TWI805905B - Shape measuring device and shape measuring method - Google Patents

Abstract

[Problem] Reduce the influence of external temperature changes and achieve high-precision shape measurement. [Solution] A shape measuring device (40), which measures the surface shape of a measurement object (W) by scanning in the scanning direction with three measuring probes (41) arranged side by side along the scanning direction. In the measuring device (40), three measuring probes (41) are enclosed in a heat insulating member (43). Measurement is performed by enclosing three measuring probes (41) in a heat insulating material (43), which suppresses external temperature changes even when the temperature characteristics of each measuring probe (41) are different Therefore, it is possible to perform shape measurement with high precision.

Description

Shape measuring device and shape measuring method

This application claims priority based on Japanese Patent Application No. 2019-050154 filed on March 18, 2019. The entire content of this Japanese application is incorporated in this specification by reference. The invention relates to a shape measuring device and a shape measuring method for measuring straightness.

There is known a shape measuring device that obtains the surface shape of a measurement object by a sequential three-point method and measures straightness (for example, refer to Patent Document 1). [Prior Art Literature]

[Patent Document 1] Japanese Patent Laid-Open No. 2013-195082

[Problem to be solved by the invention]

In the shape measuring device described above, for example, three light-emitting and light-receiving parts for detection light scan to detect displacement in the direction in which the light is emitted. In the above-mentioned measurement, high-resolution and high-precision displacement detection is required, but the optical system of each light-emitting and light-receiving unit may be affected by external temperature changes, which may lead to a decrease in detection accuracy.

The purpose of the present invention is to reduce the influence of external temperature changes. [Technical means to solve the problem]

The present invention is a shape measuring device that measures the surface shape of an object to be measured by scanning in the scanning direction with three measuring probes arranged side by side along the scanning direction. The measuring probe is wrapped in heat insulating material or heat insulating member.

Also, the present invention is a shape measuring method for measuring the surface shape of an object to be measured by scanning in the scanning direction with three measuring probes arranged side by side along the scanning direction. The measurement is carried out with the three measuring probes wrapped in the heat insulating material or the heat insulating member. [Effect of Invention]

According to the present invention, the influence of external temperature changes can be reduced.

Embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a perspective view showing a machine tool 1 equipped with a shape measuring device 40 according to an embodiment of the invention, and FIG. 2 is a block diagram showing a control system of the machine tool 1 . In the figure, the X-axis direction and the Y-axis direction are both horizontal and orthogonal to each other, and the Z-axis direction is a vertical vertical direction perpendicular to the X-axis direction and the Y-axis direction.

[Overview of Machine Tool] The machine tool 1 is a so-called grinding machine that grinds one surface of a workpiece, and includes base portions 31a, 31b, a first support 10, a second support 20, a level rail 32, a saddle 331, a grinding stone 332, a grinding device 34, A shape measuring device 40 , a table 36 and a base 35 on which a workpiece to be measured are arranged, and a control device 60 are provided. The workpiece is the object to be processed by grinding.

[base] The base 35 includes a pair of linear guide rails (not shown) along the X-axis direction, and supports the table 36 so as to be movable along the X-axis direction. In addition, an unillustrated conveyance mechanism for conveying the table 36 along the X-axis direction is mounted on the base 35 . The conveyance mechanism uses a table feed motor 351 (see FIG. 2 ) which can arbitrarily control the amount of operation as a drive source, and can hold the workpiece on the table 36 and convey it along the X-axis direction. In addition, this conveyance mechanism also functions as a scanning mechanism that relatively moves the three measuring probes 41 described later with respect to the workpiece W in the scanning direction (X-axis direction).

Moreover, a pair of base part 31a, 31b is connected and attached to the both sides of the Y-axis direction of the base 35 so that it may protrude. The first support 10 is placed on one base portion 31a, and the second support 20 is placed on the other base portion 31b. The lower ends of each support 10, 20 are fixed to the base by known methods such as bolts and welding. Portions 31a, 31b.

