發明所欲解決之問題
在專利文獻1中記載的液晶顯示裝置之裝配線中，應收容於托盤之規定部位的液晶面板有時因某種原因而無法收容於托盤之規定部位，托盤中之面板脫落。即，在該液晶顯示裝置之裝配線中，有時在托盤中產生面板脫落。該情況下，即使自動裝載機要在托盤之規定部位把持液晶面板，亦有可能因為不能把持液晶面板，自動裝載機出現錯誤而停止。 因此，本發明之課題在於，提供一種面板搬運機器人，搬出被收容在可收容多片顯示面板的托盤內的顯示面板，其中，即使在托盤中產生面板脫落，亦能夠繼續動作。解決問題之技術手段
為了解決上述課題，本發明一種面板搬運機器人，其搬出被收容在可收容多片顯示面板的托盤內的顯示面板，其特徵在於，具備把持顯示面板的面板把持部和使面板把持部移動的移動機構，面板把持部具備用於檢測托盤內有無顯示面板的面板檢測機構，面板檢測機構係光學式檢測機構，具有朝向托盤內之顯示面板射出光的發光部和配置於可接受藉由顯示面板反射之光的位置的受光部，面板檢測機構在面板把持部要把持托盤內之顯示面板時，檢測顯示面板之有無。 在本發明之面板搬運機器人中，例如，如果在面板把持部要把持托盤內之顯示面板時，藉由面板檢測機構檢測到顯示面板，則繼續進行用於把持收容於托盤內之其他部位的顯示面板的動作。 在本發明之面板搬運機器人中，把持顯示面板的面板把持部具備用於檢測托盤內有無顯示面板的面板檢測機構，面板檢測機構在面板把持部要把持托盤內之顯示面板時，檢測顯示面板之有無。因此，在本發明中，如果在面板把持部要把持托盤內之顯示面板時，藉由面板檢測機構檢測到顯示面板，則可以使面板搬運機器人一直繼續顯示面板之把持動作。又，如果在托盤中產生面板脫落，在面板把持部要把持托盤內之顯示面板時，藉由面板檢測機構未檢測到顯示面板，則可以使面板搬運機器人繼續進行用於把持收容於托盤中之其他部位的顯示面板之動作。因此，在本發明中，即使在托盤中產生面板脫落，亦能夠繼續面板搬運機器人之動作。 又，在本發明中，面板檢測機構係光學式檢測機構，具有朝向托盤內之顯示面板射出光的發光部和配置於可接受藉由顯示面板反射之光的位置的受光部。又，通常，顯示面板之表面係玻璃面，並且，托盤藉由樹脂形成，托盤之表面與顯示面板之表面相比形成粗面。因此，在本發明中，在面板把持部要把持的顯示面板處於托盤中的情況下，從發光部射出並藉由顯示面板之表面鏡面反射後的光向受光部入射。另一方面，在面板把持部要把持的顯示面板不在托盤中的情況下，例如，從發光部射出並藉由托盤之表面漫反射後的光向受光部入射。因此，在本發明中，在面板把持部要把持的顯示面板處於托盤中的情況和不在托盤中的情況下，受光部之受光量容易產生差異，其結果，能夠適宜地檢測托盤內之顯示面板之有無。 在本發明中，理想的是，面板檢測機構係具有受發光部和反射構件的回歸反射型之光學式檢測機構，上述受發光部具有發光部及受光部，上述反射構件將從發光部射出並藉由顯示面板反射後之光朝向顯示面板反射，受光部配置在可接受藉由反射構件反射之後藉由顯示面板反射之光的位置。 顯示面板之厚度方向之距離變短，在面板把持部要把持的顯示面板處於托盤中的情況和不在托盤中的情況下，受光部之受光量亦容易產生差異。因此，即使收容於托盤的顯示面板和托盤之照射來自發光部之光的部分之顯示面板之厚度方向之距離變短，亦能夠適宜地檢測托盤內之顯示面板之有無。 在本發明中，理想的是，面板把持部具備吸附顯示面板的面板吸附部和安裝面板檢測機構及面板吸附部的基體構件，受發光部和反射構件以在與垂直方向正交的第一方向上隔著面板吸附部的方式配置，並且被分別安裝於第一方向上的基體構件之兩端側。 如果這樣構成，則可以增大從發光部射出的光向顯示面板之入射角。因此，即使收容於托盤的顯示面板和托盤之照射來自發光部之光的部分之垂直方向之距離變短，亦能夠增大在面板把持部要把持的顯示面板處於托盤中的情況下藉由顯示面板反射的光之光軸、和在面板把持部要把持的顯示面板不在托盤中的情況下藉由托盤反射的光之光軸的偏移量，其結果，可以增大向受光部入射的光之光軸之偏移量。因此，即使收容於托盤的顯示面板和托盤之照射來自發光部之光的部分之垂直方向之距離變短，在面板把持部要把持的顯示面板處於托盤中的情況和不在托盤中的情況下，受光部之受光量亦會產生更大的差異，能夠更適宜地檢測托盤內之顯示面板之有無。 在本發明中，亦可以是，面板把持部具備吸附顯示面板的面板吸附部和安裝面板檢測機構及面板吸附部的基體構件，受光部被配置在可接受從發光部射出且藉由顯示面板反射之光的位置，發光部和受光部以在與垂直方向正交的第一方向上隔著面板吸附部的方式配置，並且被分別安裝於第一方向上的基體構件之兩端側。 該情況下，亦可以增大從發光部射出的光向顯示面板之入射角。因此，即使收容於托盤的顯示面板和托盤之照射來自發光部之光的部分之垂直方向之距離變短，亦能夠增大在面板把持部要把持的顯示面板處於托盤中的情況下藉由顯示面板反射的光之光軸、和在面板把持部要把持的顯示面板不在托盤中的情況下藉由托盤反射的光之光軸的偏移量，其結果，可以增大向受光部入射的光之光軸之偏移量。因此，即使收容於托盤的顯示面板和托盤之照射來自發光部之光的部分之垂直方向之距離變短，在面板把持部要把持的顯示面板處於托盤中的情況和不在托盤中的情況下，受光部之受光量亦會產生更大的差異，能夠適宜地檢測托盤內之顯示面板之有無。 在本發明中，理想的是，從發光部射出之光向顯示面板之入射角為45°以上且小於90°。該情況下，入射角例如為大致65°。如果這樣構成，即使收容於托盤的顯示面板和托盤之照射來自發光部之光的部分之顯示面板之厚度方向之距離變短，亦能夠增大在面板把持部要把持的顯示面板處於托盤中的情況下藉由顯示面板反射的光之光軸、和在面板把持部要把持的顯示面板不在托盤中的情況下藉由托盤反射的光之光軸的偏移量，其結果，可以增大向受光部入射的光之光軸之偏移量。因此，即使收容於托盤的顯示面板和托盤之照射來自發光部之光的部分之垂直方向之距離變短，在面板把持部要把持的顯示面板處於托盤中的情況和不在托盤中的情況下，受光部之受光量亦會產生差異，能夠適宜地檢測托盤內之顯示面板之有無。 在本發明中，理想的是，面板把持部具備吸附顯示面板的面板吸附部和吸附從顯示面板引出的配線的配線吸附部。如果這樣構成，面板把持部除具備吸附顯示面板的面板吸附部之外，還具備吸附從顯示面板引出的配線的配線吸附部，因此，即使FPC等配線從顯示面板引出，亦能夠抑制搬運顯示面板時之配線之晃動。 在本發明中，理想的是，面板搬運機器人具備：第一壓力感測器，其用於基於面板吸附部之吸引壓而檢測顯示面板是否被吸附在面板吸附部；第二壓力感測器，其用於基於配線吸附部之吸引壓而檢測配線是否被吸附在配線吸附部。如果這樣構成，在藉由面板檢測機構檢測到顯示面板之後，藉由第一壓力感測器確認到顯示面板被吸附在面板吸附部且藉由第二壓力感測器確認到配線被吸附在配線吸附部之後，可以藉由面板把持部從托盤搬出顯示面板。因此，可以在藉由面板把持部可靠地把持顯示面板及配線的狀態下從托盤搬出顯示面板。發明效果
如上所述，在本發明中，在搬出被收容在可收容多片顯示面板的托盤中的顯示面板的面板搬運機器人中，即使在托盤中產生面板脫落，亦能夠繼續面板搬運機器人之動作。 Problems to be Solved by the Invention In the assembly line of the liquid crystal display device described in Patent Document 1, the liquid crystal panel that should be accommodated in a predetermined portion of the tray may not be accommodated in the predetermined portion of the tray for some reason, and the panel in the tray may fall off. . That is, in the assembly line of this liquid crystal display device, a panel may fall off in a tray. In this case, even if the automatic loader tries to hold the liquid crystal panel at a predetermined portion of the tray, the automatic loader may stop due to an error because the liquid crystal panel cannot be held. Therefore, an object of the present invention is to provide a panel transfer robot that unloads display panels accommodated in a tray capable of accommodating a plurality of display panels, which can continue to operate even if a panel is dropped from the tray. MEANS TO SOLVE THE PROBLEM In order to solve the above-mentioned problem, the present invention provides a panel transfer robot that unloads a display panel accommodated in a tray capable of accommodating a plurality of display panels, comprising a panel gripper for gripping the display panel and a panel A moving mechanism for moving the gripping part, the panel gripping part is provided with a panel detection mechanism for detecting the presence or absence of a display panel in the tray, the panel detection mechanism is an optical detection mechanism, and has a light-emitting part that emits light toward the display panel in the tray, and is arranged in an acceptable The panel detection mechanism detects the presence or absence of the display panel when the panel gripping portion is to hold the display panel in the tray by the light-receiving portion that displays the position of the light reflected by the panel. In the panel transfer robot of the present invention, for example, when the panel gripping portion is about to hold the display panel in the tray, if the panel detection mechanism detects the display panel, the display for gripping other parts accommodated in the tray is continued. panel action. In the panel transfer robot of the present invention, the panel gripping portion that grips the display panel is provided with a panel detection mechanism for detecting the presence or absence of the display panel in the tray. with or without. Therefore, in the present invention, if the panel detection mechanism detects the display panel when the panel gripping portion is to grip the display panel in the tray, the panel transfer robot can continue the gripping operation of the display panel. In addition, if the panel is dropped from the tray, and the panel detection mechanism does not detect the display panel when the panel gripping part tries to hold the display panel in the tray, the panel transfer robot can continue the process for holding the display panel stored in the tray. Other parts of the display panel action. Therefore, in the present invention, even if the panel falls off the tray, the operation of the panel transfer robot can be continued. Further, in the present invention, the panel detection mechanism is an optical detection mechanism, and includes a light-emitting portion that emits light toward the display panel in the tray, and a light-receiving portion disposed at a position that receives light reflected by the display panel. In addition, generally, the surface of the display panel is a glass surface, and the tray is formed of resin, and the surface of the tray is rougher than the surface of the display panel. Therefore, in the present invention, when the display panel to be held by the panel holding part is in the tray, the light emitted from the light emitting part and mirror-reflected by the surface of the display panel enters the light receiving part. On the other hand, when the display panel to be held by the panel holding unit is not in the tray, for example, light emitted from the light emitting unit and diffusely reflected by the surface of the tray enters the light receiving unit. Therefore, in the present invention, when the display panel to be held by the panel holding portion is in the tray and when it is not in the tray, the light receiving amount of the light receiving portion tends to be different, and as a result, the display panel in the tray can be appropriately detected. Whether or not. In the present invention, it is preferable that the panel inspection mechanism is a retro-reflection type optical inspection mechanism including a light-receiving portion and a reflecting member, the light-receiving portion has a light-emitting portion and a light-receiving portion, and the reflecting member emits light from the light-emitting portion and emits light. The light reflected by the display panel is reflected toward the display panel, and the light-receiving part is arranged at a position where it can receive the light reflected by the display panel after being reflected by the reflecting member. The distance in the thickness direction of the display panel is shortened, and the amount of light received by the light-receiving portion is likely to differ between the case where the display panel to be held by the panel gripping portion is in the tray and when the display panel is not in the tray. Therefore, even if the distance in the thickness direction between the display panel accommodated in the tray and the display panel in the portion of the tray irradiated with light from the light-emitting portion is shortened, the presence or absence of the display panel in the tray can be appropriately detected. In the present invention, it is preferable that the panel gripping portion includes a panel suction portion for suctioning the display panel, and a base member to which the panel detection mechanism and the panel suction portion are attached, and the light-receiving portion and the reflecting member are arranged in a first direction perpendicular to the vertical direction. It is arrange|positioned so that a panel suction part may be interposed upward, and it is attached to the both end sides of the base member in a 1st direction, respectively. With this configuration, the incident angle of the light emitted from the light-emitting portion to the display panel can be increased. Therefore, even