TWI824686B - Detection circuit - Google Patents

Detection circuit Download PDF

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TWI824686B
TWI824686B TW111132915A TW111132915A TWI824686B TW I824686 B TWI824686 B TW I824686B TW 111132915 A TW111132915 A TW 111132915A TW 111132915 A TW111132915 A TW 111132915A TW I824686 B TWI824686 B TW I824686B
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circuit
test
probe
measurement unit
probe module
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TW111132915A
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TW202411670A (en
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汪光夏
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牧德科技股份有限公司
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Priority to CN202211097076.1A priority patent/CN117665530A/en
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Abstract

The present invention discloses a detection circuit, which is applied for detecting a circuit device under test. The detection circuit according to the present invention provides a test power source by a source measurement unit, in the meanwhile, turned on between a probe module and the source measurement unit is performed by a switch module. And, a loop is formed by the circuit device under test, the probe module and the source measurement unit. Hereby, the test source is supplied to the circuit device under test by the test probe module, and a corresponded test voltage is generated. Thus, the quantitative characteristic of the detection circuit may be detected.

Description

檢測電路Detection circuit

本發明係關於一種測試電路,特別是一種檢測電路,其係用以檢測待測電路元件之電性。The present invention relates to a test circuit, in particular to a detection circuit, which is used to detect the electrical properties of circuit components to be tested.

積體電路(integrated circuit,IC)或晶片(Chip)的製造會先經過上游的IC設計公司提出對應之電路設計方案,中游的半導體代工廠依據IC設計公司之電路設計方案提供對應之半導體製程進行代工製造,再接續由下游之封裝測試廠對半導體代工廠所代工生產之積體電路(integrated circuit,IC)或晶片(Chip)進行電路測試,因此電路測試對於積體電路(integrated circuit,IC)或晶片(Chip)的製造過程屬於不可或缺的其中一階段。不論是傳統封裝型態還是晶圓級封裝,在積體電路(integrated circuit,IC)或晶片(Chip)的晶圓型態與封裝型態,都必須經過一個特定的測試程序,以確保積體電路(integrated circuit,IC)或晶片(Chip)的內部中每一電子元件都正常運作。The manufacturing of integrated circuits (IC) or wafers (Chip) will first go through the upstream IC design company to propose a corresponding circuit design plan. The midstream semiconductor foundry will provide the corresponding semiconductor process based on the IC design company's circuit design plan. OEM manufacturing is followed by downstream packaging and testing factories to conduct circuit testing on the integrated circuit (IC) or chip (Chip) produced by the semiconductor foundry. Therefore, circuit testing is very important for integrated circuits. The manufacturing process of IC) or wafer (Chip) is one of the indispensable stages. Whether it is traditional packaging type or wafer level packaging, the wafer type and packaging type of integrated circuit (IC) or chip (Chip) must go through a specific testing process to ensure that the integrated circuit Every electronic component inside an integrated circuit (IC) or chip (Chip) operates normally.

進一步地,積體電路(integrated circuit,IC)或晶片(Chip)設置於電路板上後,電路板上的電路佈局亦是需要測試與驗證,例如:印刷電路板(PCB)的電路測試與電路驗證,現今更是利用自動化測試機台(Automatic test equipment,ATE),應用於自動化測試電路板上的電子零件,甚至是測試電路板上的積體電路(integrated circuit,IC)或晶片(Chip)。Furthermore, after the integrated circuit (IC) or chip (Chip) is placed on the circuit board, the circuit layout on the circuit board also needs to be tested and verified, such as: circuit testing and circuit testing of the printed circuit board (PCB). For verification, automatic test equipment (ATE) is now used to automatically test electronic components on circuit boards, and even test integrated circuits (ICs) or chips (Chip) on circuit boards. .

