TWI729243B - Frame for conveying and conveying method - Google Patents

Abstract

[Question] Easily transport the chamber. [Solution] A transport stand (10) for transporting chambers that can be divided up and down, which is provided with: a central frame (20) extending in the first direction; two side frames (30) in the first The two ends of the central frame (20) in the direction extend along the second direction crossing the first direction; and a plurality of mounting plates (24) are used to fix the chamber to the central frame (20). The chamber is divided into: an upper part (71), including the ceiling surface (710) of the chamber; and a lower part (72), including the bottom surface (720) of the chamber. Each of the plurality of mounting plates (24) is such that the ceiling surface (710) or the bottom surface (720) becomes the direction along the side of the central frame (20), and at least the upper part (71) and the lower part (72) Either one is fixed between the two side frames (30) and on the side surface of the central frame (20).

Description

Frame for conveying and conveying method

The various aspects and embodiments of the present invention are related to conveying racks and conveying methods.

Since the flat display substrate, the larger the size of the mother glass substrate, the more the number of panels obtained from one sheet, and therefore, the cost can be reduced. Therefore, in recent years, mother glass substrates have been increasing in size. In addition, with the increase in the size of mother glass substrates, devices for manufacturing or inspecting glass substrates are also increasing in size year by year.

However, equipment for manufacturing flat-panel display substrates and the like is installed after being manufactured by a manufacturer and then being transported to a production site. However, when the device becomes large, it becomes difficult to directly transport one device due to the size and weight.

Therefore, a technique is known in which the device is divided in the width direction or the depth direction, the divided parts are individually conveyed, and joined at the conveying destination, thereby conveying the large-sized device to the conveying destination.

[Prior Technical Documents] [Patent Documents]

[Patent Document 1] JP 2007-73688 A

[Problem to be solved by the present invention]

However, many devices for manufacturing flat-panel display substrates and the like require airtightness. However, when rejoining devices divided in the width direction or the depth direction, it is difficult to suppress the decrease in airtightness. Therefore, it is not good to transport the device by dividing the device in the width direction or the depth direction.

In addition, it is also considered to divide the device in the vertical direction. Only dividing the device in the vertical direction can reduce the weight of the device by dividing, but it cannot reduce the width or depth of the device. Therefore, the device protrudes from the bracket of the conveying vehicle, and it becomes difficult to convey the device. [Means to solve the problem]

One aspect of the present invention is a transport rack for transporting chambers that can be divided up and down. It is characterized by having: a central frame extending in a first direction; and two side frames in the first direction. Among them, both ends of the central frame extend in a second direction that crosses the first direction; and a plurality of fixtures are used to fix the chamber to the central frame. The aforementioned chamber is divided into: an upper part including the ceiling surface of the aforementioned chamber; and a lower part including the bottom surface of the aforementioned chamber. Each of the plurality of fixtures fixes at least one of the upper part and the lower part to one of the two side frames so that the ceiling surface or the bottom surface is in a direction along the side surface of the central frame And the side of the aforementioned central frame. [Effects of Invention]

According to various aspects and embodiments of the present invention, the chamber can be easily transported.

In one embodiment, the disclosed transport rack is used to transport chambers that can be divided up and down. The transport rack is characterized by having: a central frame extending in the first direction; and two side frames , Both ends of the central frame in the first direction extend along the second direction crossing the first direction; and a plurality of fixtures for fixing the chamber to the central frame. The chamber is divided into: the upper part, including the ceiling surface of the chamber; and the lower part, including the bottom surface of the chamber. Each of the plurality of fixtures fixes at least any one of the upper part and the lower part between the two side frames and the side surface of the central frame so that the ceiling surface or the bottom surface becomes the direction along the side surface of the central frame.

In addition, in one embodiment of the conveying stand disclosed, each of the plurality of fixtures may fix the upper part divided from one chamber to one of the side surfaces of the central frame, and the one from one The lower part divided by the chamber is fixed to the other side of the central frame.

In addition, in one embodiment of the conveying rack disclosed, at least a part of the plurality of fixtures can also be set on the central frame, and the fixture provided on the central frame can also connect the ceiling surface of the upper part to the The bottom surface of the lower part is fixed to the central frame.