[Pillar 1 and Pillar 2] The first pillar 10 and the second pillar 20 are erected in an arrangement arranged along the Y-axis direction with the base 35 interposed therebetween. Moreover, the level crossing rail 32 is fixedly supported by the upper end part of these support|pillars 10,20 in the state facing the Y-axis direction via the bracket 32a (the bracket of the 2nd support|pillar 20 side is omitted). Moreover, the upper end part of each support|pillar 10,20 is fixed to the horizontal rail 32 by well-known methods, such as a bolt and welding.

[level rail] The flat cross rail 32 is long in the Y-axis direction, and supports the saddle 331 on the front side thereof via a linear guide rail not shown so as to be movable in the Y-axis direction. In addition, a conveyance mechanism (not shown) that moves along the Y-axis direction and positions the saddle 331 is mounted on the level rail 32 . The transport mechanism uses a saddle feed motor 321 (see FIG. 2 ) capable of arbitrarily controlling the amount of operation as a driving source, and can move and position the saddle 331 arbitrarily along the Y-axis direction.

The saddle 331 supports the grinding stone 332 , and the grinding stone 332 supports the grinding device 34 . On the other hand, the movement control of the saddle 331 in the Y-axis direction by the saddle feed motor 321 on the level rail 32 and the movement of the workpiece in the X-axis direction by the table feed motor 351 on the base 35 are performed in cooperation. control. Thereby, the grindstone 34a of the grinding device 34 can be moved relatively to the workpiece to be positioned at any position on the X-Y plane, and grinding can also be performed on the entire surface of the workpiece or at any position.

[grindstone and saddle] The grindstone 332 is supported so as to be movable in the Y-axis direction by the horizontal rail 32 via the saddle 331 , and is supported by the saddle 331 so as to be movable in the Z-axis direction. In addition, the grinding device 34 is supported on the lower end portion of the grinding stone 332 .

The saddle 331 is responsible for raising and lowering the grinding stone 332 along the Z-axis direction. Therefore, the saddle 331 supports the grinding stone 332 so as to be movable in the Z-axis direction via a linear guide (not shown). In addition, a conveyance mechanism (not shown) that moves along the Z-axis direction and positions the grindstone 332 is mounted on the saddle 331 . This conveyance mechanism uses a grindstone lift motor 333 capable of arbitrarily controlling the amount of operation as a drive source, and can move and position the grindstone 332 arbitrarily along the Z-axis direction.

[grinding device] The grinding device 34 is supported on the lower end of the grinding stone 332 . The grinding device 34 has, as a tool, a disk-shaped or cylindrical grindstone 34a that is rotationally driven around the Y-axis, and a grindstone rotation motor 341 that rotates the grindstone 34a. The grindstone 34a is arranged at the right end of the lower end portion of the grindstone 332 . The grindstone 34a grinds by bringing its outer periphery into contact with a workpiece by the rotational drive of the grindstone rotation motor 341 .

[Shape Measuring Device] The shape measurement device 40 is a so-called spectroscopic interferometer, and measures the surface shape of the ground surface of the workpiece ground by the grinding device 34 by the three-point method. The shape measuring device 40 includes a head 42 having three measuring probes 41 , three light sources 411 and three light receiving elements 412 .

The measurement probe 41 is connected to a light source 411 and a light receiving element 412 via an optical fiber 413 as a light transmission member. That is, the optical fiber 413 intervenes, and the light source 411 and the light receiving element 412 are isolated from the measurement probe 41 .

