TWM619866U - Cleaning result inspecting apparatus for material transferring box - Google Patents

Abstract

This model provides a cleaning result detection device for a material transfer box, which is set in a cleaning processing station of the material transfer box, and performs cleaning results detection including humidity and dust amount for the cleaned material transfer box or its box body ; Wherein, the cleaning result detection of the box body is carried out in a drying chamber with a negative pressure environment in the cleaning processing zone station, and the cleaning result detection of the material conveying box is carried out on a platform provided by the cleaning processing zone station; In this way, the results and yield rate of the automatic cleaning of the material transfer box can be controlled.

Description

Cleaning result detection device for material transfer box

The present invention relates to a transfer box for filling and transferring materials between different processing area stations. It also relates to a cleaning result detection technology including humidity and dust fall after the transfer box has completed wet cleaning, especially a material transfer box Cleaning result detection device.

In the prior art, the closest thing to the material transfer box of the present invention is a Front Opening Unified Pod (FOUP, hereinafter referred to as wafer transfer box) for carrying semiconductor wafers.

During the production process of semiconductor wafers, especially in the processing area stations, and the process of carrying wafers between processing area stations, the requirements for cleanliness are very high, especially to avoid dust particles in the environment. Affect the production yield of wafers.

Moreover, it is known that the transportation of semiconductor wafers often uses the above-mentioned wafer transfer box. Through the operation of an automated handling system, multiple wafer transfer boxes can pick up and contain wafers in each processing area station, and can The wafers are transferred between each processing area station, and then the wafers are unloaded when they reach the processing area station at the target site.

The wafer transfer box is composed of an openable front cover and a box body which are assembled and buckled together. The double side walls inside the box body are provided with comb-shaped ribs that are used to support the contained inside. The wafer makes it possible to accommodate a large number of wafers in each wafer transfer box.

Based on the high standards of cleanliness, the wafer transfer box must be automatically cleaned after being used for a certain period of time. At present, the more advanced technology known to automatically clean the wafer transfer box can be seen in CN102804332B, TW201400202A, CN1082222A, US20140069467A1 and other patents, these patents openly teach that a cleaning area station is set in the production line of the wafer, and the wafer transfer box to be cleaned is transferred to a loading port of the cleaning area station by an automated handling system (load port), use the robot in the cleaning area to capture the wafer transfer box on the load port, and separate the front cover and the box body of the wafer transfer box first, and then automatically capture the front cover and The box body sequentially passes through the steps of wet cleaning and drying of the cleaning liquid to purify particles that may remain on the front cover and the inner and outer surfaces of the box body, thereby improving the cleanliness of dust-free transmission.

Moreover, it is known that the wafer transfer box for dust-free transfer of wafers has been applied to the occasions of dust-free transfer of high-end circuit carrier boards, such as Embedded Multi-Die Interconnect Bridge (EMIB) Circuit carrier boards or circuit carrier boards using ABF as build-up materials, etc. These high-end circuit boards have a relatively larger area than traditional PCBs, and are presented in a rectangular layout mode, making the hardness of the high-end circuit boards relatively more traditional PCB is soft. Accordingly, when the contents in the transfer box must be changed from wafers to high-end circuit carriers, the internal structure of the transfer box must be changed so that multiple high-end circuit carriers can be stably contained in each transfer box.

Please refer to FIGS. 1, 2 and 3, which disclose the state of the conventional material transfer box 10 for accommodating the high-level circuit carrier board 16 (hereinafter referred to as the carrier board 16). The box body 11 and the front cover 12 have crystals. The same feature of the meta-transport box, in particular, includes the fins 13 protruding into a comb shape on the double side wall surface 11a of the box body 11. In addition, due to the relatively large and soft surface area of the carrier plate 16 as the accommodating object, the box body 11 must also be formed with a suspended support rod 15 protruding from the bottom 11b to the accommodating cavity 14 in order to use both sides The fins 13 support the double ends 16a of the carrier board 16, and the suspended support rods 15 are used to support the middle section 16b of the carrier board 16 to prevent the carrier board 16 from collapsing or interfering with each other in the material conveying box 10 (detailed As shown in Figure 1, Figure 2 and Figure 3).

It can be seen that, based on the difference of different contents, the complexity of the internal structure of the box body of the transfer box will be affected. In particular, the material transfer box 10 used for loading the carrier board 16 has comb-shaped ribs 13 and the inside of the box body 11 The overall structure of the suspended support rod 15 is relatively more complicated than that of the wafer transfer box. However, the material transfer box targeted by the present invention not only includes the above-mentioned wafer transfer box, but also includes a material transfer box 10 for loading a carrier.

After the above-mentioned cleaning technology is performed on the above-mentioned material transfer boxes, in order to ensure that the residual water molecules in the box can be fully removed to achieve the desired drying effect, and to prevent the wafer or carrier to be loaded from being affected by moisture, it is usually necessary Carry out the humidity detection of the cleaned material transfer box or its box body; in this regard, the CN102804332B patent has a conceptual teaching in the drying process in a negative pressure chamber environment after wet cleaning of the front cover and box body. The humidity sensor can be used to monitor the drying process and the end point; however, the CN102804332B patent does not further teach how the humidity sensor can monitor the humidity of the transport box after cleaning and drying in the drying chamber or other locations; this is a shortcoming, the new model is Further specific techniques are proposed to overcome this shortcoming.

The purpose of the present invention is to improve the existing transmission boxes of wafers or carrier boards, etc., which can sequentially perform the detection of cleaning results after automatic cleaning, and the cleaning results include detection of humidity and amount of dust.

For this reason, this new model specially integrates the cleaning result detection technology into the cleaning processing area station of the material transfer box to ensure that the material transfer box passes through the cleaned material transfer box. The humidity and the amount of dust falling, or the humidity and amount of dust falling on the inner and outer surfaces of the box, can meet the ideal dryness and cleanliness requirements to facilitate the cleaning results of quality control.

For this reason, the preferred first embodiment of the present invention is to provide a cleaning result detection device for the material transfer box, which can be widely used for the wafer transfer box or the circuit carrier board made of EMIB and ABF build-up materials (hereinafter referred to as The transfer box of the carrier board) is used for automated cleaning results detection operations. Specifically, this The new detection device is set in a clean processing area station of the material transfer box. The material transfer box can be separated into a front cover and a box body in the cleaning processing area station. The front cover and the box body can each or Receive the cleaning processing of multiple chambers in the processing area station together, and then combine them into a cleaned material transfer box. in, The detection device uses at least one of the front cover and the box body as a detection object, and the plurality of chambers include at least one drying chamber. The detection device is installed in at least one of the drying chambers and includes: an air inlet, a positive pressure channel, and at least one detection element. Wherein, the air inlet is provided on one side of at least one of the drying chambers and is connected to an air supply. The air inlet can guide clean dry air into at least one of the drying chambers to release the vacuum and generate energy The positive pressure dry air contacting the inner surface and the outer surface of the detection object is used to absorb at least one cleaning result judgment factor remaining on the detection object after drying; the positive pressure channel is a multi-way pipe connected to at least one of the The drying chamber is constructed and formed to discharge at least one positive pressure dry air in the drying chamber; at least one detection element is installed on the multi-way pipe to detect the cleanliness in the positive pressure dry air The content of the outcome judgment factor.

