TW202116641A - Foup cleaning device - Google Patents

Abstract

An object of the present invention is to provide a front opening unified pod (FOUP) cleaning device which can improve the cleaning and drying efficiency of the main body of a FOUP and a cover of the FOUP, and improve the drying efficiency of a purge nozzle. The present invention for achieving this object is a FOUP cleaning device including an FOUP main body and an FOUP cover, which is characterized in that the FOUP main body is equipped with a purge nozzle made of foamed porous material and used for purging the interior of the FOUP main body, including a cleaning chamber for cleaning the FOUP main body and the FOUP cover by using a cleaning fluid, wherein the cleaning chamber is equipped with a compressed dry air supply part which injects compressed dry air into the purge nozzle after the cleaning of the FOUP main body is completed.

Description

Front opening type wafer transfer box cleaning device

The present invention relates to a front-opening wafer transfer box cleaning device, in particular to a front-opening wafer transfer box cleaning device that improves the cleaning and drying efficiency of the front-opening wafer transfer box used for storage and transportation of substrates.

The semiconductor manufacturing process goes through a series of process equipment that uses a variety of methods to process semiconductor substrates. Therefore, when storing and transporting semiconductor substrates, care must be taken to avoid damage to external impacts, and management must be performed to prevent the surface of the substrate from being affected by moisture, Contamination by impurities such as dust and various organic matters.

Therefore, a separate storage container (Front opening unified pod (FOUP), hereinafter referred to as "FOUP") is used when storing and transporting semiconductor substrates.

Since a high-precision semiconductor substrate is housed in the FOUP used for the above-mentioned purposes, the FOUP needs management for maintaining high cleanliness. For this reason, the FOUP is cleaned and dried periodically in a FOUP cleaning device.

As a prior art related to such a FOUP cleaning device, Korean Published Patent No. 10-2013-0095028 and Korean Granted Patent No. 10-1173987 disclose a technique of spraying a cleaning liquid onto the surface of the FOUP to clean the FOUP.

In addition, as described in Korean Patent Publication No. 10-2015-0078657, a foamed porous snorkel nozzle (Snorkel nozzle) used to purge the substrate contained in the FOUP is provided inside the FOUP, but it has the following Problem: It takes a lot of time to completely dry the snorkel nozzle that has absorbed the cleaning fluid during the FOUP cleaning process to restore its original performance. The FOUP can no longer be used for the time required for the snorkel nozzle to completely dry, resulting in process loss . Therefore, it is necessary to develop a FOUP cleaning device that can quickly dry the snorkel nozzle after cleaning the FOUP, thereby shortening the time required to restore the original performance.

The present invention is proposed in order to solve all the above-mentioned problems, and its purpose is to provide a FOUP cleaning device that can improve the cleaning and drying efficiency of the FOUP main body and the FOUP cover and the drying efficiency of the vent pipe nozzle.

The FOUP cleaning device of the present invention used to achieve the above-mentioned purpose is used to clean a FOUP including a FOUP body and a FOUP cover. The FOUP cleaning device is characterized in that the FOUP body is equipped with a device for purging the FOUP. The vent pipe nozzle made of foamed porous material inside the main body includes a cleaning chamber for cleaning the FOUP main body and the FOUP cover with a cleaning fluid, and the cleaning chamber is equipped with the cleaning chamber after the cleaning of the FOUP main body is completed. The compressed dry air supply part injects compressed dry air into the vent nozzle.

The compressed dry air supply part may be equipped to be movable back and forth to be connected to or disconnected from one side end of the vent pipe nozzle.

On one side of the FOUP body, a first port connecting the end of the vent pipe nozzle may be formed on one side, and a second port communicating with the inside of the FOUP body may be formed on the other side. The air supply part includes: a first nozzle that supplies compressed dry air to the first port; and a second nozzle that supplies compressed dry air to the second port.

A filter may be respectively provided inside the first port and the second port, and the filter is dried by the compressed dry air.

The compressed dry air supply unit may include: a first supply pipe, which supplies compressed dry air to the first nozzle and is arranged in a lateral direction; and a second supply pipe, which communicates with the first supply pipe and supplies the compressed dry air to the second nozzle. Supply compressed dry air and equip it in the longitudinal direction; and move the cylinder back and forth to make the first supply pipe and the second supply pipe move forward or backward.

The snorkel nozzle may be provided in a plurality of spaced apart on both sides inside the FOUP main body, and the first port and the second port may be spaced apart on both sides on one side of the FOUP main body. The first supply pipe equipped with the first nozzle and the second supply pipe equipped with the second nozzle are respectively spaced at two sides and equipped in multiples.

The FOUP cleaning device may further include: a first supply pipe support member that supports a plurality of the first supply pipes and is connected to the front and rear moving cylinder; and a second supply pipe support member that supports a plurality of the second supply pipes tube.

A pad may be combined with the first nozzle and the second nozzle, and the pad is tightly attached to the outer surface of the FOUP body where the first port and the second port are formed to maintain airtightness.

The pad can be made of silicon material.

The cleaning chamber may be equipped with: a stopper for supporting one side of the FOUP body so that the FOUP body will not be pushed by the compressed dry air sprayed from the compressed dry air supply part Move to the side.

The cleaning chamber may be equipped with: an external cleaning fluid spraying part to spray cleaning fluid to the outer surface of the FOUP main body and the FOUP cover; and an internal cleaning fluid spraying part to spray cleaning fluid to the inner surface of the FOUP main body .

A plurality of nozzles for spraying a cleaning fluid may be formed vertically in the external cleaning fluid spraying portion, and the plurality of nozzles are formed to have different lengths and spray angles, so that the plurality of nozzles are close to the FOUP main body Arranged on the outer side.

The FOUP main body may be rotatably equipped in the cleaning chamber, and the plurality of nozzles are formed obliquely to spray cleaning fluid in a direction opposite to the direction in which the FOUP main body rotates.

The cleaning chamber may be equipped with an air supply part that sprays compressed dry air for drying the cleaned FOUP main body and FOUP cover.

The air supply part may include: an external air supply part which sprays compressed dry air to the outer side surface of the FOUP body; and an internal air supply part which sprays compressed dry air to the inner side surface of the FOUP body.

In the external air supply part, a plurality of nozzles for spraying compressed dry air may be formed up and down, and the plurality of nozzles are formed to have different lengths and spray angles, so that the plurality of nozzles are close to the FOUP The outer side of the main body is arranged.

