TWI719238B - Article transport device - Google Patents

Article transport device Download PDF

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Publication number
TWI719238B
TWI719238B TW106127610A TW106127610A TWI719238B TW I719238 B TWI719238 B TW I719238B TW 106127610 A TW106127610 A TW 106127610A TW 106127610 A TW106127610 A TW 106127610A TW I719238 B TWI719238 B TW I719238B
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Taiwan
Prior art keywords
moving
support
holding
state
article
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TW106127610A
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Chinese (zh)
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TW201811645A (en
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富田大地
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日商大福股份有限公司
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0492—Storage devices mechanical with cars adapted to travel in storage aisles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67733—Overhead conveying
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67754—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber horizontal transfer of a batch of workpieces

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Carriers, Traveling Bodies, And Overhead Traveling Cranes (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

於支撐體上具備有：藉由支撐操作體而被移動的移動部、相對於移動部在上下方向上移動自如地連結於移動部並且懸吊支撐物品的支撐部、介於移動部與支撐部之間的彈性部、保持支撐部的保持部、及切換保持部的狀態之切換部，切換部可將保持部的狀態切換成保持狀態與保持解除狀態，該保持狀態是相對於移動部將支撐部保持在預定的位置之狀態，該保持解除狀態是解除對支撐部的保持而將支撐部設為相對於移動部在上下方向上移動自如的狀態。The supporting body is provided with a moving part moved by supporting the operating body, a supporting part connected to the moving part movably in the vertical direction relative to the moving part, and a supporting part suspended and supporting the article, interposed between the moving part and the supporting part Between the elastic part, the holding part holding the support part, and the switching part that switches the state of the holding part, the switching part can switch the state of the holding part to the holding state and the holding release state. The holding state is to support the moving part A state in which the support portion is held at a predetermined position, and the holding release state is a state where the support of the support portion is released and the support portion is freely movable in the vertical direction with respect to the moving portion.

Description

物品搬送裝置Article conveying device

發明領域 Invention field

本發明是有關於一種物品搬送裝置，其具備有沿著移動方向移動的移動體、被前述移動體支撐且支撐物品的支撐體、使前述支撐體相對於前述移動體在上下方向上移動的支撐操作體。 The present invention relates to an article conveying device that includes a moving body that moves in a moving direction, a support body that is supported by the moving body and supports the article, and a support that moves the support body in the vertical direction relative to the moving body. Operation body.

發明背景 Background of the invention

所述物品搬送裝置的以往的例子已記載在日本專利特開2016-094263號公報(專利文獻1)上。在專利文獻1的物品搬送裝置中，在支撐體(支撐機構23)中於上下方向上移動自如地具備有移動部(升降體31)與支撐部(搬送物支撐部32)，且藉由支撐操作體(升降操作機構24)使移動部在上下方向上移動，並藉由支撐部來懸吊支撐物品。並且，在移動部與支撐部之間具備有彈性部(緩衝體36)，當移動體移動時藉由彈性部來吸收移動體上產生的振動，藉此來抑制振動傳達到支撐部所支撐的物品之情形。 The conventional example of the article conveying device is described in Japanese Patent Laid-Open No. 2016-094263 (Patent Document 1). In the article transport device of Patent Document 1, the support body (support mechanism 23) is movably provided with a moving part (elevating body 31) and a support part (conveyor support part 32) in the vertical direction, and is supported by The operating body (the up-and-down operating mechanism 24) moves the moving part in the vertical direction, and the supporting part suspends and supports the article. In addition, an elastic part (buffer 36) is provided between the moving part and the supporting part. When the moving body moves, the elastic part absorbs the vibration generated on the moving body, thereby preventing the vibration from being transmitted to the supporting part. The condition of the item.

發明概要 Summary of the invention

課題、用以解決課題之手段 Problem, the means to solve the problem

在如上述的物品搬送裝置中，藉由支撐操作體使移動部在上下方向上移動來使物品移動到移載地點的情況下，所要求的是使物品正確地移動到移載地點。但是，若為了更適當地抑制傳達到物品的振動，而使用容易彈性變形的彈性部或大型的彈性部時，會使支撐部變得容易相對於移動部移動。因此，當藉由支撐操作體使移動部在上下方向上移動，來使物品移動到移載地點的情況下，會難以使物品正確地移動到移載地點。 In the article conveying device as described above, when the article is moved to the transfer location by supporting the operating body to move the moving part in the vertical direction, what is required is to move the article to the transfer location accurately. However, in order to more appropriately suppress the vibration transmitted to the article, if an elastic part that is easily elastically deformed or a large-sized elastic part is used, the support part will easily move relative to the moving part. Therefore, when the article is moved to the transfer location by supporting the operating body to move the moving part in the vertical direction, it is difficult to accurately move the article to the transfer location.

於是，所要求的是，可抑制移動體移動時於移動體上產生的振動傳達到物品的情形，並且可容易地於使移動部移動時使物品移動到移載地點的物品搬送裝置。 Therefore, what is required is an article conveying device that can suppress transmission of vibrations generated on the mobile body when the mobile body moves to the article, and can easily move the article to the transfer location when the moving part is moved.

物品搬送裝置的特徵構成在於下述之點，並具備：移動體，沿著移動方向移動；支撐體，被前述移動體支撐且支撐物品；及支撐操作體，使前述支撐體相對於前述移動體在上下方向上移動，前述支撐體具備：藉由前述支撐操作體而被移動的移動部、相對於前述移動部在上下方向上移動自如地連結於前述移動部並且懸吊支撐物品的支撐部、介於前述移動部與前述支撐部之間且在上下方向上彈性變形自如的彈性部、保持前述支撐部的保持部、及切換前述保持部的狀態之切換部， 前述切換部是將前述保持部的狀態切換成保持狀態與保持解除狀態，該保持狀態是相對於前述移動部將前述支撐部保持在預定的位置之狀態，該保持解除狀態是解除對前述支撐部的保持而使前述支撐部相對於前述移動部在上下方向上移動自如的狀態。 The article conveying device is characterized by the following points, and is provided with: a moving body that moves along the moving direction; a support body that is supported by the moving body and supports the article; and a support operation body that makes the support body relative to the moving body Moving in the vertical direction, the support body includes: a moving part that is moved by the supporting operation body, a support part that is movably connected to the moving part in the vertical direction relative to the moving part, and suspends and supports the article, An elastic part that is interposed between the moving part and the support part and is elastically deformable in the vertical direction, a holding part holding the support part, and a switching part that switches the state of the holding part, The switching portion is to switch the state of the holding portion to a holding state and a holding release state, the holding state is a state in which the support portion is held at a predetermined position with respect to the moving portion, and the holding release state is to release the support to the support portion. The state in which the support portion is free to move in the vertical direction with respect to the moving portion.

根據此特徵構成，藉由將保持部切換成保持解除狀態，即變得可使支撐部相對於移動部彈性地在上下方向上移動，藉由將保持部切換成保持狀態，可將支撐部相對於移動部保持在預定的位置。 According to this characteristic structure, by switching the holding part to the holding release state, the support part can be elastically moved in the vertical direction relative to the moving part, and by switching the holding part to the holding state, the support part can be opposed to The moving part is kept at a predetermined position.

因此，當移動體移動時，藉由將保持部切換成保持解除狀態，移動部移動時於移動部上產生的振動即可以藉由彈性部來吸收。因此，可以抑制於移動部上產生的振動傳達到物品的情形。又，當移動部移動時，藉由將保持部切換成保持狀態，即可以限制支撐部相對於移動部移動的情形。從而，在藉由支撐操作體使移動部在上下方向上移動來使物品移動到移載地點的情況下，可容易地使物品正確地移動到移載地點。 Therefore, when the moving body moves, by switching the holding part to the holding release state, the vibration generated on the moving part when the moving part moves can be absorbed by the elastic part. Therefore, it is possible to suppress transmission of the vibration generated in the moving part to the article. Moreover, when the moving part moves, by switching the holding part to the holding state, it is possible to restrict the movement of the supporting part relative to the moving part. Therefore, when the article is moved to the transfer location by supporting the operating body to move the moving part in the vertical direction, the article can be easily moved to the transfer location accurately.

像這樣，即可以提供一種物品搬送裝置，該物品搬送裝置可以抑制移動體移動時於移動體上產生的振動傳達到物品的情形，並且可容易地於使移動部移動時使物品移動到移載地點。 In this way, it is possible to provide an article transport device that can suppress the vibration generated on the mobile body when the mobile body moves from being transmitted to the article, and can easily move the article to the transfer when the moving part is moved. location.

物品搬送裝置的特徵構成在於下述之點，並具備：移動體，沿著移動方向移動； 支撐體，被前述移動體支撐且支撐物品；及支撐操作體，使前述支撐體相對於前述移動體在上下方向上移動，前述移動體具備：具備有車輪的第2移動部、相對於前述第2移動部在上下方向上移動自如地被連結且支撐前述支撐體的第2支撐部、介於前述第2移動部與前述第2支撐部之間且在上下方向上彈性變形自如的第2彈性部、保持前述第2支撐部的第2保持部、及切換前述第2保持部的狀態之第2切換部，前述第2切換部是將前述第2保持部的狀態切換成第2保持狀態及第2保持解除狀態，該第2保持狀態是相對於前述第2移動部將前述第2支撐部保持在預定的位置之狀態，該第2保持解除狀態是解除對前述第2支撐部的保持而使前述第2支撐部相對於前述第2移動部在上下方向上移動自如的狀態。 The characteristic structure of the article conveying device lies in the following points, and is provided with: a moving body that moves along the moving direction; The support body is supported by the mobile body and supports the article; and the support operation body moves the support body in the vertical direction relative to the mobile body, and the mobile body includes: a second moving part provided with wheels and a second moving part with respect to the first 2 The moving part is movably connected in the vertical direction and supports the second support part of the support body, and the second elasticity that is interposed between the second moving part and the second support part and is elastically deformable in the vertical direction Section, a second holding section for holding the second support section, and a second switching section for switching the state of the second holding section, the second switching section switches the state of the second holding section to the second holding state and The second holding released state is a state in which the second support portion is held at a predetermined position with respect to the second moving portion, and the second holding released state is a state in which the holding of the second support portion is released. A state in which the second support portion is free to move in the vertical direction with respect to the second moving portion.

