CN116670518A

CN116670518A - Test device

Info

Publication number: CN116670518A
Application number: CN202180088040.4A
Authority: CN
Inventors: 严熙一
Original assignee: Leeno Industiral Inc
Current assignee: Leeno Industiral Inc
Priority date: 2020-12-29
Filing date: 2021-12-27
Publication date: 2023-08-29
Also published as: JP2024500523A; WO2022145934A1; TW202229891A; KR20220094605A; KR102433590B1; TWI785920B

Abstract

A test apparatus for testing an electrical characteristic of an object to be tested is disclosed. The test device comprises: a test socket including a probe configured to transmit a test signal to a target to be tested; a pusher body coupled to the test socket; a pusher unit supported on the pusher body and pressing and releasing a target to be tested; and a heat shielding cover for performing shielding of the pusher unit exposed to the top of the pusher body and releasing of the shielding.

Description

Test device

Technical Field

The present disclosure relates to a test apparatus for testing electrical characteristics of a semiconductor or similar object to be tested.

Background

In the manufacture of semiconductors or similar electronic products, there is a need for a test apparatus for testing the electrical characteristics of the final manufactured electronic product. When testing electronic products, heat is generated in the testing device. In this case, the generated heat reduces the reliability of the test by increasing the resistance during the test, and causes product failure by shorting the internal circuits. Therefore, rapid heat dissipation is critical for testing power semiconductors, vehicle semiconductors, and system semiconductors.

The specific target to be tested requires testing of the electrical characteristics in extreme environments. For this purpose, the test device comprises a heating element or a cooling element to create an extreme environment. When the temperature is suddenly changed by the heating element or the cooling element, the test device may exceed the set test temperature. At the same time, hot or cold air may be introduced into a test chamber configured with a plurality of test devices so that the test devices can quickly reach a set temperature range. However, the effect of hot air or cold air varies depending on the position in the test chamber, and thus there is a problem in that a plurality of test devices in the test chamber reach a set temperature at different times without simultaneously satisfying a set temperature condition.

Disclosure of Invention

Technical problem

Embodiments of the present disclosure provide a reliable test apparatus.

Technical means

According to an embodiment of the present disclosure, a test apparatus for testing an electrical characteristic of an object to be tested is provided. The test device comprises: a test socket including a probe configured to transmit a test signal to a target to be tested; a pusher body coupled to the test socket; a pusher unit supported on the pusher body and pressing and releasing a target to be tested; and a heat shielding cover for performing shielding of the pusher unit exposed to the top of the pusher body and releasing of the shielding.

The pusher unit may include a pusher base having a first side with a pressing surface and a second side with a heat dissipation surface, and a heat sink disposed on the heat dissipation surface of the pusher base and dissipating heat, and the heat shielding cover performs shielding of the heat sink exposed to the top of the pusher body and releasing of the shielding.

The heat shield cover may include a plurality of cover blades coupled to each other for relative rotation.

One of the plurality of cover blades may include a stationary blade fixed to a top of the pusher body, and the other of the plurality of cover blades includes a plurality of variable blades coupled by a shaft to rotatably open and close with respect to the stationary blade.

The plurality of variable blades may include a first variable blade disposed above the stationary blade, and a second variable blade disposed above the first variable blade, the stationary blade may include a pair of first guide protrusions disposed at one side of a circumferential outer end portion on a top thereof with respect to an axis symmetry, and the first variable blade may include a pair of first guide grooves extending along the circumferential outer end portion on a bottom thereof and respectively receiving the pair of first guide protrusions to be movable.

The first variable vane may include a pair of second guide protrusions disposed at one side of a circumferential outer end portion on a top portion thereof symmetrically with respect to an axis, and the second variable vane may include a pair of second guide grooves extending along the circumferential outer end portion on a bottom portion thereof and respectively receiving the pair of second guide protrusions to be movable.

The plurality of cover blades may include a pair of sector-shaped shielding portions coupled symmetrically with respect to the axis, and a pair of skirt portions bent from circumferential outer end portions of the sector-shaped shielding portions and extending downward and contacting the top of the pusher body.

The stationary blade may include a pair of stoppers protruding upward from a radial end portion of a top portion thereof and disposed symmetrically with respect to the axis.

