TWI757958B - 致動器及包含致動器的晶片 - Google Patents

致動器及包含致動器的晶片 Download PDF

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TWI757958B
TWI757958B TW109138920A TW109138920A TWI757958B TW I757958 B TWI757958 B TW I757958B TW 109138920 A TW109138920 A TW 109138920A TW 109138920 A TW109138920 A TW 109138920A TW I757958 B TWI757958 B TW I757958B
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electrode structure
substrate
cavity
fixed
linear actuator
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TW109138920A
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TW202118723A (zh
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許郁文
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大陸商上海茗富半導體有限公司
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    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/186—Particular post-treatment for the devices, e.g. annealing, impurity gettering, short-circuit elimination, recrystallisation
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    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
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Abstract

本發明提供一種直線致動器。直線致動器包括：具有一空腔的一基板；形成於該基板上的一第一固定電極結構；一彈性懸掛裝置；以及通過該彈性懸掛裝置連接到該基板的一可動電極結構，其中：該空腔具有一第一面積；該第一固定電極結構與該可動電極結構的至少其中之一在該基板上具有一第二投影面積；以及該第一面積與該第二投影面積互相重疊。直線致動器可以製造出一種出平面直線運動馬達，其具有大運動行程、衝擊力強、易於去除殘留的製程污染物、機電能量轉換效率的提高、以及可動梳狀結構的離軸運動解耦合。

Description

致動器及包含致動器的晶片 【相關申請案的交叉引用】
本申請案主張2019年11月7日申請的美國臨時專利申請案第62/931,926號的優先權，其整體藉由引用被併入本文。
本發明關於一種直線致動器，特別關於一種微機電系統(Microelectromechanical System，MEMS)直線致動器。
MEMS致動器具有許多優點，例如小尺寸、低成本、精確的運動控制及低功耗，這使MEMS致動器適用於緊密型電子裝置或系統的應用中。為了提高MEMS致動器的機械能量轉換效率，通常會使用非常窄的結構間距。使用非常窄的結構間距會導致製程殘留物難以去除。當承載物的重心未對準致動器的重心時，承載物會傾斜。承載物的傾斜引起承載物與致動器之間的接觸點處的應力集中的問題，這又將容易引起承載物從致動器脫離。由於來自承載物的作用力方向與 梳狀結構的預定方向不能很好地對準，這將導致梳狀結構傾斜並發生離軸運動。這種離軸運動會降低梳狀結構的運動效率，甚至導致移動的梳狀結構卡在固定的梳狀結構上。
本發明的單軸線性致動器克服了現有技術中的許多缺點，其可獨立地運作或作為組件中的元件運作。
