TWI762311B - Method and device for detecting cleaning results of material transfer box - Google Patents

Abstract

The invention provides a cleaning result detection method of a material conveying box, which is implemented in a cleaning processing area station of the material conveying box, and performs cleaning result detection including humidity and dust drop for the cleaned material conveying box or its box body; Wherein, the cleaning result detection of the box body is performed in a drying chamber with a negative pressure environment in the cleaning processing area station, and the cleaning result detection of the material transfer box is performed on a platform provided by the cleaning processing area station; in addition, , The present invention also includes a cleaning result detection device implementing the above method, which is used to control the result and yield after the automatic cleaning of the material transfer box.

Description

Method and device for detecting cleaning results of material transfer box

The invention relates to a conveying box used for filling and transferring materials between stations in different processing areas, and also relates to a cleaning result detection technology including humidity and dust drop of the conveying box after the wet cleaning is completed, in particular to a material conveying box. Cleaning results detection method and device thereof.

In the prior art, the material transfer box closest to the present invention is a front opening unified pod (FOUP, hereinafter referred to as a wafer transfer box) for carrying semiconductor wafers.

In the production process of semiconductor wafers, especially in the process of carrying wafers between each processing area station, and the process of carrying wafers between various processing area stations, the requirements for cleanliness are very high, especially to avoid dust particles in the environment, and Affect wafer production yield.

In addition, it is known that the above-mentioned wafer transfer boxes are commonly used for the transportation of semiconductor wafers. Through the operation of the automated handling system, multiple wafer transfer boxes can respectively pick up and accommodate wafers in each processing station, and can Wafers are transferred between processing zone stations and then unloaded upon arrival at the processing zone station at the destination.

The wafer transfer box is composed of an openable front cover and a box body. wafers, so that each wafer transfer box can accommodate a plurality of wafers.

Due to the high standard of cleanliness, wafer transfer boxes must be cleaned automatically after a certain period of use. At present, the known relatively advanced technologies for automatic cleaning of wafer transfer boxes can be found in CN102804332B, Patents such as TW201400202A, CN1082222A, US20140069467A1, etc., these patents disclose that a cleaning station is set up in a wafer production line, and an automatic handling system is used to transfer the wafer transfer box to be cleaned to a load port of the cleaning station. port), use the robot in the cleaning station to capture the wafer transfer box on the loading port, separate the front cover and box body of the wafer transfer box first, and then automatically capture the front cover and the box The body goes through the steps of wet cleaning and drying of the cleaning solution in sequence to purify the particles that may remain on the inner and outer surfaces of the front cover and the box body, thereby improving the cleanliness of dust-free conveying.

And it is known that the wafer transfer box for dust-free transfer of wafers has been applied to the occasions of dust-free transfer of high-end circuit boards, such as embedded multi-die interconnect bridge (EMIB). Using circuit substrates or circuit substrates using ABF as build-up material, these high-end circuit substrates have a relatively larger area than traditional PCBs, and are presented in a rectangular layout, making the hardness of high-end circuit substrates relatively traditional. PCB soft. Accordingly, when the contents in the transfer boxes must be changed from wafers to high-level circuit boards, the internal structure of the transfer boxes must be changed so that each transfer box can stably accommodate multiple pieces of high-level circuit boards.

Please refer to FIG. 1 , FIG. 2 , and FIG. 3 , which disclose the state of the existing material transfer box 10 for accommodating the high-level circuit carrier board 16 (hereinafter referred to as the carrier board 16 ). The box body 11 and the front cover 12 have crystal The same feature of the meta-transport box especially includes that the double side wall surface 11a of the box body 11 has ribs 13 protruding into a comb-like shape. In addition, due to the relatively large and soft surface area of the carrier plate 16 serving as the container, the box body 11 must also form a cantilevered support rod 15 protruding from the bottom 11b to the accommodating cavity 14 in order to utilize the double-sided The rib 13 is used to support the double ends 16a of the carrier plate 16, and the mid-section 16b of the carrier plate 16 is supported by the cantilever support rod 15, so as to prevent the carrier plate 16 from collapsing or interfering with each other in the material conveying box 10 (detailed in detail). As shown in Figure 1, Figure 2 and Figure 3).

It can be seen from this that the complexity of the internal structure of the box body of the transfer box will be affected based on the difference of different accommodating objects. The overall structure of the cantilever support rod 15 is relatively more complicated than that of the box body of the wafer transfer box. However, the material to which the present invention is directed In addition to the above-mentioned wafer transfer box, the transfer box also includes a material transfer box 10 for loading a carrier board.

After the above-mentioned cleaning techniques are performed on the above-mentioned material transfer boxes, in order to ensure that the residual water molecules in the box can be fully removed, to achieve the ideal drying effect, and to avoid the wafers or carriers to be loaded from being affected by moisture, it is usually necessary to Carry out the humidity detection of the cleaned material transfer box or its box body; for this, the CN102804332B patent conceptually teaches that in the drying process of the chamber environment with negative pressure after wet cleaning of the front cover and box body, A humidity sensor can be used to monitor the drying process and the end point; however, the CN102804332B patent does not further teach the humidity sensor how to monitor the humidity of the cleaned and dried transport box in the drying chamber or other locations; Further specific techniques are proposed to overcome this shortcoming.

The purpose of the present invention is to improve the existing transfer box for wafers or substrates, so that after automatic cleaning, the detection of cleaning results can be performed sequentially, and the cleaning results include detection of humidity and dust drop.

For this reason, the present invention integrates the cleaning result detection technology into the cleaning processing area station of the material conveying box, so as to ensure that when the cleaned material conveying box is output from the cleaning processing area station to the outside, the inner surface around the material conveying box will not be damaged. The humidity and the amount of dust falling, or the humidity and the amount of dust falling on the inner and outer surfaces of the box body, can meet the ideal dryness and cleanliness requirements, so as to facilitate the quality control cleaning results.

Therefore, a preferred first embodiment of the present invention is to provide a method for detecting the cleaning results of a material transfer box, which can be widely used for wafer transfer boxes or circuit boards made of EMIB and ABF build-up materials (hereinafter referred to as carrier) to carry out automated cleaning results detection operations. Specifically, the method for detecting the cleaning results of the material conveying box of the present invention is implemented in a cleaning processing area station, which facilitates the use of the cleaning processing area station to perform the following cleaning processing steps 1 to 4 on the material conveying box:

Step 1, separate the material transfer box before cleaning into a front cover and a box body;

Step 2, wet cleaning the front cover and the box body;

Step 3, drying the front cover and the box body, wherein the box system is dried in a vacuum environment, and the vacuum environment is formed by generating negative pressure in at least one drying chamber in the cleaning processing station;

Step 4, combine the front cover and the box to form a cleaned material transfer box.

Wherein, the detection method of the described cleaning achievement includes performing the following steps 3-1 to 3-4:

Step 3-1, selecting the drying chamber as the detection site, and using at least one of the front cover and the box body that has been dried in the drying chamber as the detection object;

Step 3-2: Introduce clean dry air into the drying chamber to release the vacuum, and generate a positive pressure dry air in the drying chamber to contact the inner and outer surfaces around the detection object, so that the positive pressure dry air is absorbed and dried. at least one cleaning result judgment factor remaining on the detection object;

Step 3-3, capturing the positive pressure drying air in the drying chamber; and

In step 3-4, at least one detection element is used to detect the content of the cleaning result determination factor in the positive pressure dry air.