In a further implementation, it further includes a negative pressure channel, the negative pressure channel and the positive pressure channel share the multi-way pipe, and the negative pressure channel is connected to an air pump, and the air pump is connected to at least one of the multi-way pipes. Drying chamber. At least one of the drying chambers is provided with a negative pressure capturing hole, and the multi-way pipe is connected with at least one of the drying chambers through the negative pressure capturing hole.

In a further implementation, the positive pressure channel is formed in the multi-way tube, at least one of the drying chambers is also provided with a positive pressure capture hole, and the multi-way tube is connected to at least one of the at least one through the positive pressure capture hole. The drying chamber is connected.

In addition, in order to achieve the same purpose, the present invention also discloses a second preferred embodiment, explaining that the detection device is also set in the cleaning processing station of the material conveying box, and the cleaning processing station includes more than In addition to each of the chambers, it also includes at least one platform. The material transfer box can be separated on at least one of the platforms into a front cover and a box body. The front cover and the box body can receive the processing station separately or together. Cleaning processing of a plurality of said chambers, and the front cover, The box body can be combined on at least one of the platforms to form a cleaned material transfer box, and the material transfer box is used as a detection object. The detection object has a first interface and a second interface. The detection device is installed at least A said platform and includes: an air inlet nozzle, an exhaust nozzle, a multi-way pipe and a detection element; wherein, The air inlet nozzle is arranged on at least one side of the platform and communicates with the first interface, and the air inlet nozzle is connected to an air supply machine for guiding clean and dry air through the air inlet nozzle, The first interface enters a closed accommodating chamber of the detection object, and generates positive pressure dry air that can contact the inner surface around the closed accommodating chamber, so as to absorb at least the dry air remaining on the inner surface of the closed accommodating chamber after drying. A cleaning result judgment factor; the exhaust nozzle is arranged on the other side of at least one of the platforms and communicates with the second interface, and the exhaust nozzle is used to guide the positive pressure dry air in the enclosed compartment Exhaust to the outside; the multi-way pipe is connected to the exhaust nozzle to capture the positive pressure dry air in the enclosed accommodating compartment; the detection element is installed in the multi-way pipe to detect the positive pressure dry air The content of the cleaning result judgment factor.

In a further implementation, at least one of the platforms is a loading port in the cleaning processing station for placing the material transfer boxes before and after cleaning.

In addition, the present invention also includes the following technical content that can be implemented separately or jointly in the above-mentioned first and second embodiments: a plurality of the chambers include at least one cleaning chamber, and at least one of the cleaning chambers is arranged There are multiple spray nozzles for wet cleaning the front cover and the box body. In addition, at least one of the cleaning chambers may be provided with a plurality of blowing elements to remove liquid from the front cover and the box body after wet cleaning.

The plurality of chambers further include at least one liquid removal chamber, and a plurality of blowing elements are arranged in at least one of the liquid removal chambers to remove liquid from the front cover and the box body after wet cleaning.

The plurality of chambers includes at least one drying chamber, and at least one The drying chamber is provided with a negative pressure channel connected to an air pump to capture air in the drying chamber to generate a vacuum, and at least the box system is dried in the vacuum drying chamber.

The multi-way pipe is also connected with an air extractor, so that the detection element is installed in the multi-way pipe between the exhaust nozzle and the air extractor.

The detection element is a humidity sensor, and the cleaning result judgment factor is water molecules absorbed by the positive pressure dry air.

The detection element is a particle counter, and the cleaning result judgment factor is the dust particles absorbed by the positive pressure dry air.

At least one suspension support rod protrudes from the bottom of the box body, and the inner surface around the enclosed storage compartment includes the surrounding surface of the suspension support rod.

Based on the above, the technical effects of the present invention are:

1. Use the existing drying chamber in the cleaning processing area station, which can establish negative pressure to generate vacuum conditions, as the cleaning result judgment of the inspection object (including at least one of the box body and the front cover) after cleaning Factors (including water molecules, dust particles) detection site, and can rely on the introduction of positive pressure dry air into the drying chamber to release the vacuum (that is, vacuum breaking), and further guide and discharge the positive pressure dry air During the process, the positive pressure dry air can be effectively captured and detected to contain the content and quantity of the cleaning result judgment factor; in this way, not only can the positive pressure dry air be used as a drainage, but it is also effective and convenient to detect the wet After cleaning and drying, the inner and outer surfaces of the box body meet the ideal dryness and cleanliness requirements, and the structure complexity of the cleaning result detection device can be simplified.

2. Use a platform in the cleaning processing area station where the material transfer box can be placed as a testing place for the detection of the cleaning result judgment factors (including water molecules and falling dust particles) contained in the inspection object (ie the cleaned material transfer box). The platform can be a platform equipped with an existing load port in the cleaning processing area station, or an independent table constructed in the cleaning processing area station, or the top surface of the chamber can be used as the platform, so as to be able to rely on Existing or newly-added configuration on the described platform The air connector, in particular, can use the air inlet connector to guide clean and dry air into the enclosed accommodating chamber of the test object to generate positive pressure dry air, and can also use the exhaust connector to discharge and collect the positive pressure dry air; In this way, when the platform provided on the load port is used as a testing place, not only the existing inlet and exhaust nozzles on the load port can be used to guide the positive pressure dry air, but also the positive pressure dry air can be used As a drainage, it can effectively and conveniently detect whether the inner surface of the enclosed container of the test object meets the ideal dryness and cleanliness requirements. In addition, it can also simplify the structural complexity of the cleaning result detection device.

The features and technical effects of the various embodiments disclosed herein will be presented in the following description and illustrations.

