TWI785920B - Test device - Google Patents

Abstract

Disclosed is a test device for testing electrical characteristics of an object-to-be-tested. The test device includes a test socket comprising a probe configured to transmit a test signal to the object-to-be-tested, a pusher body coupled to the test socket, a pusher unit supported on the pusher body and pressing and releasing the object-to-be-tested and a heat shield cover to perform shielding the pusher unit exposed to a top of the pusher body and releasing the shielding.

Description

test device

The present disclosure relates to a test device for testing electrical characteristics of semiconductors or similar objects to be tested.

In the process of manufacturing semiconductors or similar electronic products, a test device for testing the electrical characteristics of the finally manufactured electronic products is required. When testing electronic products, heat is generated in the test setup. In this case, the generated heat reduces the reliability of the test by increasing the resistance during the test, and causes product failure by shorting the internal circuit. Therefore, fast heat dissipation is critical for testing power semiconductors, automotive semiconductors, and system semiconductors.

The specific target to be tested requires testing of electrical characteristics in extreme environments. For this purpose, the test rig contains heating or cooling elements to create extreme environments. When the temperature is suddenly changed by the heating element or the cooling element, the test device may exceed the set test temperature. Simultaneously, hot air or cold air may be introduced into a test room equipped with a plurality of test devices, so that the test devices can quickly reach a set temperature range. However, the effect of hot or cold air varies depending on the position in the test room, and thus there is a problem that a plurality of test devices in the test room reach the set temperature at different times without simultaneously satisfying the set temperature condition.

Aspects of the present disclosure provide a reliable testing device. According to an embodiment of the present disclosure, a testing device for testing electrical characteristics of a target to be tested is provided. The test device includes: a test socket including a probe configured to transmit a test signal to an object to be tested; a pusher body coupled to the test socket; a pusher unit supported on the pusher body and pressed and released to be tested and a heat shield cover for performing shielding of the pusher unit exposed on top of the pusher body and releasing the shield.

The pusher unit may include a pusher base having a first side with a pressing surface and a second side with a heat dissipation surface, and a heat sink provided on the heat dissipation surface on the pusher base to dissipate heat, and the heat shield cover performs shielding from exposure to the pusher. heatsink and release shield on top of the radiator body.

The heat shield cover may include a plurality of cover blades coupled to each other for relative rotation.

One of the plurality of cover blades may include a stationary vane fixed to the top of the pusher body, and the other of the plurality of cover blades may include a plurality of blades coupled by a shaft to rotatably open and close relative to the stationary blade. Variable blades.

The plurality of variable vanes may include a first variable vane disposed above the stationary vane, and a second variable vane disposed above the first variable vane, and the stationary vane may include a pair of first guide protrusions, the pair of The first guide protrusion is arranged symmetrically with respect to the axis at one side of the circumferential outer end portion on the top thereof, and the first variable vane may include a pair of first guide grooves along which Circumferential outer end portions on the bottom extend and receive a pair of first guide protrusions respectively to be movable.

The first variable vane may include a pair of second guide protrusions disposed symmetrically with respect to the axis at one side of the circumferential outer end portion on the top thereof, and the second variable vane may include A pair of second guide grooves extending along the circumferential outer end portion on the bottom thereof and respectively receiving a pair of second guide protrusions to be movable.

The plurality of cover blades may include a pair of fan-shaped shield portions symmetrically coupled with respect to the axis, and a pair of skirt portions bent from circumferential outer end portions of the fan-shaped shield portions and extending downward and contacting a top of the pusher body.

The stationary blade may include a pair of stoppers protruding upward from a radial end portion of the top thereof and disposed symmetrically with respect to the shaft.

In the test device of the present invention, the heat shield cover covering the heat sink of the pusher unit can adjust the opening and closing amount of the heat shield cover according to the position difference of a plurality of test devices installed in a single test chamber. Therefore, by correcting for different temperatures for positional differences, tests can be performed under the same temperature conditions.

Hereinafter, embodiments of the present disclosure will be described in detail with reference to the accompanying drawings. For ease of description, by excluding parts not directly related to the present disclosure from the drawings or detailed description, only relevant parts are described to understand the present disclosure, and the same reference numerals refer to the same elements throughout.

Detailed descriptions that would be obvious to one of ordinary skill in the art may not be disclosed. In the present disclosure, terms such as first, second, etc. are used to distinguish one element from another element and the actual relationship or order therebetween, but do not imply the actual relationship or order therebetween.

