CN215953517U - Cleaning result detection device of material conveying box - Google Patents

Abstract

The utility model provides a cleaning result detection device of a material conveying box, which is arranged in a cleaning processing area station of the material conveying box and is used for detecting the cleaning result including humidity and dust falling amount aiming at the cleaned material conveying box or a box body of the material conveying box; wherein, the cleaning result detection of the box body is carried out in a drying chamber with a negative pressure environment in the cleaning processing area station, and the cleaning result detection of the material conveying box is carried out in a platform provided in the cleaning processing area station; so as to control the result and qualification rate of the material conveying box after performing automatic cleaning.

Description

Cleaning result detection device of material conveying box

Technical Field

The utility model relates to a conveying box for loading and transferring materials among different processing stations, and also relates to a cleaning result detection technology of the conveying box after wet cleaning, including humidity and dust falling amount, in particular to a cleaning result detection device of the material conveying box.

Background

In the prior art, the material transfer box closest to the present invention is a Front Opening Unified Pod (FOUP), which is used to carry semiconductor wafers.

Semiconductor wafers are subjected to high cleanliness during the manufacturing process, particularly within each processing station, and during the transport of the wafers between processing stations, particularly to avoid the occurrence of dust particles in the environment which can affect the yield of the wafers.

As is known, the above-mentioned wafer transfer cassettes are commonly used for transporting semiconductor wafers, so that the plurality of wafer transfer cassettes can pick up and hold wafers in each processing station through the operation of the automated handling system, and can transfer wafers between the processing stations, and then unload the wafers when the wafers reach the processing station of the destination.

The wafer conveying box is formed by mutually assembling and buckling an openable front cover and a box body, and the double side wall surfaces in the box body are provided with protruding comb-shaped ribs for supporting wafers accommodated in the box body, so that a plurality of wafers can be accommodated in each wafer conveying box.

Due to the high standard requirement of cleanliness, wafer transfer cassettes must be automatically cleaned after being used for a certain period of time. Currently, there are known advanced technologies for automatically cleaning a wafer transport box, which are disclosed in patents CN102804332B, TW201400202A (taiwan patent), CN1082222A, and US20140069467a1, etc., which teach that a cleaning station is provided in a wafer production line, an automated handling system is used to transfer a wafer transport box to be cleaned to a load port (load port) of the cleaning station, an automatic arm (robot) in the cleaning station is used to pick up the wafer transport box on the load port, and separate a front cover and a box body of the wafer transport box in advance, and then the front cover and the box body are automatically picked up through the steps of wet cleaning and drying by a cleaning solution, so as to clean particles possibly remaining on the inner and outer surfaces of the front cover and the box body, thereby improving the cleanliness of dust-free transport.

As is known, the wafer transfer box for dust-free wafer transfer is currently applied to the occasion of dust-free transfer of high-level circuit carrier boards, such as Embedded Multi-Die Interconnect Bridge (EMIB) circuit carrier boards or circuit carrier boards using ABF as a build-up material, and the surface area of these high-level circuit carrier boards is larger than that of the conventional PCB and is represented by a rectangular layout mode, so that the rigidity of the high-level circuit carrier boards is also softer than that of the conventional PCB. Therefore, when the objects in the conveying box are changed from the wafer to the high-order circuit carrier boards, the internal structure of the conveying box is changed, and then a plurality of high-order circuit carrier boards can be stably accommodated in each conveying box.

Referring to fig. 1, 2 and 3, a material conveying box 10 for accommodating the high-level circuit carrier board 16 (hereinafter referred to as carrier board 16) in the prior art is disclosed, in which a box body 11 and a front cover 12 have the same characteristics of a wafer conveying box, and particularly, a comb-shaped rib 13 is protruded on a double-side wall surface 11a of the box body 11. In addition, because the surface area of the carrier plate 16 as the accommodating object is relatively large and soft, a suspension support rod 15 protruding from the bottom 11b to the accommodating cavity 14 must be formed in the box 11, so as to support the two ends 16a of the carrier plate 16 by the two-sided fins 13 and to support the middle section 16b of the carrier plate 16 by the suspension support rod 15, thereby preventing the carrier plate 16 from collapsing or interfering with each other in the material conveying box 10 (as shown in fig. 1, 2 and 3).

It can be seen that the complexity of the internal structure of the material conveying box is affected by the difference of different objects, and particularly, the overall structure of the material conveying box 10 for loading the carrier plate 16, which has the comb-shaped fins 13 and the suspension-shaped support rods 15 inside the box body 11, is more complicated than the structure of the box body of the wafer conveying box. However, the material transport box according to the present invention includes the material transport box 10 for loading carrier plates in addition to the wafer transport box.

After the material conveying box is cleaned, in order to ensure that water molecules remaining in the box can be sufficiently removed to achieve an ideal drying effect and prevent wafers or carrier plates to be loaded from being affected by moisture, it is usually necessary to perform humidity detection on the cleaned material conveying box or the box body thereof; in this regard, there is a conceptual teaching in the CN102804332B patent that during the drying process in a chamber environment with negative pressure after wet cleaning the front cover and the box, a humidity sensor can be used to monitor the drying process and the end point; however, the CN102804332B patent does not further teach how the humidity sensor can perform humidity monitoring on the cleaned and dried transport box in the drying chamber or other locations; to overcome this drawback, the present invention further provides specific techniques to overcome the drawback.

SUMMERY OF THE UTILITY MODEL

The utility model aims to improve the existing conveying box for materials such as wafers or carrier plates, and can sequentially detect the cleaning results after automatic cleaning, wherein the cleaning results comprise humidity and dust falling amount detection.

Therefore, the utility model particularly integrates the cleaning result detection technology into the cleaning processing area station of the material conveying box to ensure that when the cleaned material conveying box is output from the cleaning processing area station, the humidity and the dust falling amount of the inner surface around the material conveying box or the humidity and the dust falling amount of the inner surface and the outer surface around the box body can meet the requirements of ideal dryness and cleanliness so as to be beneficial to quality control of cleaning results.

In order to achieve the purpose, the utility model adopts the technical scheme that:

the utility model provides a clean achievement detection device of material transfer box, sets up in the clean processing district station of material transfer box which characterized in that: the material conveying box can be separated into a front cover and a box body in the cleaning processing area station, the front cover and the box body can respectively or together receive cleaning processing of a plurality of chambers in the processing area station and then are combined into the cleaned material conveying box, wherein the detection device takes at least one of the front cover and the box body as a detection object, the plurality of chambers comprise at least one drying chamber, and the detection device is arranged in at least one drying chamber and comprises:

the air inlet is arranged on one side of the at least one drying chamber and connected with an air supply machine, and can guide clean dry air to enter the at least one drying chamber to remove vacuum and generate positive pressure dry air which can contact the inner surface and the outer surface of the periphery of the detection object and is used for absorbing at least one cleaning result judgment factor remained on the detection object after drying;

a positive pressure channel constructed by connecting a multi-way pipe with at least one drying chamber for discharging positive pressure drying air in at least one drying chamber; and

and the detection element is arranged on the multi-way pipe and is used for detecting the content of the cleaning result judgment factor in the positive pressure drying air.