根據此構成，藉由將第2保持部切換成第2保持解除狀態，即變得可使第2支撐部相對於第2移動部彈性地在上下方向上移動，藉由將第2保持部切換成保持狀態，可將第2支撐部相對於第2移動部保持在預定的位置。 According to this structure, by switching the second holding portion to the second holding release state, the second support portion can be elastically moved in the vertical direction relative to the second moving portion, and by switching the second holding portion In the holding state, the second support portion can be held at a predetermined position with respect to the second moving portion.

因此，當第2移動體移動時，藉由將第2保持部切換成保持解除狀態，第2移動部移動時於第2移動部上產生的振動即可以藉由第2彈性部來吸收。據此，可以抑制於第2移動部上產生的振動傳達到物品的情形。又，當第2移動部移動時，藉由將第2保持部切換成保持狀態，即可以限制 第2支撐部相對於第2移動部移動的情形。從而，在藉由支撐操作體使移動體在上下方向上移動來使物品移動到移載地點的情況下，可容易地使物品正確地移動到移載地點。 Therefore, when the second moving body moves, by switching the second holding part to the holding release state, the vibration generated in the second moving part when the second moving part moves can be absorbed by the second elastic part. According to this, it is possible to suppress transmission of the vibration generated in the second moving part to the article. In addition, when the second moving part moves, by switching the second holding part to the holding state, it is possible to restrict When the second support part moves relative to the second moving part. Therefore, when the article is moved to the transfer location by supporting the operating body to move the moving body in the vertical direction, the article can be easily moved to the transfer location accurately.

像這樣，即可以提供一種物品搬送裝置，該物品搬送裝置可以抑制移動體移動時於移動體上產生的振動傳達到物品的情形，並且可容易地於使支撐體移動時使物品移動到移載地點。 In this way, it is possible to provide an article transport device that can suppress the vibration generated on the mobile body when the mobile body moves from being transmitted to the article, and can easily move the article to the transfer when the support body is moved. location.

1:物品搬送車(物品搬送裝置) 1: Item transport vehicle (item transport device)

2:軌道 2: track

3:處理裝置 3: Processing device

4:支撐台 4: support table

15:行走部 15: Walking part

15F:前行走部 15F: Front walking part

15R:後行走部 15R: Rear walking part

16:本體部 16: body part

18:行走用馬達 18: Walking motor

19:行走輪 19: walking wheel

21:基部 21: Base

22:支撐機構(支撐體) 22: Support mechanism (support body)

23:升降操作機構(支撐操作體) 23: Lifting operating mechanism (supporting operating body)

24:罩體 24: Hood

30:繩狀體 30: Rope body

31:捲繞體 31: winding body

32:升降用馬達 32: Lifting motor

34:把持用馬達 34: Control motor

35:把持爪 35: Holding Claw

36:卡合部 36: Snap part

38:移動部 38: Mobile Department

38a:第1部分 38a: Part 1

39:支撐部 39: Support

39a:第2部分 39a: Part 2

40:彈性部 40: Elastic part

42:被連接部 42: connected part

43:底板 43: bottom plate

43a:貫穿孔 43a: Through hole

44:罩蓋 44: Cover

44a:第1孔 44a: Hole 1

44b:第2孔 44b: second hole

46:驅動部 46: Drive

47:升降板 47: Lifting board

47a:塊體 47a: block

48:保持用支撐部 48: Holding part

49:解除用凹部 49: Recess for release

51:保持部 51: holding part

51a:第1滾輪 51a: 1st roller

52:切換用汽缸(切換部) 52: Cylinder for switching (switching part)

53:連桿體 53: connecting rod body

53a:第2滾輪(被操作部) 53a: 2nd roller (operated part)

53b:第3滾輪(操作部) 53b: 3rd roller (operation part)

54:連桿支撐體 54: connecting rod support

55:按壓部 55: pressing part

61:第2移動部 61: The second mobile part

62:第2支撐部 62: The second support part

63:第2彈性部 63: The second elastic part

64:第2保持部 64: The second holding part

65:第2切換部 65: The second switching part

A:移動體 A: Moving body

H:控制部 H: Control Department

W:容器(物品) W: container (item)

Wa:凸緣部 Wa: Flange

Wb:容器本體部 Wb: Container body part

Wo:凹部 Wo: recess

圖1是物品搬送設備的側面圖。 Fig. 1 is a side view of the article conveying equipment.

圖2是物品搬送設備的側面圖。 Fig. 2 is a side view of the article conveying equipment.

圖3是物品搬送車的側面圖。 Fig. 3 is a side view of the article transport vehicle.

圖4是位於行走用位置的支撐機構之縱剖側面圖。 Fig. 4 is a longitudinal cross-sectional side view of the support mechanism at the walking position.

圖5是位於移載用位置的支撐機構之縱剖側面圖。 Fig. 5 is a longitudinal sectional side view of the support mechanism at the transfer position.

圖6是支撐機構之橫切平面圖。 Figure 6 is a cross-sectional plan view of the supporting mechanism.

圖7是保持部被切換為保持解除狀態之支撐機構的縱剖正面圖。 Fig. 7 is a longitudinal sectional front view of the supporting mechanism in which the holding portion is switched to the holding released state.

圖8是保持部被切換為保持狀態之支撐機構的縱剖正面圖。 Fig. 8 is a longitudinal sectional front view of the supporting mechanism in which the holding portion is switched to the holding state.

圖9是位於切換用位置的支撐機構之部分縱剖側面圖。 Fig. 9 is a partial longitudinal sectional side view of the support mechanism at the switching position.

圖10是位於行走用位置的支撐機構之部分縱剖側面圖。 Fig. 10 is a partial longitudinal sectional side view of the support mechanism at the walking position.

圖11是其他實施形態(1)的保持部被切換為保持解除狀態之支撐機構的縱剖正面圖。 Fig. 11 is a vertical sectional front view of the supporting mechanism in which the holding portion of the other embodiment (1) is switched to the holding released state.

圖12是其他實施形態(1)的保持部被切換為保持狀態之支撐機構的縱剖正面圖。 Fig. 12 is a longitudinal sectional front view of the supporting mechanism in which the holding portion of the other embodiment (1) is switched to the holding state.

用以實施發明之形態 The form used to implement the invention

以下根據圖式來說明具備有物品搬送裝置的物品搬送設備之實施形態。 Hereinafter, an embodiment of an article conveying device equipped with an article conveying device will be explained based on the drawings.

如圖1及圖2所示，物品搬送設備中具備有物品搬送車1、軌道2及處理裝置3。軌道2是沿行走路徑設置，並被天花板懸吊支撐。物品搬送車1是沿著行走路徑在軌道2上行走來搬送容器W。物品搬送車1相當於物品搬送裝置。處理裝置3是對容器W進行處理的裝置，且是設置在地面上。以相鄰於此處理裝置3的狀態而設置有支撐台4。 As shown in FIGS. 1 and 2, the article transport facility includes an article transport vehicle 1, a rail 2, and a processing device 3. The track 2 is arranged along the walking path and is suspended and supported by the ceiling. The article transport vehicle 1 travels on the rail 2 along a traveling path to transport the container W. The article transport vehicle 1 corresponds to an article transport device. The processing device 3 is a device for processing the container W, and is installed on the ground. A support stand 4 is provided in a state adjacent to this processing device 3.

容器W可收納複數片基板，且是裝卸自如地具備有封閉基板的搬出搬入口之蓋的容器，相當於物品。在本實施形態中，是將基板作為半導體晶圓，並將收容該半導體晶圓之FOUP(前開式晶圓傳送盒(Front Opening Unified Pod))作為容器W。 The container W can accommodate a plurality of substrates, and is a container that is detachably provided with a lid that closes the carry-out port of the substrate and corresponds to an article. In this embodiment, the substrate is used as a semiconductor wafer, and the FOUP (Front Opening Unified Pod) that houses the semiconductor wafer is used as the container W.

如圖3至圖5所示，在容器W中具備有：設置在容器W的上端部且被支撐於物品搬送車1的支撐機構22之凸緣部Wa、位於比凸緣部Wa更下方並收容複數片基板的容器本體部Wb、及將形成於容器本體部Wb的前面之取出放入基板用的基板出入口關閉之裝卸自如的蓋體(未圖示)。順帶一提，物品搬送車1是以懸吊支撐凸緣部Wa的狀態來搬送容器W。 As shown in FIGS. 3 to 5, the container W is provided with: a flange portion Wa provided at the upper end of the container W and supported by the support mechanism 22 of the article transport vehicle 1, located below the flange portion Wa and The container body Wb that houses a plurality of substrates, and a detachable lid (not shown) that closes the substrate entrance and exit for taking out and placing the substrates formed on the front surface of the container body Wb. Incidentally, the article transport vehicle 1 transports the container W in a state where the flange portion Wa is suspended and supported.

如圖4及圖5所示，在凸緣部Wa的上表面(容器W的上表面)，形成有朝下方凹入的圓錐形狀之凹部Wo。當容器W被支撐台4支撐的狀態下，使支撐機構22朝向該容器W下降移動時，支撐機構22所具備的卡合部36會從上方卡合至凹部Wo。 As shown in FIGS. 4 and 5, the upper surface of the flange portion Wa (the upper surface of the container W) is formed with a conical concave portion Wo that is recessed downward. When the container W is supported by the support stand 4 and the support mechanism 22 is moved downward and moved toward the container W, the engaging portion 36 provided in the support mechanism 22 engages with the concave portion Wo from above.

支撐台4是設置在物品搬送車1的行走路徑之正下方，且沿著物品搬送車1的行走方向設置有複數個。 The support stand 4 is installed directly below the traveling path of the article transport vehicle 1, and a plurality of support stands 4 are installed along the traveling direction of the article transport vehicle 1.

物品搬送車1是將容器W搬送到支撐台4，並且從支撐台4搬送容器W。並且，藉由圖式外的搬送裝置，可將容器W的整體或僅容器W內的基板，在支撐台4與處理裝置3之間搬送。 The article transport vehicle 1 transports the container W to the support table 4 and transports the container W from the support table 4. In addition, the entire container W or only the substrate in the container W can be transported between the support table 4 and the processing device 3 by the transport device outside the figure.