Fig. 1 shows the closed state of the heat shield cover 40 in the test device 1 according to an embodiment of the present disclosure, Fig. 2 shows the open state of the heat shield cover 40 in the test device 1 of Fig. 1 , and Fig. 3 is from above 1 is an exploded perspective view of the test device 1 viewed from below, and FIG. 4 is an exploded perspective view of the test device 1 of FIG. 1 viewed from below.

Referring to FIGS. 1 to 4 , the test device 1 includes a test socket 10 , a pusher body 20 , a pusher unit 30 , a heat shield cover 40 , a heater 50 and a temperature sensor 60 .

The test socket 10 includes a socket frame 11, a probe support 12 mounted to the socket frame 11 and supporting a plurality of elastically expandable probes, and a semiconductor or similar electronic product (hereinafter referred to as "object to be tested") insert 13. This test socket 10 is described only as an example of description, and its structure is not limited to the aforementioned structure.

The test socket 10 includes a hinge pin 14 hinged to a pusher body 20, and a lock 15 in which a pin 22 of the pusher body 20 (to be described later) is caught.

The target to be tested includes a plurality of bumps or contacts to be tested, and may utilize stacked semiconductors, such as package-on-package (POP) semiconductors. Objects to be tested are accommodated in the insert 13 so that terminals thereof can correspond to probes supported by the probe support 12 . The object to be tested as accommodated above moves toward the corresponding probe when pushed by the pusher unit 30 (to be described later), and is tested when its terminal comes into contact with the probe.

The pusher body 20 is pivotally coupled to one side of the test socket 10 to open and close the top of the test socket 10 , that is, the insert 13 . The pusher main body 20 includes a hinge coupling portion 21 provided at one side, a latch 22 provided at the other side, and a lever 23 for operating the pusher unit 30 at the time of testing.

The pusher main body 20 includes a pusher accommodating portion 25 to accommodate the pusher unit 30 in the middle thereof.

The pusher body 20 includes retaining pins 26 to retain and support the heat shield cover 40 on top thereof.

The pusher unit 30 is accommodated and supported in the pusher receiving portion 25 of the pusher body 20 to move toward and separate from the object to be tested loaded into the insert 13 of the test socket 10 .

The pusher unit 30 includes a pusher base 31 shaped like a plate, a pusher 32 provided on the bottom of the pusher base 31 , and a heat sink 33 provided on the top of the pusher base 31 .

The pusher 32 approaches and contacts the object to be tested to thereby press the object to be tested during the test. In this case, the terminals of the object to be tested can be brought into contact with the probes.

The heat sink 33 dissipates heat generated during the test and the heat generated by the heater 50 to the outside, thereby controlling the temperature of the test socket 10 .

The pusher unit 30 includes a heater accommodating portion 34 recessed horizontally inward from the lateral side of the pusher base 31 and accommodating the heater 50 therein.

The pusher unit 30 includes a vertically recessed sensor mounting portion 35 at the center thereof, to which the temperature sensor 60 is mounted.

The heat shield cover 40 is provided to shield the top of the heat sink 33 , in other words, the top of the pusher accommodating portion 25 . The heat shield cover 40 is operable in a closed position as shown in FIG. 1 or an open position as shown in FIG. 2 . In other words, the heat shield cover 40 can adjust the amount of heat dissipated from the test socket 10 according to the degree of opening/closing.

The heater 50 heats the pusher unit 30 to satisfy the test temperature condition.

The temperature sensor 60 senses the temperature in the test socket 10 .

5 is a perspective view showing the heat shield cover 40 of FIG. 1 separated, FIG. 6 is an exploded perspective view of the heat shield cover 40 of FIG. 5 viewed from above, and FIG. 7 is the heat shield cover of FIG. 5 viewed from below. 40 exploded perspective view.

Referring to FIGS. 5 to 7 , the heat shield cover 40 includes a stationary vane 41 , a first variable vane 42 , and a second variable vane 43 coupled to each other by a shaft 44 . The first variable blade 42 and the second variable blade 43 are coupled to the stationary blade 41 so as to be rotatable relative to the shaft 44 .

The stationary vanes 41 are fixed to the top of the pusher body 20 by retaining pins 26 . The stationary blade 41 includes a first shield portion 411 and a second shield portion 412 having a first sector shield and a second sector shield symmetrical with respect to the axis 44, and a diameter from the first sector shield and the second sector shield A first skirt portion 413 and a second skirt portion 414 are bent toward the outer ends and extend downward to form a circumferential shielding wall in contact with the top of the pusher body 20 .

The stationary blade 41 includes a first shaft hole 416 between the first sector shield and the second sector shield, through which the shaft 44 passes.

