TWI769556B - Foup cleaning device - Google Patents

Abstract

The object of the present invention is to provide a front-opening wafer transfer cassette cleaning device capable of improving the cleaning and drying efficiency of the front-opening wafer transfer cassette main body and the front-opening wafer transfer cassette cover and improving the drying efficiency of the vent pipe nozzle. The present invention for achieving this object is a front-opening wafer transfer cassette cleaning device comprising a front-opening wafer transfer cassette main body and a front-opening wafer transfer cassette cover, characterized in that the front-opening wafer transfer cassette main body is equipped with There is a vent pipe nozzle for blowing the foamed porous material inside the front-opening wafer transfer box main body, including a cleaning cavity for cleaning the front-opening wafer transfer box main body and the front-opening wafer transfer box cover with a cleaning fluid The cleaning chamber is equipped with a compressed drying air supply that injects compressed drying air into the air duct nozzle after the cleaning of the front-loading pod body is completed.

Description

Front-loading wafer transfer pod cleaning device

The present invention relates to a front-opening wafer transfer box cleaning device, in particular to a front-opening wafer transfer box cleaning device that improves the cleaning and drying efficiency of a front-opening wafer transfer box used for storage and transportation of substrates.

The semiconductor manufacturing process is a series of process equipment that processes semiconductor substrates by various methods. Therefore, when storing and transporting semiconductor substrates, care must be taken to avoid damage by external impact, and management must be performed so that the surface of the substrate is not affected by moisture, Dust, various organic matter and other impurities pollution.

Therefore, a separate storage container (Front opening unified pod (FOUP), hereinafter referred to as "FOUP") is used when storing and transporting semiconductor substrates.

Since a high-precision semiconductor substrate is housed in the FOUP used for the above-mentioned purpose, the FOUP needs to be managed to maintain a high degree of cleanliness. For this reason, the FOUP is periodically cleaned and dried in a FOUP cleaning apparatus.

As a prior art regarding such a FOUP cleaning device, Korean Patent Laid-Open No. 10-2013-0095028 and Korean Granted Patent No. 10-1173987 disclose a technique of cleaning FOUPs by spraying cleaning liquid on the surfaces of FOUPs.

In addition, as described in Korean Laid-Open Patent Publication No. 10-2015-0078657, a snorkel nozzle of foamed porous material for purging the substrate accommodated in the FOUP is provided inside the FOUP, but has the following Problem: It takes a lot of time to completely dry the snorkel nozzle that has absorbed the cleaning solution during the cleaning process of the FOUP to restore its original performance, and the FOUP can no longer be used within the time required to completely dry the snorkel nozzle, resulting in process losses. . Therefore, there is a need to develop a FOUP cleaning device that can quickly dry the vent pipe nozzle after cleaning the FOUP, thereby reducing the time required to restore the original performance.

The present invention has been made in order to solve all the above-mentioned problems, and an object thereof is to provide a FOUP cleaning device which can improve the cleaning and drying efficiency of the FOUP main body and the FOUP cover and the drying efficiency of the vent pipe nozzle.

A FOUP cleaning device of the present invention for achieving the above-mentioned object is used for cleaning a FOUP including a FOUP main body and a FOUP cover, and the FOUP cleaning device is characterized in that the FOUP main body is equipped with a device for purging the FOUP A vent pipe nozzle of foamed porous material inside the body, including a cleaning chamber for cleaning the FOUP body and FOUP cover with a cleaning fluid, the cleaning chamber is equipped with a cleaning chamber to the FOUP body after the cleaning of the FOUP body is completed. A compressed dry air supply part that injects compressed dry air into the vent pipe nozzle.

The compressed dry air supply part may be equipped to be movable back and forth to be connected to or disconnected from one side end of the air pipe nozzle.

On one side of the FOUP body, a first port connecting the end of the vent pipe nozzle may be formed on one side, and a second port communicating with the interior of the FOUP body may be formed on the other side, and the compression drying The air supply part includes: a first nozzle for supplying compressed dry air to the first port; and a second nozzle for supplying compressed dry air to the second port.

A filter may be provided on the inner side of the first port and the second port, respectively, and the filter is dried by the compressed drying air.

The compressed dry air supply part may include: a first supply pipe for supplying compressed dry air to the first nozzle and arranged in a lateral direction; and a second supply pipe for communicating with the first supply pipe and for supplying the second nozzle to the second nozzle supplying compressed dry air and equipping it in the longitudinal direction; and moving the air cylinder back and forth to move the first supply pipe and the second supply pipe forward or backward.

The snorkel nozzles may be provided in multiples spaced on both sides inside the FOUP body, and the first port and the second port may be provided in multiples spaced on one side of the FOUP body facing both sides. Each of the first supply pipes equipped with the first nozzles and the second supply pipes equipped with the second nozzles are separated from each other on both sides and provided in plural.

The FOUP cleaning device may further include: a first supply pipe support member supporting a plurality of the first supply pipes and connected to the front and rear movement cylinders; and a second supply pipe support member supporting a plurality of the second supply pipes Tube.

A pad may be combined with the first nozzle and the second nozzle, and the pad may be tightly adhered to the outer surface of the FOUP main body on which the first port and the second port are formed to maintain airtightness.

The pad may be formed of silicon material.

The cleaning chamber may be equipped with: a stopper for supporting one side surface of the FOUP main body so that the FOUP main body is not pushed by the compressed dry air jetted from the compressed dry air supply part Move to one side.

The cleaning chamber may be equipped with: an outer cleaning fluid spray portion that sprays cleaning fluid to the outer side of the FOUP body and the FOUP cover; and an inner cleaning fluid spray portion that sprays cleaning fluid to the inner side of the FOUP body .

A plurality of nozzles for jetting cleaning fluid may be formed in the external cleaning fluid jetting portion at intervals up and down, and the plurality of nozzles may be formed to have different lengths and jetting angles so that the plurality of nozzles are close to the FOUP main body arranged on the outer side.

The FOUP body may be rotatably equipped in the cleaning chamber, and the plurality of nozzles may be obliquely formed to spray cleaning fluid in a direction opposite to the direction in which the FOUP body rotates.

The cleaning chamber may be provided with an air supply unit for spraying compressed dry air for drying the cleaned FOUP main body and the FOUP cover.

The air supply part may include: an external air supply part that sprays compressed dry air to the outer side of the FOUP body; and an inner air supply part that sprays the compressed dry air to the inner side of the FOUP body.

