JP2018039659A - Article conveyance device - Google Patents

Article conveyance device Download PDF

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JP2018039659A
JP2018039659A JP2016176981A JP2016176981A JP2018039659A JP 2018039659 A JP2018039659 A JP 2018039659A JP 2016176981 A JP2016176981 A JP 2016176981A JP 2016176981 A JP2016176981 A JP 2016176981A JP 2018039659 A JP2018039659 A JP 2018039659A
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moving
support
unit
holding
state
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JP6702106B2 (en
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大地 冨田
Daichi Tomita
大地 冨田
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Daifuku Co Ltd
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Daifuku Co Ltd
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Priority to JP2016176981A priority Critical patent/JP6702106B2/en
Priority to TW106127610A priority patent/TWI719238B/en
Priority to KR1020170113228A priority patent/KR102304194B1/en
Priority to CN201710806835.XA priority patent/CN107804640B/en
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67733Overhead conveying
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02Storage devices
    • B65G1/04Storage devices mechanical
    • B65G1/0492Storage devices mechanical with cars adapted to travel in storage aisles
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706Mechanical details, e.g. roller, belt
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67724Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67754Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber horizontal transfer of a batch of workpieces

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Carriers, Traveling Bodies, And Overhead Traveling Cranes (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide an article conveyance device which can suppress transmission of vibration generated in a mobile body when the mobile body moves to an article and easily move the article to a transfer spot when a movement part is moved.SOLUTION: A support body 22 includes: a movement part 38 which is moved by a support and operation body; a support part 39 which is connected to the movement part 38 in a freely-movable manner in the vertical direction with respect to the movement part 38 and supports an article W in a suspended manner; an elastic part 40 which is interposed between the movement part 38 and the support part 39; a holding part 51 which holds the support part 39; and a switching part 52 which switches the state of the holding part 51. The switching part 52 switches the state of the holding part 51 between the holding state of holding the support part 39 at a prescribed position with respect to the movement part 38 and the holding a release state of releasing holding of the support part 39 and making the support part 39 freely-movable in the vertical direction with respect to the movement part 38.SELECTED DRAWING: Figure 4

Description

本発明は、移動方向に沿って移動する移動体と、前記移動体に支持され且つ物品を支持する支持体と、前記支持体を前記移動体に対して上下方向に移動させる支持操作体と、を備えている物品搬送装置に関する。   The present invention includes a moving body that moves along a moving direction, a support that is supported by the moving body and supports an article, a support operation body that moves the support in the vertical direction with respect to the moving body, It is related with the article conveyance apparatus provided with.

かかる物品搬送装置の従来例が、特開2016−094263号公報(特許文献1)に記載されている。特許文献1の物品搬送装置では、支持体(支持機構23)に移動部(昇降体31)と支持部(搬送物支持部32)とを上下方向に移動自在に備え、移動部を支持操作体(昇降操作機構24)により上下方向に移動させ、支持部により物品を吊り下げ支持している。そして、移動部と支持部との間に弾性部(緩衝体36)とを備えて、移動体が移動するときに移動体に生じる振動を弾性部により吸収することで、振動が支持部に支持されている物品に伝わることを抑制していた。   A conventional example of such an article conveying apparatus is described in Japanese Patent Laid-Open No. 2006-094263 (Patent Document 1). In the article conveying apparatus of Patent Document 1, a moving part (lifting body 31) and a supporting part (conveyed object support part 32) are provided on a support (support mechanism 23) so as to be movable in the vertical direction, and the moving part is supported by a support operating body. It is moved up and down by (elevating operation mechanism 24), and the article is suspended and supported by the support portion. Then, an elastic portion (buffer body 36) is provided between the moving portion and the support portion, and the vibration generated in the moving body when the moving body moves is absorbed by the elastic portion, so that the vibration is supported by the support portion. It was restrained from being transmitted to the goods.

特開2016−094263号公報JP 2006-094263 A

上述のような物品搬送装置では、支持操作体により移動部を上下方向に移動させて物品を移載箇所に移動させる場合に、物品を移載箇所に正確に移動させることが求められる。しかし、物品に伝わる振動をより適切に抑制するために弾性変形し易い弾性部や大型の弾性部を用いると、移動部に対して支持部が移動し易くいため、支持操作体により移動部を上下方向に移動させて物品を移載箇所に移動させる場合に、物品を移載箇所に正確に移動させ難い。   In the article conveying apparatus as described above, when the moving unit is moved in the vertical direction by the support operation body to move the article to the transfer location, it is required to accurately move the article to the transfer location. However, if an elastic part that is easily elastically deformed or a large-sized elastic part is used to more appropriately suppress vibration transmitted to the article, the support part is easy to move with respect to the moving part. When the article is moved in the direction and moved to the transfer location, it is difficult to accurately move the article to the transfer location.

そこで、移動体が移動するときに移動体に生じる振動が物品に伝わることを抑制できながら、移動部を移動させたときに物品を移載箇所に移動させ易い物品搬送装置が求められる。   Therefore, there is a demand for an article transporting apparatus that can easily transfer an article to a transfer location when the moving unit is moved while suppressing vibration generated in the moving object from being transmitted to the article when the moving body moves.

本発明に係る物品搬送装置の特徴構成は、移動方向に沿って移動する移動体と、前記移動体に支持され且つ物品を支持する支持体と、前記支持体を前記移動体に対して上下方向に移動させる支持操作体と、を備えている物品搬送装置において、
前記支持体は、前記支持操作体により移動される移動部と、前記移動部に対して上下方向に移動自在に前記移動部に連結され且つ物品を吊り下げ支持する支持部と、前記移動部と前記支持部との間に介在する上下方向に弾性変形自在な弾性部と、前記支持部を保持する保持部と、前記保持部の状態を切り換える切換部と、を備え、
前記切換部は、前記移動部に対して前記支持部を所定の位置に保持する保持状態と、前記支持部に対する保持を解除して前記移動部に対して前記支持部を上下方向に移動自在とする保持解除状態と、に前記保持部の状態を切り換える点にある。
The characteristic configuration of the article transporting apparatus according to the present invention includes: a moving body that moves along a moving direction; a support that is supported by the moving body and supports an article; and the support body in a vertical direction with respect to the moving body. An article conveying apparatus comprising: a support operating body that is moved to
The support includes: a moving unit that is moved by the support operation body; a support unit that is connected to the moving unit so as to be movable in the vertical direction with respect to the moving unit; An elastic part that is elastically deformable in the vertical direction interposed between the support part, a holding part that holds the support part, and a switching part that switches a state of the holding part,
The switching unit is configured to hold the supporting unit at a predetermined position with respect to the moving unit, and to release the holding on the supporting unit and move the supporting unit up and down with respect to the moving unit. The holding state is switched between the holding release state and the holding state.

この特徴構成によれば、保持部を保持解除状態に切り換えることにより、支持部が移動部に対して弾性的に上下方向に移動可能となり、保持部を保持解除状態に切り換えることにより、支持部が移動部に対して所定の位置に保持される。
そのため、移動体が移動するときに保持部を保持解除状態に切り換えることで、移動部が移動するときに移動部に生じた振動を弾性部により吸収できるため、移動部に生じた振動が物品に伝わることを抑制できる。また、移動部が移動するときに保持部を保持状態に切り換えることで、移動部に対して支持部が移動することを規制できるため、支持操作体により移動部を上下方向に移動させて物品を移載箇所に移動させる場合に、物品を移載箇所に正確に移動させ易い。
このように、移動体が移動するときに移動体に生じる振動が物品に伝わることを抑制できながら、移動部を移動させたときに物品を移載箇所に移動させ易い物品搬送装置を提供できる。
According to this characteristic configuration, by switching the holding unit to the holding release state, the support unit can move elastically up and down with respect to the moving unit, and by switching the holding unit to the holding release state, the support unit is It is held at a predetermined position with respect to the moving part.
Therefore, by switching the holding unit to the holding release state when the moving body moves, vibration generated in the moving unit when the moving unit moves can be absorbed by the elastic unit. It is possible to suppress transmission. In addition, by switching the holding unit to the holding state when the moving unit moves, the support unit can be restricted from moving with respect to the moving unit. When moving to a transfer location, it is easy to accurately move the article to the transfer location.
In this way, it is possible to provide an article transporting apparatus that can easily move an article to a transfer location when the moving unit is moved while suppressing vibration generated in the moving body from being transmitted to the article when the moving body moves.