In order to practically realize the cleaning result detection method of the above-mentioned first embodiment, the present invention provides a cleaning result detection device of a material conveying box, which is arranged in a cleaning processing area station of the material conveying box, and the material conveying box can be installed in the material conveying box. The front cover and the box body are separated into the front cover and the box body in the cleaning processing station, and the front cover and the box body can individually or together receive the cleaning processing of a plurality of chambers in the processing station, and then combine into a cleaned material transfer box , the station configuration of the cleaning processing area includes:

At least one cleaning chamber is provided with a plurality of liquid spray nozzles capable of spraying cleaning liquid for wet cleaning of the front cover and the box body;

At least one drying chamber is provided with a negative pressure channel and a plurality of thermal energy elements, the negative pressure channel is connected between at least one of the drying chambers and an air pump, and is used to capture the air in at least one of the drying chambers A vacuum is generated, and a plurality of the thermal energy elements can dry the front cover and the box body.

Wherein, the detection device uses at least one of the front cover and the box body as the detection object, and the detection device is installed in at least one of the drying chambers, including include:

An air intake hole is arranged on the other side of at least one of the drying chambers and connected to an air supply machine. The air intake hole can guide clean dry air into at least one of the drying chambers to release the vacuum and generate energy The positive pressure dry air contacting the inner surface and the outer surface around the detection object is used to absorb at least one cleaning result judgment factor remaining on the detection object after drying;

a positive pressure channel, constructed and formed by connecting at least one of the drying chambers with a multi-pass pipe, for discharging the positive pressure drying air in at least one of the drying chambers; and

At least one detection element is installed on the multi-pass pipe for detecting the content of the cleaning result determination factor in the positive pressure dry air.

In a further implementation, the negative pressure channel and the positive pressure channel may share the multi-pass pipe, and the air pump is connected to at least one of the drying chambers through the multi-pass pipe. Wherein, at least one of the drying chambers is provided with a negative pressure capturing hole, and the multi-pass pipe is connected to at least one of the drying chambers through the negative pressure capturing hole.

In another implementation, the multi-pass pipe is only used as a dedicated positive pressure channel for discharging positive pressure drying air from the drying chamber, and is not used as a negative pressure channel; the negative pressure channel can use general pipe fittings or flow channels The channel is connected between the drying chamber and the air pump, and is responsible for guiding the negative pressure generated by the air pump to the drying chamber to form a vacuum. In this case, the drying chamber is provided with a positive pressure extraction hole, and the multi-pass pipe is connected with at least one of the drying chambers through the positive pressure extraction hole.

Besides, in order to achieve the same purpose, the present invention also discloses a second preferred embodiment, which is to provide another method for detecting the cleaning results of the material transfer box, which can be implemented in the cleaning processing station. The processing station can perform steps 1 to 4 of cleaning the material transfer box in the first embodiment. The difference between them is that the second embodiment can perform the drying of the front cover and the box in step 3 above in a vacuum environment. Dry the front cover and the box body in a low or normal pressure environment; in addition, the cleaning result detection method of the second embodiment is changed to use the material conveying box combined after drying as the detection object, and perform the following steps in sequence 4-1 to process 4-4:

Step 4-1, select a platform of the cleaning processing area station as the inspection site, and placing and positioning the inspection object on the platform;

In step 4-2, clean dry air is guided through the platform into a closed accommodating compartment of the detection object, so that a positive pressure dry air is generated in the closed accommodating compartment to contact the surrounding area of the closed accommodating compartment. surface, at least one cleaning achievement judging factor remaining on the inner surface of the enclosed container after being absorbed and dried by the positive pressure dry air;

Step 4-3, capturing the positive pressure dry air in the closed container; and

In step 4-4, at least one detection element is used to detect the content of the cleaning result determination factor in the positive pressure dry air.

In order to practically realize the cleaning result detection method of the above-mentioned second embodiment, the present invention also provides a cleaning result detection device for a material transfer box. The difference between the cleaning result detection device and the first cleaning result detection device is: the drying chamber It is not necessary to set up a negative pressure extraction hole and an air suction pump in the chamber (but it can still be set), so that the drying chamber can be used for the front cover, the box body in a normal pressure environment (or a vacuum environment). Dry. In addition, the cleaning result detection device of the second embodiment uses the material conveying box combined after drying as the detection object.

In the cleaning result detection device of the second embodiment, the cleaning processing station further includes at least one platform for placing and positioning the detection object, and the detection object has a first interface and a second interface; the The detection device is installed on at least one of the platforms, including:

An air inlet nozzle is arranged on one side of at least one of the platforms and communicates with the first interface, and the air inlet nozzle is connected to an air supply machine for guiding clean dry air through the air inlet nozzle in sequence , The first interface enters a closed accommodating compartment of the detection object, and generates positive pressure dry air that can contact the inner surface around the closed accommodating compartment, so as to absorb dry air remaining on the inner surface around the closed accommodating compartment after drying. the cleaning achievement judgment factor;

an exhaust nozzle, which is arranged on the other side of at least one of the platforms and communicates with the second interface, and the exhaust nozzle is used to guide the positive pressure dry air in the closed accommodating compartment to be discharged to the outside;

In addition, the multi-channel pipe is changed to be connected to the exhaust nozzle for capturing the positive pressure dry air in the closed container; the detection element is connected to the multi-channel pipe for The content of the cleaning achievement judgment factor in the positive pressure dry air is detected.

According to the above disclosure of the present invention, in a further implementation, at least one of the platforms may have an existing load port in the cleaning processing station for placing the pre-cleaned and post-cleaned material transfer boxes.

In a further implementation, the cleaning chamber used for the above wet cleaning may be provided with a plurality of air blowing elements, or at least one deliquoring chamber may be added in the cleaning processing station to install a plurality of the air blowing elements, so as to Liquid is removed from the front cover and the box body after the cleaning liquid has been sprayed.

In a further implementation, the detection element may be a humidity sensor or a particle counter, and the humidity sensor and the particle counter may exist simultaneously; when the detection element is a humidity sensor, the cleaning result determination factor is the positive pressure drying The water molecules absorbed by the air; when the detection element is a particle counter, the cleaning achievement judging factor is the dust particles absorbed by the positive pressure dry air.

In a further implementation, the detection object may be specifically referred to as the box body, at least one cantilever support rod protrudes from the bottom of the box body, and the inner surface around the detection object includes the surrounding surface of the cantilever support rod.

According to the above, the technical effect that the present invention can present is:

1. Use the existing drying chamber in the cleaning processing station, which can establish a negative pressure to generate a vacuum condition, as a judgment of the cleaning results contained in the detected object (including at least one of the box body and the front cover) after cleaning It is a detection place for factors (including water molecules and falling dust particles), and can further guide and discharge the positive pressure dry air in the vacuum breaking by the means of releasing the vacuum (that is, breaking the vacuum) by introducing the positive pressure drying air into the drying chamber. During the process, the content and quantity of the cleaning effect judgment factor contained in the positive pressure drying air can be effectively captured and detected; in this way, the positive pressure drying air can not only be used as drainage, but also can be effectively and conveniently detected. Whether the inner and outer surfaces of the box body after cleaning and drying meet the requirements of ideal dryness and cleanliness, and it can also simplify the structural complexity of the cleaning result detection device.

2. Use a platform in the cleaning processing area station that can place the material transfer box as a judgment factor (including cleaning results) contained in the detection object (ie, the cleaned material transfer box). detection site for water-containing molecules, falling dust particles), the platform can be a platform with an existing load port in the clean processing station, or an independent table constructed in the cleaning processing station, or by the cavity The top surface of the chamber is used as the platform, so that the existing or newly-configured intake and exhaust nozzles on the platform can be used, and in particular, the intake nozzle can be used to guide clean and dry air into the closed container of the test object. The positive pressure dry air is generated in the cabin, and the positive pressure dry air can also be discharged and collected by the exhaust nozzle; in this way, when the platform provided on the load port is used as the inspection place, not only the load port can be used The existing inlet and exhaust nozzles are used to guide the positive pressure dry air, and the positive pressure dry air can also be used as a drainage, so as to effectively and conveniently check whether the inner surface of the closed container of the detection object is ideal. The dryness and cleanliness requirements are met, and the structural complexity of the cleaning result detection device can be simplified.