if the distance in the vertical direction between the display panel accommodated in the tray and the portion of the tray irradiated with the light from the light-emitting portion is shortened, it is possible to increase the size of the display panel when the display panel to be held by the panel holding portion is in the tray. The amount of shift between the optical axis of the light reflected by the panel and the optical axis of the light reflected by the tray when the display panel to be held by the panel holding part is not in the tray, as a result, the light incident on the light receiving part can be increased. The offset of the optical axis. Therefore, even if the distance in the vertical direction between the display panel accommodated in the tray and the part of the tray irradiated with the light from the light-emitting part is shortened, when the display panel to be held by the panel holding part is in the tray or not in the tray, The light-receiving amount of the light-receiving portion will also have a greater difference, so that the presence or absence of the display panel in the tray can be detected more appropriately. In the present invention, the panel gripping portion may include a panel suction portion for suctioning the display panel, and a base member on which the panel detection mechanism and the panel suction portion are attached, and the light receiving portion may be arranged so as to receive light emitted from the light emitting portion and be reflected by the display panel. The light-emitting part and the light-receiving part are arranged so as to sandwich the panel suction part in the first direction orthogonal to the vertical direction, and are respectively attached to both end sides of the base member in the first direction. In this case, the incident angle of the light emitted from the light emitting portion to the display panel can also be increased. Therefore, even if the distance in the vertical direction between the display panel accommodated in the tray and the portion of the tray irradiated with the light from the light-emitting portion is shortened, it is possible to increase the size of the display panel when the display panel to be held by the panel holding portion is in the tray. The amount of shift between the optical axis of the light reflected by the panel and the optical axis of the light reflected by the tray when the display panel to be held by the panel holding part is not in the tray, as a result, the light incident on the light receiving part can be increased. The offset of the optical axis. Therefore, even if the distance in the vertical direction between the display panel accommodated in the tray and the part of the tray irradiated with the light from the light-emitting part is shortened, when the display panel to be held by the panel holding part is in the tray or not in the tray, The light-receiving amount of the light-receiving part also has a larger difference, and the presence or absence of the display panel in the tray can be appropriately detected. In the present invention, it is desirable that the incident angle of the light emitted from the light emitting portion to the display panel be 45° or more and less than 90°. In this case, the incident angle is, for example, approximately 65°. With this configuration, even if the distance in the thickness direction between the display panel accommodated in the tray and the display panel in the portion of the tray irradiated with light from the light-emitting portion is shortened, the display panel to be held by the panel holding portion in the tray can be increased. In this case, the amount of offset between the optical axis of the light reflected by the display panel and the optical axis of the light reflected by the tray when the display panel to be held by the panel holding part is not in the tray can be increased. The amount of offset of the optical axis of the light incident on the light receiving part. Therefore, even if the distance in the vertical direction between the display panel accommodated in the tray and the part of the tray irradiated with the light from the light-emitting part is shortened, when the display panel to be held by the panel holding part is in the tray or not in the tray, The amount of light received by the light receiving portion also varies, and the presence or absence of the display panel in the tray can be appropriately detected. In the present invention, it is preferable that the panel gripping portion includes a panel suction portion that suctions the display panel and a wiring suction portion that suctions wires drawn from the display panel. With this configuration, the panel gripping portion includes, in addition to the panel attracting portion for attracting the display panel, the wiring attracting portion for attracting the wiring drawn from the display panel. Therefore, even if the wiring such as the FPC is drawn from the display panel, it is possible to suppress the conveyance of the display panel. Wiring shakes over time. In the present invention, it is desirable that the panel transfer robot includes: a first pressure sensor for detecting whether the display panel is adsorbed on the panel adsorption part based on the suction pressure of the panel adsorption part; and a second pressure sensor, It is used to detect whether or not the wire is sucked to the wire suction part based on the suction pressure of the wire suction part. With this configuration, after the display panel is detected by the panel detection mechanism, it is confirmed by the first pressure sensor that the display panel is adsorbed to the panel adsorption portion and the wiring is confirmed by the second pressure sensor to be adsorbed to the wiring After the suction part, the display panel can be carried out from the tray by the panel holding part. Therefore, it is possible to carry out the display panel from the tray in a state where the display panel and the wiring are securely held by the panel holding portion. ADVANTAGE OF THE INVENTION As described above, in the present invention, in a panel transfer robot for carrying out a display panel accommodated in a tray capable of accommodating a plurality of display panels, even if a panel falls off the tray, the operation of the panel transfer robot can be continued. .
以下，參照圖式，說明本發明之實施形態。 （搬運系統之整體結構） 圖1係組裝了本發明實施形態的面板搬運機器人9的搬運系統1之側視圖。圖2係從圖1之E－E方向表示搬運系統1的俯視圖。圖3係圖1所示的面板搬運機器人9之立體圖。圖4係圖1所示的供給單元11之立體圖。 本形態之面板搬運機器人9（以下設為“機器人9”。）係搬運作為顯示面板的液晶面板2的機器人。該機器人9被組裝於搬運系統1中使用。搬運系統1被組裝於行動設備等中使用的液晶顯示器之生產線。該搬運系統1搬運液晶面板2，將液晶面板2供給至對液晶面板2進行規定之處理的處理裝置14（參照圖2）。 液晶面板2形成為長方形之平板狀。液晶面板2之厚度為1（mm）左右。在液晶面板2之離開顯示區域的部位記錄有液晶面板2之檢查數據等數據。在液晶面板2之離開顯示區域的部位所記錄的數據係可光學性讀取的數據。在藉由本形態之搬運系統1搬運的液晶面板2上安裝有驅動器IC。又，在液晶面板2上連接有作為配線之FPC2a（圖8）。即，作為配線基板的FPC2a從液晶面板2引出。FPC2a例如從形成為長方形之平板狀的液晶面板2之一短邊向與長邊平行的方向引出。此外，圖2等中省略FPC2a之圖示。 搬運系統1具備搬運可收容液晶面板2的托盤3的兩個輸送機4、5。托盤3藉由樹脂形成。在托盤3上可收容多片液晶面板2。液晶面板2以液晶面板2之厚度方向和上下方向（垂直方向）一致的方式收容於托盤3。收容於托盤3的多片液晶面板2以彼此不重疊的狀態收容於托盤3。輸送機4、5將多層堆疊起來的托盤3（堆疊的托盤3）向水平方向直線搬運。 在以下之說明中，將輸送機4、5搬運的托盤3之搬運方向（圖1等之X方向）設為“前後方向”，將與上下方向（垂直方向）和前後方向正交的方向（圖1等之Y方向）設為“左右方向”。又，將前後方向之一側（圖1等之X1方向側）設為“前”側，將其相反側（圖1等之X2方向側）設為“後側”，將左右方向之一側（圖2等之Y1方向側）設為“右”側，將其相反側（圖2等之Y2方向側）設為“左”側。在本形態中，在搬運系統1之後側配置有處理裝置14。 又，搬運系統1具備載置托盤3的兩個托盤載台6、7、在輸送機4、5和托盤載台6、7之間搬運托盤3的機器人8、從載置於托盤載台6、7的托盤3搬出液晶面板2的上述之機器人9、從機器人9接收液晶面板2並將其供給至處理裝置14的供給單元11。托盤載台6、7被配置於比輸送機4、5靠後側。供給單元11被配置於比托盤載台6、7靠後側。 又，搬運系統1具備設置輸送機4、5、托盤載台6、7、機器人8以及供給單元11的本體框架12、設置機器人9的本體框架13。本體框架12之上表面形成為與上下方向正交的平面狀，在本體框架12之上表面設置有輸送機4、5、托盤載台6、7、機器人8以及供給單元11。本體框架13係形成為大致門形的門形框架，設置為在左右方向上以橫跨本體框架12之後端側部分。機器人9設置於本體框架13之上表面部。 輸送機4、5係具備多個輥的輥式輸送機。輸送機4和輸送機5在左右方向上相鄰配置。輸送機4將堆疊的托盤3朝向後側搬運，輸送機5將堆疊的托盤3朝向前側搬運。在藉由輸送機4搬運的托盤3內收容有多片液晶面板2。另一方面，在藉由輸送機5搬運的托盤3內未收容液晶面板2，由輸送機5搬運的托盤3為空托盤。 藉由作業者從臨時放置用之貨架（省略圖示）運送來的堆疊狀態之托盤3被載置於輸送機4之前端側。載置於輸送機4之前端側的堆疊狀態之托盤3被向後側搬運，被搬運到輸送機4之後端側的堆疊狀態之托盤3如後述被機器人8卸載。又，在輸送機5之後端側，如後述藉由機器人8堆疊空的托盤3。托盤3被堆疊到規定層數後，堆疊狀態之托盤3被搬運到前側。被搬運到輸送機5之前端側的堆疊狀態之托盤3藉由作業者運送到空托盤用之貨架。 在托盤載台6、7上載置一個托盤3。托盤載台6和托盤載台7在左右方向上以隔開規定的間隔的狀態配置。托盤載台6在左右方向上配置於與輸送機4大致相同的位置，托盤載台7在左右方向上配置於與輸送機5大致相同的位置。托盤載台6、7之上表面形成為與上下方向正交的平面狀。 機器人8係所謂三軸正交機器人。該機器人8具備形成為門形的本體框架15、以相對於本體框架15能夠向左右方向滑動的方式保持於本體框架15的可動框架16、以相對於可動框架16能夠向前後方向滑動的方式保持於可動框架16的可動框架17、以相對於可動框架17能夠向上下方向滑動的方式保持於可動框架17的可動框架18、安裝於可動框架18的托盤把持部19。又，機器人8具備使可動框架16向左右方向滑動的驅動機構、使可動框架17向前後方向滑動的驅動機構、使可動框架18向上下方向滑動的驅動機構。 本體框架15以在左右方向上橫跨輸送機4、5的方式設置。可動框架16被安裝於本體框架15之上表面側。該可動框架16被配置於比載置於輸送機4、5的堆疊狀態之托盤3靠上側。可動框架17安裝於可動框架16之右側。可動框架18安裝於可動框架17之後端側。托盤把持部19安裝於可動框架18之下端。該托盤把持部19具備吸附並把持托盤3的多個吸附部。 機器人8進行托盤3從輸送機4向托盤載台6、7之搬運和托盤3從托盤載台6、7向輸送機5的搬運。具體而言，機器人8將搬運到輸送機4之後端側的堆疊狀態之托盤3逐一搬運到托盤載台6或托盤載台7，將輸送機4上之堆疊狀態之托盤3卸載。又，機器人8將變為空的一個托盤3從托盤載台6或托盤載台7搬運至輸送機5之後端側，將托盤3堆疊在輸送機5上。 機器人9係所謂並聯連桿機器人。該機器人9具備本體部20、與本體部20連結的三根桿21、與三根桿21分別連結的三個臂部22、與三個臂部22連結的頭單元23、把持液晶面板2的面板把持部24（參照圖5等）。機器人9以懸掛於本體框架13之上表面部的方式設置。又，本體部20配置於托盤載台6、7之上方，並且配置於比機器人8之本體框架15靠後側。此外，圖1、圖3中省略面板把持部24之圖示。 三根桿21按照以大致等角度節距呈大致放射狀向本體部20之外周側伸出的方式與本體部20連結。即，三根桿21按照以大致120°節距呈大致放射狀向本體部20之外周側伸出的方式與本體部20連結。又，三根桿21之基端側可轉動地與本體部20連結。在本體部20和桿21之連結部配置有使桿21轉動的附有減速器的馬達25。本形態之機器人9具備使三根桿21分別轉動的三個馬達25。馬達25之輸出軸固定於桿21之基端側。 臂部22之基端側可轉動地與桿21之前端側連結。具體而言，臂部22藉由相互平行的直線狀之兩根臂26構成，兩根臂26各自的基端側可轉動地與桿21之前端側連結。頭單元23可轉動地與三個臂部22之前端側連結。在頭單元23之上端安裝有馬達27。 面板把持部24安裝於頭單元23之下端。又，面板把持部24與馬達27連結，能夠藉由馬達27之動力進行以上下方向為旋轉之軸方向的旋轉。在本形態中，藉由本體部20、三根桿21、三個臂部22、頭單元23、三個馬達25以及馬達27構成使面板把持部24移動的移動機構28。稍後描述面板把持部24之具體的結構。 在機器人9上，藉由個別地驅動三個馬達25，能夠使頭單元23在規定之區域內，向上下方向、左右方向及前後方向之任意之位置、且以頭單元23一直保持固定姿勢的狀態（具體而言為面板把持部24維持朝向下側的狀態）移動。