10: Material transfer box

10a: Enclosed storage compartment

11: Box body

11a: wall surface

11b: bottom

11c: opening

11d: first interface

11e: second interface

11f: inner surface

11g: outer surface

12: Front cover

13: Ribs

14: containing cavity

15: Support rod

16: carrier board

16a: double ended

16b: middle section

20: Robotic arm

30: load port

31: Platform

32: Linear drive

33: Rotator

34: Exhaust nozzle

35: Inlet nozzle

36: side wall

40: Front cover cleaning chamber

50: Box cleaning chamber

50a: cover

51: Spray nozzle

511: Wall spray nozzle

512: Rotary spray nozzle

60: Box body liquid removal chamber

70: box drying chamber

70a: cover

71: negative pressure channel

71a: Negative pressure capture hole

72: Thermal element

721: Vertical electric heating plate

722: Wall type electric heating plate

73: Positive pressure channel

73a: Positive pressure capture hole

74: Insulation layer

75: air inlet

76: Air pump

77: Exhaust Machine

78: air supply machine

80: Multi-channel

81: Humidity sensor

82: Particle Counter

90: Clean Processing Zone Station

D: predetermined direction

L: open position

S1 to S4: Step description of the first and second embodiments

S3-1 to S3-3: Process description of the first embodiment

S4-1 to S4-4: Process description of the second embodiment

Figure 1 is an exploded perspective view of a material transfer box.

Figures 2 and 3 are cross-sectional views of the material transfer box from different perspectives.

Fig. 4 is a flowchart of the steps and process flow of the first embodiment of the cleaning result detection method of the new material transfer box.

Fig. 5 is a flowchart of the steps and process of the second embodiment of the cleaning result detection method of the new material conveying box.

6 to 12 are schematic diagrams of the actions of the new cleaning performance detection method in sequence.

Figure 13 is a schematic diagram of the configuration of the new cleaning processing zone station.

Fig. 14 is a perspective schematic view of the platform provided by the loading port in Fig. 13.

15 is a cross-sectional view of the drying chamber of the box in FIG. 13.

In the following embodiments of the present invention, the term "cleaning" is not the same as the term "cleaning", where "cleaning" includes the steps of "wet cleaning and drying"; in addition, the present invention uses the term "step" to indicate a In the cleaning processing area, the cleaning procedures are performed on the objects, and the term "process" indicates that the procedures for performing the "cleaning result detection" on the material conveying box or the inspection objects hidden in the above cleaning steps are included.

Please refer to Figure 4 to illustrate the cleaning of the material transfer box provided by the present invention The result detection device can be easily implemented through a cleaning result detection method of a material transfer box. The first embodiment of the cleaning result detection method of the material transfer box is implemented in a cleaning processing station 90 (as shown in FIG. 13 ), the cleaning processing area station 90 can be surrounded by the chamber for wet cleaning and drying of the material transfer box 10 and related equipment to form a polygonal station area, and the cleaning processing area station 90 is also equipped with a picking and moving The robot arm 20 for separating, releasing and assembling the material transfer box 10 (as shown in FIG. 13), accordingly, it is convenient to use the cleaning processing area station 90 to perform the following cleaning processing steps S1 to S4 on the material transfer box 10:

Step S1: Separate the material transfer box

Please refer to Figure 7 and Figure 13 together to illustrate the transfer equipment (not shown) around the cleaning processing area station 90. The material transfer box 10 to be cleaned will first be transferred to the cleaning processing area station 90, and the robotic arm 20 will be connected. Will capture and move the material transfer box 10 to an opening position L in the cleaning processing area station 90 by clamping the outer walls of the box body 11 of the material transfer box 10; the opening position L is set There is a holding member and an opening key (not shown) for the front cover 12 of the material transfer box 10. The holding member can be made of suckers or other elements such as movable hooks, and the front cover 12 is originally That is, there is a key hole corresponding to the opening key (not shown); when the mechanical arm 20 picks up and moves the material transfer box 10 to the opening position L, the predetermined opening 11c position of the box body 11 can just face the opening. The direction of the cover position L, and the front cover 12 can be in contact with the holder at the opening position L, so that the holder can absorb or embed the front cover 12 on the box body 11. At this time, the opening at the opening position L The key can be implanted in the key hole of the front cover 12, open the cover key and start the rotation to release the interlocking state between the front cover 12 and the box body 11 through the tenon, and then make the box 11 that has been clamped The mechanical arm 20 generates a retracted movement to complete the lid opening action, and then the mechanical arm 20 moves the box body 11 away from the front cover 12 so that the opening 11c of the box body 11 is exposed to the outside.

Step S2: Wet clean the front cover and box body

Please refer to FIG. 13, which discloses the wet cleaning of the front cover 12 and the box body 11 in the cleaning processing area station 90 as an example. As an implementation description, the front cover 12 is included in the cleaning (including the wet cleaning step). Is entered in a front cover cleaning chamber 40 Yes, the wet cleaning step of the box body 11 is performed in a box body cleaning chamber 50. The front cover cleaning chamber 40 and the box body cleaning chamber 50 can be distributed around the cleaning processing station 90.

In addition, the separated front cover 12 and box body 11 can also receive simultaneous wet cleaning in the same cleaning chamber, which is also an application covered by the present invention. However, for the box body 11 whose structure is relatively more complicated than that of the front cover 12, the present invention proposes to use a separate box body cleaning chamber 50 for wet cleaning of the box body 11, which can achieve a better cleaning effect. However, for the front cover 12 whose structure is relatively simpler (not complicated) than the box body 11, the steps of wet cleaning and liquid removal can be performed sequentially in the dedicated front cover cleaning chamber 40, that is, it can achieve cleanliness. Effect.

Regarding the wet cleaning of the box body 11, it must be noted that the robot arm 20 can expose the opening 11c to the outside when the box body 11 is moved. Therefore, when the box body 11 is wet cleaned, the robot arm 20 can make the box body 11 move. The opening 11c is placed in the box cleaning chamber 50 in a downward manner (that is, in the same direction as the action of gravity), so that the cleaning liquid remaining on the inner surface 11f and the outer surface 11g around the box 11 can be left. It can follow the gravity and leave the box body 11 through the opening 11c more smoothly, so as to reduce or eliminate the burden of the subsequent liquid removal.

In addition, the above-mentioned wet cleaning step S2 may or may not include the step of removing liquid from the front cover 12 and the box body 11 that have been wet cleaned; in other words, the front cover cleaning chamber 40, the box body cleaning chamber 50 or In the cleaning chamber shared by the front cover and the box body, multiple liquid spray elements and multiple blowing elements can be arranged at the same time, so that the multiple liquid spray elements spray cleaning liquid to the front cover 12 and the surrounding surface of the box body 11. Implement wet cleaning, and then inject dry gas into the front cover 12 and the surrounding surface of the box body 11 by a plurality of the blowing elements, so that the cleaning liquid attached to the front cover 12 and the surrounding surface of the box body 11 can be fully blown off , And then complete the wet cleaning step S2 of the front cover 12 and the box body 11.

When the wet cleaning step S2 does not include the liquid removing step, at least one liquid removing chamber can be added to the cleaning processing area station 90, especially including a box body liquid removing chamber 60 dedicated to the box body 11 (as shown in FIG. 13) or a liquid removal chamber shared by the box body and the front cover, and a plurality of the blowing elements can be arranged in the liquid removal chamber, so as to After the wet cleaning, the front cover 12 and the box body 11 are removed.

