TWI736133B - 氣體感測器 - Google Patents
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- TWI736133B TWI736133B TW109104649A TW109104649A TWI736133B TW I736133 B TWI736133 B TW I736133B TW 109104649 A TW109104649 A TW 109104649A TW 109104649 A TW109104649 A TW 109104649A TW I736133 B TWI736133 B TW I736133B
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- -1 poly(vinyl phenol) Polymers 0.000 claims description 23
- 239000011810 insulating material Substances 0.000 claims description 22
- 230000000149 penetrating effect Effects 0.000 claims description 7
- 229920002451 polyvinyl alcohol Polymers 0.000 claims description 7
- 229920002125 Sokalan® Polymers 0.000 claims description 6
- 125000002843 carboxylic acid group Chemical group 0.000 claims description 6
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 6
- 239000002202 Polyethylene glycol Substances 0.000 claims description 5
- 229920001223 polyethylene glycol Polymers 0.000 claims description 5
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 claims description 4
- 239000004584 polyacrylic acid Substances 0.000 claims description 4
- 125000003277 amino group Chemical group 0.000 claims description 3
- 239000012777 electrically insulating material Substances 0.000 claims description 3
- 239000012774 insulation material Substances 0.000 claims 1
- 239000000463 material Substances 0.000 abstract description 8
- 239000007789 gas Substances 0.000 description 64
- MWUXSHHQAYIFBG-UHFFFAOYSA-N Nitric oxide Chemical compound O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 description 18
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 14
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 11
- 229910002091 carbon monoxide Inorganic materials 0.000 description 11
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 10
- 229910021529 ammonia Inorganic materials 0.000 description 5
- RWSOTUBLDIXVET-UHFFFAOYSA-N Dihydrogen sulfide Chemical compound S RWSOTUBLDIXVET-UHFFFAOYSA-N 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 4
- PQXKHYXIUOZZFA-UHFFFAOYSA-M lithium fluoride Chemical compound [Li+].[F-] PQXKHYXIUOZZFA-UHFFFAOYSA-M 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 150000002736 metal compounds Chemical class 0.000 description 4
- 239000011368 organic material Substances 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 3