機器人9將收容於托盤載台6、7上之托盤3內的液晶面板2逐一搬出。具體而言，機器人9將液晶面板2逐一從托盤3搬出，直至托盤載台6、7上之托盤3搬空為止。又，機器人9將從托盤3搬出的液晶面板2搬運到後述之面板載台39。 供給單元11具備用於進行液晶面板2之對位的對準裝置30和讀取記錄於液晶面板2的數據的數據讀取裝置31。對準裝置30在由數據讀取裝置31讀取液晶面板2之數據之前進行液晶面板2之對位。又，供給單元11具備將藉由數據讀取裝置31讀取了數據之後之液晶面板2向處理裝置14搬運的機器人33、從向處理裝置14搬運的液晶面板2去除靜電的除電器（靜電去除裝置）34、將藉由對準裝置30進行了對位後之液晶面板2朝向機器人33搬運的搬運裝置35、將藉由對準裝置30進行了對位的液晶面板2向搬運裝置35搬運的機器人36、載置並固定這些結構的基板37。 對準裝置30載置於基板37之右前端側。機器人33載置於基板37之左後端側。數據讀取裝置31載置於基板37之左前端側。機器人36相鄰配置於對準裝置30之後側。搬運裝置35在左右方向上配置於數據讀取裝置31及機器人33和對準裝置30之間。除電器34配置於搬運裝置35之上方。基板37載置固定於本體框架12之上表面之後端側部分。 對準裝置30具備載置藉由機器人9從托盤載台6、7上之托盤3搬出的液晶面板2的面板載台39、以上下方向為轉動之軸方向使面板載台39轉動並且使面板載台39沿左右方向和前後方向移動而進行液晶面板2之對位的移動機構40。又，對準裝置30具備配置於比面板載台39靠上側的攝影機41及照明42。 搬運裝置35具備載置液晶面板2的四個面板載台52和使四個面板載台52向前後方向滑動的驅動機構。機器人36具備吸附把持液晶面板2的面板把持部55和使面板把持部55向上下方向及左右方向滑動的驅動機構。機器人33具備吸附把持液晶面板2的四個面板把持部58和使四個面板把持部58向上下方向及左右方向滑動的驅動機構。 機器人36將藉由對準裝置30進行了對位之後之液晶面板2搬運至停止在前側的面板載台52。當液晶面板2被載置在面板載台52上時，搬運裝置35使面板載台52向後方向移動，將液晶面板2搬運至搬運裝置35之後端側。機器人33將藉由搬運裝置35搬運至搬運裝置35之後端側的液晶面板2搬入處理裝置14。 數據讀取裝置31具備讀取可光學性讀取的數據的攝影機62、使攝影機62向上下方向、前後方向及左右方向滑動的驅動機構、向液晶面板2照射光的照明。數據讀取裝置31讀取藉由對準裝置30進行了位置調整後載置於搬運裝置35之面板載台52上的液晶面板2之數據。如上所述，除電器34配置於搬運裝置35之上方。又，除電器34配置於比數據讀取裝置31靠後側，去除藉由數據讀取裝置31讀取了數據之後之液晶面板2之靜電。 （面板把持部之結構） 圖5係圖3所示的機器人9之面板把持部24之立體圖。圖6係從其他方向表示圖5所示的面板把持部24的立體圖。圖7係從下側表示圖5所示的基板吸附部72及位置調整機構73的立體圖。圖8係用於說明與圖5所示的面板吸附部71及基板吸附部72連接的配管的路徑的圖。圖9係用於說明圖5所示的面板檢測機構74之結構的概略圖。 面板把持部24具備吸附液晶面板2的面板吸附部71和作為吸附從液晶面板2引出的FPC2a的配線吸附部之基板吸附部72。本形態之面板把持部24具備兩個基板吸附部72。又，面板把持部24具備用於調整基板吸附部72相對於面板吸附部71的位置之位置調整機構73和用於檢測托盤3內之液晶面板2之有無的面板檢測機構74。進而，面板把持部24具備安裝面板吸附部71、位置調整機構73及面板檢測機構74的基體構件75。基體構件75形成為大致圓形之平板狀，以基體構件75之厚度方向和上下方向一致的方式配置。 面板吸附部71安裝於基體構件75之下表面側。該面板吸附部71以液晶面板2之厚度方向和上下方向（垂直方向）一致的方式吸附液晶面板2。在面板吸附部71之下表面形成有吸引液晶面板2之上表面的吸引口（省略圖示）。面板吸附部71藉由真空吸附液晶面板2之上表面而把持液晶面板2。在以下之說明中，將與上下方向（垂直方向）正交的圖5等之V方向設為“第一方向”，將與上下方向和第一方向正交的圖5等之W方向設為“第二方向”。 基板吸附部72以FPC2a之厚度方向和上下方向一致的方式吸附FPC2a。該基板吸附部72具備與FPC2a接觸的基板接觸部76和緩和基板接觸部76與FPC2a接觸時的衝擊的緩衝機構77。緩衝機構77例如係具備活塞77a和可滑動地保持活塞77a的氣缸77b的空氣阻尼器。該緩衝機構77以活塞77a之移動方向和上下方向一致的方式配置。 基板接觸部76固定於活塞77a之下端，能夠與FPC2a之上表面接觸。在基板接觸部76之下表面形成有吸引FPC2a之上表面的吸引口76a（參照圖7）。吸引口76a之直徑比形成於面板吸附部71之下表面的吸引口之直徑小。基板吸附部72藉由真空吸附FPC2a之上表面而把持FPC2a。 位置調整機構73係手動式之調整機構。該位置調整機構73具備保持氣缸77b的保持構件78、向第一方向可滑動地保持保持構件78的保持構件79、向第二方向可滑動地保持保持構件79的保持構件80。本形態之位置調整機構73具備兩個保持構件78、兩個保持構件79、以及兩個保持構件80。 保持構件80係截面形狀形成L形狀的細長的板狀構件。兩個保持構件80各自之一端部分别固定於第一方向上的基體構件75之兩端側，保持構件80從基體構件75向第二方向之一側延伸。即，保持構件80以保持構件80之長度方向和第二方向一致的方式配置。在保持構件80上形成有以第二方向為長度方向的長孔80a。長孔80a在上下方向上貫通保持構件80之與上下方向正交的平板部分。又，長孔80a形成於第二方向上的保持構件80之大致中心和保持構件80之第二方向之一側（保持構件80從基體構件75伸出的方向之一側）之端部之間的全區域。 保持構件79係截面形狀形成L形狀的細長的板狀構件。在保持構件79之兩端側形成有擰入螺釘81的螺釘孔。該螺釘孔形成於保持構件79之與上下方向正交的平板部分。保持構件79之兩端側分別藉由從上側插通於長孔80a的螺釘81固定於兩個保持構件80各自上。即，保持構件79藉由螺釘81固定於兩個保持構件80上，且配置於保持構件80之下側。又，兩個保持構件79分別固定於兩個保持構件80上。保持構件79與第一方向平行地配置。即，兩個保持構件79相互平行地配置，並且與第一方向平行地配置。 在保持構件79上形成有以第一方向為長度方向的長孔79a。長孔79a在第二方向上貫通保持構件79之與第二方向正交的平板部分。又，長孔79a形成於保持構件79之第一方向之一側之端部和另一側之端部之間之全區域。保持構件78係呈L形狀折彎的平板狀之構件。在保持構件78上形成有擰入螺釘82的螺釘孔。該螺釘孔形成於保持構件78之與第二方向正交的平板部分。 保持構件78藉由從第二方向之一側插通於長孔79a的螺釘82固定於保持構件79，且配置於保持構件79之第二方向之另一側。又，兩個保持構件78分別固定於兩個保持構件79各自上。在保持構件78之與上下方向正交的平板部分固定有氣缸77b。即，在保持構件78上固定有基板吸附部72。 在本形態中，藉由將螺釘82鬆開，可進行基板吸附部72在第一方向上相對於面板吸附部71的位置調整。又，藉由將螺釘81鬆開，可以進行基板吸附部件72在第二方向上相對於面板吸附部71之位置調整。即，基板吸附部72在第一方向和第二方向上相對於面板吸附部71可進行位置調整。又，兩個基板吸附部72各自相對於面板吸附部71可進行位置調整。 如圖8所示，面板吸附部71和兩個基板吸附部72經由共同的開關閥84與共同之空氣之吸引機構85連接。開關閥84係電磁閥。又，吸引機構85例如係真空泵。在開關閥84和兩個基板吸附部72之間的配管路徑上配置有流量控制閥86。流量控制閥86例如係流量調整閥或節流閥。在本形態中，藉由流量控制閥86之作用，基板吸附部72對FPC2a之吸引力比面板吸附部71對液晶面板2之吸引力小。例如，基板吸附部72對FPC2a之吸引力和面板吸附部71對液晶面板2之吸引力之比為1：9。 在開關閥84和面板吸附部71之間之配管路徑上，連接有用於基於面板吸附部71之吸引壓而檢測液晶面板2是否被吸附於面板吸附部71的第一壓力感測器87。又，在開關閥84和兩個基板吸附部72之間之配管路徑上，連接有用於基於基板吸附部72之吸引壓而檢測FPC2a是否被吸附於基板吸附部72的第二壓力感測器88。 如圖9所示，面板檢測機構74係光學式檢測機構，具備朝向托盤3內之液晶面板2射出光的發光部89和配置於可接受藉由液晶面板2反射之光的位置的受光部90。具體而言，面板檢測機構74係具有受發光部91和反射構件（回歸反射板）92的回歸反射型之光學式檢測機構，受發光部91具有發光部89及受光部90，反射構件92將從發光部89射出並藉由液晶面板2反射後的光朝向液晶面板2反射，受光部90被配置於可接受藉由反射構件92反射後再藉由液晶面板2反射之光的位置。 發光部89具備作為光源的LED（發光二極體）。又，發光部89例如具備傳遞來自LED之光的光纖。受發光部91及反射構件92固定於基體構件75之下表面側。又，受發光部91及反射構件92配置於比面板吸附部71之下表面靠上側。受發光部91和反射構件92以在第一方向上隔著面板吸附部71的方式配置。又，受發光部91和反射構件92被分別安裝於第一方向上的基體構件75之兩端側。 發光部89之發光面及受光部90之受光面朝向斜下側，反射構件92之反射面朝向斜下側。又，發光部89之發光面、受光部90之受光面及反射構件92之反射面朝向第一方向之內側。從發光部89射出的光向液晶面板2之入射角θ為45°以上且低於90°。具體而言，入射角θ形成大致65°。又，在本形態中，照射至液晶面板2的光之點徑較小。 面板檢測機構74在面板把持部24要把持托盤3內之液晶面板2時，檢測液晶面板2之有無。具體而言，面板檢測機構74在面板把持部24要把持托盤3內之液晶面板2時，基於受光部90之受光量而檢測液晶面板2之有無。 即，如圖9所示，在面板把持部24要把持托盤3內之液晶面板2時，如果在面板把持部24之下側有液晶面板2，則從發光部89射出的光藉由液晶面板2之上表面反射、且藉由反射構件92反射後再次藉由液晶面板2之上表面反射而入射到受光部90，但如果在面板把持部24之下側沒有液晶面板2，則從發光部89射出的光藉由托盤3反射、且藉由反射構件92反射後再次藉由托盤3反射而入射到受光部90，因此，在面板把持部24之下側有液晶面板2的情況和没有液晶面板2的情況下，受光部90之受光量不同。面板檢測機構74基於受光部90之受光量之差異來檢測液晶面板2之有無。 此外，如圖9所示，在托盤3上形成有支持液晶面板2之外周端部分的面板支持部3a。面板支持部3a形成為長方形之框狀，液晶面板2之外周端部分之下表面與面板支持部3a之上表面接觸。面板支持部3a之內周側形成朝向下側凹下的凹部3b。面板支持部3a之上表面和凹部3b之底面的上下方向之距離D為3～4（mm）左右。如上所述，液晶面板2之厚度為1（mm）左右，在收容於托盤3的液晶面板2未產生撓曲的情況下，收容於托盤3的液晶面板2之上表面和凹部3b之底面之上下方向之距離為4～5（mm）左右。 在面板把持部24要把持托盤3內之液晶面板2時，在面板把持部24之下側没有液晶面板2的情況下，從發光部89射出的光藉由凹部3b之底面被反射。又，藉由凹部3b之底面反射後的光藉由反射構件92反射後，再次藉由凹部3b之底面反射。 （液晶面板之把持動作） 圖10係用於說明圖5所示的面板把持部24的液晶面板2之把持動作之流程圖。 在本形態中，在面板把持部24進行的液晶面板2之把持動作開始，面板把持部24要把持收容於托盤3內之規定部位的液晶面板2時，首先，藉由面板檢測機構74檢測液晶面板2之有無（步驟S1）。如果在托盤3内有液晶面板2之脫落，在步驟S1中，藉由面板檢測機構74未檢測到液晶面板2（在步驟S1中，為“No”之情況），機器人9則使面板把持部24移動，嘗試藉由面板把持部24把持收容於托盤3內之其他部位的液晶面板2（步驟S2）。即，如果在面板把持部24要把持托盤3內之液晶面板2時，藉由面板檢測機構74未檢測到液晶面板2，機器人9則繼續進行用於把持收容於托盤3內之其他部位的液晶面板2的動作。 另一方面，如果在面板把持部24要把持收容於托盤3內之規定部位的液晶面板2時，藉由面板檢測機構74檢測到液晶面板2（在步驟S1中為“Yes”之情況），則機器人9仍舊繼續液晶面板2之把持動作（步驟S3）。即，機器人9嘗試面板把持部24進行的對液晶面板2及FPC2a之吸附。具體而言，機器人9嘗試藉由面板吸附部71吸附液晶面板2，及藉由基板吸附部72吸附FPC2a的動作。 之後，藉由第一壓力感測器87檢測在面板吸附部71是否吸附有液晶面板2，並且藉由第二壓力感測器88檢測在基板吸附部72是否吸附有FPC2a（步驟S4）。在步驟S4中，如果藉由第一壓力感測器87檢測到在面板吸附部71吸附有液晶面板2、且藉由第二壓力感測器88檢測到在基板吸附部72吸附有FPC2a（在步驟S4中為“Yes”之情況），則結束面板把持部24對液晶面板2之把持動作，機器人9開始液晶面板2從托盤3之搬出動作。 另一方面，在面板吸附部71吸附有液晶面板2、及在基板吸附部72吸附有FPC2a的至少任一方未被檢測到的情況下（在步驟S4中為“No”之情況），判斷在面板吸附部71未吸附液晶面板2的狀態、及在基板吸附部72未吸附FPC2a的狀態的至少任一狀態的吸附錯誤是否產生規定次數（N次）（步驟S5）。例如，在吸附錯誤未產生作為規定次數的3次的情況下（在步驟S5中為“No”之情況），機器人9再次嘗試面板把持部24對液晶面板2及FPC2a之吸附（步驟S6），返回步驟S4。 在經過了步驟S6後之步驟S4中，如果檢測到在面板吸附部71吸附有液晶面板2、且在基板吸附部72吸附有FPC2a（在步驟S4中為“Yes”之情況），則結束面板把持部24對液晶面板2之把持動作，機器人9開始液晶面板2從托盤3之搬出動作。又，在步驟S5中，在吸附錯誤產生規定次數的情況下（在步驟S5中為“Yes”之情況），為錯誤，機器人9停止。 （本形態之主要的效果） 如以上說明，在本形態中，面板把持部24具備在面板把持部24要把持托盤3內之液晶面板2時檢測液晶面板2之有無的面板檢測機構74。又，在本形態中，如果在面板把持部24要把持托盤3內之液晶面板2時，藉由面板檢測機構74檢測到液晶面板2，則機器人9仍舊繼續液晶面板2之把持動作，如果在托盤3中產生液晶面板2之脫落，藉由面板檢測機構74未檢測到液晶面板2，則機器人9繼續用於把持收容於托盤3之中之其他部位的液晶面板2之動作。因此，在本形態中，即使在托盤3中產生液晶面板2之脫落，亦能夠繼續機器人9之動作。 在本形態中，面板檢測機構74係光學式檢測機構，具備朝向托盤3內之液晶面板2射出光的發光部89和配置於可接受藉由液晶面板2反射的之光的位置的受光部90。又，在本形態中，液晶面板2之表面為玻璃面，另一方面，托盤3藉由樹脂形成，托盤3之表面與液晶面板2之表面相比形成粗面。 因此，在本形態中，在面板把持部24要把持的液晶面板2處於托盤3中的情況下，從發光部89射出並藉由液晶面板2之表面進行了鏡面反射之光向受光部90入射，在面板把持部24要把持的液晶面板2不在托盤3中的情況下，從發光部89射出並藉由托盤3之表面進行了漫反射之光向受光部90入射。因此，在本形態中，在面板把持部24要把持的液晶面板2處於托盤3中的情況和不在托盤3中的情況下，受光部90之受光量容易產生差異，其結果，能夠適宜地檢測托盤3內之液晶面板2之有無。 又，在本形態中，面板檢測機構74係回歸反射型之光學式檢測機構，受光部90被配置於可接受在藉由反射構件92反射之後藉由液晶面板2反射之光的位置。因此，在本形態中，在面板把持部24要把持的液晶面板2處於托盤3中的情況下，從發光部89射出的光兩次藉由液晶面板2之表面進行鏡面反射後向受光部90入射，在面板把持部24要把持的液晶面板2不在托盤3中的情況下，從發光部89射出的光兩次藉由托盤3之表面漫反射後向受光部90入射。 因此，在本形態中，即使收容於托盤3的液晶面板2之上表面和照射來自發光部89之光的托盤3之凹部3b之底面之上下方向之距離短至4～5（mm），在面板把持部24要把持的液晶面板2處於托盤3中的情況和不在托盤3中的情況下，受光部90之受光量亦容易產生差異。因此，在本形態中，即使收容於托盤3的液晶面板2之上表面和托盤3之凹部3b之底面之上下方向之距離變短，亦能夠適宜地檢測托盤3內之液晶面板2之有無。 又，在本形態中，將受發光部91和反射構件92分別安裝於第一方向上的基體構件75之兩端側，從發光部89射出的光向液晶面板2之入射角θ增大。因此，在本形態中，即使收容於托盤3的液晶面板2之上表面和托盤3之凹部3b之底面之上下方向之距離變短，如圖9所示，亦能夠增大在面板把持部24要把持的液晶面板2處於托盤3中的情況下從發光部89射出並藉由液晶面板2反射的光之光軸L1和在面板把持部24要把持的液晶面板2不在托盤3中的情況下從發光部89射出並藉由托盤3反射的光之光軸L2之偏移量。 因此，在本形態中，即使收容於托盤3的液晶面板2之上表面和托盤3之凹部3b之底面之上下方向之距離變短，在面板把持部24要把持的液晶面板2處於托盤3中的情況和不在托盤3中的情況下，亦能夠增大向受光部90入射的光之光軸之偏移量。因此，在本形態中，即使收容於托盤3的液晶面板2之上表面和托盤3之凹部3b之底面之上下方向之距離變短，受光部90之受光量亦容易產生更大的差異，其結果，能夠更適宜地檢測托盤3內之液晶面板2之有無。 在本形態中，把持液晶面板2的面板把持部24除具備吸附液晶面板2的面板吸附部71之外，還具備吸附從液晶面板2引出的FPC2a的基板吸附部72。因此，在本形態中，即使FPC2a從液晶面板2引出，亦能夠抑制搬運液晶面板2時之FPC2a之晃動。 在本形態中，如果藉由第一壓力感測器87檢測到在面板吸附部71吸附有液晶面板2、且藉由第二壓力感測器88檢測到在基板吸附部72吸附有FPC2a，機器人9則開始液晶面板2從托盤3之搬出動作。因此，在本形態中，能夠在藉由面板把持部24可靠地把持液晶面板2及FPC2a的狀態下，從托盤3搬出液晶面板2。 （其他實施形態） 上述的形態係本發明之最佳形態之一例，但不限定於此，在不變更本發明之宗旨的範圍內可以實施各種變形。 在上述的形態中，面板檢測機構74亦可以不是回歸反射型之光學式檢測機構。該情況下，例如，受光部90在上述的形態中被配置在配置有反射構件92的位置。即，受光部90被配置在可接受從發光部89射出並藉由液晶面板2反射之光的位置。又，發光部89和受光部90以在第一方向上隔著面板吸附部71的方式配置，並且被分別安裝於第一方向上的基體構件75之兩端側。 即使在該情況下，亦能夠增大從發光部89射出的光向液晶面板2之入射角θ，因此，即使收容於托盤3的液晶面板2之上表面和托盤3之凹部3b之底面之上下方向之距離變短，亦能夠增大在面板把持部24要把持的液晶面板2處於托盤3中的情況下藉由液晶面板2反射的光之光軸L1和在面板把持部24要把持的液晶面板2不在托盤3中的情況下藉由托盤3反射的光之光軸L2之偏移量。 因此，即使收容於托盤3的液晶面板2之上表面和托盤3之凹部3b之底面之上下方向之距離變短，在面板把持部24要把持的液晶面板2處於托盤3中的情況和不在托盤3中的情況下，亦能夠增大向受光部90入射的光之光軸之偏移量。因此，即使收容於托盤3的液晶面板2之上表面和托盤3之凹部3b之底面之上下方向之距離變短，受光部90之受光量亦容易產生差異，其結果，能夠適宜地檢測托盤3內之液晶面板2之有無。 在上述的形態中，亦可以在凹部3b之底面形成朝向上側突出的凸部，以使向托盤3之凹部3b之底面照射的光不會朝向反射構件92反射。該情況下，即使收容於托盤3的液晶面板2之上表面和托盤3之凹部3b之底面之上下方向之距離變短，在面板把持部24要把持的液晶面板2處於托盤3中的情況和不在托盤3中的情況下，受光部90之受光量亦容易產生更大的差異。 在上述的形態中，FPC2a以外之配線亦可以從液晶面板2引出。例如，FFC（Flexible Flat Cable）亦可以從液晶面板2引出。又，在上述的形態中，面板把持部24亦可以不具備基板吸附部72。 在上述的形態中，被機器人9搬運的液晶面板2亦可以係連接FPC2a之前之液晶面板2。即，收容於托盤3的液晶面板2亦可以係連接FPC2a之前之液晶面板2。又，在上述的形態中，被機器人9搬運的顯示面板亦可以係液晶面板2以外之顯示面板。例如，被機器人9搬運的顯示面板亦可以係有機EL面板。 在上述的形態中，以作為並聯連桿機器人的機器人9為例，對本發明之面板搬運機器人之結構進行了說明，但應用本發明的面板搬運機器人可為雙軸正交型機器人，或可為三軸正交型機器人。又，應用本發明的面板搬運機器人亦可以係水平多關節機器人。 