因此，本發明提供一種直線致動器。直線致動器包括：一基板，具有一空腔；一第一固定電極結構，形成於該基板上；以及一可動電極結構，通過一彈性元件連接到該基板，其中：該第一固定電極結構具有一第一複數梳指；以及該可動電極結構具有一第二複數梳指，通過該第一複數梳指與該第二複數梳指，該第一固定電極結構與該可動電極結構形成一電容器，且該第一複數梳指與該第二複數梳指設置在該空腔的上方。
本發明另提出一種致動器。致動器包括：一基板，具有一空腔；一第一固定電極結構，固定在該基板上；一彈性懸掛裝置；以及一可動電極結構，通過該彈性懸掛裝置連接到該基板，其中：該空腔具有一第一面積；該第一固定電極結構與該可動電極結構的至少其中之一在該基板上具有一第二投影面積；以及該第一面積與該第二投影面積互相重疊。
本發明另提出一種具有致動器的晶片。
100:基板
110:電子元件
120:前表面
130:後表面
200:空腔
210:第一面積
260:水平投影面積
300:第一固定電極結構
320:第一複數梳指
350:第二投影面積
400:彈性元件
450:第一中心點
500:可動電極結構
510:龍骨
520:第二複數梳指
600:位置感測電容器
610:第二固定電極結構
650:水平投影面積
700:支點彈簧
801:第一錨
802:第二錨
803:第三錨
900:限制彈簧
1100:T柱
1200:支撐臂
5000:承載物
10000:直線致動器
20000:致動器晶圓
20100:保護材料
20500:第三空腔
30000:載體晶圓
本發明的上述目的及優點在參閱以下詳細說明及附隨圖式之後對那些所屬技術領域中具有通常知識者將變得更立即地顯而易見。
〔圖1〕為本發明的直線致動器的實施例的俯視示意圖。
〔圖2〕為圖1的直線致動器中沿A-A’方向的剖面示意圖。
〔圖3(A)〕為第一面積與第二投影面積的關係範例。
〔圖3(B)〕為第一面積與第二投影面積的另一關係範例。
〔圖3(C)〕為第二空腔的位置範例。
〔圖4(A)〕為承載物的重心在沒有T柱及支點彈簧下對準直線致動器的重心的範例。
〔圖4(B)〕為承載物的重心在沒有T柱及支點彈簧下未對準直線致動器的重心的範例。
〔圖4(C)〕為本發明含有T柱及支點彈簧的實施例。
〔圖5(A)及5(B)〕為支點彈簧的另外兩個實施例的俯視示意圖。
〔圖6(A)〕為排列在致動器晶圓上的晶片的示意圖。
〔圖6(B)〕為圖6(A)中沿B-B’方向的剖面示意圖。
〔圖6(C)〕為覆蓋在致動器晶圓上以在切割晶圓時固定可動結構的保護材料的示意圖。
以下在實施方式中詳細敘述本發明的詳細特徵 以及優點，其內容足以使任何熟習相關技術者了解本發明的技術內容並據以實施，且根據本說明書所揭露的內容、申請專利範圍及圖式，任何熟習相關技術者可輕易地理解本發明相關的目的及優點。以下的實施例為進一步詳細說明本發明的觀點，但非以任何觀點限制本發明的範圍。
請參閱圖1-2，其中圖1為本發明的致動器的實施例的俯視示意圖，也就是直線致動器10000，且直線致動器10000為一種單軸直線運動致動器。圖2為圖1的直線致動器中沿A-A’方向的剖面示意圖。直線致動器10000包括具有空腔200及電子元件110的基板100。基板100具有前表面120及後表面130，且空腔200通過前表面120及後表面130以z-方向延伸，如圖1所示。直線致動器10000還包括形成於基板100上的第一固定電極結構300，使第一固定電極結構300固定在基板100上。直線致動器10000還包括通過彈性元件400連接到該基板100的可動電極結構500，其可以是彈性懸掛裝置。第一固定電極結構300與可動電極結構500形成電容器。在圖1的實施例中，第一固定電極結構300與可動電極結構500皆是梳子結構。因此，第一固定電極結構300具有第一複數梳指320，且可動電極結構500具有第二複數梳指520。第一複數梳指320及第二複數梳指520中的每個梳指彼此平行。當沒有電壓施加在第一固定電極結構300與可動電極結構500之間，第一固定電極結構300的第一複數梳指320與可動電極結構500的第二複 數梳指520不會交叉。電容器是通過第一複數梳指320與第二複數梳指520而形成。第一複數梳指320與第二複數梳指520設置在空腔200上方，以確保製程時的殘留物會通過空腔200而完全移除。因此，空腔200的大小必須夠大以完全移除殘留物，側邊微大於10微米的方形是夠大的。從另一方面來看，如果從空腔200的後表面130向上看並可看到任何梳指，則空腔200夠大。