The light source 411 is, for example, an SLD element (Super Luminescent Diode: Super Luminescent Diode), and outputs detection light of a plurality of predetermined wavelengths. The detection light is sent to the measurement probe 41 through the optical fiber 413 . The measuring probe 41 is a light-transmitting element, projects detection light from the light source 411 on the workpiece from the output surface toward the workpiece, and receives reflected light from the workpiece on the output surface. Inside the measuring probe 41 , interference light of the detection light reflected inside the output surface and the reflected light from the workpiece is generated. This interference light is sent to the light receiving element 412 through the optical fiber 413 . The light receiving element 412 is, for example, a CCD, and receives interference light from the measurement probe 41 via a beam splitter not shown. The beam splitter splits light into a plurality of preset wavelengths, and the light receiving element 412 respectively detects the light intensity of each wavelength and inputs it to the control device 60 . The measuring probe 41 can detect the distance in the Z-axis direction from the output surface to the surface of the workpiece according to the light intensity of the light of each wavelength of the interference light.

FIG. 3 is a perspective view of the head 42. FIG. 3(A) shows a state in which a heat insulating member 43 made of a heat insulating material is removed, and FIG. 3(B) shows a state with a heat insulating member 43. The descriptions of the X-axis direction, the Y-axis direction, and the Z-axis direction in FIG. 3 represent directions in a state where the grinding stone 332 is attached with the head 42 .

As shown in the figure, the head 42 is provided with: three measuring probes 41; fixing jigs 414 that hold the three measuring probes 41 independently; jigs 421 that integrally support the three measuring probes via the fixing jigs 414 41 ; a supporting member 422 fixedly mounted on the jig 421 ; a base 423 supporting each measuring probe 41 via the supporting member 422 ; and an adsorption block 424 installing the base 423 on the surface of the grinding stone 332 .

The jig 421 is a long rectangular functional block, and the three measuring probes 41 are fitted in a state where the output surface is exposed through the opening provided at the bottom. The longitudinal direction of the jig 421 is parallel to the Y-axis direction. Also, with the jig 421, the three measuring probes 41 are arranged at regular intervals in the Y-axis direction. Furthermore, each jig 421 holds the three measuring probes 41 such that the optical axis of the detection light is parallel to the Z-axis direction. Thereby, the three measuring probes 41 can perform distance detection in the Z-axis direction.

Also, the jig 421 is formed of a metal material such as invar having a very small coefficient of thermal expansion such as Super Invar (registered trademark), for example. Thereby, fluctuations in the distance between the measurement probes 41 and the relative position of the output surfaces due to the ambient temperature are suppressed.

The supporting member 422 is a trapezoidal plate-shaped member, and is fixedly connected to the clamp 421 by means of bolts or screws. In addition, the support member 422 can also be detached from the jig 421 .

The base 423 includes a plate-shaped base along the X-Y plane and two arms suspended from the base, and the supporting member 422 is connected to the lower ends of the arms. The base 423 can adjust the angle of the support member 422 around the Y axis by structures such as screws and long holes not shown. By adjusting the angle, the jig 421 can be rotated via the supporting member 422 , and the direction of the optical axis of the detection light of each measuring probe 41 and the height of the output surface of each measuring probe 41 in the Z-axis direction can be adjusted.

Each suction block 424 has a built-in permanent magnet, and the presence or absence of the attractive force generated by the permanent magnet can be switched by rotating a knob provided outside.

That is, the head 42 can be attached to and detached from the machine tool 1 , and the head 42 can be attached to an appropriate position on the surface of the grindstone 332 or the like using the suction blocks 424 .

When the head 42 is installed by the suction blocks 424, the jig 421 and the measuring probes 41 are properly adjusted to a suitable orientation and configuration, and the angle between the base 423 and the support member 422 can be further accurately adjusted. Adjustment.

In addition, a heat insulating structure is given to the three measuring probes 41 , the fixing jig 414 , and the jig 421 of the head 42 .

Specifically, as shown in FIG. 3(B), the three measuring probes 41 , the fixing jig 414 , and the jig 421 are in a state of being enclosed in the heat insulating member 43 .