[物品搬送車] [Item transport vehicle]

接著，針對物品搬送車1進行說明。再者，在說明物品搬送車1時，是設想物品搬送車1行走於水平的直線狀之行走路徑的狀態來加以說明。又，是將物品搬送車1行走的方向設為行走方向，且將從上下方向來看與行走方向正交的方向設為寬度方向來進行說明。 Next, the article transport vehicle 1 will be described. In addition, when the article transport vehicle 1 is described, it is assumed that the article transport vehicle 1 travels on a horizontal linear traveling path. In addition, the description will be made assuming that the direction in which the article transport vehicle 1 travels is the traveling direction, and the direction orthogonal to the traveling direction when viewed from the vertical direction is referred to as the width direction.

如圖4所示，物品搬送車1具備有：以被設置在天花板的軌道2支撐的狀態沿著軌道2移動的行走部15、以及被位於軌道2的下方之行走部15懸吊支撐的本體部16。 As shown in FIG. 4, the article transport vehicle 1 is provided with a running part 15 that moves along the rail 2 while being supported by a rail 2 installed on the ceiling, and a body suspended and supported by the running part 15 located below the rail 2 Section 16.

行走部15具備有在行走方向上排列的前行走部15F及後行走部15R。前行走部15F是位於比後行走部15R更前方。前行走部15F及後行走部15R上裝設有藉由行走用馬達18旋轉的左右一對之行走輪19。藉由以行走用馬 達18旋轉前行走部15F的行走輪19及後行走部15R的行走輪19，以使物品搬送車1沿著行走路徑行走。 The walking portion 15 includes a front walking portion 15F and a rear walking portion 15R arranged in the walking direction. The front running part 15F is located in front of the rear running part 15R. The front traveling portion 15F and the rear traveling portion 15R are provided with a pair of left and right traveling wheels 19 rotated by a traveling motor 18. By walking with horses The traveling wheels 19 of the front traveling portion 15F and the traveling wheels 19 of the rear traveling portion 15R are rotated by 18 to make the article transport vehicle 1 travel along the traveling path.

在本體部16上具備有：連結於行走部15的基部21、支撐容器W的支撐機構22、使支撐機構22相對於行走部15升降移動的升降操作機構23、及將上升至上升設定位置(圖1等所示的位置)且以支撐機構22支撐的容器W之上方側及行走方向兩側覆蓋的罩體24。再者，藉由行走部15與基部21，來構成沿著行走方向(移動方向)移動的移動體A。又，支撐機構22是相當於被移動體A(行走部15及基部21)支撐且支撐容器W的支撐體。又，升降操作機構23是相當於使支撐機構22(支撐體)相對於移動體A(行走部15及基部21)在上下方向上移動的支撐操作體。 The main body portion 16 is provided with a base 21 connected to the walking portion 15, a support mechanism 22 supporting the container W, an elevating operation mechanism 23 that moves the support mechanism 22 up and down relative to the walking portion 15, and a lifting setting position ( The position shown in FIG. 1 etc.) and the cover 24 covering the upper side of the container W supported by the support mechanism 22 and both sides in the traveling direction. In addition, the walking part 15 and the base 21 constitute a moving body A that moves in the walking direction (moving direction). In addition, the support mechanism 22 is equivalent to a support body that is supported by the movable body A (the walking portion 15 and the base portion 21) and supports the container W. Moreover, the raising/lowering operation mechanism 23 is equivalent to the support operation body which moves the support mechanism 22 (support body) with respect to the moving body A (walking part 15 and base part 21) in an up-down direction.

基部21具備有連結於行走部15的連結基部、以及支撐升降操作機構23的支撐基部。並且，基部21是構成為可將支撐基部相對於連結基部而沿著寬度方向滑動移動自如。亦即，基部21具備有作為滑動操作機構的功能，可使升降操作機構23及支撐機構22相對於行走部15而在寬度方向上移動。 The base 21 includes a connection base connected to the walking portion 15 and a support base supporting the raising and lowering operation mechanism 23. In addition, the base 21 is configured such that the support base can be slid and moved in the width direction relative to the connection base. In other words, the base 21 has a function as a sliding operation mechanism, and the raising/lowering operation mechanism 23 and the support mechanism 22 can be moved in the width direction with respect to the walking portion 15.

升降操作機構23中具備有：前端部連接於支撐機構22並懸吊支撐機構22的複數個繩狀體30、捲繞繩狀體30的捲繞體31、及使捲繞體31旋轉的升降用馬達32(參照圖6)。再者，在本實施形態中，是具備有3條皮帶，以作為複數條繩狀體30。 The elevating operation mechanism 23 includes a plurality of rope-shaped bodies 30 whose front ends are connected to the support mechanism 22 and suspends the support mechanism 22, a winding body 31 for winding the rope-shaped body 30, and a lifting mechanism for rotating the winding body 31 Use the motor 32 (refer to FIG. 6). In addition, in the present embodiment, three belts are provided as a plurality of cord-shaped bodies 30.

升降操作機構23是構成為藉由升降用馬達32使捲繞 體31朝正向或逆向旋轉，以選擇性地對複數個繩狀體30進行捲取及送出操作，藉此使支撐機構22在上下方向上移動到行走用位置(參照圖1)及移載用位置(參照圖2)。行走用位置是當行走部15行走時支撐機構22相對於行走部15的位置。物品搬送車1是在支撐機構22位於行走用位置的狀態下行走。移載用位置是比行走用位置更下方的位置，且是藉由使支撐機構22下降到移載用位置，以使由支撐機構22所支撐的容器W位於支撐台4時之支撐機構22的位置。 The lifting operating mechanism 23 is configured to wind up by the lifting motor 32 The body 31 rotates in the forward or reverse direction to selectively wind and feed a plurality of rope-shaped bodies 30, thereby moving the support mechanism 22 in the vertical direction to the walking position (refer to FIG. 1) and transfer Use location (refer to Figure 2). The walking position is the position of the support mechanism 22 with respect to the walking part 15 when the walking part 15 is walking. The article transport vehicle 1 travels with the support mechanism 22 at the traveling position. The transfer position is a position lower than the walking position, and the support mechanism 22 when the container W supported by the support mechanism 22 is positioned on the support table 4 by lowering the support mechanism 22 to the transfer position position.

如圖4及圖5所示，支撐機構22是構成為藉由把持用馬達34之驅動而使一對把持爪35互相接近、遠離。進一步說明，支撐機構22是藉由使一對把持爪35接近，而將一對把持爪35切換為支撐容器W的凸緣部Wa之支撐狀態(參照圖4及圖5)，並且藉由使把持爪35彼此遠離，而切換為支撐解除狀態(圖未示)，以解除一對把持爪35對於容器W的凸緣部Wa之支撐。像這樣，可將支撐機構22構成為藉由把持用馬達34之驅動而在支撐狀態與支撐解除狀態間切換自如。 As shown in FIGS. 4 and 5, the supporting mechanism 22 is configured to move the pair of gripping claws 35 closer to and away from each other by the driving of the gripping motor 34. To further illustrate, the supporting mechanism 22 switches the pair of gripping claws 35 to the supporting state of the flange portion Wa of the container W by bringing the pair of gripping claws 35 close together (refer to FIGS. 4 and 5), and by making The gripping claws 35 are separated from each other and switched to a support release state (not shown) to release the support of the pair of gripping claws 35 on the flange portion Wa of the container W. In this way, the support mechanism 22 can be configured to be freely switched between the support state and the support release state by the driving of the gripping motor 34.

支撐機構22具備有：藉由升降操作機構23移動的移動部38、相對於移動部38在上下方向上移動自如地連結於移動部38的支撐部39、及介於移動部38與支撐部39之間且在上下方向上彈性變形自如的彈性部40。再者，在本實施形態中，彈性部40是使用形成為柱狀的矽橡膠。 The support mechanism 22 is provided with a moving part 38 moved by the lifting operation mechanism 23, a support part 39 connected to the moving part 38 movably in the vertical direction with respect to the moving part 38, and a support part 39 interposed between the moving part 38 and the support part 39 The elastic portion 40 is elastically deformable in the vertical direction. In addition, in this embodiment, the elastic part 40 uses the silicone rubber formed in a columnar shape.

移動部38具備有繩狀體30的前端部所連接的被連接部42。支撐部39具備有把持爪35及把持用馬達34，且懸吊 支撐容器W。彈性部40是以壓縮狀態設置在移動部38的第1部分38a與支撐部39的第2部分39a之間。支撐部39的第2部分39a是位於移動部38的第1部分38a的正上方。第1部分38a是移動部38的一部分，而第2部分39a是支撐部39的一部分。 The moving portion 38 includes a connected portion 42 to which the front end portion of the string-shaped body 30 is connected. The support part 39 is provided with a gripping claw 35 and a gripping motor 34, and is suspended Support container W. The elastic part 40 is provided between the first part 38a of the moving part 38 and the second part 39a of the support part 39 in a compressed state. The second part 39 a of the support part 39 is located directly above the first part 38 a of the moving part 38. The first part 38 a is a part of the moving part 38, and the second part 39 a is a part of the supporting part 39.

彈性部40的下端部是接著於移動部38的第1部分38a，彈性部40的上端部是接著於支撐部39的第2部分39a。像這樣，藉由彈性部40來相對於移動部38連結支撐部39。因此，當物品搬送車1行走時，行走部15上發生的振動會被彈性部40吸收，藉此可以抑制振動傳達到支撐部39或其支撐的容器W。 The lower end of the elastic part 40 is a first part 38 a that is connected to the moving part 38, and the upper end of the elastic part 40 is a second part 39 a that is connected to the support part 39. In this way, the support part 39 is connected to the moving part 38 by the elastic part 40. Therefore, when the article transport vehicle 1 is traveling, the vibration generated on the traveling portion 15 is absorbed by the elastic portion 40, thereby suppressing the vibration from being transmitted to the support portion 39 or the container W supported by it.