然而,測試過程中,不外乎是利用探針進行接觸電路板上的測試墊或腳位,而測試電壓有可能導致火花產生,自動化測試機台並未能有一個有效量化數據提供給測試人員了解。例如:日本電產理德股份有限公司之中國專利號第CN104422860B之檢測裝置為利用判定部判斷恆定電流源提供恆定電流至帶測電路並以待測電路之測試電壓是否維持一電壓斜度判斷待測電路是否不良,卻未能獲得確切之可量化數值。However, during the test process, the probe is nothing more than using a probe to contact the test pad or pin on the circuit board, and the test voltage may cause sparks. The automated test machine does not provide effective quantitative data to the tester. learn. For example: The detection device of Nidec Lid Co., Ltd.'s Chinese Patent No. CN104422860B uses a determination part to determine that a constant current source provides a constant current to the circuit under test and determines whether the test voltage of the circuit to be tested maintains a voltage slope. Testing whether the circuit is defective, but unable to obtain an exact quantifiable value.

基於上述之問題,本發明提供一種檢測電路,其藉由開關模組導通探針模組與電源量測單元,並藉此讓探針模組耦接之待測電路元件與探針模組及電源量測單元形成迴路,並利用測試電源從待測電路元件取得測試電壓,藉此讓檢測電路可從待測電路元件取得可量化數據。Based on the above problems, the present invention provides a detection circuit that conducts the probe module and the power measurement unit through the switch module, thereby allowing the circuit element under test and the probe module to be coupled to the probe module and The power measurement unit forms a loop and uses the test power supply to obtain the test voltage from the circuit component under test, thereby allowing the detection circuit to obtain quantifiable data from the circuit component under test.

本發明之一目的,在於提供一種檢測電路,其藉由探針模組耦接電源量測單元、開關模組與阻抗元件,並利用探針模組檢測一待測電路元件,並透過開關模組導通電源量測單元及探針模組,藉此供應測試電源至待測電路元件,以取得對應之測試電壓,因而可從待測電路元件取得可量化數據。One object of the present invention is to provide a detection circuit that uses a probe module to couple a power measurement unit, a switch module and an impedance element, and uses the probe module to detect a circuit element under test, and uses the switch module to A conductive power measurement unit and a probe module are assembled to supply test power to the circuit component under test to obtain the corresponding test voltage, so that quantifiable data can be obtained from the circuit component under test.

針對上述之目的,本發明提供一種檢測電路,其應用於檢測一待測電路元件,一探針模組;一電源量測單元,其分別耦接該探針模組及一接地端;一開關模組,其各別耦接該探針模組與該電源量測單元;以及一阻抗元件,其一第一端耦接該探針模組,該阻抗元件之一第二端耦接該電源量測單元並耦接該接地端;其中,當該開關模組導通該探針模組與該電源量測單元並與該待測電路元件形成一迴路時,該電源量測單元提供一測試電源,經該探針模組供電至該待測電路元件而對應產生一第一測試電壓。In view of the above purpose, the present invention provides a detection circuit, which is used to detect a circuit component under test, a probe module; a power measurement unit, which is coupled to the probe module and a ground terminal respectively; and a switch. a module, which is respectively coupled to the probe module and the power measurement unit; and an impedance element, a first end of which is coupled to the probe module, and a second end of the impedance element is coupled to the power source The measurement unit is coupled to the ground terminal; when the switch module conducts the probe module and the power measurement unit and forms a loop with the circuit component under test, the power measurement unit provides a test power , power is supplied to the circuit element under test through the probe module to generate a first test voltage correspondingly.

本發明進一步提供一實施例,其在於當該待測電路元件之一電路阻抗值小於該電源量測單元之一預設阻抗值時,該電源量測單元將該測試電源切換至一電流源,經該探針模組供電至該待測電路元件,而對應產生一第二測試電壓。The present invention further provides an embodiment in which when a circuit impedance value of the circuit element under test is less than a preset impedance value of the power supply measurement unit, the power supply measurement unit switches the test power supply to a current source, Power is supplied to the circuit element under test through the probe module, and a second test voltage is correspondingly generated.