The heat insulating member 43 covers the entire surfaces of the three measuring probes 41 , the fixing jig 414 , and the jig 421 (except for the connecting portion of the optical fiber of each measuring probe 41 ). The heat insulating member 43 is formed with an opening 431 for emitting detection light or injecting reflected light on the output side of the output surface of each measuring probe 41 .

In addition, as shown in the figure, the heat insulating member 43 may be configured to form a concave portion for fitting the three measuring probes 41 and the clamps 421 inside the block-shaped heat insulating member 43, and the three measuring probes 41 and the clamps 421 The structure stored in the concave portion may be a structure in which the entire surfaces of the three measuring probes 41 and the jig 421 are wrapped with one plate-shaped heat insulating member 43 . At this time, since a space is formed between the three measurement probes 41 , the measurement environments among the measurement probes 41 are averaged in the same space, and variations among the measurement probes 41 are reduced. In addition, the surfaces of the three measuring probes 41 and the jig 421 may be sprayed with a foamable heat insulating material. In this case, the measurement probe 41 can be easily covered with a heat insulating material. Moreover, although not shown in figure, the structure which wraps the measuring probe 41 independently by a heat insulating material or a heat insulating member may be used. However, in this case, it is preferable to perform measurement after correcting the deviation of the sensor itself. As the heat insulating material covering each measuring probe 41, glass wool, rock wool, cellulose fiber, carbonized cork, wool heat insulating material, etc. Materials called heat insulating materials such as ester foam, phenolic foam, and polystyrene foam are preferable, but not limited thereto. For example, other heat insulating materials having a thermal conductivity of 5.0 [W/mk] or less, preferably 1.0 [W/mk] or less, more preferably 0.5 [W/mk] or less can be used.

With the heat insulating member 43, the three measuring probes 41, the fixing jig 414, and the jig 421 are insulated from the outside air, so that the influence from the external ambient temperature can be reduced.

[control device] The control device 60 is a device for centrally controlling the machine tool 1 as a whole, and for example, has a CPU (Central Processing Unit: central processing unit), RAM (Random Access Memory: random access memory), ROM (Read Only Memory: read-only memory), other non-volatile memory, etc. As shown in FIG. 2 , the control device 60 is electrically connected to the aforementioned table feed motor 351 , saddle feed motor 321 , grindstone lifting motor 333 , and grindstone rotation motor 341 , and can control the driving of these. Furthermore, the control device 60 is connected to the shape measurement device 40 , the display device 61 , and the input device 62 . The display device 61 is a device for displaying various information, such as a liquid crystal display or the like. The input device 62 is an input interface for inputting various information and various commands to the machine tool 1 .

The control device 60 includes a grinding control unit 63 and a shape measurement processing unit 64 . The control device 60 implements the grinding control unit 63 and the shape measurement processing by, for example, storing various programs corresponding to the functions of the grinding control unit 63 and the shape measurement processing unit 64 in the ROM and executing each program by the CPU. Function of part 64. In addition, a circuit may be provided independently as the grinding control unit 63 and the shape measurement processing unit 64 and realized by hardware.

The grinding control unit 63 executes operation control during the grinding process of the workpiece by the machine tool 1 . For example, if various processing conditions such as the rotation speed of the grinding stone, the grinding depth, and the grinding range are input in advance through the aforementioned input device 62, the grinding control unit 63 controls the table feed motor 351, the saddle feed motor 321, The grinding stone lifting motor 333 and the grinding stone rotating motor 341 perform grinding processing according to the input processing conditions.

The shape measurement processing unit 64 performs a process of measuring the surface shape of the workpiece by the three-point method based on the detection output when the three measuring probes 41 are scanned in the Y-axis direction. 4 is a schematic diagram of scanning the surface of the workpiece W, and FIGS. 5(A) and 5(B) are explanatory diagrams for calculating the distance and curvature to the surface of the workpiece W. As shown in FIG. In addition, in FIG. 4 and FIG. 5 , in order to distinguish the three measuring probes 41 , these symbols are designated as 41 a , 41 b , and 41 c sequentially from the upstream side in the scanning direction (downstream side in the conveying direction of the workpiece W). The content of the measurement method executed by the shape measurement processing unit 64 will be described with reference to FIGS. 4 to 5(B).

