TWI774875B - adsorption method - Google Patents

Abstract

The suction method is a suction method for suctioning a substrate and a Fabry-Perot interference filter provided on the substrate and including a main surface facing the opposite side of the substrate and a Fabry-Perot interference filter using a suction chuck, and comprising: a first 1 step of arranging the suction chuck so as to face the main surface; a second step of bringing the suction chuck into contact with the Fabry-Perot interference filter after the first step; and In the third step, after the second step, the Fabry-Perot interference filter is adsorbed by the adsorption chuck.

Description

adsorption method

One aspect of the present invention pertains to adsorption methods.

As a conventional Fabry-Perot interference filter, there is known a substrate, a fixed mirror surface and a movable mirror surface facing each other with a gap on the substrate, and an intermediate layer defining the gap (for example, refer to Patent Documents) 1). [Prior Art Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Publication No. 2013-506154

[Problems to be Solved by Invention]

When the wafers of the Fabry-Perot interference filter as described above are individually transferred, it is considered to transfer the wafers while individually sucking the wafers using, for example, a suction chuck. In this case, it is desirable to suppress changes in the posture and position of the Fabry-Perot interference filter at the time of desorption, so that the Fabry-Perot interference filter can be stably detached from the suction chuck.

An object of one aspect of the present invention is to provide an adsorption method that can stably release a Fabry-Perot interference filter. [Technical means to solve problems]

A suction method of one aspect of the present invention is a suction method for suctioning a Fabry-Perot interference filter including a substrate and a laminated structure portion provided on the substrate and including a main surface facing the opposite side of the substrate using a suction chuck. , and is provided with: a first step of disposing the suction chuck in a manner facing the main surface; a second step of making the suction chuck contact the Fabry-Perot interference filter after the first step; and In the third step, after the second step, the Fabry-Perot interference filter is adsorbed by the adsorption chuck; the adsorption chuck is provided with: a main body part having a surface; and a contact part protruding from the surface It is arranged on the surface and includes a pair of first contact surfaces formed with an opening for inhalation; the laminated structure part is provided with: a diaphragm structure part, which includes a gap and faces each other and the distance from each other is variable The first mirror surface part, the second mirror surface part, and a part of the main surface; and a pair of first electrode terminals, which are arranged to face each other with the diaphragm structure part interposed therebetween, when viewed from a direction intersecting the main surface; In the first step, the suction chuck is arranged so that the surface and the main surface face each other and each of the first contact surfaces faces each of the first electrode terminals; in the second step, each of the first contact surfaces is are in contact with each of the first electrode terminals; in the third step, each of the first electrode terminals is adsorbed to the first contact surface by suction through the opening of the first contact surface.

The Fabry-Perot interference filter, which is an adsorption object of the adsorption method, includes a substrate and a laminated structure portion provided on the substrate. The laminated structure portion is provided with: a diaphragm structure portion having a first mirror portion and a second mirror portion that face each other with a gap interposed therebetween and have variable distances from each other; and a pair of first electrode terminals separated from each other. The diaphragm structures are arranged so as to face each other. On the other hand, in the suction chuck used for the suction method, the contact portion protruding from the surface of the main body portion includes a first contact surface on which an opening for suction is formed. And, in the first step, the suction chuck is arranged so that the surface of the suction chuck faces the principal surface of the Fabry-Perot interference filter. At this time, each of the first contact surfaces faces each of the first electrode terminals. Next, in the second step, the suction chuck is brought into contact with the Fabry-Perot interference filter. At this time, each of the first contact surfaces is brought into contact with each of the first electrode terminals. Then, in the third step, the Fabry-Perot interference filter is adsorbed by the adsorption chuck. At this time, each of the first electrode terminals is adsorbed to the first contact surface by suction through the opening of the first contact surface. Thereby, when the Fabry-Perot interference filter is adsorbed, the limited range of the first electrode terminal can be adsorbed. Therefore, proper adsorption can be obtained, and as a result, the Fabry-Perot interference filter can be stably released when the adsorption is released.

In the adsorption method of one aspect of the present invention, the first electrode terminal may include a top surface protruding from the main surface, and in the second step, the first contact surface may be brought into contact with the top surface. In this case, in the second step, the first contact surface of the contact portion is brought into contact with the first electrode terminal protruding from the diaphragm structure portion. Therefore, the suction chuck does not come into contact with the diaphragm structure, or even if it contacts, the load on the diaphragm structure is reduced. Therefore, when the Fabry-Perot interference filter is adsorbed, the diaphragm structure can be prevented from being damaged, and the occurrence of defective products of the Fabry-Perot interference filter can be suppressed.

In the adsorption method of one aspect of the present invention, in a state where the first contact surface is in contact with the first electrode terminal, the edge on the side of the diaphragm structure portion of the first contact surface may be formed so as to be in contact with the diaphragm structure portion. For the shape corresponding to the outer edge, in the first step, when the first contact surface is in contact with the first electrode terminal, the suction is arranged in such a way that the edge is located outside the diaphragm structure part and along the outer edge of the diaphragm structure part. collet. In this case, when the Fabry-Perot interference filter is adsorbed, it is possible to avoid contact with the diaphragm structure portion.

In the adsorption method of one aspect of the present invention, the diaphragm structure portion may be in a circular shape when viewed from a direction intersecting with the main surface, and the edge may be formed in an arc shape in a manner similar to the outer edge of the diaphragm structure portion. In this case, when the Fabry-Perot interference filter is adsorbed, contact with the diaphragm structure can be reliably avoided.

In the adsorption method of one aspect of the present invention, in the first step, in a state in which the first contact surface is in contact with the first electrode terminal, the adsorption may be arranged such that the opening and the first electrode terminal are partially offset. collet. In this case, the adsorption force can be prevented from becoming too large, and the Fabry-Perot interference filter can be detached more stably.

In the adsorption method of one aspect of the present invention, the adsorption chuck may be provided on the axis that intersects the direction from one first contact surface toward the other first contact surface, and is provided on the surface so as to protrude from the surface. Guide parts; the first electrode terminals are respectively provided at the corners of the laminated structure part when viewed from the direction intersecting the main surface; in the first step, in the state where the first contact surface is in contact with the first electrode terminals, the guide parts are A suction chuck is arranged on the outer side of the other corner of the laminated structure part and the corner where the first electrode terminal is provided, along the other corner. In this case, the change of the posture of the Fabry-Perot interference filter can be restrained by the guide portion, and can be held and released stably.

In the adsorption method of one aspect of the present invention, the guide portion may be bent and extended along the outer edge of the other corner portion in a state in which the first contact surface is in contact with the first electrode terminal. In this case, the Fabry-Perot interference filter can be restricted from rotating in-plane along the main surface by the guide portion, so that it can be held and released more stably.

