TW201833012A - Transportation cradle and transportation method - Google Patents

Abstract

The present invention provides a transportation cradle and a transportation method which easily transports a chamber. The transportation cradle (10) to transport the chamber which is able to vertically be divided comprises: a center frame (20) extended in a first direction; two side frames (30) extended in a second direction crossing the first direction on both ends of a center frame (20) in the first direction; and a plurality of installation plates (24) to fixate the chamber to the center frame (20). The chamber is divided into an upper component (71) including a ceiling surface (710) of the chamber, and a lower component (72) including a bottom (720) of the chamber. Each of the plurality of installation plates (24) fixates at least one among the upper component (71) and the lower component (72) onto a side of the center frame (20) between the two side frames in order for the ceiling surface (710) or a bottom (720) to be arranged along the side of the center frame (20).

Description

Conveying stand and conveying method

Various aspects and embodiments of the present invention relate to a transport stand and a transport method.

The larger the size of the flat display substrate and the mother glass substrate is, the more the number of panels obtained from one sheet is, and therefore the cost can be reduced. Therefore, in recent years, mother glass substrates have become increasingly large. In addition, with the increase in the size of mother glass substrates, devices for manufacturing or inspecting glass substrates have also increased in size every year.

However, a device for manufacturing a flat display substrate or the like is manufactured by a manufacturer and then transported to a production site and installed. However, when the device becomes large, it becomes difficult to directly transport one device due to the size or weight.

Therefore, a technique is known in which a device is divided in a width direction or a depth direction, and the divided parts are individually conveyed and joined at a conveyance destination, whereby a large-scale device is conveyed to the conveyance destination.

[Prior Art Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open No. 2007-73688

[Problems to be Solved by the Invention]

However, most of the devices for manufacturing flat display substrates require air-tightness. However, when the devices divided in the width direction or the depth direction are rejoined, it is difficult to suppress a decrease in airtightness. Therefore, it is not good to transport the device by dividing it in the width direction or the depth direction.

It is also considered that the device is divided in the up-and-down direction. Dividing the device only in the up-and-down direction can suppress the weight of the device by dividing it, but cannot reduce the width or depth of the device. Therefore, the device protrudes from the carriage of the transportation vehicle, and it becomes difficult to transport the device. [Means to solve the problem]

One aspect of the present invention is a conveying stand for conveying a chamber that can be divided up and down, and is characterized by having a central frame extending in the first direction and two lateral frames in the first direction. The two ends of the central frame extend in a second direction crossing the first direction; and a plurality of fixtures for fixing the chamber to the central frame. The cavity is divided into: an upper part including a ceiling surface of the cavity; and a lower part including a bottom surface of the cavity. Each of the plurality of fixtures fixes at least one of the upper part and the lower part to the two side frames such that the ceiling surface or the bottom surface is oriented along the side surface of the center frame. And the sides of the aforementioned central frame. [Effect of the invention]

According to various aspects and embodiments of the present invention, the chamber can be easily conveyed.

In one embodiment, the disclosed transporting platform is used to transport a chamber that can be divided up and down. The transporting platform is characterized by having a central frame extending in the first direction and two lateral frames. , The two ends of the central frame in the first direction extend in the second direction crossing the first direction; and a plurality of fixtures for fixing the chamber to the central frame. The cavity is divided into: an upper part including a ceiling surface of the cavity; and a lower part including a bottom surface of the cavity. Each of the plurality of fixtures fixes at least one of the upper part and the lower part between the two side frames and the side surface of the center frame so that the ceiling surface or the bottom surface becomes a direction along the side surface of the center frame.

Moreover, in one embodiment of the disclosed conveyance stand, each of the plurality of fixtures may be fixed to one side of the center frame by the upper part divided from one chamber, and the one from the one The lower part divided by the chamber is fixed to the other side of the central frame.

Furthermore, in one embodiment of the disclosed transport stand, at least a part of the plurality of fixtures may be provided on the central frame, and the fixtures provided on the central frame may also be provided with the ceiling surface of the upper part and The bottom surface of the lower part is fixed to the central frame.