As shown in FIG. 4 , when measuring the shape, the shape measurement processing unit 64 controls the table feed motor 351 to convey the workpiece W along the Y-axis direction at a predetermined speed. In this state, the shape measurement is performed by the three measuring probes 41 at a predetermined cycle, whereby the surface of the workpiece W is scanned.

As shown in FIG. 5(A), the measurement probes 41a, 41b, and 41c are arranged in a row at intervals P in the X-axis direction. The distances in the Z-axis direction to points a, b, and c on the surface of the workpiece W at this time are measured. If the distances along the Z-axis direction from the output surfaces of the measuring probes 41a, 41b, 41c to the surface of the workpiece W obtained by the measuring probes 41a, 41b, 41c are A, B, and C, then The distance along the Z-axis direction from the point b to the line segment ac (referred to as a gap g) is obtained by the following equation (1). g=B-(A+C)/2...(1)

On the other hand, the second-order differential (d ² z/dx ² ) of the displacement z at point b on the surface of the workpiece W is the curvature (1/r) at point b, as shown in FIG. 5(B), on the line segment ab The following formula (2) is established between the slope (dz _ab /dx) and the slope (dz _bc /dx) of the line segment bc.

[Formula 1]

The slope (dz _ab /dx) of the line segment ab is obtained by the following formula (3), and the slope (dz _bc /dx) of the line segment bc is obtained by the following formula (4). Therefore, when the following formula (3) and formula (4) are substituted into the above formula (2), and further substituted into the formula (1), the following formula (5) is obtained. Therefore, the curvature at point b which is the second order differential of the displacement z can be obtained from the gap g and the interval P between the measuring probes 41 a , 41 b , and 41 c.

[數式3]

[數式4]

[Formula 2]

[Formula 3]

[Formula 4]

The interval P of the measuring probes 41 a , 41 b , and 41 c is known and can be recorded in the memory of the control device 60 in advance. The shape measurement processing unit 64 acquires the distances A, B, and C from the detection outputs of the measuring probes 41a, 41b, and 41c during scanning, and calculates the gap g according to the formula (1). Also, the value of the interval P is read out from the memory, and the curvature is calculated according to equation (5). Further, the displacement z at an arbitrary point x can be obtained by performing second-order integration of the obtained curvature at the integration pitch. The integration pitch is, for example, the data acquisition interval (scanning speed×sampling period) of each of the measuring probes 41 a , 41 b , and 41 c in the X direction during scanning.

[Operation of the machine tool] The control device 60 drives the grinding stone lifting motor 333 to achieve the set grinding depth under the control of the grinding control unit 63, and drives the grinding stone rotation motor 341 at the set grinding stone rotation speed. Also, the grindstone 34 a of the grinding device 34 is relatively fed in the X-axis direction with respect to the workpiece by the table feed motor 351 and grinding is performed. Then, while the grinding stone 34a is moved in the Y-axis direction by a predetermined distance unit by the drive of the saddle feed motor 321, grinding in the X-axis direction is repeated, and the workpiece W is ground within the set grinding range. grinding.