A plurality of nozzles for jetting compressed dry air may be formed in the external air supply part at intervals up and down, and the plurality of nozzles may be formed to have different lengths and jetting angles so that the plurality of nozzles are close to the FOUP arranged on the outer side of the main body.

The FOUP main body may be rotatably equipped in the cleaning chamber, and the plurality of nozzles may be formed obliquely to spray compressed dry air in a direction opposite to the direction in which the FOUP main body rotates.

The air supply part may further include: an upper air supply part located between the FOUP main body and the FOUP cover inside the cleaning chamber, and equipped to be movable back and forth so as to supply the cleaned FOUP main body. And the FOUP cover sprays compressed dry air.

The cleaning chamber may include: a cleaning chamber main body that accommodates the FOUP main body inside to perform cleaning; a cleaning chamber cover that opens and closes an upper portion of the cleaning chamber main body and supports the FOUP cover to perform the cleaning process cleaning process.

The cleaning chamber body may include: a seating portion provided at a lower portion of the cleaning chamber body to seat the FOUP body; and a lifting portion lifting and lowering between the upper and lower portions of the cleaning chamber body , and transfer the FOUP body to the seating part or receive the FOUP body from the seating part, so as to lift the FOUP body, wherein the lifting part is connected to the cleaning chamber through the support part The chamber cover is connected, and the lifting part and the cleaning chamber cover are lifted and lowered together by the same lifting driving part.

The cleaning chamber may be equipped with an ultraviolet lamp for irradiating ultraviolet rays for drying the cleaned FOUP main body and the FOUP cover.

The ultraviolet lamp may include: an external ultraviolet lamp, which irradiates ultraviolet rays to the outer side of the FOUP body; and an inner ultraviolet lamp, which irradiates ultraviolet rays to the inner side of the FOUP body.

The FOUP cleaning device may further include: a vacuum chamber for conveying the FOUP main body and the FOUP cover cleaned in the cleaning chamber, and a nitrogen gas supply line connected to the vacuum chamber for feeding into the vacuum chamber Nitrogen gas is supplied inside; and a vacuum line sucks the fluid inside the vacuum chamber and discharges it to the outside.

The vacuum chamber may be equipped with a nitrogen supply for injecting nitrogen into the snorkel nozzle.

The nitrogen supply part may be equipped to be movable back and forth to be connected to or disconnected from one side end of the snorkel nozzle.

The vacuum chamber may be equipped with: a second stopper for supporting one side surface of the FOUP body so that the FOUP body is not pushed to a side by the nitrogen gas injected from the nitrogen supply part move sideways.

The FOUP cleaning device according to the present invention is equipped with a compressed dry air supply part that injects compressed dry air into the vent pipe nozzle after cleaning the FOUP main body, so that the vent pipe nozzle can be quickly dried, and therefore, it is possible to shorten the time required to restore the original performance. effect of time.

Further, by moving the compressed dry air supply unit forward and backward, the first nozzle and the second nozzle are connected to the first port and the second port formed on one side of the FOUP main body at the same time, and the compressed dry air is supplied, so that the ventilation pipe nozzle can be increased. drying and drying efficiency inside the FOUP body.

In addition, compressed dry air is injected into the snorkel nozzle provided inside the FOUP main body that has been cleaned in the cleaning chamber for primary drying, and nitrogen gas is injected into the snorkel nozzle in the vacuum chamber for secondary drying, so that a short time Completely dry the vent tube nozzle of the foamed porous material inside.

And, by equipping a stopper for supporting one side of the FOUP body to prevent the FOUP body from being moved to one side by the compressed drying air used to dry the vent pipe nozzle or by the pressure generated by the supply of nitrogen gas, thereby The drying operation of the snorkel nozzle can be performed stably while the FOUP body is fixed and supported.

In addition, the lengths and spray angles of the plurality of nozzles are made different, so that the FOUP body and the FOUP cover are rotated during the cleaning and drying of the cleaning chamber, and the cleaning fluid and the compressed dry air are applied to the FOUP body and the FOUP cover. The entire area is sprayed uniformly, while a plurality of nozzles for spraying cleaning fluid and compressed dry air are arranged close to the outer side of the FOUP body, and the plurality of nozzles are formed obliquely so as to spray the cleaning fluid in a direction opposite to the direction in which the FOUP body rotates , so that the cleaning and drying efficiency can be further improved.

In addition, the cleaning chamber cover and the lift unit are configured to be raised and lowered together by the driving of the same lift drive unit, so that the operation of carrying the FOUP main body and the FOUP cover into and out of the cleaning chamber can be performed easily and smoothly.

Hereinafter, with reference to the accompanying drawings, the configuration and operation of the preferred embodiments of the present invention will be described in detail.

The FOUP cleaning device 1 of the present invention is a device for cleaning a FOUP 10 composed of a FOUP main body 20 and a FOUP cover 30 , and is characterized in that the FOUP main body 20 is equipped with foam for purging the inside of the FOUP main body 20 . The vent pipe nozzle 21 is made of porous material, and includes a cleaning chamber 600 for cleaning the FOUP body 20 and the FOUP cover 30 with a cleaning fluid. A compressed dry air supply part 680 for injecting compressed dry air into the vent pipe nozzle 21 .

1 and 2 , the FOUP cleaning apparatus 1 of the present invention is an apparatus for cleaning and drying a FOUP 10 for storing and transferring semiconductor substrates. The FOUP 10 includes: a FOUP body 20 that accommodates a semiconductor substrate (not shown); and a FOUP cover 30 that opens and closes an opening formed on one side of the FOUP body 20 , wherein the FOUP body 20 and the FOUP cover 30 constitute a A structure to be separated or joined by a locker (not shown).

The FOUP cleaning device 1 includes: a process chamber 100 for carrying out the conveying, cleaning and drying processes of the FOUP 10; a loading and unloading part 200 for carrying the FOUP 10 into and out of the process chamber 100; and a standby part 300 facing the One side of the loading and unloading part 200 is provided in the process chamber 100, and the FOUP main body 20 and the FOUP cover 30 are separated or combined with each other; the transfer unit 400 is located between the loading and unloading part 200 and the standby part 300. The FOUP 10 is transferred from time to time; the robot 500 grasps and transports the FOUP main body 20 and the FOUP cover 30 in the process chamber 100 ; the cleaning chamber 600 receives the FOUP main body 20 and the FOUP main body 20 in the standby part 300 by the robot 500 . The FOUP cover 30 is then cleaned with a cleaning fluid and then dried; the vacuum chamber 700 receives the cleaned and dried FOUP body 20 and the FOUP cover 30 in the cleaning chamber 600 by the robot 500, and then discharges foreign matter containing moisture remaining in the FOUP main body 20 and the FOUP cover 30 ; and a buffer section 800 for carrying out the FOUP main body 20 and the FOUP cover 30 after the exhaust process of the vacuum chamber 700 is completed before conveying to the standby section 300 temporary storage. And, one side inside the process chamber 100 may be equipped with: a utility 910 for supplying hot deionized water (Hot deionized water) as a cleaning fluid used for cleaning and drying the FOUP 10, Equipment for compressed dry air (CDA: Compressed dry air), nitrogen (N 2 ), etc.; and a steam unit 920 equipped with equipment for supplying steam used for cleaning the FOUP 10 .