Furthermore, in one embodiment, the disclosed transportation stand may further include: a work stand, which is provided above the central frame and a side frame; and a fall-preventing portion, which surrounds the work stand. .

Furthermore, in one embodiment of the disclosed transport stand, a ladder may be provided on the side frame for the operator to climb up to a work stand.

Furthermore, in one embodiment of the disclosed transport stand, the ladder system can also be stored in a side frame.

Further, in one embodiment of the disclosed transporting stand, the central frame may include: a plurality of columns extending in the up-down direction; a beam extending in the first direction; and a plurality of support arms disposed obliquely on the Between a plurality of bars.

Furthermore, in one embodiment of the disclosed transport stand, the chamber may be a processing chamber for FPD (Flat Panel Display), a transport chamber for FPD, or a load lock chamber for FPD.

Also, in one embodiment, the disclosed conveying method is a method of conveying a chamber that can be divided up and down. The conveying method is characterized in that it includes a setting process and a conveying method including a central frame and two lateral frames. The center frame extends along the first direction by a gantry, and the two side frames are connected to both ends of the center frame in the first direction along the first direction crossing the first direction. Extending in 2 directions; and placement works in the chamber divided into upper parts including the ceiling surface of the chamber and lower parts including the bottom surface of the chamber so that the ceiling surface or bottom surface becomes the direction along the side of the central frame Method, at least one of the upper part and the lower part is arranged between the two side frames and the side of the center frame; the fixing process is to ceiling the upper part by a plurality of fixing devices installed on the conveying stand. At least one of the bottom surface of the surface and the lower part is fixed to the side surface of the center frame; and a conveyance process for conveying a vehicle for conveying the upper part and the lower part of the side part fixed to the center frame. At least either.

Moreover, in one embodiment of the disclosed conveying method, the upper part divided from one chamber may be fixed to one side surface of the central frame by a plurality of fixtures, and a plurality of fixtures may also be used. The fixture fixes the lower part divided from one cavity to the other side of the center frame.

Furthermore, in one embodiment of the disclosed conveying method, at least a part of the plurality of fixtures may be provided on the central frame, and the upper parts may be ceiling-mounted by the fixtures provided on the central frame. The surface and the bottom surface of the lower part are fixed to the central frame.

Furthermore, in one embodiment of the disclosed conveying method, the fixing process may include: a process of pulling out a ladder stored in a side frame; using the ladder, an operator climbs up and is installed on the side The work footing project above the frame and the central frame and surrounded by a fence for preventing fall; by the work of the operator on the work footing, the ceiling surface and the lower part of the upper part of the chamber are operated A process in which at least any one of the bottom surfaces is fixed to the central frame; and a process in which an operator descends from the work area and stores the ladder in a side frame using a ladder.

Moreover, in one embodiment of the disclosed conveying method, the chamber may be a processing chamber for FPD, a transport chamber for FPD, or a load lock chamber for FPD.

Hereinafter, embodiments of the disclosed transport stand and transport method will be described in detail based on the drawings. In addition, the disclosed transport stand and transport method are not limited by the following embodiment.

[Configuration of Transportation Stand 10] FIG. 1 is a diagram showing an example of the transportation stand 10. As shown in FIG. 1, for example, the transport stand 10 in this embodiment includes a central frame 20 extending in the y-axis direction of FIG. 1, and two lateral frames 30 as the central frame in the y-axis direction. Both ends of 20 extend in the x-axis direction. In this embodiment, the direction in which the central frame 20 extends and the direction in which each side frame 30 extends are orthogonal. The y-axis direction is an example of the first direction, and the x-axis direction is an example of the second direction.

The central frame 20, as shown in FIG. 1, for example, has: a beam 22 and a base 28 extending along the y-axis direction of FIG. 1; a plurality of columns 21 extending along the up-down direction, that is, the z-axis direction of FIG. 1; and a plurality of The support arm 23 is inclinedly disposed between the plurality of pillars 21. A plurality of mounting plates 24 are provided on the sides of the pillar 21 and the beam 22 for fixing parts of a chamber described later. By providing the support arms 23 between the columns 21, the skew of the center frame 20 in the y-axis direction in FIG. 1 is suppressed.