The FOUP main body may be rotatably equipped in the cleaning chamber, and the plurality of nozzles are formed obliquely to spray compressed dry air in a direction opposite to the direction in which the FOUP main body rotates.

The air supply part may further include: an upper air supply part, located between the FOUP main body and the FOUP cover inside the cleaning chamber, and is equipped to be movable back and forth, so as to transfer the cleaned FOUP main body And the FOUP cover sprays compressed dry air.

The cleaning chamber may include: cleaning the chamber body, accommodating the FOUP body inside for cleaning; cleaning the chamber cover, opening and closing the upper part of the cleaning chamber body, and supporting the FOUP cover. Clean treatment.

The cleaning chamber main body may include: a seating part provided at the lower part of the cleaning chamber main body to house the FOUP main body; and a lifting part which lifts and lowers between the upper and lower parts of the cleaning chamber main body , And transfer the FOUP main body to the seating part or receive the FOUP main body from the seating part, so that the FOUP main body is raised and lowered, wherein the lifting part is connected to the cleaning chamber by the supporting part. The chamber cover is connected, and the lifting part and the cleaning chamber cover are lifted and lowered together by the same lifting driving part.

The cleaning chamber may be equipped with an ultraviolet lamp to irradiate ultraviolet rays for drying the cleaned FOUP main body and FOUP cover.

The ultraviolet lamp may include: an external ultraviolet lamp that irradiates ultraviolet rays to the outer surface of the FOUP body; and an internal ultraviolet lamp that irradiates ultraviolet rays to the inner surface of the FOUP body.

The FOUP cleaning device may further include: a vacuum chamber for transporting the FOUP main body and FOUP cover that have been cleaned in the cleaning chamber, and the vacuum chamber is connected with a nitrogen supply line to the vacuum chamber The part supplies nitrogen gas; and a vacuum line, which sucks the fluid inside the vacuum chamber and discharges it to the outside.

The vacuum chamber may be equipped with a nitrogen supply part for injecting nitrogen into the vent pipe nozzle.

The nitrogen supply part may be equipped to be movable forwards and backwards to be connected to one side end of the vent pipe nozzle or disconnected.

The vacuum chamber may be equipped with: a second stopper for supporting one side surface of the FOUP main body so that the FOUP main body will not be pushed toward one side by the nitrogen sprayed from the nitrogen supply part Move sideways.

The FOUP cleaning device according to the present invention is equipped with a compressed dry air supply unit that injects compressed dry air into the snorkel nozzle after cleaning the FOUP body, so that the snorkel nozzle can be dried quickly, so it has the necessary shortening and restoring the original performance. The effect of time.

In addition, the compressed dry air supply unit is moved back and forth so that the first nozzle and the second nozzle are simultaneously connected to the first port and the second port formed on one side of the FOUP main body, and then the compressed dry air is supplied, so that the vent pipe nozzle can be improved. The drying efficiency and the drying efficiency inside the main body of the FOUP.

In addition, compressed dry air is injected into the snorkel nozzle equipped inside the FOUP body that has been cleaned in the cleaning chamber for primary drying, and nitrogen is injected into the snorkel nozzle in the vacuum chamber for secondary drying, so that it can be dried in a short time The vent pipe nozzle made of foamed porous material is completely dried inside.

In addition, the FOUP body is equipped with a stopper for supporting one side of the FOUP body to prevent the FOUP body from being pushed to one side by the compressed dry air used to dry the snorkel nozzle or by the pressure generated by the supply of nitrogen, thereby The snorkel nozzle can be dried stably while the FOUP body is fixedly supported.

In addition, the lengths and spray angles of the multiple nozzles are different, so that during the cleaning and drying process of the cleaning chamber, the FOUP body and the FOUP cover are rotated to cause the cleaning fluid and compressed dry air to affect the FOUP body and the FOUP cover. The entire area is sprayed evenly. At the same time, multiple nozzles spraying cleaning fluid and compressed dry air are arranged close to the outer side of the FOUP body, and multiple nozzles are formed obliquely to spray the cleaning fluid in the direction opposite to the direction in which the FOUP body rotates. , Which can further improve the cleaning and drying efficiency.

In addition, it is configured that the cleaning chamber cover and the lifting part are raised and lowered together by the driving of the same lifting driving part, so that the work of carrying the FOUP main body and the FOUP cover into and out of the cleaning chamber can be carried out easily and smoothly.

Hereinafter, with reference to the drawings, the configuration and function of the preferred embodiment of the present invention will be described in detail.

The FOUP cleaning device 1 of the present invention is a device for cleaning the FOUP 10 composed of a FOUP main body 20 and a FOUP cover 30, and is characterized in that the FOUP main body 20 is equipped with foam for purging the inside of the FOUP main body 20 The vent nozzle 21 is made of porous material, and includes a cleaning chamber 600 for cleaning the FOUP main body 20 and the FOUP cover 30 with a cleaning fluid. The cleaning chamber 600 is equipped with the cleaning chamber 600 after the cleaning of the FOUP main body 20 is completed. The compressed dry air supply part 680 of compressed dry air is injected into the vent nozzle 21.

1 and 2, the FOUP cleaning device 1 of the present invention is a device for cleaning and drying the FOUP 10 used for storing and transferring semiconductor substrates. The FOUP 10 includes: a FOUP body 20 that houses a semiconductor substrate (not shown); and a FOUP cover 30 that opens and closes an opening formed on one side of the FOUP body 20, wherein the FOUP body 20 and the FOUP cover 30 constitute A structure that is separated or combined by a locker (not shown).