The loading and unloading unit 200 is used for loading in order to carry the cleaning object FOUP 10 into the process chamber 100 or for carrying out the FOUP 10 that has completed the cleaning, drying and discharging processes in the process chamber 100 to the outside of the process chamber 100 . The configuration of Unloading is performed. 3 , the loading and unloading section 200 is provided with a support plate 210 which is placed in a state in which the FOUP main body 20 is laid sideways and the FOUP cover 30 is placed on one side.

The standby unit 300 is a place where the FOUP 10 transferred from the loading and unloading unit 200 by the transfer unit 400 waits before being transferred to the cleaning chamber 600 , and the posture of the FOUP 10 transferred to the standby unit 300 is handled by the robot 500 . Converted to FOUP cover 30 facing downwards. In addition, the standby unit 300 is provided with a locking and unlocking unit (not shown) for locking or unlocking the locks provided in the FOUP main body 20 and the FOUP cover 30 . The locking and unlocking unit may be configured to rotate the lock in one direction or the opposite direction, thereby locking or unlocking the lock.

The standby unit 300 is provided with a standby plate 310 on which the FOUP main body 20 and the FOUP cover 30 are placed, and an elevating cylinder 320 that moves the standby plate 310 up and down so as to move up and down. The lift cylinder 320 may be connected to the transfer unit 400 so as to move back and forth between the loading and unloading part 200 and the standby part 300 by the driving of the transfer unit 400 .

The transfer unit 400 is configured to reciprocately transfer the lift cylinder 320, and may be configured by a linear motion guide rail as an example.

The procedure of transferring the FOUP 10 from the loading and unloading unit 200 to the standby unit 300 will be described. When the FOUP 10 is loaded on the support plate 210 , the elevating cylinder 320 waiting on the lower side of the support plate 210 moves upward, thereby lifting the FOUP 10 on the support plate 210 to the upper side of the support plate 210 . In this state, the lift cylinder 320 and the FOUP 10 are moved toward the standby unit 300 side by the drive of the transfer unit 400 . When the elevating cylinder 320 and the FOUP 10 are positioned on the upper side of the standby plate 310 of the standby unit 300 , the elevating cylinder 320 moves downward, and the supported FOUP 10 is placed on the standby plate 310 . Next, after the gripper 510 of the robot 500 grasps the FOUP 10, the FOUP 10 is rotated so that the FOUP cover 30 faces downward, and then placed on the standby plate 310, and the locker is unlocked by the locking and unlocking unit provided in the standby portion 300, Thus, the FOUP main body 20 and the FOUP cover 30 are in a separable state.

When the FOUP main body 20 and the FOUP cover 30 are in a separable state as described above, the FOUP main body 20 and the FOUP cover 30 are sequentially transported to the cleaning chamber 600 by the robot 500 .

4 and 5 , the cleaning chamber 600 includes: a cleaning chamber main body 610, which accommodates the FOUP main body 20 inside for cleaning and drying; a cleaning chamber cover 620, which opens and closes the cleaning chamber main body 610, and the FOUP cover 30 is supported for cleaning and drying.

The cleaning chamber main body 610 includes: a seating part 611 provided at the lower part of the cleaning chamber main body 610 to seat the FOUP main body 20; The FOUP main body 20 is moved up and down between the lower part, and the FOUP main body 20 is transferred to the seating part 611 , or the FOUP main body 20 is received from the seating part 611 and the FOUP main body 20 is raised and lowered. The lifting portion 634 can be connected to the cleaning chamber cover 620 by the support portion 633 , and the lifting portion 634 and the cleaning chamber cover 620 can be lifted and lowered together by the same lifting driving portion 631 .

When the FOUP main body 20 and the FOUP cover 30 are moved from the standby unit 300 to the cleaning chamber 600 , the lift drive unit 631 moves upward, and accordingly, the cleaning chamber cover 620 , the support unit 633 and the lift unit 634 move upward together. , while the upper part of the cleaning chamber main body 610 is opened, the mounting part 611 moves to the upper part of the cleaning chamber main body 610 and waits at a position where the FOUP main body 20 can be received.

The cleaning chamber cover 620 is provided with a FOUP cover support portion 621 and a jig 622 for supporting and fixing the FOUP cover 30 transferred by the robot 500 .

If the FOUP main body 20 is transferred to the lifting part 634 by the robot 500, and the FOUP cover 30 is supported by the FOUP cover support part 621 and the jig 622 and fixed to the cleaning chamber cover 620, the cleaning chamber cover 620 is fixed to the cleaning chamber cover 620. The FOUP cover 30 of the cleaning chamber cover 620 and the lifting part 634 connected to the cleaning chamber cover 620 through the support part 633 are moved downward by the downward driving of the lifting driving part 631 in a state of supporting the FOUP main body 20 . In this case, the lift driving part 631 is driven downward to a position where the cleaning chamber cover 620 is driven to close the upper part of the cleaning chamber main body 610 . It is located on the lower side of the seating portion 611 and stands by.

Referring to FIG. 5 , a through hole 634 a is formed in the central portion of the elevating portion 634 , and a placement portion 611 is arranged inside the through hole 634 a. Therefore, when the elevating part 634 moves up and down, interference with the seating part 611 is prevented, and the handover of the FOUP main body 20 can be realized between the elevating part 634 and the seating part 611 .

In addition, the cleaning chamber main body 610 is equipped with cleaning fluid ejection parts 640 : 640 - 1 and 640 - 2 for supplying cleaning fluid for cleaning the FOUP main body 20 and the FOUP cover 30 .