在本發明中，空腔200的水平投影面積定義為第一面積210，而第一固定電極結構300與可動電極結構500至少其中之一在基板100上的水平投影面積定義為第二投影面積350。圖3A顯示第二投影面積350在基板上的範例，其中第二投影面積350是第一固定電極結構300與可動電極結構500的投影面積。第二投影面積可以是只有第一固定電極結構300或可動電極結構500的投影面積。第一面積210與第二投影面積350部分重疊。「部分重疊」指的是第一面積210與第二投影面積350以一定的百分比重疊，可以是第二投影面積350的至少1%，使空腔200有足夠的大小以完全移除殘留物，如圖3B所示，其中第二投影面積350是可動電極結構500的投影面積。在沒有空腔200的情況下，第一複數梳指320與第二複數梳指520必須稀疏的排列以移除殘留物。但是當第一複數梳指320與第二複數梳指520排列稀疏，機械能量轉換效率是低的。換句話說，施加在第一固定電極結構300與可動電極結構500之間的電壓必須是高的。因此，空腔200可移除殘留的製程汙染 物，並提高機械能量轉換的效率。
設置於基板100上的電子元件110指的是基板100上的所有運動控制電子元件及電路的總稱。直線致動器10000還包括由可動電極結構500與第二固定電極結構610在基板100上形成的至少一位置感測電容器600。至少一位置感測電容器600不是設置在基板100的空腔200上方，就是設置在基板100的第二空腔上方。若空腔200也可移除至少一位置感測電容器600的殘留的製程汙染物，則不需要第二空腔。舉例來說，圖1所示的實施例中，空腔200是夠大來移除兩個位置感測電容器600的殘留的製程汙染物，且沒有第二空腔。當需要時，第二空腔會設置在基板100中以特定地移除至少一位置感測電容器600的殘留的製程汙染物。例如，圖3C所示的實施例中，位置感測電容器600的第二固定電極結構610具有水平投影面積650，第二空腔具有水平投影面積260，且位置感測電容器600設置於基板的第二空腔的上方。至少一位置感測電容器600用於偵測可動電極結構500的位移。
圖1所示的實施例中，彈性元件400(或彈性懸掛裝置)稱為主彈簧。主彈簧具有第一端、第一中心點450與一第二端，且第一端與第二端固定在基板100上。第一端與第二端皆透過第一錨801固定在基板100上。可動電極結構500具有與第一中心點450連接的龍骨510。直線致動器10000還包括與第一中心點450連接的支點彈簧700，且T柱1100與支點彈簧 700連接。採用T柱1100是為了容易地將所支承的承載物保持在其上。在其他應用中，此單軸直線運動致動器是被設計為翻轉90度以驅動乘載物沿出平面方向運動。支點彈簧700的目的是解決當剪切力被施加在支點彈簧700與T柱1100之間的連接點時，承載物從T柱1100上脫離的問題。請見圖4A-4C，圖4A為承載物5000的重心在沒有T柱及支點彈簧下對準直線致動器的重心的範例，相比之下，圖4B為承載物5000的重心在沒有T柱及支點彈簧下未對準直線致動器的重心的範例。在圖4B中，應力會集中在圓圈區，也因此會產生扭力。圖4B為本發明含有支點彈簧700及T柱1100的實施例，可避免圖4B中引起的問題。支點彈簧700在x方向上具有低剛度，但在y方向及z方向上具有高剛度。也就是說，y方向的剛度ky遠大於x方向的剛度kx，即ky>>kx，且z方向的剛度kz亦遠大於x方向的剛度kx，即kz>>kx。y方向的高剛度對於避免y方向位移的減小是必要的。所屬技術領域人員可以將支點彈簧設計成多種形式以符合需求。圖5A及5B顯示除了圖1或圖4C所示的支點彈簧700外，支點彈簧的另外兩個實施例的俯視示意圖。對於沒有支點彈簧700的情況，施加到承載物的外部x方向的力可在承載物與T柱1100之間的連接面產生剪切力及力矩。大的剪切力及/或力矩會造成承載物從T柱1100的表面上脫離。對於有支點彈簧700的情況，施加到承載物的外部x方向的力會導致T柱1100的變形，以減小承載物與T柱1100之間的連接面產生剪切 力及力矩。在某些情況下，如果剪切力可以忽略，則可以省略支點彈簧700。