ここで、前記弾性部は、前記移動部の第1部分と、前記支持部の一部であり且つ前記第1部分の直上に位置する第2部分と、の間に圧縮状態で設けられ、前記移動部は、被操作部及び操作部を有するリンク体を備え、前記リンク体は、前記被操作部が下方に押し操作されることで前記操作部が上方に移動して当該操作部により前記支持部を前記移動部に対して上方に押し上げ、前記支持操作体は、前記移動体が移動する際の前記移動体に対する前記支持体の位置である第1位置と、前記第1位置より上方に移動した第2位置と、前記第1位置より下方に移動した第3位置と、に前記支持体を上下方向に移動させ、前記移動体は、前記支持体が前記第1位置から前記第2位置に移動することで前記リンク体の前記被操作部を下方に押し操作し、前記支持体が前記第2位置から前記第1位置に移動することで前記リンク体の前記被操作部の押し操作を解除する押圧部を備えていると好適である。   Here, the elastic part is provided in a compressed state between a first part of the moving part and a second part which is a part of the support part and is located immediately above the first part, The moving unit includes a link body having an operated part and an operating part, and the link body is supported by the operating part as the operating part moves upward when the operated part is pushed downward. The support operating body is moved upward from the first position and the first position, which is the position of the support relative to the moving body when the moving body moves. The support is moved in the up and down direction to the second position and the third position moved downward from the first position, and the movable body moves the support from the first position to the second position. By moving the operated part of the link body downward by moving, Wherein said link body by serial support is moved to said first position from said second position it is preferable that has a pressing portion for releasing the pushing operation of the operation unit.

この構成によれば、移動体が移動する場合は、支持体は第1位置に位置している。そして、支持体を第1位置から第2位置に上方に移動させた後に、支持体を第2位置から第3位置に下方に移動させることで、次のように支持体を保持できる。
つまり、支持体を第1位置から第2位置に上方に移動させることで、リンク体の被操作部が押圧部により押し操作される。これに伴って、リンク体の操作部が支持部を移動部に対して上方に押し上げ、移動部に対して支持部を所定の位置に位置させることができる。そして、このように、リンク体の作用により支持部を所定の位置に位置させた状態で、切換部により保持部を保持解除状態から保持状態に切り換える。このとき、支持部は所定の位置に位置しているため、切換部により保持部を保持解除状態から保持状態に切り換えるための操作力により支持部を移動させる必要がないため、切換部の操作力を小さくできる。
このように、支持操作体による支持体の操作力を利用して移動部に対する支持体の位置を変更することで、切換部の操作力が小さくて済む。
According to this configuration, when the moving body moves, the support body is located at the first position. Then, after the support is moved upward from the first position to the second position, the support can be held as follows by moving the support downward from the second position to the third position.
That is, the operated portion of the link body is pushed by the pressing portion by moving the support body upward from the first position to the second position. Accordingly, the operation unit of the link body pushes the support unit upward with respect to the moving unit, and the support unit can be positioned at a predetermined position with respect to the moving unit. In this manner, the holding unit is switched from the holding release state to the holding state by the switching unit while the support unit is positioned at a predetermined position by the action of the link body. At this time, since the support portion is located at a predetermined position, it is not necessary to move the support portion by the operation force for switching the holding portion from the holding release state to the holding state by the switching portion. Can be reduced.
Thus, the operation force of the switching unit can be reduced by changing the position of the support relative to the moving unit using the operation force of the support by the support operation body.

また、前記移動体、前記支持操作体、及び前記切換部を制御する制御部を備え、前記制御部は、物品を降ろす移載箇所に対して予め設定された位置を移動先として、移動元から前記移動先まで前記移動体を移動させる移動制御と、前記第1位置から前記第2位置に前記移動部を上昇させた後に前記第2位置から前記第3位置に前記移動部を下降させて、前記支持部に支持している物品を前記移載箇所に降ろす降し制御と、前記降し制御において前記移動部が前記第2位置に位置する状態で前記保持部を前記保持解除状態から前記保持状態に切り換える保持制御と、を実行し、前記移動制御により前記移動体が前記移動先に到着する前に前記降し制御の実行を開始すると好適である。   The moving unit, the support operating unit, and a control unit that controls the switching unit are provided, and the control unit starts from a movement source with a position set in advance as a movement destination where the article is unloaded. Movement control for moving the moving body to the destination, and after moving the moving unit from the first position to the second position, lowering the moving unit from the second position to the third position; Lowering control for lowering the article supported by the supporting portion to the transfer location, and holding the holding portion from the holding release state in a state where the moving portion is positioned at the second position in the lowering control. It is preferable that the holding control for switching to the state is executed, and that the lowering control is started before the moving body arrives at the destination by the movement control.

この構成によれば、走行制御を実行するときは、保持部を保持解除状態に切り換えておくことで、走行制御により移動体が移動元から移動するときに、移動体に生じた振動が物品に伝わることを抑制できる。そして、卸し制御を実行し、その卸し制御の実行中に保持制御を実行することで、物品を移載箇所に降ろす前に保持部を保持状態に切り換えることができるため、支持操作体により移動部を上下方向に移動させて物品を移載箇所に移動させる場合に、物品を移載箇所に正確に移動させ易い。
そして、移動制御により移動体が移動先に到着する前に降し制御の実行を開始するため、移動体が移動先に到着した後に卸し制御の実行を開始した場合に比べて、物品を移載箇所に迅速に降ろすことができる。
According to this configuration, when the travel control is executed, the holding unit is switched to the hold release state, so that when the mobile body moves from the movement source by the travel control, the vibration generated in the mobile body is applied to the article. It is possible to suppress transmission. Then, by executing the wholesale control and performing the holding control during the execution of the wholesale control, the holding unit can be switched to the holding state before the article is lowered to the transfer location, so that the moving unit can be moved by the support operation body. When the article is moved in the vertical direction to move the article to the transfer location, it is easy to accurately move the article to the transfer location.
Then, since the moving body starts moving down before the moving object arrives at the destination by the movement control, the article is transferred compared to the case where the wholesaler starts executing the wholesale control after the moving body arrives at the moving destination. Can be quickly lowered to a location.

また、前記移動体は、天井に配設されたレールに支持された状態で前記レールに沿って移動し、前記支持体は、前記レールの下方に位置して前記移動体に吊り下げ支持されていると好適である。   Further, the moving body moves along the rail while being supported by a rail disposed on a ceiling, and the support body is positioned below the rail and supported by being suspended from the moving body. It is preferable that

この構成によれば、天井に配設されたレールに沿って移動体が移動するときは、保持部を保持解除状態に切り換えておくことで、移動体がレールの繋ぎ目等を移動したときに生じた振動を、物品に伝わることを抑制できる。そして、レールの下方に位置する支持体が、床面近くに設定された移載箇所に容器を降ろすときに、保持部を保持状態に切り換えておくことで、支持部が移動部に対して移動し難くなり、移載箇所に物品を正確に降し易くなる。   According to this configuration, when the moving body moves along the rail disposed on the ceiling, the moving body moves the joint of the rail by switching the holding portion to the holding release state. It is possible to suppress the generated vibration from being transmitted to the article. Then, when the support body located below the rail lowers the container to the transfer location set near the floor surface, the support section moves relative to the moving section by switching the holding section to the holding state. It becomes difficult to accurately drop the article to the transfer location.

本発明に係る物品搬送装置の特徴構成は、移動方向に沿って移動する移動体と、前記移動体に支持され且つ物品を支持する支持体と、前記支持体を前記移動体に対して上下方向に移動させる支持操作体と、を備えている物品搬送装置において、
前記移動体は、車輪を備えた第2移動部と、前記第2移動部に対して上下方向に移動自在に連結され且つ前記支持体を支持する第2支持部と、前記第2移動部と前記第2支持部との間に介在する上下方向に弾性変形自在な第2弾性部と、前記第2支持部を保持する第2保持部と、前記第2保持部の状態を切り換える第2切換部と、を備え、前記第2切換部は、前記第2移動部に対して前記第2支持部を所定の位置に保持する第2保持状態と、前記第2支持部に対する保持を解除して前記第2移動部に対して前記第2支持部を上下方向に移動自在とする第2保持解除状態と、に前記第2保持部の状態を切り換える点にある。
The characteristic configuration of the article transporting apparatus according to the present invention includes: a moving body that moves along a moving direction; a support that is supported by the moving body and supports an article; and the support body in a vertical direction with respect to the moving body. An article conveying apparatus comprising: a support operating body that is moved to
The moving body includes a second moving portion having wheels, a second supporting portion that is movably connected to the second moving portion in the vertical direction and supports the supporting body, and the second moving portion. A second elastic part interposed between the second support part and elastically deformable in a vertical direction; a second holding part for holding the second support part; and a second switching for switching a state of the second holding part. A second holding state in which the second switching unit holds the second support unit in a predetermined position with respect to the second moving unit, and releases the hold on the second support unit. The second holding portion is switched to a second holding release state in which the second supporting portion is movable in the vertical direction with respect to the second moving portion.