- 239000011540 sensing material Substances 0.000 description 3
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 2
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- 229920000877 Melamine resin Polymers 0.000 description 2
- 239000004640 Melamine resin Substances 0.000 description 2
- 229920002873 Polyethylenimine Polymers 0.000 description 2
- 239000004372 Polyvinyl alcohol Substances 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 125000005605 benzo group Chemical group 0.000 description 2
- 229910052791 calcium Inorganic materials 0.000 description 2
- 239000011575 calcium Substances 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- LVTYICIALWPMFW-UHFFFAOYSA-N diisopropanolamine Chemical compound CC(O)CNCC(C)O LVTYICIALWPMFW-UHFFFAOYSA-N 0.000 description 2
- 229940043276 diisopropanolamine Drugs 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 2
- 229910000476 molybdenum oxide Inorganic materials 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- PQQKPALAQIIWST-UHFFFAOYSA-N oxomolybdenum Chemical compound [Mo]=O PQQKPALAQIIWST-UHFFFAOYSA-N 0.000 description 2
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 2
- 229920000172 poly(styrenesulfonic acid) Polymers 0.000 description 2
- 239000004926 polymethyl methacrylate Substances 0.000 description 2
- 229940005642 polystyrene sulfonic acid Drugs 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 239000011787 zinc oxide Substances 0.000 description 2
- JQRBBVRBGGXTLZ-UHFFFAOYSA-N 2-methoxyethanol Chemical compound COCCO.COCCO JQRBBVRBGGXTLZ-UHFFFAOYSA-N 0.000 description 1
- MGWGWNFMUOTEHG-UHFFFAOYSA-N 4-(3,5-dimethylphenyl)-1,3-thiazol-2-amine Chemical compound CC1=CC(C)=CC(C=2N=C(N)SC=2)=C1 MGWGWNFMUOTEHG-UHFFFAOYSA-N 0.000 description 1
- BVKZGUZCCUSVTD-UHFFFAOYSA-M Bicarbonate Chemical compound OC([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-M 0.000 description 1
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 description 1
- YTPLMLYBLZKORZ-UHFFFAOYSA-N Divinylene sulfide Natural products C=1C=CSC=1 YTPLMLYBLZKORZ-UHFFFAOYSA-N 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 229920000144 PEDOT:PSS Polymers 0.000 description 1
- 229920002845 Poly(methacrylic acid) Polymers 0.000 description 1
- 229920001665 Poly-4-vinylphenol Polymers 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 description 1
