TWI729442B - 干涉條紋的檢查裝置 - Google Patents
干涉條紋的檢查裝置 Download PDFInfo
- Publication number
- TWI729442B TWI729442B TW108126107A TW108126107A TWI729442B TW I729442 B TWI729442 B TW I729442B TW 108126107 A TW108126107 A TW 108126107A TW 108126107 A TW108126107 A TW 108126107A TW I729442 B TWI729442 B TW I729442B
- Authority
- TW
- Taiwan
- Prior art keywords
- optical filter
- light
- light source
- inspection device
- interference fringes
- Prior art date
Links
Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
- G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21S—NON-PORTABLE LIGHTING DEVICES; SYSTEMS THEREOF; VEHICLE LIGHTING DEVICES SPECIALLY ADAPTED FOR VEHICLE EXTERIORS
- F21S2/00—Systems of lighting devices, not provided for in main groups F21S4/00 - F21S10/00 or F21S19/00, e.g. of modular construction
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
- F21V9/00—Elements for modifying spectral properties, polarisation or intensity of the light emitted, e.g. filters
- F21V9/08—Elements for modifying spectral properties, polarisation or intensity of the light emitted, e.g. filters for producing coloured light, e.g. monochromatic; for reducing intensity of light
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
- F21V9/00—Elements for modifying spectral properties, polarisation or intensity of the light emitted, e.g. filters
- F21V9/20—Dichroic filters, i.e. devices operating on the principle of wave interference to pass specific ranges of wavelengths while cancelling others
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/12—Selection of substances for gas fillings; Specified operating pressure or temperature
- H01J61/18—Selection of substances for gas fillings; Specified operating pressure or temperature having a metallic vapour as the principal constituent
- H01J61/20—Selection of substances for gas fillings; Specified operating pressure or temperature having a metallic vapour as the principal constituent mercury vapour
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/38—Devices for influencing the colour or wavelength of the light
- H01J61/40—Devices for influencing the colour or wavelength of the light by light filters; by coloured coatings in or on the envelope
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N2021/9513—Liquid crystal panels
Landscapes
- Physics & Mathematics (AREA)
- General Engineering & Computer Science (AREA)
- Engineering & Computer Science (AREA)
- Analytical Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Non-Portable Lighting Devices Or Systems Thereof (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018-139793 | 2018-07-25 | ||
JP2018139793A JP6463542B1 (ja) | 2018-07-25 | 2018-07-25 | 干渉縞の検査装置、干渉縞の検査方法、及び干渉縞を用いた検査方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW202018278A TW202018278A (zh) | 2020-05-16 |
TWI729442B true TWI729442B (zh) | 2021-06-01 |
Family
ID=65270560
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW108126107A TWI729442B (zh) | 2018-07-25 | 2019-07-24 | 干涉條紋的檢查裝置 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP6463542B1 (ja) |
KR (1) | KR20200093026A (ja) |
CN (1) | CN111512146A (ja) |
TW (1) | TWI729442B (ja) |
WO (1) | WO2020022517A1 (ja) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08162402A (ja) * | 1994-12-01 | 1996-06-21 | Nikon Corp | 照明光学装置 |
JP2006318813A (ja) * | 2005-05-13 | 2006-11-24 | Hoya Candeo Optronics株式会社 | 光部品を有する光照射装置および同装置の光部品の取り付け方法 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5729343A (en) * | 1995-11-16 | 1998-03-17 | Nikon Precision Inc. | Film thickness measurement apparatus with tilting stage and method of operation |
JP3657345B2 (ja) * | 1996-04-25 | 2005-06-08 | オリンパス株式会社 | 膜厚検査装置 |
JP3808048B2 (ja) * | 2002-03-14 | 2006-08-09 | 日東電工株式会社 | 光学素子及びこれを用いた面光源装置並びに液晶表示装置 |
US7304735B2 (en) * | 2004-04-02 | 2007-12-04 | Kla-Tencor Technologies | Broadband wavelength selective filter |
JP2006275704A (ja) * | 2005-03-29 | 2006-10-12 | Toppan Printing Co Ltd | 膜厚ムラ検出方法 |
JP2007323022A (ja) * | 2006-06-05 | 2007-12-13 | Sony Corp | 表示装置およびその製造方法ならびに赤外カットフィルターおよびその製造方法ならびに放電管およびその製造方法 |
US20080024869A1 (en) * | 2006-06-07 | 2008-01-31 | Siemens Energy And Automation, Inc. | System for providing monochromatic light |
JP4988420B2 (ja) * | 2007-04-24 | 2012-08-01 | パナソニック株式会社 | 照明装置 |
JP5471157B2 (ja) * | 2009-08-21 | 2014-04-16 | セントラル硝子株式会社 | ガラス板面の付着物の検出方法および装置 |
BR112012028172A2 (pt) * | 2010-05-06 | 2017-08-15 | Koninklijke Philips Electronics Nv | Fonte de luz e uso da fonte de luz |
CN102374402A (zh) * | 2010-08-19 | 2012-03-14 | 邱行中 | 发光装置及采用此发光装置的照明装置 |
JP2015007575A (ja) | 2013-06-25 | 2015-01-15 | 株式会社ジャパンディスプレイ | 液晶表示パネルの検査方法及び検査装置 |
JP6286953B2 (ja) * | 2013-09-06 | 2018-03-07 | カシオ計算機株式会社 | 光源装置及び投影装置 |
KR20170029066A (ko) * | 2015-09-04 | 2017-03-15 | 삼성디스플레이 주식회사 | 광학 필터 및 이를 적용한 자발광 디스플레이 |
JP6750793B2 (ja) * | 2016-04-26 | 2020-09-02 | レーザーテック株式会社 | 膜厚測定装置及び膜厚測定方法 |
-
2018
- 2018-07-25 JP JP2018139793A patent/JP6463542B1/ja active Active
-
2019
- 2019-07-22 CN CN201980006698.9A patent/CN111512146A/zh active Pending
- 2019-07-22 KR KR1020207019127A patent/KR20200093026A/ko not_active Application Discontinuation
- 2019-07-22 WO PCT/JP2019/029559 patent/WO2020022517A1/ja active Application Filing
- 2019-07-24 TW TW108126107A patent/TWI729442B/zh active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08162402A (ja) * | 1994-12-01 | 1996-06-21 | Nikon Corp | 照明光学装置 |
JP2006318813A (ja) * | 2005-05-13 | 2006-11-24 | Hoya Candeo Optronics株式会社 | 光部品を有する光照射装置および同装置の光部品の取り付け方法 |
Also Published As
Publication number | Publication date |
---|---|
WO2020022517A1 (ja) | 2020-01-30 |
KR20200093026A (ko) | 2020-08-04 |
TW202018278A (zh) | 2020-05-16 |
JP2020016552A (ja) | 2020-01-30 |
CN111512146A (zh) | 2020-08-07 |
JP6463542B1 (ja) | 2019-02-06 |
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