この構成によれば、第2保持部を第2保持解除状態に切り換えることにより、第2支持部が第2移動部に対して弾性的に上下方向に移動可能となり、第2保持部を保持解除状態に切り換えることにより、第2支持部が第2移動部に対して所定の位置に保持される。
そのため、第2移動体が移動するときに第2保持部を保持解除状態に切り換えることで、第2移動部が移動するときに第2移動部に生じた振動を第2弾性部により吸収できるため、第2移動部に生じた振動が物品に伝わることを抑制できる。また、第2移動部が移動するときに第2保持部を保持状態に切り換えることで、第2移動部に対して第2支持部が移動することを規制できるため、支持操作体により移動体を上下方向に移動させて物品を移載箇所に移動させる場合に、物品を移載箇所に正確に移動させ易い。
このように、移動体が移動するときに移動体に生じる振動が物品に伝わることを抑制できながら、支持体を移動させたときに物品を移載箇所に移動させ易い物品搬送装置を提供できる。
According to this configuration, by switching the second holding portion to the second holding release state, the second support portion can move elastically in the vertical direction with respect to the second moving portion, and the second holding portion is released. By switching to the state, the second support part is held at a predetermined position with respect to the second moving part.
Therefore, when the second moving body moves, the second holding portion is switched to the holding release state, so that vibration generated in the second moving portion when the second moving portion moves can be absorbed by the second elastic portion. The vibration generated in the second moving part can be prevented from being transmitted to the article. In addition, when the second moving unit moves, the second holding unit is switched to the holding state so that the second supporting unit can be restricted from moving with respect to the second moving unit. When moving an article to a transfer location by moving it up and down, it is easy to accurately move the article to the transfer location.
In this way, it is possible to provide an article transport apparatus that can easily move an article to a transfer location when the support is moved while suppressing vibrations generated in the article when the moving body moves.

物品搬送設備の側面図Side view of goods transport equipment 物品搬送設備の側面図Side view of goods transport equipment 物品搬送車の側面図Side view of goods transport vehicle 走行用位置に位置する支持機構の縦断側面図Longitudinal side view of the support mechanism located at the travel position 移載用位置に位置する支持機構の縦断側面図Vertical side view of the support mechanism located at the transfer position 支持機構の横断平面図Transverse plan view of support mechanism 保持部が保持解除状態に切り換えられている支持機構の縦断正面図Longitudinal front view of the support mechanism in which the holding part is switched to the holding release state 保持部が保持状態に切り換えられている支持機構の縦断正面図Longitudinal front view of the support mechanism with the holding part switched to the holding state 切換用位置に位置する支持機構の一部縦断側面図Partial longitudinal sectional side view of the support mechanism located at the switching position 走行用位置に位置する支持機構の一部縦断側面図Partial longitudinal side view of the support mechanism located at the travel position 別実施形態(1)の保持部が保持解除状態に切り換えられている支持機構の縦断正面図Longitudinal front view of the support mechanism in which the holding part of another embodiment (1) is switched to the holding release state 別実施形態(1)の保持部が保持状態に切り換えられている支持機構の縦断正面図Longitudinal front view of the support mechanism in which the holding part of another embodiment (1) is switched to the holding state

以下、本発明にかかる物品搬送装置を備えた物品搬送設備の実施形態を図面に基づいて説明する。
図1及び図2に示すように、物品搬送設備には、物品搬送車1とレール2と処理装置3とが備えられている。レール2は、走行経路に沿って設置されており、天井に吊り下げ支持されている。物品搬送車1は、走行経路に沿ってレール2上を走行して容器Wを搬送する。物品搬送車1は、物品搬送装置に相当する。処理装置3は、容器Wに対する処理行う装置であり、床面上に設置されている。この処理装置3に隣接する状態で支持台4が設置されている。
Hereinafter, an embodiment of an article conveyance facility provided with an article conveyance device according to the present invention will be described based on the drawings.
As shown in FIGS. 1 and 2, the article transport facility includes an article transport vehicle 1, a rail 2, and a processing device 3. The rail 2 is installed along the traveling route and is supported by being suspended from the ceiling. The article transport vehicle 1 travels on the rail 2 along the travel route and transports the container W. The article transport vehicle 1 corresponds to an article transport apparatus. The processing device 3 is a device that performs processing on the container W, and is installed on the floor surface. A support base 4 is installed in a state adjacent to the processing apparatus 3.

容器Wは、複数枚の基板を収納可能で且つ基板の出し入れ口を塞ぐ蓋が着脱自在に備えられている容器であり、物品に相当する。本実施形態では、基板を半導体ウェハーとし、その半導体ウェハーを収容するFOUP(Front Opening Unified Pod)を容器Wとしている。
図3〜図5に示すように、容器Wには、容器Wの上端部に備えられて物品搬送車1の支持機構22に支持されるフランジ部Waと、フランジ部Waより下方に位置して複数枚の基板を収容する容器本体部Wbと、容器本体部Wbの前面に形成された基板出し入れ用の基板出入口を閉じる着脱自在な蓋体(図示せず)と、が備えられている。ちなみに、物品搬送車1は、フランジ部Waを吊り下げ支持した状態で容器Wを搬送する。
図4及び図5に示すように、フランジ部Waの上面(容器Wの上面)には、下方に凹入する円錐形状の凹部Woが形成されている。支持台4に容器Wが支持されている状態で、その容器Wに向けて支持機構22を下降移動させたときに、支持機構22に備えられている係合部36が上方から凹部Woに係合する。
The container W is a container that can store a plurality of substrates and that is detachably provided with a lid that closes the inlet / outlet of the substrates, and corresponds to an article. In this embodiment, the substrate is a semiconductor wafer, and a FOUP (Front Opening Unified Pod) that accommodates the semiconductor wafer is a container W.
As shown in FIGS. 3 to 5, the container W includes a flange portion Wa provided at the upper end portion of the container W and supported by the support mechanism 22 of the article transport vehicle 1, and positioned below the flange portion Wa. A container main body Wb that accommodates a plurality of substrates and a detachable lid (not shown) that closes a substrate entrance for loading and unloading the substrate formed on the front surface of the container main body Wb are provided. Incidentally, the article transport vehicle 1 transports the container W in a state where the flange portion Wa is suspended and supported.
As shown in FIG.4 and FIG.5, the conical recessed part Wo recessed downward is formed in the upper surface (upper surface of the container W) of the flange part Wa. When the support mechanism 22 is moved downward toward the container W while the container W is supported by the support base 4, the engaging portion 36 provided in the support mechanism 22 is engaged with the recess Wo from above. Match.

支持台4は、物品搬送車1の走行経路の直下に設置されており、物品搬送車1の走行方向に沿って複数設置されている。
物品搬送車1は、容器Wを支持台4に搬送するとともに、容器Wを支持台4から搬送する。そして、図外の搬送装置により、容器W全体又は容器W内の基板のみが、支持台4と処理装置3との間で搬送される。
The support base 4 is installed immediately below the travel route of the article transport vehicle 1, and a plurality of support stands 4 are installed along the travel direction of the article transport vehicle 1.
The article transport vehicle 1 transports the container W to the support base 4 and transports the container W from the support base 4. And the whole container W or only the board | substrate in the container W is conveyed between the support stand 4 and the processing apparatus 3 by the conveying apparatus outside a figure.

〔物品搬送車〕
次に、物品搬送車1について説明する。尚、物品搬送車1を説明するにあたり、物品搬送車1が水平な直線状の走行経路を走行している状態を想定して説明する。また、物品搬送車1が走行する方向を走行方向とし、上下方向にみて走行方向と直交する方向を幅方向として説明する。
図4に示すように、物品搬送車1は、天井に設置されたレール2に支持された状態でレール2に沿って移動する走行部15と、レール2の下方に位置して走行部15に吊り下げ支持されている本体部16と、を備えている。
[Goods transporter]
Next, the article transport vehicle 1 will be described. In the description of the article transport vehicle 1, the description will be made on the assumption that the article transport vehicle 1 is traveling on a horizontal linear travel route. The direction in which the article transport vehicle 1 travels is defined as a travel direction, and the direction perpendicular to the travel direction as viewed in the vertical direction is described as the width direction.
As shown in FIG. 4, the article transport vehicle 1 includes a traveling unit 15 that moves along the rail 2 while being supported by the rail 2 installed on the ceiling, and a traveling unit 15 that is positioned below the rail 2. And a main body 16 that is supported by suspension.