The FOUP cleaning device 1 includes: a process chamber 100 for carrying out the transport, cleaning and drying of the FOUP 10; a loading and unloading part 200 for carrying the FOUP 10 into and out of the process chamber 100; a standby part 300 facing One side of the loading and unloading part 200 is provided in the process chamber 100, and the FOUP main body 20 and the FOUP cover 30 are separated or combined with each other; the transfer unit 400 is located between the loading and unloading part 200 and the standby part 300 Transfer the FOUP 10 in between; the robot 500 grasps and transports the FOUP main body 20 and the FOUP cover 30 in the process chamber 100; cleans the chamber 600, and receives the FOUP main body 20 and the FOUP main body 20 and the FOUP cover in the standby part 300 by the robot 500 The FOUP cover 30 is then cleaned with a cleaning fluid and dried; the vacuum chamber 700 receives the cleaned and dried FOUP body 20 and the FOUP cover 30 in the cleaning chamber 600 by the robot 500, and then discharges Foreign matter containing moisture remaining in the FOUP main body 20 and the FOUP cover 30; and a buffer section 800 for carrying out the FOUP main body 20 and the FOUP cover 30 that have been discharged from the vacuum chamber 700 before being transported to the standby section 300 Temporary storage. In addition, one side of the inside of the process chamber 100 may be equipped with: utility 910, equipped with hot deionized water, which is used to supply cleaning fluid used for cleaning and drying the FOUP 10, Compressed dry air (CDA: Compressed dry air), nitrogen (N2), etc.; and the steam unit 920, equipped with equipment for supplying steam used to clean the FOUP 10.

The loading and unloading unit 200 is used to load the FOUP 10 to be cleaned into the process chamber 100 or to carry out the FOUP 10 that has completed the cleaning, drying, and discharge processes in the process chamber 100 to the outside of the process chamber 100 And carry out the unloading (Unloading) composition. 3, the loading and unloading part 200 is equipped with a support plate 210 that allows the FOUP main body 20 to lie sideways and the FOUP cover 30 to be placed on one side.

The standby part 300 is a place where the FOUP 10 transferred from the loading and unloading part 200 by the transfer unit 400 waits before being transferred to the clean chamber 600, and the posture of the FOUP 10 transferred to the standby part 300 is controlled by the robot 500. Switch to the FOUP cover 30 facing downwards. In addition, the standby unit 300 is equipped with a locking and unlocking unit (not shown) for locking or unlocking the locker provided in the FOUP main body 20 and the FOUP cover 30. The locking and unlocking unit may be configured to rotate the locker in one direction or the reverse direction to lock or unlock the locker.

The standby part 300 is equipped with a standby plate 310 for placing the FOUP main body 20 and the FOUP cover 30, and a lifting cylinder 320 to move the standby plate 310 up and down in a vertical direction. The lifting cylinder 320 may be connected to the transfer unit 400 to move back and forth between the loading and unloading part 200 and the standby part 300 by the driving of the transfer unit 400.

The transfer unit 400 is configured to transfer the lifting cylinder 320 back and forth. As an example, it may be formed by a linear motion guide rail.

The process of transferring the FOUP 10 from the loading and unloading unit 200 to the standby unit 300 will be described. If the FOUP 10 is loaded on the support plate 210, the lifting cylinder 320 waiting on the lower side of the support plate 210 moves upward, thereby lifting the FOUP 10 on the support plate 210 to the upper side of the support plate 210. In this state, the lift cylinder 320 and the FOUP 10 move to the standby part 300 side by the driving of the transfer unit 400. If the elevating cylinder 320 and the FOUP 10 are located on the upper side of the standby plate 310 of the standby portion 300, the elevating cylinder 320 moves downward, thereby placing the supported FOUP 10 on the standby plate 310. Next, after the gripper 510 of the robot 500 grips the FOUP 10, the FOUP 10 is rotated so that the FOUP cover 30 faces downward, and then placed on the standby plate 310, and the locker is unlocked by the locking and unlocking unit provided in the standby part 300, Thus, the FOUP main body 20 and the FOUP cover 30 are in a separable state.

If the FOUP main body 20 and the FOUP cover 30 are in a separable state as described above, the FOUP main body 20 and the FOUP cover 30 are sequentially transported to the clean chamber 600 by the robot 500.

4 and 5, the cleaning chamber 600 includes: a cleaning chamber main body 610, which houses the FOUP main body 20 inside for cleaning and drying; a cleaning chamber cover 620, which opens and closes the clean chamber main body The upper part of 610, and supports the FOUP cover 30 for cleaning and drying.

The cleaning chamber main body 610 includes: a seating part 611 arranged at the lower part of the cleaning chamber main body 610 to house the FOUP main body 20; and a lifting part 634 on the upper part of the cleaning chamber main body 610 The FOUP body 20 is moved up and down between and the lower part, and the FOUP main body 20 is transferred to the seating part 611, or the FOUP main body 20 is received from the seating part 611 to lift the FOUP main body 20. The lifting part 634 can be connected to the cleaning chamber cover 620 by the support part 633, and the lifting part 634 and the cleaning chamber cover 620 can be lifted and lowered together by the same lifting driving part 631.

When the FOUP main body 20 and the FOUP cover 30 move from the standby part 300 to the cleaning chamber 600, the lift driving part 631 moves upward, and accordingly, the cleaning chamber cover 620, the support part 633 and the lift part 634 move upward together As a result, while the upper part of the cleaning chamber main body 610 is opened, the seating part 611 will move to the upper part of the cleaning chamber main body 610 and stand by at a position capable of receiving the FOUP main body 20.

The cleaning chamber cover 620 is equipped with a FOUP cover support part 621 and a clamp 622 for supporting and fixing the FOUP cover 30 transferred by the robot 500.

If the FOUP body 20 is transferred to the lifting part 634 by the robot 500, and the FOUP cover 30 is supported by the FOUP cover support part 621 and the clamp 622 and fixed to the cleaning chamber cover 620, the cleaning chamber cover 620 is fixed to The FOUP cover 30 of the cleaning chamber cover 620 and the lifting part 634 connected to the cleaning chamber cover 620 by the support part 633 are driven by the lifting driving part 631 to descend and move while supporting the FOUP main body 20. In this case, the lifting driving part 631 is driven down to drive the cleaning chamber cover 620 to close the upper part of the cleaning chamber main body 610. In this process, the lifting part 634 transfers the FOUP main body 20 to the seating part 611, It is located on the lower side of the placement part 611 and stands by.

5, a through opening 634a is formed in the central part of the lifting part 634, and a seating part 611 is arranged inside the through opening 634a. Therefore, when the lifting part 634 moves up and down, interference with the seating part 611 is prevented, and the FOUP body 20 can be handed over between the lifting part 634 and the seating part 611.

In addition, the cleaning chamber main body 610 is equipped with cleaning fluid spraying parts 640: 640-1, 640-2 for supplying cleaning fluid for cleaning the FOUP main body 20 and the FOUP cover 30.