移動部38具備有底板43、及覆蓋該底板43的上方之罩蓋44。移動部38是以底板43及罩蓋44形成為四角箱狀，被連接部42及彈性部40是被收容在移動部38內，且支撐部39是將除了把持爪35的一部分等以外收容在移動部38內。在底板43的上表面上，連結有被連接部42並且接著有彈性部40。再者，罩蓋44上形成有用來供繩狀體30在上下方向上插通的第1孔44a。又，在底板43中彈性部40接著的部分相當於移動部38的第1部分38a。 The moving part 38 includes a bottom plate 43 and a cover 44 covering the upper side of the bottom plate 43. The moving part 38 is formed into a rectangular box shape with the bottom plate 43 and the cover 44, the connected part 42 and the elastic part 40 are housed in the moving part 38, and the supporting part 39 is housed except for a part of the gripping claw 35. Inside the moving part 38. On the upper surface of the bottom plate 43, a connected portion 42 is connected and then an elastic portion 40 is attached. Furthermore, the cover 44 is formed with a first hole 44a for inserting the cord 30 in the vertical direction. In addition, the portion of the bottom plate 43 that is next to the elastic portion 40 corresponds to the first portion 38 a of the moving portion 38.

移動部38如上述地具備有繩狀體30的前端部所連接的被連接部42，藉由升降操作機構23對複數個繩狀體30的捲取及送出，以使移動部38在上下方向上移動。 The moving part 38 is provided with the connected part 42 connected to the front end of the rope-shaped body 30 as described above. The lifting operation mechanism 23 winds and sends out the plural rope-shaped bodies 30 so that the moving part 38 moves in the vertical direction. Move up.

如圖6所示，在本實施形態中，具備有3個被連接部42，且具備有3個彈性部40。 As shown in FIG. 6, in this embodiment, three to-be-connected parts 42 are provided, and three elastic parts 40 are provided.

由支撐機構22的行走方向之中心向行走方向的其中一側上，設置有2個被連接部42與1個彈性部40。又，由支撐機構22的行走方向之中心向行走方向的另一側上，設置有1個被連接部42與2個彈性部40。其中一側的1個彈性部40從寬度方向來看，是以與2個被連接部42兩者重疊的狀態來設置。其中一側的2個被連接部42從寬度方向來看，是以彼此部分重疊的狀態來設置，並且是以彼此在行走方向上偏離的狀態來設置。又，一側的1個彈性部40是設置為在寬度方向上位於另一側的2個彈性部40之間。 Two connected parts 42 and one elastic part 40 are provided on one side from the center of the walking direction of the supporting mechanism 22 to the walking direction. In addition, one connected portion 42 and two elastic portions 40 are provided on the other side from the center of the traveling direction of the support mechanism 22 to the traveling direction. One elastic portion 40 on one side is provided in a state overlapping with both of the two connected portions 42 when viewed in the width direction. The two connected portions 42 on one side are provided in a state of partially overlapping each other when viewed in the width direction, and are provided in a state of being offset from each other in the walking direction. In addition, one elastic portion 40 on one side is provided between two elastic portions 40 on the other side in the width direction.

另一側的2個彈性部40從寬度方向來看，分別是以與另一側的1個被連接部42重疊的狀態來設置。另一側的2個彈性部40從寬度方向來看，是以彼此整體重疊的狀態來設置，且是設置在彼此在行走方向上相同的位置。又，另一側的1個被連接部42是設置為在寬度方向上位於其中一側的2個被連接部42之間。 The two elastic parts 40 on the other side are each provided in a state overlapping with the one connected part 42 on the other side when viewed in the width direction. The two elastic parts 40 on the other side are provided in a state of overlapping each other as a whole when viewed in the width direction, and are provided at the same position in the walking direction. In addition, the one connected portion 42 on the other side is provided between the two connected portions 42 on one side in the width direction.

支撐部39具備有驅動部46及升降板47。在驅動部46中內建有把持用馬達34，且在向下方突出的狀態下具備有把持爪35及卡合部36。此把持爪35及卡合部36是於形成在底板43的貫穿孔43a貫穿並比底板43更朝下方突出。升降板47是連結於驅動部46的上表面，且從驅動部46朝橫向側邊突出。在升降板47中的從驅動部46朝橫向側邊的突出部分之下表面上接著有彈性部40，此升降板47中的接著有彈性部40的部分相當於第2部分39a。 The support part 39 includes a driving part 46 and a lifting plate 47. A gripping motor 34 is built in the driving portion 46, and a gripping claw 35 and an engaging portion 36 are provided in a state of protruding downward. The holding claw 35 and the engaging portion 36 penetrate through the through hole 43 a formed in the bottom plate 43 and protrude further downward than the bottom plate 43. The lifting plate 47 is connected to the upper surface of the driving part 46 and protrudes from the driving part 46 toward the lateral side. An elastic portion 40 is attached to the lower surface of the protruding portion from the driving portion 46 toward the lateral side of the lifting plate 47, and the portion of the lifting plate 47 to which the elastic portion 40 is attached corresponds to the second portion 39a.

如圖7及圖8所示，在支撐部39上具備有保持用支撐部 48與解除用凹部49。該等保持用支撐部48及解除用凹部49是設在驅動部46的下端部。 As shown in Figures 7 and 8, the support part 39 is provided with a holding support part 48 and a recess 49 for release. The support portion 48 for holding and the recessed portion 49 for release are provided at the lower end portion of the driving portion 46.

如圖4至圖8所示，支撐機構22具有：保持保持用支撐部48的保持部51、作為切換保持部51的狀態之切換部的切換用汽缸52、具有作為被操作部的第2滾輪53a及作為操作部的第3滾輪53b之連桿體53。 As shown in FIGS. 4 to 8, the support mechanism 22 has a holding portion 51 for holding the holding support portion 48, a switching cylinder 52 as a switching portion for switching the state of the holding portion 51, and a second roller as an operated portion 53a and the link body 53 of the third roller 53b as the operating part.

進一步說明，如圖4及圖5所示，在底板43的上表面上立設有連桿支撐體54。連桿體53的長度方向之中間部是擺動自如地被連桿支撐體54所支撐。並且，連桿體53的長度方向之一端部上，旋轉自如地設有第2滾輪53a，且連桿體53的長度方向之另一端部上，旋轉自如地設有第3滾輪53b。第3滾輪53b是位於升降板47所具備的塊體47a的正下方。因此，在連桿體53中，第2滾輪53a是藉由被朝下方按壓操作而擺動，以使得第3滾輪53b朝上方移動，且藉由第3滾輪53b將支撐部39相對於移動部38朝上方上推。 To further explain, as shown in FIGS. 4 and 5, a link support 54 is erected on the upper surface of the bottom plate 43. The intermediate part in the longitudinal direction of the link body 53 is supported by the link support body 54 so as to swing freely. In addition, a second roller 53a is rotatably provided at one end of the link body 53 in the longitudinal direction, and a third roller 53b is rotatably provided at the other end of the link body 53 in the longitudinal direction. The third roller 53b is located directly below the block 47a of the lifting plate 47. Therefore, in the link body 53, the second roller 53a swings by being pressed downward, so that the third roller 53b moves upward, and the support portion 39 is moved relative to the moving portion 38 by the third roller 53b. Push upwards.

切換用汽缸52是將保持部51的狀態切換成保持狀態(參照圖5及圖8)及保持解除狀態(參照圖4及圖7)，該保持狀態是相對於移動部38將支撐部39保持在預定的位置，該保持解除狀態是解除對支撐部39的保持而將支撐部39設為相對於移動部38在上下方向上移動自如。 The switching cylinder 52 switches the state of the holding portion 51 to a holding state (refer to FIGS. 5 and 8) and a holding release state (refer to FIGS. 4 and 7), and the holding state is to hold the supporting portion 39 with respect to the moving portion 38 At a predetermined position, the holding release state is to release the holding of the support part 39 and make the support part 39 freely move in the vertical direction with respect to the moving part 38.

進一步說明，在保持部51中的與驅動部46接觸的部分上，具備有繞著沿行走方向的軸心旋轉自如的第1滾輪51a。在保持部51上，在寬度方向上隔著間隔的狀態下具備有一對第1滾輪51a。切換用汽缸52的汽缸桿是連結於保 持部51。並且，切換用汽缸52是構成為伸縮來使保持部51在寬度方向上移動，藉此可將保持部51的狀態切換為：如圖7所示，一對第1滾輪51a兩者都位於解除用凹部49的正下方之保持解除狀態，以及如圖8所示，一對第1滾輪51a兩者都位於保持用支撐部48的正下方之保持狀態。 To further explain, the portion of the holding portion 51 that is in contact with the driving portion 46 is provided with a first roller 51a that is rotatable about an axis in the traveling direction. The holding portion 51 is provided with a pair of first rollers 51a with an interval in the width direction. The cylinder rod of the switching cylinder 52 is connected to the Hold 51. In addition, the switching cylinder 52 is configured to expand and contract to move the holding portion 51 in the width direction, whereby the state of the holding portion 51 can be switched to: as shown in FIG. 7, both of the pair of first rollers 51a are positioned at the release In the holding released state directly below the recess 49, and as shown in FIG. 8, both of the pair of first rollers 51a are located directly below the holding support portion 48.

如圖8所示，將保持部51切換為保持狀態的狀態下，藉由保持部51從下方支撐支撐部39，藉此來限制支撐部39相對於移動部38而移動到比預定的位置更下方的情形。像這樣，支撐部39是相對於移動部38被保持在預定的位置。順帶一提，支撐部39相對於移動部38而移動到比預定的位置更上方的情形是藉由彈性部40來限制。 As shown in FIG. 8, when the holding portion 51 is switched to the holding state, the holding portion 51 supports the support portion 39 from below, thereby restricting the support portion 39 from moving to a more predetermined position than the predetermined position relative to the moving portion 38. The situation below. In this way, the support part 39 is held at a predetermined position with respect to the moving part 38. Incidentally, the movement of the supporting part 39 to a position higher than a predetermined position relative to the moving part 38 is restricted by the elastic part 40.

又，如圖7所示，將保持部51切換為保持解除狀態的狀態下，由於支撐部39不會被保持部51從下方支撐，因此可容許支撐部39相對於移動部38移動到比預定的位置更下方的情形。藉此，對於支撐部39的保持即解除。 In addition, as shown in FIG. 7, when the holding portion 51 is switched to the holding release state, the support portion 39 is not supported by the holding portion 51 from below, so the support portion 39 can be allowed to move more than the predetermined position relative to the moving portion 38. The position further below the situation. Thereby, the holding of the support part 39 is released.

