TWI853584B - 半導體裝置及其製造方法和led顯示裝置 - Google Patents

半導體裝置及其製造方法和led顯示裝置 Download PDF

Info

Publication number
TWI853584B
TWI853584B TW112118920A TW112118920A TWI853584B TW I853584 B TWI853584 B TW I853584B TW 112118920 A TW112118920 A TW 112118920A TW 112118920 A TW112118920 A TW 112118920A TW I853584 B TWI853584 B TW I853584B
Authority
TW
Taiwan
Prior art keywords
layer
film layer
thin film
groove
pad
Prior art date
Application number
TW112118920A
Other languages
English (en)
Chinese (zh)
Other versions
TW202418578A (zh
Inventor
飯野皓宏
小酒達
古田裕典
松尾元一郎
十文字伸哉
川田寛人
篠𠩤悠貴
Original Assignee
日商沖電氣工業股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商沖電氣工業股份有限公司 filed Critical 日商沖電氣工業股份有限公司
Publication of TW202418578A publication Critical patent/TW202418578A/zh
Application granted granted Critical
Publication of TWI853584B publication Critical patent/TWI853584B/zh

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80Constructional details
    • H10H20/85Packages
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/01Manufacture or treatment
    • H10H20/011Manufacture or treatment of bodies, e.g. forming semiconductor layers
    • H10H20/018Bonding of wafers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80Constructional details
    • H10H20/85Packages
    • H10H20/8506Containers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80Constructional details
    • H10H20/85Packages
    • H10H20/852Encapsulations
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80Constructional details
    • H10H20/85Packages
    • H10H20/852Encapsulations
    • H10H20/854Encapsulations characterised by their material, e.g. epoxy or silicone resins
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80Constructional details
    • H10H20/85Packages
    • H10H20/857Interconnections, e.g. lead-frames, bond wires or solder balls
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H29/00Integrated devices, or assemblies of multiple devices, comprising at least one light-emitting semiconductor element covered by group H10H20/00
    • H10H29/10Integrated devices comprising at least one light-emitting semiconductor component covered by group H10H20/00
    • H10H29/14Integrated devices comprising at least one light-emitting semiconductor component covered by group H10H20/00 comprising multiple light-emitting semiconductor components
    • H10H29/142Two-dimensional arrangements, e.g. asymmetric LED layout
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/01Manufacture or treatment
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/01Manufacture or treatment
    • H10H20/032Manufacture or treatment of electrodes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/01Manufacture or treatment
    • H10H20/036Manufacture or treatment of packages
    • H10H20/0362Manufacture or treatment of packages of encapsulations
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/01Manufacture or treatment
    • H10H20/036Manufacture or treatment of packages
    • H10H20/0364Manufacture or treatment of packages of interconnections

Landscapes

  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Led Device Packages (AREA)
  • Led Devices (AREA)
TW112118920A 2022-06-24 2023-05-22 半導體裝置及其製造方法和led顯示裝置 TWI853584B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022-101843 2022-06-24
JP2022101843A JP7790282B2 (ja) 2022-06-24 2022-06-24 半導体装置及び半導体装置製造方法

Publications (2)

Publication Number Publication Date
TW202418578A TW202418578A (zh) 2024-05-01
TWI853584B true TWI853584B (zh) 2024-08-21

Family

ID=86497428

Family Applications (1)

Application Number Title Priority Date Filing Date
TW112118920A TWI853584B (zh) 2022-06-24 2023-05-22 半導體裝置及其製造方法和led顯示裝置

Country Status (5)

Country Link
US (1) US20230420427A1 (https=)
EP (1) EP4312268A1 (https=)
JP (1) JP7790282B2 (https=)
CN (1) CN117293246A (https=)
TW (1) TWI853584B (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI883828B (zh) * 2024-02-20 2025-05-11 晶呈科技股份有限公司 垂直型發光二極體封裝結構及其製備方法
TWI906005B (zh) * 2024-10-28 2025-11-21 聯華電子股份有限公司 半導體結構及其製作方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100051975A1 (en) * 2008-09-04 2010-03-04 Oki Data Corporation Layered semiconductor light emitting device and image forming apparatus
TW201929192A (zh) * 2017-12-25 2019-07-16 晶元光電股份有限公司 一種發光元件及其發光裝置
US20200258869A1 (en) * 2017-10-13 2020-08-13 PlayNitride Display Co., Ltd. Micro light emitting device display apparatus
US20210313499A1 (en) * 2020-04-06 2021-10-07 Commissariat A L'energie Atomique Et Aux Energies Alternatives Photo-emitting and/or photo-receiving diode array device
US20220190026A1 (en) * 2019-03-29 2022-06-16 Commissariat à I'énergie atomique et aux énergies alternatives Process for manufacturing a three-dimensional led-based emissive display screen

