TWI799660B - 行走車系統 - Google Patents

行走車系統 Download PDF

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Publication number
TWI799660B
TWI799660B TW108138771A TW108138771A TWI799660B TW I799660 B TWI799660 B TW I799660B TW 108138771 A TW108138771 A TW 108138771A TW 108138771 A TW108138771 A TW 108138771A TW I799660 B TWI799660 B TW I799660B
Authority
TW
Taiwan
Prior art keywords
vehicle system
walking vehicle
walking
vehicle
Prior art date
Application number
TW108138771A
Other languages
English (en)
Other versions
TW202026226A (zh
Inventor
小合玄己
伊藤靖久
Original Assignee
日商村田機械股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商村田機械股份有限公司 filed Critical 日商村田機械股份有限公司
Publication of TW202026226A publication Critical patent/TW202026226A/zh
Application granted granted Critical
Publication of TWI799660B publication Critical patent/TWI799660B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B61—RAILWAYS
    • B61B—RAILWAY SYSTEMS; EQUIPMENT THEREFOR NOT OTHERWISE PROVIDED FOR
    • B61B13/00—Other railway systems
    • B61B13/04—Monorail systems
    • B61B13/06—Saddle or like balanced type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67733—Overhead conveying
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B61—RAILWAYS
    • B61B—RAILWAY SYSTEMS; EQUIPMENT THEREFOR NOT OTHERWISE PROVIDED FOR
    • B61B3/00—Elevated railway systems with suspended vehicles
    • B61B3/02—Elevated railway systems with suspended vehicles with self-propelled vehicles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B61—RAILWAYS
    • B61B—RAILWAY SYSTEMS; EQUIPMENT THEREFOR NOT OTHERWISE PROVIDED FOR
    • B61B13/00—Other railway systems
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0457—Storage devices mechanical with suspended load carriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67715—Changing the direction of the conveying path
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0297—Wafer cassette

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Transportation (AREA)
  • Platform Screen Doors And Railroad Systems (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Harvester Elements (AREA)
  • Transplanting Machines (AREA)
TW108138771A 2018-10-29 2019-10-28 行走車系統 TWI799660B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018203022 2018-10-29
JP2018-203022 2018-10-29

Publications (2)

Publication Number Publication Date
TW202026226A TW202026226A (zh) 2020-07-16
TWI799660B true TWI799660B (zh) 2023-04-21

Family

ID=70462963

Family Applications (1)

Application Number Title Priority Date Filing Date
TW108138771A TWI799660B (zh) 2018-10-29 2019-10-28 行走車系統

Country Status (9)

Country Link
US (1) US20210387654A1 (zh)
EP (1) EP3875331B1 (zh)
JP (1) JP7040636B2 (zh)
KR (1) KR102451691B1 (zh)
CN (1) CN112930291B (zh)
IL (1) IL282630B (zh)
SG (1) SG11202104310QA (zh)
TW (1) TWI799660B (zh)
WO (1) WO2020090253A1 (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2024070297A1 (ja) * 2022-09-29 2024-04-04 村田機械株式会社 走行レール及び走行車システム

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012040961A (ja) * 2010-08-19 2012-03-01 Daifuku Co Ltd 物品搬送設備
JP2016175506A (ja) * 2015-03-19 2016-10-06 村田機械株式会社 搬送台車と搬送台車システム
TW201922547A (zh) * 2017-10-31 2019-06-16 日商村田機械股份有限公司 搬運系統

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1236183A (en) * 1985-01-04 1988-05-03 W. John Ballantyne Lim secondary reactance compensation and thrust control
JPH08324772A (ja) * 1995-06-05 1996-12-10 Shin Meiwa Ind Co Ltd ワーク搬送装置
JPH0932403A (ja) * 1995-07-21 1997-02-04 Okamura Corp 電動間仕切装置
CA2465474C (en) * 2003-05-01 2012-07-10 Daifuku Co., Ltd. Conveyance apparatus using movable bodies
JP4214533B2 (ja) * 2006-08-10 2009-01-28 村田機械株式会社 移動体システム
KR20110005978A (ko) * 2009-07-13 2011-01-20 삼성전자주식회사 교차로 주행 시스템
JP2012116648A (ja) 2010-12-03 2012-06-21 Yuzo Shimizu レール式クレーン
JP6278341B2 (ja) * 2015-04-06 2018-02-14 株式会社ダイフク 物品搬送設備
CN106043316A (zh) * 2016-07-17 2016-10-26 乔为 伸缩轨式侧方受力转向悬轨行驶装置
JP6665938B2 (ja) * 2016-08-26 2020-03-13 村田機械株式会社 有軌道台車システム、及び有軌道台車
CN106864464B (zh) * 2017-02-23 2018-07-06 万普华 个人悬挂式双轨道双动力自动控制轻型轨道交通系统
JP6476233B2 (ja) 2017-06-02 2019-02-27 本田技研工業株式会社 車体構造

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012040961A (ja) * 2010-08-19 2012-03-01 Daifuku Co Ltd 物品搬送設備
JP2016175506A (ja) * 2015-03-19 2016-10-06 村田機械株式会社 搬送台車と搬送台車システム
TW201922547A (zh) * 2017-10-31 2019-06-16 日商村田機械股份有限公司 搬運系統

Also Published As

Publication number Publication date
CN112930291A (zh) 2021-06-08
IL282630A (en) 2021-06-30
EP3875331A4 (en) 2022-08-03
CN112930291B (zh) 2023-08-01
SG11202104310QA (en) 2021-05-28
WO2020090253A1 (ja) 2020-05-07
EP3875331B1 (en) 2024-01-03
KR20210066876A (ko) 2021-06-07
JP7040636B2 (ja) 2022-03-23
TW202026226A (zh) 2020-07-16
KR102451691B1 (ko) 2022-10-06
JPWO2020090253A1 (ja) 2021-09-30
US20210387654A1 (en) 2021-12-16
EP3875331A1 (en) 2021-09-08
IL282630B (en) 2022-08-01

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