The features and technical effects of the various embodiments disclosed herein will be presented in the following descriptions and illustrations.

10: Material transfer box

10a: closed containment compartment

11: Box body

11a: Walls

11b: Bottom

11c: Opening

11d: The first interface

11e: Second interface

11f: inner surface

11g: outer surface

12: Front cover

13: Ribs

14: accommodating cavity

15: Support rod

16: Carrier board

16a: Double ended

16b: Middle section

20: Robotic Arm

30: load port

31: Platform

32: Linear driver

33: Spinner

34: Exhaust nozzle

35: Intake nozzle

36: Sidewall

40: Front cover cleaning chamber

50: Box cleaning chamber

50a: Cover

51: Liquid nozzle

511: Wall spray nozzle

512: Rotary spray nozzle

60: Box body removal chamber

70: Box drying chamber

70a: Cover

71: Negative pressure channel

71a: negative pressure extraction hole

72: Thermal element

721: Vertical electric heating plate

722: Wall Type Hot Plate

73: Positive pressure channel

73a: Positive pressure extraction hole

74: Insulation layer

75: Air intake

76: Air pump

77: Aspirator

78: Air supply machine

80: Multi-pass tube

81: Humidity sensor

82: Particle Counter

90: Clean Processing Zone Station

D: Predetermined direction

L: open lid position

S1 to S4: Step Description of the First and Second Embodiments

S3-1 to S3-3: Process description of the first embodiment

S4-1 to S4-4: Process description of the second embodiment

Figure 1 is an exploded perspective view of the material transfer box.

FIG. 2 and FIG. 3 are sectional views of the material conveying box from different perspectives, respectively.

4 is a flow chart of steps and processes of the first embodiment of the cleaning result detection method of the material transfer box of the present invention.

FIG. 5 is a flow chart of steps and processes of the second embodiment of the cleaning result detection method of the material transfer box of the present invention.

FIG. 6 to FIG. 12 are schematic diagrams of actions of the cleaning result detection method of the present invention in sequence.

Fig. 13 is a schematic diagram of the configuration of the cleaning processing zone station of the present invention.

FIG. 14 is a schematic perspective view of the platform of FIG. 13 provided by the load port.

FIG. 15 is a cross-sectional view of the drying chamber of the cartridge body of FIG. 13 .

In the following embodiments of the present invention, the term "cleaning" is not the same as the term "cleaning", wherein "cleaning" includes the steps of "wet cleaning and drying"; in addition, the present invention uses the term "step" to indicate a Execution of the object in the cleaning station Carry out the cleaning procedure described above, and use the term "process" to indicate the procedure included in the above cleaning step to perform "cleaning result inspection" on the material transfer box or the inspection object.

Please refer to FIG. 4 , which is a flow chart of steps and processes according to the first embodiment of the present invention, illustrating that the present invention provides a method for detecting cleaning results of a material transfer box, which is implemented in a cleaning processing station 90 (as shown in FIG. 13 ), The cleaning processing area station 90 can be framed by a chamber for performing wet cleaning and drying of the material transfer box 10 and related equipment to form a polygonal station area, and the cleaning processing area station 90 is also equipped with a capturing, moving, separating , release and assemble the mechanical arm 20 for the material transfer box 10 (as shown in FIG. 13 ), accordingly, it is convenient to use the cleaning processing area station 90 to perform the following steps S1 to S4 of the cleaning process on the material transfer box 10:

Step S1: Separating the material transfer box

Please refer to FIG. 7 and FIG. 13 together to illustrate the transfer equipment (not shown) around the cleaning processing area station 90 , which will first transfer the material transfer box 10 to be cleaned into the cleaning processing area station 90 , and then the robot arm 20 The material transfer box 10 will be captured and moved to a cover opening position L in the cleaning processing station 90 by clamping the outer walls of both sides of the box body 11 of the material transfer box 10; the cover opening position L is provided with There is a holder and an opening key (not shown) for the front cover 12 of the material transfer box 10. The holder can be implemented as a suction cup or other components such as movable hooks, and the front cover 12 is originally on the front cover 12. That is, there is a key hole (not shown) corresponding to the cover opening key; when the robotic arm 20 captures and moves the material conveying box 10 to the opening position L, the predetermined opening 11c of the box body 11 can just face the opening. The cover position L direction, and the front cover 12 can be in contact with the holder at the cover opening position L, so that the holder can absorb or embed the front cover 12 on the box body 11, at this time, the cover opening at the cover opening position L The key can be inserted into the key hole of the front cover 12, the cover key is opened and the rotation is started to release the state that the front cover 12 and the box body 11 are mutually held by the tenon. The robotic arm 20 moves in a retracting manner to complete the cover opening action, and then the robotic arm 20 moves the box body 11 away from the front cover 12 so that the opening 11c of the box body 11 is exposed to the outside.

Step S2: wet cleaning the front cover and the box body

Please refer to FIG. 13 , which discloses the front cover 12 in the cleaning station 90 and the case body 11 are respectively wet-cleaned as an example. As an illustration of the implementation, it is included that when the front cover 12 is cleaned (including the wet cleaning step), it is carried out in a front cover cleaning chamber 40. The box body 11 is cleaned. The wet cleaning step is performed in a box cleaning chamber 50 . The front cover cleaning chamber 40 and the box cleaning chamber 50 may be distributed around the cleaning processing station 90 .

Besides, the separated front cover 12 and the box body 11 can also be subjected to simultaneous wet cleaning in the same cleaning chamber, which is also an application covered by the present invention. However, for the box body 11 with a relatively complex structure than the front cover 12, the present invention proposes to use a separate box body cleaning chamber 50 to wet clean the box body 11, which can achieve better cleaning effect. However, for the front cover 12 whose structure is relatively simple (uncomplicated) compared to the box body 11 , the steps of wet cleaning and liquid removal can be performed in sequence in the dedicated front cover cleaning chamber 40 , that is, the cleanliness can be achieved. Effect.

For the wet cleaning of the box body 11, it must be noted that since the opening 11c can be exposed when the robot arm 20 moves the box body 11, when the box body 11 is wet cleaned, the robot arm 20 can make the box body 11 visible. The opening 11c is placed in the box body cleaning chamber 50 in a downward manner (that is, in the same direction as the action direction of the gravitational force), so that the cleaning solution remaining on the inner surface 11f and the outer surface 11g of the box body 11 around it, It can more smoothly leave the box body 11 through the opening 11c in accordance with the gravitational force, so as to reduce or eliminate the burden of the subsequent liquid removal.

In addition, the above wet cleaning step S2 may or may not include the step of removing liquid from the wet-cleaned front cover 12 and the box body 11; in other words, the front cover cleaning chamber 40, the box body cleaning chamber 50 or In the cleaning chamber shared by the front cover and the box body, a plurality of liquid spray elements and a plurality of air blowing elements can be arranged at the same time, so that a plurality of the liquid spray elements spray the cleaning liquid to the surrounding surfaces of the front cover 12 and the box body 11 first. Wet cleaning is performed, and then a plurality of the blowing elements are sprayed with dry gas to the surrounding surfaces of the front cover 12 and the box body 11, so that the cleaning liquid attached to the front cover 12 and the surrounding surfaces of the box body 11 can be fully blown off , and then the wet cleaning step S2 of the front cover 12 and the box body 11 is completed.