- 150000001299 aldehydes Chemical class 0.000 description 1
- 150000001412 amines Chemical class 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 229910000037 hydrogen sulfide Inorganic materials 0.000 description 1
- QAOWNCQODCNURD-UHFFFAOYSA-M hydrogensulfate Chemical compound OS([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-M 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002070 nanowire Substances 0.000 description 1
- JCXJVPUVTGWSNB-UHFFFAOYSA-N nitrogen dioxide Inorganic materials O=[N]=O JCXJVPUVTGWSNB-UHFFFAOYSA-N 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 229930192474 thiophene Natural products 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
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- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/041—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body
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-
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- G01—MEASURING; TESTING
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Abstract
一種氣體感測器適用於在一具有濕度的環境下感測待測氣體,且包含一個電極單元及一個感測單元。該電極單元包括一層第一電極層及一層與該第一電極層相間隔設置的第二電極層。該感測單元包括一層連接該第一電極層及該第二電極層且用來與該待測氣體接觸的電絕緣感測層。該電絕緣感測層包括吸濕電絕緣材料。
Description
本發明是有關於一種感測器,特別是指一種氣體感測器。
台灣專利公告第615611號專利揭示一種氣體偵測器,且該氣體偵測器包含一個用於電連接該電性檢測器的電極單元及一個感測單元。該電極單元包括一層第一電極層及一層與該第一電極層相間隔設置的第二電極層。該第二電極層包括兩個相對的電極表面,以及形成有複數個貫穿該等電極表面的貫孔。該感測單元包括一層連接該第一電極層及該第二電極層且用來與待測氣體作用的感測層。該感測層包括感測材料,且該感測材料例如9,9-二辛基芴-苯并噻二唑共聚物、聚{4,8-二(5-(2-乙基己基)噻吩-2-基)苯并[1,2-b;4,5-b’]二噻吩-2,6-二基-4-(2-乙基己醯基)-噻吩并[3,4-b]噻吩-2,6-二基},或聚{4,8-二(5-(2-乙基己基)噻吩-2-基)苯并[1,2-b;4,5-b’]二噻吩-2,6-二基-4-(2-乙基己氧基羰基)-3-氟基-噻吩并[3,4-b]噻吩-2,6-二基}等。
該氣體偵測器雖能夠偵測例如氨氣(NH
3)等的胺類氣體、醛類氣體、酮類氣體、一氧化氮(NO)、乙醇、二氧化氮、二氧化碳、臭氧,或硫化物氣體等氣體,但該感測材料為半導體材料,因此,該氣體偵測器的成本較高。
因此,本發明的目的,即在提供一種成本低的氣體感測器。
於是,本發明氣體感測器適用於在一具有濕度的環境下感測待測氣體。該氣體感測器包含一個電極單元及一個感測單元。該電極單元包括一層第一電極層及一層與該第一電極層相間隔設置的第二電極層。該感測單元包括一層連接該第一電極層及該第二電極層且用來與該待測氣體接觸的電絕緣感測層。該電絕緣感測層包括吸濕電絕緣材料。
本發明的功效在於:透過該電絕緣感測層的設計,該氣體感測器能夠在具有濕度的環境下感測氨氣(NH
3)、丙酮、一氧化氮(NO)、一氧化碳(CO),或硫化氫(H
2S)等待測氣體。
在本發明被詳細描述之前,應當注意在以下的說明內容中,類似的元件是以相同的編號來表示。本發明將就以下實施例來作進一步說明,但應瞭解的是,該等實施例僅為例示說明之用,而不應被解釋為本發明實施之限制。
參閱圖1,本發明氣體感測器的一第一實施例用來與一個電性檢測器(圖未示)電連接。該電性檢測器用來檢測當該氣體感測器與待測氣體接觸時,該氣體感測器產生的電性變化。該待測氣體例如氨氣(NH
3)、丙酮、一氧化氮(NO)、一氧化碳(CO),或硫化氫(H
2S)等。進一步地,為提高偵測的靈敏度,該待測氣體的選擇是在該吸濕電絕緣材料吸收環境中的水氣的條件下,接觸該電絕緣感測層時能夠與該吸濕電絕緣材料所吸收的水氣作用而解離產生導電物質的待測氣體,例如氨氣(NH
3)與水產生銨離子(NH
4 +)、硫化氫(H
2S)氣體與水作用產生氫硫酸根離子(HS
-)、一氧化碳(CO)氣體與水作用產生碳酸氫根離子(HCO