The stationary blade 41 includes a first guide protrusion 417 protruding from the top of the first fan-shaped shield of the first shield part 411 , and a second guide protrusion 418 protruding from the top of the second fan-shaped shield of the second shield part 412 . The first guiding protrusion 417 and the second guiding protrusion 418 are arranged symmetrically with respect to the axis 44 .

The stationary vane 41 includes a first stopper 419-1 provided at one radial end portion of the first sector shield and restricting the rotation of the first variable vane 42, and provided at the other radial end of the second sector shield. The second stopper 419 - 2 partially and restricts the rotation of the first variable blade 42 . The first stopper 419 - 1 and the second stopper 419 - 2 are arranged symmetrically with respect to the axis 44 .

The first variable vane 42 is rotatably coupled to the first shaft hole 416 of the stationary vane 41 via the shaft 44 . The first variable blade 42 includes a third shielding portion 421 and a fourth shielding portion 422 which are arranged symmetrically with respect to the axis 44 and respectively have a third sectoral shielding piece and a fourth sectoral shielding piece, and from the third sectoral shielding piece and the fourth sectoral shielding piece Radially outer ends of the four-sector shields are bent and extend downwards to respectively contact the circumferential end surfaces of the stationary blades 41 and form a third skirt portion 423 and a fourth skirt portion 424 of the circumferential shielding wall.

The first variable vane 42 includes a second shaft hole 426 between the third sector shield and the fourth sector shield, and the shaft 44 passes through the second shaft hole 426 .

The first variable vane 42 includes a third guide protrusion 428 protruding from the top of the third fan-shaped shield of the third shield part 421 , and a fourth guide protrusion protruding from the top of the fourth fan-shaped shield of the fourth shield part 422 429. The third guide protrusion 428 and the fourth guide protrusion 429 are disposed symmetrically with respect to the axis 44 .

The first variable vane 42 includes a first guide groove 425 recessed from the bottom of the third sector shield of the third shield part 421 along its outer circumferential end part, and a first guide groove 425 from the fourth shield part 422 along its outer circumferential end part. The second guiding groove 427 is depressed at the bottom of the fourth fan-shaped shielding member. The first guiding groove 425 and the second guiding groove 427 respectively receive the first guiding protrusion 417 and the second guiding protrusion 418 of the stationary blade 41 to be movable.

The second variable vane 43 is rotatably coupled to the second shaft hole 426 of the first variable vane 42 via the shaft 44 . The second variable vane 43 includes a fifth shielding portion 431 and a sixth shielding portion 432 having fifth and sixth sectoral shielding pieces symmetrically arranged with respect to the axis 44, and from the fifth sectoral shielding piece and the sixth sectoral shielding piece The radially outer ends of the fan-shaped shields are bent and extended downwards to respectively contact the circumferential end portions of the first variable blades 42 and form the fifth skirt portion 433 and the sixth skirt portion 434 of the circumferential shielding wall.

The second variable vane 43 includes a shaft protrusion 436 between the fifth sector shield and the sixth sector shield, and the shaft 44 is received and fastened into the shaft protrusion 436 . The shaft protrusion 436 is received in the second shaft hole 426 of the first variable vane 42 and the first shaft hole 416 of the stationary vane 41 . The stationary vane 41 , the first variable vane 42 and the second variable vane 43 are coupled to each other by the shaft protrusion 436 .

The second variable vane 43 includes a third guide groove 435 recessed from the bottom of the fifth fan-shaped shield of the fifth shielding part 431 along its outer circumferential end part, and a third guide groove 435 from the sixth shield part 432 along its outer circumferential end part. The fourth guide groove 437 is recessed in the bottom of the sixth fan-shaped shield. The third guide groove 435 and the fourth guide groove 437 respectively receive the third guide protrusion 428 and the fourth guide protrusion 429 of the first variable blade 42 to be movable.

As described above, in the test device according to the embodiment of the present disclosure, when the first variable vane 42 or the second variable vane 43 rotates relative to the stationary vane 41 covering the heat sink 33, the heat shield cover 40 adjusts The extent to which the heat sink 33 is exposed to the outside. Therefore, the heat dissipation efficiency of the heat sink 33 is adjusted according to the degree of exposure.

In the test device according to the present disclosure, the heat shield cover is provided to cover the heat sink of the pusher unit, and the opening/closing degree of the heat shield cover is controlled, thereby controlling the external temperature affecting the test device. Therefore, a plurality of test devices arranged in a single test chamber adjusts the degree of opening/closing of the heat shield cover according to their positions so that tests can be performed under the same temperature conditions.

In the foregoing description, advantages of the present disclosure have been described with reference to specific embodiments. However, it will be apparent to those of ordinary skill in the art that various modifications and changes can be made without departing from the scope of the present disclosure as defined in the appended claims. Therefore, the description and drawings should be understood as examples of the present disclosure rather than limitations of the present disclosure. All such modifications should be made within the scope of this disclosure.

