TWI736526B - 電致變色堆疊及系統及製備其之方法 - Google Patents

電致變色堆疊及系統及製備其之方法 Download PDF

Info

Publication number
TWI736526B
TWI736526B TW104139219A TW104139219A TWI736526B TW I736526 B TWI736526 B TW I736526B TW 104139219 A TW104139219 A TW 104139219A TW 104139219 A TW104139219 A TW 104139219A TW I736526 B TWI736526 B TW I736526B
Authority
TW
Taiwan
Prior art keywords
layer
electrochromic
nickel
oxide
anode
Prior art date
Application number
TW104139219A
Other languages
English (en)
Chinese (zh)
Other versions
TW201621438A (zh
Inventor
丹恩 吉拉斯皮耶
史瑞達Ｋ 凱拉珊
羅伯特Ｔ 羅茲畢基
Original Assignee
美商唯景公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 美商唯景公司 filed Critical 美商唯景公司
Publication of TW201621438A publication Critical patent/TW201621438A/zh
Application granted granted Critical
Publication of TWI736526B publication Critical patent/TWI736526B/zh

Links

Images

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/15—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on an electrochromic effect
    • G02F1/1514—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on an electrochromic effect characterised by the electrochromic material, e.g. by the electrodeposited material
    • G02F1/1523—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on an electrochromic effect characterised by the electrochromic material, e.g. by the electrodeposited material comprising inorganic material
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/15—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on an electrochromic effect
    • G02F1/153—Constructional details
    • G02F1/155—Electrodes
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/15—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on an electrochromic effect
    • G02F1/1514—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on an electrochromic effect characterised by the electrochromic material, e.g. by the electrodeposited material
    • G02F1/1523—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on an electrochromic effect characterised by the electrochromic material, e.g. by the electrodeposited material comprising inorganic material
    • G02F1/1524—Transition metal compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/10—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating making use of vibrations, e.g. ultrasonic welding
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
    • C03C17/3417—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials all coatings being oxide coatings
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K9/00—Tenebrescent materials, i.e. materials for which the range of wavelengths for energy absorption is changed as a result of excitation by some form of energy
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C10/00—Solid state diffusion of only metal elements or silicon into metallic material surfaces
    • C23C10/28—Solid state diffusion of only metal elements or silicon into metallic material surfaces using solids, e.g. powders, pastes
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/083—Oxides of refractory metals or yttrium
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/085—Oxides of iron group metals
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/18—Metallic material, boron or silicon on other inorganic substrates
    • C23C14/185—Metallic material, boron or silicon on other inorganic substrates by cathodic sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C23C14/5806—Thermal treatment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C23C14/5846—Reactive treatment
    • C23C14/5853—Oxidation
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1343—Electrodes
    • G02F1/13439—Electrodes characterised by their electrical, optical, physical properties; materials therefor; method of making
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/15—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on an electrochromic effect
    • G02F1/1514—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on an electrochromic effect characterised by the electrochromic material, e.g. by the electrodeposited material
    • G02F1/1523—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on an electrochromic effect characterised by the electrochromic material, e.g. by the electrodeposited material comprising inorganic material
    • G02F1/1525—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on an electrochromic effect characterised by the electrochromic material, e.g. by the electrodeposited material comprising inorganic material characterised by a particular ion transporting layer, e.g. electrolyte
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/15—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on an electrochromic effect
    • G02F1/153—Constructional details
    • G02F1/1533—Constructional details structural features not otherwise provided for
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/90—Other aspects of coatings
    • C03C2217/94—Transparent conductive oxide layers [TCO] being part of a multilayer coating
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/15—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on an electrochromic effect
    • G02F2001/1502—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on an electrochromic effect complementary cell
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/15—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on an electrochromic effect
    • G02F1/153—Constructional details
    • G02F1/155—Electrodes
    • G02F2001/1555—Counter electrode
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
    • G02F2201/44—Arrangements combining different electro-active layers, e.g. electrochromic, liquid crystal or electroluminescent layers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Inorganic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Thermal Sciences (AREA)
  • Mathematical Physics (AREA)
  • Electrochemistry (AREA)
  • Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
TW104139219A 2014-11-26 2015-11-25 電致變色堆疊及系統及製備其之方法 TWI736526B (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US201462085096P 2014-11-26 2014-11-26
US62/085,096 2014-11-26
US201562192443P 2015-07-14 2015-07-14
US62/192,443 2015-07-14