Please refer to FIG. 8 to illustrate that when the box body 11 is specially wet-cleaned in the box body cleaning chamber 50, a plurality of liquid spray nozzles 51 can be arranged in the box body cleaning chamber 50 as the liquid spray element. The inner surface 11f and the outer surface 11g of the body 11 are sprayed with cleaning liquid to complete the wet cleaning step of the box body 11. Wherein, the plurality of liquid spray nozzles 51 includes a plurality of wall surface liquid nozzles 511 arranged on the inner wall of the box body cleaning chamber 50, and a plurality of rotating spray nozzles that can be implanted in the containing cavity 14 of the box body 11. Liquid nozzle 512; a plurality of the wall surface spray nozzles 511 can spray cleaning liquid to flush the outer surface 11g around the box body 11, and a plurality of the rotary liquid nozzles 512 can spray the cleaning liquid in a 360-degree rotating manner The inner surface 11f around the box body 11. In addition, the inner surface 11f of the box body 11 also includes the comb-shaped ribs 13 and the surrounding surface of the suspended support rod 15 provided in the box body 11; therefore, a plurality of the rotating liquid nozzles 512 are particularly It can spray the cleaning liquid on the surrounding surfaces of the comb-shaped fins 13 and the suspended support rod 15 in a 360-degree rotating manner, so that the dirt on the comb-shaped fins 13 and the suspended support rod 15 can be cleaned The liquid is fully flushed from multiple angles and leaves the inner surface 11f. The box body cleaning chamber 50 is implemented with a liftable cover plate 50a. When the cover plate 50a is opened, the box body cleaning chamber 50 is connected to the outside, so that the robot arm 20 can perform The box 11 for wet cleaning is placed in the box cleaning chamber 50, or the box 11 for which the wet cleaning has been completed is retrieved from the box cleaning chamber 50; otherwise, when the When the cover plate 50a is closed, a closed space is formed in the box body cleaning chamber 50 to facilitate the wet cleaning step for the box body 11 in the box body cleaning chamber 50, and to avoid When the box body 11 performs the wet cleaning step, the cleaning liquid splashes out of the box body cleaning chamber 50.

Step S3: Dry the front cover and box body

Please refer to Figures 4 and 13 to illustrate the steps of drying the front cover 12 and the box body 11 in the cleaning processing area station 90; wherein, because the structure of the surrounding surface of the front cover 12 is relatively uncomplicated, the front cover 12 The drying step can be grouped and performed in the front cover cleaning chamber 40, or two or more front cover cleaning chambers 40 may be used to perform the wet cleaning and drying steps of the front cover 12 respectively. The drying step of the box 11 The first step is performed in a box drying chamber 70, and the box drying chamber 70 is arranged in the cleaning processing area station 90.

Please refer to Figure 9, which illustrates that the box body 11 can be dried in the box body drying chamber 70 with the opening 11c facing downward; in this embodiment (the first embodiment), the inside of the box body drying chamber 70 must be A vacuum chamber environment with negative pressure is generated, and a plurality of thermal energy elements 72 are used together; in addition, the thermal energy elements 72 may be planar electric heating plates, so that when the box body 11 is placed inside the box body drying chamber 70, The plurality of planar electric heating plates can be distributed around the inner surface 11f and the outer surface 11g of the box body 11, and the inner surface 11f and the outer surface 11g of the box body 11 are dried after wet cleaning. In addition, the plurality of thermal energy elements 72 can also be infrared heaters, but the effect is not ideal, so it will not be repeated.

In particular, in the present implementation (ie the first embodiment) of the present invention, the cleaning result detection method is included in the box body drying process in step S3. Specifically, the cleaning result detection method can be specific to the box. The body 11 or the front cover 12 performs the cleaning result inspection of the following steps S3-1 to S3-3. in:

Process S3-1: Selection of testing locations and testing objects

Please refer to FIG. 10 to illustrate that in this implementation, for example, the box body drying chamber 70 is selected as the inspection place, and the box body 11 that has been dried in a vacuum environment is used as the inspection object, so that the cleaned box body 11 can implement the cleaning results Detection.

Process S3-2: Introduce dry air into the inspection place to break the vacuum

As shown in Figure 10, it is explained that the clean dry air is introduced into the selected box drying chamber 70 (i.e., the inspection place), so that the dry air can be used to release the vacuum state in the box drying chamber 70 (ie, breaking the vacuum). ), and the introduced dry air can generate a positive pressure dry air in the box drying chamber 70, that is, the air pressure in the box drying chamber 70 is greater than the outside atmospheric pressure, so as to facilitate the drying by positive pressure The air contacts the inner surface 11f and the outer surface 11g of the box body 11, and uses positive pressure dry air to absorb the water molecules of the cleaning liquid that has not been volatilized on the inner and outer surfaces 11f and 11g of the box body 11; The water molecules absorbed by the dry air are used as a judgment factor for the cleaning results in the subsequent implementation of the test.

Process S3-3: Extract positive pressure dry air

As shown in FIG. 10, it is illustrated that a negative pressure flow of less than 1 atm (which can be provided by an air pump) is used to capture the positive pressure dry air in the box drying chamber 70.

Process S3-4: Check the judgment factor of cleaning performance

As shown in FIG. 10, it is explained that at least one detecting element is used to also detect the content of the cleaning result judgment factor in the positive pressure dry air. Furthermore, the detection element may be a humidity sensor 81 or a particle counter 82; the humidity sensor 81 and the particle counter 82 may also exist at the same time.

When the detection element is a humidity sensor 81, the cleaning result judgment factor is the water molecules absorbed by the positive pressure dry air, so that the humidity sensor 81 can read the content of the water molecules, and then determine the cleaned box body Whether the humidity of 11f and 11g on the inner and outer surfaces of 11 meets the established drying standards. In addition, when the detection element is a particle counter 82, the cleaning result determination factor is the dust particles absorbed by the positive pressure dry air, so that the content of the dust particles can be read through the particle counter 82, and then the cleaning result can be determined. Whether the cleanliness of the inner and outer surfaces 11f and 11g of the box body 11 have met the established cleaning standards.

Step S4: Combine the front cover and the box body

This step is performed after completing the above-mentioned step S3-4. Please refer to FIG. 11, which illustrates that the front cover 12 that has undergone the wet cleaning and drying steps is first placed on the opening position L. The opening position L can also be regarded as a closing position. In detail, the current cover 12 After the wet cleaning (which may include liquid removal) and drying, and the box body 11 also completes the wet cleaning (which may contain liquid removal) and drying steps, it can be carried by the robotic arm 20 in the opening position L ( That is, the closed position) is assembled to buckle, so as to be combined into a material transfer box 10 that meets the double standards of dryness and cleanliness after cleaning and after the completion of the cleaning result test.

