TWI857431B - 基板搬送用台車 - Google Patents

基板搬送用台車 Download PDF

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Publication number
TWI857431B
TWI857431B TW111149071A TW111149071A TWI857431B TW I857431 B TWI857431 B TW I857431B TW 111149071 A TW111149071 A TW 111149071A TW 111149071 A TW111149071 A TW 111149071A TW I857431 B TWI857431 B TW I857431B
Authority
TW
Taiwan
Prior art keywords
substrate
tank
cassette
substrate transport
transport trolley
Prior art date
Application number
TW111149071A
Other languages
English (en)
Chinese (zh)
Other versions
TW202336911A (zh
Inventor
加藤峻
二川進治
新井理恵
西部幸伸
Original Assignee
日商芝浦機械電子裝置股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商芝浦機械電子裝置股份有限公司 filed Critical 日商芝浦機械電子裝置股份有限公司
Publication of TW202336911A publication Critical patent/TW202336911A/zh
Application granted granted Critical
Publication of TWI857431B publication Critical patent/TWI857431B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/02—Cleaning by the force of jets or sprays
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B62—LAND VEHICLES FOR TRAVELLING OTHERWISE THAN ON RAILS
    • B62B—HAND-PROPELLED VEHICLES, e.g. HAND CARTS OR PERAMBULATORS; SLEDGES
    • B62B3/00—Hand carts having more than one axis carrying transport wheels; Steering devices therefor; Equipment therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/07—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for semiconductor wafers Not used, see H10P72/00
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Transportation (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
TW111149071A 2021-12-28 2022-12-21 基板搬送用台車 TWI857431B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021214781 2021-12-28
JP2021-214781 2021-12-28

Publications (2)

Publication Number Publication Date
TW202336911A TW202336911A (zh) 2023-09-16
TWI857431B true TWI857431B (zh) 2024-10-01

Family

ID=86998809

Family Applications (1)

Application Number Title Priority Date Filing Date
TW111149071A TWI857431B (zh) 2021-12-28 2022-12-21 基板搬送用台車

Country Status (3)

Country Link
JP (1) JPWO2023127554A1 (https=)
TW (1) TWI857431B (https=)
WO (1) WO2023127554A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7541415B1 (ja) 2023-11-27 2024-08-28 ニチエツ株式会社 位置決めシステム及び位置決め制御方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0864570A (ja) * 1994-08-19 1996-03-08 Hitachi Ltd ウエハ洗浄装置
US6129100A (en) * 1998-01-13 2000-10-10 Hoya Corporation Wafer cleaning apparatus and structure for holding and transferring wafer used in wafer cleaning apparatus
TW200744144A (en) * 2006-05-17 2007-12-01 Taiwan Semiconductor Mfg Co Ltd Carriers, semiconductor devices and transfer interface systems
JP2008218885A (ja) * 2007-03-07 2008-09-18 Shin Etsu Polymer Co Ltd 基板収納容器用の収容槽
CN111112221A (zh) * 2019-12-26 2020-05-08 西安奕斯伟硅片技术有限公司 一种工件储存运输装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3167765B2 (ja) * 1991-12-04 2001-05-21 株式会社日立製作所 自動洗浄装置
JP2000109994A (ja) * 1998-10-05 2000-04-18 Ebara Corp 基板メッキ装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0864570A (ja) * 1994-08-19 1996-03-08 Hitachi Ltd ウエハ洗浄装置
US6129100A (en) * 1998-01-13 2000-10-10 Hoya Corporation Wafer cleaning apparatus and structure for holding and transferring wafer used in wafer cleaning apparatus
TW200744144A (en) * 2006-05-17 2007-12-01 Taiwan Semiconductor Mfg Co Ltd Carriers, semiconductor devices and transfer interface systems
JP2008218885A (ja) * 2007-03-07 2008-09-18 Shin Etsu Polymer Co Ltd 基板収納容器用の収容槽
CN111112221A (zh) * 2019-12-26 2020-05-08 西安奕斯伟硅片技术有限公司 一种工件储存运输装置

Also Published As

Publication number Publication date
WO2023127554A1 (ja) 2023-07-06
TW202336911A (zh) 2023-09-16
JPWO2023127554A1 (https=) 2023-07-06

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