SG11202104310QA - Traveling vehicle system - Google Patents

Traveling vehicle system

Info

Publication number
SG11202104310QA
SG11202104310QA SG11202104310QA SG11202104310QA SG11202104310QA SG 11202104310Q A SG11202104310Q A SG 11202104310QA SG 11202104310Q A SG11202104310Q A SG 11202104310QA SG 11202104310Q A SG11202104310Q A SG 11202104310QA SG 11202104310Q A SG11202104310Q A SG 11202104310QA
Authority
SG
Singapore
Prior art keywords
vehicle system
traveling vehicle
traveling
vehicle
Prior art date
Application number
SG11202104310QA
Inventor
Haruki OGO
Yasuhisa Ito
Original Assignee
Murata Machinery Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Machinery Ltd filed Critical Murata Machinery Ltd
Publication of SG11202104310QA publication Critical patent/SG11202104310QA/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B61—RAILWAYS
    • B61B—RAILWAY SYSTEMS; EQUIPMENT THEREFOR NOT OTHERWISE PROVIDED FOR
    • B61B3/00—Elevated railway systems with suspended vehicles
    • B61B3/02—Elevated railway systems with suspended vehicles with self-propelled vehicles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B61—RAILWAYS
    • B61B—RAILWAY SYSTEMS; EQUIPMENT THEREFOR NOT OTHERWISE PROVIDED FOR
    • B61B13/00—Other railway systems
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B61—RAILWAYS
    • B61B—RAILWAY SYSTEMS; EQUIPMENT THEREFOR NOT OTHERWISE PROVIDED FOR
    • B61B13/00—Other railway systems
    • B61B13/04—Monorail systems
    • B61B13/06—Saddle or like balanced type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0457—Storage devices mechanical with suspended load carriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67715—Changing the direction of the conveying path
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67733—Overhead conveying
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0297—Wafer cassette
SG11202104310QA 2018-10-29 2019-09-13 Traveling vehicle system SG11202104310QA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018203022 2018-10-29
PCT/JP2019/036184 WO2020090253A1 (en) 2018-10-29 2019-09-13 Traveling vehicle system

Publications (1)

Publication Number Publication Date
SG11202104310QA true SG11202104310QA (en) 2021-05-28

Family

ID=70462963

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11202104310QA SG11202104310QA (en) 2018-10-29 2019-09-13 Traveling vehicle system

Country Status (9)

Country Link
US (1) US20210387654A1 (en)
EP (1) EP3875331B1 (en)
JP (1) JP7040636B2 (en)
KR (1) KR102451691B1 (en)
CN (1) CN112930291B (en)
IL (1) IL282630B (en)
SG (1) SG11202104310QA (en)
TW (1) TWI799660B (en)
WO (1) WO2020090253A1 (en)

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1236183A (en) * 1985-01-04 1988-05-03 W. John Ballantyne Lim secondary reactance compensation and thrust control
JPH08324772A (en) * 1995-06-05 1996-12-10 Shin Meiwa Ind Co Ltd Work carrier device
JPH0932403A (en) * 1995-07-21 1997-02-04 Okamura Corp Electric partitioning device
CA2465474C (en) * 2003-05-01 2012-07-10 Daifuku Co., Ltd. Conveyance apparatus using movable bodies
JP4214533B2 (en) * 2006-08-10 2009-01-28 村田機械株式会社 Mobile system
KR20110005978A (en) * 2009-07-13 2011-01-20 삼성전자주식회사 Intersection navigation system
JP5440870B2 (en) * 2010-08-19 2014-03-12 株式会社ダイフク Goods transport equipment
JP2012116648A (en) 2010-12-03 2012-06-21 Yuzo Shimizu Rail type crane
JP6168476B2 (en) * 2015-03-19 2017-07-26 村田機械株式会社 Transport cart and transport cart system
JP6278341B2 (en) * 2015-04-06 2018-02-14 株式会社ダイフク Goods transport equipment
CN106043316A (en) * 2016-07-17 2016-10-26 乔为 Telescopic rail type lateral stress steering suspension rail traveling device
KR102165190B1 (en) * 2016-08-26 2020-10-12 무라다기카이가부시끼가이샤 Tracked bogie system and tracked bogie
CN106864464B (en) * 2017-02-23 2018-07-06 万普华 Personal suspension type double track road is double dynamical to automatically control railway traffic system
JP6476233B2 (en) 2017-06-02 2019-02-27 本田技研工業株式会社 Body structure
JP6906754B2 (en) * 2017-10-31 2021-07-21 村田機械株式会社 Transport system

Also Published As

Publication number Publication date
KR20210066876A (en) 2021-06-07
JPWO2020090253A1 (en) 2021-09-30
CN112930291A (en) 2021-06-08
WO2020090253A1 (en) 2020-05-07
IL282630A (en) 2021-06-30
KR102451691B1 (en) 2022-10-06
EP3875331B1 (en) 2024-01-03
TW202026226A (en) 2020-07-16
EP3875331A1 (en) 2021-09-08
EP3875331A4 (en) 2022-08-03
US20210387654A1 (en) 2021-12-16
JP7040636B2 (en) 2022-03-23
CN112930291B (en) 2023-08-01
IL282630B (en) 2022-08-01
TWI799660B (en) 2023-04-21

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