The cleaning fluid spraying part 640 may include: an external cleaning fluid spraying part 640-1 which sprays cleaning fluid to the outer surface of the FOUP body 20 and the FOUP cover 30; and an internal cleaning fluid spraying part 640-2 to the FOUP body 20 Spray cleaning fluid on the inner side of the device.

In the external cleaning fluid ejection portion 640-1, a plurality of nozzles may be provided at positions spaced up and down. The multiple nozzles are provided around the outer side of the FOUP main body 20 and spray cleaning fluid toward the outer side of the FOUP main body 20. The cleaning fluid is sprayed toward the FOUP cover 30.

The internal cleaning fluid spraying part 640-2 is provided on the seating part 611 in a manner of being located on the inner side of the FOUP main body 20 so as to spray the cleaning fluid toward the inner side of the FOUP main body 20.

In addition, the placement portion 611 on which the FOUP body 20 is placed is configured to be able to be rotated by the drive of a motor 670, and the FOUP cover support portion 621 that supports the FOUP cover 30 is also configured to be capable of being rotated by the drive of the motor 623.

4, the external cleaning fluid ejection portion 640-1 may be formed with a plurality of nozzles spraying cleaning fluid spaced up and down, and the plurality of nozzles are arranged close to the outer side surface of the FOUP body 20, and may It is formed so that the respective lengths and spray angles are different. In addition, the FOUP main body 20 is rotatably equipped in the cleaning chamber 600, and the plurality of nozzles may be formed obliquely to spray cleaning fluid in a direction opposite to the direction in which the FOUP main body 20 rotates. The angle at which the nozzle is inclined may be formed to have an inclination ranging from 30° to 40° based on the line connecting the nozzle and the center of the FOUP body 20.

According to the above-mentioned configuration, when cleaning the FOUP main body 20 and the FOUP cover 30, the external cleaning fluid spraying portion 640-1 sprays in a direction opposite to the direction in which the FOUP main body 20 rotates at a position close to the outer surface of the rotating FOUP main body 20 The cleaning fluid can therefore improve the cleaning efficiency of the FOUP body 20.

As an example, the cleaning fluid sprayed through the external cleaning fluid spraying part 640-1 may be hot deionized water, and the cleaning fluid sprayed through the internal cleaning fluid spraying part 640-2 may be steam. (Steam). In addition, the hot deionized water and steam may be mixed with compressed dry air CDA and provided.

By supplying the mixed fluid of hot deionized water and compressed dry air to the external cleaning fluid ejection portion 640-1 as described above, the high-temperature bubbled and micronized water particles can finely penetrate the outer surface of the FOUP body 20 and The FOUP cover 30 can improve the cleaning power and shorten the drying time, and increase the spray pressure, so that the cleaning efficiency can be improved.

In addition, by supplying a mixed fluid of steam and compressed dry air to the internal cleaning fluid injection part 640-2, the steam that is further atomized compared to the hot deionized water can be denser on the entire inner surface of the FOUP body 20 without dead spots. The ground is soaked, so that the cleaning power can be further improved.

In addition, the cleaning chamber 600 is equipped with an air supply part 650 that sprays compressed dry air for drying the FOUP main body 20 and the FOUP cover 30 that have been cleaned.

The air supply part 650 includes: an external air supply part 650-1 which sprays compressed dry air to the outer side of the FOUP body 20; and an internal air supply part 650-2 which sprays compressed dry air to the inner side of the FOUP body 20 .

In the external air supply portion 650-1, as a configuration similar to the configuration of the external cleaning fluid injection portion 640-1 described above, a plurality of nozzles for injecting compressed dry air are formed vertically apart, and the plurality of nozzles are close to the FOUP The main body 20 is arranged on the outer side surface, and is formed to have different lengths and spray angles. Also, the plurality of nozzles may be formed obliquely to spray compressed dry air in a direction opposite to the direction in which the FOUP body 20 rotates. The angle of the nozzle inclination may be formed to have an inclination ranging from 30° to 40° based on the line connecting the nozzle and the center of the FOUP body 20.

According to the above-mentioned configuration, when the FOUP body 20 is dried, the compressed dry air is sprayed in a direction opposite to the direction in which the FOUP body 20 rotates at a position close to the outer surface of the rotating FOUP body 20, so that the FOUP can be improved. The drying efficiency of the main body 20 and the FOUP cover 30.

In addition, the air supply part 650 may further include: an upper air supply part 650-3, located between the FOUP main body 20 and the FOUP cover 30 inside the cleaning chamber 600, and is equipped to be able to be operated by the air cylinder 651 It is driven to move back and forth, thereby spraying compressed dry air to the cleaned FOUP main body 20 and FOUP cover 30. By configuring the upper air supply part 650-3 to be movable back and forth, as shown in FIG. 4, it is possible to effectively dry and remove moisture accumulated on the upper surface of the FOUP body 20 with the opening facing downward. In addition, the moisture remaining in the entire area of the FOUP cover 30 can be effectively dried and removed.

In addition, referring to Figures 4 to 8, the FOUP main body 20 is equipped with a vent nozzle 21 made of foamed porous material for purging the inside of the FOUP main body 20, and the cleaning chamber 600 is equipped with a vent nozzle 21 after the FOUP main body 20 is cleaned. The compressed dry air supply part 680 of compressed dry air is injected into the vent nozzle 21.

The compressed dry air supply part 680 is configured to be movable forwards and backwards to be connected to one side end of the air pipe nozzle 21 or disconnected. Therefore, the moisture remaining in the vent nozzle 21 that has not yet been dried through the drying process performed by the compressed dry air injection performed by the air supply unit 650 will pass through the direction of the compressed dry air supply unit 680. The compressed dry air inside the vent nozzle 21 is injected to dry again.

On one side of the FOUP body 20, first ports 20a and 20b respectively connected to the ends of a pair of vent pipe nozzles 21 are formed on one side, and a second port 20c communicating with the inside of the FOUP body 20 , 20d is formed on the other side.

In the substrate processing process, in order to dry the inside of the FOUP 10 in the stocker where the FOUP 10 is on standby in the step before the substrate is stored in the FOUP 10, the first ports 20a, 20b and the second ports 20c, 20d It can function as a connection port for the inflow and outflow of compressed dry air.