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2959566B1 (ja) 1998-09-08 1999-10-06 日本電気株式会社 フラットパネルディスプレイ
JP2013235924A (ja) 2012-05-08 2013-11-21 Sharp Corp 半導体基板、半導体装置、および半導体基板の接合方法
US9281242B2 (en) * 2012-10-25 2016-03-08 Nanya Technology Corp. Through silicon via stacked structure and a method of manufacturing the same
KR102423813B1 (ko) * 2015-11-27 2022-07-22 삼성전자주식회사 반도체 소자
JP2017139316A (ja) 2016-02-03 2017-08-10 ソニー株式会社 半導体装置および製造方法、並びに電子機器
JP2022023263A (ja) 2020-07-27 2022-02-08 沖電気工業株式会社 発光装置、発光ディスプレイ、及び画像表示装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100051975A1 (en) * 2008-09-04 2010-03-04 Oki Data Corporation Layered semiconductor light emitting device and image forming apparatus
US20200258869A1 (en) * 2017-10-13 2020-08-13 PlayNitride Display Co., Ltd. Micro light emitting device display apparatus
TW201929192A (zh) * 2017-12-25 2019-07-16 晶元光電股份有限公司 一種發光元件及其發光裝置
US20220190026A1 (en) * 2019-03-29 2022-06-16 Commissariat à I'énergie atomique et aux énergies alternatives Process for manufacturing a three-dimensional led-based emissive display screen
US20210313499A1 (en) * 2020-04-06 2021-10-07 Commissariat A L'energie Atomique Et Aux Energies Alternatives Photo-emitting and/or photo-receiving diode array device

Also Published As

Publication number Publication date
CN117293246A (zh) 2023-12-26
JP2024002572A (ja) 2024-01-11
JP7790282B2 (ja) 2025-12-23
US20230420427A1 (en) 2023-12-28
EP4312268A1 (en) 2024-01-31
TW202418578A (zh) 2024-05-01

Similar Documents

Publication Publication Date Title
US10790267B2 (en) Light emitting element for pixel and LED display module
US20180145236A1 (en) Package structure for light emitting device
KR101647000B1 (ko) 발광 다이오드
TWI853584B (zh) 半導體裝置及其製造方法和led顯示裝置
TW201839952A (zh) 微發光二極體顯示器組裝體
JP2018538554A (ja) 照明フェイスプレート及びこのような照明フェイスプレートの製造方法
JP7687142B2 (ja) 発光装置、半導体構造体、薄膜層製造方法及び発光装置製造方法
US10658423B2 (en) Method of manufacturing light emitting device
JP2022543804A (ja) 発光ダイオードディスプレイパネル及びそれを有するディスプレイ装置
US10381400B2 (en) Method of manufacturing light emitting device
TW202213309A (zh) 發光陣列結構及顯示器
TWI431819B (zh) 紅綠藍(rgb)三原色熱隔離基板
EP2478750B1 (en) Light-source module and light-emitting device
US20250006858A1 (en) Display panel and manufacturing method thereof
CN112310142B (zh) 一种显示装置、显示面板及其制作方法
KR100714749B1 (ko) 발광 소자 패키지 모듈 및 이의 제조 방법
CN114156261B (zh) 一种显示装置及其制作方法
CN113948506B (zh) 光源器件、光源器件的制备方法及显示设备
WO2024021167A1 (zh) 混合显示器件及其制作方法、显示终端
KR20190087774A (ko) 마이크로 엘이디 모듈 및 그 제조방법
JP7806539B2 (ja) 発光装置
TWI660225B (zh) 製作在可佈線襯底上的顯示面板
CN113875028A (zh) 显示器用发光元件以及具有该发光元件的显示装置
CN115360286B (zh) 发光显示单元及显示设备
TWI793768B (zh) 微型發光二極體封裝結構與微型發光二極體顯示裝置