CN107804640A - Apparatus for handling goods - Google Patents
Apparatus for handling goods Download PDFInfo
- Publication number
- CN107804640A CN107804640A CN201710806835.XA CN201710806835A CN107804640A CN 107804640 A CN107804640 A CN 107804640A CN 201710806835 A CN201710806835 A CN 201710806835A CN 107804640 A CN107804640 A CN 107804640A
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- CN
- China
- Prior art keywords
- support
- state
- move portion
- moving body
- move
- Prior art date
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67733—Overhead conveying
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0492—Storage devices mechanical with cars adapted to travel in storage aisles
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67754—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber horizontal transfer of a batch of workpieces
Abstract
Supporting mass(22)Possesses the move portion moved by support operational body(38), relative to move portion(38)Along the vertical direction movably with move portion(38)Link and by article(W)The support of hanger bearing(39), between move portion(38)And support(39)Between elastic portion(40), keep support(39)Maintaining part(51), switching maintaining part(51)State switching part(52), switching part(52)By maintaining part(51)State switch between following states:By support(39)Relative to move portion(38)And it is maintained at the hold mode of set position, releases to support(39)Holding and make support(39)Relative to move portion(38)The holding moved along the vertical direction freely releases state.
Description
Technical field
The present invention relates to apparatus for handling goods, the apparatus for handling goods possesses:It is the moving body that is moved along moving direction, upper
State moving body supporting and the supporting mass of supports articles, the branch that makes above-mentioned supporting mass be moved along the vertical direction relative to above-mentioned moving body
Hold operating body.
Background technology
The conventional example of related apparatus for handling goods is recorded in Japanese Unexamined Patent Publication 2016-094263 publications(Patent document 1).
In the apparatus for handling goods of patent document 1, supporting mass(Supporting device 23)Movably possesses move portion along the vertical direction
(Lifting body 31)And support(Carry thing support 32), utilize support operational body(Descending operation mechanism 24)By move portion along upper
Lower direction movement, using support by article hanger bearing.Also, possesses elastic portion between move portion and support(Buffering
Body 36), absorbed when moving body moves using elastic portion in vibration caused by moving body, thus suppress vibration and be delivered to by supporting
The article of portion's supporting.
In apparatus for handling goods as described above, seek moving move portion along the vertical direction using support operational body
And in the case that article is moved into transfer position, article is shifted exactly to transfer position.But if in order to more suitably
Suppress be delivered to article vibration and use easy elastic deformation elastic portion, large-scale elastic portion, then make support relative to
Move portion easily moves.Therefore, move portion is moved along the vertical direction using support operational body and article is moved to transfer
In the case of position, it is difficult to which article is shifted exactly into transfer position.
The content of the invention
Therefore, a kind of apparatus for handling goods is sought, it can suppress when moving body moves in vibration caused by moving body
Article is delivered to, while article is moved to transfer position when moving move portion.
The feature structure of apparatus for handling goods is that the apparatus for handling goods possesses:Moving body, it is moved along moving direction
It is dynamic;Supporting mass, it is supported and supports articles by the moving body;And support operational body, its make the supporting mass relative to
The moving body moves along the vertical direction,
The supporting mass possesses:Move portion, it is moved by the support operational body;Support, it is relative to the movement
Portion is movably linked to the move portion and carries out hanger bearing to article along the vertical direction;Elastic portion, its between
Elastic deformation is freely between the move portion and the support and along the vertical direction;Maintaining part, it keeps the support;
And switching part, it switches the state of the maintaining part,
The state of the maintaining part in hold mode and is kept switching between releasing state, the hold mode by the switching part
It is the state that the support is maintained to set position relative to the move portion, the holding releasing state is releasing pair
The holding of the support simultaneously makes the support move state freely along the vertical direction relative to the move portion.
According to the structure, releasing state is kept by the way that maintaining part is switched to, and enables support relative to move portion
Flexibly move along the vertical direction, by the way that maintaining part is switched into hold mode, and support is kept relative to move portion
In set position.
Therefore, when moving body moves, maintaining part is switched to and keeps releasing state, thus, it is possible to when move portion moves
Absorbed by elastic portion in vibration caused by move portion.Therefore, it is possible to suppress to be delivered to article in vibration caused by move portion.Separately
Outside, when move portion moves, maintaining part is switched into hold mode, moved thus, it is possible to limit support relative to move portion.
Therefore, move portion is moved along the vertical direction using support operational body and in the case of article is moved to transfer position, easily
Transfer position is shifted exactly in making article.
It so, it is possible to provide a kind of apparatus for handling goods, it can suppress caused by moving body when moving body moves
Vibration is delivered to article, while when moving move portion, is easy to make article be moved to transfer position.
The feature structure of apparatus for handling goods is possess:Moving body, it is moved along moving direction;Supporting mass, it is by institute
State moving body supporting and supports articles;Support operational body, its make the supporting mass relative to the moving body along the vertical direction
It is mobile;The moving body possesses:Possesses the 2nd move portion of wheel;2nd support, its relative to the 2nd move portion vertically
Direction is movably concatenated and supports the supporting mass;2nd elastic portion, it is between the 2nd move portion and the described 2nd
Between support, and elastic deformation is freely along the vertical direction;Keep the 2nd maintaining part of the 2nd support;And switching institute
The 2nd switching part of the state of the 2nd maintaining part is stated, the 2nd switching part is by the state of the 2nd maintaining part in the 2nd hold mode
And the 2nd holding releasing state between switch, the 2nd hold mode is relative to the 2nd move portion by the 2nd support
The state of set position is maintained at, the 2nd holding releasing state is the holding released to the 2nd support and made described
2nd support moves state freely relative to the 2nd move portion along the vertical direction.