Clean achievement detection device of material transfer box, wherein: the plurality of chambers further comprise at least one cleaning chamber, and a plurality of liquid spraying nozzles are distributed in the at least one cleaning chamber to perform wet cleaning on the front cover and the box body.

Clean achievement detection device of material transfer box, wherein: and a plurality of blowing elements are also arranged in at least one cleaning chamber for removing liquid from the front cover and the box body after wet cleaning.

Clean achievement detection device of material transfer box, wherein: the plurality of chambers further comprise at least one liquid removing chamber, and a plurality of blowing elements are arranged in the at least one liquid removing chamber for removing liquid from the front cover and the box body after wet cleaning.

Clean achievement detection device of material transfer box, wherein: the negative pressure channel and the positive pressure channel share the multi-way pipe, and the air pump is connected with at least one drying chamber through the multi-way pipe.

Clean achievement detection device of material transfer box, wherein: at least one drying chamber is provided with a negative pressure capturing hole, and the multi-way pipe is connected with at least one drying chamber through the negative pressure capturing hole.

Clean achievement detection device of material transfer box, wherein: the positive pressure channel is formed in the multi-way pipe, at least one drying chamber is also provided with a positive pressure capturing hole, and the multi-way pipe is connected with at least one drying chamber through the positive pressure capturing hole.

Clean achievement detection device of material transfer box, wherein: the detection element is a humidity sensor, and the cleaning result judgment factor is water molecules absorbed by the positive pressure dry air

Clean achievement detection device of material transfer box, wherein: the detection element is a particle counter, and the cleaning result judgment factor is dust falling particles absorbed by the positive pressure dry air.

Clean achievement detection device of material transfer box, wherein: the detection object is the box body, at least one suspension supporting rod is convexly extended at the bottom of the box body, and the inner surface of the periphery of the detection object comprises the surface of the periphery of the suspension supporting rod.

The utility model provides a clean achievement detection device of material transfer box, sets up in the clean processing district station of material transfer box which characterized in that: the clean processing area station comprises at least one platform and a plurality of chambers, the material conveying box can be separated into a front cover and a box body on at least one platform, the front cover and the box body can respectively or together receive the clean processing of the chambers in the processing area station, the front cover and the box body can be combined into the cleaned material conveying box on at least one platform, the material conveying box is used as a detection object, the detection object is provided with a first interface and a second interface, and the detection device is arranged on at least one platform and comprises:

the air inlet connector is arranged on one side of at least one platform and communicated with the first interface, and is connected with an air feeder to guide clean dry air to enter a closed accommodating cabin of the detection object sequentially through the air inlet connector and the first interface to generate positive pressure dry air capable of contacting the inner surface around the closed accommodating cabin and absorb at least one cleaning result judgment factor remained on the inner surface around the closed accommodating cabin after drying;

the exhaust connecting nozzle is arranged on the other side of the at least one platform and communicated with the second interface, and the exhaust connecting nozzle is used for guiding the positive pressure dry air in the closed accommodating cabin to be discharged outwards;

a multi-way pipe connected with the exhaust nozzle and used for capturing the positive pressure dry air in the closed containing cabin; and

and the detection element is arranged on the multi-way pipe and is used for detecting the content of the cleaning result judgment factor in the positive pressure drying air.

Clean achievement detection device of material transfer box, wherein: the plurality of chambers comprise at least one cleaning chamber, and a plurality of liquid spraying nozzles are distributed in the at least one cleaning chamber to wet clean the front cover and the box body.

Clean achievement detection device of material transfer box, wherein: and a plurality of blowing elements are also arranged in at least one cleaning chamber for removing liquid from the front cover and the box body after wet cleaning.

Clean achievement detection device of material transfer box, wherein: the plurality of chambers further comprise at least one liquid removing chamber, and a plurality of blowing elements are arranged in the at least one liquid removing chamber for removing liquid from the front cover and the box body after wet cleaning.

Clean achievement detection device of material transfer box, wherein: the plurality of chambers comprise at least one drying chamber, at least one drying chamber is provided with a negative pressure channel, the negative pressure channel is connected with an air pump to extract air in the drying chamber so as to generate vacuum, and at least the box body is dried in the vacuum drying chamber.

Clean achievement detection device of material transfer box, wherein: at least one of the platforms is a load port in the clean station for receiving a pre-clean and post-clean material transport pod.

Clean achievement detection device of material transfer box, wherein: the multi-way pipe is also connected with an air pump, so that the detection element is arranged on the multi-way pipe between the exhaust nozzle and the air pump.

Clean achievement detection device of material transfer box, wherein: the detection element is a humidity sensor, and the cleaning result judgment factor is water molecules absorbed by the positive pressure dry air

Clean achievement detection device of material transfer box, wherein: the detection element is a particle counter, and the cleaning result judgment factor is dust falling particles absorbed by the positive pressure dry air.

Clean achievement detection device of material transfer box, wherein: at least one suspension supporting rod is convexly extended at the bottom of the box body, and the inner surface of the periphery of the closed accommodating cabin comprises the peripheral surface of the suspension supporting rod.

According to the above, the present invention can exhibit the technical effects of:

1. the existing drying chamber in the cleaning processing area station is used, the condition that negative pressure can be established to generate vacuum is used as a detection place of cleaning result judgment factors (including water molecules and dust falling particles) contained in a cleaned detection object (including at least one of a box body and a front cover), and the content and the quantity of the cleaning result judgment factors contained in positive pressure drying air can be effectively captured and detected in the process of guiding and discharging the positive pressure drying air through the vacuum breaking means by introducing the positive pressure drying air into the drying chamber; therefore, positive pressure dry air can be used as drainage to effectively and conveniently detect whether the inner surface and the outer surface of the box body after wet cleaning and drying meet the requirements of ideal dryness and cleanliness, and the structural complexity of the cleaning result detection device can be simplified.