Each side frame 30, as shown in FIG. 1, for example, has: a beam 32 and a base 36 extending along the x-axis direction of FIG. 1; a plurality of columns 31 extending along the up-down direction, that is, the z-axis direction of FIG. The plurality of supporting arms 33 are inclinedly arranged between the pillar 31 and the beam 32 and between the pillar 31 and the base 36. The pillars 31 of the side frames 30 are each provided with a plurality of lifting rings 34 for fixing the transport stand 10 to a bracket of the transport vehicle. A reinforcing material 37 is provided between the base 36 of each side frame 30 and the base 28 of the center frame 20. Side frames 30 are provided at both ends of the central frame 20 extending in the y-axis direction. The side frames 30 extend in the x-axis direction crossing the y-axis direction, thereby improving the conveyance in the x-axis direction. The strength of the pedestal 10.

Above the center frame 20 and the side frame 30, a work stand 40 for an operator to perform work is provided. The work stand 40 is surrounded by a fence 41 for preventing workers from working on the work stand 40 from falling. The fence 41 is an example of a fall prevention part.

The side frame 30 is provided with a ladder 50 for an operator to climb up to the work stand 40. Further, in a state where the transport stand 10 is fixed to a bracket of the transport vehicle, a plurality of protective pads 25 are arranged on the side of the base 28 of the center frame 20 and on the bracket of the transport vehicle. The protective pad 25 protects a chamber described later from being placed on the protective pad 25 from being scratched or impacted.

[Method for Fixing the Transporting Shelf 10] FIG. 2 is a diagram showing an example of a state in which the transporting stand 10 is fixed to a bracket 60 of a transporting vehicle. The transport stand 10 is a bracket 60 mounted on a transport vehicle. As shown in FIG. 2, the pillars 31 of the side frames 30 are provided with a plurality of lifting rings 34 such as eye bolts, and mounting tools 35 such as chain members or belts pass through the respective lifting rings 34. In addition, the carrier 10 is fixed to the carrier 60 of the transport vehicle by the mounting tool 35 being fixed to the carrier 60.

[Configuration of Chamber 70] FIG. 3 is a cross-sectional view showing an example of the chamber 70. As shown in FIG. The cavity 70 in this embodiment includes an upper part 71 and a lower part 72. The upper part 71 and the lower part 72 can be divided up and down along the dotted line shown in FIG. 3, for example. When the upper part 71 and the lower part 72 are divided up and down, openings are formed in the lower part of the upper part 71 and the upper part of the lower part 72.

In a state where the upper part 71 and the lower part 72 are joined, in the processing space constituted by the upper part 71 and the lower part 72, a shower head 711, a base 721, and the like are provided. A sealing member 73 such as an O-ring is arranged on a joint surface between the upper part 71 and the lower part 72. Since the chamber 70 is divided up and down, when the upper part 71 and the lower part 72 are joined, the sealing member 73 is flattened by the weight of the upper part 71, and the airtightness of the processing space can be maintained high. In the following description, the upper surface of the upper component 71 is referred to as a ceiling surface 710, and the lower surface of the lower component 72 is referred to as a bottom surface 720.

The chamber 70 in this embodiment is, for example, a processing chamber for FPD. The chamber 70 is provided with a carry-in / carry-out port (not shown), and a glass substrate to be processed carried in from the carry-in / carry-out port is placed on a base 721. Then, the loading / unloading port is closed, the processing space is evacuated, and the processing gas is supplied from the shower head 711 into the processing space. Further, for example, high-frequency power of a predetermined frequency is applied between the shower head 711 and the base 721 to generate a plasma of a processing gas in the processing space. Then, a predetermined process such as film formation or etching is applied to the glass substrate to be processed by the generated plasma.

In the case of the conveyance chamber 70, the chamber 70 is divided into an upper part 71 and a lower part 72. Further, as necessary, parts such as the shower head 711 are removed from the upper part 71, and parts such as the base 721 are removed from the lower part 72. Then, using the transport stand 10 described with reference to FIG. 1, the upper part 71 and the lower part 72 are fixed to a carriage 60 of the transport vehicle and transported.