In the adsorption method according to one aspect of the present invention, the Fabry-Perot interference filter may include a pair of first and second fiducials that are arranged so as to face each other across the diaphragm structure when viewed from a direction intersecting with the main surface. 2-electrode terminal, the second electrode terminal is arranged on an axis that intersects the direction opposite to the first electrode terminal, and the contact portion includes a second contact surface arranged in a manner corresponding to the second electrode terminal and formed with an opening for air intake ; In the first step, the suction chucks are arranged in such a way that each of the second contact surfaces and each of the second electrode terminals face each other, and in the second step, each of the second contact surfaces is brought into contact with the second For each of the electrode terminals, in the third step, each of the second electrode terminals is sucked to the second contact surface by suction through the opening of the second contact surface. In this case, the Fabry-Perot interference filter can be sucked and held more stably by suction through the openings arranged at at least three positions different from each other. [Effect of invention]

According to an aspect of the present invention, an adsorption method capable of stably releasing a Fabry-Perot interference filter can be provided.

Hereinafter, one embodiment will be described in detail with reference to the drawings. In addition, in each figure, the same code|symbol is attached|subjected to the mutually identical element or the equivalent element, and the overlapping description may be abbreviate|omitted.

The adsorption method of this embodiment uses the adsorption chuck to perform adsorption of the Fabry-Perot interference filter. Therefore, first, one embodiment of the Fabry-Perot interference filter to be adsorbed will be described. [Composition of Fabry-Perot Interference Filter]

FIG. 1 is a plan view of the Fabry-Perot interference filter of the present embodiment. FIG. 2 is a bottom view of the Fabry-Perot interference filter shown in FIG. 1 . FIG. 3 is a cross-sectional view of the Fabry-Perot interference filter taken along line III-III of FIG. 1 .

As shown in FIGS. 1 to 3 , the Fabry-Perot interference filter 1 includes a substrate 11 . The substrate 11 has a first surface 11a and a second surface 11b facing the first surface 11a. On the 1st surface 11a, the antireflection layer 21, the 1st laminated body 22, the intermediate layer 23, and the 2nd laminated body 24 are laminated|stacked in this order. A space (air gap) S is defined by a frame-shaped intermediate layer 23 between the first layered body 22 and the second layered body 24 . A part of the second layered body 24 located on the first layered body 22 when viewed from the direction intersecting (orthogonal) to the first layered body 22 , the intermediate layer 23 and the first surface 11 a constitutes the layered structure portion 20 . The build-up structure portion 20 is provided on the first surface 11 a of the substrate 11 and includes a main surface 20 s facing the opposite side of the substrate 11 . The main surface 20s is a part of the surface 24a of the second laminate 24 .

The shape and positional relationship of each part in the state (plan view) seen from the direction perpendicular|vertical to the 1st surface 11a are as follows. The outer edge of the substrate 11 has a rectangular shape, for example. The outer edge of the substrate 11 and the outer edge of the second layered body 24 coincide with each other. The outer edge of the antireflection layer 21 , the outer edge of the first laminate 22 , and the outer edge of the intermediate layer 23 correspond to each other. Therefore, the laminated structure part 20 also has a rectangular shape in plan view (when viewed from the direction intersecting (orthogonal) with the main surface 20s). The substrate 11 has an outer edge portion 11c located outside the center of the gap S relative to the outer edge of the intermediate layer 23 . The outer edge portion 11c is, for example, a frame shape, and surrounds the intermediate layer 23 when viewed from a direction perpendicular to the first surface 11a.

The Fabry-Perot interference filter 1 transmits light having a specific wavelength in the light transmission region 1a defined in its central portion. The light-transmitting region 1a is, for example, a cylindrical region. The substrate 11 is made of, for example, silicon, quartz, glass, or the like. When the substrate 11 is made of silicon, the antireflection layer 21 and the intermediate layer 23 are made of, for example, silicon oxide. The thickness of the intermediate layer 23 is, for example, several tens of nm or more and several tens of μm or less.

A portion of the first laminate 22 corresponding to the light transmission region 1 a functions as the first mirror surface portion 31 . The first mirror surface portion 31 is arranged on the first surface 11 a via the antireflection layer 21 . The first laminate 22 is formed by alternately laminating a plurality of polysilicon layers 25 and a plurality of silicon nitride layers 26 layer by layer. In this embodiment, the polysilicon layer 25a, the silicon nitride layer 26a, the polysilicon layer 25b, the silicon nitride layer 26b, and the polysilicon layer 25c are laminated on the anti-reflection layer 21 in this order. The optical thickness of each of the polysilicon layer 25 and the silicon nitride layer 26 constituting the first mirror portion 31 may be an integral multiple of 1/4 of the central transmission wavelength. Moreover, the 1st mirror surface part 31 may be arrange|positioned directly on the 1st surface 11a without interposing the antireflection layer 21.

A portion of the second laminate 24 corresponding to the light transmission region 1 a functions as the second mirror surface portion 32 . The second mirror surface portion 32 faces the first mirror surface portion 31 with a gap S on the opposite side to the substrate 11 with respect to the first mirror surface portion 31 . The second laminate 24 is arranged on the first surface 11 a via the antireflection layer 21 , the first laminate 22 , and the intermediate layer 23 . The second laminate 24 is formed by alternately laminating a plurality of polysilicon layers 27 and a plurality of silicon nitride layers 28 layer by layer. In this embodiment, the polysilicon layer 27a, the silicon nitride layer 28a, the polysilicon layer 27b, the silicon nitride layer 28b, and the polysilicon layer 27c are stacked on the intermediate layer 23 in sequence. The optical thickness of each of the polysilicon layer 27 and the silicon nitride layer 28 constituting the second mirror portion 32 may be an integral multiple of 1/4 of the central transmission wavelength.

In addition, in the first laminated body 22 and the second laminated body 24, a silicon oxide layer may be used instead of the silicon nitride layer. In addition, as the material of each layer constituting the first layered body 22 and the second layered body 24, titanium oxide, tantalum oxide, zirconium oxide, magnesium fluoride, aluminum oxide, calcium fluoride, silicon, germanium, zinc sulfide, etc. can also be used . Here, the surface of the first mirror surface portion 31 on the side of the gap S (the surface of the polysilicon layer 25 c ) and the surface of the second mirror surface portion 32 on the side of the gap S (the surface of the polysilicon layer 27 a ) are directly opposed to each other with the gap S interposed therebetween. . However, on the surface of the first mirror surface portion 31 on the side of the gap S and the surface of the second mirror surface portion 32 on the side of the gap S, an electrode layer or a protective layer may be formed (not constituting a mirror surface). In this case, the first mirror surface portion 31 and the second mirror surface portion 32 face each other with the gap S interposed therebetween in a state where the layers are interposed therebetween. In other words, even in this situation, the first mirror surface portion 31 and the second mirror surface portion 32 can be opposed to each other via the gap S.

In the portion of the second layered body 24 corresponding to the gap S, a plurality of pieces are formed from the surface 24a (the main surface 20s of the layered structure portion 20 ) of the second layered body 24 on the opposite side to the intermediate layer 23 to the gap S. through hole 24b. The plurality of through holes 24b are formed to such an extent that the function of the second mirror surface portion 32 is not substantially affected. The plurality of through holes 24b are used to remove a part of the intermediate layer 23 by etching to form the space S.