本發明進一步提供一實施例,其在於該第二測試電壓與該測試電源對應之一第一測試阻抗值與該阻抗元件之一第二測試阻抗值之間具有一差值,該差值對應於該待測電路元件之一電性絕緣強度。The present invention further provides an embodiment in which there is a difference between the second test voltage and a first test impedance value corresponding to the test power source and a second test impedance value of the impedance element, and the difference corresponds to The electrical insulation strength of one of the circuit components under test.

本發明進一步提供一實施例,其在於該差值為100歐姆至10k歐姆。The present invention further provides an embodiment, wherein the difference is 100 ohms to 10k ohms.

本發明進一步提供一實施例,其在於該電流源為一定電流,該定電流為1毫安培至30毫安培之間之一定值。The present invention further provides an embodiment in which the current source is a certain current, and the constant current is a certain value between 1 milliampere and 30 milliamperes.

本發明進一步提供一實施例,其在於進一步包含一處理單元耦接該探針模組,該處理單元其係用以判斷當該第一測試電壓超過一門檻值時,該第一測試電壓為對應於該待測電路元件為一正常狀態。The present invention further provides an embodiment, which further includes a processing unit coupled to the probe module. The processing unit is used to determine that when the first test voltage exceeds a threshold, the first test voltage is corresponding to The circuit component under test is in a normal state.

本發明進一步提供一實施例,其在於該待測電路元件包含一第一電路與一第二電路,該探針模組包含一第一探針元件與一第二探針元件,當該第一探針元件與該第二探針元件分別耦接該第一電路與該第二電路,且該開關模組導通時,該探針模組、該電源量測單元及該阻抗元件與該待測電路元件形成該迴路。The present invention further provides an embodiment in which the circuit component under test includes a first circuit and a second circuit, and the probe module includes a first probe component and a second probe component. When the first probe component The probe element and the second probe element are coupled to the first circuit and the second circuit respectively, and when the switch module is turned on, the probe module, the power measurement unit and the impedance element are in contact with the to-be-tested Circuit elements form this loop.

本發明進一步提供一實施例,其在於該第一測試電壓為一預設之電壓定值。The present invention further provides an embodiment in which the first test voltage is a preset voltage setting.

為使 貴審查委員對本發明之特徵及所達成之功效有更進一步之瞭解與認識,謹佐以較佳之實施例及配合詳細之說明,說明如後:In order to enable you, the review committee, to have a further understanding of the characteristics and effects of the present invention, we would like to provide preferred embodiments and accompanying detailed descriptions, as follows:

在說明書及請求項當中使用了某些詞彙指稱特定的元件,然,所屬本發明技術領域中具有通常知識者應可理解,同一個元件可能會用不同的名詞稱呼,而且,本說明書及請求項並不以名稱的差異作為區分元件的方式,而是以元件在整體技術上的差異作為區分的準則。在通篇說明書及請求項當中所提及的「包含」為一開放式用語,故應解釋成「包含但不限定於」。再者,「耦接」一詞在此包含任何直接及間接的連接手段。因此,若文中描述一第一裝置耦接一第二裝置,則代表第一裝置可直接連接第二裝置,或可透過其他裝置或其他連接手段間接地連接至第二裝置。Certain words are used in the specification and claims to refer to specific components. However, those with ordinary knowledge in the technical field of the present invention should understand that the same component may be called by different terms. Moreover, this specification and claims The difference in names is not used as a way to distinguish components; rather, the difference in overall technology of the components is the criterion for distinction. The "includes" mentioned throughout the description and claims is an open-ended term, and therefore should be interpreted as "includes but is not limited to." Furthermore, the word "coupling" here includes any direct and indirect means of connection. Therefore, if a first device is coupled to a second device, it means that the first device can be directly connected to the second device, or can be indirectly connected to the second device through other devices or other connection means.

有鑑於上述先前技術中,自動化檢測裝置並未能提供可量化之檢測數據,因而無法提供可量化數值讓使用者直觀地了解電路檢測狀況。In view of the above-mentioned prior art, the automated detection device cannot provide quantifiable detection data, and therefore cannot provide quantifiable values to allow users to intuitively understand the circuit detection status.

