TWI871384B - 高壓閥用致動器 - Google Patents

高壓閥用致動器 Download PDF

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Publication number
TWI871384B
TWI871384B TW109140695A TW109140695A TWI871384B TW I871384 B TWI871384 B TW I871384B TW 109140695 A TW109140695 A TW 109140695A TW 109140695 A TW109140695 A TW 109140695A TW I871384 B TWI871384 B TW I871384B
Authority
TW
Taiwan
Prior art keywords
valve
actuator
thrust
ball
piston
Prior art date
Application number
TW109140695A
Other languages
English (en)
Chinese (zh)
Other versions
TW202129179A (zh
Inventor
石橋圭介
藥師神忠幸
丹後谷亮
吉田忠信
山路道雄
宇留野昌一
Original Assignee
日商富士金股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商富士金股份有限公司 filed Critical 日商富士金股份有限公司
Publication of TW202129179A publication Critical patent/TW202129179A/zh
Application granted granted Critical
Publication of TWI871384B publication Critical patent/TWI871384B/zh

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/44—Mechanical actuating means
    • F16K31/52—Mechanical actuating means with crank, eccentric, or cam
    • F16K31/524—Mechanical actuating means with crank, eccentric, or cam with a cam
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
    • F16K31/1225—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston with a plurality of pistons
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
    • F16K31/1226—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston the fluid circulating through the piston
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/16—Actuating devices; Operating means; Releasing devices actuated by fluid with a mechanism, other than pulling-or pushing-rod, between fluid motor and closure member
    • F16K31/163—Actuating devices; Operating means; Releasing devices actuated by fluid with a mechanism, other than pulling-or pushing-rod, between fluid motor and closure member the fluid acting on a piston
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/44—Mechanical actuating means
    • F16K31/52—Mechanical actuating means with crank, eccentric, or cam
    • F16K31/524—Mechanical actuating means with crank, eccentric, or cam with a cam
    • F16K31/52491—Mechanical actuating means with crank, eccentric, or cam with a cam comprising a diaphragm cut-off apparatus
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/126—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm the seat being formed on a rib perpendicular to the fluid line
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
    • F16K7/16—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being mechanically actuated, e.g. by screw-spindle or cam
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
    • F16K7/17—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being actuated by fluid pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16N—LUBRICATING
    • F16N11/00—Arrangements for supplying grease from a stationary reservoir or the equivalent in or on the machine or member to be lubricated; Grease cups
    • F16N11/08—Arrangements for supplying grease from a stationary reservoir or the equivalent in or on the machine or member to be lubricated; Grease cups with mechanical drive, other than directly by springs or weights
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16N—LUBRICATING
    • F16N2280/00—Valves

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Fluid-Driven Valves (AREA)
  • Mechanically-Actuated Valves (AREA)
TW109140695A 2019-11-22 2020-11-20 高壓閥用致動器 TWI871384B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019211195 2019-11-22
JP2019-211195 2019-11-22

Publications (2)

Publication Number Publication Date
TW202129179A TW202129179A (zh) 2021-08-01
TWI871384B true TWI871384B (zh) 2025-02-01

Family

ID=75980634

Family Applications (1)

Application Number Title Priority Date Filing Date
TW109140695A TWI871384B (zh) 2019-11-22 2020-11-20 高壓閥用致動器

Country Status (5)

Country Link
US (1) US20220397203A1 (https=)
JP (1) JP7487952B2 (https=)
KR (1) KR102823681B1 (https=)
TW (1) TWI871384B (https=)
WO (1) WO2021100455A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI872980B (zh) * 2024-03-08 2025-02-11 新萊應材科技有限公司 具有緩衝洩氣功能之兩段式角閥
DE102024118251A1 (de) * 2024-06-27 2025-12-31 Gemü Gebr. Müller Apparatebau Gmbh & Co. Kommanditgesellschaft Spannbaugruppe, Prozessventil und Verfahren zur Montage, Demontage und zum Tausch von Ventilmembranen

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3296138A (en) * 1963-08-06 1967-01-03 Union Carbide Corp Extreme pressure lubricant additives
US4270398A (en) * 1978-10-11 1981-06-02 Franz Arnold Mechanical amplifier
JP2012037048A (ja) * 2010-07-15 2012-02-23 Kitz Sct:Kk バルブ用アクチュエータ
US8662469B2 (en) * 2008-05-23 2014-03-04 Fujikura Rubber Ltd. Power assisted on/off valve
WO2018110132A1 (ja) * 2016-12-12 2018-06-21 株式会社フジキン バルブおよび半導体製造装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2614990A (en) * 1949-10-11 1952-10-21 Shell Dev Lubricating composition of matter
US4549719A (en) * 1984-02-02 1985-10-29 Baumann Hans D Mechanical amplifying means for valves and other devices
JPH086828B2 (ja) * 1991-08-09 1996-01-29 株式会社ベンカン メタルダイヤフラム弁
JPH10220598A (ja) * 1997-01-31 1998-08-21 Toyota Motor Corp 油圧シール構造
US6805158B2 (en) * 2000-03-27 2004-10-19 Fujikura Rubber Ltd. Apparatus for visually checking the operational status of a stop valve, and a manual opening apparatus for a normally-closed valve
JPWO2008096646A1 (ja) * 2007-02-06 2010-05-20 株式会社フジキン 流体制御器
US20090114873A1 (en) * 2007-11-05 2009-05-07 Richard Anagnos Diaphragm for use with control valves
KR101827564B1 (ko) * 2010-07-15 2018-02-09 가부시키가이샤 깃츠 에스시티 밸브용 액추에이터
JP7129096B2 (ja) * 2017-03-31 2022-09-01 株式会社フジキン 制御器
JP7045839B2 (ja) * 2017-12-08 2022-04-01 株式会社キッツエスシーティー 流体制御バルブ

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3296138A (en) * 1963-08-06 1967-01-03 Union Carbide Corp Extreme pressure lubricant additives
US4270398A (en) * 1978-10-11 1981-06-02 Franz Arnold Mechanical amplifier
US8662469B2 (en) * 2008-05-23 2014-03-04 Fujikura Rubber Ltd. Power assisted on/off valve
JP2012037048A (ja) * 2010-07-15 2012-02-23 Kitz Sct:Kk バルブ用アクチュエータ
WO2018110132A1 (ja) * 2016-12-12 2018-06-21 株式会社フジキン バルブおよび半導体製造装置

Also Published As

Publication number Publication date
US20220397203A1 (en) 2022-12-15
TW202129179A (zh) 2021-08-01
JP7487952B2 (ja) 2024-05-21
KR102823681B1 (ko) 2025-06-20
KR20220081378A (ko) 2022-06-15
WO2021100455A1 (ja) 2021-05-27
JPWO2021100455A1 (https=) 2021-05-27

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