Publications (2)

Publication Number Publication Date
TW201621438A TW201621438A (zh) 2016-06-16
TWI736526B true TWI736526B (zh) 2021-08-21

Family

ID=56074922

Family Applications (3)

Application Number Title Priority Date Filing Date
TW104139219A TWI736526B (zh) 2014-11-26 2015-11-25 電致變色堆疊及系統及製備其之方法
TW111145963A TW202314350A (zh) 2014-11-26 2015-11-25 電致變色堆疊及系統及製備其之方法
TW110125561A TWI787905B (zh) 2014-11-26 2015-11-25 電致變色堆疊及系統及製備其之方法

Family Applications After (2)

Application Number Title Priority Date Filing Date
TW111145963A TW202314350A (zh) 2014-11-26 2015-11-25 電致變色堆疊及系統及製備其之方法
TW110125561A TWI787905B (zh) 2014-11-26 2015-11-25 電致變色堆疊及系統及製備其之方法

Country Status (10)

Country Link
EP (3) EP4130864B1 (enExample)
JP (2) JP7067833B2 (enExample)
KR (3) KR102479688B1 (enExample)
CN (2) CN107111199B (enExample)
AU (2) AU2015353823B2 (enExample)
CA (1) CA2968832A1 (enExample)
HK (1) HK1244544A1 (enExample)
RU (1) RU2700361C2 (enExample)
TW (3) TWI736526B (enExample)
WO (1) WO2016085823A1 (enExample)