According to the structure, by the way that the 2nd maintaining part is switched into the 2nd holding releasing state, can make the 2nd support relative to
2nd move portion flexibly moves along the vertical direction, by the way that the 2nd maintaining part is switched into hold mode, make the 2nd support relative to
2nd move portion is maintained at set position.
Therefore, when the 2nd moving body moves, the 2nd maintaining part is switched to and keeps releasing state, thus in the 2nd move portion
When mobile, it can be absorbed by the 2nd elastic portion in vibration caused by the 2nd move portion.Thereby, it is possible to suppress to produce in the 2nd move portion
Raw vibration is delivered to article.In addition, when the 2nd move portion moves, the 2nd maintaining part is switched into hold mode, thus, it is possible to
The 2nd support is limited to move relative to the 2nd move portion.So as to make moving body move along the vertical direction using support operational body
And in the case that article is moved into transfer position, it is easy to article being shifted exactly to transfer position.
It so, it is possible to provide a kind of apparatus for handling goods, it can suppress to produce on moving body when moving body moves
Vibration be delivered to article, while be easy to when moving supporting mass to make article be moved to transfer position.
Brief description of the drawings
Fig. 1 is the side view of article carrying equipment.
Fig. 2 is the side view of article carrying equipment.
Fig. 3 is the side view of article carrying car.
Fig. 4 is the longitudinal cross-sectional side view of the supporting device positioned at traveling position.
Fig. 5 is the longitudinal cross-sectional side view of the supporting device positioned at transfer position.
Fig. 6 is the cross-sectional plan view of supporting device.
Fig. 7 portions of being to maintain are switched to keep the vertical profile front view of the supporting device of releasing state.
Fig. 8 portions of being to maintain are switched to the vertical profile front view of the supporting device of hold mode.
Fig. 9 is the partial vertical sectional side view of the supporting device positioned at switching position.
Figure 10 is the partial vertical sectional side view of the supporting device positioned at traveling position.
Figure 11 is other embodiment(1)Maintaining part be switched to keep releasing state supporting device vertical profile main view
Figure.
Figure 12 is other embodiment(1)Maintaining part be switched to hold mode supporting device vertical profile front view.
Embodiment
Hereinafter, possesses the embodiment of the article carrying equipment of apparatus for handling goods based on brief description of the drawings.
As depicted in figs. 1 and 2, article carrying equipment possesses article carrying car 1, track 2 and processing unit 3.Track 2 is along row
Path setting is sailed, by hanger bearing on the ceiling.Article carrying car 1 travels to enter container W on track 2 along driving path
Row is carried.Article carrying car 1 is equivalent to apparatus for handling goods.Processing unit 3 is the device handled container W, is arranged on
On ground.Supporting station 4 is provided with the state adjacent with the processing unit 3.
Container W is the container of the lid of possess closed substrate gateway with can accommodating multi-piece substrate and disassembly ease,
Equivalent to article.In the present embodiment, substrate is set to semiconductor wafer, the FOUP of the semiconductor wafer will be accommodated(Front
Opening Unified Pod:Front open type wafer box)It is set to container W.
As shown in Fig. 3~Fig. 5, container W possesses:It is provided in container W upper end and by the supporting device of article carrying car 1
22 supporting flange part Wa, positioned at the position with flange part Wa compared with the lower and receiving multi-piece substrate vessel portion Wb,
And formation is in vessel portion Wb preceding surface and the lid of the disassembly ease of the substrate gateway of closed substrate discrepancy(Not
Diagram).Incidentally, the conveying container W in the state of by flange part Wa hanger bearings of article carrying car 1.
As shown in Figure 4 and Figure 5, in flange part Wa upper surface(Container W upper surface)Formed with circle recessed downwards
The recess Wo of cone-shaped.In the state of container W is supported by the supporting of platform 4, moved when supporting device 22 is declined towards container W
When, the holding section 36 that supporting device 22 possesses engages from top with recess Wo.
Supporting station 4 is arranged on the underface of the driving path of article carrying car 1, is set along the travel direction of article carrying car 1
Put multiple.
Article carrying car 1 carries container W to supporting station 4, and container W is carried out from supporting station 4.Also, utilize figure
Outer handling device, by entirely or only the carrying the substrate in container W between supporting station 4 and processing unit 3 of container W.
(article carrying car)
Then, article carrying car 1 is illustrated.In addition, when illustrating article carrying car 1, it is assumed that article carrying car 1 is in traveling
Illustrated in the state of the linear driving path of level.In addition, using the direction that article carrying car 1 is travelled as row
Direction is sailed, the direction orthogonal with travel direction illustrates as width during using in terms of above-below direction.
