JP7487952B2 - 高圧バルブ用アクチュエータ - Google Patents

高圧バルブ用アクチュエータ Download PDF

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Publication number
JP7487952B2
JP7487952B2 JP2021558267A JP2021558267A JP7487952B2 JP 7487952 B2 JP7487952 B2 JP 7487952B2 JP 2021558267 A JP2021558267 A JP 2021558267A JP 2021558267 A JP2021558267 A JP 2021558267A JP 7487952 B2 JP7487952 B2 JP 7487952B2
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JP
Japan
Prior art keywords
actuator
valve
ball
stem
thrust
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2021558267A
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English (en)
Japanese (ja)
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JPWO2021100455A1 (https=
Inventor
圭介 石橋
忠幸 薬師神
亮 丹後谷
忠信 吉田
道雄 山路
昌一 宇留野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujikin Inc
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Fujikin Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
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Publication of JPWO2021100455A1 publication Critical patent/JPWO2021100455A1/ja
Application granted granted Critical
Publication of JP7487952B2 publication Critical patent/JP7487952B2/ja
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
    • F16K7/17—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being actuated by fluid pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/44—Mechanical actuating means
    • F16K31/52—Mechanical actuating means with crank, eccentric, or cam
    • F16K31/524—Mechanical actuating means with crank, eccentric, or cam with a cam
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
    • F16K31/1225—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston with a plurality of pistons
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
    • F16K31/1226—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston the fluid circulating through the piston
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/16—Actuating devices; Operating means; Releasing devices actuated by fluid with a mechanism, other than pulling-or pushing-rod, between fluid motor and closure member
    • F16K31/163—Actuating devices; Operating means; Releasing devices actuated by fluid with a mechanism, other than pulling-or pushing-rod, between fluid motor and closure member the fluid acting on a piston
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/44—Mechanical actuating means
    • F16K31/52—Mechanical actuating means with crank, eccentric, or cam
    • F16K31/524—Mechanical actuating means with crank, eccentric, or cam with a cam
    • F16K31/52491—Mechanical actuating means with crank, eccentric, or cam with a cam comprising a diaphragm cut-off apparatus
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/126—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm the seat being formed on a rib perpendicular to the fluid line
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
    • F16K7/16—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being mechanically actuated, e.g. by screw-spindle or cam
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16N—LUBRICATING
    • F16N11/00—Arrangements for supplying grease from a stationary reservoir or the equivalent in or on the machine or member to be lubricated; Grease cups
    • F16N11/08—Arrangements for supplying grease from a stationary reservoir or the equivalent in or on the machine or member to be lubricated; Grease cups with mechanical drive, other than directly by springs or weights
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16N—LUBRICATING
    • F16N2280/00—Valves

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Fluid-Driven Valves (AREA)
  • Mechanically-Actuated Valves (AREA)
JP2021558267A 2019-11-22 2020-11-04 高圧バルブ用アクチュエータ Active JP7487952B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019211195 2019-11-22
JP2019211195 2019-11-22
PCT/JP2020/041137 WO2021100455A1 (ja) 2019-11-22 2020-11-04 高圧バルブ用アクチュエータ

Publications (2)

Publication Number Publication Date
JPWO2021100455A1 JPWO2021100455A1 (https=) 2021-05-27
JP7487952B2 true JP7487952B2 (ja) 2024-05-21

Family

ID=75980634

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021558267A Active JP7487952B2 (ja) 2019-11-22 2020-11-04 高圧バルブ用アクチュエータ

Country Status (5)

Country Link
US (1) US20220397203A1 (https=)
JP (1) JP7487952B2 (https=)
KR (1) KR102823681B1 (https=)
TW (1) TWI871384B (https=)
WO (1) WO2021100455A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI872980B (zh) * 2024-03-08 2025-02-11 新萊應材科技有限公司 具有緩衝洩氣功能之兩段式角閥
DE102024118251A1 (de) * 2024-06-27 2025-12-31 Gemü Gebr. Müller Apparatebau Gmbh & Co. Kommanditgesellschaft Spannbaugruppe, Prozessventil und Verfahren zur Montage, Demontage und zum Tausch von Ventilmembranen

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018110132A1 (ja) 2016-12-12 2018-06-21 株式会社フジキン バルブおよび半導体製造装置

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2614990A (en) * 1949-10-11 1952-10-21 Shell Dev Lubricating composition of matter
US3296138A (en) * 1963-08-06 1967-01-03 Union Carbide Corp Extreme pressure lubricant additives
DE7830221U1 (de) * 1978-10-11 1980-03-20 Arnold, Franz, 8960 Kempten Mechanischer kraftverstaerker
US4549719A (en) * 1984-02-02 1985-10-29 Baumann Hans D Mechanical amplifying means for valves and other devices
JPH086828B2 (ja) * 1991-08-09 1996-01-29 株式会社ベンカン メタルダイヤフラム弁
JPH10220598A (ja) * 1997-01-31 1998-08-21 Toyota Motor Corp 油圧シール構造
US6805158B2 (en) * 2000-03-27 2004-10-19 Fujikura Rubber Ltd. Apparatus for visually checking the operational status of a stop valve, and a manual opening apparatus for a normally-closed valve
JPWO2008096646A1 (ja) * 2007-02-06 2010-05-20 株式会社フジキン 流体制御器
US20090114873A1 (en) * 2007-11-05 2009-05-07 Richard Anagnos Diaphragm for use with control valves
JP5185692B2 (ja) * 2008-05-23 2013-04-17 藤倉ゴム工業株式会社 倍力開閉弁
JP5712053B2 (ja) * 2010-07-15 2015-05-07 株式会社キッツエスシーティー バルブ用アクチュエータ
KR101827564B1 (ko) * 2010-07-15 2018-02-09 가부시키가이샤 깃츠 에스시티 밸브용 액추에이터
JP7129096B2 (ja) * 2017-03-31 2022-09-01 株式会社フジキン 制御器
JP7045839B2 (ja) * 2017-12-08 2022-04-01 株式会社キッツエスシーティー 流体制御バルブ

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018110132A1 (ja) 2016-12-12 2018-06-21 株式会社フジキン バルブおよび半導体製造装置

Also Published As

Publication number Publication date
US20220397203A1 (en) 2022-12-15
TW202129179A (zh) 2021-08-01
KR102823681B1 (ko) 2025-06-20
KR20220081378A (ko) 2022-06-15
TWI871384B (zh) 2025-02-01
WO2021100455A1 (ja) 2021-05-27
JPWO2021100455A1 (https=) 2021-05-27

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