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10156762B2 (en) 2009-03-31 2018-12-18 View, Inc. Counter electrode for electrochromic devices
US8582193B2 (en) 2010-04-30 2013-11-12 View, Inc. Electrochromic devices
US10261381B2 (en) 2009-03-31 2019-04-16 View, Inc. Fabrication of low defectivity electrochromic devices
US12043890B2 (en) 2009-03-31 2024-07-23 View, Inc. Electrochromic devices
US9261751B2 (en) 2010-04-30 2016-02-16 View, Inc. Electrochromic devices
US10852613B2 (en) 2009-03-31 2020-12-01 View, Inc. Counter electrode material for electrochromic devices
US11187954B2 (en) * 2009-03-31 2021-11-30 View, Inc. Electrochromic cathode materials
US10591795B2 (en) 2009-03-31 2020-03-17 View, Inc. Counter electrode for electrochromic devices
US8432603B2 (en) 2009-03-31 2013-04-30 View, Inc. Electrochromic devices
US12353109B2 (en) 2009-12-22 2025-07-08 View Operating Corporation Electrochromic cathode materials
US9759975B2 (en) 2010-04-30 2017-09-12 View, Inc. Electrochromic devices
US11891327B2 (en) 2014-05-02 2024-02-06 View, Inc. Fabrication of low defectivity electrochromic devices
US10345671B2 (en) 2014-09-05 2019-07-09 View, Inc. Counter electrode for electrochromic devices
EP4220291A3 (en) 2014-11-26 2023-10-04 View, Inc. Counter electrode for electrochromic devices
KR102202928B1 (ko) * 2017-04-24 2021-01-14 주식회사 엘지화학 투광성 필름 및 이를 포함하는 전기변색소자
KR20180119120A (ko) * 2017-04-24 2018-11-01 주식회사 엘지화학 도전성 적층체 및 이를 포함하는 전기변색소자
KR102141631B1 (ko) * 2017-05-31 2020-08-05 주식회사 엘지화학 투과도 가변 필름 및 투과도 가변 필름의 제조방법
KR102035907B1 (ko) * 2017-12-15 2019-10-23 주식회사 엘지화학 장식 부재 및 이의 제조방법
KR101999352B1 (ko) * 2017-12-15 2019-07-11 성문전자주식회사 투과율이 가변되는 스마트 윈도우용 변색필름
KR101986348B1 (ko) * 2017-12-15 2019-06-05 성문전자주식회사 이색이상의 다변색이 가능한 스마트 윈도우용 변색필름
EP3823930A4 (en) * 2018-07-18 2022-04-20 Comberry, LLC ELECTROCHROMIC MATERIAL AND METHOD OF MANUFACTURE THEREOF
JP7256871B2 (ja) * 2018-09-26 2023-04-12 セイジ・エレクトロクロミクス，インコーポレイテッド 電気活性デバイス及び方法
CN110208997A (zh) * 2019-05-31 2019-09-06 广东旗滨节能玻璃有限公司 一种智能变色玻璃及其制备方法和应用
RU2758201C2 (ru) * 2019-11-28 2021-10-26 Общество с ограниченной ответственностью "СмартЭлектроГласс" Противоэлектрод электрохромного устройства и способ его изготовления
FR3105459B1 (fr) * 2019-12-20 2023-06-23 Saint Gobain Trempe thermique d’une electrode travail
US11703737B2 (en) 2020-02-12 2023-07-18 Sage Electrochromics, Inc. Forming electrochromic stacks using at most one metallic lithium deposition station
US20210271145A1 (en) * 2020-02-25 2021-09-02 Sage Electrochromics, Inc. Approaches to modifying a color of an electrochromic stack in a tinted state
CN111747660A (zh) * 2020-07-09 2020-10-09 西安邮电大学 纳米孔阵列结构的电致变色复合薄膜及其制备方法、应用
CN116783145A (zh) 2021-03-17 2023-09-19 株式会社东芝 氧化钨粉末及使用了其的电致变色元件
CN114280111B (zh) * 2021-12-24 2023-11-24 复旦大学 铈掺杂氧化钨复合材料和硫化氢传感器、以及制备方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102388340A (zh) * 2009-03-31 2012-03-21 索拉迪格姆公司 电致变色装置
US20130016417A1 (en) * 2009-08-27 2013-01-17 Guardian Industries Corp. Electrochromic devices, assemblies incorporating electrochromic devices, and/or methods of making the same
CN102934009A (zh) * 2010-04-30 2013-02-13 索拉迪格姆公司 电致变色器件
KR20140068026A (ko) * 2011-07-21 2014-06-05 세이지 일렉트로크로믹스, 인크. 리튬 및 금속 도펀트로 동시에 도핑된 전기변색성 니켈 산화물
US20140205748A1 (en) * 2013-01-21 2014-07-24 Kinestral Technologies, Inc. Process for preparing a multi-layer electrochromic structure
TW201435464A (zh) * 2013-02-08 2014-09-16 唯景公司 在電致變色裝置中之缺陷緩和層

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030031928A1 (en) * 1999-05-20 2003-02-13 Saint-Gobain Vitrage Electrochemical device
US6859297B2 (en) * 2001-08-07 2005-02-22 Midwest Research Institute Electrochromic counter electrode
ATE384337T1 (de) * 2001-08-20 2008-02-15 Showa Denko Kk Mehrfarben-lichtemissionslampe und lichtquelle
US7372610B2 (en) * 2005-02-23 2008-05-13 Sage Electrochromics, Inc. Electrochromic devices and methods
US7593154B2 (en) * 2005-10-11 2009-09-22 Sage Electrochromics, Inc. Electrochromic devices having improved ion conducting layers
US8416486B2 (en) * 2008-03-17 2013-04-09 Saint-Gobain Performance Plastics Chaineux Light weight electrochromic mirror stack
US8842357B2 (en) * 2008-12-31 2014-09-23 View, Inc. Electrochromic device and method for making electrochromic device
US8300298B2 (en) 2010-04-30 2012-10-30 Soladigm, Inc. Electrochromic devices
US8764950B2 (en) 2010-04-30 2014-07-01 View, Inc. Electrochromic devices
US8582193B2 (en) * 2010-04-30 2013-11-12 View, Inc. Electrochromic devices
KR101097856B1 (ko) * 2010-03-04 2011-12-23 서울대학교산학협력단 전기 변색 소자 제조방법
WO2011137104A1 (en) * 2010-04-30 2011-11-03 Soladigm, Inc. Electrochromic devices
CN102540612B (zh) * 2010-12-31 2014-06-11 京东方科技集团股份有限公司 一种电致变色器件的制作方法和电致变色器件
KR101613341B1 (ko) * 2011-02-09 2016-04-18 키네스트랄 테크놀로지스, 인크. 공간적 협조-전환 기능의 전기변색 다층 소자
US10126622B2 (en) * 2011-09-30 2018-11-13 View, Inc. Optical device fabrication
ITRM20110536A1 (it) * 2011-10-10 2013-04-11 Univ Calabria Dispositivo elettrocromico.
EP2780762B1 (en) * 2011-11-15 2017-06-28 Ashwin-Ushas Corporation, Inc. Complimentary polymer electrochromic device
WO2014025900A1 (en) * 2012-08-08 2014-02-13 Kinestral Technologies, Inc. Electrochromic multi-layer devices with composite electrically conductive layers