Efficacy of the invention

In the test device of the present invention, the heat shielding cover covering the heat sink of the pusher unit may adjust the opening and closing amounts of the heat shielding cover according to the positional difference of the plurality of test devices disposed in the single test chamber. Thus, by correcting different temperatures according to the positional difference, the test can be performed under the same temperature condition.

Drawings

The foregoing and/or other embodiments will be apparent and more readily appreciated from the following description of the embodiments taken in conjunction with the accompanying drawings, in which:

FIG. 1 illustrates a closed state of a heat shield cover in a test device according to an embodiment of the present disclosure.

Fig. 2 shows an opened state of the heat shielding cover in the test apparatus of fig. 1.

Fig. 3 is an exploded perspective view of the testing device of fig. 1, as viewed from above.

Fig. 4 is an exploded perspective view of the testing device of fig. 1, as viewed from below.

Fig. 5 is a perspective view showing separation of the heat shield cover of fig. 1.

Fig. 6 is an exploded perspective view of the heat shield cover of fig. 5 viewed from above.

Fig. 7 is an exploded perspective view of the heat shield cover of fig. 5 viewed from below.

Detailed Description

Hereinafter, embodiments of the present disclosure will be described in detail with reference to the accompanying drawings. For purposes of explanation, the present disclosure will be understood by excluding portions from the drawings or detailed description that are not directly related to the present disclosure, only the related portions are described, and like reference numerals refer to like elements throughout.

A detailed description that is obvious to one skilled in the art may not be disclosed. In the present disclosure, terms such as first, second, etc. are used to distinguish one element from another element and the actual relationship or order therebetween, but do not necessarily imply a physical relationship or order therebetween.

Fig. 1 shows a closed state of a heat shield cover 40 in a test device 1 according to an embodiment of the present disclosure, fig. 2 shows an open state of the heat shield cover 40 in the test device 1 of fig. 1, fig. 3 is an exploded perspective view of the test device 1 of fig. 1 viewed from above, and fig. 4 is an exploded perspective view of the test device 1 of fig. 1 viewed from below.

Referring to fig. 1 to 4, the test apparatus 1 includes a test socket 10, a pusher body 20, a pusher unit 30, a heat shield cover 40, a heater 50, and a temperature sensor 60.

The test socket 10 includes a socket frame 11, a probe support 12 mounted to the socket frame 11 and supporting a plurality of elastically stretchable probes, and an insert 13 disposed on the probe support 12 and accommodating a semiconductor or similar electronic product (hereinafter referred to as a "target to be tested"). This test socket 10 is described only as an example of description, and its structure is not limited to the foregoing structure.

The test socket 10 includes a hinge pin 14 hinged with a pusher body 20, and a lock 15 in which a plug 22 of the pusher body 20 (to be described later) is caught.

The object to be tested includes a plurality of bumps or contacts to be tested, and may utilize a stacked semiconductor, such as a package-on-package (POP) semiconductor. The object to be tested is accommodated in the insert 13 so that its terminals may correspond to probes supported by the probe support 12. The object to be tested as accommodated above moves toward the corresponding probe while being pushed by the pusher unit 30 (to be described later), and is tested while its terminal is in contact with the probe.

The pusher body 20 is pivotally coupled to one side of the test socket 10 so as to open and close the top of the test socket 10, i.e., the insert 13. The pusher body 20 includes a hinge coupling portion 21 provided at one side, a latch 22 provided at the other side, and a control lever 23 for operating the pusher unit 30 at the time of testing.

The pusher body 20 includes a pusher accommodation portion 25 to accommodate the pusher unit 30 therein.

The pusher body 20 includes a retaining pin 26 to retain and support the heat shield cover 40 on top thereof.

The pusher unit 30 is accommodated and supported in the pusher accommodation portion 25 of the pusher body 20 to move toward and separate from a target to be tested in the insert 13 loaded to the test socket 10.

The pusher unit 30 includes a pusher base 31 shaped like a plate, a pusher 32 disposed on the bottom of the pusher base 31, and a heat sink 33 disposed on the top of the pusher base 31.

The pusher 32 approaches and contacts the target to be tested to thereby press the target to be tested during testing. In this case, the terminals of the object to be tested may be in contact with the probes.

The heat sink 33 radiates heat generated during the test and heat generated by the heater 50 to the outside, thereby controlling the temperature of the test socket 10.

The pusher unit 30 includes a heater accommodating portion 34 which is recessed horizontally inward from a lateral side of the pusher base 31 and accommodates the heater 50 therein.