On the other hand, please refer to FIG. 13 again to illustrate the assembly state of the cleaning result detection device of the present invention, which is set in the cleaning processing station 90 of the material transfer box. As mentioned above, the cleaning processing area station 90 includes a front cover 12, at least one of the cleaning chambers of the box body 11, and at least one of the drying chambers. The mechanical arm 20, so that the front cover 12 and the box body 11 can each or Accept the cleaning processing of multiple chambers in the processing area station 90 together (please refer to the foregoing, and will not be repeated).

Please further refer to FIGS. 10 and 10a to illustrate that the cleaning result detection device of the present invention is installed in at least one of the drying chambers, and at least one of the front cover 12 and the box body 11 is used as a detection object. In FIGS. 10 and 10a, at least one of the drying chambers takes the box body drying chamber 70 as an example, and the box body 11 is used as an example to detect the object. It is illustrated that the box body drying chamber 70 is provided with a negative pressure channel. 71 and a plurality of thermal energy elements 72. The negative pressure channel 71 is connected between the box drying chamber 70 and an air pump 76 for capturing air in the box drying chamber 70 to generate a vacuum environment. The thermal energy element 72 can dry the box body 11 implanted in the box body drying chamber 70.

The cleaning result detection device is provided in the box body drying chamber 70 and includes a negative pressure capturing hole 71a, an air inlet 75, a multi-way pipe 80 and at least one detection element. Wherein: the negative pressure capture hole 71a is provided on one side of the box drying chamber 70 to connect to the suction pump 76 capable of generating a negative pressure power source to construct a negative pressure of the box drying chamber 70 The channel 71 is used to guide the negative pressure generated by the suction pump 76 to make the box drying chamber 70 form the vacuum environment.

The air inlet 75 is provided on the other side of the box drying chamber 70, and can be connected to a pipeline to directly capture ultra-pure air (X-CDA) capable of generating positive pressure power into the box drying chamber 70; Alternatively, the air inlet 75 is connected to an air supply unit 78 equipped with a filter element via a pipeline, or the filter element is installed on the pipeline between the air inlet 75 and the air supply machine 78, by virtue of the air supply machine 78 Positive pressure power is generated, and clean dry air (CDA) is provided to be introduced into the box drying chamber 70 through the air inlet 75. According to these configurations, the negative pressure environment in the box drying chamber 70 can be converted to a positive pressure environment, so as to release the vacuum state in the box drying chamber 70, and generate contact with the box 11 in the box drying chamber 70. The positive pressure dry air of the inner and outer surfaces 11f and 11g is used to absorb the cleaning result judgment factor, and the positive pressure dry air with the cleaning result judgment factor can be maintained for a certain period of time through the negative pressure extraction hole 71a Drain to the manifold 80, The humidity sensor 81 and the particle counter 82 (that is, the detection element) can smoothly sample from the positive pressure dry air (that is, the cleaning result judgment factor) to detect the humidity and the content of dust particles.

The multi-way pipe 80 is a tube or flow channel with a plurality of connected ports, so that one of the multiple ports of the multi-way pipe 80 is connected to the box drying chamber 70; further, the multi-way pipe 80 There are two options for the connection between the tube 80 and the box drying chamber 70 and the effect it produces in the present invention. Wherein, FIG. 10 discloses the first connection mode of the multi-way tube 80, and FIG. 10a discloses the second connection mode of the multi-way tube 80.

In the implementation of FIG. 10, the multi-way tube 80 can be used as the negative pressure channel 71 and the positive pressure channel 73 of the box drying chamber 70 at the same time; The two ports are respectively connected between the negative pressure capture hole 71a and the suction pump 76 as the negative pressure passage 71 of the box drying chamber 70, and at the same time, make the multiple passage ports of the multi-way pipe 80 The other one or two ports are used to install at least one of the detection elements, so that the multi-way pipe 80 can also be used as a positive pressure channel 73 for discharging positive pressure dry air. Among them, it must be noted that the multi-way tube 80 has multiple channels with fork-shaped branches (that is, non-series connection), and the multiple passage ports of the multi-way tube 80 are distributed in the fork-shaped channels for installation or assembly. The detection element and the suction pump 76 provided in the port can be located in the non-series connection channel of the multi-way pipe 80, so that the multi-way pipe 80 can guide the negative pressure flow and the positive pressure dry air flow in a split manner; in addition, The at least one detection element can be a humidity sensor 81 or a particle counter 82, or a humidity sensor 81 and a particle counter 82; when the humidity sensor 81 and a particle counter 82 are configured together, they can be installed in the same channel in the fork-shaped branch channel. The two ports inside are used to detect the content of the cleaning result judgment factor in the positive pressure dry air, and when the detection element is detecting, the suction pump 76 is not started, so the positive pressure dry air can pass through more smoothly. The positive pressure channel 73 of the through pipe 80 discharges the flow, and then receives the detection element to detect the content of the cleaning result judgment factor in the positive pressure dry air.

In the implementation of FIG. 10a, it is revealed that the multi-way pipe 80 is only used as a positive pressure passage 73 for discharging positive pressure dry air from the drying chamber 70 of the box body, instead of being used as The negative pressure channel 71 is used. The negative pressure passage 71 can be connected between the negative pressure capture hole 71a of the box drying chamber 70 and the suction pump 76 by using a general pipe or flow channel, and is responsible for guiding the negative pressure generated by the suction pump 76 to the drying chamber. Create a vacuum. In this application, the box drying chamber 70 must also be provided with a positive pressure capturing hole 73a, and the multi-way pipe 80 is connected to the box drying chamber 70 through the positive pressure capturing hole 73a, so that the multi-way The inside of the tube 80 becomes a positive pressure channel 73 through which the positive pressure dry air is discharged to the outside. At least one detection element detects the content of the cleaning result determination factor in the positive pressure dry air in the positive pressure channel 73.