在下文中,將藉由圖式來說明本發明之各種實施例來詳細描述本發明。然而本發明之概念可能以許多不同型式來體現,且不應解釋為限於本文中所闡述之例示性實施例。In the following, the present invention will be described in detail by illustrating various embodiments of the present invention through drawings. This inventive concept may, however, be embodied in many different forms and should not be construed as limited to the illustrative embodiments set forth herein.

首先,請參閱第1圖,其為本發明之一實施例之系統示意圖。如圖所示,本發明之一實施例之檢測電路10為包含一探針模組12、一電源量測單元14、一開關模組16與一阻抗元件18,本實施例之探針模組12為用於檢測一電路元件PCB,例如:檢測印刷電路板上的電路元件、晶圓上的積體電路等,而該電源量測單元14分別耦接該探針模組12及一接地端GND,特別是在該探針模組12與該電源量測單元14之間設有該開關模組16,因而讓該開關模組16各別耦接該探針模組12與該電源量測單元14,該阻抗元件18之一第一端耦接該探針模組12,該阻抗元件18之一第二端耦接該電源量測單元14並耦接該接地端GND。First, please refer to Figure 1, which is a system schematic diagram of an embodiment of the present invention. As shown in the figure, the detection circuit 10 of one embodiment of the present invention includes a probe module 12, a power measurement unit 14, a switch module 16 and an impedance element 18. The probe module of this embodiment 12 is used to detect a circuit component PCB, such as detecting circuit components on a printed circuit board, integrated circuits on a wafer, etc., and the power measurement unit 14 is coupled to the probe module 12 and a ground terminal respectively. GND, especially the switch module 16 is provided between the probe module 12 and the power measurement unit 14, so that the switch module 16 is coupled to the probe module 12 and the power measurement unit respectively. Unit 14, a first end of the impedance element 18 is coupled to the probe module 12, a second end of the impedance element 18 is coupled to the power measurement unit 14 and coupled to the ground terminal GND.

接續上述,如第2圖所示,當該開關模組16為開路時,該探針模組12與該電源量測單元14並與該待測電路元件PCB並未形成迴路,而如第3圖所示,當該開關模組16導通該探針模組12與該電源量測單元14並與該待測電路元件PCB形成一迴路LOOP時,該電源量測單元14提供一測試電源P,經該探針模組12供電至該待測電路元件PCB而對應產生一電壓偵測訊號V S。如第4圖所示,偵測控制訊號DET之高準位(ON)即表示該探針模組12偵測該待測電路元件PCB之偵測期間,開關控制訊號SW即表示該開關模組16之切換期間,ON即表示該開關模組16導通,OFF即表示該開關模組16開路,電壓偵測訊號V S即表示偵測電路10所取得電壓準位,當該待測電路元件PCB之一電路阻抗值大於該電源量測單元14之一預設阻抗值時,該電源量測單元14將該測試電源P切換至一電壓源(例如:250V電壓源,其電壓為相對於系統接地準位SGND之250V電壓),此時電壓偵測訊號V S即為一第一測試電壓V S1,當該第一測試電壓V S1超過一門檻值TH1(例如:200V電壓準位),也就是大於該門檻值TH1時,該第一測試電壓V S1為對應於該待測電路元件PCB為一正常狀態。 Continuing from the above, as shown in Figure 2, when the switch module 16 is open circuit, the probe module 12, the power measurement unit 14 and the circuit component PCB under test do not form a loop, but as shown in Figure 3 As shown in the figure, when the switch module 16 conducts the probe module 12 and the power measurement unit 14 and forms a loop LOOP with the circuit component PCB under test, the power measurement unit 14 provides a test power P, Power is supplied to the circuit component PCB under test through the probe module 12 and a voltage detection signal V S is correspondingly generated. As shown in Figure 4, the high level (ON) of the detection control signal DET represents the detection period during which the probe module 12 detects the circuit component PCB under test, and the switch control signal SW represents the switch module. During the switching period of 16, ON means that the switch module 16 is on, OFF means that the switch module 16 is open, and the voltage detection signal V S means the voltage level obtained by the detection circuit 10. When the circuit component PCB under test is When a circuit impedance value is greater than a preset impedance value of the power measurement unit 14, the power measurement unit 14 switches the test power supply P to a voltage source (for example: 250V voltage source, the voltage of which is relative to the system ground 250V voltage of level SGND). At this time, the voltage detection signal VS is a first test voltage VS1 . When the first test voltage VS1 exceeds a threshold value TH1 (for example: 200V voltage level), that is When it is greater than the threshold value TH1, the first test voltage V S1 corresponds to the circuit component PCB under test being in a normal state.

