JPWO2023127554A1 - - Google Patents
Info
- Publication number
- JPWO2023127554A1 JPWO2023127554A1 JP2023570860A JP2023570860A JPWO2023127554A1 JP WO2023127554 A1 JPWO2023127554 A1 JP WO2023127554A1 JP 2023570860 A JP2023570860 A JP 2023570860A JP 2023570860 A JP2023570860 A JP 2023570860A JP WO2023127554 A1 JPWO2023127554 A1 JP WO2023127554A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B62—LAND VEHICLES FOR TRAVELLING OTHERWISE THAN ON RAILS
- B62B—HAND-PROPELLED VEHICLES, e.g. HAND CARTS OR PERAMBULATORS; SLEDGES
- B62B3/00—Hand carts having more than one axis carrying transport wheels; Steering devices therefor; Equipment therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/07—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for semiconductor wafers Not used, see H10P72/00
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Transportation (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021214781 | 2021-12-28 | ||
| PCT/JP2022/046445 WO2023127554A1 (ja) | 2021-12-28 | 2022-12-16 | 基板搬送用台車 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPWO2023127554A1 true JPWO2023127554A1 (https=) | 2023-07-06 |
Family
ID=86998809
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023570860A Pending JPWO2023127554A1 (https=) | 2021-12-28 | 2022-12-16 |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JPWO2023127554A1 (https=) |
| TW (1) | TWI857431B (https=) |
| WO (1) | WO2023127554A1 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7541415B1 (ja) | 2023-11-27 | 2024-08-28 | ニチエツ株式会社 | 位置決めシステム及び位置決め制御方法 |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05160101A (ja) * | 1991-12-04 | 1993-06-25 | Hitachi Ltd | 自動洗浄装置 |
| JPH0864570A (ja) * | 1994-08-19 | 1996-03-08 | Hitachi Ltd | ウエハ洗浄装置 |
| JP2000109994A (ja) * | 1998-10-05 | 2000-04-18 | Ebara Corp | 基板メッキ装置 |
| JP2008218885A (ja) * | 2007-03-07 | 2008-09-18 | Shin Etsu Polymer Co Ltd | 基板収納容器用の収容槽 |
| CN111112221A (zh) * | 2019-12-26 | 2020-05-08 | 西安奕斯伟硅片技术有限公司 | 一种工件储存运输装置 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2959763B1 (ja) * | 1998-01-13 | 1999-10-06 | 島田理化工業株式会社 | ウェーハ洗浄装置 |
| US7418982B2 (en) * | 2006-05-17 | 2008-09-02 | Taiwan Semiconductor Manufacturing Co., Ltd. | Substrate carrier and facility interface and apparatus including same |
-
2022
- 2022-12-16 JP JP2023570860A patent/JPWO2023127554A1/ja active Pending
- 2022-12-16 WO PCT/JP2022/046445 patent/WO2023127554A1/ja not_active Ceased
- 2022-12-21 TW TW111149071A patent/TWI857431B/zh active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05160101A (ja) * | 1991-12-04 | 1993-06-25 | Hitachi Ltd | 自動洗浄装置 |
| JPH0864570A (ja) * | 1994-08-19 | 1996-03-08 | Hitachi Ltd | ウエハ洗浄装置 |
| JP2000109994A (ja) * | 1998-10-05 | 2000-04-18 | Ebara Corp | 基板メッキ装置 |
| JP2008218885A (ja) * | 2007-03-07 | 2008-09-18 | Shin Etsu Polymer Co Ltd | 基板収納容器用の収容槽 |
| CN111112221A (zh) * | 2019-12-26 | 2020-05-08 | 西安奕斯伟硅片技术有限公司 | 一种工件储存运输装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2023127554A1 (ja) | 2023-07-06 |
| TWI857431B (zh) | 2024-10-01 |
| TW202336911A (zh) | 2023-09-16 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20250131 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20260203 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20260406 |