升降操作機構23除了行走用位置(參照圖4及圖10)及移載用位置(參照圖5)之外，還會使支撐機構22移動到設定在比行走用位置更上方的切換用位置(參照圖9)。再者，行走用位置相當於第1位置，切換用位置相當於第2位置，移載用位置相當於第3位置。 In addition to the traveling position (refer to FIGS. 4 and 10) and the transfer position (refer to FIG. 5), the elevating operation mechanism 23 also moves the support mechanism 22 to a switching position set higher than the traveling position ( Refer to Figure 9). In addition, the traveling position corresponds to the first position, the switching position corresponds to the second position, and the transfer position corresponds to the third position.

並且，在基部21上具備有按壓部55。此按壓部55是藉由使支撐機構22從行走用位置移動到切換用位置，來對連桿體53的第2滾輪53a朝下方按壓操作，且是藉由使支撐機構22從切換用位置移動到行走用位置，來解除連桿體53的 第2滾輪53a之按壓操作。 In addition, a pressing portion 55 is provided on the base 21. This pressing portion 55 is used to press the second roller 53a of the link body 53 downward by moving the support mechanism 22 from the walking position to the switching position, and is to move the support mechanism 22 from the switching position To the walking position to release the connecting rod body 53 Pressing operation of the second roller 53a.

進一步說明，在罩蓋44上形成有第2孔44b，且此第2孔44b是位於第2滾輪53a的正上方。在基部21上具備有按壓部55，此按壓部55是位於第2滾輪53a的正上方。 Furthermore, a second hole 44b is formed in the cover 44, and the second hole 44b is located directly above the second roller 53a. The base 21 is provided with a pressing portion 55 which is located directly above the second roller 53a.

如圖4及圖7所示，當保持部51為被切換為保持解除狀態的狀態，且是在保持部51、彈性部40與連桿體53當中僅以彈性部40支撐支撐部39的狀態下，移動部38與支撐部39在上下方向的分開距離，會比如圖9所示地支撐部39相對於移動部38位於預定的位置時的移動部38與支撐部39在上下方向的分開距離更短。 As shown in Figs. 4 and 7, when the holding portion 51 is switched to the holding release state, and only the elastic portion 40 supports the support portion 39 among the holding portion 51, the elastic portion 40, and the link body 53 The distance between the moving part 38 and the supporting part 39 in the vertical direction will be, for example, the distance between the moving part 38 and the supporting part 39 in the vertical direction when the supporting part 39 is at a predetermined position relative to the moving part 38 as shown in FIG. 9 Shorter.

並且，如圖9所示，藉由以按壓部55將第2滾輪53a朝下方按壓操作，以使連桿體53擺動並藉由第3滾輪53b將固定在升降板47的塊體47a朝上方上推，以使移動部38與支撐部39在上下方向的分開距離變長，且支撐部39會相對於移動部38位於預定的位置。 And, as shown in FIG. 9, by pressing the second roller 53a downward with the pressing portion 55, the link body 53 is swung, and the block 47a fixed to the lifting plate 47 is moved upward by the third roller 53b. Push up so that the distance between the moving part 38 and the supporting part 39 in the vertical direction becomes longer, and the supporting part 39 will be located at a predetermined position relative to the moving part 38.

像這樣將支撐部39設成相對於移動部38位於預定的位置之狀態下，如圖8所示，藉由將保持部51從保持解除狀態切換到保持狀態，如圖10所示，即使解除由按壓部55進行的按壓而不再藉由第3滾輪53b來將支撐部39朝上方上推，由於可將支撐部39以保持部51的第1滾輪51a來支撐，因此可將支撐部39相對於移動部38保持在預定的位置。 In this way, when the supporting portion 39 is located at a predetermined position with respect to the moving portion 38, as shown in FIG. 8, by switching the holding portion 51 from the hold release state to the hold state, as shown in FIG. 10, even if it is released The pressing by the pressing portion 55 no longer pushes the support portion 39 upward by the third roller 53b. Since the support portion 39 can be supported by the first roller 51a of the holding portion 51, the support portion 39 can be supported. It is maintained at a predetermined position with respect to the moving part 38.

[控制部] [Control Department]

如圖3所示，在物品搬送車1中，具備有控制移動體A、 升降操作機構23、及切換用汽缸52來控制物品搬送車1的作動之控制部H。 As shown in FIG. 3, the article transport vehicle 1 is provided with a control moving body A, The control unit H that controls the operation of the article transport vehicle 1 by the lift operation mechanism 23 and the switching cylinder 52.

控制部H是控制物品搬送車1中所設置的馬達類的作動，以根據來自設置在地上側的上位控制器之搬送指令，來執行從搬送起點的支撐台4接收容器W的接收處理、以及將容器W移交到搬送目的地的支撐台4之移交處理。物品搬送車1是執行接收處理以從搬送起點的支撐台4接收容器W，並執行移交處理以將容器W移交至搬送目的地的支撐台4，藉此從搬送起點的支撐台4將容器W搬送到搬送目的地的支撐台4。 The control unit H controls the operation of the motors installed in the article transport vehicle 1 to execute the receiving process of receiving the container W from the support table 4 at the starting point of the transport according to the transport instruction from the upper controller installed on the ground, and The transfer process of transferring the container W to the support stand 4 of the transfer destination. The article transport vehicle 1 performs a receiving process to receive the container W from the support platform 4 at the transfer start point, and performs a handover process to transfer the container W to the support platform 4 at the transfer destination, thereby transporting the container W from the support platform 4 at the transfer start point. It is transported to the support table 4 of the transport destination.

在移交處理中，是依照行走控制、下降升降控制、爪遠離控制、上升升降控制的順序來執行。 In the handover process, it is executed in the order of walking control, descending and elevating control, claw distance control, and ascending and descending control.

移交處理的行走控制是將與搬送起點的支撐台4對應之停止位置設為行走起點，且將與搬送目的地的支撐台4對應之停止位置設為行走目的地，並控制行走用馬達18的作動，以使行走部15從行走起點行走到行走目的地。順帶一提，在移交處理中的行走控制，是在以支撐機構22支撐容器W的狀態下執行。此行走控制相當於下述之移動控制：將相對於降下容器W的移載地點而事先設定的位置設為行走目的地(移動目的地)，並使移動體A從行走起點(移動起點)移動到行走目的地(移動目的地)。 The walking control of the handover process is to set the stop position corresponding to the support table 4 at the starting point of transport as the starting point of travel, and set the stop position corresponding to the support table 4 at the destination of the transport as the destination of travel, and control the driving motor 18 Operate so that the walking part 15 walks from a walking starting point to a walking destination. Incidentally, the walking control in the handover process is executed in a state where the container W is supported by the supporting mechanism 22. This walking control is equivalent to the following movement control: a position set in advance with respect to the transfer location of the lowered container W is set as the walking destination (moving destination), and the moving body A is moved from the walking starting point (moving starting point) To the walking destination (moving destination).

下降升降控制是使支撐機構22從行走用位置向上方移動到切換用位置後，將保持部51從保持解除狀態切換到保持狀態，之後，控制升降用馬達32及切換用汽 缸52的作動，以使支撐機構22從切換用位置朝下方移動到移載用位置。亦即，在此下降升降控制中，是執行：降下控制，使移動部38從行走用位置上升到切換用位置後，使移動部38從切換用位置下降到移載用位置，並將支撐部39所支撐的容器W降下到移載地點；及保持控制，在降下控制中於移動部38位於切換用位置的狀態下將保持部51從保持解除狀態切換到保持狀態。 The lowering and raising control is to move the support mechanism 22 upward from the traveling position to the switching position, and then switch the holding portion 51 from the holding release state to the holding state, and then control the raising and lowering motor 32 and the switching steam The cylinder 52 is operated to move the support mechanism 22 downward from the position for switching to the position for transfer. That is, in this lowering and raising control, the lowering control is executed to raise the moving part 38 from the walking position to the switching position, and then the moving part 38 is lowered from the switching position to the transfer position, and the supporting part The container W supported by 39 is lowered to the transfer location; and the holding control is to switch the holding part 51 from the holding release state to the holding state in the state where the moving part 38 is at the switching position in the lowering control.

爪遠離控制是控制把持用馬達34的作動，以將支撐機構22從支撐狀態切換到支撐解除狀態。 The claw distance control is to control the operation of the gripping motor 34 to switch the support mechanism 22 from the support state to the support release state.

上升升降控制是使支撐機構22從移載用位置朝上方移動到切換用位置後，將保持部51從保持狀態切換到保持解除狀態，之後，控制升降用馬達32及切換用汽缸52的作動，以使支撐機構22從切換用位置向下方移動到行走用位置。 Ascending and descending control is to move the support mechanism 22 upward from the transfer position to the switching position, then switch the holding portion 51 from the holding state to the holding release state, and then control the actions of the raising and lowering motor 32 and the switching cylinder 52, The support mechanism 22 is moved downward from the position for switching to the position for walking.

像這樣在本實施形態中，控制部H是將物品搬送車1控制成在行走部15行走的期間，將保持部51切換成保持解除狀態，而在行走部15停止且在上下方向上移動支撐機構22的期間，將保持部51切換成保持狀態。亦即，控制部H是在行走部15藉由行走控制到達行走目的地且行走控制完成後，執行降下控制及保持控制。 In this embodiment, the control section H controls the article transport vehicle 1 to switch the holding section 51 to the hold release state while the traveling section 15 is traveling, and the traveling section 15 stops and moves the support in the vertical direction. During the period of the mechanism 22, the holding portion 51 is switched to the holding state. That is, the control unit H executes the lowering control and the holding control after the walking unit 15 reaches the walking destination by the walking control and the walking control is completed.

在接收處理中，是依照行走控制、下降升降控制、爪接近控制、上升升降控制的順序來執行。 In the receiving process, it is executed in the order of walking control, descending and elevating control, claw approaching control, and ascending and descending control.

再者，接收處理的行走控制除了以下各點之外，與移交處理是相同的：控制行走用馬達18的作動，以使行走部 15行走到與搬送起點的支撐台4對應的位置；該行走控制是在未以支撐機構22支撐容器W的狀態下執行；以及，取代於爪遠離控制，而執行爪接近控制，該爪接近控制是控制把持用馬達34的作動，以將支撐機構22從支撐解除狀態切換到支撐狀態。 Furthermore, the walking control of the receiving process is the same as the handover process except for the following points: the operation of the walking motor 18 is controlled so that the walking part 15 Travel to a position corresponding to the support table 4 at the starting point of the conveyance; this travel control is executed without supporting the container W by the support mechanism 22; and, instead of the claw distance control, the claw approach control is executed, which is the claw approach control It controls the operation of the gripping motor 34 to switch the support mechanism 22 from the support released state to the support state.