如第5圖所示,當該待測電路元件PCB之該電路阻抗值小於該電源量測單元14之一預設阻抗值時,該電源量測單元14將該測試電源P切換至一電流源,經該探針模組12供電至該待測電路元件PCB,而對應產生之電壓偵測訊號V S,即為一第二測試電壓V S2。其中,該測試電源P對應之一第一測試阻抗值R S1與該阻抗元件18之一第二測試阻抗值R S2之間具有一差值,且該第一測試阻抗值R S1對應於該待測電路元件PCB之該電路阻抗值,其計算如下式一: RSPK=[(V S/I S)-R S2]=[R S1-R S2] As shown in Figure 5, when the circuit impedance value of the circuit component PCB under test is less than a preset impedance value of the power measurement unit 14, the power measurement unit 14 switches the test power P to a current source. , power is supplied to the circuit component PCB under test through the probe module 12, and the corresponding generated voltage detection signal VS is a second test voltage VS2 . There is a difference between a first test impedance value RS1 corresponding to the test power supply P and a second test impedance value RS2 of the impedance element 18, and the first test impedance value RS1 corresponds to the to-be- Measure the circuit impedance value of the circuit component PCB and calculate it as follows: RSPK=[(V S /I S )-R S2 ]=[R S1 -R S2 ]

其中,I S即為該測試電源P切換至該電流源之電流值,RSPK即為該差值,該差值對應於該待測電路元件PCB之一電性絕緣強度,該差值大約在100歐姆至10k歐姆之間。 Among them, IS is the current value when the test power supply P is switched to the current source, and RSPK is the difference. The difference corresponds to the electrical insulation strength of the circuit component PCB under test. The difference is about 100 ohms to 10k ohms.

上述本實施例之該電源量測單元14所提供之該測試電源P為該電流源時,該電流源為一定電流,該定電流為1毫安培至30毫安培之間之一定值。另外,該第一測試電壓V S1為一預設之電壓定值。 When the test power P provided by the power measurement unit 14 of the above embodiment is a current source, the current source is a certain current, and the constant current is a certain value between 1 milliamp and 30 milliamps. In addition, the first test voltage VS1 is a preset voltage setting.

復參閱第1圖與第2圖,可知,本實例之檢測電路10更包含一處理單元20與一感測單元22,該處理單元20耦接該探針模組12,該處理單元20依據該偵測控制訊號DET判斷該第一測試電壓V S1與該第二測試電壓V S2,當該感測單元22取得大於該門檻值TH1之該第一測試電壓V S1時,該處理單元20係判斷該待測電路元件PCB為該第一測試電壓V S1對應之一正常狀態,且當該感測單元22取得小於該門檻值TH1之該第二測試電壓V S2時,該處理單元20係判斷該待測電路元件PCB為該第二測試電壓V S2對應之一異常狀態。不須透過控制該電源量測單元14逐步改變該測試電源P的電壓準位,而測試該待測電路元件PCB,即可直接量測出可量化數值而判斷該待測電路元件PCB是否異常。 Referring again to Figures 1 and 2, it can be seen that the detection circuit 10 of this example further includes a processing unit 20 and a sensing unit 22. The processing unit 20 is coupled to the probe module 12. The processing unit 20 is based on the The detection control signal DET determines the first test voltage V S1 and the second test voltage V S2 . When the sensing unit 22 obtains the first test voltage V S1 that is greater than the threshold TH1 , the processing unit 20 determines The circuit element PCB under test is in a normal state corresponding to the first test voltage V S1 , and when the sensing unit 22 obtains the second test voltage V S2 that is less than the threshold value TH1 , the processing unit 20 determines that the The circuit element PCB under test is in an abnormal state corresponding to the second test voltage VS2 . There is no need to gradually change the voltage level of the test power supply P by controlling the power measurement unit 14 to test the circuit component PCB under test. A quantifiable value can be directly measured to determine whether the circuit component PCB under test is abnormal.