3 -)或碳酸根離子(HCO
3 -)等。該電性變化例如電阻變化或電流變化等。在該第一實施例中,該電性變化為電流變化。該氣體感測器包含一個用於電連接該電性檢測器的電極單元1及一個感測單元2。
該電極單元1包括一層第一電極層11及與一層與該第一電極層11相間隔設置的第二電極層12。
該第一電極層11的材質例如但不限於氧化銦錫、金屬、金屬化合物,或導電有機材料等。該金屬例如但不限於鋁、金、銀、鈣、鎳,或鉻等。該金屬化合物例如但不限於氧化鋅、氧化鉬,或氟化鋰等。該導電有機材料例如但不限於聚二氧乙基噻吩-聚苯乙烯磺酸[PEDOT:PSS]。該第一電極層11的長度為1mm至10mm、寬度為1mm至10mm,且厚度為250mm至400nm。在該第一實施例中,該第一電極層11的材質為氧化銦錫。
該第二電極層12包括兩個相對的電極表面121,以及形成有複數個貫穿該等電極表面121的貫孔120。該第二電極層12的材質例如但不限於金屬、金屬化合物,或導電有機材料等。該金屬例如但不限於鋁、金、銀、鈣、鎳,或鉻等。該金屬化合物例如但不限於氧化鋅、氧化鉬,或氟化鋰等。該導電有機材料例如但不限於聚二氧乙基噻吩-聚苯乙烯磺酸。該第二電極層12的長度為1mm至10mm、寬度為1mm至10mm,且厚度為350mm至1000nm。該等貫孔120的平均尺寸為50mm至200nm。在該第一實施例中,該第二電極層12的材質為鋁金屬。在該第一實施例的一變化態樣中,該第二電極層12包含複數條分散且相互交錯連接的奈米導線。
該感測單元2包括一層用來與待測氣體接觸的電絕緣感測層21。該電絕緣感測層21堆疊地位於該第一電極層11及該第二電極層12間且直接連接該第一電極層11及該第二電極層12。該電絕緣感測層21的長度為1mm至10mm、寬度為1mm至10mm,且厚度為5μm以下。該電絕緣感測層21包括吸濕電絕緣材料。該吸濕電絕緣材料例如但不限於具有羥基的吸濕電絕緣材料、具有胺基的吸濕電絕緣材料,或具有羧酸基的吸濕電絕緣材料等。在本發明的一些實施例中,該吸濕電絕緣材料選自於具有羥基的吸濕電絕緣材料或具有羧酸基的吸濕電絕緣材料。該具有羥基的吸濕電絕緣材料例如但不限於聚乙二醇、乙二醇單甲醚(2-methoxyethanol)、聚(乙烯苯酚)[poly(vinylphenol),簡稱PVP],或聚(乙烯醇)[poly(vinyl alcohol),簡稱PVA]等。為使該氣體感測器具有優異的空氣穩定性,在本發明的一些實施例中,該具有羥基的吸濕電絕緣材料選自於聚乙二醇、乙二醇單甲醚,或聚乙烯醇。該具有胺基的吸濕電絕緣材料例如但不限於聚乙烯亞胺(polyethylenimine,簡稱PEI)、二異丙醇胺(diisopropanolamine,簡稱DIPA),或三聚氰胺-甲醛樹脂(melamine resin)等。該具有羧酸基的吸濕電絕緣材料例如但不限於聚丙烯酸[poly(acrylic acid),簡稱PAA]或聚甲基丙烯酸[poly(methacrylic acid),簡稱PMAA]。為使該氣體感測器具有優異的空氣穩定性,在本發明的一些實施例中,該具有羧酸基的吸濕電絕緣材料為聚丙烯酸。
參閱圖2及圖3,本發明氣體感測器的一第二實施例是類似於該第一實施例,與該第一實施例主要不同在於該氣體感測器還包含一層位於該電極單元1的第一電極層11及第二電極層12間的介電層3。該介電層3包括兩個相對的介電表面31,以及形成有複數個貫穿該等介電表面31並分別與該等貫孔120連通的穿孔30。該介電層3的長度為1mm至10mm、寬度為1mm至10mm,且厚度為200mm至400nm。該等穿孔30的平均尺寸為50mm至200nm。該介電層3的材質例如但不限於聚(乙烯苯酚)、聚甲基丙烯酸甲酯(polymethylmethacrylate,簡稱PMMA)、光阻劑,或聚乙烯醇等。該光阻劑例如但不限於科毅科技股份有限公司的SU-8系列光阻劑。該感測單元2的電絕緣感測層21設置在該第二電極層12並延伸進入該等貫孔120及該等穿孔30而連接該第一電極層11。在該第二實施例中,該介電層3的材質為聚乙烯苯酚(廠牌:Sigma Aldrich;型號:AL-436224;重量平均分子量為25000)。
參閱圖4,本發明氣體感測器的一第三實施例是類似於該第二實施例,與該第二實施例主要不同在於該感測單元2的電絕緣感測層21設置在該電極單元1的第二電極層12並延伸進入且填充並充滿該等貫孔120及該等穿孔30而連接該電極單元1的第一電極層11。
參閱圖5,本發明氣體感測器的一第四實施例是類似於該第一實施例,與該第一實施例主要不同在於該氣體感測器還包含一層位於該第一電極層11及該第二電極層12間的介電層3,且該介電層3包括兩相對的介電表面31,以及形成有複數個貫穿該等介電表面31並分別與該等貫孔120連通的穿孔30。該感測單元2的電絕緣感測層21填充並充滿該等貫孔120及該等穿孔30而連接該電極單元1的第一電極層11及第二電極層12。
參閱圖6,本發明氣體感測器的一第五實施例是類似於該第一實施例,與該第一實施例主要不同在於該氣體感測器的感測單元2的電絕緣感測層21包括兩相對的表面211,以及形成有複數個貫穿該等表面211並分別與該等貫孔120連通的通孔210。
參閱圖7,本發明氣體感測器的一第六實施例是類似於該第一實施例,與該第一實施例主要不同在於:該電極單元1的第二電極層12不具有貫孔120,且該第一電極層11及該第二電極層12分別地位於並連接該電絕緣感測層21在一橫向方向Y上的相間隔的兩側。進一步地,為提高偵測的靈敏度,該第一電極層11及該第二電極層12間的間距為次微米。進一步地,該電絕緣感測層21的長度為1mm至10mm、寬度為次微米以下,且厚度為5μm以下。