When the above-mentioned wet cleaning step S2 does not include the above-mentioned liquid removal step, at least one liquid removal chamber can be added in the cleaning processing station 90, especially including the box body 11 A dedicated box body liquid removal chamber 60 (as shown in Figure 13) or a liquid removal chamber shared by the box body and the front cover, and a plurality of the blowing elements can be arranged in the liquid removal chamber, so that the The front cover 12 and the box body 11 after the wet cleaning is completed are deliquored.

Referring to FIG. 8 , it is explained that when the box body 11 is specially wet-cleaned in the box body cleaning chamber 50 , a plurality of liquid spray nozzles 51 can be arranged in the box body cleaning chamber 50 as the liquid spray elements, and the box body 11 can be disposed in the box body cleaning chamber 50 The inner surface 11f and the outer surface 11g of the body 11 are sprayed with cleaning liquid to complete the wet cleaning step of the case body 11 . The plurality of liquid spray nozzles 51 include a plurality of wall surface liquid spray nozzles 511 arranged on the surrounding inner wall of the box body cleaning chamber 50 , and a plurality of rotary spray nozzles that can be implanted in the accommodating cavity 14 of the box body 11 . Liquid nozzles 512; a plurality of the wall surface liquid spray nozzles 511 can spray cleaning liquid to flush the outer surface 11g around the box body 11, and a plurality of the rotating liquid spray nozzles 512 can spray cleaning liquid for 360-degree rotary spraying. The inner surface 11f around the box body 11 is provided. In addition, the inner surface 11f of the box body 11 also includes the comb-shaped fins 13 and the surrounding surfaces of the suspension-shaped support rods 15 arranged in the box body 11; It can perform a 360-degree rotary spraying cleaning liquid action on the surrounding surfaces of the comb-shaped fins 13 and the suspension-shaped support rods 15, so that the dirt contaminated on the comb-shaped fins 13 and the suspension-shaped support rods 15 can be cleaned. The liquid leaves the inner surface 11f with sufficient flushing from multiple angles. The box cleaning chamber 50 is implemented with a flip-up cover 50a. When the cover 50a is opened, the box cleaning chamber 50 is connected to the outside world, so that the robotic arm 20 can The wet-cleaned box 11 is placed in the box cleaning chamber 50 , or the wet-cleaned box 11 is retrieved from the box cleaning chamber 50 ; When the cover plate 50a is closed, a closed space is formed in the box cleaning chamber 50, so as to facilitate the wet cleaning step for the box 11 in the box cleaning chamber 50, and avoid the need for cleaning the box 11 in the box cleaning chamber 50. When the box body 11 performs the wet cleaning step, the cleaning liquid splashes out of the box body cleaning chamber 50 .

Step S3: drying the front cover and the box body

Please refer to FIGS. 4 and 13 to illustrate the steps of drying the front cover 12 and the box body 11 in the cleaning station 90 ; wherein, since the structure of the surrounding surface of the front cover 12 is less complicated, the front cover 12 is The drying step can be grouped into the front cover cleaning chamber 40 , or using two or more front cover cleaning chambers 40 to perform the wet cleaning and drying steps of the front cover 12 respectively. The drying step of the box body 11 is performed in a box body drying chamber 70 , and the box body drying chamber 70 is arranged in the cleaning processing station 90 .

Referring to FIG. 9 , it is explained that the box body 11 can be dried in the box body drying chamber 70 with the opening 11c facing downward; in this embodiment (first embodiment), the inside of the box body drying chamber 70 must be able to A vacuum chamber environment with negative pressure is generated, and a plurality of thermal energy elements 72 are used together; in addition, the thermal energy elements 72 can be planar electric heating plates, so that when the box body 11 is placed inside the box body drying chamber 70, The plurality of planar electric heating plates can be distributed around the inner surface 11f and the outer surface 11g of the box body 11 , and the inner surface 11f and the outer surface 11g of the box body 11 are subjected to a drying step after wet cleaning. In addition, the plurality of thermal energy elements 72 can also be infrared heaters, but the effect is not ideal, so it will not be described in detail.

In particular, in the present implementation (ie, the first embodiment) of the present invention, the cleaning result detection method is contained in the box drying process of the above step S3. Specifically, the cleaning result detection method can be used for the box. The body 11 or the front cover 12 performs the cleaning results detection of the following steps S3-1 to S3-3. in:

Process S3-1: Selecting a testing site and testing objects

Please refer to FIG. 10 to illustrate that in this implementation, for example, the box body drying chamber 70 is selected as the detection place, and the box body 11 that has been dried in a vacuum environment is used as the detection object, so that the cleaning results of the box body 11 after cleaning can be carried out. detection.

Process S3-2: Introduce dry air to the testing site to break the vacuum

As shown in FIG. 10 , it is explained that clean dry air is introduced into the selected box drying chamber 70 (ie, the detection site), so as to use the dry air to release the vacuum state in the box drying chamber 70 (ie, break the vacuum). ), so that the introduced dry air can generate a positive pressure drying air in the box drying chamber 70, that is, the air pressure in the box drying chamber 70 is greater than the atmospheric pressure outside, so as to facilitate drying by positive pressure The air contacts the inner surface 11f and the outer surface 11g of the box body 11, and uses the positive pressure dry air to absorb the water molecules of the cleaning liquid in the inner, outer surfaces 11f and 11g of the box body 11 that have not been volatilized; The present invention utilizes the water molecules absorbed by the positive pressure dry air as a cleaning result judgment factor in the subsequent detection.

Process S3-3: Capture positive pressure dry air

As shown in FIG. 10 , it is illustrated that the positive pressure drying air in the drying chamber 70 of the box body is captured by a negative pressure flow below 1 atm (which can be provided by an air pump).

Step S3-4: Detecting the cleaning result judgment factor

As shown in FIG. 10 , it is illustrated that at least one detection element is used to also detect the content of the cleaning result determination factor in the positive pressure dry air. Further, the detection element can be a humidity sensor 81 or a particle counter 82; the humidity sensor 81 and the particle counter 82 can also exist at the same time.

When the detection element is the humidity sensor 81, the cleaning result determination factor is the water molecules absorbed by the positive pressure dry air, so that the content of the water molecules can be read through the humidity sensor 81, and the box body after cleaning can be determined. Whether the humidity of the inner and outer surfaces 11f and 11g of 11 has met the established drying standards. In addition, when the detection element is the particle counter 82, the cleaning result determination factor is the dust particles absorbed by the positive pressure dry air, so that the content of the dust particles can be read through the particle counter 82, and then the cleaning result can be determined after cleaning. Whether the cleanliness of the inner and outer surfaces 11f and 11g of the box body 11 has met the established cleaning standards.

Step S4: Combine the front cover and the box body

This step is performed after the above-mentioned step S3-4 is completed. Please refer to FIG. 11 to illustrate that the front cover 12 that has undergone the wet cleaning and drying steps is placed on the cover opening position L. The cover opening position L can also be regarded as a cover closing position. 12 After the wet cleaning (which may include liquid removal) and drying is completed, and the box body 11 also completes the wet cleaning (which may include liquid removal) and drying steps, it can be transported by the robotic arm 20 to the opening position L ( That is, the closed lid position) is assembled and buckled, so as to be combined into a material transfer box 10 that meets the double standards of dryness and cleanliness after cleaning and after completing the inspection of cleaning results.

On the other hand, the present invention also provides a device for detecting the cleaning results of the material transfer box, so that the method for detecting the cleaning results of the material transfer box according to the first embodiment can be easily implemented.

