TWI815877B - 光接收裝置及距離測量裝置 - Google Patents

光接收裝置及距離測量裝置 Download PDF

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Publication number
TWI815877B
TWI815877B TW108112418A TW108112418A TWI815877B TW I815877 B TWI815877 B TW I815877B TW 108112418 A TW108112418 A TW 108112418A TW 108112418 A TW108112418 A TW 108112418A TW I815877 B TWI815877 B TW I815877B
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TW
Taiwan
Prior art keywords
pixel
light receiving
light
photosensitive element
avalanche diode
Prior art date
Application number
TW108112418A
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English (en)
Chinese (zh)
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TW202001288A (zh
Inventor
小澤治
上水流隼人
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日商索尼半導體解決方案公司
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Publication of TW202001288A publication Critical patent/TW202001288A/zh
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/491—Details of non-pulse systems
    • G01S7/4912—Receivers
    • G01S7/4913—Circuits for detection, sampling, integration or read-out
    • G01S7/4914—Circuits for detection, sampling, integration or read-out of detector arrays, e.g. charge-transfer gates
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/08—Systems determining position data of a target for measuring distance only
    • G01S17/10—Systems determining position data of a target for measuring distance only using transmission of interrupted, pulse-modulated waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/88—Lidar systems specially adapted for specific applications
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/483—Details of pulse systems
    • G01S7/486—Receivers
    • G01S7/4861—Circuits for detection, sampling, integration or read-out
    • G01S7/4863—Detector arrays, e.g. charge-transfer gates
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/483—Details of pulse systems
    • G01S7/486—Receivers
    • G01S7/487—Extracting wanted echo signals, e.g. pulse detection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/491—Details of non-pulse systems
    • G01S7/4912—Receivers
    • G01S7/4918—Controlling received signal intensity, gain or exposure of sensor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F30/00—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
    • H10F30/20—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors
    • H10F30/21—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation
    • H10F30/22—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices having only one potential barrier, e.g. photodiodes
    • H10F30/225—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices having only one potential barrier, e.g. photodiodes the potential barrier working in avalanche mode, e.g. avalanche photodiodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/802—Geometry or disposition of elements in pixels, e.g. address-lines or gate electrodes
    • H10F39/8027—Geometry of the photosensitive area
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J1/44—Electric circuits
    • G01J2001/4413—Type
    • G01J2001/442—Single-photon detection or photon counting
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J1/44—Electric circuits
    • G01J2001/4413—Type
    • G01J2001/4433—Peak sensing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J1/44—Electric circuits
    • G01J2001/444—Compensating; Calibrating, e.g. dark current, temperature drift, noise reduction or baseline correction; Adjusting

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Electromagnetism (AREA)
  • Optical Radar Systems And Details Thereof (AREA)
  • Light Receiving Elements (AREA)
  • Measurement Of Optical Distance (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
TW108112418A 2018-04-20 2019-04-10 光接收裝置及距離測量裝置 TWI815877B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018081068A JP7246863B2 (ja) 2018-04-20 2018-04-20 受光装置、車両制御システム及び測距装置
JP2018-081068 2018-04-20

Publications (2)

Publication Number Publication Date
TW202001288A TW202001288A (zh) 2020-01-01
TWI815877B true TWI815877B (zh) 2023-09-21

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TW108112418A TWI815877B (zh) 2018-04-20 2019-04-10 光接收裝置及距離測量裝置
TW112131520A TWI885453B (zh) 2018-04-20 2019-04-10 光接收裝置及距離測量裝置

Family Applications After (1)

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TW112131520A TWI885453B (zh) 2018-04-20 2019-04-10 光接收裝置及距離測量裝置

Country Status (8)

Country Link
US (2) US11714172B2 (enExample)
EP (1) EP3781967A1 (enExample)
JP (1) JP7246863B2 (enExample)
KR (1) KR102740857B1 (enExample)
CN (2) CN210166495U (enExample)
DE (1) DE112019002068T5 (enExample)
TW (2) TWI815877B (enExample)
WO (1) WO2019203057A1 (enExample)

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JP7476033B2 (ja) * 2020-08-24 2024-04-30 株式会社東芝 受光装置及び電子装置
CN112816999A (zh) * 2020-08-25 2021-05-18 神盾股份有限公司 光感测阵列与飞行时间测距装置
CN116547821A (zh) * 2020-12-10 2023-08-04 松下知识产权经营株式会社 光电检测器、光电检测器阵列及距离测量系统
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JP7730659B2 (ja) * 2021-04-26 2025-08-28 キヤノン株式会社 測距装置および電子機器
JP7766413B2 (ja) * 2021-04-26 2025-11-10 キヤノン株式会社 投光ユニットおよびそれを用いた測距装置
JP7701799B2 (ja) 2021-04-26 2025-07-02 キヤノン株式会社 測距装置および計測ユニット、ならびに測距装置の制御方法
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WO2023044176A1 (en) 2021-09-15 2023-03-23 Halliburton Energy Services, Inc. Improved steerability of downhole ranging tools using rotary magnets
PH12022551324A1 (en) * 2021-09-15 2023-11-20 Halliburton Energy Services Inc Improved steerability of downhole ranging tools using rotary magnets
KR102774273B1 (ko) * 2021-12-31 2025-02-27 주식회사 트루픽셀 단일 광자 검출 픽셀 및 이를 포함하는 단일 광자 검출 픽셀 어레이
CN115291663B (zh) * 2022-08-03 2025-04-08 深圳市灵明光子科技有限公司 一种spad控制电路、spad阵列和激光测距装置
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Publication number Publication date
KR102740857B1 (ko) 2024-12-09
KR20210003711A (ko) 2021-01-12
JP2019190892A (ja) 2019-10-31
US12474451B2 (en) 2025-11-18
CN210166495U (zh) 2020-03-20
WO2019203057A1 (en) 2019-10-24
TW202349027A (zh) 2023-12-16
US20210025990A1 (en) 2021-01-28
DE112019002068T5 (de) 2021-01-28
US20230251357A1 (en) 2023-08-10
US11714172B2 (en) 2023-08-01
TW202001288A (zh) 2020-01-01
EP3781967A1 (en) 2021-02-24
JP7246863B2 (ja) 2023-03-28
TWI885453B (zh) 2025-06-01
CN110389332A (zh) 2019-10-29

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