走行部15は、走行方向に並ぶ前走行部15Fと後走行部15Rとを備えている。前走行部15Fは、後走行部15Rより前方に位置している。前走行部15F及び後走行部15Rには、走行用モータ18にて回転される左右一対の走行輪19が装備されている。前走行部15Fの走行輪19及び後走行部15Rの走行輪19が走行用モータ18により回転されることによって、物品搬送車1が走行経路に沿って走行する。   The traveling unit 15 includes a front traveling unit 15F and a rear traveling unit 15R arranged in the traveling direction. The front traveling unit 15F is located in front of the rear traveling unit 15R. The front traveling unit 15F and the rear traveling unit 15R are equipped with a pair of left and right traveling wheels 19 that are rotated by a traveling motor 18. When the traveling wheels 19 of the front traveling unit 15F and the traveling wheels 19 of the rear traveling unit 15R are rotated by the traveling motor 18, the article transport vehicle 1 travels along the traveling route.

本体部16には、走行部15に連結される基部21と、容器Wを支持する支持機構22 と、支持機構22を走行部15に対して昇降移動させる昇降操作機構23と、上昇設定位置(図1等に示す位置)に上昇している支持機構22にて支持された容器Wの上方側及び走行方向両側を覆うカバー体24と、を備えている。尚、走行部15と基部21とにより、走行方向(移動方向)に沿って移動する移動体Aが構成されている。また、支持機構22が、移動体A(走行部15及び基部21)に支持され且つ容器Wを支持する支持体に相当する。また、昇降操作機構23が、支持機構22(支持体)を移動体A(走行部15及び基部21)に対して上下方向に移動させる支持操作体に相当する。   The main body 16 includes a base 21 connected to the traveling unit 15, a support mechanism 22 that supports the container W, a lifting operation mechanism 23 that moves the supporting mechanism 22 up and down relative to the traveling unit 15, and a lift setting position ( And a cover body 24 that covers the upper side of the container W supported by the support mechanism 22 rising to the position shown in FIG. Note that the traveling unit 15 and the base 21 constitute a moving body A that moves along the traveling direction (moving direction). Further, the support mechanism 22 corresponds to a support body that is supported by the moving body A (the traveling portion 15 and the base portion 21) and supports the container W. Moreover, the raising / lowering operation mechanism 23 is corresponded to the support operation body which moves the support mechanism 22 (support body) to an up-down direction with respect to the moving body A (running part 15 and base 21).

基部21は、走行部15が連結された連結基部と昇降操作機構23を支持する支持基部とを備えている。そして、基部21は、支持基部を連結基部に対して幅方向に沿ってスライド移動自在に構成されている。つまり、基部21は、昇降操作機構23及び支持機構22を走行部15に対して幅方向に移動させるスライド操作機構としての機能を備えている。   The base portion 21 includes a connection base portion to which the traveling portion 15 is connected and a support base portion that supports the lifting operation mechanism 23. And the base 21 is comprised so that a support base can be slidably moved along the width direction with respect to a connection base. That is, the base 21 has a function as a slide operation mechanism that moves the elevation operation mechanism 23 and the support mechanism 22 in the width direction with respect to the traveling unit 15.

昇降操作機構23には、先端部が支持機構22に接続されて支持機構22を吊り下げる複数の索状体30と、索状体30が巻回された巻回体31と、巻回体31を回転させる昇降用モータ32(図8参照)と、が備えられている。尚、本実施形態では、複数本の索条体として、3本のベルトが備えられている。
昇降操作機構23は、昇降用モータ32にて巻回体31を正逆に回転させて、複数の索状体30を巻き取り及び繰り出し操作を選択的に行うことで、支持機構22を走行用位置(図1参照)と移載用位置(図2参照)とに上下方向に移動させるように構成されている。走行用位置は、走行部15が走行する際の走行部15に対する支持機構22の位置である。物品搬送車1は、支持機構22が走行用位置に位置する状態で走行する。移載用位置は、走行用位置より下方の位置であり、移載用位置まで支持機構22を下降させることで支持機構22により支持された容器Wが支持台上に位置するときの支持機構22の位置である。
The lifting operation mechanism 23 includes a plurality of cord-like bodies 30 whose tip portions are connected to the support mechanism 22 to suspend the support mechanism 22, a wound body 31 around which the cord-like body 30 is wound, and a wound body 31. And an elevating motor 32 (see FIG. 8). In the present embodiment, three belts are provided as a plurality of cords.
The raising / lowering operation mechanism 23 rotates the winding body 31 in the forward / reverse direction by the raising / lowering motor 32 to selectively wind up and feed out the plurality of cord-like bodies 30, thereby causing the support mechanism 22 to travel. It is configured to move up and down between a position (see FIG. 1) and a transfer position (see FIG. 2). The traveling position is the position of the support mechanism 22 with respect to the traveling unit 15 when the traveling unit 15 travels. The article transport vehicle 1 travels with the support mechanism 22 positioned at the travel position. The transfer position is a position below the travel position, and the support mechanism 22 when the container W supported by the support mechanism 22 is positioned on the support base by lowering the support mechanism 22 to the transfer position. Is the position.

図3〜図5に示すように、支持機構22は、把持用モータ34の駆動により一対の把持爪35を互いに接近離間させるように構成されている。説明を加えると、支持機構22は、一対の把持爪35を接近させることで、一対の把持爪35が容器Wのフランジ部Waを支持する支持状態(図1参照)に切り換えられ、把持爪35を互いに離間させることで、一対の把持爪35による容器Wのフランジ部Waに対する支持を解除する支持解除状態(図2参照)に切り換えられる。このように、支持機構22は、把持用モータ34の駆動により支持状態と支持解除状態とに切換自在に構成されている。   As shown in FIGS. 3 to 5, the support mechanism 22 is configured to cause the pair of gripping claws 35 to approach and separate from each other by driving a gripping motor 34. In other words, the support mechanism 22 switches the pair of gripping claws 35 to a support state (see FIG. 1) that supports the flange portion Wa of the container W by bringing the pair of gripping claws 35 close to each other. By separating them from each other, it is switched to a support release state (see FIG. 2) in which the support for the flange portion Wa of the container W by the pair of gripping claws 35 is released. Thus, the support mechanism 22 is configured to be switchable between a support state and a support release state by driving the gripping motor 34.

支持機構22は、昇降操作機構23により移動される移動部38と、移動部38に対して上下方向に移動自在に移動部38に連結された支持部39と、移動部38と支持部39との間に介在する上下方向に弾性変形自在な弾性部40と、を備えている。なお、本実施形態では、弾性部40は、柱状に形成されたシリコンゴムを用いている。
移動部38には、索状体30の先端部が接続される被接続部42を備えている。支持部39は、把持爪35及び把持用モータ34を備えており、容器Wを吊り下げ支持する。弾性部40は、移動部38の第1部分38aと支持部39の第2部分39aと、の間に圧縮状態で設けられている。支持部39の第2部分39aは、移動部38の第1部分38aの直上に位置している。第1部分38aは移動部38の一部であり、第2部分39aは支持部39の一部である。
The support mechanism 22 includes a moving unit 38 that is moved by the lifting operation mechanism 23, a support unit 39 that is connected to the moving unit 38 so as to be movable in the vertical direction with respect to the moving unit 38, and the moving unit 38 and the support unit 39. And an elastic portion 40 that is elastically deformable in the vertical direction interposed between the two. In the present embodiment, the elastic portion 40 uses silicon rubber formed in a columnar shape.
The moving part 38 includes a connected part 42 to which the distal end part of the cord-like body 30 is connected. The support unit 39 includes a gripping claw 35 and a gripping motor 34, and supports the container W in a suspended manner. The elastic portion 40 is provided in a compressed state between the first portion 38 a of the moving portion 38 and the second portion 39 a of the support portion 39. The second portion 39 a of the support portion 39 is located immediately above the first portion 38 a of the moving portion 38. The first part 38 a is a part of the moving part 38, and the second part 39 a is a part of the support part 39.

弾性部40の下端部は、移動部38の第1部分38aに接着されており、弾性部40の上端部は、支持部39の第2部分39aに接着されている。このように、弾性部40により移動部38に対して支持部39が連結されている。そのため、物品搬送車1が走行したときに走行部15に発生した振動が弾性部40により吸収されることで、振動が支持部39やそれに支持された容器Wに伝わることを抑制できる。   The lower end portion of the elastic portion 40 is bonded to the first portion 38 a of the moving portion 38, and the upper end portion of the elastic portion 40 is bonded to the second portion 39 a of the support portion 39. As described above, the support portion 39 is connected to the moving portion 38 by the elastic portion 40. Therefore, the vibration generated in the traveling unit 15 when the article transport vehicle 1 travels is absorbed by the elastic unit 40, so that it is possible to suppress the vibration from being transmitted to the support unit 39 and the container W supported thereby.