As shown in figure 4, article carrying car 1 possesses:With by setting the state that track 2 on the ceiling supports along track 2
Mobile traveling portion 15 and positioned at the lower section of track 2 and by the body 16 of the hanger bearing of traveling portion 15.
Traveling portion 15 possesses the preceding traveling portion 15F and rear traveling portion 15R along travel direction arrangement.Preceding traveling portion 15F is with after
Traveling portion 15R, which is compared, is located at front.Preceding traveling portion 15F and rear traveling portion 15R is equipped with the left and right rotated by traveling motor 18
A pair of traveling wheels 19.Preceding traveling portion 15F 19 and rear traveling portion 15R of traveling wheel traveling wheel 19 is traveling to be rotated with motor 18,
Thus article carrying car 1 travels along driving path.
Body 16 possesses:The supporting device 22 of base portion 21, supporting container W with the link of traveling portion 15, make supporting device
22 relative to the lifting moving of traveling portion 15 descending operation mechanism 23, will by rise to rise setting position(Position shown in Fig. 1 etc.
Put)Supporting device 22 support container W upper side and travel direction both sides covering cover body 24.In addition, by traveling portion 15
Formed with base portion 21 along travel direction(Moving direction)Mobile moving body A.In addition, supporting device 22 is equivalent to by moving body A
(Traveling portion 15 and base portion 21)Supporting and supporting container W supporting mass.In addition, descending operation mechanism 23 is equivalent to making supporting device
22(Supporting mass)Relative to moving body A(Traveling portion 15 and base portion 21)The support operational body moved along the vertical direction.
Base portion 21 possesses the support base for linking base portion and supporting descending operation mechanism 23 linked with traveling portion 15.And
And base portion 21 is configured to make support base slide in the width direction freely relative to base portion is linked.That is, base portion 21 possesses as making
The function for the slide operation mechanism that descending operation mechanism 23 and supporting device 22 are moved in the width direction relative to traveling portion 15.
Descending operation mechanism 23 possesses:Multiple strands that terminal part is connected with supporting device 22 and hangs supporting device 22
Body 30, the coiling body 31 for being wound with restis 30 and the lifting motor 32 for rotating coiling body 31(Reference picture 6).In addition,
In the present embodiment, possess 3 bands as more restis 30.
Descending operation mechanism 23 is configured to make coiling body 31 rotate along both forward and reverse directions using lifting motor 32, optionally
Being involved in and releasing operation for multiple restis 30 is carried out, supporting device 22 is thus moved to traveling position along the vertical direction
(Reference picture 1)With transfer position(Reference picture 2).Traveling with position be traveling portion 15 travel when supporting device 22 relative to row
Sail the position in portion 15.Article carrying car 1 travels in the state of supporting device 22 is located at traveling with position.Transfer with position be with
Traveling, compared to position on the lower, is by making supporting device 22 drop to transfer with position to make by supporting device 22 with position
The container W of supporting is located at the position of the supporting device 22 when on supporting station 4.
As shown in Figure 4 and Figure 5, supporting device 22 be configured to using the driving of holding motor 34 make a pair of grasping claw 35 that
This close separation.If being illustrated, supporting device 22 is close by making a pair of grasping claw 35, and switches to a pair of grasping claw 35
Supporting container W flange part Wa bearing state(Reference picture 4 and Fig. 5), by making grasping claw 35 separate each other, and switch to solution
Except the supporting of the flange part Wa to container W carried out by a pair of grasping claw 35 supporting releases state(It is not shown).So, prop up
Mechanism 22 is held to be configured between bearing state and supporting releasing state switch freely using the driving of holding motor 34.
Supporting device 22 possesses:The move portion 38 moved by descending operation mechanism 23;It is vertically square relative to move portion 38
To the support 39 movably linked with move portion 38;Between move portion 38 and support 39 in the vertical direction
The elastic portion 40 of elastic deformation freely.In addition, in the present embodiment, elastic portion 40 uses the silicon rubber for being formed as column.
Move portion 38 possesses connection portion 42, and the connection portion 42 connects the terminal part of restis 30.Support 39 possesses
Motor 34 is used in grasping claw 35 and holding, by container W hanger bearings.Part 1 38a and support of the elastic portion 40 in move portion 38
It is set between 39 part 2 39a with compressive state.The part 2 39a of support 39 is located at the part 1 of move portion 38
38a surface.Part 1 38a is a part for move portion 38, and part 2 39a is a part for support 39.
The bottom of elastic portion 40 is bonded on the part 1 38a of move portion 38, and the upper end of elastic portion 40 is bonded in branch
On the part 2 39a of bearing portion 39.So, support 39 is made to link relative to move portion 38 using elastic portion 40.Therefore, thing is worked as
Vibration is absorbed by elastic portion 40 caused by the traveling portion 15 when product carrier 1 travels, thus, it is possible to suppress vibration to support 39,
The container W being supported by is transmitted.
Move portion 38 possesses bottom plate 43 and covers the cover 44 of the top of the bottom plate 43.Move portion 38 is by 44 shapes of bottom plate 43 and cover
As four square box shapes, connection portion 42 and elastic portion 40 are accommodated in move portion 38, support 39 except grasping claw 35 one
It is accommodated in outside part etc. in move portion 38.The upper surface of bottom plate 43 links connection portion 42 and is bonded with elastic portion 40.