[Loading Method of Chamber 70] FIG. 4 is a diagram for explaining an example of a loading procedure of the chamber 70. First, the transport stand 10 is loaded on a carriage 60 of a transport vehicle. In addition, the fixture 35 passing through the rings 34 of the side frames 30 is fixed to the bracket 60, whereby the transportation stand 10 is fixed to the bracket 60 of the transportation vehicle. The plurality of protection pads 25 are arranged on a bracket 60 on the side of the center frame 20.

Next, each eyelet 74 is attached to the upper part 71 and the lower part 72 divided from the chamber 70. In addition, the upper part 71 is lifted by a crane or the like using a wire or the like through a ring 74, and is moved, for example, as shown by an arrow in FIG. 4 so that the ceiling surface 710 is oriented along the side surface of the center frame 20, and is disposed on the side. A bracket 60 between the square frames 30 and on the side of the center frame 20. In the present embodiment, as shown in FIG. 4, the upper part 71 is disposed on the side of the center frame 20 such that the ceiling surface 710 faces the side of the center frame 20. Then, the mounting plate 24 provided on the pillar 21 or the beam 22 of the center frame 20 and the ceiling surface 710 of the upper part 71 are fixed by bolts or the like, whereby the upper part 71 is fixed to the transport stand 10. The mounting plate 24 is an example of a fixture.

Similarly, the lower part 72 is lifted by a crane or the like using a wire rope or the like through a suspension ring 74, and is moved, for example, as shown by an arrow in FIG. A bracket 60 between the square frames 30 and on the side of the center frame 20. In the present embodiment, as shown in FIG. 4, the lower part 72 is disposed on the side of the center frame 20 such that the bottom surface 720 faces the side of the center frame 20. Further, the mounting plate 24 provided on the pillar 21 or the beam 22 of the center frame 20 and the bottom surface 720 of the lower part 72 are fixed by bolts or the like, whereby the lower part 72 is fixed to the transport stand 10.

FIG. 5 is an enlarged view of the vicinity of the mounting plate 24. FIG. 5 shows a state where the lower part 72 is fixed to a mounting plate 24 which is provided on the beam 22 of the center frame 20. For example, as shown in FIG. 5, the bottom surface 720 of the lower part 72 is fixed to the mounting plate 24 through a through-hole provided in the mounting plate 24 with a bolt 26. The bottom surface 720 fixes the mounting plate 24 installed on the beam 22 by an operator on the work stand 40. In addition, the bottom surface 720 of the lower part 72 is fixed to the mounting plate 24 provided on the pillar 21 of the center frame 20 by bolts 26. The same applies to the fixing of the ceiling surface 710 of the upper part 71 to the mounting plate 24.

In addition, as shown in FIG. 5, for example, the center frame 20 is provided with a plurality of rings 27. The transport stand 10 is a bracket 60 that is hoisted by a crane or the like using a wire rope or the like passing through each of the rings 27 and is loaded on the transport vehicle.

For example, as shown in FIG. 6 to FIG. 9, a state in which the upper part 71 and the lower part 72 are fixed to the transport stand 10 is illustrated. FIG. 6 is a diagram showing an example of a state in which the upper part 71 and the lower part 72 are fixed to the transport stand 10 on the bracket 60. FIG. 7 is a cross-sectional view showing an example of the transport stand 10 in a state where the lower part 72 of the chamber 70 is fixed. FIG. 8 is a cross-sectional view showing an example of the transport stand 10 to which the chamber 70 is fixed. FIG. 9 is a plan view showing an example of the transport stand 10 to which the chamber 70 is fixed.