此外,該處理單元20更可進一步耦接該電源量測單元14,使該處理單元20藉由該電源量測單元14之一回授訊號FB獲得該測試電源P之一數值。本實施例之該處理單元20為透過該感測單元22耦接該探針模組12,藉此,當該開關模組16導通時,該感測單元22即可測得對應之該測試電源V S1與該第二測試電壓V S2並產生對應之感測訊號SEN至該處理單元20,因而讓該處理單元20透過該感測訊號SEN獲得該測試電源V S1與該第二測試電壓V S2對應之量測數值。 In addition, the processing unit 20 can be further coupled to the power measurement unit 14 so that the processing unit 20 obtains a value of the test power P through a feedback signal FB of the power measurement unit 14 . In this embodiment, the processing unit 20 is coupled to the probe module 12 through the sensing unit 22, whereby when the switch module 16 is turned on, the sensing unit 22 can measure the corresponding test power supply. V S1 and the second test voltage V S2 generate a corresponding sensing signal SEN to the processing unit 20 , thereby allowing the processing unit 20 to obtain the test power supply V S1 and the second test voltage V S2 through the sensing signal SEN. Corresponding measurement value.

復參閱第1圖,該待測電路元件PCB包含一第一電路C1與一第二電路C2,該探針模組12包含一第一探針元件122與一第二探針元件124,當該第一探針元件122與該第二探針元件124分別耦接該第一電路C1與該第二電路C2,且該第一電路C1與該第二電路C2之間具有電性連接,因此,當該開關模組16導通時,該探針模組12、該電源量測單元14及該阻抗元件18與該待測電路元件PCB形成該迴路LOOP。Referring back to Figure 1, the circuit component under test PCB includes a first circuit C1 and a second circuit C2, and the probe module 12 includes a first probe component 122 and a second probe component 124. When the The first probe element 122 and the second probe element 124 are respectively coupled to the first circuit C1 and the second circuit C2, and there is an electrical connection between the first circuit C1 and the second circuit C2. Therefore, When the switch module 16 is turned on, the probe module 12, the power measurement unit 14, the impedance element 18 and the circuit component PCB under test form the loop LOOP.

綜上所述,本發明提供一種檢測電路,其透過一探針模組偵測一待測電路元件,並透過電源量測單元與開關模組進行控制,如在待測電路元件之電路阻抗值小於電源量測單元之預設阻抗值時,即驅使電源量測單元切換其測試電源為一定電流源,藉此偵測並取得異常之量測數值,藉此提供可量化數據,而不再是傳統偵測方式,因而避免誤差或錯誤。To sum up, the present invention provides a detection circuit that detects a circuit component under test through a probe module and controls it through a power measurement unit and a switch module, such as the circuit impedance value of the circuit component under test. When it is less than the preset impedance value of the power supply measurement unit, it will drive the power supply measurement unit to switch its test power source to a certain current source, thereby detecting and obtaining abnormal measurement values, thereby providing quantifiable data, instead of Traditional detection methods, thus avoiding errors or errors.