Hereinafter, embodiments of the present invention will be described with reference to the drawings. (Overall structure of conveyance system) FIG. 1 is a side view of a conveyance system 1 incorporating a panel conveyance robot 9 according to an embodiment of the present invention. FIG. 2 is a plan view showing the conveyance system 1 from the EE direction of FIG. 1 . FIG. 3 is a perspective view of the panel transfer robot 9 shown in FIG. 1 . FIG. 4 is a perspective view of the supply unit 11 shown in FIG. 1 . The panel transfer robot 9 (hereinafter referred to as "robot 9") of the present embodiment is a robot that transfers the liquid crystal panel 2 as a display panel. The robot 9 is used by being incorporated in the conveyance system 1 . The conveyance system 1 is assembled in a production line of liquid crystal displays used in mobile devices and the like. The conveyance system 1 conveys the liquid crystal panel 2 and supplies the liquid crystal panel 2 to the processing apparatus 14 (see FIG. 2 ) that performs predetermined processing on the liquid crystal panel 2 . The liquid crystal panel 2 is formed in a rectangular flat shape. The thickness of the liquid crystal panel 2 is about 1 (mm). Data such as inspection data of the liquid crystal panel 2 are recorded at a portion of the liquid crystal panel 2 away from the display area. The data recorded on the portion of the liquid crystal panel 2 away from the display area is optically readable data. A driver IC is mounted on the liquid crystal panel 2 conveyed by the conveyance system 1 of the present embodiment. Moreover, FPC2a (FIG. 8) which is a wiring is connected to the liquid crystal panel 2. As shown in FIG. That is, the FPC 2 a serving as a wiring board is drawn out from the liquid crystal panel 2 . For example, the FPC 2a is drawn out from one of the short sides of the liquid crystal panel 2 formed in a rectangular flat plate shape in a direction parallel to the long sides. In addition, in FIG. 2 etc., illustration of FPC2a is abbreviate|omitted. The conveyance system 1 is provided with two conveyors 4 and 5 which convey the tray 3 in which the liquid crystal panel 2 can be accommodated. The tray 3 is formed of resin. A plurality of liquid crystal panels 2 can be accommodated on the tray 3 . The liquid crystal panel 2 is accommodated in the tray 3 so that the thickness direction and the up-down direction (vertical direction) of the liquid crystal panel 2 correspond. The plurality of liquid crystal panels 2 accommodated in the tray 3 are accommodated in the tray 3 in a state where they do not overlap each other. The conveyors 4 and 5 linearly convey the pallets 3 stacked in multiple layers (the stacked pallets 3 ) in the horizontal direction. In the following description, the conveying direction of the pallets 3 conveyed by the conveyors 4 and 5 (X direction in FIG. 1 etc.) is referred to as the “forward and rearward direction”, and the direction ( The Y direction in Fig. 1 etc.) is set as "left and right direction". Also, let one side in the front-rear direction (the side in the X1 direction in FIG. 1 etc.) be the “front” side, the opposite side (the side in the X2 direction in FIG. 1 etc.) is referred to as the “rear side”, and one side in the left-right direction (Y1 direction side of FIG. 2 etc.) is set as a "right" side, and the opposite side (Y2 direction side of FIG. 2 etc.) is set as a "left" side. In this form, the processing apparatus 14 is arrange|positioned at the rear side of the conveyance system 1. As shown in FIG. Further, the conveyance system 1 includes two pallet stages 6 and 7 on which the pallets 3 are placed, a robot 8 that conveys the pallet 3 between the conveyors 4 and 5 and the pallet stages 6 and 7 , and a robot 8 that transfers the pallet 3 from the pallet stage 6 to the conveyor 4 . The above-mentioned robot 9 that unloads the liquid crystal panel 2 from the tray 3 of 7 and 7 receives the liquid crystal panel 2 from the robot 9 and supplies it to the supply unit 11 of the processing apparatus 14 . The tray stages 6 and 7 are arranged on the rear side of the conveyors 4 and 5 . The supply unit 11 is arranged on the rear side of the tray stages 6 and 7 . Further, the conveyance system 1 includes a main body frame 12 on which the conveyors 4 and 5 , the pallet stages 6 and 7 , the robot 8 and the supply unit 11 are installed, and a main body frame 13 on which the robot 9 is installed. The upper surface of the main body frame 12 is formed in a plane shape perpendicular to the vertical direction, and the conveyors 4 and 5 , the tray stages 6 and 7 , the robot 8 , and the supply unit 11 are provided on the upper surface of the main body frame 12 . The body frame 13 is formed as a substantially gate-shaped door frame, and is disposed so as to straddle the rear end side portion of the body frame 12 in the left-right direction. The robot 9 is installed on the upper surface portion of the main body frame 13 . The conveyors 4 and 5 are roller conveyors provided with a plurality of rollers. The conveyor 4 and the conveyor 5 are arranged adjacent to each other in the left-right direction. The conveyor 4 conveys the stacked pallets 3 toward the rear side, and the conveyor 5 conveys the stacked pallets 3 toward the front side. A plurality of liquid crystal panels 2 are accommodated in trays 3 conveyed by conveyors 4 . On the other hand, the liquid crystal panel 2 is not accommodated in the tray 3 conveyed by the conveyor 5, and the tray 3 conveyed by the conveyor 5 is an empty tray. The pallets 3 in the stacked state conveyed by the operator from the temporary storage rack (not shown) are placed on the front end side of the conveyor 4 . The pallets 3 in the stacked state placed on the front end side of the conveyor 4 are conveyed to the rear side, and the pallets 3 in the stacked state conveyed to the rear end side of the conveyor 4 are unloaded by the robot 8 as described later. In addition, on the rear end side of the conveyor 5, the empty trays 3 are stacked by the robot 8 as described later. After the trays 3 are stacked to a predetermined number of layers, the trays 3 in the stacked state are conveyed to the front side. The pallets 3 in the stacked state conveyed to the front end side of the conveyor 5 are conveyed by an operator to a rack for empty pallets. One tray 3 is placed on the tray stages 6 and 7 . The pallet stage 6 and the pallet stage 7 are arrange|positioned in the state spaced apart by the predetermined space|interval in the left-right direction. The tray stage 6 is arranged at substantially the same position as the conveyor 4 in the left-right direction, and the tray stage 7 is arranged at substantially the same position as the conveyor 5 in the left-right direction. The upper surfaces of the tray stages 6 and 7 are formed in a plane shape perpendicular to the vertical direction. Robot 8 is a so-called three-axis orthogonal robot. The robot 8 includes a main body frame 15 formed in a gate shape, a movable frame 16 held by the main body frame 15 so as to be slidable in the left-right direction with respect to the main body frame 15 , and held in a front-rear direction relative to the movable frame 16 . The movable frame 17 on the movable frame 16 , the movable frame 18 held on the movable frame 17 so as to be slidable up and down relative to the movable frame 17 , and the tray gripping portion 19 attached to the movable frame 18 . Further, the robot 8 includes a drive mechanism for sliding the movable frame 16 in the left-right direction, a drive mechanism for sliding the movable frame 17 in the front-rear direction, and a drive mechanism for sliding the movable frame 18 in the vertical direction. The main body frame 15 is provided so as to straddle the conveyors 4 and 5 in the left-right direction. The movable frame 16 is attached to the upper surface side of the main body frame 15 . The movable frame 16 is arranged on the upper side of the trays 3 placed on the conveyors 4 and 5 in a stacked state. The movable frame 17 is mounted on the right side of the movable frame 16 . The movable frame 18 is attached to the rear end side of the movable frame 17 . The tray grip portion 19 is attached to the lower end of the movable frame 18 . The tray gripping portion 19 includes a plurality of suction portions that suction and hold the tray 3 . The robot 8 carries out the conveyance of the pallet 3 from the conveyor 4 to the pallet stages 6 and 7 and the conveyance of the pallet 3 from the pallet stages 6 and 7 to the conveyor 5 . Specifically, the robot 8 transports the pallets 3 in the stacked state conveyed to the rear end side of the conveyor 4 to the pallet stage 6 or the pallet stage 7 one by one, and unloads the stacked pallets 3 on the conveyor 4 . In addition, the robot 8 conveys one empty pallet 3 from the pallet stage 6 or the pallet stage 7 to the rear end side of the conveyor 5 , and stacks the pallet 3 on the conveyor 5 . The robot 9 is a so-called parallel link robot. The robot 9 includes a main body 20 , three rods 21 connected to the main body 20 , three arms 22 connected to the three rods 21 , a head unit 23 connected to the three arms 22 , and a panel gripper that grips the liquid crystal panel 2 . part 24 (refer to FIG. 5 etc.). The robot 9 is installed so as to be suspended on the upper surface portion of the main body frame 13 . Moreover, the main body part 20 is arrange|positioned above the tray stages 6 and 7, and is arrange|positioned at the rear side rather than the main body frame 15 of the robot 8. As shown in FIG. In addition, illustration of the panel holding part 24 is abbreviate|omitted in FIG.1, FIG.3. The three rods 21 are connected to the main body portion 20 so as to protrude substantially radially toward the outer peripheral side