移動部38は、底板43とこの底板43の上方を覆うカバー44と、を備えている。移動部38は、底板43とカバー44とで四角箱状に形成されており、被接続部42及び弾性部40は移動部38内に収容されており、支持部39は、把持爪35の一部等を除いて移動部38内に収容されている。底板43の上面に、被接続部42が連結されると共に弾性部40が接着されている。尚、カバー44には、索状体30が上下方向に挿通するための第1孔44aが形成されている。また、底板43における弾性部40が接着された部分が移動部38の第1部分38aに相当する。
移動部38は、上述の如く索状体30の先端部が接続される被接続部42を備えており、昇降操作機構23による複数の索状体30の巻き取り及び繰り出しにより、移動部38が上下方向に移動する。
The moving unit 38 includes a bottom plate 43 and a cover 44 that covers the bottom plate 43. The moving part 38 is formed in a square box shape by the bottom plate 43 and the cover 44, the connected part 42 and the elastic part 40 are accommodated in the moving part 38, and the support part 39 is one of the gripping claws 35. It is accommodated in the movement part 38 except a part etc. The connected portion 42 is coupled to the upper surface of the bottom plate 43 and the elastic portion 40 is bonded thereto. The cover 44 is formed with a first hole 44a through which the cable-like body 30 is inserted in the vertical direction. Further, the portion of the bottom plate 43 to which the elastic portion 40 is bonded corresponds to the first portion 38 a of the moving portion 38.
As described above, the moving unit 38 includes the connected portion 42 to which the distal end portion of the cord-like body 30 is connected. When the plurality of cord-like bodies 30 are wound and fed by the lifting operation mechanism 23, the moving portion 38 is Move up and down.

図6に示すように、本実施形態では、被接続部42は3つ備えられ、弾性部40は3つ備えられている。
支持機構22の走行方向の中心より走行方向の一方には、2つの被接続部42と1つの弾性部40とが設置されており、1つの弾性部40は、幅方向に見て、2つの被接続部42の双方と重なる状態で設置されている。2つの被接続部42は、幅方向に見て一部が重なる状態で設置され、且つ、互いに走行方向にずれた状態で設置されている。また、1つの弾性部40は、幅方向において他の2つの弾性部40の間に位置するように設置されている。
また、支持機構22の走行方向の中心より走行方向の他方には、1つの被接続部42と2つの弾性部40とが設置されており、2つの弾性部40の夫々は、幅方向に見て、1つの被接続部42と重なる状態で設置されている。2つの弾性部40は、幅方向に見て全体が重なる状態で設置され、互いに走行方向で同じ位置に設置されている。また、1つの被接続部42は、幅方向において他の2つの被接続部42の間に位置するように設置されている。
As shown in FIG. 6, in this embodiment, three connected parts 42 are provided, and three elastic parts 40 are provided.
Two connected parts 42 and one elastic part 40 are installed on one side of the running direction from the center of the running direction of the support mechanism 22, and one elastic part 40 has two two parts when viewed in the width direction. It is installed so as to overlap both of the connected parts 42. The two connected parts 42 are installed so as to partially overlap each other when viewed in the width direction, and are installed in a state shifted from each other in the traveling direction. Moreover, one elastic part 40 is installed so that it may be located between the other two elastic parts 40 in the width direction.
In addition, one connected portion 42 and two elastic portions 40 are installed on the other side of the traveling direction from the center of the supporting mechanism 22 in the traveling direction, and each of the two elastic portions 40 is viewed in the width direction. Thus, it is installed so as to overlap with one connected portion 42. The two elastic portions 40 are installed in a state where they are overlapped when viewed in the width direction, and are installed at the same position in the traveling direction. In addition, one connected portion 42 is installed so as to be positioned between the other two connected portions 42 in the width direction.

支持部39は、駆動部46と昇降板47とを備えている。駆動部46には、把持用モータ34が内装されており、把持爪35及び係合部36を下方に突出する状態で備えている。この把持爪35及び係合部36は、底板43に形成された貫通孔43aを貫通して底板43より下方に突出している。昇降板47は、駆動部46の上面に連結されており、駆動部46から横側方に突出している。昇降板47における駆動部46から横側方に突出部分の下面に弾性部40が接着されており、この昇降板47における弾性部40が接着された部分が第2部分39aに相当する。
図7及び図8に示すように、支持部39には、保持用支持部48と解除用凹部49とが備えられている。これら保持用支持部48及び解除用凹部49は、駆動部46の下端部に備えられている
The support unit 39 includes a drive unit 46 and a lift plate 47. The drive unit 46 includes a gripping motor 34, and includes a gripping claw 35 and an engaging portion 36 that protrude downward. The gripping claws 35 and the engaging portions 36 pass through through holes 43 a formed in the bottom plate 43 and protrude downward from the bottom plate 43. The elevating plate 47 is connected to the upper surface of the drive unit 46 and protrudes laterally from the drive unit 46. The elastic portion 40 is bonded to the lower surface of the protruding portion laterally from the driving portion 46 in the lifting plate 47, and the portion of the lifting plate 47 where the elastic portion 40 is bonded corresponds to the second portion 39a.
As shown in FIGS. 7 and 8, the support portion 39 includes a holding support portion 48 and a release recessed portion 49. The holding support portion 48 and the release recessed portion 49 are provided at the lower end portion of the drive portion 46.

支持機構22は、保持用支持部48を保持する保持部51と、保持部51の状態を切り換える切換部としての切換用シリンダ52と、被操作部としての第2ローラ53a及び操作部としての第3ローラ53bを有するリンク体53と、を備えている。   The support mechanism 22 includes a holding unit 51 that holds the holding support unit 48, a switching cylinder 52 that serves as a switching unit that switches the state of the holding unit 51, a second roller 53a that serves as an operated unit, and a second roller that serves as an operating unit. A link body 53 having three rollers 53b.

説明を加えると、底板43の上面に、リンク支持体54が立設されている。リンク体53はその長手方向の中間部が、リンク支持体54に揺動自在に支持されている。そして、リンク体53の長手方向の一端部には、第2ローラ53aが回転自在に備えられており、リンク体53の長手方向の他端部には、第3ローラ53bが回転自在に備えられている。第3ローラ53bは、昇降板47に備えられたブロック47aの直下に位置している。そのため、リンク体53は、第2ローラ53aが下方に押し操作されることで第3ローラ53bが上方に移動するように揺動して、第3ローラ53bにより支持部39を移動部38に対して上方に押し上げる。   In other words, the link support 54 is erected on the upper surface of the bottom plate 43. The link body 53 is supported at its longitudinal intermediate portion by a link support 54 so as to be swingable. A second roller 53a is rotatably provided at one end portion in the longitudinal direction of the link body 53, and a third roller 53b is rotatably provided at the other end portion in the longitudinal direction of the link body 53. ing. The third roller 53 b is located immediately below the block 47 a provided on the lifting plate 47. Therefore, the link body 53 swings so that the third roller 53b moves upward when the second roller 53a is pushed downward, and the third roller 53b moves the support portion 39 relative to the moving portion 38. And push it up.

切換用シリンダ52は、移動部38に対して支持部39を所定の位置に保持する保持状態(図5及び図8参照)と、支持部39に対する保持を解除して移動部38に対して支持部39を上下方向に移動自在とする保持解除状態(図4及び図7参照)と、に保持部51の状態を切り換える。
説明を加えると、保持部51における駆動部46に接触する部分に、走行方向に沿う軸心周りに回転自在な第1ローラ51aが備えられている。保持部51には、幅方向に間隔を空けた状態で一対の第1ローラ51aが備えられている。切換用シリンダ52は、そのロッドが保持部51に連結されている。そして、切換用シリンダ52は、伸縮して保持部51を幅方向に移動させることで、図7に示すように、一対の第1ローラ51aの双方が解除用凹部49の直下に位置する保持解除状態と、図8に示すように、一対の第1ローラ51aの双方が保持用支持部48の直下に位置する保持状態と、に保持部51の状態を切り換え可能に構成されている。
The switching cylinder 52 holds the support unit 39 in a predetermined position with respect to the moving unit 38 (see FIGS. 5 and 8), and releases the holding of the support unit 39 to support the moving unit 38. The state of the holding part 51 is switched between a holding release state (see FIGS. 4 and 7) in which the part 39 is movable in the vertical direction.
In other words, a portion of the holding unit 51 that contacts the driving unit 46 is provided with a first roller 51a that is rotatable about an axis along the traveling direction. The holding part 51 is provided with a pair of first rollers 51a with a gap in the width direction. The rod of the switching cylinder 52 is connected to the holding portion 51. Then, the switching cylinder 52 expands and contracts to move the holding portion 51 in the width direction, so that both of the pair of first rollers 51a are positioned just below the release recess 49 as shown in FIG. As shown in FIG. 8, the state of the holding portion 51 can be switched between a state and a holding state in which both of the pair of first rollers 51 a are located immediately below the holding support portion 48.