直線致動器10000還包括至少一對限制彈簧900，其中至少一對限制彈簧900中的每一限制彈簧具有第三端及第四端，第三端連接至龍骨510或第二複數梳指520的最外側梳指，且第四端藉由第二錨802固定在基板100上。在圖1所示的實施例中，有兩對限制彈簧900。通過模擬可以看出，當向T柱1100施加0.05N的y方向的力時，y方向的運動達到500微米，且主彈簧的變形仍未達到斷裂強度。換句話說，本發明可用於在出平面方向上提供大於500微米的大運動行程。當y方向與x方向的力皆為0.5N時，限制彈簧900有效的限制可動電極結構500的離軸運動。同時，支點彈簧700可有效的變形以防止承載物從T柱1100的表面上脫離。當承載物的質量為5毫克時，0.5N的力等於1,020g(g表示一個重力)。因此，本發明的直線致動器可以克服衝擊的穩定性問題。
直線致動器10000還包括支撐臂1200，第一固定電極結構300從支撐臂1200延伸出，其中支撐臂1200具有第五端及第六端，且第五端及第六端皆藉由第三錨803固定在基板100上。
致動器晶圓在此階段具有帶有可動結構的多個晶片。如何保護這些在晶片中的可動結構直到晶片因致動器晶圓被切割而分離是一個非常重要的問題。圖6A-6C顯示如何 在切割晶圓時保護直線致動器10000的可動結構的保護材料的示意圖。如圖6A所示，在晶圓切割程序前，基板中在T柱1100的位置有第三空腔20500。第三空腔20500會為T柱1100的運動行程而保留。如圖6B所示，致動器晶圓20000附著在載體晶圓30000上。如圖6C所示，如光阻劑或蠟的保護材料20100會塗覆在致動器晶圓20000上，以在切割晶圓時固定可動結構。在晶圓切割後，載體晶圓30000會從致動器晶圓20000上分離，且會移除保護材料20100以得到晶片，每一個晶片皆包括一個直線致動器10000。晶圓的分離及保護材料20100的移除皆可藉由施加化學試劑而輕易實現。
實施例
1.一種直線致動器，包括：一基板，具有一空腔；一第一固定電極結構，形成於該基板上；以及一可動電極結構，通過一彈性元件連接到該基板，其中：該第一固定電極結構具有一第一複數梳指；以及該可動電極結構具有一第二複數梳指，通過該第一複數梳指與該第二複數梳指，該第一固定電極結構與該可動電極結構形成一電容器，且該第一複數梳指與該第二複數梳指設置在該空腔的上方。
2.如實施例1所述的直線致動器，其中該基板具有一電子元件。
3.如實施例1或2所述的直線致動器，其中該基板具有一前表面與一後表面，且該空腔從該前表面延伸到該 後表面。
4.如實施例1-3任一實施例所述的直線致動器，更包括一第二固定電極結構，形成於該基板上，其中至少一位置感測電容器由該可動電極結構與該第二固定電極結構形成，且該至少一位置感測電容器設置在該空腔與該基板的一第二空腔其中之一的上方。
5.如實施例1-4任一實施例所述的直線致動器，其中該彈性元件是主彈簧。
6.如實施例1-5任一實施例所述的直線致動器，其中該主彈簧具有一第一端、一第一中心點與一第二端，且該第一端與該第二端固定在該基板上。
7.如實施例1-6任一實施例所述的直線致動器，其中該可動電極結構具有與該第一中心點連接的一龍骨。
8.如實施例1-7任一實施例所述的直線致動器，更包括與該第一中心點連接的一支點彈簧。
9.如實施例1-8任一實施例所述的直線致動器，其中該第一端與該第二端皆由一第一錨固定在該基板上。
10.如實施例1-9任一實施例所述的直線致動器，更包括至少一對限制彈簧，其中該至少一對限制彈簧中的每一限制彈簧具有一第三端及一第四端，該第三端連接至該龍骨及該第二複數梳指的一最外側梳指其中之一，且該第四端藉由一第二錨固定在該基板上。
11.如實施例1-10任一實施例所述的直線致動器，更包括一T柱，連接至該支點彈簧。
12.如實施例1-11任一實施例所述的直線致動器，更包括一支撐臂，連接至該第一固定電極結構，其中該支撐臂具有一第五端及一第六端，且該第五端及該第六端皆藉由一第三錨固定在該基板上。
13.一種致動器，包括：一基板，具有一空腔；一第一固定電極結構，固定在該基板上；一彈性懸掛裝置；以及一可動電極結構，通過該彈性懸掛裝置連接到該基板，其中：該空腔具有一第一面積；該第一固定電極結構與該可動電極結構的至少其中之一在該基板上具有一第二投影面積；以及該第一面積與該第二投影面積互相重疊。
14.如實施例13所述的致動器，其中該第一固定電極結構與該可動電極結構形成一電容器。
15.如實施例13或14所述的致動器，其中該基板具有一電子元件。
16.如實施例13-15任一實施例所述的致動器，其中該基板具有一前表面與一後表面，且該空腔從該前表面延伸到該後表面。