在操作該等氣體感測器時,將該等氣體感測器置於一個具有濕氣的環境中,並使該氣體感測器的該第一電極層11及該第二電極層12連接一個電器設備(圖未示),而該電器設備包括電壓供應器(圖未示)及一個電流檢測器(圖未示),以透過該電壓供應器提供電壓並透過該電流檢測器輸出電流。該電壓供應器的電壓依據該等氣體感測器的感測單元2進行調整。以下的實驗中,編號1至5及編號8至21是以該第二實施例的氣體感測器來進行,且電壓設定在5volt,而編號6至7是以該第五實施例的氣體感測器來進行,且電壓設定在5volt。接著,將待測氣體導入該環境中並與該氣體感測器在一接觸時間下接觸,並透過該電流檢測器量測在該接觸時間內的電流變化。該電流變化率(單位:%)為[(該接觸時間結束時的電流值-未接觸待測氣體時的電流值)/未接觸待測氣體時的電流值]×100%。該氣體感測器的評價結果參閱表1。
表1
電流變化率(%) 「--」:未量測 「x」:無變化 | 電絕緣感測層21的吸濕電絕緣材料 | 待測氣體 | 具有濕氣的環境 | |||||||||
相對濕度 (RH%) | 待測氣體的濃度(單位:ppb) | |||||||||||
5 | 10 | 15 | 20 | 30 | 50 | 100 | 200 | |||||
編號 | 1 | 分子量1500的聚乙二醇 | NH 3 | 16 | -- | -- | 27.8 | -- | 49 | 117 | 189 | -- |
2 | 23.8 | 5 | 22 | -- | 45 | -- | 120 | 200 | 319 | |||
3 | 36 | -- | -- | 18.8 | -- | 42 | 75 | 129 | -- | |||
4 | 62 | -- | -- | -- | x | -- | 8 | 19 | 67 | |||
5 | CO | 36 | -- | -- | -- | -- | -- | -- | 19 | -- | ||
6 | 聚(乙烯苯酚) | NH 3 | 63.3 | -- | -- | -- | -- | -- | -- | -- | -- | |
7 | 丙酮 | 63.5 | -- | -- | -- | -- | -- | -- | -- | -- | ||
8 | 乙二醇單甲醚 | NH 3 | 15.6 | -- | -- | -- | -- | -- | -- | -- | -- | |
9 | 35.8 | -- | -- | -- | -- | -- | -- | -- | -- | |||
10 | 55.1 | -- | -- | -- | -- | -- | -- | -- | -- | |||
11 | 丙酮 | 15.5 | -- | -- | -- | -- | -- | -- | -- | -- | ||
12 | 35.9 | -- | -- | -- | -- | -- | -- | -- | -- | |||
13 | 54.7 | -- | -- | -- | -- | -- | -- | -- | -- | |||
14 | NO | 15.3 | -- | -- | -- | -- | -- | -- | -- | -- | ||
15 | 35.8 | -- | -- | -- | -- | -- | -- | -- | -- | |||
16 | 55.7 | -- | -- | -- | -- | -- | -- | -- | -- | |||
17 | 聚丙烯酸 | NH 3 | 33 | -- | -- | -- | -- | -- | -- | 2.2 | -- | |
18 | 36 | -- | -- | -- | -- | -- | -- | 5.1 | 13 | |||
19 | CO | 36 | -- | -- | -- | -- | -- | -- | x | 3 | ||
20 | H 2S | 36 | -- | -- | -- | -- | -- | -- | x | 2.6 | ||
21 | 聚(乙烯醇) | NH 3 | 53 | -- | -- | -- | -- | -- | -- | 4.2 | -- |
表2
電流變化率(%) 「--」:未量測 「x」:無變化 | 電絕緣感測層21的吸濕電絕緣材料 | 待測氣體 | 具有濕氣的環境 | ||||||||
相對濕度 (RH%) | 待測氣體的濃度(單位:ppb) | 待測氣體的濃度 (單位:ppm) | |||||||||
300 | 400 | 500 | 1 | 2 | 5 | 10 | |||||
編號 | 1 | 分子量1500的聚乙二醇 | NH 3 | 16 | -- | -- | -- | -- | -- | -- | -- |
2 | 23.8 | -- | -- | -- | -- | -- | -- | -- | |||
3 | 36 | -- | -- | -- | -- | -- | -- | -- | |||
4 | 62 | -- | -- | -- | -- | -- | -- | -- | |||
5 | CO | 36 | -- | 48 | -- | -- | -- | -- | -- | ||
6 | 聚(乙烯苯酚) | NH 3 | 63.3 | 239 | -- | 316 | 454 | 553 | 679 | 743 | |