The pusher unit 30 includes a sensor mounting portion 35 vertically recessed at its center, and a temperature sensor 60 is mounted to the sensor mounting portion 35.

The heat shielding cover 40 is provided to shield the top of the heat sink 33, in other words, the top of the pusher accommodation portion 25. The heat shield cover 40 may operate in a closed position as depicted in fig. 1 or an open position as depicted in fig. 2. In other words, the heat shielding cover 40 may adjust the amount of heat emitted from the test socket 10 according to the degree of opening/closing.

The heater 50 heats the pusher unit 30 to satisfy the test temperature condition.

The temperature sensor 60 senses the temperature in the test socket 10.

Fig. 5 is a perspective view showing separation of the heat shield cover 40 of fig. 1, fig. 6 is an exploded perspective view of the heat shield cover 40 of fig. 5 viewed from above, and fig. 7 is an exploded perspective view of the heat shield cover 40 of fig. 5 viewed from below.

Referring to fig. 5 to 7, the heat shield cover 40 includes a stationary blade 41, a first variable blade 42, and a second variable blade 43 coupled to each other by a shaft 44. The first and second variable blades 42 and 43 are coupled to the stationary blade 41 so as to be rotatable with respect to the shaft 44.

The stationary blade 41 is fixed to the top of the pusher body 20 by the retaining pin 26. The stationary blade 41 includes first and second shield portions 411 and 412 having first and second sector shields symmetrical with respect to the axis 44, and first and second skirt portions 413 and 414 bent from radially outer ends of the first and second sector shields and extending downward to form a circumferential shield wall in contact with the top of the pusher body 20.

The stationary blade 41 includes a first shaft hole 416 between the first and second fan shields, the shaft 44 passing through the first shaft hole 416.

The stationary blade 41 includes a first guide protrusion 417 protruding from the top of the first sector shield of the first shield portion 411 and a second guide protrusion 418 protruding from the top of the second sector shield of the second shield portion 412. The first guide protrusion 417 and the second guide protrusion 418 are symmetrically disposed with respect to the shaft 44.

The stationary blade 41 includes a first stopper 419-1 provided at one radial end portion of the first fan-shaped shield and restricting rotation of the first variable blade 42, and a second stopper 419-2 provided at the other radial end portion of the second fan-shaped shield and restricting rotation of the first variable blade 42. First stopper 419-1 and second stopper 419-2 are symmetrically disposed with respect to shaft 44.

The first variable vane 42 is rotatably coupled to a first shaft hole 416 of the stationary vane 41 by a shaft 44. The first variable vane 42 includes a third shield portion 421 and a fourth shield portion 422 symmetrically disposed with respect to the axis 44 and having a third sector shield and a fourth sector shield, respectively, and a third skirt portion 423 and a fourth skirt portion 424 bent from radially outer ends of the third sector shield and the fourth sector shield and extending downward to contact circumferential end surfaces of the stationary vane 41, respectively, and forming circumferential shield walls.

The first variable vane 42 includes a second shaft aperture 426 between the third and fourth fan shields, the shaft 44 passing through the second shaft aperture 426.

The first variable vane 42 includes a third guide protrusion 428 protruding from the top of the third sector shield of the third shield portion 421 and a fourth guide protrusion 429 protruding from the top of the fourth sector shield of the fourth shield portion 422. The third guide projection 428 and the fourth guide projection 429 are symmetrically disposed with respect to the shaft 44.

The first variable vane 42 includes a first guide groove 425 recessed from the bottom of the third sector shield of the third shield portion 421 along its circumferential outer end portion, and a second guide groove 427 recessed from the bottom of the fourth sector shield of the fourth shield portion 422 along its circumferential outer end portion. The first and second guide grooves 425 and 427 accommodate the first and second guide protrusions 417 and 418 of the stationary blade 41 to be movable, respectively.

The second variable vane 43 is rotatably coupled to the second shaft hole 426 of the first variable vane 42 by a shaft 44. The second variable blade 43 includes fifth and sixth shield portions 431 and 432 having fifth and sixth fan shields symmetrically disposed about the axis 44, and fifth and sixth skirt portions 433 and 434 bent from radially outer ends of the fifth and sixth fan shields and extending downward to be in contact with circumferential end portions of the first variable blade 42 and form circumferential shield walls, respectively.