The cleaning fluid injection part 640 may include: an external cleaning fluid injection part 640-1, which injects cleaning fluid to the outer side surface of the FOUP main body 20 and the FOUP cover 30; and an inner cleaning fluid injection part 640-2, which injects cleaning fluid to the FOUP main body 20 spray cleaning fluid on the inside of the .

In the external cleaning fluid ejection portion 640-1, a plurality of nozzles may be provided at upper and lower positions, and the plurality of nozzles are provided around the outer side of the FOUP main body 20 while ejecting the cleaning fluid toward the outer side surface of the FOUP main body 20. Cleaning fluid is sprayed towards the FOUP cover 30 .

The inner cleaning fluid ejection portion 640 - 2 is provided on the seating portion 611 so as to be located inside the FOUP main body 20 , so as to eject the cleaning fluid toward the inner side of the FOUP main body 20 .

In addition, the mounting portion 611 on which the FOUP main body 20 is mounted is rotatable by the driving of the motor 670 , and the FOUP cover supporting portion 621 which supports the FOUP cover 30 is also provided rotatably by the driving of the motor 623 .

Referring to FIG. 4 , a plurality of nozzles for spraying cleaning fluid may be formed in the outer cleaning fluid spraying part 640 - 1 at intervals up and down, and the plurality of nozzles are arranged in a manner close to the outer surface of the FOUP main body 20 , and may be It is formed so that each length and injection angle may differ. Also, the FOUP main body 20 is rotatably provided in the cleaning chamber 600 , and the plurality of nozzles may be formed obliquely to spray cleaning fluid in a direction opposite to the rotation direction of the FOUP main body 20 . The angle at which the nozzle is inclined may be formed to have an inclination in the range of 30° to 40° based on a line connecting the nozzle and the center of the FOUP body 20 .

According to the configuration as described above, when cleaning the FOUP main body 20 and the FOUP cover 30 , the external cleaning fluid ejection portion 640 - 1 ejects in the direction opposite to the rotation direction of the FOUP main body 20 at a position close to the outer surface of the rotating FOUP main body 20 . cleaning fluid, so the cleaning efficiency of the FOUP body 20 can be improved.

As an example, the cleaning fluid sprayed by the external cleaning fluid spraying part 640-1 may be hot deionized water, and the cleaning fluid sprayed by the internal cleaning fluid spraying part 640-2 may be steam (Steam). In addition, compressed dry air CDA may be mixed with the hot deionized water and steam to provide.

By supplying the mixed fluid of hot deionized water and compressed dry air to the external cleaning fluid injection part 640 - 1 as described above, high-temperature bubbled and micronized water particles can finely permeate the outer surface of the FOUP main body 20 and The FOUP cover 30 can improve the cleaning power and shorten the drying time, and increase the pressure of the injection, so that the cleaning efficiency can be improved.

In addition, by supplying a mixed fluid of steam and compressed dry air to the internal cleaning fluid ejection portion 640-2, the steam that has been finer than that of hot deionized water can be made finer without dead space in the entire inner surface area of the FOUP body 20. It penetrates to the ground, so that the cleaning power can be further improved.

In addition, the cleaning chamber 600 is equipped with an air supply unit 650 that sprays compressed dry air for drying the FOUP main body 20 and the FOUP cover 30 that have been cleaned.

The air supply part 650 includes: an external air supply part 650-1, which sprays compressed dry air to the outer side of the FOUP main body 20; and an internal air supply part 650-2, which sprays compressed dry air to the inner side of the FOUP main body 20 .

In the outside air supply part 650-1, a plurality of nozzles for spraying compressed dry air are formed at intervals up and down, and the plurality of nozzles are close to the FOUP, as a configuration similar to that of the above-mentioned external cleaning fluid spraying part 640-1. The outer surface of the main body 20 is arranged and formed so that the respective lengths and injection angles are different. Also, the plurality of nozzles may be formed obliquely so as to spray compressed dry air in a direction opposite to the direction in which the FOUP main body 20 rotates. The angle of the inclination of the nozzle may be formed to have an inclination ranging from 30° to 40° based on a line connecting the nozzle and the center of the FOUP body 20 .

According to the configuration as described above, when drying the FOUP main body 20, the compressed dry air is injected in the direction opposite to the direction in which the FOUP main body 20 rotates at a position close to the outer surface of the rotating FOUP main body 20, so that the FOUP main body 20 can be improved. Drying efficiency of the main body 20 and the FOUP cover 30 .

In addition, the air supply part 650 may further include: an upper air supply part 650 - 3 , which is located between the FOUP main body 20 and the FOUP cover 30 inside the cleaning chamber 600 and is equipped with an air cylinder 651 capable of The FOUP main body 20 and the FOUP cover 30 which have been cleaned are sprayed with compressed dry air by being driven and moved back and forth. By configuring the upper air supply portion 650-3 to be movable back and forth, as shown in FIG. 4, the moisture accumulated on the upper surface of the FOUP main body 20 with the opening portion facing downward can be effectively dried and removed, Furthermore, the moisture remaining in the entire area of the FOUP cover 30 can be effectively dried and removed.

In addition, referring to FIGS. 4 to 8 , the FOUP main body 20 is equipped with a vent pipe nozzle 21 for purging the foamed porous material inside the FOUP main body 20 , and the cleaning chamber 600 is equipped with a nozzle 21 for cleaning the FOUP main body 20 after the cleaning of the FOUP main body 20 is completed. A compressed dry air supply part 680 for injecting compressed dry air into the vent pipe nozzle 21 .

The compressed dry air supply part 680 is equipped to be movable back and forth so as to be connected to or disconnected from one side end of the air pipe nozzle 21 . Therefore, the moisture remaining in the vent pipe nozzle 21 that has not been dried by the drying process performed by the compressed dry air injection by the above-described air supply unit 650 will be directed by the compressed dry air supply unit 680 . Drying is performed again by injecting compressed dry air inside the vent pipe nozzle 21 .

On one side of the FOUP main body 20 , first ports 20 a and 20 b to which the ends of the vent pipe nozzles 21 provided as a pair are connected, respectively, are formed on one side, and a second port 20 c that communicates with the inside of the FOUP main body 20 is formed. , 20d are formed on the other side.

In the substrate processing step, the first ports 20a, 20b and the second ports 20c, 20d are used to dry the inside of the FOUP 10 in a stocker in which the FOUP 10 stands by in a step before the substrate is accommodated in the FOUP 10. It can function as a connection port for inflow and outflow of compressed dry air.