To this end, please refer to FIG. 13 again to illustrate the assembled state of the cleaning result detection device of the present invention, which is arranged in the cleaning processing area station 90 of the material conveying box. As mentioned above, the cleaning processing area station 90 includes a frame surrounded by the front cover 12 , at least one of the cleaning chambers and at least one of the drying chambers of the box body 11 , and the cleaning processing area station 90 is provided with all the The robotic arm 20 is described, so that the front cover 12 and the box body 11 can individually or together accept the cleaning process of the multiple chambers in the processing station 90 (please refer to the above, and the details will not be repeated).

Please refer to FIG. 10 and FIG. 10a further, illustrating that the cleaning result detection device of the present invention is installed in at least one of the drying chambers, and uses at least one of the front cover 12 and the box body 11 as the detection object. In FIGS. 10 and 10a, at least one of the drying chambers takes the box drying chamber 70 as an example, and the box 11 is used as the detection object as an example to illustrate that the box drying chamber 70 is provided with a negative pressure channel 71 and a plurality of thermal energy elements 72, the negative pressure channel 71 is connected between the box drying chamber 70 and an air pump 76 for capturing the air in the box drying chamber 70 to generate a vacuum environment. The thermal energy element 72 can dry the box body 11 implanted in the box body drying chamber 70 .

The cleaning result detection device is disposed in the drying chamber 70 of the box body and includes a negative pressure capturing hole 71a, an air inlet hole 75, a multi-pass pipe 80 and at least one detection element. in:

The negative pressure capturing hole 71 a is provided on one side of the box drying chamber 70 for connecting with the air pump 76 capable of generating a negative pressure power source to form a negative pressure channel 71 of the box drying chamber 70 , which is used to guide the negative pressure generated by the air pump 76 to form the vacuum environment in the box drying chamber 70 .

The air inlet 75 is provided on the other side of the box drying chamber 70, and can be connected to a pipeline to directly capture ultra-pure air (X-CDA) capable of generating positive pressure power into the box drying chamber 70; Alternatively, the air inlet 75 is connected to an air supply machine 78 equipped with a filter element through a pipeline, or the filter element is installed on the pipeline between the air inlet hole 75 and the air supply machine 78, and the air supply machine 78 Positive pressure power is generated to provide clean dry air (CDA) into the box drying chamber 70 through the air inlet 75 . According to this The configuration can make the negative pressure environment in the box drying chamber 70 change into a positive pressure environment, so as to release the vacuum state in the box drying chamber 70, and the box drying chamber 70 can contact the surrounding of the box 11. , The positive pressure dry air on the outer surfaces 11f and 11g is used to absorb the cleaning effect judgment factor, and the positive pressure dry air with the cleaning effect judgment factor can be maintained through the negative pressure extraction hole 71a to maintain a certain period of discharge to the multi-pass The pipe 80 enables the humidity sensor 81 and the particle counter 82 (ie, the detection element) to smoothly take samples from the positive pressure dry air (ie, the cleaning result judgment factor) to detect the humidity and the content of dust particles.

The multi-channel pipe 80 is a tube or flow channel with a plurality of connected ports, so that one of the plurality of ports of the multi-channel pipe 80 is connected to the drying chamber 70 of the box body; further, the multi-channel pipe 80 is In the present invention, there are two options for the connection mode between the pipe 80 and the drying chamber 70 of the box body and the effect thereof. 10 discloses the first connection method of the multi-channel pipe 80 , and FIG. 10 a discloses the second connection method of the multi-channel pipe 80 .

In the implementation of FIG. 10 , the multi-channel pipe 80 can be used as the negative pressure channel 71 and the positive pressure channel 73 of the box drying chamber 70 at the same time; The two ports are respectively connected between the negative pressure extraction hole 71a and the suction pump 76 as the negative pressure channel 71 of the box drying chamber 70, and at the same time, make the multiple passage ports of the multi-pass pipe 80 The other one or two ports are used to install at least one of the detection elements, so that the multi-pass pipe 80 can also be used as a positive pressure channel 73 for discharging positive pressure dry air. Among them, it must be noted that the multi-channel pipe 80 has a plurality of channels that are branched in a fork shape (ie, not connected in series), and the plurality of passage ports of the multi-channel pipe 80 are distributed in the channels of the fork-shaped branch so as to facilitate installation or assembly. The detection element and suction pump 76 provided at the port can be located in the non-series channels of the multi-way pipe 80, so that the multi-way pipe 80 can guide the negative pressure flow and the positive pressure drying air flow in a split manner; in addition, At least one of the detection elements can be a humidity sensor 81 or a particle counter 82, or a humidity sensor 81 and a particle counter 82; when the humidity sensor 81 and the particle counter 82 are configured together, they can be installed in the same channel in the fork-shaped branch channel On the two ports inside, it is used to detect the content of the cleaning effect judgment factor in the positive pressure dry air. Moreover, when the detection element is detecting, the air pump 76 is not started, so the positive pressure drying air can be smoothly discharged through the positive pressure channel 73 of the multi-pass pipe 80, and then the positive pressure drying air is detected by the detection element. The content of the judging factor of cleaning results in the medium.

In the implementation of FIG. 10a , it is disclosed that the multi-pass pipe 80 is only used as a positive pressure channel 73 for discharging positive pressure drying air from the drying chamber 70 of the box body, and is not used as a negative pressure channel 71 . The negative pressure channel 71 can be connected between the negative pressure capture hole 71a of the drying chamber 70 of the box body and the suction pump 76 using a general pipe or flow channel, and is responsible for guiding the negative pressure generated by the suction pump 76 to the drying chamber. form a vacuum. In this application, the box drying chamber 70 must also be provided with a positive pressure extraction hole 73a, and the multi-pass pipe 80 is connected to the box drying chamber 70 through the positive pressure extraction hole 73a, so that the multi-pass The inside of the pipe 80 becomes a positive pressure channel 73 for guiding the positive pressure drying air to be discharged to the outside, and at least one of the detection elements detects the content of the cleaning achievement judging factor in the positive pressure drying air in the positive pressure channel 73 .

In addition, in the implementation of FIG. 10 and FIG. 10a , a plurality of the thermal energy elements 72 include a plurality of built-in vertical electric heating plates 721 and a plurality of wall-type electric heating plates 722; the vertical electric heating plates 721 are vertically arranged In the box body drying chamber 70, after the box body 11 is placed into the box body drying chamber 70, the vertical electric heating plate 721 can be implanted into the accommodating cavity 14 of the box body 11, so that the vertical heating plate 721 The vertical electric heating plate 721 can be inserted into the gap between the double-sided fins 13 and the cantilevered support rod 15 to provide thermal radiation energy, thereby drying the inner surface 11f of the box body 11 adjacently; the plurality of wall-type electric heating plates 722 They are respectively attached to the surrounding outer walls of the box body drying chamber 70, and the surrounding outer walls of the box body drying chamber 70 are covered with a layer of insulation material after the wall-type electric heating plate 722 is attached. The thermal insulation layer 74 is formed, so that the wall-type electric heating plate 722 can be located between the surrounding outer walls of the drying chamber 70 of the box body and the thermal insulation layer 74 thereof. According to this implementation, the heat radiation generated by the vertical electric heating plate 721 can be directly radiated to the inner surface 11f around the box body 11, and the heat radiation generated by the wall-type electric heating plate 722 can pass through the box. Through the conduction of the surrounding walls of the body drying chamber 70, the heat energy is radiated to the outer surface 11g around the box body 11; , 11g of possible residual water molecules can be fully absorbed in the drying step Thermal radiation can evaporate to obtain the ideal drying effect.