[其他實施形態] [Other embodiments]

(1)在上述實施形態中，雖然在支撐體上具備有移動部、支撐部及彈性部，但也可以在移動體上具備有移動部、支撐部及切換部。 (1) In the above-mentioned embodiment, although the moving part, the supporting part, and the elastic part are provided on the support body, you may provide a moving part, a support part, and a switching part on a moving body.

具體而言，如圖11及圖12所示，在移動體A上具備：具備有行走輪19(車輪)的第2移動部61(以行走部15與基部21的一部分來構成)、相對於第2移動部61在上下方向上移動自如地被連結且支撐支撐機構22(支撐體)的第2支撐部62、介於第2移動部61與第2支撐部62之間且在上下方向上彈性變形自如的第2彈性部63、保持第2支撐部62的第2保持部64、及切換第2保持部64的狀態之第2切換部65。 Specifically, as shown in FIGS. 11 and 12, the movable body A is provided with a second moving part 61 (consisting of a part of the running part 15 and the base 21) provided with a traveling wheel 19 (wheel), and a The second moving part 61 is movably connected in the vertical direction and supports the second supporting part 62 of the supporting mechanism 22 (support body), interposed between the second moving part 61 and the second supporting part 62 and in the vertical direction The second elastic portion 63 that is elastically deformable, the second holding portion 64 that holds the second support portion 62, and the second switching portion 65 that switches the state of the second holding portion 64.

第2切換部65是構成為可將第2保持部64的狀態切換成：第2保持狀態(參照圖12)，相對於第2移動部61將第2支撐部62保持在預定的位置；及第2保持解除狀態(參照圖11)，解除對第2支撐部62的保持而將第2支撐部62設為相對於第2移動部61在上下方向上移動自如。 The second switching portion 65 is configured to switch the state of the second holding portion 64 to: a second holding state (see FIG. 12), and holding the second support portion 62 at a predetermined position with respect to the second moving portion 61; and In the second holding release state (see FIG. 11 ), the holding of the second support portion 62 is released, and the second support portion 62 is made movable in the vertical direction relative to the second moving portion 61.

(2)在上述實施形態中，雖然是將移動控制及降下控制執行成：控制部在藉由移動控制使移動部到達移動目的地後，開始降下控制，但也可以將移動控制及降下 控制執行成：控制部在藉由移動控制開始移動部的移動後，且在藉由該移動控制使移動部到達移動目的地之前，開始降下控制，而在藉由移動控制使移動部到達移動目的地後，完成降下控制。 (2) In the above embodiment, although the movement control and the lowering control are executed as follows: the control unit starts the lowering control after the moving unit reaches the moving destination by the movement control, but the movement control and lowering control may also be performed The control is executed as follows: after the control unit starts the movement of the moving unit by the movement control, and before the moving unit reaches the moving destination by the movement control, the lowering control is started, and the moving unit reaches the moving destination by the movement control After landing, complete the lowering control.

(3)在上述實施形態中，雖然是使支撐部的第2部分位於移動部的第1部分之正上方，且以壓縮狀態將彈性部設置在移動部的第1部分與支撐部的第2部分之間，但也可以是使支撐部的第2部分位於移動部的第1部分之正下方，且以拉伸狀態將彈性部設置在移動部的第1部分與支撐部的第2部分之間。 (3) In the above embodiment, although the second part of the supporting part is positioned directly above the first part of the moving part, and the elastic part is provided in the first part of the moving part and the second part of the supporting part in a compressed state. Between parts, but it can also be that the second part of the supporting part is located directly below the first part of the moving part, and the elastic part is provided in a stretched state between the first part of the moving part and the second part of the supporting part between.

又，在上述實施形態中，雖然作為彈性部所使用的是柱狀的矽橡膠，但彈性體也可以使用彈簧或板簧等其他彈性構件，且適當地變更材質或形狀亦可。 In addition, in the above-mentioned embodiment, although columnar silicon rubber is used as the elastic portion, other elastic members such as springs or leaf springs may be used for the elastic body, and the material or shape may be changed as appropriate.

(4)在上述實施形態中，雖然是將物品搬送車構成為：移動體以被配設在天花板的軌道所支撐的狀態來沿著軌道移動，且支撐體位於軌道的下方而被移動體懸吊支撐，但也可以將物品搬送車構成為：移動體以被設置在地面的軌道所支撐的狀態來沿著軌道移動，且支撐體位於軌道的上方而被移動體支撐。 (4) In the above embodiment, although the article transport vehicle is configured such that the movable body moves along the rail while being supported by the rail provided on the ceiling, and the support body is located below the rail and is suspended by the movable body However, the article transport vehicle may be configured such that the movable body moves along the rail while being supported by a rail installed on the ground, and the support body is positioned above the rail and is supported by the movable body.

(5)在上述實施形態中，雖然是在使支撐體上升到第2位置的狀態下，將保持部從保持解除狀態切換到保持狀態，但也可以設成在使支撐體位於第1位置的狀態下、或者在使支撐體從第1位置朝向第3位置下降的同時，將保持部從保持解除狀態切換到保持狀態。 (5) In the above-mentioned embodiment, although the holding part is switched from the holding release state to the holding state with the support raised to the second position, it may be set in the state where the support is located at the first position. In the state or while lowering the support body from the first position to the third position, the holding portion is switched from the holding release state to the holding state.

具體而言，亦可設成例如，將切換部構成為使保持部在上下方向上移動，且將使保持部退避到比僅以彈性體支撐的支撐部更下方的狀態設為保持解除狀態，並將藉由保持部從下方支撐相對於移動部位於預定的位置之支撐部的狀態設為保持狀態，來藉由切換部使保持部在上下方向上移動，藉此將保持部切換成保持解除狀態及保持狀態。 Specifically, for example, the switching part may be configured to move the holding part in the vertical direction, and a state where the holding part is retracted below the support part supported only by the elastic body may be set as the holding release state. The holding part supports the holding part at a predetermined position with respect to the moving part from below as the holding state, and the holding part is moved in the vertical direction by the switching part, thereby switching the holding part to hold release Status and hold status.

[上述實施形態的概要] [Outline of the above embodiment]

以下，針對在上述所說明的物品搬送裝置之概要進行說明。 Hereinafter, the outline of the article conveying device described above will be described.

物品搬送裝置的特徵構成在於下述之點，並具備：移動體，沿著移動方向移動；支撐體，被前述移動體支撐且支撐物品；及支撐操作體，使前述支撐體相對於前述移動體在上下方向上移動，前述支撐體具備：藉由前述支撐操作體而被移動的移動部、相對於前述移動部在上下方向上移動自如地連結於前述移動部並且懸吊支撐物品的支撐部、介於前述移動部與前述支撐部之間且在上下方向上彈性變形自如的彈性部、保持前述支撐部的保持部、及切換前述保持部的狀態之切換部，前述切換部是將前述保持部的狀態切換成保持狀態與保持解除狀態，該保持狀態是相對於前述移動部將前述支撐部保持在預定的位置之狀態，該保持解除狀態是解除 對前述支撐部的保持而將前述支撐部設為相對於前述移動部在上下方向上移動自如的狀態。 The article conveying device is characterized by the following points, and is provided with: a moving body that moves along the moving direction; a support body that is supported by the moving body and supports the article; and a support operation body that makes the support body relative to the moving body Moving in the up-and-down direction, the support body includes: a moving part that is moved by the supporting operation body, a support part that is movably connected to the moving part in the up-and-down direction relative to the moving part, and suspends and supports the article, Between the moving part and the supporting part, an elastic part that is elastically deformable in the vertical direction, a holding part that holds the supporting part, and a switching part that switches the state of the holding part, the switching part is the holding part The state is switched to a holding state and a holding released state, the holding state is a state in which the support part is held at a predetermined position relative to the moving part, and the holding released state is a release For the holding of the supporting portion, the supporting portion is placed in a state of being freely movable in the vertical direction with respect to the moving portion.

根據此特徵構成，藉由將保持部切換成保持解除狀態，即變得可使支撐部相對於移動部彈性地在上下方向上移動，藉由將保持部切換成保持狀態，可將支撐部相對於移動部保持在預定的位置。 According to this characteristic structure, by switching the holding part to the holding release state, the support part can be elastically moved in the vertical direction relative to the moving part, and by switching the holding part to the holding state, the support part can be opposed to The moving part is kept at a predetermined position.

因此，當移動體移動時，藉由將保持部切換成保持解除狀態，移動部移動時於移動部上產生的振動即可以藉由彈性部來吸收。因此，可以抑制於移動部上產生的振動傳達到物品的情形。又，當移動部移動時，藉由將保持部切換成保持狀態，即可以限制支撐部相對於移動部移動的情形。從而，在藉由支撐操作體使移動部在上下方向上移動來使物品移動到移載地點的情況下，可容易地使物品正確地移動到移載地點。 Therefore, when the moving body moves, by switching the holding part to the holding release state, the vibration generated on the moving part when the moving part moves can be absorbed by the elastic part. Therefore, it is possible to suppress transmission of the vibration generated in the moving part to the article. Moreover, when the moving part moves, by switching the holding part to the holding state, it is possible to restrict the movement of the supporting part relative to the moving part. Therefore, when the article is moved to the transfer location by supporting the operating body to move the moving part in the vertical direction, the article can be easily moved to the transfer location accurately.

像這樣，即可以提供一種物品搬送裝置，該物品搬送裝置可以抑制移動體移動時於移動體上產生的振動傳達到物品的情形，並且可容易地於使移動部移動時使物品移動到移載地點。 In this way, it is possible to provide an article transport device that can suppress the vibration generated on the mobile body when the mobile body moves from being transmitted to the article, and can easily move the article to the transfer when the moving part is moved. location.