故本發明實為一具有新穎性、進步性及可供產業上利用者,應符合我國專利法專利申請要件無疑,爰依法提出發明專利申請,祈  鈞局早日賜准專利,至感為禱。Therefore, this invention is indeed novel, progressive and can be used industrially. It should undoubtedly meet the patent application requirements of my country's Patent Law. I file an invention patent application in accordance with the law and pray that the Office will grant the patent as soon as possible. I am deeply grateful.

惟以上所述者,僅為本發明之較佳實施例而已,並非用來限定本發明實施之範圍,舉凡依本發明申請專利範圍所述之形狀、構造、特徵及精神所為之均等變化與修飾,均應包括於本發明之申請專利範圍內。However, the above are only preferred embodiments of the present invention and are not intended to limit the scope of the present invention. All changes and modifications can be made equally in accordance with the shape, structure, characteristics and spirit described in the patent scope of the present invention. , should be included in the patent scope of the present invention.

10:檢測電路 12:探針模組 122:第一探針元件 124:第二探針元件 14:電源量測單元 16:開關模組 18:阻抗單元 20:處理單元 22:感測單元 C1:第一電路 C2:第二電路 DET:偵測控制訊號 FB:回授訊號 GND:接地端 P:測試電源 PCB:待測電路元件 SEN:感測訊號 SGND:系統接地準位 SW:切換控制訊號 TH1:門檻值 V S:電壓偵測訊號 V S1:第一測試電壓 V S2:第二測試電壓 10: Detection circuit 12: Probe module 122: First probe component 124: Second probe component 14: Power measurement unit 16: Switch module 18: Impedance unit 20: Processing unit 22: Sensing unit C1: First circuit C2: Second circuit DET: Detection control signal FB: Feedback signal GND: Ground terminal P: Test power supply PCB: Circuit component under test SEN: Sensing signal SGND: System ground level SW: Switching control signal TH1 :Threshold value V S :Voltage detection signal V S1 :First test voltage V S2 :Second test voltage

第1圖:其為本發明之一實施例之系統示意圖; 第2圖:其為本發明之一實施例之開關模組開路之示意圖; 第3圖:其為本發明之一實施例之開關模組導通之示意圖; 第4圖:其為本發明之一實施例之正常狀態之訊號曲線圖;以及 第5圖:其為本發明之一實施例之異常狀態之訊號曲線圖。 Figure 1: This is a system schematic diagram of an embodiment of the present invention; Figure 2: This is a schematic diagram of an open circuit of a switch module according to an embodiment of the present invention; Figure 3: This is a schematic diagram of the switch module conduction according to one embodiment of the present invention; Figure 4: It is a signal curve diagram of a normal state according to an embodiment of the present invention; and Figure 5: This is a signal curve diagram of an abnormal state according to an embodiment of the present invention.

10:檢測電路 10:Detection circuit

12:探針模組 12:Probe module

122:第一探針元件 122: First probe element

124:第二探針元件 124: Second probe element

14:電源量測單元 14:Power measurement unit

16:開關模組 16:Switch module

18:阻抗單元 18: Impedance unit

20:處理單元 20: Processing unit

22:感測單元 22: Sensing unit

C1:第一電路 C1: first circuit

C2:第二電路 C2: Second circuit

FB:回授訊號 FB: feedback signal

GND:接地端 GND: ground terminal

P:測試電源 P: test power supply

PCB:待測電路元件 PCB: circuit component to be tested

SEN:感測訊號 SEN: sensing signal

SW:切換控制訊號 SW: switching control signal

Claims (7)

