energy Industries, Inc. Voltage clamp and current clamp systems with power recovery
US11711022B2 (en) * 2021-04-13 2023-07-25 Advanced Energy Industries, Inc. Series stack switch circuit with voltage clamping and power recovery
JP2025501754A (ja) * 2021-12-23 2025-01-23 エーイーエス グローバル ホールディングス， プライベート リミテッド 電圧グランピングおよび電力回収を伴う直列スタックスイッチ回路
JP7227662B1 (ja) 2022-05-27 2023-02-22 本多通信工業株式会社 電磁気妨害低減装置及び電気回路の設計方法

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US10404242B1 (en) * 2017-03-02 2019-09-03 Rockwell Collins, Inc. High power RF limiter

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US11711022B2 (en) 2021-04-13 2023-07-25 Advanced Energy Industries, Inc. Series stack switch circuit with voltage clamping and power recovery
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Publication number Priority date Publication date Assignee Title
US10404242B1 (en) * 2017-03-02 2019-09-03 Rockwell Collins, Inc. High power RF limiter

Also Published As

Publication number Publication date
US12237778B2 (en) 2025-02-25
JP2023521998A (ja) 2023-05-26
TWI902781B (zh) 2025-11-01
US20210320594A1 (en) 2021-10-14
WO2021211582A1 (en) 2021-10-21
US20240154541A1 (en) 2024-05-09
US11876460B2 (en) 2024-01-16
CN117678204A (zh) 2024-03-08
EP4136812A4 (en) 2024-04-17
EP4136812A1 (en) 2023-02-22
TW202211290A (zh) 2022-03-16
KR20230003521A (ko) 2023-01-06

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