2. A platform capable of placing a material conveying box in a clean processing area station is used as a detection place for a cleaning result judgment factor (containing water molecules and dust particles) contained in a detected object (namely the cleaned material conveying box), the platform can be a platform which is provided with a loading port in the clean processing area station, or an independent platform surface which is constructed in the clean processing area station, or the top surface of the chamber is used as the platform, so that the air inlet and exhaust connectors which are arranged on the platform or newly added can be used, especially, clean dry air can be guided into a closed accommodating chamber of the detected object by the air inlet connectors to generate positive pressure dry air, and the positive pressure dry air can be exhausted and collected by the air exhaust connectors; therefore, when the platform provided on the loading port is used as a detection place, the positive pressure dry air can be guided by the air inlet and exhaust connectors on the loading port, and can be used as a drainage flow to effectively and conveniently detect the inner surface of the closed accommodating cabin of the detection object, so that whether the ideal dryness and cleanliness requirements are met, and the structural complexity of the cleaning result detection device can be simplified.

The features and technical effects of the embodiments disclosed herein will be presented in the following description and drawings.

Drawings

Fig. 1 is an exploded perspective view of a material transport box.

Fig. 2 and 3 are sectional views of the material transfer box from different perspectives, respectively.

FIG. 4 is a flowchart illustrating steps and processes of a method for detecting a cleaning result of a material transport box according to a first embodiment of the present invention.

FIG. 5 is a flowchart illustrating steps and processes of a method for detecting a cleaning result of a material transport box according to a second embodiment of the present invention.

Fig. 6, fig. 7, fig. 8, fig. 9, fig. 10a, fig. 10b, fig. 11, and fig. 12 are schematic operation diagrams of the cleaning result detection method of the present invention in sequence.

Figure 13 is a schematic view of a clean processing station configuration of the present invention.

Fig. 14 is a perspective view of the platform provided by the load port of fig. 13.

FIG. 15 is a cross-sectional view of the cartridge drying chamber of FIG. 13.

Detailed Description

In the embodiments described below, the terms "cleaning" and "rinsing" are not the same, wherein "cleaning" includes the steps of "wet rinsing and drying"; in addition, the present invention is directed to a process for performing the cleaning of articles in a clean station in step terms, and to a process for performing the cleaning result inspection of articles or cassettes contained in the cleaning step.

Referring to fig. 4, the cleaning result detecting apparatus for a material transport box according to the present invention is described as being easily implemented by a cleaning result detecting method for a material transport box, the first embodiment of the cleaning result detecting method for a material transport box is implemented in a cleaning station 90 (as shown in fig. 13), the cleaning station 90 is defined by a chamber for performing wet cleaning and drying of the material transport box 10 and an associated equipment frame to form a polygonal station area, and a robot 20 (as shown in fig. 13) for picking up, moving, separating, releasing and assembling the material transport box 10 is further disposed inside the cleaning station 90, so that the cleaning station 90 can perform the following steps S1 to S4 for cleaning the material transport box 10:

step S1: separated material conveying box

Referring to fig. 7 and 13, a transfer apparatus (not shown) for cleaning the periphery of the processing area station 90 is described, in which a material transport box 10 to be cleaned is first transferred into the processing area station 90, and then a robot 20 picks up and moves the material transport box 10 to an uncovering position L in the processing area station 90 in a manner of holding the outer walls of both sides of the box body 11 of the material transport box 10; the uncovering position L is provided with a holder and an uncovering key (not shown) which are arranged for the front cover 12 of the material conveying box 10, the holder can be implemented as a sucker or other elements such as a movable hook, and the front cover 12 is originally provided with a key hole (not shown) corresponding to the uncovering key; when the mechanical arm 20 picks up and moves the material conveying box 10 to the uncovering position L, the position of the predetermined opening 11c of the box body 11 can just face the direction of the uncovering position L, and the front cover 12 can contact with the holding piece on the uncovering position L, so that the holding piece adsorbs or is embedded with the front cover 12 on the box body 11, at the moment, the uncovering key on the uncovering position L can be embedded into the keyhole of the front cover 12, the uncovering key starts to rotate, the state that the front cover 12 and the box body 11 are mutually buckled through the tenon is relieved, then, the mechanical arm 20 which clamps the box body 11 is made to move in a retraction mode to complete the uncovering action, and then the mechanical arm 20 moves the box body 11 away from the front cover 12, so that the opening 11c of the box body 11 is exposed to the outside.

Step S2: wet cleaning front cover and box body

Referring to fig. 13, an example of wet cleaning of the front cover 12 and the box 11 in the cleaning station 90 is disclosed, which includes that the front cover 12 is cleaned (including wet cleaning) in a front cover cleaning chamber 40, the box 11 is cleaned in a box cleaning chamber 50, and the front cover cleaning chamber 40 and the box cleaning chamber 50 are distributed around the cleaning station 90.

In addition, the separated front cover 12 and the separated box 11 can be subjected to synchronous wet cleaning in the same cleaning chamber, which is also the application covered by the present invention. However, for the case 11 having a relatively complicated structure compared to the front cover 12, the present invention suggests that a separate case cleaning chamber 50 for wet cleaning of the case 11 can be used to achieve a better cleaning effect. However, the front cover 12, which has a simple (uncomplicated) structure as compared to the case 11, can be cleaned and drained sequentially in the dedicated front cover cleaning chamber 40, thereby achieving a cleaning effect.

It should be noted that, in the wet cleaning of the box 11, since the opening 11c can be exposed to the outside when the robot 20 carries the box 11 to move, when the box 11 is wet cleaned, the robot 20 can place the opening 11c of the box 11 in the box cleaning chamber 50 in a downward manner (i.e. in the same direction as the direction of gravity action), so that the cleaning liquid remaining on the inner surface 11f and the outer surface 11g around the box 11 can be more smoothly separated from the box 11 through the opening 11c in compliance with the gravity, thereby reducing or eliminating the burden of the subsequent liquid removal.

The wet cleaning step S2 may or may not include a step of removing the liquid from the wet-cleaned front cover 12 and the wet-cleaned case 11; in short, a plurality of liquid spraying elements and a plurality of air blowing elements may be disposed in the front cover cleaning chamber 40, the box cleaning chamber 50, or the cleaning chamber shared by the front cover and the box, so that the plurality of liquid spraying elements spray cleaning liquid to the peripheral surfaces of the front cover 12 and the box 11 for wet cleaning, and then the plurality of air blowing elements spray dry air to the peripheral surfaces of the front cover 12 and the box 11, so that the cleaning liquid adhered to the peripheral surfaces of the front cover 12 and the box 11 can be fully blown off, thereby completing the wet cleaning step S2 of the front cover 12 and the box 11.