In addition, formed with the 1st hole 44a for being penetrated along the vertical direction for restis 30 on cover 44.In addition, being bonded with bottom plate 43
Part 1 38a of the part of elastic portion 40 equivalent to move portion 38.
Move portion 38 possesses the connection portion 42 for the terminal part for being connected with restis 30 as described above, using by descending operation
Multiple restis 30 that mechanism 23 is carried out are involved in and released, and move portion 38 moves along the vertical direction.
As shown in fig. 6, in the present embodiment, possessing 3 connection portions 42, and possess 3 elastic portions 40.
The side of travel direction is being leaned on to be provided with 2 connection portions 42 compared with the center of the travel direction of supporting device 22
With 1 elastic portion 40.In addition, the opposite side of travel direction is being leaned on to be provided with compared with the center of the travel direction of supporting device 22
1 connection portion 42 and 2 elastic portions 40.
In the state overlapping with both 2 connection portions 42 when 1 elastic portion 40 of side is arranged to see in the width direction.
In a part of overlapping state, also, be arranged to each other each other when 2 connection portions 42 of side are arranged to see in the width direction
The state to stagger along travel direction.In addition, 1 elastic portion 40 of side is arranged to be located at opposite side in the direction of the width 2
Between elastic portion 40.
In 1 connection portion 42 with opposite side when 2 elastic portions 40 of opposite side are respectively set to see in the width direction
Overlapping state.In state overlapping integrally to each other when 2 elastic portions 40 of opposite side are arranged to see in the width direction, and that
This is arranged at identical position in travel direction.In addition, 1 connection portion 42 of opposite side is arranged in the direction of the width
Between 2 connection portions 42 of side.
Support 39 possesses drive division 46 and lifter plate 47.Built with holding motor 34 in drive division 46, so that handle
Hold pawl 35 and state that holding section 36 protrudes downwards possesses grasping claw 35 and holding section 36.The grasping claw 35 and holding section 36 are passed through
Lead to the through hole 43a formed in bottom plate 43 and protruded downwards from bottom plate 43.The upper surface of lifter plate 47 and drive division 46 connects
Knot, it is prominent from drive division 46 to horizontal side.Under the ledge protruded from drive division 46 along horizontal side in lifter plate 47
The flexible portion 40 of surface bonding, the part for being bonded with elastic portion 40 in the lifter plate 47 is equivalent to part 2 39a.
As shown in Figure 7 and Figure 8, possess holding support 48 and releasing recess 49 in support 39.These keep
The bottom of drive division 46 is provided to support 48 and releasing recess 49.
As shown in Fig. 4 ~ Fig. 8, supporting device 22 possesses:The maintaining part 51 that is kept to holding by the use of support 48, as
Switch maintaining part 51 state switching part switching with cylinder 52 and have be used as the 2nd roller 53a of operated unit and conduct
3rd roller 53b of the operating portion shank of connecting rod 53.
If being illustrated, as shown in Figure 4 and Figure 5, joining beam supporting mass 54 is equipped with the upper surface of bottom plate 43.The shank of connecting rod
The pars intermedia of 53 long side direction is rotatably supported by joining beam supporting mass 54.Also, the one of the long side direction of the shank of connecting rod 53
End possesses the 2nd roller 53a in a manner of rotating freely, and the other end of the long side direction of the shank of connecting rod 53 is in a manner of rotating freely
Possesses the 3rd roller 53b.3rd roller 53b is located at the possessed block 47a of lifter plate 47 underface.Therefore, the shank of connecting rod 53 with pass through to
The roller 53a of lower section bulldozing operation the 2nd and the mode that is moved upward the 3rd roller 53b are swung, using the 3rd roller 53b by the phase of support 39
Boosted upward for move portion 38.
Support 39 is being maintained at set position by the state of maintaining part 51 by switching cylinder 52 relative to move portion 38
The hold mode put(Reference picture 5 and Fig. 8)And the holding of support 39 will be released and make support 39 relative to move portion 38
The holding moved along the vertical direction freely releases state(Reference picture 4 and Fig. 7)Between switch over.
If being illustrated, the part contacted with drive division 46 in maintaining part 51 possesses around the axle center along travel direction
The 1st roller 51a rotated freely.To possess a pair of the 1st roller 51a in state spaced apart in the width direction in maintaining part 51.
The bar of switching cylinder 52 links with maintaining part 51.Also, switching is flexible with cylinder 52 and maintaining part 51 is moved in the width direction
It is dynamic, thus it is configured to keeping switching between releasing state and hold mode by the state of maintaining part 51, the guarantor
Releasing state is held as shown in fig. 7, being states of both a pair the 1st roller 51a positioned at the underface of releasing recess 49, the holding
State is as shown in figure 8, be states of both a pair the 1st roller 51a positioned at the underface of holding support 48.
As shown in figure 8, in the state of maintaining part 51 is switched into hold mode, using maintaining part 51 from below to supporting
Portion 39 is supported, and is thus limited support 39 and is moved downwards from relative to the set position of move portion 38.In this way, support
39 are maintained at set position relative to move portion 38.Incidentally, by elastic portion 40 limit support 39 from relative to
The set position of move portion 38 is moved upward.