在此，較理想的是，前述彈性部是以壓縮狀態被設置在前述移動部的第1部分、以及為前述支撐部的一部分且位於前述第1部分的正上方的第2部分之間，前述移動部具備有具有被操作部及操作部的連桿體，前述連桿體是藉由將前述被操作部被朝下方按壓操作而使前述操作部向上方移動，以藉由該操作部將前述支撐部相對於前述 移動部朝上方上推，前述支撐操作體是使前述支撐體在上下方向上移動到第1位置、第2位置及第3位置，該第1位置是前述移動體移動之時的前述支撐體相對於前述移動體的位置，該第2位置是移動到比前述第1位置更上方的位置，該第3位置是移動到比前述第1位置更下方的位置，前述移動體具備有按壓部，該按壓部是藉由前述支撐體從前述第1位置移動到前述第2位置來將前述連桿體的前述被操作部朝下方按壓操作，且藉由前述支撐體從前述第2位置移動到前述第1位置來解除前述連桿體的前述被操作部之按壓操作。 Here, it is preferable that the elastic part is provided in a compressed state between the first part of the moving part and the second part which is a part of the support part and is located directly above the first part. The moving part is provided with a link body having an operated part and an operating part. The link body moves the operating part upward by pressing the operated part downward to move the operating part upward through the operating part. The support part is relative to the aforementioned The moving part is pushed upward, the support operation body moves the support body in the vertical direction to the first position, the second position, and the third position. The first position is when the moving body moves relative to the support body. At the position of the movable body, the second position is moved to a position higher than the first position, and the third position is moved to a position lower than the first position, the movable body is provided with a pressing portion, and The pressing part presses the operated part of the link body downward by moving the support body from the first position to the second position, and moves the support body from the second position to the second position. 1 position to release the pressing operation of the operated portion of the link body.

根據此構成，當移動體移動的情況下，支撐體是位於第1位置。並且，使支撐體從第1位置朝上方移動到第2位置後，使支撐體從第2位置朝下方移動到第3位置，藉此可以將支撐體保持為如下。 According to this configuration, when the movable body moves, the support body is located at the first position. And, after moving the support body upward from the first position to the second position, and then move the support body downward from the second position to the third position, the support body can be held as follows.

亦即，可藉由使支撐體從第1位置朝上方移動到第2位置，以使連桿體的被操作部受到按壓部按壓操作。伴隨於此，可以使連桿體的操作部將支撐部相對於移動部朝上方上推，而使支撐部相對於移動部位於預定的位置。並且，像這樣，在藉由連桿體的作用以使支撐部位於預定的位置之狀態下，藉由切換部將保持部從保持解除狀態切換到保持狀態。此時，由於支撐部是位於預定的位置，故不需要藉由以切換部將保持部從保持解除狀態切換到保持狀態用的操作力，來使支撐部移動，因此可以將切換部的操作力減小。 That is, by moving the support body upward from the first position to the second position, the operated portion of the link body can be pressed by the pressing portion. Along with this, the operation part of the link body can push the support part upward with respect to the moving part, so that the support part can be located at a predetermined position with respect to the moving part. And, like this, in a state where the support portion is positioned at a predetermined position by the action of the link body, the holding portion is switched from the holding release state to the holding state by the switching portion. At this time, since the support part is located at a predetermined position, it is not necessary to move the support part by the operating force for switching the holding part from the holding release state to the holding state with the switching part, so the operating force of the switching part can be changed. Decrease.

像這樣，利用由支撐操作體形成的支撐體之操作力，來變更支撐體相對於移動部的位置，藉此即可使切換部的操作力變小。 In this way, the operation force of the support body formed by the support operation body is used to change the position of the support body with respect to the moving part, whereby the operation force of the switching part can be reduced.

又，較理想的是，具備有控制前述移動體、前述支撐操作體、以及前述切換部的控制部，前述控制部是執行：移動控制，將相對於降下物品的移載地點而事先設定的位置設為移動目的地，並使前述移動體從移動起點移動到前述移動目的地；降下控制，於使前述移動部從前述第1位置上升到前述第2位置後，使前述移動部從前述第2位置下降到前述第3位置，而將前述支撐部所支撐的物品降下到前述移載地點；及保持控制，在前述降下控制中以前述移動部位於前述第2位置的狀態來將前述保持部從前述保持解除狀態切換到前述保持狀態，於藉由前述移動控制使前述移動體到達前述移動目的地之前，開始前述降下控制的執行。 Furthermore, it is preferable to include a control unit that controls the moving body, the support operating body, and the switching unit, and the control unit executes: movement control to set a position relative to the transfer location of the lowered article in advance. Set as the moving destination, and move the moving body from the moving starting point to the moving destination; down control, after the moving part is raised from the first position to the second position, the moving part is moved from the second position The position is lowered to the third position, and the article supported by the support portion is lowered to the transfer point; and the holding control, in the lowering control, the holding portion is removed from the state with the moving portion in the second position The holding release state is switched to the holding state, and the execution of the lowering control is started before the moving body reaches the moving destination by the moving control.

根據此構成，當執行行走控制時，藉由將保持部先切換成保持解除狀態，即可以抑制於移動體藉由行走控制而從移動起點移動時，於移動體上產生的振動傳達到物品的情形。並且，由於可以藉由執行降下控制，且在該降下控制的執行中執行保持控制，以在將物品降下至移載地點之前將保持部切換成保持狀態，因此藉由支撐操作 體使移動部在上下方向上移動來使物品移動到移載地點的情況下，可容易地使物品正確地移動到移載地點。 According to this configuration, when the walking control is executed, by first switching the holding part to the hold release state, it is possible to suppress the vibration generated on the moving body from being transmitted to the article when the moving body moves from the starting point of the movement by the walking control. situation. In addition, since the lowering control can be executed and the holding control is executed during the execution of the lowering control, the holding portion can be switched to the holding state before the article is lowered to the transfer location, so the support operation When the body moves the moving part in the vertical direction to move the article to the transfer location, the article can be easily moved to the transfer location accurately.

並且，由於是在移動體藉由移動控制到達移動目的地之前，即開始降下控制的執行，因此和移動體已到達移動目的地後才開始降下控制的執行之情況相較之下，可以迅速地將物品降下到移載地點。 In addition, since the lowering control starts before the moving body reaches the moving destination through the movement control, it can be quickly executed compared with the case where the lowering control starts after the moving body has reached the moving destination. Lower the item to the transfer location.

又，較理想的是，前述移動體是以被配設在天花板的軌道所支撐的狀態沿著前述軌道移動，前述支撐體是位於前述軌道的下方且被前述移動體懸吊支撐。 Furthermore, it is preferable that the movable body moves along the rail in a state supported by a rail provided on the ceiling, and the support body is located below the rail and is suspended and supported by the movable body.

根據此構成，當移動體沿著配設在天花板的軌道移動時，即可以藉由先將保持部切換成保持解除狀態，來抑制將移動體在軌道的接縫等上移動時所產生的振動傳達到物品的情形。並且，藉由使位於軌道的下方之支撐體於將容器降下至設定在地面附近的移載地點時，先將保持部切換成保持狀態，以使支撐部變得難以相對於移動部而移動，而變得容易將物品正確地降下至移載地點。 According to this structure, when the movable body moves along the rails arranged on the ceiling, the vibration generated when the movable body is moved on the joints of the rails, etc., can be suppressed by first switching the holding part to the released state. The situation communicated to the item. In addition, when the support located below the rail is lowered to the transfer location set near the ground, the holding part is first switched to the holding state, so that the support part becomes difficult to move relative to the moving part. And it becomes easy to drop the items correctly to the transfer location.

物品搬送裝置的特徵構成在於下述之點，並具備：移動體，沿著移動方向移動；支撐體，被前述移動體支撐且支撐物品；及支撐操作體，使前述支撐體相對於前述移動體在上下方向上移動，前述移動體具備：具備有車輪的第2移動部、相對於前述第2移動部在上下方向上移動自如地被連結且支撐前 述支撐體的第2支撐部、介於前述第2移動部與前述第2支撐部之間且在上下方向上彈性變形自如的第2彈性部、保持前述第2支撐部的第2保持部、及切換前述第2保持部的狀態之第2切換部，前述第2切換部是將前述第2保持部的狀態切換成第2保持狀態及第2保持解除狀態，該第2保持狀態是相對於前述第2移動部將前述第2支撐部保持在預定的位置之狀態，該第2保持解除狀態是解除對前述第2支撐部的保持而將前述第2支撐部設為相對於前述第2移動部在上下方向上移動自如的狀態。 The article conveying device is characterized by the following points, and is provided with: a moving body that moves along the moving direction; a support body that is supported by the moving body and supports the article; and a support operation body that makes the support body relative to the moving body Moving in the vertical direction, the moving body includes: a second moving part provided with wheels, and being connected and supported movably in the vertical direction with respect to the second moving part The second support portion of the support body, a second elastic portion that is interposed between the second moving portion and the second support portion and is elastically deformable in the vertical direction, a second holding portion that holds the second support portion, And a second switching section that switches the state of the second holding section, the second switching section switches the state of the second holding section to a second holding state and a second holding released state, and the second holding state is relative to The second moving part holds the second support part at a predetermined position, and the second holding release state is to release the holding of the second support part and set the second support part to move relative to the second support part. The state where the part can move freely in the up and down direction.

根據此構成，藉由將第2保持部切換成第2保持解除狀態，即變得可使第2支撐部相對於第2移動部彈性地在上下方向上移動，藉由將第2保持部切換成保持狀態，可將第2支撐部相對於第2移動部保持在預定的位置。 According to this structure, by switching the second holding portion to the second holding release state, the second support portion can be elastically moved in the vertical direction relative to the second moving portion, and by switching the second holding portion In the holding state, the second support portion can be held at a predetermined position with respect to the second moving portion.

因此，當第2移動體移動時，藉由將第2保持部切換成保持解除狀態，第2移動部移動時於第2移動部上產生的振動即可以藉由第2彈性部來吸收。據此，可以抑制於第2移動部上產生的振動傳達到物品的情形。又，當第2移動部移動時，藉由將第2保持部切換成保持狀態，即可以限制第2支撐部相對於第2移動部移動的情形。從而，在藉由支撐操作體使移動體在上下方向上移動來使物品移動到移載地點的情況下，可容易地使物品正確地移動到移載地點。 Therefore, when the second moving body moves, by switching the second holding part to the holding release state, the vibration generated in the second moving part when the second moving part moves can be absorbed by the second elastic part. According to this, it is possible to suppress transmission of the vibration generated in the second moving part to the article. In addition, when the second moving part moves, by switching the second holding part to the holding state, it is possible to restrict the movement of the second support part relative to the second moving part. Therefore, when the article is moved to the transfer location by supporting the operating body to move the moving body in the vertical direction, the article can be easily moved to the transfer location accurately.