In addition, in the implementation of FIGS. 10 and 10a, the plurality of thermal energy elements 72 include a plurality of built-in vertical electric heating plates 721 and a plurality of wall-type electric heating plates 722; the vertical electric heating plates 721 are vertically installed In the box body drying chamber 70, after the box body 11 is placed into the box body drying chamber 70, the vertical electric heating plate 721 can be implanted in the containing cavity 14 of the box body 11, so that the vertical The vertical electric heating plate 721 can be implanted in the gap between the double-sided fins 13 and the suspended support rod 15 to provide heat radiation energy, and then the inner surface 11f of the box body 11 can be dried adjacently; the plurality of wall-type electric heating plates 722 is attached to the outer wall of the box drying chamber 70, and the outer wall of the box drying chamber 70 is covered with a layer of insulation material after the wall-shaped electric heating plate 722 is attached. The thermal insulation layer 74 is made so that the wall-shaped electric heating plate 722 can be located between the surrounding outer wall of the drying chamber 70 of the box body and the thermal insulation layer 74 thereof. According to this implementation, the heat radiation generated by the vertical electric heating plate 721 can be directly radiated to the inner surface 11f around the box body 11, and the heat radiation generated by the wall-type electric heating plate 722 can pass through the box. The conduction of the surrounding walls of the body drying chamber 70 radiates heat energy to the outer surface 11g around the box body 11; in particular, it can make the inner and outer surfaces 11f of the box body 11 after liquid removal (that is, after liquid beads are removed) , 11g of possible residual water molecules can be fully evaporated by the heat radiation energy during the drying step, and the ideal drying effect can be obtained.

Furthermore, the box drying chamber 70 is implemented with a flip-out cover 70a. When the cover 70a is opened, the box drying chamber 70 is connected to the outside, so that the robotic arm 20 can The box body 11 to be dried is placed in the box body drying chamber 70, or the completed box is retrieved from the box body drying chamber 70 Said dried box 11; On the contrary, when the cover 70a is closed, a closed space is formed in the box drying chamber 70, so as to facilitate the drying of the box 11 in the box drying chamber 70 The drying step is successfully completed in a vacuum environment.

It should be noted that the negative pressure capturing hole 71a, the positive pressure capturing hole 73a, and the air inlet 75 are respectively provided with automatic valves (such as solenoid valves).

In the implementation shown in FIG. 10, the automatic valve of the negative pressure capturing hole 71a can control the timing of the negative pressure flow entering the box drying chamber 70 through the negative pressure capturing hole 71a, and the positive pressure dry air passing through the negative pressure capturing hole The timing 71a exits the box drying chamber 70, and the automatic valve of the air inlet 75 can regulate the timing of the dry air entering the box drying chamber 70 through the air inlet 75 to generate positive pressure. Furthermore, when the negative pressure capturing hole 71a generates a negative pressure in capturing the air in the box drying chamber 70, the air inlet 75 is closed to facilitate the generation of a vacuum environment in the box drying chamber 70; In addition, when the air inlet 75 is opened to guide the dry air into the box drying chamber 70, the negative pressure capturing hole 71a is closed to facilitate the generation of positive pressure dry air in the box drying chamber 70; When the negative pressure capturing hole 71a discharges positive pressure dry air, the air inlet 75 maintains an open state, so that the dry air in the box drying chamber 70 can maintain a positive pressure discharge state for a certain period of time to facilitate cleaning Sampling of outcome judgment factors.

In the implementation shown in Figure 10a, the automatic valve of the negative pressure capture hole 71a can control the timing of the negative pressure flow entering the box drying chamber 70 through the negative pressure capture hole 71a, and the positive pressure dry air through the positive pressure capture hole The timing 73a to exit the box drying chamber 70, and the automatic valve of the air inlet 75 can regulate the timing of the dry air entering the box drying chamber 70 through the air inlet 75 to generate positive pressure. Furthermore, when the negative pressure capturing hole 71a generates negative pressure in the air in the drying chamber 70 of the capturing box, the positive pressure capturing hole 73a and the air inlet 75 are closed to facilitate the drying of the box. A vacuum environment is generated in the chamber 70; when the air inlet 75 is opened to guide dry air into the box drying chamber 70, the negative pressure capture hole 71a and the positive pressure capture hole 73a are closed to facilitate the box Positive pressure dry air is generated in the body drying chamber 70; when the positive pressure capture hole 73a is opened to discharge the positive pressure dry air, the air inlet 75 maintains an open state, and the negative pressure capture hole 71a is closed. The dry air in the drying chamber 70 of the box body can be maintained for a certain period of time Period of positive pressure drainage state to facilitate the sampling of cleaning results judgment factors.

It must be noted here that when facing the box body 11 with a more complicated structure, the suspended support rod 15 protruding from the bottom of the box body 11 (as shown in FIG. The surface 11f includes the surrounding surface of the suspended support rod 15, and through the cleaning result detection implemented by the present invention, it is possible to fully ascertain and control the box body 11 with the suspended support rod 15 and other complicated structures. Has truly reached the established dryness and cleanliness requirements.

Please refer to FIG. 5, which is a flowchart of the steps and processes of the second embodiment of the present invention, which illustrates the method for detecting the cleaning results of the material conveying box provided by the present invention. It is roughly the same as the first embodiment and is implemented as shown in FIG. 13 In the cleaning processing area station 90, the cleaning procedure from step 1 to step 4 of the first embodiment is performed for the material transfer box 10 that has not been cleaned. However, it must be noted that in the second embodiment, especially when the drying front cover 12 and the box body 11 in step 3 of the first embodiment are performed, it does not necessarily need to be performed in a vacuum environment; in other words, in the second In the embodiment, when the front cover 12 and the box body 11 are dried, the drying chamber or the box body drying chamber 70 can only have a normal pressure or a vacuum environment can be generated. Furthermore, the second embodiment is different from the first embodiment in that it also includes replacing the detected object with a material transfer box 10 that is combined after being dried, instead of the front cover 12 and the box body that have not been combined after being dried. 11 As the detection object, in other words, the cleaning result detection of the second embodiment is not performed in the drying chamber or the box drying chamber 70. Otherwise, the cleaning steps of the front cover 12 and the box body 11 of the second embodiment are the same as those of the first embodiment.

Accordingly, the cleaning result detection method of the second embodiment can perform the cleaning results of the following steps S4-1 to S4-4 for the material transfer box 10 formed after step 4 and cleaning are completed in the first embodiment. Detection. in:

Process S4-1: Selection of testing locations and objects to be tested

In this process, a platform 31 on which the material transfer box 10 can be placed in the cleaning processing area station 90 can be selected as a place for performing cleaning results detection; the platform 31 can be located in the cleaning processing area station 90 to provide a flat surface Any position of the domain, such as a stand-alone table, the top surface of the chamber, or an existing one used to provide mechanical The arm 20 picks up a loading port 30 for the material transfer box 10 to be cleaned and cleaned. In the second embodiment described below, the platform 31 provided by the load port 30 will be used as an explanation of the detection location.