In this way, the upper part 71 is arranged on the side of the center frame 20 so that the ceiling surface 710 of the upper part 71 faces the center frame 20 side, and the bottom surface 720 of the lower part 72 is faced on the center frame 20 side. The lower part 72 is disposed on the side of the center frame 20, so that the upper part 71 and the lower part 72 can be easily fixed to the center frame 20. In addition, the upper part 71 and the lower part 72 are arranged so that the ceiling surface 710 and the bottom surface 720 face the center frame 20 side, so that when the upper frame 71 and the lower part 72 are fixed to the center frame 20, the operator does not It is necessary to touch the inside of the upper part 71 and the lower part 72. Therefore, during the fixing operation of the upper part 71 and the lower part 72, it is possible to prevent the inside of the upper part 71 and the lower part 72 from being damaged or dirt from being attached.

In addition, each mounting plate 24 is formed with one or a plurality of through holes so as to correspond to the respective screw holes of the upper part 71 and the lower part 72. With this, even when either of the upper part 71 and the lower part 72 is arranged, the upper part 71 or the lower part 72 and the mounting plate 24 can be fixed by the bolts 26. Therefore, in the conveyance gantry 10 of this embodiment, either the upper part 71 or the lower part 72 can be fixed to either side of the side surface of the center frame 20. In addition, the transport stand 10 of this embodiment can also fix two upper parts 71 to the center frame 20 and two lower parts 72 to the center frame 20.

A cross section in a state where the upper part 71 and the lower part 72 are fixed to the mounting plate 24 of the center frame 20 is, for example, as shown in FIG. 8. In addition, the state in which the upper part 71 and the lower part 72 are fixed to the mounting plate 24 of the center frame 20 when viewed from above is, for example, as shown in FIG. 9. As shown in FIGS. 8 and 9, in a state where the upper part 71 and the lower part 72 are fixed to the center frame 20, the widths of the upper part 71, the lower part 72, and the center frame 20 are narrower than the width of the bracket 60. . In this way, the upper part 71 and the lower part 72 of the vertically divided chamber 70 are horizontally loaded, whereby the width of the entire chamber 70 including the transport stand 10 can be suppressed to the width of the bracket 60. Therefore, by using the conveyance gantry 10 of this embodiment, even if it is a large chamber 70, it can be conveyed easily using a conveyance vehicle.

In addition, in this embodiment, the entire width of the cargo including the center frame 20, the upper part 71, and the lower part 72 is approximately 2 meters, and the width of the bracket 60 is approximately 2.49 meters. Therefore, the width of the entire cargo including the bracket 60 is less than 2.5 meters. Here, when the overall width of the cargo including the bracket 60 is 2.5 meters or more, the road traffic law stipulates that the cargo must be broken down into the smallest unit that can maintain the function of the cargo. So-called "bulk regulations." Therefore, when the width of the entire cargo including the bracket 60 exceeds 2.5 meters, the chamber 70 cannot be transported by one transport vehicle, and the transport efficiency is lowered.

On the other hand, in the conveying method using the conveyance stand 10 in the present embodiment, since the width of the entire cargo including the carriage 60 is less than 2.5 meters, it does not comply with the "Bulk Regulations" and can be used for one unit. The transportation vehicle transports the upper part 71 and the lower part 72 which constitute one chamber 70. Therefore, the conveyance efficiency of the chamber 70 can be improved.

The ladder 50 provided in the side frame 30 can be stored in the side frame 30 as shown in FIG. 10, for example. FIG. 10 is a diagram showing an example of a pulled-out state and a stored state of the ladder 50. The ladder 50 includes a handrail 51, a ladder body 52, and a guide 53 as shown in FIG. 10, for example. The ladder body 52 moves the slide plates 54 provided on both sides of the upper part along the guide 53, whereby the ladder body 52 can be stored along the side frame 30 or the ladder body 52 can be pulled out obliquely.

For example, by moving the slide plate 54 of the ladder body 52 downward along the guide 53, as shown in the figure on the left side of FIG. 10, the ladder body 52 can be pulled out. With this, the operator can climb up the ladder 50 and perform work on the work stand 40. In addition, for example, by moving the slide plate 54 of the ladder body 52 upward along the guide 53, the ladder body 52 can be stored in the side frame 30 as shown in the figure on the right side of FIG. 10. Since the ladder body 52 can be stored in the side frame 30, the ladder 50 can be transported together with the upper part 71 and the lower part 72. Thereby, whenever the upper part 71 and the lower part 72 are fixed to the conveyance stand 10 or are detached from the conveyance stand 10, the work of preparing a ladder separately can be saved. Therefore, the fixing of the upper part 71 and the lower part 72 to the conveyance stand 10 can be performed quickly.