Furthermore, the box drying chamber 70 is implemented with a flip-up cover 70a. When the cover 70a is opened, the box drying chamber 70 is connected to the outside world, so that the robotic arm 20 can be connected to the outside. The box body 11 to be dried is placed in the box body drying chamber 70, or the box body 11 that has been dried is retrieved from the box body drying chamber 70; otherwise, when When the cover plate 70a is closed, a closed space is formed in the box drying chamber 70, so as to facilitate the drying step of the box 11 in the box drying chamber 70 to be successfully completed in a vacuum environment .

Among them, it must be noted that the negative pressure capture hole 71a, the positive pressure capture hole 73a and the air intake hole 75 are respectively provided with automatic valves (eg solenoid valves).

In the implementation shown in FIG. 10 , the automatic valve of the negative pressure extraction hole 71a can control the timing when the negative pressure flow enters the box drying chamber 70 through the negative pressure extraction hole 71a, and the positive pressure drying air passes through the negative pressure extraction hole. 71a is the timing of discharging the box drying chamber 70, and the automatic valve of the air inlet 75 can control the timing when the drying air enters the box drying chamber 70 through the air inlet 75 to generate positive pressure. Further, when the negative pressure extraction hole 71a captures the air in the box drying chamber 70 to generate negative pressure, the air inlet 75 is in a closed state, so that a vacuum environment can be generated in the box drying chamber 70; In addition, when the air intake hole 75 is opened to guide the drying air into the drying chamber 70 of the box body, the negative pressure capturing hole 71a is in a closed state, so that positive pressure drying air can be generated in the drying chamber 70 of the box body; When the negative pressure capturing hole 71a discharges positive pressure drying air, the air inlet hole 75 is kept open, so that the drying air in the box drying chamber 70 can maintain a positive pressure discharge state for a certain period, so as to facilitate cleaning Sampling of outcome judgment factors.

In the implementation shown in FIG. 10a, the automatic valve of the negative pressure extraction hole 71a can control the timing of the negative pressure flow entering the box drying chamber 70 through the negative pressure extraction hole 71a, and the positive pressure drying air through the positive pressure extraction hole 73a is the timing of discharging the box drying chamber 70, and the automatic valve of the air inlet 75 can control the timing when the drying air enters the box drying chamber 70 through the air inlet 75 to generate positive pressure. Further, when the negative pressure extraction hole 71a generates negative pressure in capturing the air in the drying chamber 70 of the box body, the positive pressure extraction hole 73a and the air intake hole 75 are closed to facilitate drying of the box body. A vacuum is created in the chamber 70 In addition, when the air intake hole 75 is opened to guide the drying air into the box drying chamber 70, the negative pressure capturing hole 71a and the positive pressure capturing hole 73a are closed, so that the inside of the box drying chamber 70 is closed. Positive pressure drying air is generated; and when the positive pressure extraction hole 73a is opened to discharge the positive pressure drying air, the air intake hole 75 remains open, and the negative pressure extraction hole 71a is closed, so that the box body drying chamber The dry air in the chamber 70 can maintain a positive pressure discharge state for a certain period, so as to facilitate the sampling of the cleaning result judgment factor.

It must be noted here that when facing the box body 11 with a more complex structure, the cantilevered support rod 15 (as shown in FIG. 10 ) protruding from the bottom of the box body 11 , the inner part of the surrounding box body 11 (ie the detection object) The surface 11f includes the surrounding surfaces of the cantilevered support rod 15, and through the detection of the cleaning results implemented by the present invention, it can be fully determined and controlled whether the box body 11 having a complex structure such as the cantilevered support rod 15, after the cleaning process is carried out, whether It has truly achieved the established dryness and cleanliness requirements.

Please refer to FIG. 5 , which is a flow chart of the steps and processes of the second embodiment of the present invention, illustrating the method for detecting the cleaning results of the material transfer box provided by the present invention. In the cleaning processing area station 90, the cleaning procedures of steps 1 to 4 of the first embodiment are performed on the material transfer box 10 that has not been cleaned. However, it must be noted that, in the second embodiment, especially when performing the drying of the front cover 12 and the box body 11 in step 3 of the first embodiment, it is not necessarily required to be performed in a vacuum environment; in other words, in the second embodiment In the embodiment, when drying the front cover 12 and the box body 11 , the drying chamber or the box body drying chamber 70 may only have normal pressure or can generate a vacuum environment. Furthermore, the second embodiment is different from the first embodiment in that the detection object is replaced with a material transfer box 10 that is combined after drying, instead of the front cover 12 and the box body that have not been combined after drying. 11 As a detection object, in other words, the cleaning result detection of the second embodiment is not performed in the drying chamber or the box drying chamber 70 . Besides, the cleaning steps of the front cover 12 and the box body 11 in the second embodiment are the same as those in the first embodiment.

Accordingly, in the cleaning result detection method of the second embodiment, the cleaning results of the following steps S4-1 to S4-4 can be performed for the material transfer box 10 combined after step 4 and cleaning in the first embodiment. detection. in:

Process S4-1: Selecting a testing site and testing objects

In this process, a platform 31 in the cleaning processing area station 90 that can place the material transfer box 10 can be selected as a place to perform cleaning result detection; the platform 31 can be located in the cleaning processing area station 90 and can provide a flat surface Any location in the field, such as a stand-alone countertop, the top surface of the chamber, or an existing load port 30 for providing the robotic arm 20 to retrieve the material transfer box 10 to be cleaned and cleaned. In the second embodiment described below, the platform 31 provided by the load port 30 will be described as a detection site.

In the first embodiment, the lid-opening position L (ie, the lid-closing position) can be located on a side wall 36 of the platform 31 of the loading port 30 , so that the robotic arm 20 can be placed on the platform 31 for cleaning. Or the cleaned material transfer box 10 is opened and closed. Further, the dried front cover 12 can be moved to the closed lid position L by the robot arm 20, and then the dried box 11 can also be moved to the closed lid position by the robot arm 20. Position L, so that the box body 11 can be combined with the front cover 12 to form a cleaned material transfer box 10, and the cleaned material transfer box 10 has a closed accommodating compartment 10a with relatively dryness and relatively cleanliness; then , through the carrying and movement of the robotic arm 20 , the cleaned material transfer box 10 can be placed on the platform 31 (as shown in FIG. 14 ) for positioning. In this procedure, the cleaned material transfer box 10 that has been positioned on the platform 31 is selected as the detection object of the cleaning result.

Step S4-2: Introducing dry air to the test site

In this process, the platform 31 is used to guide clean dry air into the closed container 10a of the detection object, and a positive pressure dry air is generated in the closed container 10a to contact the closed container The inner surface 11f around the 10a is made to absorb and dry the cleaning result judgment factor that remains on the inner surface 11f around the closed container 10a after drying by the positive pressure dry air.

Process S4-3: Capture positive pressure dry air

In this process, the multi-pass pipe 80 connected to the platform 31 is used to guide the positive pressure dry air in the closed container 10a that has absorbed the cleaning effect judgment factor It is discharged to the outside to facilitate the inspection; among them, since the positive pressure drying air has a positive pressure greater than 1atm, it can be discharged to the outside through the pipeline smoothly.

Step S4-4: Detecting the cleaning result judgment factor

In this process, at least one detection element is used on the multi-pass pipe 80 to detect the content of the cleaning result determination factor in the positive pressure dry air. The implementation content of this process, the specific objects and details of which the cleaning result judgment factor can be detected are the same as the above-mentioned process S3-4 disclosed in the first embodiment (not repeated), and the second embodiment is completed accordingly. Cleaning results detection method.

On the other hand, in order to facilitate the implementation of the cleaning result detection methods of the first and second embodiments, the present invention also reinforced the structural details of the cleaning result detection device here.