In addition, as shown in fig. 7, in the state of maintaining part 51 to be switched to holding releasing state, maintaining part is not utilized
51 support support 39 from below, therefore allow support 39 to be moved downwards from relative to the set position of move portion 38.By
This, releases the holding to support 39.
Except traveling position(Reference picture 4 and Figure 10)With transfer position(Reference picture 5)In addition, descending operation mechanism 23
Supporting device 22 is also set to be moved to the switching position being set in traveling compared with position by the top(Reference picture 9).In addition, row
Sail with position equivalent to the 1st position, switching position is equivalent to the 2nd position, and transfer position is equivalent to the 3rd position.
Also, base portion 21 possesses pressing portion 55.The pressing portion 55 is cut because supporting device 22 is moved to from traveling with position
Position is used instead and by the 2nd roller 53a of the shank of connecting rod 53 bulldozing operations downwards, because supporting device 22 is moved to from switching with position
Traveling position and release the 2nd roller 53a of the shank of connecting rod 53 bulldozing operation.If being illustrated, cover 44 formed with the 2nd hole 44b,
2nd hole 44b is located at the 2nd roller 53a surface.Possesses pressing portion 55 in base portion 21, the pressing portion 55 is located at the 2nd roller 53a
Surface.
As shown in figs. 4 and 7, for maintaining part 51 be switched to keep releasing state state, also, maintaining part 51,
In elastic portion 40 and the shank of connecting rod 53, only support, in this case, move portion 38 and supporting to support 39 by elastic portion 40
The separating distance of the above-below direction in portion 39 is located at shifting during set position than support 39 as shown in Figure 9 relative to move portion 38
The separating distance of the above-below direction of dynamic portion 38 and support 39 is short.
Also, as shown in figure 9, using the roller 53a of bulldozing operation the 2nd downwards of pressing portion 55, so as to which the shank of connecting rod 53 is swung simultaneously
Boost the block 47a for being fixed on lifter plate 47 upward using the 3rd roller 53b, point of the above-below direction of move portion 38 and support 39
For separation from elongated, support 39 is located at set position relative to move portion 38.
In the state of support 39 is located at into set position relative to move portion 38 in this wise, as shown in figure 8, will protect
Portion 51 is held from keeping releasing state to switch to hold mode, thus as shown in Figure 10, is pushed away even if releasing by what pressing portion 55 was carried out
Pressure without boosting support 39 upward using the 3rd roller 53b, because the 1st roller 51a of the maintained portion 51 of support 39 is supported, institute
Set position is maintained at also relative to move portion 38 with support 39.
(control unit)
As shown in figure 3, article carrying car 1 possesses control unit H, control unit H is to moving body A, descending operation mechanism 23 and cuts
Cylinder 52 is used instead to be controlled so as to control the work of article carrying car 1.
Control unit H is initial from carrying to perform in order to be instructed based on the carrying from the host controller being arranged on the upside of ground
The supporting station 4 at place receives container W reception processing and container W is delivered to the delivery processing of the supporting station 4 at carrying target, and
Control is arranged on the work of the motor of article carrying car 1.Article carrying car 1 perform reception processing and from carry initial place supporting
Platform 4 receives container W, performs and delivers processing container W is simultaneously delivered to the supporting station 4 carried at target, thus by container W from carrying
The supporting station 4 of initial place is transported to the supporting station 4 carried at target.
In delivery processing, according to traveling control, decline elevating control, pawl separation control, the order for rising elevating control
Perform.
In the traveling control of processing is delivered, it will be set to travel with the 4 corresponding stop position of supporting station for carrying initial place
Initial place, it will be set to carrying the 4 corresponding stop position of supporting station at target at traveling target, in order that traveling portion 15 is from row
Initial place is sailed to drive at traveling target and control the work of traveling motor 18.Incidentally, the traveling control in delivery processing
System performs in the state of by the supporting container W of supporting device 22.Traveling control is equivalent to by relative to unloading container W shifting
Position position set in advance is carried to be set at traveling target(At mobile target)And make moving body A from traveling initial place(It is mobile first
At beginning)It is moved at traveling target(At mobile target)Mobile control.
In elevating control is declined, in order to make supporting device 22 be moved upward from traveling with position to switching position
Afterwards, afterwards, make supporting device 22 downward from switching position from keeping releasing state to be switched to hold mode maintaining part 51
Side is moved to transfer position, and controls the work of lifting motor 32 and switching cylinder 52.That is, in the lower falling-rising
In drop control, following controls are performed:Unloading Control, its make move portion 38 from traveling with position rise to switching position it
Afterwards, move portion 38 is dropped to transfer position from switching position, the container W being supported on support 39 is unloaded to transfer
Position;And control is kept, it is in Unloading Control, in the state of move portion 38 is located at switching position, by maintaining part 51
Hold mode is switched to from releasing state is kept.
In pawl separation control, holding is controlled in order to which supporting device 22 is switched into supporting releasing state from bearing state
With the work of motor 34.
In elevating control is risen, in order to make supporting device 22 be moved upward from transfer with position to switching position
Afterwards, maintaining part 51 is switched to the releasing state that keeps from hold mode, it is afterwards, supporting device 22 is downward from switching position
Side is moved to traveling position, and controls the work of lifting motor 32 and switching cylinder 52.