The second layered body 24 has a covering portion 33 and a peripheral edge portion 34 in addition to the second mirror surface portion 32 . The second mirror surface portion 32 , the covering portion 33 , and the peripheral edge portion 34 have a part of the same laminated structure, and are integrally formed so as to be continuous with each other. The covering portion 33 surrounds the second mirror portion 32 when viewed from the direction perpendicular to the first surface 11a. The covering portion 33 covers the surface 23a of the intermediate layer 23 on the opposite side to the substrate 11, the side surface 23b of the intermediate layer 23 (the side surface on the outside, that is, the side surface on the opposite side to the side of the gap S), the side surface 22a of the first laminate 22, and the surface 23b of the intermediate layer 23. The side surface 21a of the antireflection layer 21 reaches the first surface 11a. That is, the covering portion 33 covers the outer edge of the intermediate layer 23 , the outer edge of the first layered body 22 , and the outer edge of the antireflection layer 21 .

The peripheral edge portion 34 surrounds the covering portion 33 when viewed from the direction perpendicular to the first surface 11a. The peripheral edge portion 34 is located on the first surface 11a of the outer edge portion 11c. The outer edge of the peripheral portion 34 coincides with the outer edge of the substrate 11 when viewed from the direction perpendicular to the first surface 11a.

The peripheral edge portion 34 is thinned along the outer edge of the outer edge portion 11c. That is, the portion of the peripheral portion 34 along the outer edge of the outer edge portion 11c is thinner than the portion other than the portion of the peripheral portion 34 along the outer edge. In this embodiment, the peripheral portion 34 is thinned by removing part of the polysilicon layer 27 and the silicon nitride layer 28 constituting the second laminate 24 . The peripheral edge portion 34 has a non-thinning portion 34a continuous with the covering portion 33, and a thinning portion 34b surrounding the non-thinning portion 34a. In the thinned portion 34b, the polysilicon layer 27 and the silicon nitride layer 28 other than the polysilicon layer 27a disposed directly on the first surface 11a have been removed.

In this way, the Fabry-Perot interference filter 1 is provided with the thinned portion 34b in addition to the laminated structure portion 20, which is located outside the laminated structure portion 20 when viewed from the direction intersecting (orthogonal) to the main surface 20s, and is relatively smaller than the laminated structure portion 20. The main surface 20s is further recessed toward the substrate 11 side. The thinned portion 34b is formed in an annular shape (here, a rectangular annular shape) so as to surround the laminated structure portion 20 when viewed from a direction intersecting (orthogonal) to the main surface 20s. The thinned portion 34b is used when, for example, a wafer on which a plurality of regions corresponding to the Fabry-Perot interference filter 1 are formed is to be cut into individual Fabry-Perot interference filters 1 . The thinned portion 34b is formed by, for example, etching the layered structure of the second layered body 24 .

The height of the surface 34c of the non-thinned portion 34a on the opposite side to the substrate 11 from the first surface 11a is lower than the height of the surface 23a of the intermediate layer 23 from the first surface 11a. The height of the surface 34c of the non-thinning portion 34a from the first surface 11a is, for example, 100 nm to 5000 nm. The height of the surface 23a of the intermediate layer 23 from the first surface 11a is, for example, in the range of 500 nm to 20000 nm, which is greater than the height of the surface 34c of the non-thinned portion 34a from the first surface 11a. The width of the thinned portion 34b (the distance between the outer edge of the non-thinned portion 34a and the outer edge of the outer edge portion 11c ) is 0.01 times or more the thickness of the substrate 11 . The width of the thinned portion 34b is, for example, 5 μm to 400 μm. The thickness of the substrate 11 is, for example, 500 μm to 800 μm.

The first electrode 12 is formed on the first mirror surface portion 31 so as to surround the light transmission region 1a. The first electrode 12 is formed by doping the polysilicon layer 25c with impurities to lower the resistance. The second electrode 13 is formed on the first mirror surface portion 31 so as to include the light transmission region 1a. The second electrode 13 is formed by lowering the resistance by doping the polysilicon layer 25c with impurities. The size of the second electrode 13 may be the size including the entire light-transmitting region 1a, but may be substantially the same as the size of the light-transmitting region 1a.

The third electrode 14 is formed on the second mirror surface portion 32 . The third electrode 14 faces the first electrode 12 and the second electrode 13 with the gap S interposed therebetween. The third electrode 14 is formed by lowering the resistance by doping the polysilicon layer 27a with impurities.

A pair of terminals (first electrode terminals) 15 are provided so as to face each other across the light transmission region 1a. Each terminal 15 is arranged in a through hole extending from the surface 24a of the second laminate 24 (the main surface 20s of the laminate structure 20 ) to the first laminate 22 . Each terminal 15 is electrically connected to the first electrode 12 via the wiring 12a. The terminal 15 is formed of, for example, a metal film such as aluminum or its alloy.

A pair of terminals (second electrode terminals) 16 are provided so as to face each other with the light transmission region 1a interposed therebetween. Each terminal 16 is arranged in a through hole extending from the surface 24a of the second laminate 24 (the main surface 20s of the laminate structure 20 ) to the first laminate 22 . Each terminal 16 is electrically connected to the second electrode 13 via the wiring 13a, and is electrically connected to the third electrode 14 via the wiring 14a. The terminal 16 is formed of, for example, a metal film such as aluminum or its alloy. The direction in which the pair of terminals 15 face each other is orthogonal to the direction in which the pair of terminals 16 face each other (see FIG. 1 ).

On the surface 22b of the first layered body 22, grooves 17 and 18 are provided. The groove 17 extends annularly so as to surround the connection portion with the terminal 16 in the wiring 13a. The trench 17 is electrically insulated from the first electrode 12 and the wiring 13a. The groove 18 extends annularly along the inner edge of the first electrode 12 . The trench 18 is electrically insulated from the first electrode 12 and the region (the second electrode 13 ) inside the first electrode 12 . The regions within each of the trenches 17 and 18 may be insulating materials or voids.

The groove|channel 19 is provided in the surface 24a of the 2nd laminated body 24 (the main surface 20s of the laminated structure part 20). The groove 19 extends annularly so as to surround the terminal 15 . The trench 19 is electrically insulated from the terminal 15 and the third electrode 14 . The area within the trench 19 may be an insulating material or a void.

On the second surface 11 b of the substrate 11 , the antireflection layer 41 , the third laminate 42 , the intermediate layer 43 , and the fourth laminate 44 are laminated in this order. The antireflection layer 41 and the intermediate layer 43 each have the same configuration as the antireflection layer 21 and the intermediate layer 23 . The third layered body 42 and the fourth layered body 44 each have a layered structure symmetrical to the first layered body 22 and the second layered body 24 with respect to the substrate 11 . The antireflection layer 41 , the third laminate 42 , the intermediate layer 43 , and the fourth laminate 44 have a function of suppressing warpage of the substrate 11 .

The third layered body 42, the intermediate layer 43, and the fourth layered body 44 are thinned along the outer edge of the outer edge portion 11c. That is, the portion of the third layered body 42 , the intermediate layer 43 , and the fourth layered body 44 along the outer edge of the outer edge portion 11 c is different from that of the third layered body 42 , the intermediate layer 43 , and the fourth layered body 44 . Thinner compared to other parts other than the part along the outer edge. In the present embodiment, the third layered body 42, the intermediate layer 43, and the fourth layered body 44, when viewed from the direction perpendicular to the first surface 11a, overlap with the thinned portion 34b by removing the first layer. All of the 3 layered body 42, the intermediate layer 43, and the fourth layered body 44 are thinned.