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102388340A (zh) * 2009-03-31 2012-03-21 索拉迪格姆公司 电致变色装置
US20130016417A1 (en) * 2009-08-27 2013-01-17 Guardian Industries Corp. Electrochromic devices, assemblies incorporating electrochromic devices, and/or methods of making the same
CN102934009A (zh) * 2010-04-30 2013-02-13 索拉迪格姆公司 电致变色器件
KR20140068026A (ko) * 2011-07-21 2014-06-05 세이지 일렉트로크로믹스, 인크. 리튬 및 금속 도펀트로 동시에 도핑된 전기변색성 니켈 산화물
US20140205748A1 (en) * 2013-01-21 2014-07-24 Kinestral Technologies, Inc. Process for preparing a multi-layer electrochromic structure
TW201435464A (zh) * 2013-02-08 2014-09-16 唯景公司 在電致變色裝置中之缺陷緩和層

Also Published As

Publication number Publication date
HK1244544A1 (zh) 2018-08-10
EP3224671B1 (en) 2024-02-28
CA2968832A1 (en) 2016-06-02
AU2021202495A1 (en) 2021-05-20
TW201621438A (zh) 2016-06-16
TW202314350A (zh) 2023-04-01
EP3224671A1 (en) 2017-10-04
EP4130864B1 (en) 2024-10-09
WO2016085823A1 (en) 2016-06-02
CN114488641A (zh) 2022-05-13
KR20170086631A (ko) 2017-07-26
AU2021202495B2 (en) 2023-02-09
RU2700361C2 (ru) 2019-09-16
CN107111199B (zh) 2022-03-04
RU2017120233A (ru) 2018-12-26
KR20230003636A (ko) 2023-01-06
RU2017120233A3 (enExample) 2019-04-11
AU2015353823A1 (en) 2017-06-08
KR20250010147A (ko) 2025-01-20
JP2021099492A (ja) 2021-07-01
JP7384421B2 (ja) 2023-11-21
EP4130864A1 (en) 2023-02-08
JP2017538965A (ja) 2017-12-28
TW202206924A (zh) 2022-02-16
KR102755062B1 (ko) 2025-01-14
KR102479688B1 (ko) 2022-12-20
EP4462179A3 (en) 2025-01-29
TWI787905B (zh) 2022-12-21
EP4462179A2 (en) 2024-11-13
CN107111199A (zh) 2017-08-29
JP7067833B2 (ja) 2022-05-16
AU2015353823B2 (en) 2021-02-25
EP3224671A4 (en) 2018-06-20

Similar Documents

Publication Publication Date Title
TWI736526B (zh) 電致變色堆疊及系統及製備其之方法
US12443085B2 (en) Counter electrode for electrochromic devices
US11960188B2 (en) Counter electrode for electrochromic devices
TW202305479A (zh) 電致變色裝置及製造其之方法
HK40118601A (en) Integrated deposition system for forming electrochromic devices