In this way, in the present embodiment, control unit H controls article carrying car 1 in the manner as described below, in traveling portion 15
During traveling, maintaining part 51 is switched to and keeps releasing state, stopped in traveling portion 15 and supporting device 22 is vertically square
During movement, maintaining part 51 is switched into hold mode.That is, control unit H makes traveling portion using travelling control
Travelled at 15 arrival traveling targets after control terminates, perform Unloading Control and keep controlling.
In reception processing, held by traveling control, decline elevating control, the close order for controlling, rising elevating control of pawl
OK.
In addition, the traveling control of reception processing is identical with handover process in addition to following several respects:In order that traveling portion 15
Drive to aspect, traveling control of the work with carrying the 4 corresponding position of supporting station of initial place and controlling traveling motor 18
System be in terms of being performed in the state of container W is not supported by supporting device 22 and in order to by supporting device 22 from branch
Releasing state is held to be switched to bearing state, substitute pawl separation control and perform the pawl that the work to holding motor 34 is controlled
Close to the aspect of control.
(other embodiment)
(1)In the above-described embodiment, possess move portion, support, elastic portion and switching part in supporting mass, but in moving body
Can also possess move portion, support, elastic portion and switching part.
Specifically, as is illustrated by figs. 11 and 12, moving body A possesses:With traveling wheel 19(Wheel)The 2nd move portion 61
(It is made up of a part for traveling portion 15 and base portion 21), be movably concatenated along the vertical direction relative to the 2nd move portion 61
And support supporting device 22(Supporting mass)The 2nd support 62, between the 2nd move portion 61 and the 2nd support 62 and
Elastic deformation the 2nd elastic portion 63 freely, the 2nd maintaining part 64 for keeping the 2nd support 62, switching the 2nd are kept along the vertical direction
2nd switching part 65 of the state in portion 64.
2nd switching part 65 is configured to switch the state of the 2nd maintaining part 64 between following states:2nd hold mode, its
It is the state that the 2nd support 62 is maintained to set position relative to the 2nd move portion 61(Reference picture 12);2nd keeps releasing
State, it is the holding released to the 2nd support 62 and the 2nd support 62 is moved along the vertical direction relative to the 2nd move portion 61
Dynamic state freely(Reference picture 11).
(2)In the above-described embodiment, control unit is opened afterwards with making move portion reach at mobile target using mobile control
The mode of beginning Unloading Control performs mobile control and Unloading Control, and still, control unit can also be to make using mobile control
Start Unloading Control after the mobile beginning of move portion and before move portion is reached at mobile target using the movement control,
The mode for terminating Unloading Control after making move portion reach at mobile target using mobile control performs mobile control and unloaded
Carry control.
(3)In the above-described embodiment, make support part 2 be located at move portion part 1 surface, and will
Elastic portion is arranged on compressive state between the part 1 of move portion and the part 2 of support, but can also make support
Part 2 be located at move portion part 1 underface, elastic portion is arranged on to the part 1 of move portion with extended state
Between the part 2 of support.
In addition, in the above-described embodiment, using the silicon rubber of column as elastic portion, but elastomer can also use bullet
Other elastic portion materials such as spring, leaf spring, can also suitably change material, shape.
(4)In the above-described embodiment, with moving body by arranging in the state of rail support on the ceiling along rail
Road is mobile and supporting mass is located at the lower section of track and forms article carrier by the mode of moving body hanger bearing, but can also be with
Moving body moves in the state of rail support on the ground and supporting mass is located at top and the quilt of track by setting along track
The mode of moving body supporting forms article carrier.
(5)In the above-described embodiment, in the state of supporting mass is risen to the 2nd position, maintaining part is solved from holding
Except state is switched to hold mode, but in the state of supporting mass is located at the 1st position or supporting mass can also be made from the 1st
Position to the 3rd position decline while, by maintaining part from keep releasing state switch to hold mode.
Specifically, for example, it is also possible to for switching part is formed in a manner of maintaining part is moved along the vertical direction, will protect
The state that the position compared with only by the support of elastomeric support on the lower is kept out of the way in the portion of holding is set on hold releasing state, by phase
It is located at the state that the support of set position supported from below using maintaining part for move portion and is set on hold state, using cuts
The portion of changing makes maintaining part move along the vertical direction, so as to keep switching between releasing state and hold mode maintaining part.
(summary of above-mentioned embodiment)
Hereinafter, the summary of apparatus for handling goods illustrated in the above is illustrated.
The feature structure of apparatus for handling goods is that the apparatus for handling goods possesses:Moving body, it is moved along moving direction
It is dynamic;Supporting mass, it is supported and supports articles by the moving body;And support operational body, its make the supporting mass relative to
The moving body moves along the vertical direction,
The supporting mass possesses:Move portion, it is moved by the support operational body;Support, it is relative to the movement
Portion is movably linked to the move portion and carries out hanger bearing to article along the vertical direction;Elastic portion, its between
Elastic deformation is freely between the move portion and the support and along the vertical direction;Maintaining part, it keeps the support;
And switching part, it switches the state of the maintaining part,
The state of the maintaining part in hold mode and is kept switching between releasing state, the hold mode by the switching part
It is the state that the support is maintained to set position relative to the move portion, the holding releasing state is releasing pair
The holding of the support simultaneously makes the support move state freely along the vertical direction relative to the move portion.