The opening 40a is provided in the 3rd laminated body 42, the intermediate layer 43, and the 4th laminated body 44 so that the light transmission area|region 1a may be included. The opening 40a has a diameter substantially the same as the size of the light transmitting region 1a. The opening 40 a is opened on the light exit side, and the bottom surface of the opening 40 a reaches the anti-reflection layer 41 .

A light shielding layer 45 is formed on the surface of the fourth layered body 44 on the light exit side. The light shielding layer 45 is made of, for example, aluminum or the like. A protective layer 46 is formed on the surface of the light shielding layer 45 and the inner surface of the opening 40a. The protective layer 46 covers the outer edges of the third laminate 42 , the intermediate layer 43 , the fourth laminate 44 , and the light shielding layer 45 , and covers the antireflection layer 41 on the outer edge portion 11 c . The protective layer 46 is made of, for example, aluminum oxide. In addition, by setting the thickness of the protective layer 46 to be 1 nm to 100 nm (for example, about 30 nm), the optical influence of the protective layer 46 can be ignored.

In the Fabry-Perot interference filter 1 configured as above, when a voltage is applied between the first electrode 12 and the third electrode 14 via the terminals 15 and 16, the first electrode 12 and the third electrode 14 are applied. An electrostatic force corresponding to the voltage is generated between them. The second mirror surface portion 32 is pulled toward the first mirror surface portion 31 fixed to the substrate 11 by the electrostatic force, and the distance between the first mirror surface portion 31 and the second mirror surface portion 32 is adjusted. In this way, in the Fabry-Perot interference filter 1, the distance between the first mirror portion 31 and the second mirror portion 32 is variable.

The wavelength of the light transmitted through the Fabry-Perot interference filter 1 depends on the distance between the first mirror portion 31 and the second mirror portion 32 in the light transmission region 1a. Therefore, by adjusting the voltage applied between the first electrode 12 and the third electrode 14, the wavelength of the transmitted light can be appropriately selected. At this time, the second electrode 13 and the third electrode 14 are at the same potential. Therefore, the second electrode 13 functions as a compensation electrode for keeping the first mirror portion 31 and the second mirror portion 32 flat in the light transmission region 1a.

In the Fabry-Perot interference filter 1, for example, the voltage applied to the Fabry-Perot interference filter 1 is changed by one side (that is, in the Fabry-Perot interference filter 1) The distance between the first mirror portion 31 and the second mirror portion 32 is varied), and a spectral spectrum can be obtained while detecting the light transmitted through the light transmission region 1a of the Fabry-Perot interference filter 1 by a photodetector.

In this way, the laminated structure portion 20 is provided with the diaphragm structure portion M having the first mirror portion 31 and the second mirror portion 32 and the main surface 20s which face each other with the gap S interposed therebetween, and the distance from each other is variable. A part (here, the circle-shaped area on the center side). The diaphragm structure portion M is a portion that does not overlap with the intermediate layer 23 of the laminated structure portion 20 when viewed from a direction intersecting (orthogonal) to the main surface 20s. That is, the outer shape of the diaphragm structure portion M when viewed from the direction intersecting (orthogonal) to the main surface 20s is defined by the inner edge of the intermediate layer 23, and here is a circular shape (see FIG. 1 ).

In the present embodiment, the diaphragm structure portion M is disposed so as to be interposed between the pair of terminals 15 , between the pair of terminals 16 , and between the terminals 15 and the terminals 16 when viewed from the direction intersecting (orthogonal) with the main surface 20s. between. In other words, in this example, the pair of terminals 15 , the pair of terminals 16 , and the terminals 15 and 16 are arranged so as to face each other with the diaphragm structure portion M interposed therebetween. In addition, the terminals 15 and 16 are located outside the diaphragm structure portion M when viewed from a direction intersecting (orthogonal) to the main surface 20s.

As an example, the terminal 15 is provided in one diagonal part 20c on the diagonal line among the four corner parts of the rectangular laminated structure part 20 when viewed from the direction intersecting (orthogonal) with the main surface 20s. Moreover, as an example, the terminal 16 is provided in one pair of other corners 20d on the other diagonal of the four corners of the rectangular laminated structure 20 when viewed from a direction intersecting (orthogonal) to the main surface 20s. In other words, the terminal 16 is arranged on an axis intersecting (orthogonal) to the opposing direction of the terminal 15 . The terminal 15 has a top surface 15s protruding from the main surface 20s. The terminal 16 has a top surface 16s protruding from the main surface 20s. Here, the top surfaces 15s and 16s are substantially parallel to the main surface 20s. [Constitution of suction chuck]

Next, the suction chuck for suctioning the above-mentioned Fabry-Perot interference filter 1 will be described. The suction chuck of the present embodiment can be used, for example, to pick up one chip from the group of chips of the Fabry-Perot interference filter 1 manufactured by cutting wafers and transfer it to a specific position, and to pick up a load The case where the Fabry-Perot interference filter 1 is placed in a specific position and is further transported to the installation site.

4 and 5 are diagrams showing the suction chuck of this embodiment. FIG. 4 is a bottom view, and FIG. 5 is a cross-sectional view taken along line V-V of FIG. 4 . As shown in FIGS. 4 and 5 , the suction chuck 100 includes a main body portion 110 , an extension portion 120 , and a pair of contact portions 130 . Here, the main body portion 110 , the extension portion 120 and the contact portion 130 are formed integrally with each other, but they may be separately constructed and joined together.

The main body portion 110 has, for example, a rectangular parallelepiped shape. The body portion 110 has a surface 111 and a surface 112 on the opposite side of the surface 111 . The extension portion 120 is disposed on the surface 111 in a manner of protruding from the surface 111 , and extends in a direction crossing the surface 111 . The extension portion 120 is, for example, viewed from the direction intersecting the surface 111 , and has a cylindrical shape with a diameter shorter than the length of one side of the body portion 110 , and is disposed more inward than the outer edge of the surface 111 . Therefore, the outer shape of the surface 111 is rectangular, and the inner edge is a circular ring shape. The extension portion 120 can be used, for example, when connecting the suction chuck 100 to a device (not shown) for driving the suction chuck 100 .