When the wet cleaning step S2 does not include the liquid removing step, at least one liquid removing chamber, particularly a box body liquid removing chamber 60 dedicated to the box body 11 (as shown in fig. 13) or a liquid removing chamber shared by the box body and the front cover, may be additionally provided in the cleaning processing area 90, and a plurality of air blowing elements may be disposed in the liquid removing chamber to remove the liquid from the front cover 12 and the box body 11 after the wet cleaning is completed.

Referring to fig. 8, a wet cleaning process of the case 11 is described, wherein when wet cleaning is performed on the case 11 exclusively in the case cleaning chamber 50, a plurality of liquid nozzles 51 may be arranged in the case cleaning chamber 50 as the liquid ejecting elements, and cleaning liquid is sprayed on the inner surface 11f and the outer surface 11g of the case 11 to complete the wet cleaning process of the case 11. The plurality of liquid nozzles 51 comprise a plurality of wall-surface liquid nozzles 511 arranged on the peripheral inner wall of the box body cleaning chamber 50, and a plurality of rotary liquid nozzles 512 capable of being implanted into the accommodating cavity 14 of the box body 11; the plurality of wall surface liquid spray nozzles 511 can spray cleaning liquid to wash the outer surface 11g around the box body 11, and the plurality of rotary liquid spray nozzles 512 can spray cleaning liquid to wash the inner surface 11f around the box body 11 in a 360-degree rotary manner. In addition, the inner surface 11f of the box body 11 also comprises the four peripheral surfaces of the comb-shaped fins 13 and the suspension-shaped support rods 15 arranged in the box body 11 in implementation; therefore, the plurality of rotary liquid nozzles 512 can spray the cleaning liquid in a 360-degree rotary manner particularly on the peripheral surfaces of the comb fins 13 and the suspended support rod 15, so that the dirt on the comb fins 13 and the suspended support rod 15 can be sufficiently washed away from the inner surface 11f at a plurality of angles. The box cleaning chamber 50 is provided with a cover 50a, which can be lifted, when the cover 50a is lifted, the box cleaning chamber 50 is communicated with the outside, so that the robot arm 20 can place the box 11 to be wet-cleaned into the box cleaning chamber 50, or pick up the box 11 which is wet-cleaned from the box cleaning chamber 50; on the contrary, when the cover plate 50a is closed, a closed space is formed in the box cleaning chamber 50, so as to facilitate the wet cleaning step of the box 11 in the box cleaning chamber 50, and prevent the cleaning liquid from splashing outside the box cleaning chamber 50 when the wet cleaning step is performed on the box 11.

Step S3: drying front cover and box body

Referring to fig. 4 and 13, the steps of drying the front cover 12 and the box 11 in the clean processing station 90 are described; wherein, since the configuration of the peripheral surface of the front cover 12 is less complicated, the drying step of the front cover 12 may be integrally performed in the front cover cleaning chamber 40, or the wet washing and drying steps of the front cover 12 may be respectively performed by using two or more front cover cleaning chambers 40. The drying step of the pod 11 is performed in a pod drying chamber 70, the pod drying chamber 70 being disposed within the clean processing station 90.

Referring to fig. 9, it is illustrated that the box 11 can be dried in the box drying chamber 70 with the opening 11c facing downward; in this embodiment (first embodiment), the box drying chamber 70 must be a vacuum chamber environment capable of generating negative pressure inside, and a plurality of heat energy elements 72 are used in combination; in addition, the heat energy element 72 may be a planar electric heating plate, so that when the box 11 is placed inside the box drying chamber 70, a plurality of planar electric heating plates can be distributed around the inner surface 11f and the outer surface 11g of the box 11, and the drying step after wet cleaning is performed on the inner surface 11f and the outer surface 11g of the box 11. In addition, the plurality of thermal elements 72 can also be infrared heaters, but the effect is less desirable, and therefore, the description thereof is omitted.

Specifically, in the present embodiment (i.e., the first embodiment), the cleaning result detection method is included in the cartridge drying process of step S3, and specifically, the cleaning result detection method can perform the following cleaning result detection of steps S3-1 to S3-3 for the cartridge 11 or the front cover 12. Wherein:

step S3-1: selecting detection place and object

Referring to fig. 10a, in this embodiment, for example, a box drying chamber 70 is selected as a detection location, and a box 11 dried in a vacuum environment is used as a detection object, so that the cleaned box 11 can be used for detecting the cleaning result.

Step S3-2: breaking vacuum of dry air introduced into detection site

As shown in fig. 10a, the method introduces clean dry air into the selected box drying chamber 70 (i.e., the detection site) so as to release the vacuum state (i.e., break the vacuum) in the box drying chamber 70 by using the dry air, and enables the introduced dry air to generate a positive pressure dry air in the box drying chamber 70, i.e., the air pressure in the box drying chamber 70 is greater than the external atmospheric pressure so as to contact the inner surface 11f and the outer surface 11g of the box 11 by using the positive pressure dry air, and uses the positive pressure dry air to absorb water molecules of the cleaning solution that has not been volatilized from the inner and outer surfaces 11f, 11g of the box 11; the utility model utilizes water molecules absorbed by positive pressure dry air as a cleaning result judgment factor in the subsequent detection.

Step S3-3: capturing positive pressure dry air

As shown in fig. 10a, the positive pressure drying air in the cartridge drying chamber 70 is extracted with a negative pressure flow (which may be provided by an air pump) below 1 atm.

Step S3-4: judgment factor for detecting cleaning result

As shown in fig. 10a, the use of at least one detecting element to also detect the content of the cleaning result judgment factor in the positive pressure dry air is explained. Further, the detecting element may be a humidity sensor 81 or a particle counter 82; the humidity sensor 81 and the particle counter 82 may be present at the same time.

When the detecting element is the humidity sensor 81, the cleaning result determining factor is the water molecules absorbed by the positive pressure dry air, so as to read the content of the water molecules through the humidity sensor 81, and further confirm whether the humidity of the inner and outer surfaces 11f and 11g of the cleaned box body 11 meets the predetermined drying standard. In addition, when the detecting element is the particle counter 82, the cleaning result determining factor is the dust particles absorbed by the positive pressure dry air, so as to read the content of the dust particles through the particle counter 82, and further determine whether the cleanliness of the inner and outer surfaces 11f and 11g of the cleaned box 11 meets the predetermined cleaning standard.

Step S4: combined front cover and box body

This step is performed after completion of the step S3-4. Referring to fig. 11, the front cover 12 that has been subjected to the wet cleaning and drying steps is first placed on the open cover position L, which may also be regarded as a closed cover position, and in detail, after the front cover 12 completes the wet cleaning (may include a liquid removing step) and the drying step, and the box body 11 also completes the wet cleaning (may include a liquid removing step) and the drying step, the front cover may be respectively carried by the robot arm 20 to be buckled at the open cover position L (i.e. the closed cover position), so as to combine the material transporting box 10 that meets the dual standards of dryness and cleanliness after the cleaning is completed and the cleaning result detection is completed.