of the main body portion 20 at substantially equal angular pitches. That is, the three rods 21 are coupled to the main body portion 20 so as to protrude substantially radially toward the outer peripheral side of the main body portion 20 at a pitch of approximately 120°. In addition, the base end sides of the three rods 21 are rotatably connected to the main body portion 20 . A motor 25 with a speed reducer that rotates the rod 21 is disposed at the connection portion between the main body portion 20 and the rod 21 . The robot 9 of the present embodiment includes three motors 25 that rotate the three rods 21, respectively. The output shaft of the motor 25 is fixed to the base end side of the rod 21 . The base end side of the arm portion 22 is rotatably connected to the front end side of the lever 21 . Specifically, the arm portion 22 is constituted by two linear arms 26 that are parallel to each other, and the base end side of each of the two arms 26 is rotatably connected to the front end side of the lever 21 . The head unit 23 is rotatably connected to the front end side of the three arm portions 22 . A motor 27 is attached to the upper end of the head unit 23 . The panel holding portion 24 is attached to the lower end of the head unit 23 . Moreover, the panel holding part 24 is connected to the motor 27, and can be rotated by the power of the motor 27 in the axial direction of the rotation in the up-down direction. In this aspect, the main body part 20 , the three rods 21 , the three arm parts 22 , the head unit 23 , the three motors 25 , and the motor 27 constitute the moving mechanism 28 that moves the panel gripping part 24 . The specific structure of the panel holding portion 24 will be described later. In the robot 9, by individually driving the three motors 25, the head unit 23 can be held at any position in the vertical direction, the left-right direction, and the front-rear direction within a predetermined area, and the head unit 23 can always maintain a fixed posture. The state (specifically, the state in which the panel gripping portion 24 is maintained toward the lower side) moves. The robot 9 unloads the liquid crystal panels 2 contained in the trays 3 on the tray stages 6 and 7 one by one. Specifically, the robot 9 unloads the liquid crystal panels 2 from the tray 3 one by one until the trays 3 on the tray stages 6 and 7 are emptied. Moreover, the robot 9 conveys the liquid crystal panel 2 carried out from the tray 3 to the panel stage 39 mentioned later. The supply unit 11 includes an alignment device 30 for aligning the liquid crystal panel 2 and a data reading device 31 for reading data recorded on the liquid crystal panel 2 . The alignment device 30 performs alignment of the liquid crystal panel 2 before the data of the liquid crystal panel 2 is read by the data reading device 31 . In addition, the supply unit 11 includes a robot 33 that transports the liquid crystal panel 2 after data has been read by the data reading device 31 to the processing device 14 , and an eliminator (static removal) that removes static electricity from the liquid crystal panel 2 transported to the processing device 14 device) 34, a conveying device 35 for conveying the liquid crystal panel 2 aligned by the alignment device 30 to the robot 33, a conveying device 35 for conveying the liquid crystal panel 2 aligned by the alignment device 30 to the conveying device 35 The robot 36 and the substrate 37 having these structures are placed and fixed. The alignment device 30 is placed on the right front end side of the substrate 37 . The robot 33 is placed on the left rear end side of the base plate 37 . The data reading device 31 is placed on the left front end side of the substrate 37 . The robot 36 is arranged adjacent to the rear side of the alignment device 30 . The conveying device 35 is arranged between the data reading device 31 , the robot 33 , and the alignment device 30 in the left-right direction. The eliminator 34 is arranged above the conveying device 35 . The substrate 37 is placed and fixed on the rear end side portion of the upper surface of the main body frame 12 . The alignment device 30 includes a panel stage 39 on which the liquid crystal panel 2 carried out from the tray 3 on the tray stages 6 and 7 by the robot 9 is placed, and the up-down direction is the axis direction of rotation to rotate the panel stage 39 to rotate the panel. The stage 39 is moved in the left-right direction and the front-rear direction, and a moving mechanism 40 for performing the positioning of the liquid crystal panel 2 is performed. Moreover, the alignment apparatus 30 is provided with the camera 41 and the illumination 42 arrange|positioned above the panel stage 39. As shown in FIG. The conveyance device 35 includes four panel stages 52 on which the liquid crystal panels 2 are placed, and a drive mechanism for sliding the four panel stages 52 in the front-rear direction. The robot 36 includes a panel gripping portion 55 that sucks and grips the liquid crystal panel 2 , and a drive mechanism that slides the panel gripping portion 55 in the up-down direction and the left-right direction. The robot 33 includes four panel gripping portions 58 that suck and grip the liquid crystal panel 2 , and a drive mechanism that slides the four panel gripping portions 58 in the up-down direction and the left-right direction. The robot 36 conveys the liquid crystal panel 2 after the alignment by the alignment device 30 to the panel stage 52 stopped at the front side. When the liquid crystal panel 2 is placed on the panel stage 52 , the conveying device 35 moves the panel stage 52 in the rearward direction, and conveys the liquid crystal panel 2 to the rear end side of the conveying device 35 . The robot 33 carries the liquid crystal panel 2 conveyed to the rear end side of the conveying apparatus 35 by the conveying apparatus 35 into the processing apparatus 14 . The data reading device 31 includes a camera 62 that reads optically readable data, a drive mechanism that slides the camera 62 in the vertical, front-rear, and left-right directions, and illumination that irradiates the liquid crystal panel 2 with light. The data reading device 31 reads the data of the liquid crystal panel 2 placed on the panel stage 52 of the conveying device 35 after the position adjustment is performed by the alignment device 30 . As described above, the eliminator 34 is arranged above the conveyance device 35 . Moreover, the static electricity remover 34 is arrange|positioned at the back side rather than the data reading apparatus 31, and removes the static electricity of the liquid crystal panel 2 after reading the data by the data reading apparatus 31. (Configuration of Panel Grip Part) FIG. 5 is a perspective view of the panel grip part 24 of the robot 9 shown in FIG. 3 . FIG. 6 is a perspective view showing the panel holding portion 24 shown in FIG. 5 from another direction. FIG. 7 is a perspective view showing the substrate suction part 72 and the position adjustment mechanism 73 shown in FIG. 5 from the lower side. FIG. 8 is a diagram for explaining the route of the piping connected to the panel suction part 71 and the board suction part 72 shown in FIG. 5 . FIG. 9 is a schematic diagram for explaining the structure of the panel detection mechanism 74 shown in FIG. 5 . The panel holding portion 24 includes a panel suction portion 71 for sucking the liquid crystal panel 2 and a substrate suction portion 72 as a wiring suction portion for sucking the FPC 2 a drawn out from the liquid crystal panel 2 . The panel holding part 24 of this form is provided with the two board|substrate adsorption|suction parts 72. As shown in FIG. Further, the panel gripping portion 24 includes a position adjustment mechanism 73 for adjusting the position of the substrate suction portion 72 relative to the panel suction portion 71 , and a panel detection mechanism 74 for detecting the presence or absence of the liquid crystal panel 2 in the tray 3 . Further, the panel gripping portion 24 includes a base member 75 to which the panel suction portion 71 , the position adjustment mechanism 73 , and the panel detection mechanism 74 are attached. The base member 75 is formed in a substantially circular flat plate shape, and is arranged so that the thickness direction and the vertical direction of the base member 75 coincide. The panel suction part 71 is attached to the lower surface side of the base member 75 . The panel suction portion 71 suctions the liquid crystal panel 2 so that the thickness direction and the vertical direction (vertical direction) of the liquid crystal panel 2 are aligned. A suction port (not shown) for sucking the upper surface of the liquid crystal panel 2 is formed on the lower surface of the panel suction portion 71 . The panel suction part 71 holds the liquid crystal panel 2 by vacuum suctioning the upper surface of the liquid crystal panel 2 . In the following description, the V direction in FIG. 5 and the like orthogonal to the vertical direction (vertical direction) is referred to as the “first direction”, and the W direction in FIG. 5 and the like orthogonal to the vertical direction and the first direction is referred to as the “first direction”. "Second Direction". The board|substrate adsorption|suction part 72 adsorb|sucks