Furthermore, in one embodiment, the conveying stand disclosed may be further equipped with: a standpoint for work, which is provided above the central frame and the side frame; and a drop-preventing part that surrounds the standpoint for work .

In addition, in one embodiment of the disclosed transport stand, the side frame may be provided with a ladder for the operator to climb up the work foothold.

In addition, in one embodiment of the disclosed transport stand, the ladder can also be stored in the side frame.

In addition, in one embodiment of the conveying stand disclosed, the central frame may also have: a plurality of columns extending in the up and down direction; beams extending in the first direction; and a plurality of support arms arranged obliquely Between a plurality of columns.

In addition, in one embodiment of the disclosed transport rack, the chamber may also be a processing chamber for FPD (Flat Panel Display), a transfer chamber for FPD, or a load lock chamber for FPD.

Moreover, in one embodiment, the conveying method disclosed is to convey a chamber that can be divided up and down. The conveying method is characterized by including: installation process, conveying with a central frame and two side frames The frame is installed on the carriage of the conveying vehicle. The central frame extends in the first direction. The two side frames are at both ends of the central frame in the first direction along the first direction that crosses the first direction. 2 direction extension; and the configuration process, in the cavity divided into the upper part containing the ceiling surface of the chamber and the lower part containing the bottom surface of the chamber, so that the ceiling surface or the bottom surface becomes the direction along the side of the central frame Method, arrange at least any one of the upper part and the lower part between the two side frames and on the side of the central frame; the fixing process is to use a plurality of fixtures installed on the conveying rack to cover the upper part At least one of the bottom surface and the bottom surface of the lower part is fixed to the side surface of the central frame; and the conveying process is to convey at least any one of the upper part and the lower part fixed to the side surface of the central frame by a conveying vehicle.

In addition, in one embodiment of the disclosed conveying method, the upper part divided from one chamber can also be fixed to one side of the central frame by a plurality of fixtures, and a plurality of fixtures can also be used. The fixing tool fixes the lower part divided from one chamber to the other side surface of the center frame.

In addition, in one embodiment of the disclosed conveying method, at least a part of the plurality of fixtures can also be set on the central frame, and the upper part can also be covered by the fixture set on the central frame. The bottom surface of the surface and the lower part are fixed to the central frame.

In addition, in one embodiment of the disclosed transportation method, in the fixing process, the system may also include: the process of pulling out the ladder stored in the side frame; using the ladder, the operator climbs up and is installed on the side The construction of the working foothold above the frame and the central frame and surrounded by the fence for preventing falling; by the operation of the operator on the working foothold, the ceiling surface and the lower parts of the upper part of the chamber The project where at least any one of the bottom surface is fixed to the central frame; and the project where the operator comes down from the work area and stores the ladder in the side frame by using a ladder.

Furthermore, in an embodiment of the disclosed conveying method, the chamber may also be a processing chamber for FPD, a transfer chamber for FPD, or a load lock chamber for FPD.

Hereinafter, based on the drawings, an embodiment of the disclosed transportation rack and transportation method will be described in detail. In addition, the disclosed conveyance stand and conveyance method are not limited by this embodiment below.

[Configuration of the transport rack 10] 　　 FIG. 1 is a diagram showing an example of the transport rack 10. The conveyance stand 10 in this embodiment is, for example, as shown in FIG. 1, and includes: a central frame 20 extending in the y-axis direction of FIG. 1; and two side frames 30, a central frame in the y-axis direction Both ends of 20 extend along the x-axis direction. In this embodiment, the direction in which the central frame 20 extends and the direction in which the side frames 30 extend are orthogonal. The y-axis direction is an example of the first direction, and the x-axis direction is an example of the second direction.

The central frame 20, as shown in FIG. 1, for example, has: a beam 22 and a base 28 extending in the y-axis direction of FIG. 1; a plurality of columns 21 extending in the vertical direction, that is, the z-axis direction of FIG. 1; and a plurality of The support arm 23 is arranged obliquely between the plurality of columns 21. On the side of the column 21 and the beam 22, there are provided a plurality of mounting plates 24 for fixing the parts of the chamber described later. By providing the support arms 23 between the columns 21, the skew of the center frame 20 in the y-axis direction of FIG. 1 is suppressed.