According to the structure, releasing state is kept by the way that maintaining part is switched to, and enables support relative to move portion
Flexibly move along the vertical direction, by the way that maintaining part is switched into hold mode, and support is kept relative to move portion
In set position.
Therefore, when moving body moves, maintaining part is switched to and keeps releasing state, thus, it is possible to when move portion moves
Absorbed by elastic portion in vibration caused by move portion.Therefore, it is possible to suppress to be delivered to article in vibration caused by move portion.Separately
Outside, when move portion moves, maintaining part is switched into hold mode, moved thus, it is possible to limit support relative to move portion.
Therefore, move portion is moved along the vertical direction using support operational body and in the case of article is moved to transfer position, easily
Transfer position is shifted exactly in making article.
It so, it is possible to provide a kind of apparatus for handling goods, it can suppress caused by moving body when moving body moves
Vibration is delivered to article, while when moving move portion, is easy to make article be moved to transfer position.
Here it is preferred that the elastic portion is arranged on the part 1 of the move portion and described in using compressive state
A part for support and positioned at the part 1 surface part 2 between, the move portion possesses the shank of connecting rod, should
The shank of connecting rod has an operated unit and operating portion, and the operated unit of the shank of connecting rod is by bulldozing operation downwards, so that institute
State operating portion to be moved upward, boosted the support upward relative to the move portion using the operating portion, the branch
Holding operating body makes the supporting mass be moved along the vertical direction between the 1st position, the 2nd position and the 3rd position, described 1st
Supporting mass when being moving body movement is put relative to the position of the moving body, the 2nd position is to than described
The position that 1st position is moved by the top, the 3rd position are to the position moved on the lower than the 1st position, the movement
Body possesses pressing portion, and the pressing portion is moved by the supporting mass from the 1st position to the 2nd position, and will be described
The operated unit of body of rod bulldozing operation downwards, is moved by the supporting mass from the 2nd position to the 1st position
It is dynamic, and release the bulldozing operation of the operated unit of the shank of connecting rod.
According to the structure, in the case where moving body moves, supporting mass is located at the 1st position.Also, by supporting mass from
1 position is moved upward to after the 2nd position, and supporting mass is moved to downwards into the 3rd position from the 2nd position, thus, it is possible to
Mode as described below keeps supporting mass.
That is, making supporting mass be moved upward from the 1st position to the 2nd position, thus the operated unit of the shank of connecting rod is borrowed
Boosting splenium is pushed operation.Concomitantly, the operating portion of the shank of connecting rod boosts support relative to move portion upward, energy
Support is enough set to be located at set position relative to move portion.Also, in this way, the effect using the shank of connecting rod make supporting portion in
In the state of set position, maintaining part is switched into hold mode from holding releasing state using switching part.Now, support
Support is moved positioned at set position, therefore without operating physical force, the operating physical force is to be used to keep using switching part
Portion is switched to the operating physical force of hold mode from holding releasing state, therefore can reduce the operating physical force of switching part.
In this way, change position of the supporting mass relative to move portion to the operating physical force of supporting mass using support operational body, by
This reduces the operating physical force of switching part.
It is further preferred, that possesses the control for controlling the moving body, the support operational body and the switching part
Portion, the control unit perform control as described below:Mobile control, it will preset relative to the transfer position of unloading article
Position be set to move at target, the moving body is moved to from mobile initial place at the mobile target;Unloading Control, its
After the move portion is risen to the 2nd position from the 1st position, make the move portion under the 2nd position
The 3rd position is dropped to, the article being supported on the support is unloaded to the transfer position;And control is kept, its
In the Unloading Control, in the state of the move portion is located at the 2nd position, the maintaining part is kept solving from described
Except state is switched to the hold mode, the moving body is set to reach at the mobile target it using the mobile control
Before, start the execution of the Unloading Control.
According to the structure, when performing traveling control, maintaining part is switched in advance and keeps releasing state, thus utilize row
Sailing control makes moving body to suppress to be delivered to article in vibration caused by moving body from during mobile initial place movement.Then, hold
Row Unloading Control, in the execution of the Unloading Control perform keep control, thus, it is possible to by article be unloaded to transfer position it
It is preceding that maintaining part is switched into hold mode, therefore move article making move portion move along the vertical direction using support operational body
In the case of moving transfer position, it is easy to article being shifted exactly to transfer position.
Also, start the execution of Unloading Control before moving body is reached at mobile target using mobile control, therefore
Compared with the situation for the execution for starting Unloading Control after moving body is reached at mobile target, promptly article can be unloaded to
Transfer position.
It is further preferred, that the moving body is by arranging in the state of rail support on the ceiling along the rail
Road moves, and the supporting mass is located at the lower section of the track and by the moving body hanger bearing.
According to the structure, when moving body moves along the track arranged on the ceiling, maintaining part is switched in advance
Releasing state is kept, article is delivered in the mobile caused vibration such as seam of track thus, it is possible to suppress moving body.Also,
Supporting mass positioned at the lower section of track switches maintaining part when container is unloaded to close to the transfer position of ground setting in advance
For hold mode, so that support is not easily shifted relative to move portion, it is easy to that article is unloaded into transfer position exactly.