In the first embodiment, the opening position L (ie, closing position) can be located on a side wall 36 of the platform 31 of the loading port 30, so that the robot arm 20 can be placed on the platform 31 to be cleaned nearby. Or the cleaned material transfer box 10 is opened and closed. Furthermore, the dried front cover 12 can be transported by the robotic arm 20 to move to the closed position (that is, the opening position L), and then the dried box 11 can also be moved by the robotic arm 20. It is transported and moved to the closed position (that is, the open position L), so that the box body 11 can be combined with the front cover 12 to form a cleaned material transfer box 10, and the cleaned material transfer box 10 has considerable dryness and A closed accommodating chamber 10a with a relatively clean degree; then, the cleaned material transfer box 10 can be placed and positioned on the platform 31 (as shown in FIG. 14) through the carrying and movement of the robotic arm 20. In this procedure, the cleaned material transfer box 10 that has been positioned on the platform 31 is selected as the detection object of the cleaning result.

Process S4-2: Introduce dry air into the inspection place

In this process, the platform 31 is used to guide clean and dry air into the enclosed accommodation chamber 10a of the test object, and a positive pressure dry air is generated in the enclosed accommodation chamber 10a to contact the enclosed accommodation chamber The inner surface 11f around 10a allows the positive pressure dry air to absorb and dry the cleaning result judgment factor remaining on the inner surface 11f around the enclosed accommodating chamber 10a.

Process S4-3: Extract positive pressure dry air

In this process, the multi-way pipe 80 connected to the platform 31 is used to guide the positive pressure dry air that has absorbed the cleaning result judgment factor in the enclosed storage compartment 10a to be discharged to the outside to facilitate the acceptance of the test; among them, due to the positive pressure The dry air already has a positive pressure greater than 1 atm, so it can be smoothly discharged to the outside through the pipe.

Process S4-4: Checking the judgment factor of cleaning performance

In this step, at least one detection element is used on the multi-way pipe 80 to detect the content of the cleaning result judgment factor in the positive pressure dry air. Of this process The implementation content and the specific objects and details of the detectable cleaning result judgment factor are the same as the above-mentioned process S3-4 disclosed in the first embodiment (not repeated here), and the cleaning result detection of the second embodiment is completed accordingly. method.

On the other hand, please refer to FIGS. 13 and 14 again. It is disclosed that the material transfer box 10 has a plurality of first ports 11d for filling gas into the material transfer box 10, and a plurality of second ports 11e that can discharge gas; An interface 11d and a second interface 11e are respectively equipped with a check function, and the controlled gas can only enter the material transfer box 10 through the first interface 11d in one direction, and discharge the material transfer box 10 through the second interface 11e in one direction; the platform An intake nozzle 35 and an exhaust nozzle 34 are provided on 31.

Further, the platform 31 is also equipped with at least one linear drive 32 for moving the material transfer box 10, and the material transfer box 10 is driven by the linear drive 32 to move on the platform 31, and the linear drive 32 is being implemented. Above is a plurality of rollers corresponding to each other arranged on the platform 31, each roller can be driven by a motor and other drives to rotate synchronously, and then drive the material transfer box 10 displacement; the platform 31 is also configured to drive the material The transfer box 10 adjusts a rotary actuator 33 in the direction of the opening 11 c of the box body 11, and the rotary actuator 33 is located under the linear driver 32.

Accordingly, for the material transfer box 10 to be cleaned (that is, before cleaning), the linear drive 32 can be driven to move to the top of the rotary actuator 33, and then, the rotary actuator 33 can rise to remove the material to be cleaned. The conveyor box 10 lifts the off-line driver 32; then, the material conveyor box 10 is driven by the rotary actuator 33 so that the opening 11c of the box body 11 faces away from the mechanical arm 20 (that is, toward the predetermined direction D), and then the rotary The actuator 33 descends to place the turned material transfer box 10 on the linear drive 32; finally, the robotic arm 20 can pick up the turned material transfer box 10 to be cleaned and move it to the opening adjacent to the end of the platform 31 The cover position L separates the material transfer box 10 into a front cover 12 and a box body 11 at the cover opening position L.

In addition, for the material transfer box 10 that has been dried (that is, cleaned), the robotic arm 20 can capture the front cover 12 and the box body 11 that have been dried together in the drying chamber, or capture the box body drying chamber 70 and The box body 11 and the front cover 12 are cleaned in the front cover cleaning chamber 40, and the box body 11 and the front cover 12 are in the open position The L is assembled and buckled together to form the material transfer box 10 and then placed on the platform 31.

The air inlet nozzle 35 is arranged on one side of the platform 31 and connected to the air supply unit 78. Accordingly, during the implementation of the above-mentioned steps 4-1 to 4-2 of the second embodiment, that is, when the material transfer box 10 is placed and positioned on the platform 31, the air inlet nozzle 35 can be inserted and communicated with the The first interface 11d allows the air supply 78 to guide the clean dry air through the air inlet nozzle 35 and the first interface 11d to enter the enclosed compartment 10a of the cleaned material transfer box 10 to generate positive pressure dry air .

The exhaust nozzle 34 is provided on the other side of the platform 31. The exhaust nozzle 34 is connected to the detection element (including the humidity sensor) via the multi-way pipe 80 in the first embodiment in a manner having a plurality of passage ports. 81. Particle counter 82) (as shown in FIG. 12), but the multi-way pipe 80 in the second embodiment may not be connected to the air pump 76 in the first embodiment. Accordingly, during the implementation of the above-mentioned steps 4-1 to 4-2 of the second embodiment, that is, when the material transfer box 10 is placed and positioned on the platform 31, the exhaust nozzle 34 can be inserted into and communicated with the second embodiment. The second interface 11e enables the positive pressure dry air that has absorbed the cleaning result judgment factor in the enclosed accommodating compartment 10a of the material transfer box 10 to be discharged to the multi-way pipe 80 through the second interface 11e and the exhaust nozzle 34, and The moisture sensor 81 detects the water molecule content in the positive pressure dry air, and the microparticle counter 82 detects the amount of dust falling in the positive pressure dry air (the detection method is the same as in the first embodiment).

It must be noted here that in the above-mentioned step S4-3 of the second embodiment, an air extractor 77 can also be connected to the multi-way pipe 80 to generate a negative pressure flow and accelerate the positive pressure in the material conveying box 10 The dry air receives the speed detected by the humidity sensor 81 and the particle counter 82 through the multi-way pipe 80 in order to increase the speed of detecting the cleaning result judgment factor. However, the air extractor 77 can be installed depending on the exhaust efficiency of the positive pressure dry air. Absolutely necessary and explain.

The above embodiments only express the preferred embodiments of the present invention, but they should not be interpreted as limiting the scope of the present invention. Therefore, this new model should be subject to the content of the claims defined in the scope of the patent application.