The second variable vane 43 includes a shaft protrusion 436 between the fifth and sixth fan shields, and a shaft 44 is received and fastened into the shaft protrusion 436. The shaft projection 436 is accommodated in the second shaft hole 426 of the first variable blade 42 and the first shaft hole 416 of the stationary blade 41. The stationary blade 41, the first variable blade 42, and the second variable blade 43 are coupled to each other by the shaft protrusion 436.

The second variable vane 43 includes a third guide groove 435 recessed from the bottom of the fifth sector shield of the fifth shield portion 431 along its circumferential outer end portion, and a fourth guide groove 437 recessed from the bottom of the sixth sector shield of the sixth shield portion 432 along its circumferential outer end portion. The third guide groove 435 and the fourth guide groove 437 receive the third guide protrusion 428 and the fourth guide protrusion 429 of the first variable blade 42 to be movable, respectively.

As described above, in the test device according to the embodiment of the present disclosure, the heat shield cover 40 adjusts the degree to which the heat sink 33 is exposed to the outside when the first variable blade 42 or the second variable blade 43 rotates with respect to the stationary blade 41 covering the heat sink 33. Accordingly, the heat radiation efficiency of the heat radiator 33 is adjusted according to the exposure degree.

In the test device according to the present disclosure, the heat shielding cover is provided to cover the heat sink of the pusher unit, and the opening/closing degree of the heat shielding cover is controlled, thereby controlling the external temperature affecting the test device. Accordingly, a plurality of test devices disposed in a single test chamber adjust the opening/closing degree of the heat shielding cover according to the positions thereof so that the test can be performed under the same temperature condition.

In the foregoing specification, advantages of the present disclosure have been described with reference to specific embodiments. However, it will be apparent to those skilled in the art that various modifications and changes may be made without departing from the scope of the disclosure as defined in the appended claims. Accordingly, the description and drawings are to be regarded as examples of the present disclosure rather than as limitations of the present disclosure. All such modifications are intended to be within the scope of this disclosure.

Claims

1. A test apparatus for testing an electrical characteristic of an object to be tested, the test apparatus comprising:

a test socket including a probe configured to transmit a test signal to the target to be tested;

a pusher body coupled to the test socket;

a pusher unit supported on the pusher body and pressing and releasing the target to be tested; and

a heat shielding cover to perform shielding of the pusher unit exposed to the top of the pusher body and release of the shielding.

2. The test device of claim 1, wherein

The pusher unit includes a pusher base having a first side with a pressing surface and a second side with a heat dissipation surface, and a heat sink disposed on the heat dissipation surface of the pusher base and dissipating heat, an

The heat shielding cover performs shielding of the heat sink exposed to the top of the pusher body and releasing of the shielding.

3. The test apparatus of claim 1, wherein the heat shield cover comprises a plurality of cover blades coupled to one another for relative rotation.

4. A test apparatus according to claim 3, wherein

One of the plurality of cover blades includes a stationary blade fixed to the top of the pusher body, and

other ones of the plurality of cover blades include a plurality of variable blades coupled by a shaft to rotatably open and close relative to the stationary blade.

5. The test device of claim 4, wherein

The plurality of variable vanes includes a first variable vane disposed above the stationary vane, and a second variable vane disposed above the first variable vane,

the stationary blade includes a pair of first guide protrusions disposed at one side of a circumferential outer end portion on a top portion thereof symmetrically with respect to the axis,

the first variable vane includes a pair of first guide grooves extending along circumferential outer end portions on a bottom thereof and respectively accommodating the pair of first guide protrusions to be movable.

6. The test device of claim 5, wherein

The first variable vane includes a pair of second guide protrusions symmetrically disposed at one side of a circumferential outer end portion on a top thereof with respect to the axis, and

the second variable vane includes a pair of second guide grooves extending along circumferential outer end portions on a bottom thereof and respectively accommodating the pair of second guide protrusions to be movable.

7. The test device of claim 3, wherein the plurality of cover blades includes a pair of sector-shaped shielding portions coupled symmetrically with respect to the axis, and a pair of skirt portions bent from circumferential outer end portions of the sector-shaped shielding portions and extending downward and in contact with the top of the pusher body.

8. The test device of claim 4, wherein the stationary blade includes a pair of stops projecting upward from a radial end portion of the top thereof and symmetrically disposed with respect to the axis.