保持部51を保持状態に切り換えた状態では、保持部51により支持部39が下方から支持されることにより、支持部39は移動部38に対して所定の位置より下方に移動することが規制される。このように、支持部39は移動部38に対して所定の位置に保持される。ちなみに、支持部39が移動部38に対して所定の位置より上方に移動することは弾性部40により規制される。
また、保持部51を保持解除状態に切り換えた状態では、保持部51により支持部39が下方から支持されなくなるため、支持部39は移動部38に対して所定の位置より下方に移動することが許容される。これにより、支持部39に対する保持が解除される
In the state in which the holding unit 51 is switched to the holding state, the support unit 39 is supported from below by the holding unit 51, so that the support unit 39 is restricted from moving below a predetermined position with respect to the moving unit 38. The Thus, the support part 39 is held at a predetermined position with respect to the moving part 38. Incidentally, the elastic part 40 restricts the support part 39 from moving above the predetermined position with respect to the moving part 38.
Further, in the state where the holding unit 51 is switched to the holding release state, the support unit 39 is not supported from below by the holding unit 51, so that the support unit 39 can move downward from a predetermined position with respect to the moving unit 38. Permissible. Thereby, the holding | maintenance with respect to the support part 39 is cancelled | released.

昇降操作機構23は、走行用位置及び移載用位置に加えて、走行用位置より上方に設定された切換用位置に、支持機構22を移動させる。尚、走行用位置が第1位置に相当し、切換用位置が第2位置に相当し、移載用位置が第3位置に相当する。
そして、基部21には、押圧部55が備えられている。この押圧部55は、支持機構22が走行用位置から切換用位置に移動することでリンク体53の第2ローラ53aを下方に押し操作し、支持機構22が切換用位置から走行用位置に移動することでリンク体53の第2ローラ53aの押し操作を解除する
説明を加えると、カバー44には第2孔46aが形成されており、この第2孔46aは、第2ローラ53aの直上に位置している。基部21には押圧部55が備えられており、この押圧部55は、第2ローラ53aの直上に位置している。
The raising / lowering operation mechanism 23 moves the support mechanism 22 to a switching position set above the traveling position, in addition to the traveling position and the transfer position. The travel position corresponds to the first position, the switching position corresponds to the second position, and the transfer position corresponds to the third position.
The base portion 21 is provided with a pressing portion 55. The pressing portion 55 pushes the second roller 53a of the link body 53 downward by moving the support mechanism 22 from the traveling position to the switching position, and the support mechanism 22 moves from the switching position to the traveling position. In this way, the pushing operation of the second roller 53a of the link body 53 is released. In addition, the cover 44 is formed with a second hole 46a, and the second hole 46a is located immediately above the second roller 53a. positioned. The base portion 21 is provided with a pressing portion 55, and the pressing portion 55 is located immediately above the second roller 53a.

図4に示すように、保持部51が保持解除状態に切り換えられている状態であり、且つ、保持部51と弾性部40とリンク体53とのうちで弾性部40のみで支持部39が支持されている状態では、移動部38と支持部39との上下方向の離間距離は、移動部38に対して支持部39が所定の位置に位置しているときの移動部38と支持部39との上下方向の離間距離は狭い。
そして、図9に示すように、押圧部55により第2ローラ53aを下方に押し操作することで、リンク体53が揺動して第3ローラ53bにより昇降板47に固定されたブロック47aが上方に押し上げられ、支持部39は移動部38に対して所定の位置に位置する。
この状態で、図8に示すように、保持部51を保持解除状態から保持状態に切り換えることで、図10に示すように、押圧部55による押圧を解除して第3ローラ53bにより支持部39が上方に押し上げられなくたったとしても、支持部39は第1ローラ51aにより支持されているため、支持部39は移動部38に対して所定の位置に保持される。
As shown in FIG. 4, the holding portion 51 is switched to the holding release state, and the support portion 39 is supported only by the elastic portion 40 among the holding portion 51, the elastic portion 40, and the link body 53. In this state, the vertical distance between the moving unit 38 and the support unit 39 is such that the moving unit 38 and the support unit 39 when the support unit 39 is located at a predetermined position with respect to the moving unit 38. The vertical separation distance is small.
Then, as shown in FIG. 9, when the second roller 53a is pushed downward by the pressing portion 55, the link body 53 swings and the block 47a fixed to the lifting plate 47 by the third roller 53b moves upward. The support portion 39 is positioned at a predetermined position with respect to the moving portion 38.
In this state, as shown in FIG. 8, the holding portion 51 is switched from the holding release state to the holding state, so that the pressing by the pressing portion 55 is released and the supporting portion 39 is supported by the third roller 53b as shown in FIG. Even if the support portion 39 is not pushed upward, since the support portion 39 is supported by the first roller 51a, the support portion 39 is held at a predetermined position with respect to the moving portion 38.

〔制御部〕
物品搬送車1には、移動体A、昇降操作機構23、及び切換用シリンダ52を制御して物品搬送車1の作動を制御する制御部Hが備えられている。
制御部Hは、地上側に設置される上位コントローラからの搬送指令に基づいて、容器Wを搬送元の支持台4から受け取る受取処理と、容器Wを搬送先の支持台4に受け渡す受渡処理と、を実行するべく、物品搬送車1に設けられているモータ類の作動を制御するように構成されている。物品搬送車1は、受取処理を実行して搬送元の支持台4から容器Wを受け取り、受渡処理を実行して搬送先の支持台4に容器Wを受け渡すことで、搬送元の支持台4から搬送先の支持台4に容器Wを搬送する。
(Control part)
The article transport vehicle 1 includes a control unit H that controls the moving body A, the lifting operation mechanism 23, and the switching cylinder 52 to control the operation of the article transport vehicle 1.
The control unit H receives a process for receiving the container W from the support base 4 as a transport source and a delivery process for delivering the container W to the support base 4 as a transport destination based on a transport command from a host controller installed on the ground side. In order to execute the above, the operation of the motors provided in the article transport vehicle 1 is controlled. The article transport vehicle 1 executes a receiving process, receives the container W from the support base 4 of the transport source, executes a delivery process, and delivers the container W to the support base 4 of the transport destination, whereby the support base of the transport source The container W is transported from 4 to the support base 4 at the transport destination.

受渡処理では、走行制御、下降昇降制御、爪離間制御、上昇昇降制御の順で実行する。
受渡処理の走行制御は、搬送元の支持台4に対応する停止位置を走行元とし、搬送先の支持台4に対応する停止位置を走行先として、走行元から走行先に走行部15を走行させるべく走行用モータ18の作動を制御する。ちなみに、受渡処理における走行制御は、支持機構22にて容器Wを支持している状態で実行される。この走行制御が、容器Wを降ろす移載箇所に対して予め設定された位置を走行先(移動先)として、走行元(移動元)から走行先(移動先)まで移動体Aを移動させる移動制御に相当する。
In the delivery process, the running control, the descending / lowering control, the claw separation control, and the ascending / descending control are executed in this order.
In the travel control of the delivery process, the travel position 15 travels from the travel source to the travel destination, with the stop position corresponding to the support base 4 as the transport source as the travel source and the stop position corresponding to the support base 4 as the transport destination as the travel destination. In order to achieve this, the operation of the traveling motor 18 is controlled. Incidentally, the traveling control in the delivery process is executed in a state where the container W is supported by the support mechanism 22. The travel control moves the moving object A from the travel source (movement source) to the travel destination (movement destination), with the position set in advance for the transfer location where the container W is lowered as a travel destination (movement destination). It corresponds to control.