一種檢測電路,其應用於檢測一待測電路元件,該檢測電路包含:一探針模組;一電源量測單元,其分別耦接該探針模組及一接地端;一開關模組,其各別耦接該探針模組與該電源量測單元;以及一阻抗元件,其一第一端耦接該探針模組,該阻抗元件之一第二端耦接該電源量測單元並耦接該接地端;其中,當該開關模組導通該探針模組與該電源量測單元並與該待測電路元件形成一迴路時,該電源量測單元提供一測試電源,經該探針模組供電至該待測電路元件而對應產生一第一測試電壓,當該待測電路元件之一電路阻抗值小於該電源量測單元之一預設阻抗值時,該電源量測單元將該測試電源切換至一電流源,經該探針模組供電至該待測電路元件,而對應產生一第二測試電壓。 A detection circuit, which is used to detect a circuit component under test. The detection circuit includes: a probe module; a power measurement unit, which is coupled to the probe module and a ground terminal respectively; a switch module, They are respectively coupled to the probe module and the power measurement unit; and an impedance element, a first end of which is coupled to the probe module, and a second end of the impedance element is coupled to the power measurement unit and coupled to the ground terminal; wherein, when the switch module conducts the probe module and the power measurement unit and forms a loop with the circuit element under test, the power measurement unit provides a test power supply, which passes through the The probe module supplies power to the circuit element under test and generates a first test voltage correspondingly. When the circuit impedance value of the circuit element under test is less than a preset impedance value of the power supply measurement unit, the power supply measurement unit The test power supply is switched to a current source, and power is supplied to the circuit element under test through the probe module, thereby generating a second test voltage accordingly. 如請求項1所述的檢測電路,其中該測試電源對應之一第一測試阻抗值與該阻抗元件之一第二測試阻抗值之間具有一差值,該差值對應於該待測電路元件之一電性絕緣強度。 The detection circuit of claim 1, wherein there is a difference between a first test impedance value corresponding to the test power supply and a second test impedance value of the impedance element, and the difference corresponds to the circuit element under test One electrical insulation strength. 如請求項2所述的檢測電路,其中該差值在100歐姆至10k歐姆之間。 The detection circuit as claimed in claim 2, wherein the difference is between 100 ohms and 10k ohms. 如請求項1所述的檢測電路,其中該電流源為一定電流,該定電流為1毫安培至30毫安培之間之一定值。 The detection circuit as described in claim 1, wherein the current source is a certain current, and the fixed current is a certain value between 1 milliampere and 30 milliamperes. 如請求項1所述的檢測電路,進一步包含一處理單元耦接該探針模組,該處理單元其係用以判斷當該第一測試電壓超過一門檻值時,該第一測試電壓為對應於該待測電路元件為一正常狀態。 The detection circuit as claimed in claim 1, further comprising a processing unit coupled to the probe module, the processing unit being used to determine when the first test voltage exceeds a threshold, the first test voltage is corresponding to The circuit component under test is in a normal state. 如請求項1所述的檢測電路,其中該待測電路元件包含一第一電路與一第二電路,該探針模組包含一第一探針元件與一第二探針元件,當該第一探針元件與該第二探針元件分別耦接該第一電路與該第二電路,且該開關模組導通時,該探針模組、該電源量測單元及該阻抗元件與該待測電路元件形成該迴路。 The detection circuit as claimed in claim 1, wherein the circuit element to be tested includes a first circuit and a second circuit, and the probe module includes a first probe element and a second probe element. When the first probe element A probe element and the second probe element are respectively coupled to the first circuit and the second circuit, and when the switch module is turned on, the probe module, the power measurement unit and the impedance element are in contact with the to-be-waited The test circuit components form this loop. 如請求項1所述的檢測電路,其中該第一測試電壓為一預設之電壓定值。 The detection circuit of claim 1, wherein the first test voltage is a preset voltage setting.
TW111132915A 2022-08-31 2022-08-31 Detection circuit TWI824686B (en)

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Publication number Priority date Publication date Assignee Title
TW201915500A (en) * 2017-09-27 2019-04-16 日商日本電產理德股份有限公司 Resistance measurement apparatus, substrate inspection apparatus and resistance measurement method capable of easily improving resistance measurement accuracy by a four-terminal measurement method

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201915500A (en) * 2017-09-27 2019-04-16 日商日本電產理德股份有限公司 Resistance measurement apparatus, substrate inspection apparatus and resistance measurement method capable of easily improving resistance measurement accuracy by a four-terminal measurement method

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