[Conveyance Procedure] FIG. 11 is a flowchart showing an example of a conveyance procedure using the chamber 70 of the conveyance stand 10.

First, the transport stand 10 is set on a carriage 60 of a transport vehicle (S100). Specifically, for example, as shown in FIG. 2, the transportation rack 10 is mounted on the bracket 60, and the bracket 35 is fixed to the bracket 60 by the mounting tool 35 of the ring 34 of the side frame 30. It is installed in the bracket 60 of a conveyance vehicle. The plurality of protection pads 25 are arranged on a bracket 60 on the side of the center frame 20.

Next, the upper part 71 and the lower part 72 divided from the chamber 70 are respectively arranged on the bracket 60 between the side frames 30 and the side of the center frame 20 (S101). Specifically, for example, as shown in FIG. 4, the upper part 71 and the lower part 72 are each lifted by a crane or the like using a steel cable or the like that passes through the ring 74. The upper part 71 is disposed on the side of the center frame 20 so that the ceiling surface 710 faces the center frame 20 side, and the lower part 72 is disposed on the side so that the bottom surface 720 faces the center frame 20 side. Side of the central frame 20.

Next, the ladder 50 stored in the side frame 30 is pulled out (S102). Specifically, the slide plate 54 provided on the ladder body 52 is moved downward along the guide 53 provided on the side frame 30, whereby, for example, the ladder body is shown in a diagram on the left side of FIG. 10 52 was pulled out.

Next, the worker climbs up to the work stand 40 on the center frame 20 and the side frame 30 using the ladder 50 (S103). In addition, the operator fastens the ceiling surface 710 of the upper part 71 and the bottom surface 720 of the lower part 72 to the mounting foot 24 using the bolts 26 on the work footing 40. The mounting board 24 is installed at the center. Beam 22 of frame 20 (S104).

Next, the worker uses the ladder 50 pulled out in step S102 to come down from the work stand 40 and stores the ladder 50 in the side frame 30 (S105). Specifically, the slide plate 54 provided on the ladder body 52 is moved upward along the guide 53 provided on the side frame 30, whereby, for example, the ladder body is shown in the figure on the right side of FIG. 10 52 is stored in the side frame 30.

Next, the operator uses bolts 26 to fix the ceiling surface 710 of the upper part 71 and the bottom surface 720 of the lower part 72 to the mounting plate 24 respectively, and the mounting plate 24 is installed on the column 21 of the center frame 20. Then, the entire upper part 71 and the lower part 72 are fixed by the cover with the transport stand 10 fixed (S106). Then, the carrier 60 to which the transport stand 10 is fixed is pulled by the transport vehicle, and the chamber 70 is transported (S107).

The embodiments of the transport stand 10 and the transport method have been described above. As is clear from the above description, according to the transport stand 10 of this embodiment, the upper part 71 and the lower part 72 constituting one chamber 70 can be easily transported by one transport vehicle. Therefore, the chamber 70 can be efficiently conveyed.

[Others] In the embodiment described above, although the upper part 71 and the lower part 72 constituting the same chamber 70 are fixed to the transport stand 10, the disclosed technology is not limited to this. The upper part 71 and the lower part 72 may be fixed. Further, in the transport stand 10, two upper parts 71 constituting different chambers 70 may be fixed to each side of the transport stand 10, and two lower parts 72 constituting different chambers 70 may also be fixed. It is fixed to each side of the conveyance stand 10. In addition, only one upper part 71 or one lower part 72 may be fixed to either side of the transport stand 10.