The compressed dry air supply part 680 includes: first nozzles 682: 682-1, 682-2, which supply compressed dry air to the first ports 20a, 20b; and second nozzles 684: 684-1, 684-2, The compressed dry air is supplied to the second ports 20c, 20d. The inner side of the first port 20a, 20b and the second port 20c, 20d may be equipped with filters 22a, 22b, 22c, 22d, respectively. During the cleaning process of the FOUP body 20, the filter that absorbs the cleaning fluid 22a, 22b, 22c, 22d can be quickly dried by compressed dry air.

8, the compressed dry air supply part 680 includes: first supply pipes 681: 681-1, 681-2, which supply compressed dry air to the first nozzles 682: 682-1, 682-2 in a transverse direction Equipped with; second supply pipe 683: 683-1, 683-2, connected to the first supply pipe 681: 681-1, 681-2 to supply to the second nozzle 684: 684-1, 684-2 Compress the dry air and equip it in the longitudinal direction; and move the cylinder 685 back and forth to make the first supply pipe 681: 681-1, 681-2 and the second supply pipe 683: 683-1, 683-2 move forward or backward.

The snorkel nozzle 21 may be provided in a plurality of spaced apart on both sides inside the FOUP main body 20, and the first ports 20a, 20b and the second ports 20c, 20d face two on one side of the FOUP main body 20. The first supply pipes 681: 681-1, 681-2 equipped with the first nozzles 682: 682-1, 682-2 and the second nozzle 684 equipped with the second nozzles 684: The second supply pipes 683 of 684-1 and 684-2: 683-1 and 683-2 are separated on both sides and provided in multiple.

The plurality of first supply pipes 681: 681-1, 681-2 may be supported by the first supply pipe supporting member 686, and the plurality of second supply pipes 683: 683-1, 683-2 are supported by the second supply pipe The supporting members 689-1 and 689-2 support. The first supply pipe supporting member 686 is combined with a moving block 687 which is connected to the forward and backward moving air cylinder 685 and moves forward and backward by the driving of the forward and backward moving air cylinder 685. The forward and backward moving cylinder 685 can be arranged and fixed on the fixed frame 688.

The first nozzle 682: 682-1, 682-2 and the second nozzle 684: 684-1, 684-2 may be combined with a pad 682a, and the pad 682a is in close contact with the first port 20a, The outer sides of the FOUP main body 20 of 20b and the second ports 20c and 20d are kept airtight. As an embodiment, the pad 682a may be made of silicon material.

9, the cleaning chamber 600 is equipped with a stopper 690 for supporting one side of the FOUP main body 20 so that the FOUP main body 20 will not be sprayed from the compressed dry air supply part 680 The compressed dry air moves to one side.

The stopper 690 may include: a rotating cylinder 691, which is driven to rotate in two directions; shafts 693: 693-1, 693-2, connected to the cylinder drive shafts 692-1, 692-2 of the rotating cylinder 691.

If the shafts 693: 693-1, 693-2 are driven to rotate in one direction by the rotating cylinder 691, the ends of the shafts 693: 693-1, 693-2 and the One side of the FOUP main body 20 contacts and supports the FOUP main body 20. If the shafts 693: 693-1, 693-2 rotate in the opposite direction by the rotation of the rotary cylinder 691, the shaft 693: The ends of 693-1 and 693-2 are separated from one side surface of the FOUP main body 20 to release the state of supporting the FOUP main body 20.

The cylinder drive shafts 692-1, 692-2 may be equipped to protrude toward both sides of the rotating cylinder 691, and the shafts 693: 693-1, 693-2 are formed by protruding toward the two sides, respectively. A pair of shafts 693: 693-1, 693-2 connected by cylinder drive shafts 692-1 and 692-2 are formed. The pair of shafts 693:693-1, 693-2 may be supported by the shaft support member 694.

As a configuration for minimizing wear caused by friction when contacting one side surface of the FOUP main body 20, the ends of the shafts 693:693-1, 693-2 may be configured in a curved shape, and the shaft 693: The outer surfaces of the ends of 693-1 and 693-2 are treated with abrasion resistance coating. As an embodiment, the abrasion resistant coating may be made of polytetrafluoroethylene (PTFE: Poly-tetrafluoroethylene) material.

When performing cleaning by the cleaning fluid ejection part 640 and drying by the air supply part 650, the seating part 611 and the FOUP main body 20 disposed on the seating part 611 are rotated by the drive of the motor 670, and the compressed dry air supply part The 680 and the stopper 690 are separated from the outer surface of the FOUP main body 20 and arranged. In addition, when drying is performed with the vent nozzle 21 of the compressed dry air supply part 680, the driving of the motor 670 will stop, and the seating part 611 and the FOUP body 20 placed on the seating part 611 will not rotate The compressed dry air supply part 680 and the stopper 690 are arranged in close contact with the outer surface of the FOUP main body 20 while maintaining the in-situ static state.

In addition, the cleaning chamber 600 is equipped with an ultraviolet lamp 660 that irradiates ultraviolet rays for drying the cleaned FOUP main body 20 and the FOUP cover 30. The ultraviolet lamp 660 includes: an external ultraviolet lamp 660-1, which irradiates ultraviolet rays to the outer surface of the FOUP body 20; and an internal ultraviolet lamp 660-2, which irradiates ultraviolet rays to the inner surface of the FOUP body 20.

10-15, when the snorkel nozzle 21 is dried, first, as shown in FIG. 12, the shaft 693 is driven in one direction by the rotary cylinder 691 of the stopper 690 to rotate in one direction, thereby supporting the FOUP One side of the main body 20. Next, as shown in FIG. 13, the first nozzle 682 and the second nozzle 684 move forward by the forward drive of the forward and backward moving cylinder 685 of the compressed dry air supply part 680, so as to communicate with the first ports 20a, 20b and the second The ports 20c, 20d are connected, and as shown in FIG. 14, the compressed dry air CDA is supplied.

When the drying of the snorkel nozzle 21 is completed, as shown in FIG. 15, the first nozzle 682 and the second nozzle 684 are moved backward by the backward driving of the forward and backward moving cylinder 685 of the compressed dry air supply part 680, respectively, from the first The ports 20a, 20b and the second ports 20c, 20d are disconnected, and the shaft 693 is driven in the opposite direction by the rotation cylinder 691 of the stopper 690 to rotate in the opposite direction, thereby releasing the state of supporting one side surface of the FOUP main body 20.