The surface 112 has a shape corresponding to the outer shape of the Fabry-Perot interference filter 1 , such as a rectangular shape (for example, a square shape). The contact portion 130 is disposed on the surface 112 so as to protrude from the surface 112 . The contact portion 130 is a portion that contacts the Fabry-Perot interference filter 1 when the Fabry-Perot interference filter 1 is adsorbed. The main body portion 110 , the extension portion 120 and the contact portion 130 are provided with air intake holes 140 extending over the entire lengths of the main body portion 110 , the extension portion 120 and the contact portion 130 . The suction hole 140 opens on the surface (contact surface 131 to be described later) of the contact portion 130 on the opposite side to the surface 112 , and opens on the end portion of the extension portion 120 on the opposite side from the main body portion 110 . The suction hole 140 can be connected to a suction device (not shown) such as a pump through an opening on the side of the extension part 120 . In addition, the air intake hole 140 may not be provided to extend over the entire length of the main body portion 110 and the extension portion 120 . For example, the suction hole 140 may reach the outer side surface of the body portion 110 (the surface intersecting with the surface 112 ) to form an opening. Furthermore, the suction hole 140 may not reach the main body part 110 but reach the outer side surface of the contact part 130 (a surface intersecting with the contact surface 131 described later) to form an opening. In this case, the suction hole 140 can be connected to the suction device through the opening on the outer surface of the body portion 110 or the contact portion 130 .

The contact parts 130 are arranged to face each other and to be spaced apart from each other. The shape of the contact portion 130 when viewed from a direction intersecting (orthogonal) to the surface 112 is, as an example, an arcuate shape in which one corner portion of a rectangle is protruded inward. Here, the edges 130e on the opposite sides of the contact portions 130 are arc-shaped. The suction holes 140 extend from each of the openings (openings for suction) 141 of the contact portion 130 to the surface 111 , are connected and integrated in the body portion 110 , and extend to the extension portion 120 . Therefore, the number of openings on the extension portion 120 side of the suction hole 140 is one.

Here, the suction chuck 100 further includes a pair of guide portions 150 . The guide portion 150 is disposed on the surface 112 so as to protrude from the surface 112 . The guide portions 150 are arranged to face each other and to be spaced apart from each other. More specifically, the guide portion 150 is arranged on an axis that intersects with the opposing direction of the contact portion 130 . As an example, the shape of the guide portion 150 when viewed from a direction intersecting (orthogonal) to the surface 112 is an L-shape. The guide portions 150 are arranged to be turned 180° with respect to the axis of the direction in which the contact portion 130 faces each other so as to be symmetric. Here, the guide parts 150 are arranged so that one rectangle (square) is defined by the pair of guide parts 150 .

FIG. 6 is a schematic view showing a state in which the Fabry-Perot interference filter is adsorbed by the adsorption chuck shown in FIGS. 4 and 5 . FIG. 6 is a bottom view (viewed from the side of the surface 112 ), and a part of the Fabry-Perot interference filter is simplified and represented by a dashed line. As shown in FIGS. 5 and 6 , the surface of the contact portion 130 on the opposite side to the surface 112 is set as a contact surface (first contact surface) 131 that is in contact with the terminal 15 . The contact surfaces 131 and the contact portions 130 correspond to the arrangement, are arranged apart from each other in a manner corresponding to the terminals 15 , and are in contact with each of the terminals 15 . Here, the contact surface 131 is in contact with the top surface 15s of the terminal 15 . Here, one opening 141 of the suction hole 140 is provided on each of the contact surfaces 131 .

In a state in which the contact surface 131 is in contact with the terminal 15 (top surface 15s ) (hereinafter, it may be simply referred to as a "contact state"), the opening 141 and the terminal 15 are partially displaced. More specifically, here, the opening 141 is circular, and the center of the opening 141 is offset toward the outside of the terminal 15 (opposite to the diaphragm structure portion M) on the axis in the direction in which the terminal 15 faces. Thereby, a portion of the mutually opposite sides of the contact portions 130 of the opening 141 overlaps the terminal 15 , and the remaining portion of the opposite side of the opening 141 is deviated from the terminal 15 . In addition, in the contact state, the surface 112 and the main surface 20s face each other and are substantially parallel to each other. In addition, in the above-mentioned example, the case where the center of the opening 141 is shifted to the outer side of the terminal 15 is illustrated. However, by offsetting the center of the opening 141 further outside the center of the terminal 15 and not deviating from the terminal 15 , there may still be a situation where a part of the opening 141 overlaps the terminal 15 and the rest is deviated from the terminal 15 . In addition, the offset here means that a deviation (deviation) occurs.

As described above, the edge 130e of the contact portion 130 is formed into a circular arc shape. Therefore, in the contact state, the edge 130e on the side of the diaphragm structure portion M of the contact portion 130 and the edge 131e on the side of the diaphragm structure portion M of the contact surface 131 are located outside the diaphragm structure portion M and along the The diaphragm structure portion M is formed so as to have an outer shape. Here, the edges 130e and 131e are formed in a circular arc shape so as to follow the outer edge of the diaphragm structure portion M (that is, formed in a shape corresponding to the outer edge of the diaphragm structure portion M).

The guide portion 150 is provided along the corner portion 20d on the outside of the corner portion 20d between the laminated structure portion 20 and the corner portion 20c where the terminal 15 is provided in the contact state. More specifically, in the contact state, the guide portion 150 is bent in an L-shape so as to extend along the outer edge of the corner portion 20d. Here, when the guide portion 150 is in contact with the surface 112 and the main surface 20s (orthogonal), it is positioned further outside the covering portion 33 and is disposed in the thinned portion 34b.

Here, the height of the guide portion 150 from the surface 112 is substantially the same as the height of the contact portion 130 from the surface 112 (the distance between the surface 112 and the contact surface 131 ). Therefore, in the contact state, the guide portion 150 is not in contact with the laminated structure portion 20 and the Fabry-Perot interference filter 1 . However, when the height of the guide portion 150 from the surface 112 is in the contact state, the surface of the guide portion 150 on the opposite side to the surface 112 may be higher than the contact portion 130 within the range not in contact with the bottom surface (surface) of the thinned portion 34b. Height from surface 112. In this case, in the contact state, the guide portion 150 can be arranged to overlap the laminated structure portion 20 along the main surface 20s. [Embodiment of adsorption method]

Next, an embodiment of an adsorption method for adsorbing the Fabry-Perot interference filter 1 will be described using the above-mentioned adsorption chuck 100 . FIG. 7 is a schematic cross-sectional view showing the steps of the adsorption method of the present embodiment. In FIG. 7, the layer structure of the 1st laminated body 22 and the 2nd laminated body 24, an electrode, etc. are abbreviate|omitted. In this method, first, as shown in FIG. 7( a ), the suction chuck 100 is arranged on the Fabry-Perot interference filter 1 (first step). In the first step, the surface 112 of the main body portion 110 of the suction chuck 100 is opposed to the main surface 20s of the laminated structure portion 20 (and the diaphragm structure portion M), and each of the contact surfaces 131 The suction chuck 100 is arranged so as to face each of the terminals 15 .

Next, as shown in FIG. 7( b ), the suction chuck 100 is brought into contact with the Fabry-Perot interference filter 1 (second step). In this second step, each of the contact surfaces 131 is brought into contact with each of the terminals 15 . In particular, here, the contact surface 131 is brought into contact with the top surface 15s of the terminal 15 . Thereby, the space R is formed between the surface 112 and the main surface 20s. As shown in FIG. 6 , the edge 131e is located on the outer side of the membrane structure portion M, and is along the outer edge of the membrane structure portion M. As shown in FIG. Also, as shown in FIGS. 6 and 7 , the opening 141 is partially offset from the terminal 15 . Furthermore, the guide portion 150 is along the corner portion 20d on the outer side of the corner portion 20d different from the corner portion 20c of the laminated structure portion 20 where the terminal 15 is provided. These are realized by the configuration of the suction chuck 100 and the relative arrangement in the first step.