The compressed dry air supply part 680 includes: first nozzles 682: 682-1, 682-2, supplying compressed dry air to the first ports 20a, 20b; second nozzles 684: 684-1, 684-2, Compressed dry air is supplied to the second ports 20c, 20d. Filters 22a, 22b, 22c, 22d may be provided on the insides of the first ports 20a, 20b and the second ports 20c, 20d, respectively, which absorb the cleaning fluid during cleaning of the FOUP body 20. 22a, 22b, 22c, 22d can be quickly dried by compressing drying air.

8 , the compressed drying air supply part 680 includes: first supply pipes 681: 681-1, 681-2, supplying compressed drying air to the first nozzles 682: 682-1, 682-2 along the lateral direction Equipped with; the second supply pipe 683: 683-1, 683-2 communicates with the first supply pipe 681: 681-1, 681-2 and supplies the second nozzle 684: 684-1, 684-2 Compress the dry air and equip it longitudinally; and move the cylinder 685 back and forth to move the first supply pipes 681: 681-1, 681-2 and the second supply pipes 683: 683-1, 683-2 forward or backward.

The vent pipe nozzles 21 may be provided in multiples spaced on both sides inside the FOUP main body 20 , and the first ports 20 a , 20 b and the second ports 20 c , 20 d face two on one side of the FOUP main body 20 . The first supply pipes 681 : 681-1 , 681-2 equipped with the first nozzles 682 : 682-1 , 682-2 and equipped with the second nozzles 684 : The second supply pipes 683 of 684-1 and 684-2: 683-1 and 683-2 are provided in plural by being spaced apart on both sides, respectively.

The plurality of first supply pipes 681: 681-1, 681-2 may be supported by the first supply pipe support member 686, and the plurality of second supply pipes 683: 683-1, 683-2 are supported by the second supply pipes The support members 689-1 and 689-2 support. A moving block 687 is coupled to the first supply pipe support member 686 , and the moving block 687 is connected to the front and rear moving cylinder 685 to move back and forth by the driving of the front and rear moving cylinder 685 . The forward and backward moving cylinder 685 can be arranged and fixed on the fixed frame 688 .

A pad 682a may be combined with the first nozzle 682: 682-1, 682-2 and the second nozzle 684: 684-1, 684-2, and the pad 682a is in close contact with the first port 20a, 20b and the outer sides of the FOUP body 20 of the second ports 20c, 20d are kept airtight. As an embodiment, the pad 682a may be formed of silicon material.

9 , the cleaning chamber 600 is equipped with: a stopper 690 for supporting one side of the FOUP main body 20 so that the FOUP main body 20 will not be sprayed from the compressed dry air supply part 680 The compressed drying air is pushed to one side and moved.

The stopper 690 may include: a rotating cylinder 691, which is driven to rotate in two directions; and shafts 693: 693-1, 693-2, which are connected to the cylinder driving shafts 692-1, 692-2 of the rotating cylinder 691.

If the shafts 693 : 693-1 and 693-2 are rotated in one direction by the rotational driving of the rotary cylinder 691 in one direction, the ends of the shafts 693 : 693-1 and 693-2 are connected to the One side surface of the FOUP main body 20 is in contact with and supports the FOUP main body 20. If the shafts 693: 693-1 and 693-2 are rotated in the opposite directions by the reverse rotation driving of the rotating cylinder 691, the shafts 693: 693-1 and 693-2 693: The ends of 693-1 and 693-2 are separated from one side surface of the FOUP main body 20 to release the state of supporting the FOUP main body 20 .

The cylinder driving shafts 692-1, 692-2 may be equipped to protrude toward both sides of the rotating cylinder 691, and the shafts 693: 693-1, 693-2 are respectively formed with protruding to the two sides. A pair of shafts 693 : 693-1 and 693-2 are connected to the cylinder drive shafts 692-1 and 692-2. The pair of shafts 693 : 693 - 1 , 693 - 2 may be supported by the shaft support member 694 .

As a constitution for minimizing wear caused by friction when in contact with one side surface of the FOUP body 20, the ends of the shafts 693: 693-1, 693-2 may be constituted in a curved shape, and the shaft 693: The outer surfaces of the ends of 693-1 and 693-2 are treated with a wear-resistant coating. As an embodiment, the wear-resistant coating may be formed of polytetrafluoroethylene (PTFE: Poly-tetrafluoroethylene).

When cleaning by the cleaning fluid ejection part 640 and drying by the air supply part 650 are performed, the seating part 611 and the FOUP main body 20 arranged above the seating part 611 are rotated by the driving of the motor 670, which compresses the drying air supply part 680 and the stopper 690 are arranged spaced apart from the outer side surface of the FOUP main body 20 . In addition, when drying is performed by the vent pipe nozzle 21 of the compressed drying air supply part 680, the driving of the motor 670 is stopped, and the setting part 611 and the FOUP main body 20 arranged on the setting part 611 are not rotated. The compressed dry air supply part 680 and the stopper 690 are arranged so as to be in close contact with the outer surface of the FOUP main body 20 while maintaining the static state in the original position.

In addition, the cleaning chamber 600 is equipped with an ultraviolet lamp 660 for irradiating ultraviolet rays for drying the cleaned FOUP main body 20 and the FOUP cover 30 . The ultraviolet lamp 660 includes: an outer ultraviolet lamp 660-1, which irradiates ultraviolet rays to the outer side of the FOUP main body 20; and an inner ultraviolet lamp 660-2, which irradiates the inner side of the FOUP main body 20 with ultraviolet rays.

10 to 15 , when drying the vent pipe nozzle 21 , first, as shown in FIG. 12 , the shaft 693 is driven in one direction by the rotation cylinder 691 of the stopper 690 to rotate in one direction, thereby supporting the FOUP One side of the main body 20 . Next, as shown in FIG. 13 , the first nozzle 682 and the second nozzle 684 are moved forward by the forward driving of the forward and backward moving cylinder 685 of the compressed drying air supply part 680 so as to be connected with the first ports 20a, 20b and the second nozzles, respectively. The ports 20c, 20d are connected, and as shown in Fig. 14, compressed dry air CDA is supplied.

When the drying of the vent pipe nozzle 21 is completed, as shown in FIG. 15 , the first nozzle 682 and the second nozzle 684 are moved backward by the backward driving of the forward and backward movement cylinder 685 of the compressed drying air supply unit 680, so that the first nozzle 682 and the second nozzle 684 are moved backward from the first The ports 20a, 20b and the second ports 20c, 20d are disconnected, and the shaft 693 is rotated in the reverse direction by the reverse direction driving of the rotation cylinder 691 of the stopper 690, thereby releasing the state of supporting one side surface of the FOUP main body 20.