On the other hand, please refer to fig. 13 again, which illustrates an assembly of the cleaning result detecting apparatus of the present invention, which is disposed in the cleaning station 90 of the material conveying box. As mentioned above, the clean processing station 90 includes at least one cleaning chamber and at least one drying chamber surrounded by the front cover 12 and the box 11, and the robot 20 is disposed in the clean processing station 90, so that the front cover 12 and the box 11 can receive the cleaning process of the chambers in the clean processing station 90 respectively or together (please refer to the foregoing description, and will not be repeated herein).

Referring to fig. 10a and 10b, the cleaning result detecting device of the present invention is described as being installed in at least one drying chamber, and at least one of the front cover 12 and the box 11 is used as a detecting object. In fig. 10a and 10b, at least one of the drying chambers is exemplified by a box drying chamber 70, and the box 11 is exemplified as a detection object, which illustrates that the box drying chamber 70 is provided with a negative pressure channel 71 and a plurality of heat energy elements 72, the negative pressure channel 71 is communicated between the box drying chamber 70 and an air pump 76 for capturing air in the box drying chamber 70 to generate a vacuum environment, and the plurality of heat energy elements 72 can dry the box 11 inserted into the box drying chamber 70.

The device for detecting the cleaning result comprises a negative pressure capturing hole 71a, an air inlet 75, a multi-way tube 80 and at least one detecting element disposed in a box drying chamber 70. Wherein:

the negative pressure capturing hole 71a is disposed at one side of the box drying chamber 70 for engaging with the air pump 76 capable of generating a negative pressure power source, so as to construct a negative pressure channel 71 of the box drying chamber 70 for guiding the negative pressure generated by the air pump 76 to make the box drying chamber 70 form the vacuum environment.

The air inlet 75 is disposed at the other side of the box drying chamber 70, and can be connected to a pipeline to directly capture ultra-pure air (X-CDA) capable of generating positive pressure power into the box drying chamber 70; alternatively, the air inlet hole 75 is connected to an air feeder 78 with a filter element mounted thereon through a pipeline, or the filter element is mounted on a pipeline between the air inlet hole 75 and the air feeder 78, and the air feeder 78 generates positive pressure power to provide Clean Dry Air (CDA) to be introduced into the cartridge drying chamber 70 through the air inlet hole 75. According to the configurations, the negative pressure environment in the box drying chamber 70 can be converted into the positive pressure environment to release the vacuum state in the box drying chamber 70, and the positive pressure dry air which can contact the inner and outer surfaces 11f, 11g around the box 11 is generated in the box drying chamber 70 to absorb the cleaning result judgment factor, and the positive pressure dry air with the cleaning result judgment factor is absorbed, and can be discharged to the through pipe 80 via the negative pressure capturing hole 71a for a certain period, so that the humidity sensor 81 and the particle counter 82 (i.e. the detection element) can smoothly sample from the positive pressure dry air (i.e. the cleaning result judgment factor) to detect the humidity and the content of the falling dust particles.

The multi-way tube 80 is a tube or a flow channel with a plurality of communicated interfaces, so that one of the interfaces of the multi-way tube 80 is connected to the box body drying chamber 70; further, the connection between the multi-way tube 80 and the box drying chamber 70 and the effect thereof can be selected in two ways in the present invention. Fig. 10a shows a first connection of the multiway tube 80, and fig. 10b shows a second connection of the multiway tube 80.

In the embodiment of fig. 10a, the multi-way tube 80 can be used as both the negative pressure channel 71 and the positive pressure channel 73 of the cartridge drying chamber 70; furthermore, two of the plurality of passage ports of the multi-pass tube 80 are respectively connected between the negative pressure capturing hole 71a and the air pump 76 to be used as the negative pressure channel 71 of the box body drying chamber 70, and at the same time, one or two of the other passage ports of the multi-pass tube 80 are used for installing at least one of the detecting elements, so that the multi-pass tube 80 can also be used as the positive pressure channel 73 for discharging the positive pressure drying air. It should be noted that the manifold 80 has a plurality of forked (i.e., non-serial) channels, and a plurality of passage ports of the manifold 80 are distributed in the forked channels, so that the detection elements and the suction pump 76 installed or assembled at the ports can be seated in the non-serial channels of the manifold 80, so that the manifold 80 can guide the negative pressure flow and the positive pressure drying air flow in a split manner; in addition, at least one of the detecting elements may be a humidity sensor 81 or a particle counter 82, or a humidity sensor 81 and a particle counter 82; when the humidity sensor 81 and the particle counter 82 are configured together, they can be installed on two ports in the same channel in the forked branch channel to detect the content of the cleaning result determination factor in the positive pressure dry air, and when the detection element is in detection, the air pump 76 is not started, so that the positive pressure dry air can be smoothly discharged through the positive pressure channel 73 of the multi-way tube 80, and then the detection element is received to detect the content of the cleaning result determination factor in the positive pressure dry air.

In the embodiment of fig. 10b, the multi-way tube 80 is shown to be used only as the positive pressure channel 73 for discharging the positive pressure drying air from the cartridge body drying chamber 70, and not as the negative pressure channel 71. The negative pressure passage 71 may be connected between the negative pressure pick-up hole 71a of the cartridge body drying chamber 70 and the suction pump 76 using a general pipe or flow passage, and serves to guide the negative pressure generated by the suction pump 76 to the drying chamber to form a vacuum. In this application, the box drying chamber 70 must be further provided with a positive pressure capturing hole 73a, the multi-pass tube 80 is connected to the box drying chamber 70 through the positive pressure capturing hole 73a, so that the multi-pass tube 80 forms a positive pressure channel 73 for guiding the positive pressure drying air to be discharged to the outside, and at least one of the detecting elements detects the content of the cleaning result determining factor in the positive pressure drying air in the positive pressure channel 73.