下降昇降制御は、支持機構22を走行用位置から切換用位置に上方に移動させた後、保持部51を保持解除状態から保持状態に切り換え、その後、支持機構22を切換用位置から移載用位置に下方に移動させるべく、昇降用モータ32及び切換用シリンダ52の作動を制御する。つまり、この下降昇降制御では、走行用位置から切換用位置に移動部38を上昇させた後に切換用位置から移載用位置まで移動部38を下降させて、支持部39に支持している容器Wを移載箇所に降ろす降し制御と、降し制御において移動部38が切換用位置に位置する状態で保持部51を保持解除状態から保持状態に切り換える保持制御と、が実行される。   In the descending / lowering control, after the support mechanism 22 is moved upward from the travel position to the switching position, the holding portion 51 is switched from the holding release state to the holding state, and then the support mechanism 22 is transferred from the switching position. The operation of the raising / lowering motor 32 and the switching cylinder 52 is controlled in order to move the position downward. That is, in this descending and raising / lowering control, after the moving unit 38 is lifted from the traveling position to the switching position, the moving unit 38 is lowered from the switching position to the transfer position and supported by the support unit 39. The lowering control for lowering W to the transfer position and the holding control for switching the holding unit 51 from the holding release state to the holding state in the state where the moving unit 38 is located at the switching position in the lowering control are executed.

爪離間制御は、支持機構22を支持状態から支持解除状態に切り換えるべく把持用モータ34の作動を制御する。
上昇昇降制御は、支持機構22を移載用位置から切換用位置に上方に移動させた後、保持部51を保持状態から保持解除状態に切り換え、その後、支持機構22を切換用位置から走行用位置に下方に移動させるべく、昇降用モータ32及び切換用シリンダ52の作動を制御する。
The claw separation control controls the operation of the gripping motor 34 to switch the support mechanism 22 from the support state to the support release state.
In ascending / descending control, after the support mechanism 22 is moved upward from the transfer position to the switching position, the holding portion 51 is switched from the holding state to the holding release state, and then the support mechanism 22 is moved from the switching position for traveling. The operation of the raising / lowering motor 32 and the switching cylinder 52 is controlled in order to move the position downward.

このように本実施形態では、制御部Hは、走行部15が走行している間は、保持部51を保持解除状態に切り換え、走行部15が停止し且つ支持機構22を上下方向に移動している間は、保持部51を保持状態に切り換えるように、物品搬送車1を制御している。つまり、制御部Hは、走行制御により走行部15が走行先に到着して走行制御が完了した後に、卸し制御及び保持制御を実行する。   As described above, in this embodiment, the control unit H switches the holding unit 51 to the holding release state while the traveling unit 15 is traveling, stops the traveling unit 15, and moves the support mechanism 22 in the vertical direction. The article transport vehicle 1 is controlled so that the holding unit 51 is switched to the holding state while the holding unit 51 is in the holding state. That is, the control unit H executes the wholesale control and the holding control after the travel unit 15 arrives at the travel destination by the travel control and the travel control is completed.

受取処理では、走行制御、下降昇降制御、爪接近制御、上昇昇降制御の順で実行する。
尚、受取処理の走行制御は、走行部15を搬送元の支持台4に対応する位置に走行させるべく走行用モータ18の作動を制御する、その走行制御は、支持機構22にて容器Wを支持していない状態で実行される点、及び、爪離間制御に代えて、支持機構22を支持解除状態から支持状態に切り換えるべく把持用モータ34の作動を制御する爪接近制御を実行する点以外は、受渡処理と同様である。
In the receiving process, the running control, the descending / lowering control, the claw approaching control, and the ascending / descending control are executed in this order.
Note that the travel control of the receiving process controls the operation of the travel motor 18 so that the travel unit 15 travels to a position corresponding to the support base 4 that is the conveyance source. Other than the point that is executed in the unsupported state and the point that the nail approach control is performed to control the operation of the gripping motor 34 to switch the support mechanism 22 from the support release state to the support state instead of the nail separation control. Is the same as the delivery process.

〔別実施形態〕
(1)上記実施形態では、支持体に移動部と支持部と弾性部と切換部とを備えたが、移動体に移動部と支持部と弾性部と切換部とを備えてもよい。
具体的には、図11及び図12に示すように、移動体Aに、走行輪19(車輪)を備えた第2移動部61(走行部15と基部21の一部とで構成)と、第2移動部61に対して上下方向に移動自在に連結され且つ支持機構22(支持体)を支持する第2支持部62と、第2移動部61と第2支持部62との間に介在する上下方向に弾性変形自在な第2弾性部63と、第2支持部62を保持する第2保持部64と、第2保持部64の状態を切り換える第2切換部65と、を備える。
第2切換部65は、第2移動部61に対して第2支持部62を所定の位置に保持する第2保持状態(図12参照)と、第2支持部62に対する保持を解除して第2移動部61に対して第2支持部62を上下方向に移動自在とする第2保持解除状態(図11参照)と、に第2保持部64の状態を切り換えるように構成する。
[Another embodiment]
(1) In the said embodiment, although the support part was provided with the moving part, the support part, the elastic part, and the switching part, you may provide a moving part, a support part, an elastic part, and a switching part in a moving body.
Specifically, as shown in FIGS. 11 and 12, the moving body A includes a second moving unit 61 (comprising a traveling unit 15 and a part of the base 21) provided with traveling wheels 19 (wheels); A second support portion 62 that is connected to the second moving portion 61 so as to be movable in the vertical direction and supports the support mechanism 22 (support), and is interposed between the second moving portion 61 and the second support portion 62. And a second elastic part 63 that is elastically deformable in the vertical direction, a second holding part 64 that holds the second support part 62, and a second switching part 65 that switches the state of the second holding part 64.
The second switching unit 65 releases the second holding unit 62 from a second holding state (see FIG. 12) in which the second supporting unit 62 is held at a predetermined position with respect to the second moving unit 61 and releases the holding to the second supporting unit 62. The second holding portion 64 is configured to be switched between a second holding release state (see FIG. 11) in which the second support portion 62 is movable in the vertical direction with respect to the two moving portions 61.

(2)上記実施形態では、制御部が、移動制御により移動部が移動先に到着した後に、卸し制御を開始するように、移動制御及び降し制御を実行したが、制御部が、移動制御により移動部の移動が開始した後、当該移動制御により移動部が移動先に到着する前に、卸し制御を開始し、移動制御により移動部が移動先に到着した後に、卸し制御が完了するように、移動制御及び降し制御を実行してもよい。 (2) In the above embodiment, the control unit executes the movement control and the lowering control so that the wholesale control is started after the movement unit arrives at the destination by the movement control. However, the control unit performs the movement control. After the movement of the moving unit starts, the wholesale control is started before the moving unit arrives at the destination by the movement control, and the wholesale control is completed after the moving unit arrives at the destination by the movement control. In addition, movement control and lowering control may be executed.

(3)上記実施形態では、支持部の第2部分を、移動部の第1部分の直上に位置させて、弾性部を、移動部の第1部分と支持部の第2部分との間に圧縮状態で設けたが、支持部の第2部分を、移動部の第1部分の直下に位置させて、弾性部を、移動部の第1部分と支持部の第2部分との間に引張状態で設けてもよい。
また、上記実施形態では、弾性部として、柱状のシリコンゴムを用いたが、弾性体は、スプリングや板バネ等の別の弾性部材を用いてもよく、材質や形状は適宜変更してもよい。
(3) In the above-described embodiment, the second portion of the support portion is positioned immediately above the first portion of the moving portion, and the elastic portion is interposed between the first portion of the moving portion and the second portion of the support portion. Although provided in a compressed state, the second portion of the support portion is positioned directly below the first portion of the moving portion, and the elastic portion is pulled between the first portion of the moving portion and the second portion of the support portion. You may provide in a state.
Moreover, in the said embodiment, columnar silicon rubber was used as an elastic part, However, Another elastic member, such as a spring and a leaf | plate spring, may be used for an elastic body, and a material and a shape may be changed suitably. .

(4)上記実施形態では、移動体が、天井に配設されたレールに支持された状態でレールに沿って移動し、支持体が、レールの下方に位置して移動体に吊り下げ支持されるように、物品搬送車を構成したが、移動体が、床面に設置されたレールに支持された状態でレールに沿って移動し、支持体が、レールの上方に位置して移動体に支持されるように、物品搬送車を構成してもよい。 (4) In the above embodiment, the moving body moves along the rail while being supported by the rail disposed on the ceiling, and the support body is suspended and supported by the moving body below the rail. Although the article transport vehicle is configured as described above, the moving body moves along the rail while being supported by the rail installed on the floor surface, and the supporting body is positioned above the rail to be the moving body. You may comprise an article conveyance vehicle so that it may be supported.

