TWI893499B - 無塵室設施 - Google Patents

無塵室設施

Info

Publication number
TWI893499B
TWI893499B TW112141451A TW112141451A TWI893499B TW I893499 B TWI893499 B TW I893499B TW 112141451 A TW112141451 A TW 112141451A TW 112141451 A TW112141451 A TW 112141451A TW I893499 B TWI893499 B TW I893499B
Authority
TW
Taiwan
Prior art keywords
air
cleanroom
room
chamber
aforementioned
Prior art date
Application number
TW112141451A
Other languages
English (en)
Chinese (zh)
Other versions
TW202432993A (zh
Inventor
今口信弘
西村典俊
松崎和仁
Original Assignee
日商日立環球生活方案股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商日立環球生活方案股份有限公司 filed Critical 日商日立環球生活方案股份有限公司
Publication of TW202432993A publication Critical patent/TW202432993A/zh
Application granted granted Critical
Publication of TWI893499B publication Critical patent/TWI893499B/zh

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F7/00—Ventilation
    • F24F7/04—Ventilation with ducting systems, e.g. by double walls; with natural circulation
    • F24F7/06—Ventilation with ducting systems, e.g. by double walls; with natural circulation with forced air circulation, e.g. by fan positioning of a ventilator in or against a conduit

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Ventilation (AREA)
TW112141451A 2023-02-10 2023-10-30 無塵室設施 TWI893499B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
PCT/JP2023/004512 WO2024166344A1 (ja) 2023-02-10 2023-02-10 クリーンルーム施設
WOPCT/JP2023/004512 2023-02-10

Publications (2)

Publication Number Publication Date
TW202432993A TW202432993A (zh) 2024-08-16
TWI893499B true TWI893499B (zh) 2025-08-11

Family

ID=92262262

Family Applications (1)

Application Number Title Priority Date Filing Date
TW112141451A TWI893499B (zh) 2023-02-10 2023-10-30 無塵室設施

Country Status (3)

Country Link
JP (1) JPWO2024166344A1 (enExample)
TW (1) TWI893499B (enExample)
WO (1) WO2024166344A1 (enExample)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3835883B2 (ja) * 1997-04-25 2006-10-18 株式会社大気社 清浄空気吹出ユニット、及び、クリーンルーム
CN211286806U (zh) * 2019-11-05 2020-08-18 深圳市冠航环境科技工程有限公司 一种布袋送风的洁净室
CN111829103A (zh) * 2020-08-19 2020-10-27 江苏博创翰林光电高科技有限公司 分布式节能型恒温洁净室
WO2021111550A1 (ja) * 2019-12-04 2021-06-10 日立グローバルライフソリューションズ株式会社 空調システム

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63116037A (ja) * 1986-11-03 1988-05-20 Hirayama Setsubi Kk クリーンルームシステム用ユニット
JPH08327106A (ja) * 1995-05-31 1996-12-13 Taikisha Ltd クリーンルーム設備
JP3090088B2 (ja) * 1997-02-07 2000-09-18 富士電機株式会社 クリーンルームのファンフィルタユニット
JP4758623B2 (ja) * 2004-07-27 2011-08-31 大和製罐株式会社 製造設備
JP5517755B2 (ja) * 2010-06-05 2014-06-11 株式会社竹中工務店 クリーンルーム区画ユニット及びクリーンルーム区画方法
JP2014070748A (ja) * 2012-09-27 2014-04-21 Dainippon Printing Co Ltd クリーンルームの区画方法、クリーンルーム
JP7649850B2 (ja) * 2021-06-04 2025-03-21 日立グローバルライフソリューションズ株式会社 空調システム

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3835883B2 (ja) * 1997-04-25 2006-10-18 株式会社大気社 清浄空気吹出ユニット、及び、クリーンルーム
CN211286806U (zh) * 2019-11-05 2020-08-18 深圳市冠航环境科技工程有限公司 一种布袋送风的洁净室
WO2021111550A1 (ja) * 2019-12-04 2021-06-10 日立グローバルライフソリューションズ株式会社 空調システム
CN111829103A (zh) * 2020-08-19 2020-10-27 江苏博创翰林光电高科技有限公司 分布式节能型恒温洁净室

Also Published As

Publication number Publication date
TW202432993A (zh) 2024-08-16
JPWO2024166344A1 (enExample) 2024-08-15
WO2024166344A1 (ja) 2024-08-15

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