In the above-mentioned embodiment, although the ceiling surface 710 of the upper component 71 and the bottom surface 720 of the lower component 72 are fixed to the mounting plate 24 of the center frame 20, the disclosed technology is not limited to this. For example, a mounting plate 24 may be provided on the pillar 31 or beam 32 of the side frame 30, and the side surface of the upper part 71 or the lower part 72 may be fixed to the mounting plate 24 by bolts 26 or the like.

In the above-mentioned embodiment, the upper part 71 is fixed to the center frame 20 so that the ceiling surface 710 faces the center frame 20 side, and the lower part is fixed so that the bottom surface 720 faces the center frame 20 side. 72 is fixed to the center frame 20, but it is not limited to the above-mentioned fixing method as long as the ceiling surface 710 and the bottom surface 720 are fixed to the center frame 20 in a direction along the side surface of the center frame 20.

For example, the upper part 71 may be fixed to the transport frame 10 such that the opening of the upper part 71 faces the center frame 20 side, and the lower part 72 may be oriented such that the opening of the lower part 72 faces the center frame 20 side. It is fixed to the transport stand 10. For example, a mounting plate 24 is provided on the pillar 31 or the beam 32 of the side frame 30, and the side surfaces of the upper part 71 or the lower part 72 are fixed to the mounting plate 24 by bolts 26. In this way, the upper part 71 and the lower part 72 are fixed to the conveyance gantry 10 so that the openings of the upper part 71 and the lower part 72 face the center frame 20 side, thereby preventing the upper part 71 during transportation. And the inside of the lower part 72 is damaged or dirt adheres.

Moreover, in the above-mentioned embodiment, although the processing chamber for FPD was demonstrated as the chamber 70 as an example, the technique disclosed is not limited to this. As long as it is a vacuum chamber used for manufacturing or inspection of the FPD, the chamber 70 may be a transport chamber for the FPD or a load lock chamber for the FPD.

10‧‧‧Conveyor stand

20‧‧‧ Central Frame

21‧‧‧columns

22‧‧‧Beam

23‧‧‧ Arm

24‧‧‧Mounting plate

25‧‧‧ protection pad

26‧‧‧ Bolt

27‧‧‧Eyebolt

28‧‧‧ substrate

30‧‧‧ side frame

31‧‧‧columns

32‧‧‧ Liang

33‧‧‧ Arm

34‧‧‧ Ring

35‧‧‧Mounting Tools

36‧‧‧ substrate

37‧‧‧ Reinforcement

40‧‧‧ Foothold for Operation

41‧‧‧ Fence

50‧‧‧ ladder

51‧‧‧Handrail

52‧‧‧ ladder body

53‧‧‧Guide

54‧‧‧ sliding board

60‧‧‧ Bracket

70‧‧‧ chamber

71‧‧‧upper parts

710‧‧‧Ceiling surface

711‧‧‧Nozzle

72‧‧‧ lower part

720‧‧‧ underside

721‧‧‧ base

73‧‧‧sealing member

74‧‧‧ Ring

[Fig. 1] Fig. 1 is a diagram showing an example of a transport stand. [Fig. 2] Fig. 2 is a diagram showing an example of a state in which a transportation stand is fixed to a bracket of a transportation vehicle. [Fig. 3] Fig. 3 is a sectional view showing an example of a chamber. [Fig. 4] Fig. 4 is a diagram for explaining an example of a loading procedure of a chamber.图 [Fig. 5] Fig. 5 is an enlarged view of the vicinity of the mounting plate. [Fig. 6] Fig. 6 is a diagram showing an example of a state of a conveyance stand in which an upper part and a lower part are fixed to a bracket. [Fig. 7] Fig. 7 is a cross-sectional view showing an example of a conveyance stand in a state where the lower part of the chamber is fixed. [Fig. 8] Fig. 8 is a cross-sectional view showing an example of a transport stand with a chamber fixed. [Fig. 9] Fig. 9 is a plan view showing an example of a transport stand to which a chamber is fixed. [Fig. 10] Fig. 10 is a diagram showing an example of a pulled-out state and a stored state of a ladder. [Fig. 11] Fig. 11 is a flowchart showing an example of a transportation procedure using a chamber of a transportation stand.