Each side frame 30, as shown in FIG. 1, for example, has: a beam 32 and a base 36 extending in the x-axis direction of FIG. 1; and a plurality of columns 31 extending in the up and down direction, that is, the z-axis direction in FIG. 1; and A plurality of support arms 33 are arranged obliquely between the column 31 and the beam 32 and between the column 31 and the base 36. The pillar 31 of each side frame 30 is provided with a plurality of lifting rings 34 for fixing the transport stand 10 to the bracket of the transport vehicle. Between the base 36 of each side frame 30 and the base 28 of the center frame 20, a reinforcing material 37 is provided. Side frames 30 are provided at both ends of the central frame 20 extending in the y-axis direction. The side frames 30 extend in the x-axis direction intersecting the y-axis direction, thereby improving the transportation in the x-axis direction. The strength of the stand 10.

On the upper part of the center frame 20 and the side frame 30, the foothold 40 for an operation|work for an operator to perform an operation|work is provided. The periphery of the work foothold 40 is surrounded by a fence 41, and the fence 41 is used to prevent an operator who works on the work foothold 40 from falling. The fence 41 is an example of a fall prevention part.

The side frame 30 is provided with a ladder 50 for an operator to climb on the work foothold 40. Furthermore, in a state where the transport stand 10 is fixed to the carriage of the transport vehicle, a plurality of protection pads 25 are arranged on the side of the base 28 of the center frame 20 and on the carriage of the transport vehicle. The protective pad 25 protects the chamber, which will be described later, placed on the protective pad 25 from scratches or impacts.

[Method of Fixing the Transport Frame 10] 　　 Figure 2 is a diagram showing an example of a state in which the transport frame 10 is fixed to the bracket 60 of the transport vehicle. The transport rack 10 is mounted on a cradle 60 of a transport vehicle. As shown in FIG. 2, the column 31 of the side frame 30 is provided with a plurality of lifting rings 34 such as eye bolts, and mounting tools 35 such as chains or belts pass through each lifting ring 34. In addition, the mounting tool 35 is fixed to the bracket 60, so that the conveyance stand 10 is fixed to the bracket 60 of the conveyance vehicle.

[Structure of the chamber 70] 　　 FIG. 3 is a cross-sectional view showing an example of the chamber 70. The chamber 70 in this embodiment has an upper part 71 and a lower part 72. The upper part 71 and the lower part 72 can be divided up and down along the broken line shown in FIG. 3, for example. When the upper part 71 and the lower part 72 are divided up and down, openings are formed in the lower part of the upper part 71 and the upper part of the lower part 72.

In a state where the upper part 71 and the lower part 72 are joined, a shower head 711, a base 721, and the like are installed in the processing space formed by the upper part 71 and the lower part 72. On the joint surface of the upper part 71 and the lower part 72, a sealing member 73 such as an O-ring is arranged. Since the chamber 70 is divided up and down, when the upper part 71 and the lower part 72 are joined, the sealing member 73 is crushed by the weight of the upper part 71, and the airtightness of the processing space can be maintained high. In addition, in the following, the upper surface of the upper part 71 is referred to as a ceiling surface 710, and the lower surface of the lower part 72 is referred to as a bottom surface 720.

The chamber 70 in this embodiment is, for example, a processing chamber for FPD. The chamber 70 is provided with an unshown import/export port, and the glass substrate to be processed carried in from the import/export port is placed on the base 721. Then, the carry-in/export outlet is closed, the processing space is evacuated, and the processing gas is supplied from the shower head 711 into the processing space. Furthermore, for example, high-frequency power of a predetermined frequency is applied between the shower head 711 and the susceptor 721 to generate plasma of the processing gas in the processing space. Then, predetermined processing such as film formation or etching is applied to the glass substrate to be processed by the generated plasma.

In the case of the conveying chamber 70, the chamber 70 is divided into an upper part 71 and a lower part 72. In addition, parts such as the shower head 711 are removed from the upper part 71, and parts such as the base 721 are removed from the lower part 72 according to needs. Then, using the transport rack 10 described in FIG. 1, the upper part 71 and the lower part 72 are fixed to the bracket 60 of the transport vehicle and transported.