10: Material transfer box

20: Robotic arm

30: load port

31: Platform

32: Linear drive

33: Rotator

34: Exhaust nozzle

35: Inlet nozzle

36: side wall

40: Front cover cleaning chamber

50: Box cleaning chamber

50a: cover

60: Box body liquid removal chamber

70: box drying chamber

70a: cover

90: Clean Processing Zone Station

D: predetermined direction

L: open position

Claims (20)

A cleaning result detection device for a material conveying box is arranged in a cleaning processing area station of the material conveying box. The material conveying box can be separated into a front cover and a box body in the cleaning processing area station. The front cover and the box The body and can receive the cleaning processing of multiple chambers in the processing area station individually or together, and then combine them into a cleaned material transfer box, wherein the detection device uses at least one of the front cover and the box body as For detecting objects, the plurality of chambers include at least one drying chamber, and the detection device is installed in at least one of the drying chambers and includes: an air inlet provided on one side of at least one of the drying chambers; Connected to an air supply, the air inlet can guide clean dry air into at least one of the drying chambers to release the vacuum, and generate positive pressure dry air that can contact the inner and outer surfaces of the detection object. At least one cleaning result determination factor remaining on the test object after drying is absorbed; a positive pressure channel is constructed and formed by connecting at least one drying chamber with a multi-way pipe for discharging at least one of the drying chambers Positive pressure dry air; and at least one detection element installed on the multi-way pipe for detecting the content of the cleaning result judgment factor in the positive pressure dry air. The cleaning result detection device of the material transfer box according to claim 1, wherein the plurality of chambers further include at least one cleaning chamber, and at least one of the cleaning chambers is provided with a plurality of liquid spray nozzles, and the front cover , The box body is wet cleaned. According to the cleaning result detection device of the material conveying box of claim 2, a plurality of blowing elements are also arranged in at least one of the cleaning chambers to remove liquid from the front cover and the box body after wet cleaning. The cleaning result detection device of the material transfer box according to claim 2, wherein the plurality of chambers further include at least one liquid removal chamber, and a plurality of blowing elements are arranged in at least one of the liquid removal chambers to prevent moisture After cleaning, the front cover and the box body are deliquored. Such as the cleaning result detection device of the material transfer box described in claim 1, It also includes a negative pressure channel, the negative pressure channel and the positive pressure channel share the multi-way pipe, and the negative pressure channel is connected to an air suction pump which is connected to at least one of the drying chambers via the multi-way pipe. According to claim 5, the cleaning result detection device of the material transfer box, wherein at least one of the drying chambers is provided with a negative pressure capturing hole, and the multi-way pipe is connected to at least one of the drying chambers through the negative pressure capturing hole The rooms are connected. According to claim 1, the cleaning result detection device of the material conveying box, wherein the positive pressure channel is formed in the multi-way tube, at least one of the drying chambers is also provided with a positive pressure capture hole, and the multi-way tube passes through the The positive pressure capturing hole is connected with at least one of the drying chambers. The cleaning result detection device of the material conveying box according to claim 1, wherein the detection element is a humidity sensor, and the cleaning result judgment factor is water molecules absorbed by the positive pressure dry air. The cleaning result detecting device for the material conveying box according to claim 1, wherein the detecting element is a particle counter, and the cleaning result determining factor is the dust particles absorbed by the positive pressure dry air. The cleaning result detection device for a material conveying box according to any one of claims 1 to 9, wherein the detection object is the box body, and the bottom of the box body protrudes with at least one suspension support rod, and the detection object is surrounded by The inner surface includes the surrounding surface of the suspended support rod. A cleaning result detection device for a material transfer box is arranged in a cleaning processing area station of the material transfer box. The cleaning processing area station includes at least one platform and a plurality of chambers. The material transfer box can be mounted on at least one of the platforms. Separate into a front cover and a box body. The front cover and the box body can individually or together receive the cleaning processing of a plurality of the chambers in the processing area station, and the front cover and the box body can be installed on at least one of the platforms. The upper is combined into a cleaned material transfer box, and the material transfer box is used as a detection object. The detection object has a first interface and a second interface. The detection device is installed on at least one of the platforms and includes: a The air inlet nozzle is arranged on one side of at least one of the platforms and communicates with the first interface And the air inlet nozzle is connected to an air supply, which is used to guide clean and dry air into a closed accommodation chamber of the detection object through the air inlet nozzle and the first interface in order to generate contact with the closed chamber The positive pressure dry air on the inner surface around the accommodating cabin is used to absorb at least one cleaning result judgment factor remaining on the inner surface of the enclosed accommodating cabin after drying; an exhaust nozzle is provided on at least one of the platforms The other side is connected to the second interface, and the exhaust nozzle is used to guide the positive pressure dry air in the enclosed accommodating compartment to discharge to the outside; a multi-way pipe is connected to the exhaust nozzle for capturing The positive pressure dry air in the enclosed accommodating cabin; and a detection element installed in the multi-way pipe for detecting the content of the cleaning result judgment factor in the positive pressure dry air. According to claim 11, the cleaning result detection device of the material transfer box, wherein the plurality of chambers include at least one cleaning chamber, and at least one of the cleaning chambers is provided with a plurality of liquid spray nozzles, and the front cover, The box is wet cleaned. According to claim 12, the cleaning result detection device of the material transfer box, wherein a plurality of blowing elements are also arranged in at least one of the cleaning chambers to remove liquid from the front cover and the box body after wet cleaning. According to claim 12, the cleaning result detection device of the material transfer box, wherein the plurality of chambers further include at least one liquid removal chamber, and a plurality of blowing elements are arranged in at least one of the liquid removal chambers to prevent moisture After cleaning, the front cover and the box body are deliquored. According to claim 11, the cleaning result detection device of the material transfer box, wherein the plurality of chambers include at least one drying chamber, and at least one of the drying chambers is provided with a negative pressure channel connected to a suction channel The air pump captures the air in the drying chamber to generate a vacuum, and at least the box system is dried in the vacuum drying chamber. According to claim 11, the cleaning result detection device of the material transfer box, wherein at least one of the platforms is the cleaning processing area station for placing the cleaning results and The loading port for the cleaned material transfer box. According to claim 11, the cleaning result detection device of the material conveying box, wherein the multi-way pipe is also connected to an air extractor, so that the detection element is installed in the multi-way pipe between the exhaust nozzle and the air extractor. According to claim 11, the cleaning result detecting device of the material conveying box, wherein the detecting element is a humidity sensor, and the cleaning result determining factor is water molecules absorbed by the positive pressure dry air. According to claim 11, the cleaning result detecting device of the material conveying box, wherein the detecting element is a particle counter, and the cleaning result determining factor is the dust particles absorbed by the positive pressure dry air. The cleaning result detection device for a material transfer box according to any one of claims 11 to 19, wherein the bottom of the box body protrudes with at least one suspension support rod, and the inner surface around the enclosed storage compartment includes the suspension The surrounding surface of the support rod.

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