As described above, the compressed dry air supply part 680 can be moved back and forth so that the first nozzles 682: 682-1, 682-2 and the second nozzles 684: 684-1, 684-2 are connected to the nozzles formed in the FOUP main body 20 at the same time. The first ports 20a, 20b and the second ports 20c, 20d on one side further supply the compressed dry air CDA, thereby improving the drying efficiency of the vent pipe nozzle 21 and the inside of the FOUP main body 20.

And, in order to support one side of the FOUP body 20 and prevent the FOUP body 20 from being pushed to one side by the pressure generated by the supply of compressed dry air or nitrogen for drying of the FOUP body 20, the shaft 693 of the stopper 690: 693-1 and 693-2 are configured to be rotationally driven, so that the drying operation of the FOUP main body 20 can be performed smoothly in a state in which the FOUP main body 20 is stably fixed and supported.

After the cleaning and drying are completed in the cleaning chamber 600 , the cleaning chamber cover 620 and the FOUP cover 30 supported by the cleaning chamber cover 620 are lifted up by the driving of the elevating driving part 631 , and at the same time, the cleaning chamber cover 620 and the cleaning The lift portion 634 connected to the chamber cover 620 moves upward, receives the FOUP main body 20 placed on the placement portion 611, and moves to the upper portion of the cleaning chamber main body 610, thereby being in a state where it can be taken out.

As described above, the cleaning chamber cover 620 and the elevating part 634 are configured to elevate together by the driving of the same elevating driving part 631 , so that the carrying-in and carrying-out cleaning of the FOUP main body 20 and the FOUP cover 30 can be carried out easily, quickly and smoothly. Operation of the chamber 600 .

When the FOUP main body 20 moves to the upper part of the cleaning chamber main body 610 , the FOUP cover 30 and the FOUP main body 20 are transferred to the vacuum chamber 700 by the robot 500 .

16 , the vacuum chamber 700 includes a vacuum chamber main body 710 that accommodates the FOUP main body 20 and the FOUP cover 30 in a separated state.

The FOUP main body 20 is seated on a seat portion 710 a provided in the lower part of the vacuum chamber main body 710 , and the FOUP cover 30 is seated on a support part 711 provided in the upper part of the vacuum chamber main body 710 .

Connected to the vacuum chamber 700 are: a nitrogen gas supply line 713 for supplying nitrogen gas to the inside of the vacuum chamber 700; and a vacuum line 712 for sucking and discharging the fluid inside the vacuum chamber 700 to the outside by vacuum. The foreign matter containing moisture remaining in the FOUP main body 20 and the FOUP cover 30 is separated from the FOUP main body 20 and the FOUP cover 30 by the nitrogen gas supplied through the nitrogen gas supply line 713 and sucked through the vacuum line 712 and then discharged to the outside.

In addition, the vacuum chamber 700 is equipped with a nitrogen gas supply part 720 for injecting nitrogen gas into the vent pipe nozzle 21 provided inside the FOUP main body 20 . Therefore, the moisture remaining in the vent pipe nozzle 21 due to the above-mentioned compressed drying air supply part 680 of the cleaning chamber 600 not being dried can be dried and removed by nitrogen gas injected through the nitrogen gas supply part 720 of the vacuum chamber 700 .

The nitrogen gas supply part 720 is equipped to be movable back and forth to be connected to or disconnected from one side end of the snorkel nozzle 21 .

The nitrogen gas supply part 720 may have the same structure as the above-mentioned compressed dry air supply part 680 provided in the cleaning chamber 600, and may include a first nitrogen gas supply pipe 721, a first nitrogen gas nozzle 722, and a second nitrogen gas supply pipe 723 , the second nitrogen gas nozzle 724 , the second forward and backward moving cylinder 725 , the first nitrogen gas supply pipe support member 726 , the second moving block 727 , the second fixed frame 728 , and the second nitrogen gas supply pipe support member 729 .

In addition, the vacuum chamber 700 is equipped with a second stopper 730 for supporting one side surface of the FOUP main body 20 so that the FOUP main body 20 is not pushed toward the FOUP main body 20 by the nitrogen gas injected from the nitrogen gas supply part 720 . move to one side.

The second stopper 730 may have the same structure as the above-described stopper 690 provided in the cleaning chamber 600, and may include a second rotary cylinder 731, a second cylinder drive shaft 732, a second shaft 733, And it is comprised so that the abrasion resistant coating 733a may be processed on the edge part of the said 2nd shaft 733.

After the vacuum chamber 700 completes the discharge of moisture and foreign matter and the drying of the vent pipe nozzle 21 , the FOUP main body 20 and the FOUP cover 30 are transported to the standby unit 300 by the robot 500 . In this case, when another FOUP is arranged in the standby unit 300 , the robot 500 can transport the FOUP main body 20 and the FOUP cover 30 to the buffer unit 800 for temporary storage.

After that, when the FOUP main body 20 and the FOUP cover 30 previously in the standby section 300 are unloaded by the loading and unloading section 200, the FOUP cover 30 and the FOUP main body 20 temporarily stored in the buffer section 800 are sequentially transported to the standby section 200. The FOUP body 20 is placed on the standby board 310 of the unit 300 in a state where the FOUP body 20 can be locked on the FOUP cover 30 .

After that, the locker is locked by the locking and unlocking unit provided in the standby portion 300 , so that the FOUP main body 20 and the FOUP cover 30 are integrated.

By the locking of the locker, the FOUP 10 in which the FOUP main body 20 and the FOUP cover 30 are combined is reversed by the robot 500 to be placed flat with the FOUP cover 30 facing one side, and then placed on the standby plate 310 again. . Then, when the lift cylinder 320 provided in the standby unit 300 is raised to lift the FOUP 10 to the upper side of the standby plate 310 , the lift cylinder 320 and the FOUP 10 supported by the lift cylinder 320 are transferred to the loading and unloading section by the drive of the transfer unit 400 . On the upper side of the support plate 210 of the 200 , the FOUP 10 supported by the lift cylinder 320 is moved to the support plate 210 by the downward movement of the lift cylinder 320 and then unloaded.

As described above, the present invention is not limited to the above-mentioned embodiments, and those with basic knowledge in the technical field to which the present invention pertains can implement obvious modifications without departing from the technical idea of the present invention claimed in the claims. implementation, such modified implementations are within the scope of the present invention.

