TWI799534B - 基板收納容器 - Google Patents

基板收納容器 Download PDF

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Publication number
TWI799534B
TWI799534B TW108108406A TW108108406A TWI799534B TW I799534 B TWI799534 B TW I799534B TW 108108406 A TW108108406 A TW 108108406A TW 108108406 A TW108108406 A TW 108108406A TW I799534 B TWI799534 B TW I799534B
Authority
TW
Taiwan
Prior art keywords
storage container
substrate storage
substrate
container
storage
Prior art date
Application number
TW108108406A
Other languages
English (en)
Other versions
TW201939646A (zh
Inventor
小川統
Original Assignee
日商信越聚合物股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商信越聚合物股份有限公司 filed Critical 日商信越聚合物股份有限公司
Publication of TW201939646A publication Critical patent/TW201939646A/zh
Application granted granted Critical
Publication of TWI799534B publication Critical patent/TWI799534B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67389—Closed carriers characterised by atmosphere control
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67389—Closed carriers characterised by atmosphere control
    • H01L21/67393—Closed carriers characterised by atmosphere control characterised by the presence of atmosphere modifying elements inside or attached to the closed carrierl
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/42—Auxiliary equipment or operation thereof
    • B01D46/44—Auxiliary equipment or operation thereof controlling filtration
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D81/00—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents
    • B65D81/18—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient
    • B65D81/20—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient under vacuum or superatmospheric pressure, or in a special atmosphere, e.g. of inert gas
    • B65D81/2069—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient under vacuum or superatmospheric pressure, or in a special atmosphere, e.g. of inert gas in a special atmosphere
    • B65D81/2076—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient under vacuum or superatmospheric pressure, or in a special atmosphere, e.g. of inert gas in a special atmosphere in an at least partially rigid container
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Chemical & Material Sciences (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)
TW108108406A 2018-03-13 2019-03-13 基板收納容器 TWI799534B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018-045064 2018-03-13
JP2018045064A JP7125000B2 (ja) 2018-03-13 2018-03-13 基板収納容器

Publications (2)

Publication Number Publication Date
TW201939646A TW201939646A (zh) 2019-10-01
TWI799534B true TWI799534B (zh) 2023-04-21

Family

ID=67908293

Family Applications (1)

Application Number Title Priority Date Filing Date
TW108108406A TWI799534B (zh) 2018-03-13 2019-03-13 基板收納容器

Country Status (6)

Country Link
US (1) US11075099B2 (zh)
JP (1) JP7125000B2 (zh)
KR (1) KR102630660B1 (zh)
CN (1) CN111868908B (zh)
TW (1) TWI799534B (zh)
WO (1) WO2019176581A1 (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020065968A1 (ja) * 2018-09-28 2020-04-02 ミライアル株式会社 基板収納容器

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI289534B (en) * 2002-10-25 2007-11-11 Shinetsu Polymer Co Substrate storage container
TW200816349A (en) * 2006-09-04 2008-04-01 Shinetsu Polymer Co Substrate storage container and check valve
JP2009277687A (ja) * 2008-05-12 2009-11-26 Shin Etsu Polymer Co Ltd バルブ機構及び基板収納容器
JP2014107346A (ja) * 2012-11-26 2014-06-09 Shin Etsu Polymer Co Ltd 基板収納容器

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3298391A (en) * 1967-01-17 Two way flow anti-siphon valve assembly
JPS5329505B2 (zh) 1974-01-11 1978-08-21
JPS50103229U (zh) * 1974-01-28 1975-08-26
JPS5815959B2 (ja) * 1979-12-25 1983-03-28 アルプス電気株式会社 透明積層配線基板の製造方法
US5396925A (en) * 1993-12-16 1995-03-14 Abbott Laboratories Anti-free flow valve, enabling fluid flow as a function of pressure and selectively opened to enable free flow
JPH1089035A (ja) * 1996-09-17 1998-04-07 Nippon Soken Inc 内燃機関の潤滑回路における油圧制御装置
US6319297B1 (en) * 1998-03-27 2001-11-20 Asyst Technologies, Inc. Modular SMIF pod breather, adsorbent, and purge cartridges
JP2002364766A (ja) 2001-06-12 2002-12-18 Toyoda Gosei Co Ltd ダイヤフラム弁
TW511650U (en) * 2001-09-12 2002-11-21 Ind Tech Res Inst Ventilator device for cleaning container
JP4201583B2 (ja) 2002-11-28 2008-12-24 信越ポリマー株式会社 基板収納容器
JP4204302B2 (ja) * 2002-10-25 2009-01-07 信越ポリマー株式会社 収納容器
JP2005009502A (ja) * 2003-06-16 2005-01-13 Aisan Ind Co Ltd ダイアフラム式バルブ
US7428914B2 (en) * 2004-05-19 2008-09-30 Toyoda Gosei Co., Ltd. Flow control valve
US20100051501A1 (en) * 2008-08-29 2010-03-04 International Business Machines Corporation Ic waper carrier sealed from ambient atmosphere during transportation from one process to the next
TWI346638B (en) * 2008-12-26 2011-08-11 Gudeng Prec Industral Co Ltd A purging valve and a wafer container having the purging valve
JP5241607B2 (ja) * 2009-05-21 2013-07-17 信越ポリマー株式会社 基板収納容器
TWI411563B (zh) * 2009-09-25 2013-10-11 Gudeng Prec Industral Co Ltd 光罩盒
JP5815959B2 (ja) 2011-02-08 2015-11-17 近藤工業株式会社 Ｎ２ガスパージ装置におけるノズルユニット
JP5888492B2 (ja) * 2011-12-02 2016-03-22 信越ポリマー株式会社 基板収納容器
WO2016002005A1 (ja) * 2014-07-01 2016-01-07 ミライアル株式会社 基板収納容器
TWI712098B (zh) * 2014-12-01 2020-12-01 美商恩特葛瑞斯股份有限公司 基板容器、用於基板容器之閥總成、沖洗模組及其替換方法
JP6561700B2 (ja) * 2015-09-04 2019-08-21 シンフォニアテクノロジー株式会社 ガス注入装置
JP6578237B2 (ja) * 2016-03-31 2019-09-18 株式会社吉野工業所 吐出容器
SG11201913051UA (en) * 2017-07-14 2020-01-30 Shin Etsu Polymer Co Ltd Substrate storage container

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI289534B (en) * 2002-10-25 2007-11-11 Shinetsu Polymer Co Substrate storage container
TW200816349A (en) * 2006-09-04 2008-04-01 Shinetsu Polymer Co Substrate storage container and check valve
JP2009277687A (ja) * 2008-05-12 2009-11-26 Shin Etsu Polymer Co Ltd バルブ機構及び基板収納容器
JP2014107346A (ja) * 2012-11-26 2014-06-09 Shin Etsu Polymer Co Ltd 基板収納容器

Also Published As

Publication number Publication date
TW201939646A (zh) 2019-10-01
KR20200127031A (ko) 2020-11-09
CN111868908B (zh) 2024-05-17
US20210005492A1 (en) 2021-01-07
JP7125000B2 (ja) 2022-08-24
CN111868908A (zh) 2020-10-30
US11075099B2 (en) 2021-07-27
KR102630660B1 (ko) 2024-01-29
JP2019160982A (ja) 2019-09-19
WO2019176581A1 (ja) 2019-09-19

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