As described above, the compressed dry air supply part 680 can be moved back and forth so that the first nozzles 682: 682-1, 682-2 and the second nozzles 684: 684-1, 684-2 are simultaneously connected to the FOUP main body 20. The first ports 20a, 20b and the second ports 20c, 20d on one side further supply compressed dry air CDA, so that the drying efficiency of the vent nozzle 21 and the inside of the FOUP body 20 can be improved.

And, in order to support one side of the FOUP body 20 and prevent the FOUP body 20 from being pushed to one side by the pressure generated by the supply of dry compressed dry air or nitrogen for the FOUP body 20, the shaft 693 of the stopper 690: 693-1 and 693-2 are configured to be rotationally driven, so that the drying operation of the FOUP main body 20 can be smoothly performed in a state where the FOUP main body 20 is stably fixed and supported.

If the cleaning and drying are completed in the cleaning chamber 600, the cleaning chamber cover 620 and the FOUP cover 30 supported by the cleaning chamber cover 620 are lifted by the driving of the lifting driving part 631, and at the same time, the cleaning chamber cover 620 is combined with the cleaning by the support part 633. The lifting part 634 connected to the chamber cover 620 moves up and receives the FOUP main body 20 placed on the seating part 611, and then moves to the upper part of the cleaning chamber main body 610 so as to be in a carry-out state.

The cleaning chamber cover 620 and the lifting part 634 are lifted and lowered together by the same lifting driving part 631 as described above, so that the FOUP main body 20 and the FOUP cover 30 can be moved in and out of the FOUP body 20 and the FOUP cover 30 easily and smoothly Operation of chamber 600.

When the FOUP main body 20 moves to the upper part of the cleaning chamber main body 610, the FOUP cover 30 and the FOUP main body 20 are transferred to the vacuum chamber 700 by the robot 500.

Referring to FIG. 16, the vacuum chamber 700 includes a vacuum chamber main body 710, which accommodates the FOUP main body 20 and the FOUP cover 30 in a separated state.

The FOUP main body 20 is disposed on a lower part 710 a in the vacuum chamber main body 710, and the FOUP cover 30 is disposed on a supporting part 711 disposed in the upper part of the vacuum chamber main body 710.

The vacuum chamber 700 is connected with a nitrogen supply line 713 for supplying nitrogen to the inside of the vacuum chamber 700, and a vacuum line 712 for sucking and exhausting the fluid in the vacuum chamber 700 to the outside by vacuum. The foreign matter containing moisture remaining in the FOUP main body 20 and the FOUP cover 30 is separated from the FOUP main body 20 and the FOUP cover 30 by the nitrogen supplied through the nitrogen supply line 713 and is sucked in through the vacuum line 712 and then discharged to the outside.

In addition, the vacuum chamber 700 is equipped with a nitrogen gas supply unit 720 that injects nitrogen gas into the vent nozzle 21 provided inside the FOUP main body 20. Therefore, the moisture remaining in the vent nozzle 21 due to the compressed dry air supply part 680 of the cleaning chamber 600 not yet dried can be dried and removed by the nitrogen gas injected through the nitrogen gas supply part 720 of the vacuum chamber 700.

The nitrogen supply part 720 is equipped to be movable forwards and backwards to be connected to one side of the vent nozzle 21 or disconnected.

The nitrogen supply part 720 may be configured with the same composition as the compressed dry air supply part 680 equipped in the clean chamber 600 described above, and may include a first nitrogen supply pipe 721, a first nitrogen nozzle 722, and a second nitrogen supply pipe. 723, a second nitrogen nozzle 724, a second forward and backward moving cylinder 725, a first nitrogen supply pipe supporting part 726, a second moving block 727, a second fixed frame 728, and a second nitrogen supply pipe supporting part 729.

In addition, the vacuum chamber 700 is equipped with a second stopper 730 for supporting one side surface of the FOUP body 20 so that the FOUP body 20 will not be pushed toward by the nitrogen sprayed from the nitrogen supply part 720 Move to one side.

The second stopper 730 may have the same structure as the stopper 690 provided in the cleaning chamber 600 described above, and may include a second rotary cylinder 731, a second cylinder drive shaft 732, and a second shaft 733, And it is configured that the end of the second shaft 733 is treated with a wear-resistant coating 733a.

When the discharge of moisture and foreign matter and the drying of the vent nozzle 21 are completed in the vacuum chamber 700, the FOUP main body 20 and the FOUP cover 30 are transferred to the standby unit 300 by the robot 500. In this case, if other FOUPs are arranged in the standby section 300, the robot 500 may transport the FOUP main body 20 and the FOUP cover 30 to the buffer section 800 for temporary storage.

After that, if the FOUP main body 20 and the FOUP cover 30 first in the standby unit 300 are unloaded by the loading and unloading unit 200, the FOUP cover 30 and the FOUP main body 20 temporarily stored in the buffer unit 800 are sequentially transported to the standby The FOUP main body 20 can be locked on the FOUP cover 30 to be placed on the standby board 310 of the part 300.

After that, the locker is locked by the locking and unlocking unit provided in the standby portion 300, so that the FOUP main body 20 and the FOUP cover 30 are integrated into one body.

Through the locking of the locker, the FOUP 10 formed by the combination of the FOUP main body 20 and the FOUP cover 30 is switched by the robot 500, so that the FOUP cover 30 faces one side, and then is placed on the standby board 310 again. . In addition, if the lift cylinder 320 provided in the standby part 300 rises to lift the FOUP 10 to the upper side of the standby plate 310, the lift cylinder 320 and the FOUP 10 supported by the lift cylinder 320 are transferred to the loading and unloading part by the driving of the transfer unit 400 On the upper side of the supporting plate 210 of the 200, the FOUP 10 supported by the lifting cylinder 320 is transferred to the supporting plate 210 by the descending movement of the lifting cylinder 320 and then unloaded.

As mentioned above, the present invention is not limited to the above-mentioned embodiments. Without departing from the technical idea of the present invention claimed in the claims, a person with basic knowledge in the technical field to which the present invention belongs can realize obvious modifications. Implementation, these modified implementations belong to the scope of the present invention.