7 | 丙酮 | 63.5 | -- | -- | 1 | 2 | 8 | 13 | 22 | ||
8 | 乙二醇單甲醚 | NH 3 | 15.6 | -- | -- | 10 | 15 | 23 | 35.5 | 51 | |
9 | 35.8 | -- | -- | 7.5 | 13 | 19 | 30 | 39 | |||
10 | 55.1 | -- | -- | 6 | 10 | 14 | 21 | 31 | |||
11 | 丙酮 | 15.5 | -- | -- | -- | -- | 2.7 | 6.4 | 7.6 | ||
12 | 35.9 | -- | -- | -- | -- | 1.3 | 3.8 | 6 | |||
13 | 54.7 | -- | -- | -- | -- | 0.8 | 1.9 | 6 | |||
14 | NO | 15.3 | -- | -- | 22 | 36 | 70 | 121 | 282 | ||
15 | 35.8 | -- | -- | 26 | 49 | 85 | 146 | 300 | |||
16 | 55.7 | -- | -- | 23 | 48 | 87 | 163 | 349 | |||
17 | 聚丙烯酸 | NH 3 | 33 | 17 | 33 | 46.2 | -- | -- | -- | -- | |
18 | 36 | -- | -- | 70 | -- | -- | -- | -- | |||
19 | CO | 36 | -- | -- | -- | -- | -- | -- | -- | ||
20 | H 2S | 36 | -- | -- | -- | -- | -- | -- | -- | ||
21 | 聚(乙烯醇) | NH 3 | 53 | 9.8 | -- | 15 | 48 | -- | -- | -- |
綜上所述,透過該電絕緣感測層21的設計,該氣體感測器能夠在具有濕度的環境下感測氨氣、丙酮、一氧化氮、一氧化碳,或硫化氫等待測氣體,故確實能達成本發明的目的。
惟以上所述者,僅為本發明的實施例而已,當不能以此限定本發明實施的範圍,凡是依本發明申請專利範圍及專利說明書內容所作的簡單的等效變化與修飾,皆仍屬本發明專利涵蓋的範圍內。
1:電極單元
11:第一電極層
12:第二電極層
121:電極表面
120:貫孔
2:感測單元
21:電絕緣感測層
211:表面
210:通孔
3:介電層
31:介電表面
30:穿孔
Y:橫向方向
本發明的其他的特徵及功效,將於參照圖式的實施方式中清楚地呈現,其中:
圖1是本發明氣體感測器的一個第一實施例的一個剖面側視示意圖;
圖2是本發明氣體感測器的一個第二實施例的一個剖面側視示意圖;
圖3是用來輔助說明圖2的一個不完整立體圖;
圖4是本發明氣體感測器的一個第三實施例的一個剖面側視示意圖;
圖5是本發明氣體感測器的一個第四實施例的一個剖面側視示意圖;
圖6是本發明氣體感測器的一個第五實施例的一個剖面側視示意圖;及
圖7是本發明氣體感測器的一個第六實施例的一個剖面側視示意圖。
11:第一電極層
12:第二電極層
120:貫孔
2:感測單元
21:電絕緣感測層
3:介電層
30:穿孔
31:介電表面
Claims (11)
- 一種氣體感測器,適用於在一具有濕度的環境下感測待測氣體,且包含: 一個電極單元,包括 一層第一電極層,及 一層第二電極層,與該第一電極層相間隔設置;及 一個感測單元,包括一層連接該第一電極層及該第二電極層且用來與該待測氣體接觸的電絕緣感測層,該電絕緣感測層包括吸濕電絕緣材料。
- 如請求項1所述的氣體感測器,其中,該吸濕電絕緣材料選自於具有羥基的吸濕電絕緣材料、具有胺基的吸濕電絕緣材料或具有羧酸基的吸濕電絕緣材料。
- 如請求項2所述的氣體感測器,其中,該具有羥基的吸濕電絕緣材料選自於聚乙二醇、乙二醇單甲醚、聚(乙烯酚),或聚(乙烯醇)。
- 如請求項2所述的氣體感測器,其中,該具有羧酸基的吸濕電絕緣材料為聚丙烯酸。
- 如請求項2所述的氣體感測器,其中,該第二電極層包括兩個相對的電極表面,以及形成有複數個貫穿該等電極表面並供該待測氣體通過以接觸該電絕緣感測層的貫孔。
- 如請求項5所述的氣體感測器,其中,該感測單元的電絕緣感測層堆疊地位於該第一電極層及該第二電極層間。
- 如請求項6所述的氣體感測器,其中,該電絕緣感測層包括兩相對的表面,以及形成有複數個貫穿該等表面並分別與該等貫孔連通的通孔。
- 如請求項5所述的氣體感測器,還包含一層堆疊地位於該第一電極層及該第二電極層間的介電層,且該介電層包括兩個相對的介電表面以及形成有複數個貫穿該等介電表面並分別與該等貫孔連通的穿孔,該感測單元的電絕緣感測層設置在該第二電極層上並延伸進入該等貫孔及該等穿孔而連接該第一電極層。
- 如請求項5所述的氣體感測器,其中,該感測單元的電絕緣感測層設置在該第二電極層上並延伸進入且填充並充滿該等貫孔及該等穿孔而連接該第一電極層。
- 如請求項5所述的氣體感測器,其中,還包含一層堆疊地位於該第一電極層及該第二電極層間的介電層,且該介電層包括兩個相對的介電表面以及形成有複數個貫穿該等介電表面並分別與該等貫孔連通的穿孔,該感測單元的電絕緣感測層填充並充滿該等貫孔及該等穿孔而連接該第一電極層。
- 如請求項2所述的氣體感測器,其中,該第一電極層及該第二電極層分別地位於並連接該感測單元的電絕緣感測層在一橫向方向上的相間隔的兩側。
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