[Loading method of the chamber 70] 　　 FIG. 4 is a diagram for explaining an example of the loading procedure of the chamber 70. First, the transport rack 10 is loaded on the carriage 60 of the transport vehicle. In addition, the mounting tool 35 of the hanging ring 34 of the side frame 30 is fixed to the bracket 60, whereby the transportation stand 10 is fixed to the bracket 60 of the transportation vehicle. In addition, the plurality of protection pads 25 are arranged on the bracket 60 on the side of the center frame 20.

Next, each lifting ring 74 is attached to the upper part 71 and the lower part 72 divided from the chamber 70. Furthermore, the upper part 71 is hoisted by a crane or the like using a wire rope passing through the hoisting ring 74, and is moved as shown by the arrow in FIG. Between the square frames 30 and on the bracket 60 on the side of the center frame 20. In this embodiment, the upper part 71 is arranged on the side of the center frame 20 so that the ceiling surface 710 faces the center frame 20 side, as shown in FIG. 4, for example. Furthermore, the mounting plate 24 provided on the column 21 or the beam 22 of the center frame 20 and the ceiling surface 710 of the upper part 71 are fixed by bolts or the like, whereby the upper part 71 is fixed to the conveyance stand 10. The mounting plate 24 is an example of a fixture.

Similarly, the lower part 72 is hoisted by a crane or the like using a wire rope passing through the hoist ring 74, and is moved as shown by the arrow in FIG. 4, so that the bottom surface 720 becomes the direction along the side of the center frame 20, and is placed on the side Between the square frames 30 and on the bracket 60 on the side of the center frame 20. In the present embodiment, the lower part 72 is arranged on the side of the center frame 20 such that the bottom surface 720 faces the center frame 20 side as shown in FIG. 4, for example. Furthermore, the mounting plate 24 provided on the column 21 or the beam 22 of the center frame 20 and the bottom surface 720 of the lower part 72 are fixed by bolts or the like, whereby the lower part 72 is fixed to the conveying stand 10.

Fig. 5 is an enlarged view of the vicinity of the mounting plate 24. In FIG. 5, it shows the state where the lower part 72 is fixed to the mounting plate 24, and this mounting plate is provided in the beam 22 of the center frame 20. As shown in FIG. For example, as shown in FIG. 5, the bottom surface 720 of the lower part 72 is fixed to the mounting plate 24 by the bolt 26 through the through hole provided in the mounting plate 24. The fixing of the bottom surface 720 to the mounting plate 24 provided on the beam 22 is performed by an operator on the work foothold 40. In addition, even in the mounting plate 24 provided on the column 21 of the center frame 20, the bottom surface 720 of the lower part 72 is fixed by the bolt 26. The same applies to the fixing of the ceiling surface 710 of the upper part 71 to the mounting plate 24.

In addition, in the center frame 20, as shown in FIG. 5, for example, a plurality of suspension rings 27 are provided. The transport stand 10 is hoisted by a crane or the like using a wire rope or the like that passes through each hoisting ring 27, and is mounted on a cradle 60 of a transport vehicle.

For example, as shown in FIGS. 6 to 9, the upper part 71 and the lower part 72 are shown in a state where the upper part 71 and the lower part 72 are fixed to the transport rack 10. FIG. 6 is a diagram showing an example of a state in which the upper part 71 and the lower part 72 are fixed to the carriage 60 for transportation. FIG. 7 is a cross-sectional view showing an example of the transport stand 10 in a state where the lower part 72 of the chamber 70 is fixed. FIG. 8 is a cross-sectional view showing an example of the transport stand 10 in which the chamber 70 is fixed. FIG. 9 is a plan view showing an example of the transport stand 10 in which the chamber 70 is fixed.

In this way, the upper part 71 is arranged on the side of the central frame 20 so that the ceiling surface 710 of the upper part 71 faces the central frame 20 side, and the bottom face 720 of the lower part 72 faces the central frame 20 side. The lower part 72 is arranged on the side of the central frame 20, whereby the upper part 71 and the lower part 72 can be easily fixed to the central frame 20. In addition, the upper part 71 and the lower part 72 are arranged so that the ceiling surface 710 and the bottom surface 720 face the central frame 20 side, so that when the upper part 71 and the lower part 72 are fixed to the central frame 20, the operator does not It is necessary to touch the inside of the upper part 71 and the lower part 72. Therefore, during the fixing operation of the upper part 71 and the lower part 72, the inside of the upper part 71 and the lower part 72 can be prevented from being damaged or dirt attached.