Claims (13)

A conveying stand for conveying a chamber which can be divided up and down. The conveying stand is characterized by having: a central frame extending in a first direction; 2 lateral frames in the first direction; The two ends of the central frame extend in a second direction that intersects the first direction; and a plurality of fixtures for fixing the chamber to the central frame. The chamber is divided into: an upper part, A ceiling surface including the cavity; and a lower part including the bottom surface of the cavity, each of the plurality of fixtures is such that the ceiling surface or the bottom surface becomes a direction along the side of the central frame, and the upper portion At least one of the component and the lower component is fixed between the two side frames and a side surface of the center frame. For example, for the conveyance stand of the first patent application range, wherein: each of the plurality of fixtures is fixed to the side of one of the central frames from the upper part divided from one of the chambers, and from the above 1 The lower part divided by each chamber is fixed to the other side of the central frame. For example, at least one part of the plurality of fixtures is provided on the central frame, and the fixture is provided on the central frame, and the ceiling surface of the upper part and The bottom surface of the lower part is fixed to the central frame. For example, the transport stand according to any of claims 1 to 3 of the scope of patent application, further comprising: a work stand, which is provided above the central frame and the side frame; A foothold for the aforementioned operation. For example, the conveying platform of the scope of application for patent No. 4 wherein, On the side frame, a ladder is provided for the operator to climb up to the above-mentioned work stand. For example, the transportation platform according to item 5 of the patent application, wherein: the ladder is housed in the side frame. For example, the transport stand according to any one of claims 1 to 3, wherein: the central frame has: a plurality of columns extending in the up-down direction; beams extending in the aforementioned first direction; and a plurality of support arms Is tilted between the plurality of columns. For example, the conveying stand according to any one of claims 1 to 3, wherein: 申请 The aforementioned chamber is a processing chamber for FPD (Flat Panel Display), a transport chamber for FPD, or a load lock chamber for FPD room. A conveying method is used for conveying a chamber which can be divided up and down. The conveying method is characterized in that it includes: (1) a set-up project, in which a conveying stand having a central frame and two side frames is set on a carriage of a conveying vehicle The central frame extends in the first direction, and the two side frames extend at the two ends of the central frame in the first direction, and extend in the second direction that intersects the first direction; and the configuration project In the chamber divided into an upper part including a ceiling surface of the chamber and a lower part including a bottom surface of the chamber, so that the ceiling surface or the bottom surface becomes a direction along a side surface of the central frame , At least one of the upper part and the lower part is arranged between the two side frames and the side of the central frame; a fixing process, by using a plurality of fixtures provided on the conveyance rack, At least one of the ceiling surface of the upper part and the bottom surface of the lower part is fixed to the side of the central frame; and a transportation project, Conveying the transport vehicle to the upper part and the lower part of the center part is fixed to the side surface of the frame at least any one. For example, the conveying method of the ninth scope of the patent application, wherein: the plurality of fixtures are used to fix the upper part divided from one of the chambers to one side of the central frame, and is used by the plurality of fixtures And fixing the lower part divided from one cavity to the other side of the central frame. For example, the conveying method of the tenth aspect of the patent application, wherein: 的 at least a part of the plurality of fixtures is provided on the central frame, and the ceiling surface of the upper part is provided by the fixtures provided on the central frame. The bottom surface of the lower part is fixed to the central frame. For example, the conveying method according to any one of the items 9 to 11 of the scope of patent application, wherein: The aforementioned fixed project includes: 工程 a process of pulling out a ladder stored in the aforementioned side frame; using the aforementioned ladder, an operator climbs Work on a work stand that is set above the side frame and the center frame and surrounded by a fence to prevent falling; the work of the operator on the work stand, A project in which at least one of the ceiling surface of the upper part and the bottom surface of the lower part is fixed to the central frame; and a project in which the operator descends from the work area and stores the ladder in the side frame using the ladder . For example, the conveying method according to any one of claims 9 to 11, wherein: (1) The aforementioned chamber is a processing chamber for FPD, a transport chamber for FPD, or a load lock chamber for FPD.