TWI754335B - Detection device - Google Patents

Abstract

This invention provides a detection device, wherein a substrate and a test head are sequentially stacked on a circuit board, and a transmission cable is arranged on the substrate and electrically connected with the circuit board and at least one probe of the test head so as to shorten the transmission path of a radio frequency signal. Consequently, it can effectively reduce decay of a radio frequency signal during an antenna detection operation to improve the accuracy of a test result.

Description

Detection device

The present invention relates to a detection device, especially a detection device used as a probe card.

With the rapid development of wireless communication and the ever-increasing flow of network resources, the required wireless transmission bandwidth is also increasing. Therefore, the antenna test operation performed by the packaging and testing end is extremely important.

As shown in FIG. 1 , a conventional probe card 1 for testing antenna signals includes a circuit board 10 and a probe set 12 electrically connected to the circuit board 10 by an external cable 13 . During the antenna test operation, the probe set 12 is connected to an antenna test object, so that the antenna test object transmits its radio frequency (RF) signal to the circuit board 10, so that the circuit board 10 transmits the radio frequency signal to the circuit board 10. on the test machine.

However, in the antenna test operation of the conventional probe card 1, a redundant external connection cable 13 needs to be connected, so that the transmission path of the radio frequency (RF) signal to the circuit board 10 is too long, which is easy to cause signal attenuation, resulting in Test results are inaccurate.

Therefore, how to overcome the above-mentioned deficiencies in the prior art has become an urgent problem to be solved.

In view of the above-mentioned deficiencies in the prior art, the present invention provides a detection device, which includes: a carrier, which has opposite first and second sides and is provided with a plurality of conductive wirings; a substrate, which is arranged on the on the first side of the carrier; the acting part is arranged on the substrate and has a plurality of conductive terminals for bonding a target test object; and a transmission line is arranged on the substrate and electrically connects the conductive wiring and a part of the plurality of conductive terminals.

In the aforementioned detection device, the carrier is a circuit board, and the conductive wiring is a circuit wiring.

In the aforementioned detection device, the second side of the carrier is configured with at least one external port that is electrically connected to the conductive wiring.

In the aforementioned detection device, the substrate has a plurality of circuit layers electrically connecting the conductive wiring and another part of the plurality of conductive terminals.

In the aforementioned detection device, the acting member is a test head.

In the aforementioned detection device, the conductive terminal is a probe structure.

In the aforementioned detection device, the acting element is stacked on the first side of the carrier by a support element, so as to form a accommodating space between the acting element and the first side of the carrier, so that the substrate is located on the first side of the carrier. in the accommodation space.

In the aforementioned detection device, the transmission line is detachably disposed on the outer surface of the substrate. For example, the removable method is a sticking method.

In the aforementioned detection device, the conductive wiring is connected to the first side and the second side, so that the signal of the target test object is transmitted through the conductive terminal, the transmission line and the conductive wiring in sequence.

As can be seen from the above, in the detection device of the present invention, the transmission line is mainly disposed on the substrate to shorten the signal transmission path. Therefore, compared with the prior art, the detection device of the present invention can effectively reduce the radio frequency during the antenna detection operation. Signal attenuation to improve the accuracy of test results.

1: Probe card

10: circuit board

12: Probe Set

13: External cable

2: Detection device

20: Carrier

20a: First side

20b: Second side

200,200': Conductive wiring

201: External port

201’: transfer port

21: Substrate

210: circuit layer

211: Conductive bumps

22: Action piece

220, 221: Conductive terminals

23: Transmission line

24: Supports

9: Target test object

S: accommodating space

FIG. 1 is a schematic diagram of a conventional probe card.

FIG. 2 is a schematic cross-sectional view of the detection device of the present invention.

The following specific embodiments are used to illustrate the implementation of the present invention, and those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification.

It should be noted that the structures, proportions, sizes, etc. shown in the drawings in this specification are only used to cooperate with the contents disclosed in the specification for the understanding and reading of those who are familiar with the art, and are not intended to limit the implementation of the present invention. Therefore, it has no technical significance, and any modification of the structure, change of the proportional relationship or adjustment of the size should still fall within the scope of the The technical content disclosed by the invention can be covered within the scope. At the same time, the terms such as "above" and "a" quoted in this specification are only for the convenience of description, and are not used to limit the scope of the present invention. Substantially changed technical content should also be regarded as the scope of the present invention.

FIG. 2 is a schematic cross-sectional view of the detection device of the present invention. In this embodiment, the detection device 2 is a probe card.

As shown in FIG. 2 , the detection device 2 includes: a carrier 20 , a substrate 21 , an action part 22 and at least one transmission line 23 .

The carrier 20 has an opposite first side 20a and a second side 20b, and the carrier 20 is provided with at least one conductive wiring 200, 200' connecting the first side 20a and the second side 20b.

In the present embodiment, the carrier 20 is a circuit board, for example, the carrier 20 is substantially disc-shaped.

Furthermore, the carrier 20 is further configured with at least one external port 201 that is electrically connected to the conductive wiring 200, such as a connector, which is disposed on the second side 20b of the carrier 20 to be electrically connected as in the testing machine. Electronic device (figure omitted).

The substrate 21 is disposed on the first side 20 a of the carrier 20 and is electrically connected to the carrier 20 .