In addition, in each mounting plate 24, one or a plurality of through holes are formed corresponding to the respective screw holes of the upper part 71 and the lower part 72. Thereby, even when any one of the upper part 71 and the lower part 72 is arranged, the upper part 71 or the lower part 72 and the mounting plate 24 can be fixed by the bolt 26. Therefore, in the transport stand 10 of the present embodiment, any one of the upper part 71 and the lower part 72 can be fixed on either side of the side surface of the center frame 20. In addition, in the transport stand 10 of the present embodiment, the two upper parts 71 may be fixed to the central frame 20, and the two lower parts 72 may be fixed to the central frame 20.

The cross section of the upper part 71 and the lower part 72 in a state where the upper part 71 and the lower part 72 are fixed to the mounting plate 24 of the center frame 20 is, for example, as shown in FIG. 8. In addition, a view of the state in which the upper part 71 and the lower part 72 are fixed to the mounting plate 24 of the center frame 20 viewed from above is as shown in, for example, FIG. 9. As shown in Figures 8 and 9, in the state where the upper part 71 and the lower part 72 are fixed to the central frame 20, the width including the upper part 71, the lower part 72 and the central frame 20 is narrower than the width of the bracket 60 . In this way, the upper part 71 and the lower part 72 of the chamber 70 divided up and down are loaded laterally, whereby the entire width of the chamber 70 including the transport stand 10 can be kept within the width of the bracket 60. Therefore, by using the conveyance stand 10 of this embodiment, even if it is a large-scale chamber 70, it can convey easily using a conveyance vehicle.

In addition, in this embodiment, the width of the entire cargo including the central frame 20, the upper part 71 and the lower part 72 is approximately 2 meters, and the width of the bracket 60 is approximately 2.49 meters. Therefore, the width of the entire cargo including the carriage 60 is less than 2.5 meters. Here, when the width of the entire cargo including the bracket 60 is 2.5 meters or more, the Road Traffic Law stipulates that the cargo must be broken down to the smallest unit that can maintain the function of the cargo. The so-called "bulk regulations." Therefore, when the width of the entire cargo including the carriage 60 exceeds 2.5 meters, the chamber 70 cannot be transported by one transport vehicle, and the transport efficiency is reduced.

In contrast, in the transportation method using the transportation rack 10 in this embodiment, since the width of the entire cargo including the carriage 60 is less than 2.5 meters, it does not comply with the "bulk regulations" and can be used for one unit. The transportation vehicle transports the upper part 71 and the lower part 72 that constitute one chamber 70. Therefore, the conveying efficiency of the chamber 70 can be improved.

Moreover, the ladder 50 provided in the side frame 30 can be accommodated in the side frame 30 as shown in FIG. 10, for example. FIG. 10 is a diagram showing an example of the pulled-out state and the stored state of the ladder 50. FIG. The ladder 50 is, for example, as shown in FIG. 10, and has a handrail 51, a ladder body 52, and a guide 53. The ladder body 52 is configured to move the sliding plates 54 provided on both sides of the upper part along the guides 53 so that the ladder body 52 can be stored along the side frame 30 or the ladder body 52 can be pulled out obliquely.

For example, the sliding plate 54 of the ladder main body 52 is moved downward along the guide 53 so that the ladder main body 52 can be pulled out as shown in the left side view of FIG. 10. Thereby, the operator can climb up the ladder 50 and perform work on the work foothold 40. In addition, for example, by moving the sliding plate 54 of the ladder body 52 upward along the guide 53, the ladder body 52 can be housed in the side frame 30 as shown in the right diagram of FIG. 10. Since the ladder body 52 can be stored in the side frame 30, the ladder 50 can be transported together with the upper part 71 and the lower part 72. Thereby, whenever the upper part 71 and the lower part 72 are fixed to or removed from the conveyance stand 10, the work of separately preparing a ladder can be saved. Therefore, it is possible to quickly fix the upper part 71 and the lower part 72 to the transport rack 10.

[Transportation program] 　　 FIG. 11 is a flowchart showing an example of a transportation program using the chamber 70 of the transportation gantry 10.