In the embodiment shown in fig. 10a and 10b, the plurality of thermal energy elements 72 includes a plurality of built-in vertical electric heating plates 721 and a plurality of wall-type electric heating plates 722; the vertical electric heating plate 721 is vertically arranged in the box body drying chamber 70, and after the box body 11 is placed in the box body drying chamber 70, the vertical electric heating plate 721 can be implanted into the accommodating chamber 14 of the box body 11, so that the vertical electric heating plate 721 can be implanted into the gap between the fins 13 on both sides and the suspension support rod 15 to provide heat radiation energy, and further, the inner surface 11f of the box body 11 is adjacently dried; the wall-type electric heating plates 722 are respectively attached to the peripheral outer walls of the box drying chamber 70, and after the wall-type electric heating plates 722 are attached to the peripheral outer walls of the box drying chamber 70, a layer of heat-insulating layer 74 made of heat-insulating material is further coated on the periphery of the wall-type electric heating plates 722, so that the wall-type electric heating plates 722 can be positioned between the peripheral outer walls of the box drying chamber 70 and the heat-insulating layer 74. By doing so, the heat radiation generated by the vertical electric heating plate 721 can be directly radiated to the inner surface 11f of the periphery of the box body 11, and the heat radiation generated by the wall-type electric heating plate 722 can be radiated to the outer surface 11g of the periphery of the box body 11 by the conduction of the peripheral wall surface of the box body drying chamber 70; in particular, the water molecules possibly remaining on the inner and outer surfaces 11f, 11g of the cartridge 11 after the liquid removal (i.e., after the liquid beads are removed) can be sufficiently evaporated by the heat radiation energy in the drying step, thereby obtaining a desired drying effect.

Furthermore, the box drying chamber 70 is provided with a cover plate 70a, which can be lifted, when the cover plate 70a is lifted, the box drying chamber 70 is communicated with the outside, so that the robot 20 can place the box 11 to be dried into the box drying chamber 70, or pick up the box 11 from the box drying chamber 70 after the drying is finished; on the contrary, when the cover plate 70a is closed, a closed space is formed in the box drying chamber 70, so that the drying process can be smoothly performed on the box 11 in the box drying chamber 70 under a vacuum environment.

It should be noted that the negative pressure pick-up hole 71a, the positive pressure pick-up hole 73a and the air intake hole 75 are respectively provided with automatic valves (e.g., solenoid valves).

In the embodiment shown in fig. 10a, the automatic valve of the negative pressure capturing hole 71a can control the timing when the negative pressure flow enters the case drying chamber 70 through the negative pressure capturing hole 71a and the timing when the positive pressure dry air exits the case drying chamber 70 through the negative pressure capturing hole 71a, and the automatic valve of the air inlet hole 75 can control the timing when the dry air enters the case drying chamber 70 through the air inlet hole 75 to generate the positive pressure. Further, when the negative pressure capturing hole 71a generates negative pressure in the capturing box body drying chamber 70, the air inlet hole 75 is in a closed state, so as to facilitate the generation of a vacuum environment in the box body drying chamber 70; when the air inlet 75 is opened to guide the dry air into the box drying chamber 70, the negative pressure capturing hole 71a is closed to generate the positive pressure dry air in the box drying chamber 70; when the negative pressure capturing hole 71a is opened to discharge the positive pressure dry air, the air inlet 75 is kept open, so that the dry air in the box body drying chamber 70 can be kept in a positive pressure drainage state for a certain period, thereby facilitating sampling of cleaning result judgment factors.

In the embodiment shown in fig. 10b, the automatic valve of the negative pressure capturing hole 71a can control the timing when the negative pressure flow enters the case drying chamber 70 through the negative pressure capturing hole 71a and the timing when the positive pressure drying air exits the case drying chamber 70 through the positive pressure capturing hole 73a, and the automatic valve of the air inlet hole 75 can control the timing when the drying air enters the case drying chamber 70 through the air inlet hole 75 to generate the positive pressure. Further, when the negative pressure capturing hole 71a generates negative pressure in the capturing case body drying chamber 70, the positive pressure capturing hole 73a and the air inlet hole 75 are in a closed state, so as to facilitate the generation of a vacuum environment in the case body drying chamber 70; when the air inlet 75 is opened to guide the dry air into the box drying chamber 70, the negative pressure capturing hole 71a and the positive pressure capturing hole 73a are closed, so as to generate the positive pressure dry air in the box drying chamber 70; when the positive pressure capturing hole 73a is opened to discharge the positive pressure dry air, the air inlet 75 is kept in the open state, and the negative pressure capturing hole 71a is in the closed state, so that the dry air in the box body drying chamber 70 can be kept in a positive pressure drainage state for a certain period, thereby facilitating the sampling of cleaning result judgment factors.

It should be noted that, when facing the box 11 with a complicated structure, the hanging support rod 15 (as shown in fig. 10 a) protruded from the bottom of the box 11, the inner surface 11f of the periphery of the box 11 (i.e. the detection object) includes the peripheral surface of the hanging support rod 15, and the detection of the cleaning result performed by the present invention can fully confirm and control the box 11 with a complicated structure, such as the hanging support rod 15, and after the cleaning process is performed, whether the predetermined requirements of dryness and cleanliness are really achieved.

Referring to fig. 5, steps and process flow charts of a second embodiment of the present invention are shown, which illustrate a method for detecting a cleaning result of a material transporting box according to the present invention, which is implemented in a cleaning station 90 shown in fig. 13, and performs the cleaning procedures of steps 1 to 4 of the first embodiment on a material transporting box 10 that is not yet cleaned, substantially the same as the first embodiment. It should be noted that, in the second embodiment, particularly when the drying front cover 12 and the box body 11 of the step 3 of the first embodiment are performed, the drying is not necessarily performed in a vacuum environment; in other words, in the second embodiment, when the front cover 12 and the box 11 are dried, only the atmosphere of normal pressure or vacuum can be present inside the drying chamber or the box drying chamber 70. Furthermore, the second embodiment is different from the first embodiment, and includes replacing the detecting object with the material conveying box 10 combined after drying, instead of using the front cover 12 and the box body 11 which are not combined after drying as the detecting object, in other words, the cleaning result detection of the second embodiment is not performed in the drying chamber or the box body drying chamber 70. Except for this, the cleaning steps of the front cover 12 and the case 11 in the second embodiment are the same as those in the first embodiment.

Accordingly, the method for detecting the cleaning result of the second embodiment can perform the following steps S4-1 to S4-4 on the material conveying box 10 formed by the steps 4 and the cleaning completed in the first embodiment. Wherein:

step S4-1: selecting detection place and object

In this process, a platform 31 on which the material conveyance box 10 can be placed in the cleaning processing area station 90 may be selected as a place for performing cleaning result detection; the platform 31 may be located anywhere in the clean station 90 that provides a flat surface area, such as a separate table, the top surface of the chamber, or a load port 30 that provides access for the robot 20 to the material transport cassettes 10 to be cleaned and cleaned. In the second embodiment described below, the platform 31 provided in the load port 30 will be described as a detection site.