13 and 14, it is disclosed that the material transfer box 10 has a plurality of first ports 11d for filling gas into the material transfer box 10, and a plurality of second ports 11e for discharging gas; The interface 11d and the second interface 11e are respectively provided with a check function, and the controlled gas can only enter the material conveying box 10 through the first interface 11d in one direction, and discharge the material conveying box 10 through the second interface 11e in one direction; the platform 31 An intake nozzle 35 and an exhaust nozzle 34 are provided on it.

Further, the platform 31 is also configured with at least one linear drive 32 for moving the material conveying box 10, the material conveying box 10 is driven by the linear drive 32 to move on the platform 31, and the linear drive 32 is implemented A plurality of rollers are arranged on the platform 31 corresponding to each other, and each roller can be driven by a motor such as a driver to rotate synchronously, thereby driving the material transfer box 10 to move; the platform 31 is also equipped with a device to drive the material. The transfer box 10 adjusts a rotary actuator 33 in the direction of the opening 11 c of the box body 11 , and the rotary actuator 33 is located below the linear actuator 32 .

Accordingly, for the material transfer box 10 to be cleaned (ie, before cleaning), it can be moved to the top of the rotator 33 through the driving of the linear drive 32, and then the rotator 33 can rise to transfer the material to be cleaned. The conveying box 10 is lifted up by the linear drive 32; then, the material conveying box 10 is driven by the rotator 33 to make the opening 11c of the box body 11 face away from the robot arm 20 (that is, toward the predetermined direction D), and then the rotating Actuator 33 descends to place the turned material conveying box 10 on the linear drive 32 ; finally, the robotic arm 20 can capture the turned material conveying box 10 to be cleaned and move to the opening position adjacent to the end side of the platform 31 L, so that the material transfer box 10 is separated into the front cover 12 and the box body 11 at the opening position L.

In addition, for the material transfer box 10 that has been dried (ie, cleaned), the robotic arm 20 can capture the front cover 12 and the box body 11 that have been dried together in the drying chamber, or capture the box body drying chamber 70 and The box body 11 and the front cover 12 have been cleaned in the front cover cleaning chamber 40 , and the box body 11 and the front cover 12 are assembled together at the opening position L to form the material transfer box 10 and then placed on the platform 31 superior.

The intake nozzle 35 is provided on one side of the platform 31 and is connected to the air supply machine 78 . Accordingly, in the process of implementing the above-mentioned steps 4-1 to 4-2 of the second embodiment, that is, when the material transfer box 10 is placed and positioned on the platform 31, the air inlet nozzle 35 can be inserted into and communicated with the The first port 11d allows the air supply machine 78 to guide clean dry air through the air inlet nozzle 35 and the first port 11d to enter the closed accommodating chamber 10a of the cleaned material transfer box 10 in sequence to generate positive pressure dry air .

The exhaust nozzle 34 is provided on the other side of the platform 31, and the exhaust nozzle 34 is connected to the detection element (including the humidity sensor) through the multi-pass pipe 80 in the first embodiment in a manner of having a plurality of passage ports 81. Particle counter 82) (as shown in FIG. 12), but the air pump 76 in the first embodiment may not be connected to the multi-pass pipe 80 of the second embodiment. Accordingly, in the process of implementing the above-mentioned steps 4-1 to 4-2 of the second embodiment, that is, when the material transfer box 10 is placed and positioned on the platform 31, the exhaust nozzle 34 can be inserted into and communicated with the first step. The two ports 11e allow the positive-pressure dry air that has absorbed the cleaning result determination factor in the closed accommodating chamber 10a of the material transfer box 10 to be discharged to the multi-pass pipe 80 through the second port 11e and the exhaust nozzle 34, and The humidity sensor 81 detects the water molecule content in the positive-pressure dry air, and the particle counter 82 detects the amount of dust falling in the positive-pressure dry air (the detection method is the same as that of the first embodiment).

It must be noted here that, in the above-mentioned process S4-3 of the second embodiment, an air extractor 77 can also be connected to the multi-pass pipe 80 so as to generate a negative pressure flow and accelerate the The positive pressure drying air in the material conveying box 10 receives the speed detected by the humidity sensor 81 and the particle counter 82 through the multi-pass pipe 80, so as to improve the speed of detecting the cleaning result judgment factor, but the air extractor 77 can see the positive pressure drying air. It is not absolutely necessary to choose whether to install it according to the discharge efficiency, and it will be explained.

The above embodiments are only preferred embodiments of the present invention, but should not be construed as limiting the scope of the present invention. Therefore, the present invention should be subject to the content of the claims defined in the scope of the patent application.

S1 to S4: step description of the embodiment

S3-1 to S3-3: Process description of the first embodiment

Claims (30)