1: FOUP cleaning device 10: FOUP 20: FOUP body 20a, 20b: the first port 20c, 20d: second port 22a, 22b, 22c, 22d: filter 21: Snorkel nozzle 30: FOUP cover 100: Craft room 200: Loading and unloading department 210: Support plate 300: Standby 310: Standby board 320: Lifting cylinder 400: transfer unit 500: Robot 510: gripper 600: Clean the chamber 610: Clean the main body of the chamber 611: Placement Department 620: Clean the chamber cover 621: FOUP cover support part 622: Fixture 623: Motor 630: Lifting unit 631: Lifting drive 632: Connecting Parts 633: Support 634: Elevator 634a: Through mouth 640: Clean the fluid ejection part 640-1: External cleaning fluid injection part 640-2: Internal cleaning fluid injection part 650: Air Supply Department 650-1: External air supply department 650-2: Internal air supply department 650-3: Upper air supply department 651: Cylinder 660: UV lamp 660-1: External UV lamp 660-2: Internal UV lamp 670: Motor 680: Compressed dry air supply department 681, 681-1, 681-2: the first supply pipe 682, 682-1, 682-2: the first nozzle 682a: Pad 683, 683-1, 683-2: second supply pipe 684, 684-1, 684-2: second nozzle 685: Move the cylinder back and forth 686: The first supply pipe support component 687: Moving Block 688: fixed frame 689, 681-1, 689-2: second supply pipe support part 690: Stopper 691: Rotating cylinder 692-1, 692-2: Cylinder drive shaft 693, 693-1, 693-2: shaft 693a: Abrasion resistant coating 694: Shaft support parts 695: fixed parts 700: vacuum chamber 710: The main body of the vacuum chamber 710a: Placement Department 711: Support 712: Vacuum line 713: Nitrogen Supply Line 720: Nitrogen Supply Department 721: The first nitrogen supply pipe 722: The first nitrogen nozzle 723: The second nitrogen supply pipe 724: The second nitrogen nozzle 725: The second moving cylinder back and forth 726: The first nitrogen supply pipe supporting part 727: second moving block 728: second fixed frame 729: The second nitrogen supply pipe supporting part 730: second stop 731: second rotating cylinder 732: second cylinder drive shaft 733: second axis 733a: Second wear resistance coating 800: Buffer 910: Common parts 920: Steam unit CDA: compressed dry air

Fig. 1 is a side view schematically showing the configuration of the FOUP cleaning device of the present invention. Fig. 2 is a plan view schematically showing the configuration of the FOUP cleaning device of the present invention. 3 is a diagram for explaining the process of transferring the FOUP from the loading and unloading section to the standby section in the FOUP cleaning device of the present invention. Fig. 4 is a longitudinal cross-sectional view schematically showing the configuration of a cleaning chamber provided in the FOUP cleaning device of the present invention. Fig. 5 is a cross-sectional view showing the internal structure of the cleaning chamber provided in the FOUP cleaning device of the present invention. Fig. 6 is a perspective view showing a state in which a compressed dry air supply part and a stopper for drying the vent pipe nozzle provided inside the FOUP are provided on both sides of the FOUP main body. Fig. 7 is a right side view showing the FOUP main body supplied with compressed dry air. Fig. 8 is a perspective view showing the compressed dry air supply part shown in Fig. 6 from another direction. Fig. 9 is a perspective view of the stopper shown in Fig. 6. Fig. 10 is a right side view of Fig. 6. Fig. 11 is a cross-sectional view taken along the line A-A of Fig. 10. 12 to 15 are diagrams showing the operating states of the compressed dry air supply part and the stopper in the process of drying the snorkel nozzle. Fig. 16 is a longitudinal sectional view schematically showing the structure of a vacuum chamber provided in the FOUP cleaning device of the present invention.

20: FOUP body

21: Snorkel nozzle

30: FOUP cover

600: Clean the chamber

610: Clean the main body of the chamber

611: Placement Department

620: Clean the chamber cover

621: FOUP cover support part

622: Fixture

623: Motor

630: Lifting unit

631: Lifting drive

632: Connecting Parts

633: Support

640: Clean the fluid ejection part

640-1: External cleaning fluid injection part

640-2: Internal cleaning fluid injection part

650: Air Supply Department

650-3: Upper air supply department

651: Cylinder

660: UV lamp

660-1: External UV lamp

660-2: Internal UV lamp

670: Motor

680: Compressed dry air supply department

681: First Supply Pipe

682: first nozzle

683: second supply pipe

684: second nozzle

685: Move the cylinder back and forth

690: Stopper

691: Rotating cylinder

693: Axis

Claims (26)