The open-lid position L (i.e., the closed-lid position) in the first embodiment may be located on a side wall 36 of the platform 31 of the load port 30, so that the robot 20 can perform the opening and closing operation of the material transport box 10 to be cleaned or cleaned placed on the platform 31 in a close vicinity. Furthermore, the front cover 12 after drying can be moved to the cover closing position L for positioning by the carrying of the robot arm 20, and then the box body 11 after drying can also be moved to the cover closing position L by the carrying of the robot arm 20, so that the box body 11 can be combined with the front cover 12 to form the cleaned material conveying box 10, and the cleaned material conveying box 10 has a closed accommodating chamber 10a with a certain dryness and a certain cleanliness therein; the cleaned FOUP 10 may then be positioned on the platform 31 (FIG. 14) via the carrying and movement of the robot 20. In this procedure, the cleaned material transport box 10 positioned on the platform 31 is selected as the detection object of the cleaning result.

Step S4-2: dry air is introduced into the detection site

In this process, the platform 31 is used to guide clean dry air to enter the closed accommodating chamber 10a of the object to be detected, and positive pressure dry air is generated in the closed accommodating chamber 10a to contact the inner surface 11f around the closed accommodating chamber 10a, so that the positive pressure dry air absorbs and dries the cleaning result judgment factor remaining on the inner surface 11f around the closed accommodating chamber 10 a.

Step S4-3: capturing positive pressure dry air

In the process, the platform 31 is connected with the multi-way pipe 80 to guide the positive pressure dry air absorbed with the cleaning result judgment factor in the closed accommodating cabin 10a to be discharged outwards so as to be convenient for detection; wherein, the positive pressure drying air has a positive pressure greater than 1atm, so that the drying air can be smoothly discharged to the outside through the pipeline.

Step S4-4: judgment factor for detecting cleaning result

In this step, at least one detecting element is used to detect the content of the cleaning result determining factor in the positive pressure dry air in the multi-pass tube 80. The implementation of this step, the specific objects and details of the determination factor capable of detecting the cleaning result are the same as those of the step S3-4 disclosed in the first embodiment (not described again), and thus the cleaning result detection method of the second embodiment is completed.

On the other hand, referring back to fig. 13 and 14, it is shown that the material transfer box 10 has a plurality of first ports 11d for filling gas into the material transfer box 10 and a plurality of second ports 11e for discharging gas; the first interface 11d and the second interface 11e are respectively provided with a non-return function, and the control gas can only enter the material conveying box 10 through the first interface 11d in one way and can be discharged out of the material conveying box 10 through the second interface 11e in one way; the platform 31 is provided with an air inlet connector 35 and an air outlet connector 34.

Further, the platform 31 is further provided with at least one linear driver 32 for moving the material transfer box 10, the material transfer box 10 is driven by the linear driver 32 to move on the platform 31, the linear driver 32 is implemented by arranging a plurality of rollers on the platform 31 in a corresponding manner, and each roller can be driven by a driver such as a motor to synchronously rotate so as to drive the material transfer box 10 to move; the platform 31 is further provided with a rotator 33 for driving the material transfer box 10 to adjust the direction of the opening 11c of the box body 11, and the rotator 33 is located below the linear driver 32.

Accordingly, the material transport box 10 to be cleaned (i.e. before cleaning) can be moved to the upper side of the rotator 33 by the driving of the linear driver 32, and then the rotator 33 can be lifted to lift the material transport box 10 to be cleaned off the linear driver 32; then, the material transfer box 10 is driven by the rotator 33 to make the opening 11c of the box body 11 face away from the robot arm 20 (i.e. towards the predetermined direction D), and then the rotator 33 is lowered to place the diverted material transfer box 10 on the linear driver 32; finally, the robot arm 20 can pick up the diverted material transfer box 10 to be cleaned and move to the uncovering position L adjacent to the end side of the platform 31, so that the material transfer box 10 is separated into the front cover 12 and the box body 11 at the uncovering position L.

In addition, for the material transfer box 10 that has finished drying (i.e. finished cleaning), the robot 20 can pick up the front cover 12 and the box 11 that have finished drying together in the drying chamber, or pick up the box 11 and the front cover 12 that have finished cleaning respectively in the box drying chamber 70 and the front cover cleaning chamber 40, and make the box 11 and the front cover 12 assembled and combined with each other at the uncovering position L to form the material transfer box 10, and then place the material transfer box on the platform 31.

The inlet nipple 35 is disposed on one side of the platform 31 and connected to the air feeder 78. Accordingly, during the above steps 4-1 to 4-2 of the second embodiment, i.e. when the material transfer box 10 is placed and positioned on the platform 31, the air inlet nozzle 35 can be inserted into and communicated with the first port 11d, so that the air supplier 78 can guide clean dry air to enter the closed accommodating chamber 10a of the cleaned material transfer box 10 through the air inlet nozzle 35 and the first port 11d in sequence to generate positive pressure dry air.

The exhaust nozzle 34 is provided on the other side of the stage 31, and the exhaust nozzle 34 is connected to the detection element (including the humidity sensor 81 and the particle counter 82) via the multi-port tube 80 in the first embodiment (as shown in fig. 12) in a manner of having a plurality of passage ports, but the suction pump 76 in the first embodiment may not be connected to the multi-port tube 80 in the second embodiment. Accordingly, in the process of performing the above-mentioned steps 4-1 to 4-2 of the second embodiment, that is, when the material conveying box 10 is placed and positioned on the platform 31, the exhaust nozzle 34 can be inserted into and communicated with the second port 11e, so that the positive pressure dry air absorbed with the cleaning result determination factor in the closed accommodating chamber 10a of the material conveying box 10 can be discharged to the through pipe 80 through the second port 11e and the exhaust nozzle 34, the moisture content in the positive pressure dry air is detected by the humidity sensor 81, and the dust falling amount in the positive pressure dry air is detected by the particle counter 82 (the detection method is the same as that of the first embodiment).

It should be noted that, in the above-mentioned step S4-3 of the second embodiment, an air extractor 77 may be connected to the multi-way pipe 80 to generate a negative pressure flow, so as to increase the speed at which the positive pressure dry air in the material conveying box 10 is detected by the humidity sensor 81 and the particle counter 82 via the multi-way pipe 80, so as to increase the speed of detecting the cleaning result determination factor, but the air extractor 77 may be installed or not depending on the discharge efficiency of the positive pressure dry air, which is not absolutely necessary and described.

The foregoing description is intended to be illustrative rather than limiting, and it will be appreciated by those skilled in the art that many modifications, variations or equivalents may be made without departing from the spirit and scope of the utility model as defined in the appended claims.