1: Test device 10: Test socket 11:Socket frame 12: Probe support 13: Insert 14: hinge pin 15: lock 20: Pusher body 21: Hinge coupling part 22: Latch 23: Joystick 25:Accommodating part of the pusher 26: Hold Pin 30: Pusher unit 31: Pusher base 32: Pusher 33: Radiator 34: Heater housing part 35: Sensor installation part 40: heat shield cover 41: Stationary blade 42: The first variable blade 43: The second variable blade 44: axis 50: heater 60: Temperature sensor 411: The first shielding part 412: the second shielding part 413: the first skirt part 414: second skirt part 416: The first shaft hole 417: The first guiding protrusion 418: second guide protrusion 419-1: First Stopper 419-2: Second stopper 421: The third shielding part 422: The fourth shielding part 423: The third skirt part 424: The fourth skirt part 425: the first guide groove 426: Second shaft hole 427: the second guide groove 428: The third guiding protrusion 429: The fourth guiding protrusion 431: The fifth shielding part 432: The sixth shielding part 433: the fifth skirt part 434: The sixth skirt part 435: the third guide groove 436: Axon Protrusion 437: the fourth guide groove

The above and/or other aspects will become apparent and easier to understand from the following description of embodiments in conjunction with the accompanying drawings, wherein: FIG. 1 illustrates a closed state of a heat shield cover in a test device according to an embodiment of the present disclosure. FIG. 2 shows an open state of a heat shield cover in the test device of FIG. 1 . Fig. 3 is an exploded perspective view of the test device of Fig. 1 viewed from above. FIG. 4 is an exploded perspective view of the test device of FIG. 1 viewed from below. FIG. 5 is a perspective view showing detaching the heat shield cover of FIG. 1 . FIG. 6 is an exploded perspective view of the heat shield cover of FIG. 5 viewed from above. FIG. 7 is an exploded perspective view of the heat shield cover of FIG. 5 viewed from below.

1: Test device 10: Test socket 20: Pusher body 21: Hinge coupling part 22: Latch 23: Joystick 40: heat shield cover

Claims (8)

A test device for testing electrical characteristics of an object to be tested, the test device comprising: a test socket including probes configured to transmit a test signal to the object to be tested; a pusher body coupled to the object to be tested the test socket; a pusher unit supported on the pusher main body and pressing and releasing the object to be tested; and a heat shield cover for performing shielding of the pusher unit exposed on the top of the pusher main body and releasing the mask. The test device as claimed in claim 1, wherein the pusher unit includes a pusher base having a first side pressing a surface and a second side having a heat dissipation surface, and the heat dissipation surface being arranged on the pusher base and the heat shield cover performs shielding of the heat sink exposed to the top of the pusher body and release of the shield. The testing device of claim 1, wherein the heat shield cover includes a plurality of cover blades coupled to each other for relative rotation. The test apparatus as recited in claim 3, wherein one of said plurality of cover blades comprises a stationary vane fixed to said top of said pusher body, and the other of said plurality of cover blades comprises a A plurality of variable vanes coupled by a shaft to rotatably open and close relative to the stationary vanes. The test device as described in claim 4, wherein The plurality of variable vanes include a first variable vane disposed above the stationary vane, and a second variable vane disposed above the first variable vane, and the stationary vane includes a pair of first guide vanes protrusions, the pair of first guide protrusions are symmetrically provided at one side of the circumferential outer end portion on the top thereof with respect to the shaft, the first variable vane includes a pair of first guide grooves, the A pair of first guide grooves extends along circumferential outer end portions on the bottom thereof and accommodates the pair of first guide protrusions to be movable, respectively. The testing device as claimed in item 5, wherein the first variable vane includes a pair of second guide protrusions, and the pair of second guide protrusions are arranged symmetrically with respect to the axis on the outer circumferential end on the top thereof part, and the second variable vane includes a pair of second guide grooves, the pair of second guide grooves extend along the peripheral outer end portion on the bottom thereof and accommodate the pair of first guide grooves respectively. The two guide protrusions are movable. The test device as claimed in claim 4, wherein the plurality of cover blades include a pair of sector-shaped shielding portions symmetrically coupled with respect to the axis, and are bent downward from a circumferential outer end portion of the sector-shaped shielding portion a pair of skirt portions extending in contact with the top of the pusher body. The test device as claimed in claim 4, wherein said stationary vanes include a pair of stoppers protruding upward from radial end portions of said top portion thereof and arranged symmetrically with respect to said axis.

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