A front-opening wafer transfer box cleaning device for cleaning a front-opening wafer transfer box including a front-opening wafer transfer box body and a front-opening wafer transfer box cover. The front-opening wafer transfer box cleaning device is characterized in that: The body of the front-opening wafer transfer box is equipped with a vent nozzle of foamed porous material for purging the inside of the body of the front-opening wafer transfer box, including cleaning the front-opening wafer transfer box body and the front-opening type with cleaning fluid The cleaning chamber of the wafer transfer box cover is equipped with a compressed dry air supply part that injects compressed dry air into the vent pipe nozzle after the cleaning of the front opening type wafer transfer box body is completed. The front-opening wafer transfer box cleaning device according to claim 1, wherein the compressed dry air supply part is equipped to move back and forth to connect to one side end of the vent pipe nozzle or to disconnect it. The front-opening wafer transfer cassette cleaning device according to claim 2, wherein on one side of the front-opening wafer transfer cassette main body, a first port connected to the end of the vent pipe nozzle is formed on one side, and is connected to the front opening The second port communicating with the inside of the main body of the wafer transfer box is formed on the other side, and the compressed dry air supply part includes: A first nozzle, which supplies compressed dry air to the first port; and The second nozzle supplies compressed dry air to the second port. The front-opening wafer transfer cassette cleaning device according to claim 3, wherein a filter is respectively provided inside the first port and the second port, and the filter is dried by the compressed dry air. The front-opening wafer transfer box cleaning device according to claim 3, wherein the compressed dry air supply unit includes: The first supply pipe, which supplies compressed dry air to the first nozzle, and is equipped horizontally; A second supply pipe, connected to the first supply pipe to supply compressed dry air to the second nozzle, and arranged along the longitudinal direction; and Moving the air cylinder forwards and backwards to move the first supply pipe and the second supply pipe forward or backward. The front opening type wafer transfer box cleaning device according to claim 5, wherein the vent nozzle is provided in a plurality of spaced apart from both sides inside the front opening type wafer transfer box main body, the first port and the first port Two ports are provided in a plurality of two ports on one side of the main body of the front-opening wafer transfer box, which are separated from each other on both sides, the first supply pipe equipped with the first nozzle and the second supply pipe equipped with the second nozzle Separate on both sides and equip them in multiple. The front-opening wafer transfer box cleaning device according to claim 6, which further includes: The first supply pipe support member supports the first supply pipes and is connected to the front and rear moving cylinder; and The second supply pipe support member supports the second supply pipes. The front opening type wafer transfer cassette cleaning device according to claim 3, wherein a pad is combined with the first nozzle and the second nozzle, and the pad is closely attached to the front opening where the first port and the second port are formed. The outer side of the main body of the wafer transfer box is kept airtight. The front-opening wafer transfer box cleaning device according to claim 8, wherein the pad is made of silicon material. The front opening type wafer transfer box cleaning device according to claim 1, wherein the cleaning chamber is equipped with a stopper for supporting a side surface of the front opening type wafer transfer box body so that the front opening type wafer The main body of the transfer box is not pushed to one side by the compressed dry air sprayed from the compressed dry air supply part to move. The front-opening wafer transfer box cleaning device according to claim 1, wherein the cleaning chamber is equipped with: An external cleaning fluid spraying part spraying cleaning fluid to the outer side surface of the front opening type wafer transfer box main body and the front opening type wafer transfer box cover; and The internal cleaning fluid ejection part ejects the cleaning fluid to the inner surface of the main body of the front-opening wafer transfer cassette. The front-opening wafer transfer cassette cleaning device according to claim 11, wherein a plurality of nozzles for spraying cleaning fluid are formed up and down in the external cleaning fluid spraying portion, and the nozzles are formed to have different lengths and spray angles , So that the nozzles are arranged close to the outer side of the main body of the front-opening wafer transfer box. The front-opening wafer transfer box cleaning device according to claim 12, wherein the front-opening wafer transfer box main body is rotatably provided in the cleaning chamber, and the nozzles are formed obliquely to communicate with the front-opening wafer transfer box The direction in which the main body rotates sprays cleaning fluid in opposite directions. The front opening type wafer transfer box cleaning device according to claim 1, wherein the cleaning chamber is equipped with an air supply part for spraying the cleaned front opening type wafer transfer box main body and the front opening type wafer transfer box The cover is dried by compressed dry air. The front-opening wafer transfer box cleaning device according to claim 14, wherein the air supply unit includes: An external air supply part spraying compressed dry air to the outer surface of the main body of the front-opening wafer transfer box; and The internal air supply unit sprays compressed dry air to the inner surface of the main body of the front-opening wafer transfer cassette. The front-opening wafer transfer cassette cleaning device according to claim 15, wherein a plurality of nozzles for spraying compressed dry air are formed up and down in the external air supply part, and the nozzles are formed to have respective lengths and spray angles The difference is that the nozzles are arranged close to the outer side of the main body of the front-opening wafer transfer box. The front-opening wafer transfer box cleaning device according to claim 16, wherein the front-opening wafer transfer box body is rotatably provided in the cleaning chamber, and the nozzles are formed obliquely to communicate with the front-opening wafer transfer box Compressed dry air is sprayed in the direction opposite to the direction where the main body rotates. The front-opening wafer transfer box cleaning device according to claim 15, wherein the air supply part further includes an upper air supply part located inside the cleaning chamber between the front-opening wafer transfer box main body and the front-opening wafer transfer Between the box covers, it is equipped to be movable back and forth, so that the cleaned front opening type wafer transfer box main body and the front opening type wafer transfer box cover are sprayed with compressed dry air. The front-opening wafer transfer box cleaning device according to claim 1, wherein the cleaning chamber includes: Cleaning the chamber body, and accommodating the front-opening wafer transfer box body inside for cleaning; The chamber cover is cleaned, the upper part of the main body of the cleaning chamber is opened and closed, and the front opening type wafer transfer box cover is supported for cleaning. The front-opening wafer transfer box cleaning device according to claim 19, wherein the cleaning chamber main body includes: The placement part is provided at the lower part of the main body of the cleaning chamber for placement of the main body of the front-opening wafer transfer box; and The lifting part lifts and lowers between the upper part and the lower part of the main body of the cleaning chamber, and transfers the main body of the front-opening wafer transfer cassette to the placement part or receives the main body of the front-opening wafer transfer cassette from the placement part to make the The main body of the front-opening wafer transfer box is raised and lowered, wherein the lifting part is connected with the cleaning chamber cover by a supporting part, and the lifting part and the cleaning chamber cover are raised and lowered together by the same lifting driving part. The front opening type wafer transfer box cleaning device according to claim 1, wherein the cleaning chamber is equipped with an ultraviolet lamp for irradiating the cleaned front opening type wafer transfer box main body and front opening type wafer transfer box cover Carry out drying with ultraviolet rays. The front-opening wafer transfer box cleaning device according to claim 21, wherein the ultraviolet lamp includes: An external ultraviolet lamp, irradiating ultraviolet rays to the outer surface of the main body of the front-opening wafer transfer box; and An internal ultraviolet lamp irradiates ultraviolet rays to the inner surface of the main body of the front-opening wafer transfer box. The front-opening wafer transfer box cleaning device according to claim 1, which further includes: The vacuum chamber enables the body of the front-opening wafer transfer box and the cover of the front-opening wafer transfer box that have been cleaned in the cleaning chamber to be transported, and the vacuum chamber is connected with: A nitrogen supply line to supply nitrogen to the inside of the vacuum chamber; and The vacuum line sucks the fluid inside the vacuum chamber and discharges it to the outside. The front-opening wafer transfer cassette cleaning device according to claim 23, wherein the vacuum chamber is equipped with a nitrogen supply part that injects nitrogen into the vent nozzle. The front-opening wafer transfer box cleaning device according to claim 24, wherein the nitrogen supply part is equipped to be movable back and forth to be connected to one side of the vent pipe nozzle or disconnected. The front opening type wafer transfer cassette cleaning device according to claim 25, wherein the vacuum chamber is equipped with a second stopper for supporting a side surface of the front opening type wafer transfer cassette body so that the front opening type The main body of the wafer transfer box is not pushed to one side by the nitrogen gas sprayed from the nitrogen gas supply part to move.

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