That is, in the first step, in the contact state, the suction chuck 100 is arranged so that the edge 131e of the contact surface 131 is located outside the diaphragm structure part M and along the outer edge of the diaphragm structure part M. Furthermore, in the first step, in the contact state, the opening 141 and the terminal 15 are partially offset, and the guide portion 150 is provided on the laminated structure portion 20 with the outer edge of the corner portion 20d different from the corner portion 20c of the terminal 15. The suction chuck 100 is arranged so as to touch the corner portion 20d.

In the subsequent steps, each of the terminals 15 is adsorbed to the contact surface 131 by suction through the opening 141 of the contact surface 131 , and the Fabry-Perot interference filter 1 is adsorbed by the adsorption chuck 100 . Thereby, the state in which the Fabry-Perot interference filter 1 is adsorbed and held by the adsorption chuck 100 is maintained until the suction through the opening 141 is released. Then, if necessary, after the Fabry-Perot interference filter 1 is transported to a specific position for each suction chuck, the suction is released through the opening 141, and the Fabry-Perot interference filter 1 is pulled from the suction chuck. Head 100 disengages.

As described above, the Fabry-Perot interference filter 1 that is an adsorption object of the adsorption method of the present embodiment includes the substrate 11 and the laminated structure portion 20 provided on the substrate 11 . The laminated structure part 20 is provided with: a diaphragm structure part M having a first mirror surface part 31 and a second mirror surface part 32 which face each other with a gap S interposed therebetween and whose distance from each other is variable; and a pair of terminals 15, It is arrange|positioned so that it may mutually oppose through the diaphragm structure part M when it sees from the direction which crosses (orthogonally) 20 s of main surfaces. On the other hand, in the suction chuck 100 used in the suction method, the contact portion 130 protruding from the surface 112 of the body portion 110 includes a contact surface 131 formed with an opening 141 for suction. In addition, in the first step, the suction chuck 100 is arranged so that the surface 112 of the suction chuck 100 faces the main surface 20s of the Fabry-Perot interference filter 1 . At this time, each of the contact surfaces 131 faces each of the terminals 15 . Next, in the second step, the suction chuck 100 is brought into contact with the Fabry-Perot interference filter 1 . At this time, each of the contact surfaces 131 is brought into contact with each of the terminals 15 . Then, in the third step, the Fabry-Perot interference filter 1 is adsorbed by the adsorption chuck 100 . At this time, each of the terminals 15 is adsorbed to the contact surface 131 by suction through the opening 141 of the contact surface 131 . Thereby, when the Fabry-Perot interference filter 1 is adsorbed, the limited range of the terminal 15 can be adsorbed. Therefore, moderate adsorption can be obtained, and as a result, the Fabry-Perot interference filter 1 can be stably released at the time of desorption.

In addition, in the suction chuck 100, the terminal 15 includes a top surface 15s protruding from the main surface 20s. And, in the second step, the contact surface 131 is brought into contact with the top surface 15s. Therefore, in the second step, the contact surface 131 of the contact portion 130 is brought into contact with the terminal 15 protruding from the diaphragm structure portion M. As shown in FIG. Therefore, during suction, the suction chuck 100 does not come into contact with the diaphragm structure portion M, or even if it contacts, the load on the diaphragm structure portion M is reduced. Therefore, when the Fabry-Perot interference filter 1 is adsorbed, the diaphragm structure portion M can be prevented from being damaged, and the occurrence of defective products of the Fabry-Perot interference filter 1 can be suppressed.

In addition, in the suction chuck 100, when the contact surface 131 is in contact with the terminal 15, the contact portion 130 and the edges 130e and 131e of the contact surface 131 on the side of the diaphragm structure portion M are formed to be in contact with the diaphragm structure portion M. The shape corresponding to the outer edge. Furthermore, in the first step, in a state where the contact surface 131 is in contact with the terminal 15 , the suction chuck 100 is arranged such that the edges 130e and 131e are located outside the diaphragm structure portion M and along the outer shape of the diaphragm structure portion M. . Therefore, when the Fabry-Perot interference filter 1 is adsorbed, the contact with the diaphragm structure portion M can be avoided.

In particular, in the suction chuck 100, when viewed from a direction intersecting (orthogonal) to the main surface 20s, the diaphragm structure portion M has a circular shape, and the edges 130e and 131e are formed in a circular arc shape following the outer edge of the diaphragm structure portion M. . Therefore, when the Fabry-Perot interference filter 1 is adsorbed, the contact with the diaphragm structure portion M can be surely avoided.

In addition, in the suction method, in the first step, the suction chuck 100 is arranged such that the opening 141 of the contact surface 131 of the suction hole 140 is partially offset from the terminal 15 in a state where the contact surface 131 is in contact with the terminal 15 . Therefore, it is possible to prevent the adsorption force from being too large, and to detach the Fabry-Perot interference filter 1 more stably.

In addition, the suction chuck 100 is provided with a guide portion 150 provided on the surface 112 so as to protrude from the surface 112 on an axis that intersects with the direction from one contact surface 131 to the other contact surface 131 . The terminals 15 are respectively provided at the corners 20c of the build-up structure portion 20 when viewed from the direction intersecting (orthogonal) to the main surface 20s. Furthermore, in the first step, the suction clip is arranged in such a manner that the guide portion 150 is in contact with the corner portion 20c of the laminated structure portion 20 where the terminal 15 is provided, and the outer side of the other corner portion 20d is arranged along the other corner portion 20d. Head 100. Therefore, the change of the posture of the Fabry-Perot interference filter 1 is restricted by the guide portion 150, so that it can be held and released stably.

Furthermore, in the suction chuck 100 , the guide portion 150 is bent and extended so as to follow the outer edge of the corner portion 20 d in a state in which the contact surface 131 is in contact with the terminal 15 . Therefore, the guide portion 150 restricts the Fabry-Perot interference filter 1 from rotating in the plane along the main surface 20s, so that it can be held and released more stably. [Variation example]

The above embodiment is to describe one embodiment of the adsorption method of one aspect of the present invention. Therefore, the adsorption method of one aspect of the present invention is not limited to the above-mentioned method, and a method of arbitrarily deforming the above-mentioned adsorption chuck 100 can be adopted. Next, a modification of the suction chuck will be described.

FIG. 8 is a schematic view showing a state in which the Fabry-Perot interference filter is adsorbed by the adsorption chuck of the modified example. FIG. 8 is a bottom view (viewed from the side of the surface 112 ), and a part of the Fabry-Perot interference filter is simplified and represented by a dotted line. As shown in FIG. 8 , in this example, the suction chuck 100 does not include the guide portion 150 . In this way, as long as the suction chuck 100 is configured to suction a pair of terminals 15 facing each other across the diaphragm structure portion M, stable suction and holding can be performed without providing the guide portion 150 . In addition, the suction chuck 100 may be configured to suction a pair of terminals 15 and 16 facing each other with the diaphragm structure portion M interposed therebetween.