Claims (20)

1. The utility model provides a clean achievement detection device of material transfer box, sets up in the clean processing district station of material transfer box which characterized in that: the material conveying box can be separated into a front cover and a box body in the cleaning processing area station, the front cover and the box body can respectively or together receive cleaning processing of a plurality of chambers in the processing area station and then are combined into the cleaned material conveying box, wherein the detection device takes at least one of the front cover and the box body as a detection object, the plurality of chambers comprise at least one drying chamber, and the detection device is arranged in at least one drying chamber and comprises:

the air inlet is arranged on one side of the at least one drying chamber and connected with an air supply machine, and can guide clean dry air to enter the at least one drying chamber to remove vacuum and generate positive pressure dry air which can contact the inner surface and the outer surface of the periphery of the detection object and is used for absorbing at least one cleaning result judgment factor remained on the detection object after drying;

a positive pressure channel constructed by connecting a multi-way pipe with at least one drying chamber for discharging positive pressure drying air in at least one drying chamber; and

and the detection element is arranged on the multi-way pipe and is used for detecting the content of the cleaning result judgment factor in the positive pressure drying air.

2. The cleaning result detecting device of the material conveyance box according to claim 1, characterized in that: the plurality of chambers further comprise at least one cleaning chamber, and a plurality of liquid spraying nozzles are distributed in the at least one cleaning chamber to perform wet cleaning on the front cover and the box body.

3. The cleaning result detecting device of the material conveyance box according to claim 2, characterized in that: and a plurality of blowing elements are also arranged in at least one cleaning chamber for removing liquid from the front cover and the box body after wet cleaning.

4. The cleaning result detecting device of the material conveyance box according to claim 2, characterized in that: the plurality of chambers further comprise at least one liquid removing chamber, and a plurality of blowing elements are arranged in the at least one liquid removing chamber for removing liquid from the front cover and the box body after wet cleaning.

5. The cleaning result detecting device of the material conveyance box according to claim 1, characterized in that: the negative pressure channel and the positive pressure channel share the multi-way pipe, and the air pump is connected with at least one drying chamber through the multi-way pipe.

6. The cleaning result detecting device of the material conveyance box according to claim 5, characterized in that: at least one drying chamber is provided with a negative pressure capturing hole, and the multi-way pipe is connected with at least one drying chamber through the negative pressure capturing hole.

7. The cleaning result detecting device of the material conveyance box according to claim 1, characterized in that: the positive pressure channel is formed in the multi-way pipe, at least one drying chamber is also provided with a positive pressure capturing hole, and the multi-way pipe is connected with at least one drying chamber through the positive pressure capturing hole.

8. The cleaning result detecting device of the material conveyance box according to claim 1, characterized in that: the detection element is a humidity sensor, and the cleaning result judgment factor is water molecules absorbed by the positive pressure dry air.

9. The cleaning result detecting device of the material conveyance box according to claim 1, characterized in that: the detection element is a particle counter, and the cleaning result judgment factor is dust falling particles absorbed by the positive pressure dry air.

10. The cleaning result detection device of the material transport box according to any one of claims 1 to 9, characterized in that: the detection object is the box body, at least one suspension supporting rod is convexly extended at the bottom of the box body, and the inner surface of the periphery of the detection object comprises the surface of the periphery of the suspension supporting rod.

11. The utility model provides a clean achievement detection device of material transfer box, sets up in the clean processing district station of material transfer box which characterized in that: the clean processing area station comprises at least one platform and a plurality of chambers, the material conveying box can be separated into a front cover and a box body on at least one platform, the front cover and the box body can respectively or together receive the clean processing of the chambers in the processing area station, the front cover and the box body can be combined into the cleaned material conveying box on at least one platform, the material conveying box is used as a detection object, the detection object is provided with a first interface and a second interface, and the detection device is arranged on at least one platform and comprises:

the air inlet connector is arranged on one side of at least one platform and communicated with the first interface, and is connected with an air feeder to guide clean dry air to enter a closed accommodating cabin of the detection object sequentially through the air inlet connector and the first interface to generate positive pressure dry air capable of contacting the inner surface around the closed accommodating cabin and absorb at least one cleaning result judgment factor remained on the inner surface around the closed accommodating cabin after drying;

the exhaust connecting nozzle is arranged on the other side of the at least one platform and communicated with the second interface, and the exhaust connecting nozzle is used for guiding the positive pressure dry air in the closed accommodating cabin to be discharged outwards;

a multi-way pipe connected with the exhaust nozzle and used for capturing the positive pressure dry air in the closed containing cabin; and

and the detection element is arranged on the multi-way pipe and is used for detecting the content of the cleaning result judgment factor in the positive pressure drying air.

12. The cleaning result detecting device of the material transport box according to claim 11, characterized in that: the plurality of chambers comprise at least one cleaning chamber, and a plurality of liquid spraying nozzles are distributed in the at least one cleaning chamber to wet clean the front cover and the box body.

13. The cleaning result detecting device of the material transport box according to claim 12, characterized in that: and a plurality of blowing elements are also arranged in at least one cleaning chamber for removing liquid from the front cover and the box body after wet cleaning.

14. The cleaning result detecting device of the material transport box according to claim 12, characterized in that: the plurality of chambers further comprise at least one liquid removing chamber, and a plurality of blowing elements are arranged in the at least one liquid removing chamber for removing liquid from the front cover and the box body after wet cleaning.

15. The cleaning result detecting device of the material transport box according to claim 11, characterized in that: the plurality of chambers comprise at least one drying chamber, at least one drying chamber is provided with a negative pressure channel, the negative pressure channel is connected with an air pump to extract air in the drying chamber so as to generate vacuum, and at least the box body is dried in the vacuum drying chamber.

16. The cleaning result detecting device of the material transport box according to claim 11, characterized in that: at least one of the platforms is a load port in the clean station for receiving a pre-clean and post-clean material transport pod.

17. The cleaning result detecting device of the material transport box according to claim 11, characterized in that: the multi-way pipe is also connected with an air pump, so that the detection element is arranged on the multi-way pipe between the exhaust nozzle and the air pump.

18. The cleaning result detecting device of the material transport box according to claim 11, characterized in that: the detection element is a humidity sensor, and the cleaning result judgment factor is water molecules absorbed by the positive pressure dry air.

19. The cleaning result detecting device of the material transport box according to claim 11, characterized in that: the detection element is a particle counter, and the cleaning result judgment factor is dust falling particles absorbed by the positive pressure dry air.

20. The cleaning result detection apparatus of the material transport box according to any one of claims 11 to 19, characterized in that: at least one suspension supporting rod is convexly extended at the bottom of the box body, and the inner surface of the periphery of the closed accommodating cabin comprises the peripheral surface of the suspension supporting rod.

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