1: FOUP cleaning device 10:FOUP 20: FOUP main body 20a, 20b: the first port 20c, 20d: Second port 22a, 22b, 22c, 22d: Filters 21: Snorkel nozzle 30:FOUP cover 100: Craft Room 200: Loading and unloading department 210: Support plate 300: Standby Department 310: Standby board 320: Lifting cylinder 400: Transfer unit 500: Robot 510: Gripper 600: Clean the chamber 610: Clean the chamber body 611: Placement Department 620: Clean the chamber cover 621:FOUP cover support 622: Fixtures 623: Motor 630: Lifting unit 631: Lifting drive part 632: Connecting parts 633: Support Department 634: Lifting Department 634a: Through port 640: Clean the fluid jet 640-1: External Cleaning Fluid Jet 640-2: Internal Cleaning Fluid Jet 650: Air Supply Department 650-1: External Air Supply Section 650-2: Internal Air Supply Section 650-3: Upper Air Supply 651: Cylinder 660: UV Lamp 660-1: External UV Lamp 660-2: Internal UV Lamp 670: Motor 680: Compressed dry air supply 681, 681-1, 681-2: First supply pipe 682, 682-1, 682-2: First Nozzle 682a: Pad 683, 683-1, 683-2: Second supply pipe 684, 684-1, 684-2: Second nozzle 685: Moving the cylinder forward and backward 686: First supply pipe support part 687: Move Block 688: Fixed Frame 689, 689-1, 689-2: Second supply pipe support member 690: Stopper 691: Rotary cylinder 692-1, 692-2: Cylinder drive shaft 693, 693-1, 693-2: Shaft 693a: Abrasion Resistant Coatings 694: Shaft Support Parts 695: Fixed parts 700: Vacuum Chamber 710: Vacuum chamber body 710a: Placement Department 711: Support Department 712: Vacuum Line 713: Nitrogen Supply Line 720: Nitrogen Supply Department 721: First nitrogen supply pipe 722: First nitrogen nozzle 723: Second nitrogen supply pipe 724: Second Nitrogen Nozzle 725: Second front and rear moving cylinder 726: First nitrogen supply pipe support part 727: Second moving block 728: Second fixed frame 729: Second nitrogen supply pipe support part 730: Second stop 731: Second rotary cylinder 732: Second cylinder drive shaft 733: Second axis 733a: Second Abrasion Resistant Coating 800: Buffer 910: Common parts 920: Steam unit CDA: Compressed Dry Air

FIG. 1 is a side view schematically showing the configuration of the FOUP cleaning apparatus of the present invention. Fig. 2 is a plan view schematically showing the configuration of the FOUP cleaning apparatus of the present invention. It is a figure for demonstrating the process of moving a FOUP from a loading and unloading part to a standby part in the FOUP cleaning apparatus of this invention. 4 is a longitudinal cross-sectional view schematically showing the configuration of a cleaning chamber provided in the FOUP cleaning apparatus of the present invention. 5 is a cross-sectional view showing the internal structure of a cleaning chamber equipped with the FOUP cleaning apparatus of the present invention. FIG. 6 is a perspective view showing a state in which a compressed drying air supply and stoppers for drying the vent pipe nozzles provided inside the FOUP are provided on both sides of the FOUP main body. 7 is a right side view showing the main body of the FOUP to which compressed dry air is supplied. Fig. 8 is a perspective view showing the compressed dry air supply part shown in Fig. 6 from another direction. FIG. 9 is a perspective view of the stopper shown in FIG. 6 . FIG. 10 is a right side view of FIG. 6 . FIG. 11 is a cross-sectional view according to line A-A of FIG. 10 . 12 to 15 are diagrams showing the operation states of the compressed drying air supply part and the stopper in the process of drying the air duct nozzle. 16 is a longitudinal cross-sectional view schematically showing a configuration of a vacuum chamber provided in the FOUP cleaning apparatus of the present invention.

20: FOUP main body

21: Snorkel nozzle

30:FOUP cover

600: Clean the chamber

610: Clean the chamber body

611: Placement Department

620: Clean the chamber cover

621:FOUP cover support

622: Fixtures

623: Motor

630: Lifting unit

631: Lifting drive part

632: Connecting parts

633: Support Department

640: Clean the fluid jet

640-1: External Cleaning Fluid Jet

640-2: Internal Cleaning Fluid Jet

650: Air Supply Department

650-3: Upper Air Supply

651: Cylinder

660: UV Lamp

660-1: External UV Lamp

660-2: Internal UV Lamp

670: Motor

680: Compressed dry air supply

681: First Supply Tube

682: First Nozzle

683: Second Supply Pipe

684: Second Nozzle

685: Moving the cylinder forward and backward

690: Stopper

691: Rotary cylinder

693: Shaft

Claims (24)