FIG. 9 is a schematic view showing the state in which the Fabry-Perot interference filter is adsorbed by the adsorption chuck in another modification. FIG. 9 is a bottom view (viewed from the side of the surface 112 ), and a part of the Fabry-Perot interference filter is simplified and represented by a dashed line. As shown in FIG. 9 , in this example, the suction chuck 100 further includes a pair of contact portions 160 disposed on the surface 112 in a manner of protruding from the surface 112 . The contact portion 160 is disposed on an axis that intersects with the direction from one contact surface 131 to the other contact surface 131 . The contact portion 160 is arranged at a position corresponding to the corner portion 20d of the laminated structure portion 20 in the contact state.

Each of the contact portions 160 is arranged to correspond to the terminal 16 and includes a contact surface (second contact surface) 161 that is in contact with the terminal 16 . The contact surfaces 161 are separated from each other. The suction hole 140 is further opened on the contact surface 161 (an opening 141 for suction is provided). Even in the contact surface 161, the opening 141 may be configured to be partially offset from the terminal 16 in the contact state. When the suction chuck 100 is used, in the first step of the suction method, the suction chuck 100 is arranged such that each of the contact surfaces 161 and each of the terminals 16 face each other. Furthermore, in the second step, each of the contact surfaces 161 is further brought into contact with each of the terminals 16 . And, in the third step, each of the terminals 16 is adsorbed to the contact surface 161 by suction through the opening 141 of the contact surface 161 . According to this modification, suction can be performed through the openings 141 arranged at at least three points (here, four points) at different positions from each other, and the Fabry-Perot interference filter 1 can be more stably suctioned and held.

In addition, in the example of FIG. 9, the contact parts 130 and 160 and the contact surfaces 131 and 161 are seen from the direction crossing (orthogonal) with the surface 112, and are formed in a rectangular shape. That is, here, the edges 130e, 160e of the sides of the contact portions 130, 160 facing each other (the side of the diaphragm structure portion M in the contact state) and the sides of the contact surfaces 131, 161 facing each other (in the contact state) The edges 131e and 161e on the side of the diaphragm structure portion M) are not set to an arc-like shape along the outer shape of the diaphragm structure portion M. Even in this case, since the contact surfaces 131 and 161 are in contact with the top surfaces 15s and 16s of the terminals 15 and 16 , it is possible to avoid contact with the diaphragm structure M, or even in contact, the load on the diaphragm structure M can be reduced. .

Moreover, even in the example shown in FIG. 6 or FIG. 8, the contact part 130 and the contact surface 131 of the shape of FIG. 9 can also be used. Furthermore, the shapes of the contact portions 130 and 160 and the contact surfaces 131 and 161 may be other arbitrary shapes.

The above-mentioned embodiments are remarked as follows.

[Addendum 1] A suction chuck for suctioning a Fabry-Perot interference filter having a substrate and a laminated structure portion disposed on the substrate and including a main surface facing the opposite side of the substrate, and comprising: a main body part, which has a surface; a contact part, which is provided on the surface so as to protrude from the surface, and includes a pair of first contact surfaces; and a membrane structure part is provided on the laminated structure part, which includes an intervening space and A first mirror surface portion and a second mirror surface portion facing each other and having a variable distance from each other, and a part of the above-mentioned main surface; The said diaphragm structure part is arrange|positioned so that it may mutually oppose. In the said main body part and the said contact part, the suction hole which extends over the said main body part and the said contact part is formed. The first contact surfaces are spaced apart from each other to correspond to each of the first electrode terminals, and are in contact with each of the first electrode terminals; the suction holes are open to each of the first contact surfaces. [Addendum 2] The adsorption chuck as described in appendix 1, wherein The first electrode terminal includes a top surface protruding from the main surface; The first contact surface is in contact with the top surface. [Addendum 3] The suction chuck as described in appendix 1 or 2, wherein In a state in which the first contact surface is in contact with the first electrode terminal, the edge located on the side of the diaphragm structure portion of the contact portion and the first contact surface is located outside the diaphragm structure portion, and is located along the edge of the diaphragm structure portion. The above-mentioned diaphragm structure portion is formed in an outer shape. [Addendum 4] The suction chuck as described in appendix 3, wherein When viewed from a direction intersecting with the main surface, the diaphragm structure portion has a circular shape, and the edge is formed in an arc shape in a manner similar to the outer edge of the diaphragm structure portion. [Addendum 5] The adsorption chuck according to any one of appendices 1 to 4, wherein The opening of the suction hole on the first contact surface is partially offset from the first electrode terminal when the first contact surface is in contact with the first electrode terminal. [Addendum 6] The adsorption chuck according to any one of appendixes 1 to 5, wherein On an axis intersecting with the direction from one of the first contact surfaces toward the other of the first contact surfaces, there is provided a guide portion disposed on the surface in a manner of protruding from the surface; The first electrode terminals are respectively provided at the corners of the laminate structure portion when viewed from a direction intersecting with the main surface; In a state where the first contact surface of the guide portion is in contact with the first electrode terminal, an outer side of a corner portion of the laminate structure portion that is different from a corner portion where the first electrode terminal is provided is arranged along the different corner. Partial way setting. [Addendum 7] The suction chuck as described in appendix 6, wherein The guide portion is bent and extended so as to follow the outer edge of the other corner portion in a state in which the first contact surface is in contact with the first electrode terminal. [Addendum 8] The adsorption chuck according to any one of appendices 1 to 7, wherein The above-mentioned Fabry-Perot interference filter includes a pair of second electrode terminals arranged so as to face each other across the above-mentioned diaphragm structure portion when viewed from a direction intersecting the above-mentioned main surface; The second electrode terminal is arranged on an axis that intersects with the opposing direction of the first electrode terminal; The contact portion is arranged in a manner corresponding to the second electrode terminal, and includes a second contact surface contacting the second electrode terminal; The said suction hole is further opened in the said 2nd contact surface. [Industrial Availability]

An adsorption method for stably detaching a Fabry-Perot interference filter can be provided.