Next, the control device 60 detects the curvature and flatness of the machined surface of the workpiece W after grinding. That is, by driving the table feed motor 351 and the saddle feed motor 321, the relative positioning of the head 42 and the workpiece W is carried out so that each measuring probe 41 of the head 42 mounted on the grinding stone 332 The detection position becomes the start position of the search range of the workpiece W. Further, the grinding stone lifting motor 333 is driven to adjust the output surface of each measuring probe 41 to a predetermined height. In addition, the workpiece W is conveyed at a predetermined speed by the table feed motor 351, and the X-axis direction is used as the scanning direction, and the distances A, B, and C in the Z-axis direction are detected in each measuring probe 41 at a predetermined sampling period. . According to this situation, the gap g is calculated over the total length of the grinding range in the scanning direction. Then, while the grinding stone 34a is moved in the Y-axis direction by a predetermined distance unit by the drive of the saddle feed motor 321, the curvature and the displacement z are obtained in the entire grinding range in the X-axis direction, and the entire grinding area is measured. Flatness of the grinding area.

[Technical Effects of Embodiments of the Invention] The above-mentioned machine tool 1 includes a shape measuring device 40 that measures the flatness of the surface shape of a workpiece by scanning in the scanning direction with three measuring probes 41 arranged side by side in the X-axis direction (scanning direction). The three measuring probes 41 of 40 are enclosed in a heat insulating member 43 . Therefore, the three measuring probes 41 perform measurement in a state enclosed in the heat insulating member 43, and the influence of changes in the surrounding environmental temperature is reduced for each measuring probe 41, and curvature and displacement can be detected with high precision. .

In addition, the shape measuring device 40 uses three measuring probes 41 to measure the surface shape of the workpiece W by the three-point method. Therefore, it is possible to cancel the motion error and the pitching motion error of each measuring probe 41 in the Z-axis direction, and perform high-precision measurement. detection. Furthermore, even when the temperature characteristics of the measurement probes 41 are different, the heat insulator 43 reduces the influence of the ambient temperature of each measurement probe 41 , so that it is possible to effectively suppress a drop in detection accuracy.

In addition, the heat insulating member 43 also includes the jig 421 that integrally supports the three measuring probes 41 , so the influence of environmental temperature changes on the jig 421 can be reduced, and further high-precision detection can be performed. In addition, since the heat insulating member 43 covers the supporting member 422 and the jig 421 together, the cost can be reduced compared to the case of covering the entire shape measuring device 40 . Moreover, since the base 423 is not covered by the heat insulating member 43, first, after covering the support member 422 and the jig 421 together with the heat insulating member 43, these can be connected to the base 423, and covered by the covering member 43. Compared with the case where the entire shape measuring device 40 is covered, the heat insulating member 43 can be provided thinly.

In addition, the machine tool 1 has a transport mechanism for relatively moving the three measuring probes 41 relative to the workpiece W along the scanning direction by the table feed motor 351, so that the three measuring probes 41 in the three-point method can be performed well. scan.

In addition, the three measuring probes 41 are all installed so that the light source 411 is isolated from the outside of the heat insulating member 43 through the optical fiber 413, so even when the light source 411 generates heat, the influence of the temperature inside the heat insulating member 43 can be sufficiently reduced. , capable of high-precision detection.

[other] Each embodiment of the present invention has been described above. However, the present invention is not limited to the above-mentioned embodiments. For example, a grinding machine is exemplified as the machine tool 1 , but the shape measuring device 40 can also be mounted on other machine tools for measuring the surface shape of the workpiece W after processing. For example, the shape measuring device 40 can also be mounted on a cutting machine or the like.

Also, for example, as shown in FIG. 6 , a structure may be adopted in which three measuring probes 41 , fixing jigs 414 , and jigs 421 are enclosed in a heat insulating structure 43A composed of a plurality of heat insulating members. For example, the heat insulating structure 43A is set to have an inner layer 432A as a heat insulating member storing the three measuring probes 41, the fixing jig 414, and the jig 421 inside and an inner layer 432A as a heat insulating member storing the entire inner layer 432A inside. The outer layer 433A has a double-layer structure, and the hollow space between the inner layer 432A and the outer layer 433A is vacuumized to form a vacuum heat insulation structure. Also in this case, it is desirable to provide an opening 431A through which the detection light and the reflected light pass through on the output surface side of each measurement probe 41 . At this time, by providing a vacuum layer between the inner layer 432A and the outer layer 433A, heat insulation from the outside can be effectively realized. Moreover, even if the inner layer 432A and the outer layer 433A themselves are not formed of a heat insulating material, a heat insulating effect can be obtained. Therefore, for example, the inner layer 432A and the outer layer 433A can be formed of a metal material that is easy to process and obtains strength easily. In the case of these structures, the three measuring probes 41 also reduce the influence of the ambient temperature change by the heat insulation structure 43A, and can perform high-precision detection regarding curvature and displacement.