A front-opening wafer transfer box cleaning device for cleaning a front-opening wafer transfer box body and a front-opening wafer transfer box cover. The front-opening wafer transfer box cleaning device is characterized in that: The front-opening wafer transfer box main body is equipped with a vent pipe nozzle for blowing the foamed porous material inside the front-opening wafer transfer box main body, including cleaning the front-opening wafer transfer box main body and the front-opening wafer transfer box main body with cleaning fluid. A cleaning chamber for the pod cover, which is equipped with a compressed dry air supply that injects compressed dry air into the air duct nozzle after cleaning of the front-loading pod body is completed, wherein the compressed dry air The drying air supply is equipped to move back and forth to connect to or unconnect a side end of the air duct nozzle, wherein the first port of the end of the air duct nozzle is connected to the side of the front-opening wafer transfer cassette body formed on one side, and a second port communicating with the inside of the front-opening FOIF main body is formed on the other side, the compressed drying air supply part includes: a first nozzle for supplying compressed drying air to the first port; and The second nozzle supplies compressed dry air to the second port. The front-opening wafer transfer cassette cleaning device according to claim 1, wherein a filter is provided on the inner side of the first port and the second port, respectively, and the filter is dried by the compressed drying air. The front-loading type wafer transfer cassette cleaning device according to claim 1, wherein the compressed drying air supply part comprises: a first supply pipe for supplying compressed drying air to the first nozzle, and equipped in a lateral direction; A second supply pipe is connected to the first supply pipe to supply compressed dry air to the second nozzle, and is arranged in the longitudinal direction; and a cylinder is moved back and forth to move the first supply pipe and the second supply pipe forward or backward. The front-opening type wafer transfer pod cleaning device according to claim 3, wherein the vent pipe nozzles are provided in a plurality of spaced to both sides inside the front-opening type wafer transfer pod main body, the first port and the second Two ports are provided in plural on one side of the front-opening wafer transfer cassette body facing both sides, the first supply pipe equipped with the first nozzle and the second supply pipe equipped with the second nozzle They are arranged in plural by being separated from each other on both sides. The front-opening wafer transfer cassette cleaning device according to claim 4, further comprising: a first supply pipe support member, supporting the first supply pipes and connected to the front and rear movement cylinder; and a second supply pipe support member, supporting the second supply pipes. The front opening type wafer transfer cassette cleaning device according to claim 1, wherein a pad is combined with the first nozzle and the second nozzle, and the pad is closely attached to the front opening where the first port and the second port are formed The outer side of the main body of the wafer transfer cassette is kept airtight. The front-loading wafer transfer pod cleaning device according to claim 6, wherein the pad is made of silicon material. The front-opening wafer transfer cassette cleaning device according to claim 1, wherein the cleaning chamber is equipped with a stopper for supporting a side surface of the front-opening wafer transfer box main body, so that the front-opening wafer transfer box is The transport box main body is not moved by being pushed to one side by the compressed drying air injected from the compressed drying air supply part. The front-opening wafer transfer pod cleaning device according to claim 1, wherein the cleaning chamber is equipped with: an external cleaning fluid ejection portion directed to the outer side of the front-opening wafer transfer box main body and the front-opening wafer transfer box the cover sprays cleaning fluid; and the inner cleaning fluid spraying part sprays cleaning fluid to the inner side surface of the front-opening type wafer transfer cassette main body. The front-loading type wafer transfer cassette cleaning apparatus according to claim 9, wherein a plurality of nozzles for ejecting cleaning fluid are formed in the outer cleaning fluid ejecting portion at intervals above and below, and the nozzles are formed to have different lengths and ejection angles. , so that the nozzles are arranged close to the outer side surface of the main body of the front-opening wafer transfer cassette. The front-opening wafer transfer pod cleaning device according to claim 10, wherein the front-opening wafer transfer box main body is rotatably equipped in the cleaning chamber, and the nozzles are formed obliquely so as to be directed toward the front-opening wafer transfer box. The cleaning fluid is sprayed in a direction opposite to the direction in which the main body rotates. The front-opening wafer transfer pod cleaning device according to claim 1, wherein the cleaning chamber is equipped with an air supply unit for spraying the front-opening wafer transfer box main body and the front-opening wafer transfer box after cleaning. Cover with compressed dry air for drying. The front-opening pod cleaning device according to claim 12, wherein the air supply part comprises: an external air supply part that sprays compressed dry air to the outer side surface of the front-opening pod main body; and an internal air supply part , and spray compressed dry air to the inner side of the main body of the front-opening wafer transfer box. The front-loading type wafer transfer cassette cleaning apparatus according to claim 13, wherein a plurality of nozzles for spraying compressed dry air are formed in the outside air supply part at intervals up and down, and the spray nozzles The nozzles are formed so that the respective lengths and ejection angles are different so that the nozzles are arranged close to the outer side surface of the front-opening wafer transfer cassette main body. The front-opening wafer transfer pod cleaning device according to claim 14, wherein the front-opening wafer transfer box main body is rotatably equipped in the cleaning chamber, and the nozzles are formed obliquely so as to be directed toward the front-opening wafer transfer box. The compressed dry air is sprayed in the direction opposite to the direction in which the main body rotates. The front-opening wafer transfer pod cleaning device according to claim 13, wherein the air supply part further comprises an upper air supply part, which is located in the front-opening wafer transfer box main body and the front-opening wafer transfer inside the cleaning chamber between the box covers, and is equipped to move back and forth, so as to spray compressed dry air to the cleaned front-opening wafer transfer box body and the front-opening wafer transfer box cover. The front-opening wafer transfer pod cleaning device according to claim 1, wherein the cleaning chamber comprises: a cleaning chamber body, the front-opening wafer transfer pod body is accommodated inside for cleaning; a cleaning chamber cover, The upper part of the cleaning chamber main body is opened and closed, and the front-opening wafer transfer cassette cover is supported for cleaning. The front-opening wafer transfer pod cleaning device according to claim 17, wherein the cleaning chamber main body comprises: a placement portion, which is provided at the lower portion of the cleaning chamber main body, to accommodate the front-opening wafer transfer box main body; and a lifter that lifts and lowers between the upper and lower parts of the cleaning chamber body, and transfers the front-loading pod body to the seating part or receives the front-loading pod body from the seating part to make The main body of the front-opening wafer transfer cassette is lifted and lowered, wherein the lift portion is connected to the cleaning chamber cover through a support portion, and the lift portion and the cleaning chamber cover are lifted and lowered together by the same lift drive portion. The front-opening wafer transfer pod cleaning device according to claim 1, wherein the cleaning chamber is equipped with an ultraviolet lamp for illuminating the front-opening wafer transfer box main body and the front-opening wafer transfer box cover after cleaning. UV for drying. The front-opening type wafer transfer pod cleaning device according to claim 19, wherein the ultraviolet lamp comprises: an external ultraviolet lamp, which irradiates ultraviolet rays to the outer side surface of the front-opening type wafer transfer pod main body; and an internal ultraviolet lamp, which irradiates the front-opening type The inner surface of the wafer cassette body is irradiated with ultraviolet rays. The front-opening wafer transfer pod cleaning device according to claim 1, further comprising: a vacuum chamber, so that the front-opening wafer transfer box main body and the front-opening wafer transfer box cover cleaned in the cleaning chamber are conveyed , and connected to the vacuum chamber: a nitrogen gas supply line for supplying nitrogen gas to the inside of the vacuum chamber; and a vacuum line for sucking in the fluid inside the vacuum chamber and discharging it to the outside. The front-loading FOFO cleaning apparatus according to claim 21, wherein the vacuum chamber is provided with a nitrogen gas supply for injecting nitrogen gas into the vent pipe nozzle. The front-opening wafer transfer cassette cleaning device according to claim 22, wherein the nitrogen gas supply part is configured to be movable back and forth to be connected to or disconnected from one side end of the vent pipe nozzle. The cleaning device for a front-opening pod according to claim 23, wherein the vacuum chamber is provided with a second stopper for supporting a side surface of the front-opening pod body, so that the front-opening pod is The FOUP main body is not moved by being pushed to one side by the nitrogen gas ejected from the nitrogen gas supply.

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