First, the transport rack 10 is installed on the carriage 60 of the transport vehicle (S100). Specifically, for example, as shown in FIG. 2, the transport stand 10 is mounted on the bracket 60, and the mounting tool 35 of the lifting ring 34 of the side frame 30 is fixed to the bracket 60, whereby the transport stand 10 is It is installed on the bracket 60 of the conveying vehicle. In addition, the plurality of protection pads 25 are arranged on the bracket 60 on the side of the center frame 20.

Next, the upper part 71 and the lower part 72 divided from the chamber 70 are respectively arranged between the side frames 30 and on the bracket 60 on the side of the center frame 20 (S101). Specifically, as shown in FIG. 4, for example, the upper part 71 and the lower part 72 are respectively lifted by a crane or the like using a wire rope passing through a hoist ring 74 or the like. The upper part 71 is arranged on the side of the central frame 20 so that the ceiling surface 710 faces the central frame 20 side, and the lower part 72 is arranged on the side of the central frame 20 so that the bottom surface 720 faces the central frame 20. The side of the central frame 20.

Next, the ladder 50 accommodated in the side frame 30 is pulled out (S102). Specifically, the sliding plate 54 provided on the ladder body 52 is moved downward along the guide 53 provided on the side frame 30, thereby, for example, as shown in the left side view of FIG. 10, the ladder body 52 was pulled out.

Next, the worker uses the ladder 50 to climb up the work foothold 40 on the center frame 20 and the side frames 30 (S103). In addition, the operator fixes the ceiling surface 710 of the upper part 71 and the bottom surface 720 of the lower part 72 to the mounting plate 24, respectively, using bolts 26 on the work foothold 40. The mounting plate 24 is installed in the center. The beam 22 of the frame 20 (S104).

Next, the worker uses the ladder 50 pulled out in step S102, gets down from the work foothold 40, and stores the ladder 50 in the side frame 30 (S105). Specifically, the sliding plate 54 provided on the ladder body 52 is moved upward along the guide 53 provided on the side frame 30, thereby, for example, as shown in the right side diagram of FIG. 10, the ladder body 52 is housed in the side frame 30.

Next, the operator uses bolts 26 to fix the ceiling surface 710 of the upper part 71 and the bottom surface 720 of the lower part 72 to the mounting plate 24 respectively. The mounting plate 24 is installed on the column 21 of the center frame 20. Then, the entire transport rack 10 on which the upper part 71 and the lower part 72 are fixed is covered with a cover (S106). Then, the carriage 60 on which the transport stand 10 is fixed is pulled by the transport vehicle, and the chamber 70 is transported (S107).

In the above, the embodiment regarding the transport stand 10 and the transport method has been described. As is clear from the above description, according to the transport rack 10 of the present embodiment, the upper part 71 and the lower part 72 constituting the chamber 70 can be easily transported by one transport vehicle. Therefore, the chamber 70 can be efficiently transported.

[Others] 　　 In the above-mentioned embodiment, although the upper part 71 and the lower part 72 constituting the same chamber 70 are fixed to the conveying stand 10, the disclosed technology is not limited to this, and the different chamber 70 is constituted The upper part 71 and the lower part 72 may also be fixed. In addition, in the conveyance stand 10, the two upper parts 71 constituting the different chambers 70 may be fixed to each side of the conveyance stand 10, and the two lower parts 72 constituting the different chambers 70 may also be fixed It is fixed to each side of the conveying frame 10. In addition, only one upper part 71 or one lower part 72 may be fixed to any side surface of the transport stand 10.

In the above-mentioned embodiment, the ceiling surface 710 of the upper part 71 and the bottom surface 720 of the lower part 72 are fixed to the mounting plate 24 of the center frame 20, but the disclosed technology is not limited to this. For example, a mounting plate 24 may be provided on the column 31 or beam 32 of the side frame 30, and the side surface of the upper part 71 or the lower part 72 may be fixed to the mounting plate 24 by bolts 26 or the like.

In addition, in the above-mentioned embodiment, although the upper part 71 is fixed to the central frame 20 so that the ceiling surface 710 faces the central frame 20 side, and the lower part 71 faces the central frame 20 side so that the bottom face 720 faces the central frame 20 side. 72 is fixed to the central frame 20, but as long as the ceiling surface 710 and the bottom surface 720 are fixed to the central frame 20 in a direction along the side surface of the central frame 20, it is not limited to the above-mentioned fixing method.

