TWI729442B - 干涉條紋的檢查裝置 - Google Patents

干涉條紋的檢查裝置 Download PDF

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Publication number
TWI729442B
TWI729442B TW108126107A TW108126107A TWI729442B TW I729442 B TWI729442 B TW I729442B TW 108126107 A TW108126107 A TW 108126107A TW 108126107 A TW108126107 A TW 108126107A TW I729442 B TWI729442 B TW I729442B
Authority
TW
Taiwan
Prior art keywords
optical filter
light
light source
inspection device
interference fringes
Prior art date
Application number
TW108126107A
Other languages
English (en)
Chinese (zh)
Other versions
TW202018278A (zh
Inventor
栗原公鄉
Original Assignee
日商栗原工業股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商栗原工業股份有限公司 filed Critical 日商栗原工業股份有限公司
Publication of TW202018278A publication Critical patent/TW202018278A/zh
Application granted granted Critical
Publication of TWI729442B publication Critical patent/TWI729442B/zh

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
    • G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21S—NON-PORTABLE LIGHTING DEVICES; SYSTEMS THEREOF; VEHICLE LIGHTING DEVICES SPECIALLY ADAPTED FOR VEHICLE EXTERIORS
    • F21S2/00—Systems of lighting devices, not provided for in main groups F21S4/00 - F21S10/00 or F21S19/00, e.g. of modular construction
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V9/00—Elements for modifying spectral properties, polarisation or intensity of the light emitted, e.g. filters
    • F21V9/08—Elements for modifying spectral properties, polarisation or intensity of the light emitted, e.g. filters for producing coloured light, e.g. monochromatic; for reducing intensity of light
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V9/00—Elements for modifying spectral properties, polarisation or intensity of the light emitted, e.g. filters
    • F21V9/20—Dichroic filters, i.e. devices operating on the principle of wave interference to pass specific ranges of wavelengths while cancelling others
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/12—Selection of substances for gas fillings; Specified operating pressure or temperature
    • H01J61/18—Selection of substances for gas fillings; Specified operating pressure or temperature having a metallic vapour as the principal constituent
    • H01J61/20—Selection of substances for gas fillings; Specified operating pressure or temperature having a metallic vapour as the principal constituent mercury vapour
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/38—Devices for influencing the colour or wavelength of the light
    • H01J61/40—Devices for influencing the colour or wavelength of the light by light filters; by coloured coatings in or on the envelope
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N2021/9513—Liquid crystal panels

Landscapes

  • Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Non-Portable Lighting Devices Or Systems Thereof (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
TW108126107A 2018-07-25 2019-07-24 干涉條紋的檢查裝置 TWI729442B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018-139793 2018-07-25
JP2018139793A JP6463542B1 (ja) 2018-07-25 2018-07-25 干渉縞の検査装置、干渉縞の検査方法、及び干渉縞を用いた検査方法

Publications (2)

Publication Number Publication Date
TW202018278A TW202018278A (zh) 2020-05-16
TWI729442B true TWI729442B (zh) 2021-06-01

Family

ID=65270560

Family Applications (1)

Application Number Title Priority Date Filing Date
TW108126107A TWI729442B (zh) 2018-07-25 2019-07-24 干涉條紋的檢查裝置

Country Status (5)

Country Link
JP (1) JP6463542B1 (ja)
KR (1) KR20200093026A (ja)
CN (1) CN111512146A (ja)
TW (1) TWI729442B (ja)
WO (1) WO2020022517A1 (ja)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08162402A (ja) * 1994-12-01 1996-06-21 Nikon Corp 照明光学装置
JP2006318813A (ja) * 2005-05-13 2006-11-24 Ｈｏｙａ Ｃａｎｄｅｏ Ｏｐｔｒｏｎｉｃｓ株式会社 光部品を有する光照射装置および同装置の光部品の取り付け方法

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5729343A (en) * 1995-11-16 1998-03-17 Nikon Precision Inc. Film thickness measurement apparatus with tilting stage and method of operation
JP3657345B2 (ja) * 1996-04-25 2005-06-08 オリンパス株式会社 膜厚検査装置
JP3808048B2 (ja) * 2002-03-14 2006-08-09 日東電工株式会社 光学素子及びこれを用いた面光源装置並びに液晶表示装置
US7304735B2 (en) * 2004-04-02 2007-12-04 Kla-Tencor Technologies Broadband wavelength selective filter
JP2006275704A (ja) * 2005-03-29 2006-10-12 Toppan Printing Co Ltd 膜厚ムラ検出方法
JP2007323022A (ja) * 2006-06-05 2007-12-13 Sony Corp 表示装置およびその製造方法ならびに赤外カットフィルターおよびその製造方法ならびに放電管およびその製造方法
US20080024869A1 (en) * 2006-06-07 2008-01-31 Siemens Energy And Automation, Inc. System for providing monochromatic light
JP4988420B2 (ja) * 2007-04-24 2012-08-01 パナソニック株式会社 照明装置
JP5471157B2 (ja) * 2009-08-21 2014-04-16 セントラル硝子株式会社 ガラス板面の付着物の検出方法および装置
BR112012028172A2 (pt) * 2010-05-06 2017-08-15 Koninklijke Philips Electronics Nv Fonte de luz e uso da fonte de luz
CN102374402A (zh) * 2010-08-19 2012-03-14 邱行中 发光装置及采用此发光装置的照明装置
JP2015007575A (ja) 2013-06-25 2015-01-15 株式会社ジャパンディスプレイ 液晶表示パネルの検査方法及び検査装置
JP6286953B2 (ja) * 2013-09-06 2018-03-07 カシオ計算機株式会社 光源装置及び投影装置
KR20170029066A (ko) * 2015-09-04 2017-03-15 삼성디스플레이 주식회사 광학 필터 및 이를 적용한 자발광 디스플레이
JP6750793B2 (ja) * 2016-04-26 2020-09-02 レーザーテック株式会社 膜厚測定装置及び膜厚測定方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08162402A (ja) * 1994-12-01 1996-06-21 Nikon Corp 照明光学装置
JP2006318813A (ja) * 2005-05-13 2006-11-24 Ｈｏｙａ Ｃａｎｄｅｏ Ｏｐｔｒｏｎｉｃｓ株式会社 光部品を有する光照射装置および同装置の光部品の取り付け方法

Also Published As

Publication number Publication date
WO2020022517A1 (ja) 2020-01-30
KR20200093026A (ko) 2020-08-04
TW202018278A (zh) 2020-05-16
JP2020016552A (ja) 2020-01-30
CN111512146A (zh) 2020-08-07
JP6463542B1 (ja) 2019-02-06

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