FPC2a so that the thickness direction and the up-down direction of FPC2a may correspond. The substrate suction portion 72 includes a substrate contact portion 76 that is in contact with the FPC 2a, and a buffer mechanism 77 that relieves an impact when the substrate contact portion 76 comes into contact with the FPC 2a. The buffer mechanism 77 is, for example, an air damper including a piston 77a and a cylinder 77b that slidably holds the piston 77a. The buffer mechanism 77 is arranged so that the moving direction of the piston 77a and the vertical direction coincide with each other. The substrate contact portion 76 is fixed to the lower end of the piston 77a, and can be in contact with the upper surface of the FPC 2a. A suction port 76 a for sucking the upper surface of the FPC 2 a is formed on the lower surface of the substrate contact portion 76 (see FIG. 7 ). The diameter of the suction port 76 a is smaller than the diameter of the suction port formed on the lower surface of the panel suction portion 71 . The board|substrate adsorption|suction part 72 hold|maintains FPC2a by vacuum adsorption|suction of the upper surface of FPC2a. The position adjustment mechanism 73 is a manual adjustment mechanism. The position adjustment mechanism 73 includes a holding member 78 holding the air cylinder 77b, a holding member 79 holding the holding member 78 slidably in the first direction, and a holding member 80 holding the holding member 79 slidably in the second direction. The position adjustment mechanism 73 of the present embodiment includes two holding members 78 , two holding members 79 , and two holding members 80 . The holding member 80 is an elongated plate-like member having an L-shaped cross-sectional shape. One end of each of the two holding members 80 is fixed to both end sides of the base member 75 in the first direction, respectively, and the holding members 80 extend from the base member 75 to one side in the second direction. That is, the holding member 80 is arranged so that the longitudinal direction of the holding member 80 and the second direction are aligned. The holding member 80 is formed with an elongated hole 80 a whose longitudinal direction is the second direction. The long hole 80a penetrates the flat plate portion of the holding member 80 perpendicular to the vertical direction in the vertical direction. Further, the long hole 80a is formed between the approximate center of the holding member 80 in the second direction and the end of the holding member 80 on one side in the second direction (one side in the direction in which the holding member 80 protrudes from the base member 75 ). of the entire region. The holding member 79 is an elongated plate-like member having an L-shaped cross-sectional shape. Screw holes into which the screws 81 are screwed are formed on both end sides of the holding member 79 . The screw holes are formed in the flat plate portion of the holding member 79 perpendicular to the vertical direction. Both end sides of the holding member 79 are fixed to each of the two holding members 80 by screws 81 inserted through the long holes 80a from above. That is, the holding members 79 are fixed to the two holding members 80 by the screws 81 , and are arranged on the lower side of the holding members 80 . In addition, the two holding members 79 are respectively fixed to the two holding members 80 . The holding member 79 is arranged in parallel with the first direction. That is, the two holding members 79 are arranged parallel to each other and parallel to the first direction. The holding member 79 is formed with an elongated hole 79 a whose longitudinal direction is the first direction. The long hole 79a penetrates the flat plate portion of the holding member 79 orthogonal to the second direction in the second direction. In addition, the long hole 79a is formed in the entire area between the end portion on one side of the holding member 79 in the first direction and the end portion on the other side. The holding member 78 is a flat plate-shaped member bent in an L shape. A screw hole into which the screw 82 is screwed is formed in the holding member 78 . The screw holes are formed in the flat plate portion of the holding member 78 that is orthogonal to the second direction. The holding member 78 is fixed to the holding member 79 by the screw 82 inserted into the long hole 79a from one side in the second direction, and is arranged on the other side of the holding member 79 in the second direction. In addition, the two holding members 78 are respectively fixed to the two holding members 79, respectively. An air cylinder 77b is fixed to a flat plate portion of the holding member 78 perpendicular to the vertical direction. That is, the substrate suction portion 72 is fixed to the holding member 78 . In this aspect, by loosening the screw 82, the position adjustment of the board suction part 72 with respect to the panel suction part 71 in the first direction can be performed. Moreover, by loosening the screw 81, the position adjustment of the board|substrate adsorption|suction member 72 with respect to the panel adsorption|suction part 71 in the second direction can be performed. That is, the substrate suction part 72 can be adjusted in position with respect to the panel suction part 71 in the first direction and the second direction. In addition, each of the two substrate suction parts 72 can be adjusted in position with respect to the panel suction part 71 . As shown in FIG. 8 , the panel suction part 71 and the two substrate suction parts 72 are connected to a common air suction mechanism 85 via a common on-off valve 84 . The on-off valve 84 is a solenoid valve. In addition, the suction mechanism 85 is, for example, a vacuum pump. A flow control valve 86 is arranged on the piping path between the on-off valve 84 and the two substrate suction units 72 . The flow control valve 86 is, for example, a flow control valve or a throttle valve. In this embodiment, the suction force of the substrate suction portion 72 to the FPC 2 a is smaller than the suction force of the panel suction portion 71 to the liquid crystal panel 2 by the action of the flow control valve 86 . For example, the ratio of the attractive force of the substrate suction portion 72 to the FPC 2 a and the attractive force of the panel suction portion 71 to the liquid crystal panel 2 is 1:9. A first pressure sensor 87 for detecting whether the liquid crystal panel 2 is sucked to the panel suction portion 71 based on the suction pressure of the panel suction portion 71 is connected to the piping path between the on-off valve 84 and the panel suction portion 71 . In addition, a second pressure sensor 88 for detecting whether or not the FPC 2 a is adsorbed to the substrate adsorption portion 72 based on the suction pressure of the substrate adsorption portion 72 is connected to the piping path between the on-off valve 84 and the two substrate adsorption portions 72 . . As shown in FIG. 9 , the panel detection mechanism 74 is an optical detection mechanism, and includes a light-emitting portion 89 that emits light toward the liquid crystal panel 2 in the tray 3 , and a light-receiving portion 90 disposed at a position where it receives light reflected by the liquid crystal panel 2 . . Specifically, the panel detection mechanism 74 is a retro-reflection type optical detection mechanism having a light-receiving part 91 and a reflecting member (retro-reflecting plate) 92 . The light emitted from the light emitting part 89 and reflected by the liquid crystal panel 2 is reflected toward the liquid crystal panel 2 , and the light receiving part 90 is arranged in a position to receive the light reflected by the reflection member 92 and then reflected by the liquid crystal panel 2 . The light emitting unit 89 includes an LED (Light Emitting Diode) as a light source. Moreover, the light-emitting part 89 is equipped with the optical fiber which transmits the light from LED, for example. The light-receiving part 91 and the reflecting member 92 are fixed to the lower surface side of the base member 75 . In addition, the light-receiving part 91 and the reflecting member 92 are arranged above the lower surface of the panel suction part 71 . The light-receiving part 91 and the reflecting member 92 are arranged so as to sandwich the panel suction part 71 in the first direction. In addition, the light-receiving part 91 and the reflecting member 92 are attached to both end sides of the base member 75 in the first direction, respectively. The light-emitting surface of the light-emitting portion 89 and the light-receiving surface of the light-receiving portion 90 face the obliquely lower side, and the reflecting surface of the reflecting member 92 faces the obliquely lower side. In addition, the light-emitting surface of the light-emitting portion 89, the light-receiving surface of the light-receiving portion 90, and the reflecting surface of the reflecting member 92 face inward in the first direction. The incident angle θ of the light emitted from the light emitting unit 89 to the liquid crystal panel 2 is 45° or more and less than 90°. Specifically, the incident angle θ is approximately 65°. Moreover, in this form, the spot diameter of the light irradiated to the liquid crystal panel 2 is small. The panel detection mechanism 74 detects the presence or absence of the liquid crystal panel 2 when the panel holding portion 24 is to hold the liquid crystal panel 2 in the tray 3 . Specifically, the panel detection mechanism 74 detects the presence or absence of the liquid crystal panel 2 based on the amount of light received by the light receiving portion 90 when the panel holding portion 24 is to hold the liquid crystal panel 2 in the tray 3 . That is, as shown in FIG. 9 , when the panel holding portion 24 is to hold the liquid crystal panel 2 in the tray 3, if there is a liquid crystal panel 2 on the lower side of the panel holding portion 24, the light emitted from the light emitting portion 89 passes through the liquid crystal panel. 