For example, it is also possible to fix the upper part 71 to the transport frame 10 with the opening of the upper part 71 facing the central frame 20 side, and it is also possible to place the lower part 72 with the opening of the lower part 72 facing the central frame 20 side. It is fixed to the frame 10 for transportation. For example, a mounting plate 24 is provided on the column 31 or the beam 32 of the side frame 30, and the side surface of the upper part 71 or the lower part 72 is fixed to the mounting plate 24 by bolts 26. In this way, the upper part 71 and the lower part 72 are fixed to the conveying stand 10 so that the openings of the upper part 71 and the lower part 72 face the central frame 20 side, thereby preventing the upper part 71 from being conveyed. And the inner side of the lower part 72 is damaged or dirt adhered.

In addition, in the above-mentioned embodiment, although the processing chamber for FPD has been described as an example of the chamber 70, the disclosed technology is not limited to this. As long as it is a vacuum chamber used for manufacturing or inspection of FPD, the chamber 70 may also be a transfer chamber for FPD or a load lock chamber for FPD.

10‧‧‧Conveying stand 20‧‧‧Central frame 21‧‧‧Column 22‧‧‧Beam 23‧‧‧Support arm 24‧‧‧Mounting plate 25‧‧‧Protection pad 26‧‧‧Bolt 27‧‧‧ Lifting ring 28‧‧‧Base 30‧‧‧Side frame 31‧‧‧Column 32‧‧‧Beam 33‧‧‧Support arm 34‧‧‧ Lifting ring 35‧‧‧Mounting tool 36‧‧‧Base 37‧‧Enhancement Material 40‧‧‧Working footing 41‧‧‧Fence 50‧‧‧Ladder 51‧‧‧Handrail 52‧‧‧Ladder body 53‧‧‧Guide 54‧‧‧Slide plate 60‧‧‧Bracket 70 ‧‧‧Chamber 71‧‧‧Top part 710‧‧‧Ceiling surface 711‧‧‧Sprinkler 72‧‧‧Lower part 720‧‧‧Bottom surface 721‧‧Base 73‧‧‧Seal member 74‧‧‧Eye ring

[Fig. 1] Fig. 1 is a diagram showing an example of a transport rack.　　[Fig. 2] Fig. 2 is a diagram showing an example of a state in which the conveyance frame is fixed to the bracket of the conveyance vehicle.　　[Fig. 3] Fig. 3 is a cross-sectional view showing an example of the chamber.　　[Fig. 4] Fig. 4 is a diagram for explaining an example of the loading procedure of the chamber.　　[Figure 5] Figure 5 is an enlarged view of the vicinity of the mounting plate.　　[Fig. 6] Fig. 6 is a diagram showing an example of the state where the upper part and the lower part are fixed on the carriage for the conveyance.　　 [Fig. 7] Fig. 7 is a cross-sectional view showing an example of a transport rack in a state where the lower part of the chamber is fixed.　　[Fig. 8] Fig. 8 is a cross-sectional view showing an example of a transport stand in which the chamber is fixed.　　[Fig. 9] Fig. 9 is a plan view showing an example of a transport rack with a fixed chamber.　　 [Fig. 10] Fig. 10 is a diagram showing an example of the pulled-out state and the stored state of the ladder.　　 [Fig. 11] Fig. 11 is a flowchart showing an example of the conveying procedure of the chamber using the conveying gantry.

10‧‧‧Frame for conveying

20‧‧‧Central frame

24‧‧‧Mounting plate

25‧‧‧Protection pad

30‧‧‧Side frame

34‧‧‧Loop

35‧‧‧Installation tool

50‧‧‧Ladder

60‧‧‧Bracket

71‧‧‧Upper part

72‧‧‧Lower parts

74‧‧‧Loop

710‧‧‧Ceiling surface

720‧‧‧Bottom

Claims (13)