Moreover, in the above-mentioned head part 42, the case where the jig|tool 421 and the support member 422 are directly contacted and connected was illustrated, However, The structure which arrange|positions a heat insulating material between these and suppresses heat transfer is also possible.

In addition, the optical fiber 413 connected to the light source 411 and the light receiving element 412 from each measurement probe 41 may be insulated from the surroundings by a heat insulating material or the like.

1: machine tool 34: Grinding device 34a: Millstone 35: base 36:Workbench 40: Shape measuring device 41: Measuring probe 41a, 41b, 41c: Measuring probes 42: head 421: Fixture 43: Insulation member 43A: Insulation structure 60: Control device 63: Grinding Control Department 64: Shape measurement processing department 351: table feed motor 332: grinding stone 411: light source 412: Light receiving element 413: Optical fiber (light transmission member) W: Workpiece (measurement object)

[ Fig. 1 ] is a perspective view showing a machine tool equipped with a shape measuring device according to an embodiment of the present invention. [ Fig. 2 ] is a block diagram showing a control system of a machine tool. [Fig. 3], Fig. 3(A) is a perspective view of the head with the heat insulating member made of the heat insulating material removed, and Fig. 3(B) is a perspective view of the head with the state of the heat insulating member. [ Fig. 4 ] is a schematic diagram when scanning the surface of a workpiece. In [ Fig. 5 ], Fig. 5(A) and Fig. 5(B) are explanatory diagrams for calculating the distance and curvature to the surface of the workpiece. [ Fig. 6 ] is a sectional view showing an example of a heat insulating member.

41: Measuring probe

42: head

43: Insulation member

414: Fixture

421: Fixture

422: supporting member

423: Abutment

424: Adsorption block

431: opening

X: X axis direction

Y: Y axis direction

Z: Z axis direction

Claims (6)

A shape measuring device that measures the surface shape of an object to be measured by scanning three measuring probes arranged side by side along the scanning direction in the scanning direction, the shape measuring device having a jig that integrally supports the three measuring probes , and in the aforementioned shape measuring device, the aforementioned three measuring probes and the aforementioned fixture are enclosed together in a heat insulating material or a heat insulating member to cover the entire surfaces of the aforementioned three measuring probes and the aforementioned fixture. The shape measuring device according to claim 1, wherein the surface shape of the object to be measured is measured by a three-point method using the three measuring probes. The shape measuring device according to claim 1 or claim 2, wherein the three measuring probes are covered by one heat insulating member. The shape measuring device according to Claim 1 or Claim 2, further comprising a scanning mechanism for relatively moving the three measuring probes along the scanning direction with respect to the object to be measured. The shape measuring device according to claim 1 or claim 2, wherein the three measuring probes are arranged such that the light source is isolated from the heat insulating material or the outside of the heat insulating member through a light-conducting member. A shape measuring method, which measures the surface shape of the object to be measured by scanning in the scanning direction with three measuring probes arranged side by side along the scanning direction. In the aforementioned shape measuring method, The aforementioned three measuring probes are integrally supported by the fixture, after wrapping the aforementioned three measuring probes and the aforementioned fixture together in a heat insulating material or a heat insulating member to cover the entire surface of the aforementioned three measuring probes and the aforementioned fixture measurement in the state.

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