2 is reflected by the upper surface of the reflective member 92 and then reflected by the upper surface of the liquid crystal panel 2 and then incident on the light-receiving portion 90. However, if there is no liquid crystal panel 2 on the lower side of the panel holding portion 24, the light is emitted from the light-emitting portion. The light emitted from 89 is reflected by the tray 3, reflected by the reflecting member 92, and then reflected by the tray 3 again, and then incident on the light receiving portion 90. Therefore, the case where the liquid crystal panel 2 is located on the lower side of the panel holding portion 24 and the absence of liquid crystal In the case of the panel 2, the amount of light received by the light receiving portion 90 is different. The panel detection mechanism 74 detects the presence or absence of the liquid crystal panel 2 based on the difference in the amount of light received by the light receiving portion 90 . Moreover, as shown in FIG. 9, the panel support part 3a which supports the outer peripheral edge part of the liquid crystal panel 2 is formed in the tray 3. As shown in FIG. The panel support portion 3a is formed in a rectangular frame shape, and the lower surface of the outer peripheral end portion of the liquid crystal panel 2 is in contact with the upper surface of the panel support portion 3a. The inner peripheral side of the panel support portion 3a is formed with a concave portion 3b which is recessed toward the lower side. The distance D in the up-down direction of the upper surface of the panel support part 3a and the bottom surface of the recessed part 3b is about 3-4 (mm). As described above, the thickness of the liquid crystal panel 2 is about 1 (mm), and when the liquid crystal panel 2 accommodated in the tray 3 is not bent, the upper surface of the liquid crystal panel 2 accommodated in the tray 3 and the bottom surface of the concave portion 3 b are separated. The distance in the up and down direction is about 4 to 5 (mm). When the panel holding portion 24 is to hold the liquid crystal panel 2 in the tray 3, and when there is no liquid crystal panel 2 on the lower side of the panel holding portion 24, the light emitted from the light emitting portion 89 is reflected by the bottom surface of the concave portion 3b. Moreover, the light reflected by the bottom surface of the recessed part 3b is reflected by the reflection member 92, and is reflected by the bottom surface of the recessed part 3b again. (Operation of Holding Liquid Crystal Panel) FIG. 10 is a flowchart for explaining the operation of holding the liquid crystal panel 2 by the panel holding unit 24 shown in FIG. 5 . In this embodiment, when the panel gripping unit 24 starts the gripping operation of the liquid crystal panel 2 and the panel gripping unit 24 tries to grip the liquid crystal panel 2 accommodated in a predetermined position in the tray 3 , first, the panel detection mechanism 74 detects the liquid crystal panel 2 . The presence or absence of panel 2 (step S1 ). If the liquid crystal panel 2 is dropped in the tray 3, the panel detection mechanism 74 does not detect the liquid crystal panel 2 in step S1 (in the case of "No" in step S1), the robot 9 causes the panel gripping unit 24 moves, and tries to hold the liquid crystal panel 2 accommodated in the other part in the tray 3 by the panel holding part 24 (step S2). That is, if the panel detection mechanism 74 fails to detect the liquid crystal panel 2 when the panel gripping portion 24 is to grip the liquid crystal panel 2 in the tray 3 , the robot 9 continues to grip the liquid crystals stored in other parts of the tray 3 . Action of panel 2. On the other hand, when the panel holding portion 24 is to hold the liquid crystal panel 2 accommodated in a predetermined position in the tray 3, the liquid crystal panel 2 is detected by the panel detection mechanism 74 (in the case of “Yes” in step S1), Then, the robot 9 continues to hold the liquid crystal panel 2 (step S3 ). That is, the robot 9 attempts the suction of the liquid crystal panel 2 and the FPC 2a by the panel gripper 24 . Specifically, the robot 9 attempts to suction the liquid crystal panel 2 by the panel suction part 71 and the operation of suctioning the FPC 2 a by the substrate suction part 72 . After that, it is detected by the first pressure sensor 87 whether the liquid crystal panel 2 is adsorbed on the panel adsorption portion 71 , and whether the FPC 2 a is adsorbed by the substrate adsorption portion 72 is detected by the second pressure sensor 88 (step S4 ). In step S4, if the first pressure sensor 87 detects that the liquid crystal panel 2 is adsorbed on the panel adsorption portion 71, and the second pressure sensor 88 detects that the FPC 2a is adsorbed on the substrate adsorption portion 72 (at In the case of “Yes” in step S4 ), the gripping operation of the liquid crystal panel 2 by the panel gripper 24 ends, and the robot 9 starts the unloading operation of the liquid crystal panel 2 from the tray 3 . On the other hand, when at least one of the liquid crystal panel 2 being adsorbed by the panel adsorption portion 71 and the FPC 2 a being adsorbed by the substrate adsorption portion 72 are not detected (in the case of “No” in step S4 ), it is determined that the Whether or not suction errors occur a predetermined number of times (N times) in at least one of the state where the panel suction part 71 does not suction the liquid crystal panel 2 and the state where the substrate suction part 72 does not suction the FPC 2 a (step S5 ). For example, when the suction error has not occurred three times as the predetermined number of times (in the case of “No” in step S5 ), the robot 9 tries again the suction of the liquid crystal panel 2 and the FPC 2 a by the panel gripper 24 (step S6 ), Return to step S4. In step S4 after step S6, if it is detected that the liquid crystal panel 2 is adsorbed to the panel adsorption part 71 and the FPC 2a is adsorbed to the substrate adsorption part 72 (in the case of "Yes" in step S4), the panel is terminated. When the gripping unit 24 grips the liquid crystal panel 2 , the robot 9 starts the unloading operation of the liquid crystal panel 2 from the tray 3 . Moreover, in step S5, when a suction error occurs a predetermined number of times (in the case of "Yes" in step S5), it becomes an error and the robot 9 stops. (Main effect of this form) As described above, in this form, the panel holding part 24 is provided with the panel detection mechanism 74 which detects the presence or absence of the liquid crystal panel 2 when the panel holding part 24 holds the liquid crystal panel 2 in the tray 3 . Furthermore, in this embodiment, if the panel detection mechanism 74 detects the liquid crystal panel 2 when the panel gripper 24 is to grip the liquid crystal panel 2 in the tray 3, the robot 9 continues the gripping operation of the liquid crystal panel 2. When the liquid crystal panel 2 falls off in the tray 3 , and the panel detection mechanism 74 does not detect the liquid crystal panel 2 , the robot 9 continues the operation of holding the liquid crystal panels 2 stored in other parts of the tray 3 . Therefore, in this aspect, even if the liquid crystal panel 2 falls off in the tray 3, the operation of the robot 9 can be continued. In this embodiment, the panel detection mechanism 74 is an optical detection mechanism, and includes a light-emitting portion 89 that emits light toward the liquid crystal panel 2 in the tray 3 and a light-receiving portion 90 that is arranged at a position to receive light reflected by the liquid crystal panel 2 . . In this embodiment, the surface of the liquid crystal panel 2 is a glass surface, while the tray 3 is formed of resin, and the surface of the tray 3 is rougher than the surface of the liquid crystal panel 2 . Therefore, in the present embodiment, when the liquid crystal panel 2 to be held by the panel holding unit 24 is in the tray 3 , the light emitted from the light emitting unit 89 and mirror-reflected by the surface of the liquid crystal panel 2 is incident on the light receiving unit 90 . When the liquid crystal panel 2 to be held by the panel holding unit 24 is not in the tray 3 , the light emitted from the light emitting unit 89 and diffusely reflected by the surface of the tray 3 enters the light receiving unit 90 . Therefore, in the present embodiment, when the liquid crystal panel 2 to be held by the panel holding portion 24 is in the tray 3 and when the liquid crystal panel 2 is not in the tray 3 , the light receiving amount