A method for detecting cleaning results of a material transfer box is implemented in a cleaning processing area station, and the cleaning processing area station can sequentially perform steps (1) to (4) including the following cleaning material transfer boxes: Step (1), the material transfer box before separation and cleaning becomes a front cover and a box body; Step (2), wet cleaning the front cover and the box body; Step (3), drying the front cover and the box, wherein at least the box is dried in a vacuum environment formed by generating negative pressure in at least one drying chamber in the cleaning processing station; and Step (4), combining the front cover and the box to become a cleaned material transfer box; Wherein, the detection method of described cleaning achievement comprises performing following steps (3-1) to step (3-4): Step (3-1), selecting the drying chamber capable of generating a vacuum as the detection site, and using at least one of the front cover and the box body that has been dried in the drying chamber as the detection object; Step (3-2), introduce clean dry air into the drying chamber to release the vacuum, and generate a positive pressure dry air in the drying chamber to contact the inner and outer surfaces around the detection object, so that the positive pressure dry air absorbs At least one cleaning result judgment factor remaining on the inner surface and the outer surface of the detection object after drying; Step (3-3), capturing the positive pressure drying air in the drying chamber; and In step (3-4), at least one detection element is used to detect the content of the cleaning result determination factor in the positive pressure dry air. The method for detecting cleaning results of a material transfer box according to claim 1, wherein between wet cleaning and drying the front cover and the box body, the step of removing liquid from the front cover and the box body is further included. The method for detecting cleaning results of a material transfer box according to claim 1, wherein the detecting element is a humidity sensor, and the cleaning result judging factor is the Water molecules absorbed by positive pressure dry air. The method for detecting the cleaning result of the material transfer box according to claim 1, wherein the detecting element is a particle counter, and the cleaning result judging factor is the dust particles absorbed by the positive pressure drying air. The method for detecting cleaning results of a material transfer box according to claim 1, 2, 3 or 4, wherein the detection object is the box body, and at least one cantilevered support rod protrudes from the bottom of the box body, and the detection object is surrounded by The inner surface includes the surrounding surface of the cantilevered support rod. A cleaning result detection device of a material transfer box is arranged in a cleaning processing area station of the material delivery box, the material delivery box can be separated into a front cover and a box body in the cleaning processing area station, the front cover, the box and can individually or collectively receive cleaning and processing of a plurality of chambers in the processing zone station, and then combine into a cleaned material transfer box. The cleaning processing zone station configuration includes: At least one cleaning chamber is provided with a plurality of liquid spray nozzles capable of spraying cleaning liquid for wet cleaning of the front cover and the box body; At least one drying chamber is provided with a negative pressure channel and a plurality of thermal energy elements, the negative pressure channel is connected between at least one of the drying chambers and an air pump, and is used to capture the air in at least one of the drying chambers To generate a vacuum environment, a plurality of the thermal energy elements can dry the front cover and the box body; Wherein, the detection device uses at least one of the front cover and the box body as the detection object, the detection device is installed in at least one of the drying chambers, and includes: An air intake hole is arranged on one side of at least one of the drying chambers and is connected to an air supply machine. The air intake hole can guide clean dry air into at least one of the drying chambers to release the vacuum and generate air that can contact The positive pressure drying air on the inner surface and the outer surface around the detection object is used to absorb at least one cleaning result judgment factor remaining on the detection object after drying; a positive pressure channel, constructed and formed by connecting at least one of the drying chambers with a multi-pass pipe, for discharging the positive pressure drying air in at least one of the drying chambers; and At least one detection element is installed on the multi-pass pipe for detecting the content of the cleaning result determination factor in the positive pressure dry air. The cleaning result detection device for a material transfer box according to claim 6, wherein the cleaning chamber is further provided with a plurality of air blowing elements to remove liquid from the front cover and the box body after spraying the cleaning liquid. The cleaning result detection device for a material transfer box according to claim 6, wherein the cleaning processing station is further configured with at least one liquid removal chamber, and at least one of the liquid removal chambers is provided with a plurality of air blowing elements, which can prevent the spraying The front cover and the box body after cleaning the liquid are removed. The cleaning result detection device for a material transfer box according to claim 6, wherein the negative pressure channel and the positive pressure channel share the multi-pass pipe, and the air pump is connected to at least one of the drying chambers through the multi-pass pipe. The cleaning result detection device of the material transfer box according to claim 9, wherein at least one of the drying chambers is provided with a negative pressure capturing hole, and the multi-pass pipe is connected to at least one of the drying chambers through the negative pressure capturing hole. room is connected. The cleaning result detection device for a material transfer box according to claim 6, wherein the positive pressure channel is formed in the multi-pass pipe, at least one of the drying chambers is further provided with a positive pressure capturing hole, and the multi-pass pipe passes through the multi-pass pipe. The positive pressure extraction hole is connected with at least one of the drying chambers. The cleaning result detection device of the material transfer box according to claim 6, wherein the detection element is a humidity sensor, and the cleaning result determination factor is the water molecules absorbed by the positive pressure drying air. The cleaning result detection device of the material transfer box according to claim 6, wherein the detection element is a particle counter, and the cleaning result determination factor is the dust particles absorbed by the positive pressure drying air. The cleaning result detection device for a material transfer box according to any one of claims 6 to 13, wherein the detection object is the box body, and at least one cantilevered support rod protrudes from the bottom of the box body, and the detection object is surrounded by The inner surface includes the surrounding surface of the cantilevered support rod. A method for detecting cleaning results of a material transfer box, the cleaning processing station can sequentially perform steps (1) to (4) including the following cleaning material transfer boxes: Step (1), the material transfer box before separation and cleaning becomes a front cover and a box body; Step (2), wet cleaning the front cover and the box body; Step (3), drying the front cover and the box body; and Step (4), combining the front cover and the box to become a cleaned material transfer box; Wherein, the detection method of the cleaning results includes using the dried and combined material transfer box as a detection object, and sequentially performing the following steps (4-1) to (4-4): Step (4-1), selecting a platform of the cleaning processing zone station as a detection site, and placing and positioning the detection object on the platform; In step (4-2), clean dry air is guided through the platform to enter a closed container of the detection object, so that a positive pressure dry air is generated in the closed container to contact the surrounding of the closed container The inner surface of the closed container, so that the positive pressure dry air absorbs and dries at least one cleaning result judgment factor that remains on the inner surface of the enclosed container; Step (4-3), capturing the positive pressure dry air in the closed container; and In step (4-4), at least one detection element is used to detect the content of the cleaning result determination factor in the positive pressure dry air. The method for detecting cleaning results of a material transfer box according to claim 15, wherein the box body is dried in a vacuum environment. The cleaning result detection method for a material transfer box according to claim 15, wherein the platform is a load port for placing the material transfer box before and after cleaning in the cleaning processing station. The method for detecting cleaning results of a material transfer box according to claim 15, wherein between wet cleaning and drying the front cover and the box body, the step of removing liquid from the front cover and the box body is further included. The method for detecting the cleaning result of the material transfer box according to claim 15, wherein the detecting element is a humidity sensor, and the cleaning result judging factor is the water molecules absorbed by the positive pressure drying air. The method for detecting the cleaning result of the material transfer box according to claim 15, wherein the detecting element is a particle counter, and the cleaning result judging factor is the dust particles absorbed by the positive pressure drying air. The cleaning result detection method for a material transfer box according to any one of claims 15 to 20, wherein at least one cantilevered support rod protrudes from the bottom of the box body, and the inner surface around the box body includes the cantilevered support rod the surrounding surface. A cleaning result detection device of a material transfer box is arranged in a cleaning processing area station of the material delivery box, the material delivery box can be separated into a front cover and a box body in the cleaning processing area station, the front cover, the box and can individually or together accept the cleaning and processing of a plurality of chambers in the processing station, and then combine into a cleaned material transfer box as a detection object. The configuration of the cleaning processing station includes: At least one cleaning chamber is provided with a plurality of liquid spray nozzles capable of spraying cleaning liquid for wet cleaning of the front cover and the box body; At least one drying chamber is provided with at least a plurality of thermal energy elements for drying the front cover and the box body; at least one platform for placing and positioning the detection object, the detection object has a first interface and a second interface; The detection device is installed on at least one of the platforms, including: An air inlet nozzle is arranged on one side of at least one of the platforms and communicates with the first interface, and the air inlet nozzle is connected to an air supply machine for guiding clean dry air through the air inlet nozzle in sequence , The first interface enters a closed accommodating compartment of the detection object, and generates positive pressure dry air that can contact the inner surface around the closed accommodating compartment, so as to absorb dry air remaining on the inner surface around the closed accommodating compartment after drying. At least one cleaning result judgment factor; An exhaust nozzle is arranged on the other side of at least one of the platforms and communicates with the second connector The exhaust nozzle is used to guide the positive pressure dry air in the closed container to be discharged to the outside; a multi-pass pipe connected to the exhaust nozzle for capturing the positive pressure dry air in the closed container; and A detection element is installed on the multi-pass pipe for detecting the content of the cleaning result judgment factor in the positive pressure dry air. The cleaning result detection device for a material transfer box according to claim 22, wherein at least one of the platforms is a loading port for placing the material transfer box before and after cleaning in the cleaning processing station. According to the cleaning result detection device of the material conveying box according to claim 22, at least one of the cleaning chambers is further provided with a plurality of air blowing elements to remove the liquid from the front cover and the box body after spraying the cleaning liquid. The cleaning result detection device for the material conveying box according to claim 22, wherein the cleaning processing station is further configured with at least one liquid removal chamber, and at least one of the liquid removal chambers is provided with a plurality of air blowing elements, which can prevent the spraying The front cover and the box body after cleaning the liquid are removed. The cleaning result detection device for a material transfer box according to claim 22, wherein at least one of the drying chambers is further provided with a negative pressure channel, and the negative pressure channel is connected to an air pump to capture the air in at least one of the drying chambers. A vacuum is generated and at least the cartridge system is dried within at least one of the drying chambers of the vacuum. The cleaning result detection device of the material transfer box according to claim 22, wherein the multi-channel pipe is further connected with an air suction machine, so that the detection element is installed in the multi-channel pipe between the exhaust nozzle and the air suction machine. The cleaning result detection device of the material transfer box according to claim 22, wherein the detection element is a humidity sensor, and the cleaning result determination factor is the water molecules absorbed by the positive pressure drying air. The cleaning result detection device of the material transfer box according to claim 22, wherein the detection element is a particle counter, and the cleaning result determination factor is the dust particles absorbed by the positive pressure drying air. The cleaning result detection device for a material transfer box according to any one of claims 22 to 29, wherein at least one cantilevered support rod protrudes from the bottom of the box body, and the inner surface around the closed accommodating compartment includes the cantilevered support rod. The surrounding surface of the support rod.

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