17.如實施例13-16任一實施例所述的致動器，更包括一第二固定電極結構，形成於該基板上，其中每一個該至少一位置感測電容器由該可動電極結構與該第二固定電 極結構形成於該基板上，且該至少一位置感測電容器設置在該空腔與該基板的一第二空腔其中之一的上方。
18.如實施例13-17任一實施例所述的致動器，其中該彈性懸掛裝置是一主彈簧，該主彈簧具有一第一端、一中心點與一第二端，且該第一端與該第二端固定在該基板上。
19.如實施例13-18任一實施例所述的致動器，更包括一支撐臂，連接至該第一固定電極結構，其中該支撐臂具有一第五端及一第六端，且該第五端及該第六端藉由一錨固定在基板上。
20.一種晶片，包括如實施例1-12任一實施例所述的直線致動器及如實施例13-19任一實施例所述的致動器。
本發明實屬難能的創新發明，深具產業價值，援依法提出申請。此外，本發明可以由所屬技術領域中具有通常知識者做任何修改，但不脫離如所附申請專利範圍所要保護的範圍。
200:空腔
300:第一固定電極結構
320:第一複數梳指
400:彈性元件
450:第一中心點
500:可動電極結構
510:龍骨
520:第二複數梳指
600:位置感測電容器
610:第二固定電極結構
700:支點彈簧
801:第一錨
802:第二錨
803:第三錨
900:限制彈簧
1100:T柱
1200:支撐臂
10000:直線致動器

Claims (10)

  1. 一種直線致動器，包括：
    一基板，具有一空腔；
    一第一固定電極結構，形成於該基板上；以及
    一可動電極結構，通過一彈性元件連接到該基板，其中：
    該第一固定電極結構具有一第一複數梳指；以及
    該可動電極結構具有一第二複數梳指，通過該第一複數梳指與該第二複數梳指，該第一固定電極結構與該可動電極結構形成一電容器，且該第一複數梳指與該第二複數梳指設置在該空腔的上方。
  2. 如請求項1所述的直線致動器，其中該基板具有一電子元件、一前表面與一後表面，該空腔從該前表面延伸到該後表面，且該彈性元件是一主彈簧。
  3. 如請求項1所述的直線致動器，更包括一第二固定電極結構，形成於該基板上，其中該可動電極結構與該第二固定電極結構形成至少一位置感測電容器，且該至少一位置感測電容器設置在該空腔與該基板的一第二空腔其中之一的上方。
  4. 如請求項2所述的直線致動器，其中該主彈簧具有一第一端、一第一中心點與一第二端，且該第一端與該第二端固定在該基板上。
  5. 如請求項4所述的直線致動器，更包括與該第一中心點連接的一支點彈簧，以及連接至該支點彈簧的一T柱，其中該可動電極結構具有與該第一中心點連接的一龍骨，且該第一端與該第二端皆由一第一錨固定在該基板上。
  6. 如請求項5所述的直線致動器，更包括至少一對限制彈簧及一支撐臂，其中該至少一對限制彈簧中的每一限制彈簧具有一第三端及一第四端，該第三端連接至該龍骨及該第二複數梳指的一最外側梳指其中之一，且該第四端藉由一第二錨固定在該基板上，以及該支撐臂連接至該第一固定電極結構，該支撐臂具有一第五端及一第六端，且該第五端及該第六端皆藉由一第三錨固定在該基板上。
  7. 一種致動器，包括：
    一基板，具有一空腔；
    一第一固定電極結構，固定在該基板上；
    一彈性懸掛裝置；以及
    一可動電極結構，通過該彈性懸掛裝置連接到該基板，其中：
    該空腔具有一第一面積；
    該第一固定電極結構與該可動電極結構的至少其中之一在該基板上具有一第二投影面積；以及
    該第一面積與該第二投影面積互相重疊。
  8. 如請求項7所述的致動器，其中該第一固定電極結構與該可動電極結構形成一電容器，該基板具有一電子元件、一前表面與一後表面，該空腔從該前表面延伸到該後表面，該彈性懸掛裝置是一主彈簧，該主彈簧具有一第一端、一中心點與一第二端，且該第一端與該第二端固定在該基板上。
  9. 如請求項7所述的致動器，更包括一第二固定電極結構及一支撐臂，其中該第二固定電極結構形成於該基板上，該支撐臂固定在該基板上且連接至該第一固定電極結構，該可動電極結構與該第二固定電極結構於該基板上形成至少一位置感測電容器，且該至少一位置感測電容器設置在該空腔與該基板的一第二空腔其中之一的上方。
  10. 一種晶片，包括如請求項1-6任一請求項所述的直線致動器或如請求項7-9任一請求項所述的致動器。
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