像這樣，即可以提供一種物品搬送裝置，該物品搬送裝置可以抑制移動體移動時於移動體上產生的振動傳達到 物品的情形，並且可容易地於使支撐體移動時使物品移動到移載地點。 In this way, it is possible to provide an article conveying device that can suppress the vibration generated on the moving body from being transmitted to the moving body when the moving body moves. In the case of the article, the article can be easily moved to the transfer location when the support is moved.

產業上之可利用性 Industrial availability

本揭示之技術可以利用在物品搬送設備上，該物品搬送設備具備有移動體、被移動體支撐的支撐體、及使支撐體在上下方向上移動的支撐操作體。 The technology of the present disclosure can be used in an article conveying device that includes a movable body, a support body supported by the movable body, and a support operation body that moves the support body in the vertical direction.

21‧‧‧基部 21‧‧‧Base

22‧‧‧支撐機構(支撐體) 22‧‧‧Support mechanism (support)

30‧‧‧繩狀體 30‧‧‧Rope

34‧‧‧把持用馬達 34‧‧‧Control Motor

35‧‧‧把持爪 35‧‧‧holding claw

36‧‧‧卡合部 36‧‧‧Clamping Department

38‧‧‧移動部 38‧‧‧Mobile Department

38a‧‧‧第1部分 38a‧‧‧Part 1

39‧‧‧支撐部 39‧‧‧Support

39a‧‧‧第2部分 39a‧‧‧Part 2

40‧‧‧彈性部 40‧‧‧Elasticity

42‧‧‧被連接部 42‧‧‧Connected part

43‧‧‧底板 43‧‧‧Bottom plate

43a‧‧‧貫穿孔 43a‧‧‧through hole

44‧‧‧罩蓋 44‧‧‧Cover

44a‧‧‧第1孔 44a‧‧‧The first hole

44b‧‧‧第2孔 44b‧‧‧The second hole

46‧‧‧驅動部 46‧‧‧Drive

47‧‧‧升降板 47‧‧‧Lift board

47a‧‧‧塊體 47a‧‧‧Block

48‧‧‧保持用支撐部 48‧‧‧Supporting part for holding

51‧‧‧保持部 51‧‧‧Retention Department

51a‧‧‧第1滾輪 51a‧‧‧The first roller

52‧‧‧切換用汽缸(切換部) 52‧‧‧Cylinder for switching (switching part)

53‧‧‧連桿體 53‧‧‧Connecting rod body

53a‧‧‧第2滾輪(被操作部) 53a‧‧‧The second roller (operated part)

53b‧‧‧第3滾輪(操作部) 53b‧‧‧The third roller (operating part)

54‧‧‧連桿支撐體 54‧‧‧Connecting rod support

55‧‧‧按壓部 55‧‧‧Pressing part

A‧‧‧移動體 A‧‧‧Mobile

W‧‧‧容器(物品) W‧‧‧Container (item)

Wa‧‧‧凸緣部 Wa‧‧‧Flange

Wb‧‧‧容器本體部 Wb‧‧‧Container body

Wo‧‧‧凹部 Wo‧‧‧Concave

Claims (5)

一種物品搬送裝置，具備以下：移動體，沿著移動方向移動；支撐體，被前述移動體支撐且支撐物品；及支撐操作體，使前述支撐體相對於前述移動體在上下方向上移動，該物品搬送裝置具有以下的特徵：前述支撐體具備：藉由前述支撐操作體而被移動的移動部、相對於前述移動部在上下方向上移動自如地連結於前述移動部並且懸吊支撐物品的支撐部、介於前述移動部與前述支撐部之間且在上下方向上彈性變形自如的彈性部、保持前述支撐部的保持部、及切換前述保持部的狀態之切換部，前述切換部是將前述保持部的狀態切換成保持狀態與保持解除狀態，該保持狀態是相對於前述移動部將前述支撐部保持在上下方向之預定的位置之狀態，該保持解除狀態是解除對前述支撐部的保持而使前述支撐部相對於前述移動部在上下方向上移動自如的狀態。 An article conveying device includes the following: a moving body that moves in a moving direction; a support body that is supported by the moving body and supports the article; and a support operation body that moves the support body in the vertical direction relative to the moving body. The article conveying device has the following characteristics: the support body is provided with a moving part moved by the support operation body, and a support that is movably connected to the moving part in the vertical direction with respect to the moving part and suspends and supports the article Part, an elastic part that is interposed between the moving part and the support part and is elastically deformable in the vertical direction, a holding part holding the support part, and a switching part that switches the state of the holding part, the switching part is the The state of the holding portion is switched to a holding state and a holding released state. The holding state is a state in which the support portion is held at a predetermined position in the vertical direction with respect to the moving portion, and the holding released state is to release the holding of the support portion. A state in which the support portion is freely movable in the vertical direction with respect to the moving portion. 如請求項1之物品搬送裝置，其中，前述彈性部是以壓縮狀態被設置在前述移動部的第1部分、以及為前述支撐部的一部分且位於前述第1部分的正上方的第2部分之間，前述移動部具備有具有被操作部及操作部的連桿體，前述連桿體是藉由將前述被操作部朝下方按壓操作 而使前述操作部朝上方移動，以藉由該操作部將前述支撐部相對於前述移動部朝上方上推，前述支撐操作體是使前述支撐體在上下方向上移動到第1位置、第2位置及第3位置，該第1位置是前述移動體移動時的前述支撐體相對於前述移動體的位置，該第2位置是移動到比前述第1位置更上方的位置，該第3位置是移動到比前述第1位置更下方的位置，前述移動體具備有按壓部，該按壓部是藉由前述支撐體從前述第1位置移動到前述第2位置來將前述連桿體的前述被操作部朝下方按壓操作，且藉由前述支撐體從前述第2位置移動到前述第1位置來解除前述連桿體的前述被操作部之按壓操作。 The article conveying device of claim 1, wherein the elastic portion is provided in a compressed state in the first portion of the moving portion, and a second portion that is a part of the support portion and is located directly above the first portion In between, the moving part is provided with a link body having an operated part and an operating part, and the link body is operated by pressing the operated part downward. The operating portion is moved upward to push the support portion upward relative to the moving portion by the operating portion, and the support operating body moves the support body in the vertical direction to the first position and the second position. A position and a third position, the first position is the position of the support body relative to the movable body when the movable body moves, the second position is moved to a position higher than the first position, and the third position is Moved to a position lower than the first position, the movable body is provided with a pressing portion, and the pressing portion is operated by the supporting body moving from the first position to the second position. The part is pressed downward, and the pressing operation of the operated part of the link body is released by the support body moving from the second position to the first position. 如請求項2之物品搬送裝置，其中，具備有控制前述移動體、前述支撐操作體、以及前述切換部的控制部，前述控制部是執行：移動控制，將相對於降下物品的移載地點而事先設定的位置設為移動目的地，並使前述移動體從移動起點移動到前述移動目的地；降下控制，於使前述移動部從前述第1位置上升到前述第2位置後，使前述移動部從前述第2位置下降到前述第3位置，而將前述支撐部所支撐的物品降下到前述移載地點；及保持控制，在前述降下控制中以前述移動部位於前述 第2位置的狀態來將前述保持部從前述保持解除狀態切換到前述保持狀態，於藉由前述移動控制使前述移動體到達前述移動目的地之前，開始前述降下控制的執行。 An article conveying device according to claim 2, which includes a control unit that controls the moving body, the support operating body, and the switching unit, and the control unit executes: movement control, which is relative to the transfer location of the lowered article The position set in advance is set as the movement destination, and the moving body is moved from the starting point of the movement to the moving destination; the lowering control is to make the moving part after the moving part is raised from the first position to the second position Lowering from the second position to the third position, and lowering the article supported by the support part to the transfer location; and holding control, in the lowering control, the moving part is located in the aforementioned The state of the second position switches the holding portion from the holding released state to the holding state, and the execution of the lowering control is started before the moving body reaches the moving destination by the moving control. 如請求項1或2之物品搬送裝置，其中，前述移動體是以被配設在天花板的軌道所支撐的狀態沿著前述軌道移動，前述支撐體是位於前述軌道的下方且被前述移動體懸吊支撐。 The article conveying device of claim 1 or 2, wherein the movable body moves along the rail in a state supported by a rail provided on the ceiling, and the support body is located below the rail and is suspended by the movable body Hanging support. 一種物品搬送裝置，具備以下：移動體，沿著移動方向移動；支撐體，被前述移動體支撐且支撐物品；及支撐操作體，使前述支撐體相對於前述移動體在上下方向上移動，該物品搬送裝置具有以下的特徵：前述移動體具備：具備有車輪的第2移動部、相對於前述第2移動部在上下方向上移動自如地被連結且支撐前述支撐體的第2支撐部、介於前述第2移動部與前述第2支撐部之間且在上下方向上彈性變形自如的第2彈性部、保持前述第2支撐部的第2保持部、及切換前述第2保持部的狀態之第2切換部，前述第2切換部是將前述第2保持部的狀態切換成第2保持狀態及第2保持解除狀態，該第2保持狀態是相對於前述第2移動部將前述第2支撐部保持在預定的位置之狀 態，該第2保持解除狀態是解除對前述第2支撐部的保持而使前述第2支撐部相對於前述第2移動部在上下方向上移動自如的狀態。 An article conveying device includes the following: a moving body that moves in a moving direction; a support body that is supported by the moving body and supports the article; and a support operation body that moves the support body in the vertical direction relative to the moving body. The article conveying device has the following characteristics: the moving body includes: a second moving part provided with wheels, a second supporting part that is movably connected in the vertical direction with respect to the second moving part, and supports the supporting body; Between the second moving portion and the second support portion, a second elastic portion that is elastically deformable in the vertical direction, a second holding portion that holds the second support portion, and the state of the second holding portion is switched The second switching section, the second switching section switches the state of the second holding section to a second holding state and a second holding release state, and the second holding state is for supporting the second with respect to the second moving section Keep in a predetermined position In this state, the second holding release state is a state in which the holding of the second support portion is released, and the second support portion is free to move in the vertical direction with respect to the second moving portion.
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