In this embodiment, the substrate 21 is a circuit board, such as a circuit board structure with a core layer or a coreless circuit board structure, which includes a dielectric material and at least one circuit combined with the dielectric material. Layer 210. It should be understood that the substrate 21 can also be in the form of other circuit boards, such as a lead frame and a redistribution line (RDL), which is not limited to the above.

Furthermore, the substrate 21 is bonded to the conductive wiring 200' of the carrier 20 by a plurality of conductive bumps 211 such as solder material, so that the substrate 21 is electrically connected to the carrier 20.

The acting member 22 is erected on the first side 20a of the carrier member 20 , and the acting member 22 has a plurality of conductive terminals 220 and 221 electrically connected to the circuit layer 210 .

In this embodiment, the acting member 22 is a block of non-metallic material such as a dielectric material to serve as a test head, and the conductive terminals 220 and 221 are probe structures such as pogo pins, plugs, etc. ), a double-ended probe or other types, etc., which can move up and down elastically relative to the action member 22 . For example, the conductive terminals 220 and 221 are elastically movably penetrated through the acting member 22 , so that one end of the conductive terminals 220 and 221 contacts the electrical contact pad of the circuit layer 210 of the substrate 21 , and the other end contacts a target test The contact point of object 9. Specifically, the target test object 9 is an electronic package including an antenna structure, and its electronic components may have millimeter wave (mmWave) function, but the aspect of the target test object 9 is not particularly limited.

Furthermore, the acting member 22 is stacked on the first side 20a of the carrier 20 by the support member 24 to form an accommodating space S between the acting member 22 and the first side 20a of the carrier 20 . , so that the substrate 21 is located in the accommodating space S. For example, the support 24 can be a screw, a threaded rod, or can be used to support The frame body of the piece 22 is used to screw the acting piece 22 and the bearing piece 20 so that the acting piece 22 is fixed on the bearing piece 20 .

The transmission line 23 is disposed on the substrate 21 and electrically connects the conductive wiring 200 (or the external port 201 ) and the conductive terminal 221 .

In this embodiment, the transmission line 23 is disposed on the outer surface of the substrate 21 in a detachable manner, such as by sticking, inserting, snare or other fixing methods. In other embodiments, the transmission line 23 may also be a circuit layer fabricated by a substrate process. It should be understood that there are many kinds of detachable and assembling methods, and there is no special limitation.

When using the detection device 2, the conductive terminals 220, 221 are connected to the contacts of the target test object 9 to complete an effective electrical connection. Then, during the antenna detection operation, the antenna structure of the target test object 9 transmits a radio frequency (RF) signal to the external port 201 through the conductive terminal 221, the transmission line 23 and the conductive wiring 200, and then through the external port The port 201 transmits the radio frequency (RF) signal to an electronic device such as a tester (not shown).

On the other hand, when other functional testing operations are performed, the functional electrode pads of the target test object 9 will transmit functional signals to the carrier via the conductive terminals 220 , the circuit layer 210 (conductive bumps 211 ) and the conductive wirings 200 ′ The transfer port 201' of 20 transmits the function signal to an electronic device such as a testing machine (not shown) through the transfer port 201'.

Therefore, the detection device 2 of the present invention is mainly configured on the substrate 21 through the transmission line 23 to shorten the transmission path of the RF signal. Therefore, compared with the prior art, the detection device 2 of the present invention is used in the antenna detection operation. It can effectively reduce the attenuation of the RF signal to improve the accuracy of the test results.

The above embodiments are used to illustrate the principles and effects of the present invention, but not to limit the present invention. Any person skilled in the art can make modifications to the above embodiments without departing from the spirit and scope of the present invention. Therefore, the scope of protection of the right of the present invention should be listed in the scope of the patent application described later.

2: Detection device

20: Carrier

20a: First side

20b: Second side

200,200': Conductive wiring

201: External port

201’: transfer port

21: Substrate

210: circuit layer

211: Conductive bumps

22: Action piece

220, 221: Conductive terminals

23: Transmission line

24: Supports

9: Target test object

S: accommodating space

Claims (10)

A detection device comprises: a carrier, which has opposite first and second sides and is provided with a plurality of conductive wirings; a substrate, which is arranged on the first side of the carrier; and an acting element, which is arranged on the substrate There are a plurality of conductive terminals on the upper part to connect a target test object; and a transmission line, which is fixed on the outer surface of the substrate and electrically connects the conductive wiring and a part of the plurality of conductive terminals. The detection device according to claim 1, wherein the carrier is a circuit board, and the conductive wiring is a circuit wiring. The detection device of claim 1, wherein the second side of the carrier is configured with at least one external port electrically connected to the conductive wiring. The detection device of claim 1, wherein the substrate has a plurality of circuit layers electrically connecting the conductive wiring and another part of the plurality of conductive terminals. The detection device according to claim 1, wherein the acting member is a test head. The detection device according to claim 1, wherein the conductive terminal is a probe structure. The detection device according to claim 1, wherein the acting member is stacked on the first side of the carrier by a support member, so as to form an accommodating space between the acting member and the first side of the carrier , so that the substrate is located in the accommodating space. The detection device according to claim 1, wherein the transmission line is detachably disposed on the outer surface of the substrate. The detection device according to claim 8, wherein the detachable method is a sticking method. The detection device of claim 1, wherein the conductive wiring is connected to the first side and the second side, so that the signal of the target test object is transmitted through the conductive terminal, the transmission line and the conductive wiring in sequence.

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