A conveying stand for conveying chambers that can be divided up and down. The conveying stand is characterized by: 　　 central frame extending in the first direction; 　　 two side frames, one of the aforementioned first directions Both ends of the aforementioned central frame extend in a second direction intersecting the aforementioned first direction; and a plurality of fixtures for fixing the aforementioned chamber to the aforementioned central frame, 　　 aforementioned chamber is divided into: upper parts, The ceiling surface including the aforementioned chamber; and the lower part, including the bottom surface of the aforementioned chamber, 　　 each of the plurality of fixtures is such that the aforementioned ceiling surface or the aforementioned bottom surface is in a direction along the side surface of the aforementioned central frame, and the aforementioned upper part At least any one of the parts and the lower part is fixed between the two side frames and on the side surface of the center frame. For example, the conveying stand of the first item in the scope of the patent application, wherein each of the plurality of fixtures is fixed to one of the side surfaces of the central frame by the upper part divided from one of the aforementioned chambers. The lower part divided by each chamber is fixed to the other side surface of the central frame. For example, the transport rack of the second item of the scope of patent application, in which at least a part of the plurality of fixtures is set on the central frame, and the fixture is set on the central frame, which connects the ceiling surface of the upper part with The bottom surface of the lower part is fixed to the central frame. For example, the conveying stand of any one of items 1 to 3 in the scope of the patent application is further equipped with: 　　 working footholds are set above the aforementioned central frame and the aforementioned side frames; and the drop-preventing part surrounds Use a foothold for the aforementioned tasks. For example, the conveyor frame of the fourth item in the scope of patent application, in which 　　 is provided on the aforementioned side frame with a ladder for the operator to climb up the aforementioned work foothold. For example, the conveying stand of the 5th item of the scope of patent application, in which the 　　 the aforementioned ladder is housed in the aforementioned lateral frame. For example, the conveying stand of any one of items 1 to 3 in the scope of the patent application, wherein 　　 the aforementioned central frame has: 　　 a plurality of columns extending in the vertical direction; 　　 beam extending in the aforementioned first direction; and a plurality of support arms , Is arranged obliquely between the aforementioned plural columns. For example, the conveying rack of any one of items 1 to 3 in the scope of the patent application, wherein the aforementioned chamber is a processing chamber for FPD (Flat Panel Display), a transfer chamber for FPD, or a load lock chamber for FPD room. A conveying method that conveys chambers that can be divided up and down. The conveying method is characterized by: 　　 installation process, installing a conveying stand with a central frame and two side frames on the carriage of a conveying vehicle , The central frame extends in the first direction, and the two side frames extend in the second direction intersecting the first direction at both ends of the central frame in the first direction; and , In the chamber divided into the upper part including the ceiling surface of the chamber and the lower part including the bottom surface of the chamber, so that the ceiling surface or the bottom surface is in a direction along the side surface of the central frame , Arranging at least any one of the upper part and the lower part between the two side frames and on the side of the central frame; At least one of the ceiling surface of the upper part and the bottom surface of the lower part is fixed to the side surface of the central frame; and the transportation process is to transport the upper part and the aforementioned upper part fixed to the side surface of the central frame by the transportation vehicle At least any of the lower parts. Such as the transportation method of claim 9, wherein 　　 fixes the upper part divided from one chamber to one side of the central frame by the plurality of fixtures, 　　 by the plurality of fixtures , Fix the lower part divided from one chamber to the other side surface of the central frame. For example, the conveying method of claim 10, wherein at least a part of the plurality of fixtures is set on the central frame, and the ceiling surface of the upper part is fixed by the fixture provided on the central frame The bottom surface of the lower part is fixed to the center frame. For example, the conveying method of any one of items 9 to 11 in the scope of the patent application, wherein 　　 in the aforementioned fixing project includes: 　　 pulling out the ladder housed in the aforementioned side frame; 　　 using the aforementioned ladder, the operator climbs The construction of a work footing set above the side frame and the center frame and surrounded by a fence for preventing falling; 　　 by the work of the aforementioned operator on the aforementioned work footing, the aforementioned The process of fixing at least one of the ceiling surface of the upper part of the chamber and the bottom surface of the lower part to the aforementioned central frame; and the process of using the aforementioned ladder, the operator descends from the work area and stores the ladder in the aforementioned side frame . For example, the conveying method of any one of items 9 to 11 in the scope of the patent application, wherein the aforementioned chamber is a processing chamber for FPD, a transfer chamber for FPD, or a load lock chamber for FPD.

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