(5)上記実施形態では、支持体を第2位置に上昇させた状態で、保持部を保持解除状態から保持状態に切り換えたが、支持体を第1位置に位置させた状態で、又は、支持体を第1位置から第3位置に向けて下降させながらで、保持部を保持解除状態から保持状態に切り換えるようにしてもよい。
具体的には、例えば、切換部を、保持部を上下方向に移動させるように構成し、弾性体のみで支持されている支持部より下方に保持部を退避させた状態を保持解除状態とし、移動部に対して所定の位置に位置する支持部を保持部により下方から支持する状態を保持状態として、切換部により保持部を上下方向に移動させることで、保持解除状態と保持状態とに保持部を切り換えるようにしてもよい。
(5) In the above embodiment, the holding unit is switched from the holding release state to the holding state with the support raised to the second position, but with the support positioned at the first position, or The holding unit may be switched from the holding release state to the holding state while lowering the support body from the first position toward the third position.
Specifically, for example, the switching unit is configured to move the holding unit in the vertical direction, and the state in which the holding unit is retracted below the support unit supported only by the elastic body is set as the holding release state. The state where the support unit located at a predetermined position with respect to the moving unit is supported from below by the holding unit is set to the holding state, and the holding unit is moved in the vertical direction by the switching unit to be held in the holding release state and the holding state The parts may be switched.

1 物品搬送車(物品搬送装置)
22 支持機構(支持体)
23 昇降操作機構(支持操作体)
38 移動部
38a 第1部分
39 支持部
39a 第2部分
40 弾性部
51 保持部
52 切換用シリンダ(切換部)
53 リンク体
53a 第2ローラ(被操作部)
53b 第3ローラ(操作部)
55 押圧部
61 第2移動部
62 第2支持部
63 第2弾性部
64 第2保持部
65 第2切換部
A 移動体
H 制御部
W 容器(物品)
1 Goods transport vehicle (goods transport device)
22 Support mechanism (support)
23 Elevating operation mechanism (support operating body)
38 moving part 38a first part 39 support part 39a second part 40 elastic part 51 holding part 52 switching cylinder (switching part)
53 Link body 53a Second roller (operated part)
53b Third roller (operation unit)
55 pressing part 61 second moving part 62 second support part 63 second elastic part 64 second holding part 65 second switching part A moving body H control part W container (article)

Claims (5)

移動方向に沿って移動する移動体と、前記移動体に支持され且つ物品を支持する支持体と、前記支持体を前記移動体に対して上下方向に移動させる支持操作体と、を備えている物品搬送装置であって、
前記支持体は、前記支持操作体により移動される移動部と、前記移動部に対して上下方向に移動自在に前記移動部に連結され且つ物品を吊り下げ支持する支持部と、前記移動部と前記支持部との間に介在する上下方向に弾性変形自在な弾性部と、前記支持部を保持する保持部と、前記保持部の状態を切り換える切換部と、を備え、
前記切換部は、前記移動部に対して前記支持部を所定の位置に保持する保持状態と、前記支持部に対する保持を解除して前記移動部に対して前記支持部を上下方向に移動自在とする保持解除状態と、に前記保持部の状態を切り換える物品搬送装置。
A moving body that moves along a moving direction; a support that is supported by the moving body and supports an article; and a support operation body that moves the support in a vertical direction with respect to the moving body. An article conveying device comprising:
The support includes: a moving unit that is moved by the support operation body; a support unit that is connected to the moving unit so as to be movable in the vertical direction with respect to the moving unit; An elastic part that is elastically deformable in the vertical direction interposed between the support part, a holding part that holds the support part, and a switching part that switches a state of the holding part,
The switching unit is configured to hold the supporting unit at a predetermined position with respect to the moving unit, and to release the holding on the supporting unit and move the supporting unit up and down with respect to the moving unit. An article conveying apparatus that switches the state of the holding unit between a holding release state and a holding release state.
前記弾性部は、前記移動部の第1部分と、前記支持部の一部であり且つ前記第1部分の直上に位置する第2部分と、の間に圧縮状態で設けられ、
前記移動部は、被操作部及び操作部を有するリンク体を備え、
前記リンク体は、前記被操作部が下方に押し操作されることで前記操作部が上方に移動して当該操作部により前記支持部を前記移動部に対して上方に押し上げ、
前記支持操作体は、前記移動体が移動する際の前記移動体に対する前記支持体の位置である第1位置と、前記第1位置より上方に移動した第2位置と、前記第1位置より下方に移動した第3位置と、に前記支持体を上下方向に移動させ、
前記移動体は、前記支持体が前記第1位置から前記第2位置に移動することで前記リンク体の前記被操作部を下方に押し操作し、前記支持体が前記第2位置から前記第1位置に移動することで前記リンク体の前記被操作部の押し操作を解除する押圧部を備えている請求項1に記載の物品搬送装置。
The elastic part is provided in a compressed state between a first part of the moving part and a second part that is a part of the support part and is located immediately above the first part,
The moving part includes a link body having an operated part and an operating part,
The link body is configured such that when the operated portion is pushed downward, the operating portion moves upward and the operating portion pushes the support portion upward relative to the moving portion.
The support operation body includes a first position which is a position of the support body with respect to the moving body when the moving body moves, a second position moved upward from the first position, and a lower position than the first position. Moving the support in the up and down direction to the third position moved to
The moving body pushes the operated portion of the link body downward by moving the support body from the first position to the second position, and the support body is moved from the second position to the first position. The article conveying apparatus according to claim 1, further comprising a pressing unit that releases a pressing operation of the operated unit of the link body by moving to a position.
前記移動体、前記支持操作体、及び前記切換部を制御する制御部を備え、
前記制御部は、物品を降ろす移載箇所に対して予め設定された位置を移動先として、移動元から前記移動先まで前記移動体を移動させる移動制御と、前記第1位置から前記第2位置に前記移動部を上昇させた後に前記第2位置から前記第3位置に前記移動部を下降させて、前記支持部に支持している物品を前記移載箇所に降ろす降し制御と、前記降し制御において前記移動部が前記第2位置に位置する状態で前記保持部を前記保持解除状態から前記保持状態に切り換える保持制御と、を実行し、
前記移動制御により前記移動体が前記移動先に到着する前に前記降し制御の実行を開始する請求項2記載の物品搬送装置。
A controller that controls the movable body, the support operation body, and the switching unit;
The control unit includes a movement control for moving the moving body from a movement source to the movement destination, and a second position from the first position, with a position set in advance as to the transfer position where the article is unloaded. A lowering control for lowering the moving part from the second position to the third position and lowering the article supported by the supporting part to the transfer position. And holding control for switching the holding unit from the holding release state to the holding state in a state where the moving unit is located at the second position in the control,
The article conveying apparatus according to claim 2, wherein execution of the lowering control is started before the moving body reaches the destination by the movement control.
前記移動体は、天井に配設されたレールに支持された状態で前記レールに沿って移動し、
前記支持体は、前記レールの下方に位置して前記移動体に吊り下げ支持されている請求項1から3の何れか一項に記載の物品搬送装置。
The moving body moves along the rail while being supported by a rail disposed on the ceiling,
The article transport apparatus according to any one of claims 1 to 3, wherein the support body is positioned below the rail and supported by being suspended from the moving body.
移動方向に沿って移動する移動体と、前記移動体に支持され且つ物品を支持する支持体と、前記支持体を前記移動体に対して上下方向に移動させる支持操作体と、を備えている物品搬送装置であって、
前記移動体は、車輪を備えた第2移動部と、前記第2移動部に対して上下方向に移動自在に連結され且つ前記支持体を支持する第2支持部と、前記第2移動部と前記第2支持部との間に介在する上下方向に弾性変形自在な第2弾性部と、前記第2支持部を保持する第2保持部と、前記第2保持部の状態を切り換える第2切換部と、を備え、
前記第2切換部は、前記第2移動部に対して前記第2支持部を所定の位置に保持する第2保持状態と、前記第2支持部に対する保持を解除して前記第2移動部に対して前記第2支持部を上下方向に移動自在とする第2保持解除状態と、に前記第2保持部の状態を切り換える物品搬送装置。
A moving body that moves along a moving direction; a support that is supported by the moving body and supports an article; and a support operation body that moves the support in a vertical direction with respect to the moving body. An article conveying device comprising:
The moving body includes a second moving portion having wheels, a second supporting portion that is movably connected to the second moving portion in the vertical direction and supports the supporting body, and the second moving portion. A second elastic part interposed between the second support part and elastically deformable in a vertical direction; a second holding part for holding the second support part; and a second switching for switching a state of the second holding part. And comprising
The second switching unit has a second holding state in which the second supporting unit is held at a predetermined position with respect to the second moving unit, and releases the holding on the second supporting unit to the second moving unit. On the other hand, the article conveying apparatus which switches the state of the second holding part between a second holding release state in which the second supporting part is movable in the vertical direction.
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