1‧‧‧Fabry-Perot Interference Filter 1a‧‧‧Light transmission area 11‧‧‧Substrate 11a‧‧‧First surface 11b‧‧‧Second surface 11c‧‧‧Outer edge 12‧‧‧First electrode 12a‧‧‧Wiring 13‧‧‧Second electrode 13a‧‧‧Wiring 14‧‧‧The third electrode 14a‧‧‧Wiring 15‧‧‧Terminal (1st electrode terminal) 15s‧‧‧Top 16‧‧‧Terminal (second electrode terminal) 16s‧‧‧Top 17‧‧‧Groove 18‧‧‧Groove 19‧‧‧Groove 20‧‧‧Laminated Structure Department 20c‧‧‧Corner 20d‧‧‧ corners (other corners) 20s‧‧‧Main side 21‧‧‧Anti-reflection layer 21a‧‧‧Side 22‧‧‧1st layered body 22a‧‧‧Side 22b‧‧‧Surface 23‧‧‧Interlayer 23a‧‧‧Surface 23b‧‧‧Side 24‧‧‧Second laminate 24a‧‧‧Surface 24b‧‧‧Through hole 25‧‧‧Polysilicon layer 25a‧‧‧polysilicon layer 25b‧‧‧polysilicon layer 25c‧‧‧polysilicon layer 26‧‧‧Silicon nitride layer 26a‧‧‧Silicon nitride layer 26b‧‧‧Silicon nitride layer 27‧‧‧Polysilicon Layer 27a‧‧‧polysilicon layer 27b‧‧‧polysilicon layer 27c‧‧‧polysilicon layer 28‧‧‧Silicon nitride layer 28a‧‧‧Silicon nitride layer 28b‧‧‧Silicon nitride layer 31‧‧‧First mirror face 32‧‧‧Second mirror face 33‧‧‧Coated part 34‧‧‧Peripheral 34a‧‧‧Non-thinning part 34b‧‧‧Thinning 34c‧‧‧Surface 40a‧‧‧Opening 41‧‧‧Anti-reflection layer 42‧‧‧The 3rd Laminate 43‧‧‧Interlayer 44‧‧‧The 4th Laminate 45‧‧‧Light shielding layer 46‧‧‧Protective layer 100‧‧‧Adsorption chuck 110‧‧‧Main body 111‧‧‧Surface 112‧‧‧Surface 120‧‧‧Extension 130‧‧‧Contact 130e‧‧‧Edge 131‧‧‧contact surface (first contact surface) 131e‧‧‧Edge 140‧‧‧Suction hole 141‧‧‧Opening 150‧‧‧Guidance Department 160‧‧‧Contact 160e‧‧‧Edge 161‧‧‧contact surface (second contact surface) 161e‧‧‧Edge M‧‧‧Diaphragm structure R‧‧‧Space S‧‧‧void

FIG. 1 is a plan view of the Fabry-Perot interference filter of the present embodiment. FIG. 2 is a bottom view of the Fabry-Perot interference filter shown in FIG. 1 . FIG. 3 is a cross-sectional view of the Fabry-Perot interference filter taken along line III-III of FIG. 1 . FIG. 4 is a diagram showing the suction chuck of this embodiment. FIG. 5 is a view showing the suction chuck of this embodiment. FIG. 6 is a schematic view showing a state in which the Fabry-Perot interference filter is adsorbed by the adsorption chuck shown in FIG. 4 and FIG. 5 . 7(a) and (b) are schematic cross-sectional views showing the steps of the adsorption method of the present embodiment. FIG. 8 is a schematic view showing a state in which the Fabry-Perot interference filter is adsorbed by the adsorption chuck of the modified example. FIG. 9 is a schematic view showing a state in which the Fabry-Perot interference filter is adsorbed by the adsorption chuck of another modified example.

1‧‧‧Fabry-Perot Interference Filter

15‧‧‧Terminal (1st electrode terminal)

15s‧‧‧Top

16‧‧‧Terminal (second electrode terminal)

16s‧‧‧Top

20c‧‧‧Corner

20d‧‧‧ corners (other corners)

22‧‧‧1st layered body

23‧‧‧Interlayer

34b‧‧‧Thinning

100‧‧‧Adsorption chuck

110‧‧‧Main body

112‧‧‧Surface

120‧‧‧Extension

130‧‧‧Contact

130e‧‧‧Edge

131‧‧‧contact surface (first contact surface)

131e‧‧‧Edge

141‧‧‧Opening

150‧‧‧Guidance Department

M‧‧‧Diaphragm structure

Claims (8)

An adsorption method, which uses an adsorption chuck to adsorb a substrate and a Fabry-Perot interference filter provided on the substrate and including a laminated structure portion facing a main surface opposite to the substrate, and comprising: The first step is to arrange the suction chuck so as to face the main surface; the second step is to contact the suction chuck with the Fabry-Perot interference filter after the first step; and a third step, after the second step, the Fabry-Perot interference filter is adsorbed by the adsorption chuck; the adsorption chuck is provided with: a main body part having a surface; and a contact part with a It is provided on the surface so as to protrude from the surface, and includes a pair of first contact surfaces formed with an opening for air intake; and on the laminated structure portion is provided: a diaphragm structure portion which faces each other with a gap interposed therebetween. and a first mirror surface part and a second mirror surface part whose distance from each other is variable, and a part of the above-mentioned main surface; The diaphragm structure parts are arranged so as to face each other; in the first step, the surface and the main surface face each other, and each of the first contact surfaces and each of the first electrode terminals face each other. The suction chuck is arranged; in the second step, each of the first contact surfaces is brought into contact with each of the first electrode terminals; in the third step, by the first contact surface through the first contact surface The suction of the opening attracts each of the first electrode terminals to the first contact surface. The adsorption method of claim 1, wherein the first electrode terminal includes a top surface protruding from the main surface; in the second step, the first contact surface is brought into contact with the top surface. The adsorption method according to claim 1 or 2, wherein an edge on the side of the diaphragm structure portion of the first contact surface in a state in which the first contact surface is in contact with the first electrode terminal is formed to be in contact with the diaphragm structure In the first step, when the first contact surface is in contact with the first electrode terminal, the edge is located outside the diaphragm structure portion and along the diaphragm structure The above-mentioned suction chuck is arranged in the manner of the outer edge of the part. The adsorption method of claim 3, wherein the diaphragm structure portion has a circular shape when viewed from a direction intersecting the main surface, and the edge is formed in an arc shape following the outer edge of the diaphragm structure portion. The adsorption method of claim 1 or 2, wherein in the first step, in a state where the first contact surface is in contact with the first electrode terminal, the opening and the first electrode terminal are partially offset. Configure the suction chuck above. The adsorption method of claim 1 or 2, wherein The suction chuck is provided with a guide portion provided on the surface so as to protrude from the surface on an axis that intersects with the direction from one of the first contact surfaces toward the other of the first contact surfaces; the first electrode terminal is When viewed from the direction intersecting with the main surface, they are respectively provided at the corners of the laminate structure portion; in the first step, in the state where the first contact surface is in contact with the first electrode terminal, the guide portion is placed in the first step. The said suction chuck is arrange|positioned so that the corner part of the said laminated structure part and the said 1st electrode terminal is provided with the outer side of the said other corner part along the said other corner part. The adsorption method according to claim 6, wherein the guide portion is bent and extended along the outer edge of the other corner portion in a state in which the first contact surface is in contact with the first electrode terminal. The adsorption method according to claim 1 or 2, wherein the Fabry-Perot interference filter includes a pair arranged so as to face each other across the diaphragm structure portion when viewed from a direction intersecting with the main surface a second electrode terminal; the second electrode terminal is arranged on an axis that intersects with the direction facing the first electrode terminal; the contact portion includes an opening for air intake that is arranged in a manner corresponding to the second electrode terminal the second contact surface; in the first step, the suction chuck is arranged in such a way that each of the second contact surface and each of the second electrode terminals face each other; in the second step, the Each of the second contact surfaces is in contact with the above-mentioned second electrode terminal In the third step, each of the second electrode terminals is adsorbed on the second contact surface by suction through the opening of the second contact surface.

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