of the light receiving portion 90 is likely to vary, and as a result, it is possible to appropriately detect The presence or absence of the liquid crystal panel 2 in the tray 3. In the present embodiment, the panel detection mechanism 74 is a retro-reflective optical detection mechanism, and the light receiving portion 90 is disposed at a position to receive the light reflected by the liquid crystal panel 2 after being reflected by the reflection member 92 . Therefore, in the present embodiment, when the liquid crystal panel 2 to be held by the panel holding portion 24 is in the tray 3 , the light emitted from the light emitting portion 89 is mirror-reflected by the surface of the liquid crystal panel 2 twice, and is directed to the light receiving portion 90 . When the liquid crystal panel 2 held by the panel holding unit 24 is not in the tray 3 , the light emitted from the light emitting unit 89 is diffusely reflected by the surface of the tray 3 twice and then enters the light receiving unit 90 . Therefore, in this embodiment, even if the distance between the upper surface of the liquid crystal panel 2 accommodated in the tray 3 and the bottom surface of the recess 3 b of the tray 3 irradiating the light from the light emitting part 89 in the up-down direction is as short as 4 to 5 (mm), the When the liquid crystal panel 2 to be held by the panel holding portion 24 is in the tray 3 and when it is not in the tray 3 , the light receiving amount of the light receiving portion 90 is likely to vary. Therefore, in this embodiment, even if the distance in the vertical direction between the upper surface of the liquid crystal panel 2 accommodated in the tray 3 and the bottom surface of the recess 3b of the tray 3 is shortened, the presence or absence of the liquid crystal panel 2 in the tray 3 can be appropriately detected. In this embodiment, the light-receiving portion 91 and the reflecting member 92 are respectively attached to both ends of the base member 75 in the first direction, and the incident angle θ of the light emitted from the light-emitting portion 89 to the liquid crystal panel 2 increases. Therefore, in this embodiment, even if the distance in the vertical direction between the upper surface of the liquid crystal panel 2 accommodated in the tray 3 and the bottom surface of the recessed portion 3b of the tray 3 is shortened, as shown in FIG. When the liquid crystal panel 2 to be held is in the tray 3 , the optical axis L1 of light emitted from the light emitting section 89 and reflected by the liquid crystal panel 2 and the liquid crystal panel 2 to be held by the panel holding section 24 are not in the tray 3 . The amount of displacement of the optical axis L2 of the light emitted from the light emitting portion 89 and reflected by the tray 3 . Therefore, in this embodiment, even if the distance in the vertical direction between the upper surface of the liquid crystal panel 2 accommodated in the tray 3 and the bottom surface of the recessed portion 3b of the tray 3 is shortened, the liquid crystal panel 2 to be held by the panel holding portion 24 is located in the tray 3 Also in the case of not being in the tray 3 , the offset amount of the optical axis of the light incident on the light-receiving part 90 can be increased. Therefore, in this embodiment, even if the distance in the vertical direction between the upper surface of the liquid crystal panel 2 accommodated in the tray 3 and the bottom surface of the recessed portion 3b of the tray 3 is shortened, the light receiving amount of the light receiving portion 90 is likely to have a larger difference, which As a result, the presence or absence of the liquid crystal panel 2 in the tray 3 can be detected more appropriately. In the present embodiment, the panel holding portion 24 for holding the liquid crystal panel 2 includes the substrate suction portion 72 for sucking the FPC 2 a drawn out from the liquid crystal panel 2 in addition to the panel suction portion 71 for sucking the liquid crystal panel 2 . Therefore, in this aspect, even if the FPC 2a is drawn out from the liquid crystal panel 2, the shaking of the FPC 2a when the liquid crystal panel 2 is conveyed can be suppressed. In this embodiment, if the first pressure sensor 87 detects that the liquid crystal panel 2 is adsorbed to the panel adsorption portion 71, and the second pressure sensor 88 detects that the FPC 2a is adsorbed to the substrate adsorption portion 72, the robot 9, the carrying out operation of the liquid crystal panel 2 from the tray 3 is started. Therefore, in the present embodiment, the liquid crystal panel 2 can be carried out from the tray 3 in a state where the liquid crystal panel 2 and the FPC 2 a are reliably held by the panel holding portion 24 . (Other Embodiments) The above-mentioned form is an example of the best form of the present invention, but is not limited to this, and various modifications can be implemented within the scope of not changing the gist of the present invention. In the above-mentioned form, the panel detection mechanism 74 may not be a retroreflective optical detection mechanism. In this case, for example, the light-receiving part 90 is arranged at the position where the reflection member 92 is arranged in the above-mentioned form. That is, the light receiving portion 90 is arranged at a position where it can receive the light emitted from the light emitting portion 89 and reflected by the liquid crystal panel 2 . Moreover, the light-emitting portion 89 and the light-receiving portion 90 are arranged so as to sandwich the panel suction portion 71 in the first direction, and are attached to both end sides of the base member 75 in the first direction, respectively. Even in this case, since the incident angle θ of the light emitted from the light-emitting portion 89 to the liquid crystal panel 2 can be increased, even if the upper surface of the liquid crystal panel 2 accommodated in the tray 3 and the bottom surface of the recess 3 b of the tray 3 are up and down When the distance between the directions is shortened, the optical axis L1 of light reflected by the liquid crystal panel 2 when the liquid crystal panel 2 to be held by the panel holding portion 24 is in the tray 3 and the liquid crystal to be held by the panel holding portion 24 can be increased. The amount of offset of the optical axis L2 of the light reflected by the tray 3 when the panel 2 is not in the tray 3 . Therefore, even if the distance in the vertical direction between the upper surface of the liquid crystal panel 2 accommodated in the tray 3 and the bottom surface of the recess 3b of the tray 3 is shortened, the case where the liquid crystal panel 2 to be held by the panel holding part 24 is in the tray 3 and not in the tray In the case of 3, the shift amount of the optical axis of the light incident on the light receiving unit 90 can also be increased. Therefore, even if the distance in the vertical direction between the upper surface of the liquid crystal panel 2 accommodated in the tray 3 and the bottom surface of the recessed portion 3b of the tray 3 is shortened, the amount of light received by the light receiving portion 90 is likely to vary. As a result, the tray 3 can be appropriately detected. The presence or absence of the liquid crystal panel 2 inside. In the above-described form, a convex portion protruding upward may be formed on the bottom surface of the concave portion 3 b so that the light irradiated on the bottom surface of the concave portion 3 b of the tray 3 is not reflected toward the reflection member 92 . In this case, even if the distance in the vertical direction between the upper surface of the liquid crystal panel 2 accommodated in the tray 3 and the bottom surface of the recess 3b of the tray 3 is shortened, the liquid crystal panel 2 to be held by the panel holding part 24 is located in the tray 3 and When it is not in the tray 3, the light receiving amount of the light receiving part 90 is likely to have a larger difference. In the above-described form, wirings other than the FPC 2 a may be drawn out from the liquid crystal panel 2 . For example, FFC (Flexible Flat Cable) may also be drawn out from the liquid crystal panel 2 . In addition, in the above-mentioned form, the panel holding part 24 may not be provided with the board|substrate adsorption|suction part 72. In the above-mentioned form, the liquid crystal panel 2 conveyed by the robot 9 may be the liquid crystal panel 2 before being connected to the FPC 2a. That is, the liquid crystal panel 2 accommodated in the tray 3 may be the liquid crystal panel 2 before being connected to the FPC 2a. In addition, in the above-mentioned form, the display panel conveyed by the robot 9 may be a display panel other than the liquid crystal panel 2 . For example, the display panel conveyed by the robot 9 may be an organic EL panel. In the above-mentioned form, the structure of the panel transfer robot of the present invention has been described by taking the robot 9 as a parallel link robot as an example, but the panel transfer robot to which the present invention is applied may be a two-axis orthogonal robot, or may be a Three-axis orthogonal robot. In addition, the panel transfer robot to which the present invention is applied may be a horizontal articulated robot.