The feature structure of apparatus for handling goods is possess:Moving body, it is moved along moving direction;Supporting mass, it is by institute
State moving body supporting and supports articles;Support operational body, its make the supporting mass relative to the moving body along the vertical direction
It is mobile;The moving body possesses:Possesses the 2nd move portion of wheel;2nd support, its relative to the 2nd move portion vertically
Direction is movably concatenated and supports the supporting mass;2nd elastic portion, it is between the 2nd move portion and the described 2nd
Between support, and elastic deformation is freely along the vertical direction;Keep the 2nd maintaining part of the 2nd support;And switching institute
The 2nd switching part of the state of the 2nd maintaining part is stated, the 2nd switching part is by the state of the 2nd maintaining part in the 2nd hold mode
And the 2nd holding releasing state between switch, the 2nd hold mode is relative to the 2nd move portion by the 2nd support
The state of set position is maintained at, the 2nd holding releasing state is the holding released to the 2nd support and made described
2nd support moves state freely relative to the 2nd move portion along the vertical direction.
According to the structure, by the way that the 2nd maintaining part is switched into the 2nd holding releasing state, can make the 2nd support relative to
2nd move portion flexibly moves along the vertical direction, by the way that the 2nd maintaining part is switched into hold mode, make the 2nd support relative to
2nd move portion is maintained at set position.
Therefore, when the 2nd moving body moves, the 2nd maintaining part is switched to and keeps releasing state, thus in the 2nd move portion
When mobile, it can be absorbed by the 2nd elastic portion in vibration caused by the 2nd move portion.Thereby, it is possible to suppress to produce in the 2nd move portion
Raw vibration is delivered to article.In addition, when the 2nd move portion moves, the 2nd maintaining part is switched into hold mode, thus, it is possible to
The 2nd support is limited to move relative to the 2nd move portion.So as to make moving body move along the vertical direction using support operational body
And in the case that article is moved into transfer position, it is easy to article being shifted exactly to transfer position.
It so, it is possible to provide a kind of apparatus for handling goods, it can suppress to produce on moving body when moving body moves
Vibration be delivered to article, while be easy to when moving supporting mass to make article be moved to transfer position.
Industrial applicability
The technology for being related to the present invention can be used in possessing moving body, the supporting mass supported by moving body, make supporting mass vertically side
To the article carrying equipment of mobile support operational body.
Description of reference numerals
1:Article carrying car(Apparatus for handling goods),
22:Supporting device(Supporting mass),
23:Descending operation mechanism(Support operational body),
38:Move portion,
38a:Part 1,
39:Support,
39a:Part 2,
40:Elastic portion,
51:Maintaining part,
52:Switching cylinder(Switching part),
53:The shank of connecting rod,
53a:2nd roller(Operated unit),
53b:3rd roller(Operating portion),
55:Pressing portion,
61:2nd move portion,
62:2nd support,
63:2nd elastic portion,
64:2nd maintaining part,
65:2nd switching part,
A:Moving body,
H:Control unit,
W:Container(Article).
Claims (5)
1. a kind of apparatus for handling goods, the apparatus for handling goods possesses:
Moving body, it is moved along moving direction;
Supporting mass, it is supported and supports articles by the moving body;And
Support operational body, it makes the supporting mass be moved along the vertical direction relative to the moving body, the apparatus for handling goods
It is characterised by,
The supporting mass possesses:Move portion, it is moved by the support operational body;Support, it is relative to the movement
Portion is movably linked to the move portion and carries out hanger bearing to article along the vertical direction;Elastic portion, its between
Elastic deformation is freely between the move portion and the support and along the vertical direction;Maintaining part, it keeps the support;
And switching part, it switches the state of the maintaining part,
The state of the maintaining part in hold mode and is kept switching between releasing state, the hold mode by the switching part
It is the state that the support is maintained to set position relative to the move portion, the holding releasing state is releasing pair
The holding of the support simultaneously makes the support move state freely along the vertical direction relative to the move portion.
2. apparatus for handling goods as claimed in claim 1, it is characterised in that
The elastic portion is arranged on part 1 and the part as the support and the position of the move portion using compressive state
Between the part 2 of the surface of the part 1,
The move portion possesses the shank of connecting rod, and the shank of connecting rod has operated unit and operating portion,
The operated unit of the shank of connecting rod is by bulldozing operation downwards, so that the operating portion is moved upward, utilizes
The operating portion boosts the support relative to the move portion upward,
The support operational body makes the supporting mass be moved along the vertical direction between the 1st position, the 2nd position and the 3rd position,
Relative to the position of the moving body, the 2nd position is supporting mass when 1st position is the moving body movement
To the position moved by the top than the 1st position, the 3rd position be to the position moved on the lower than the 1st position,
The moving body possesses pressing portion, and the pressing portion is moved by the supporting mass from the 1st position to the 2nd position
It is dynamic, and by the operated unit of shank of connecting rod bulldozing operation downwards, by the supporting mass from the 2nd position to institute
The movement of the 1st position is stated, and releases the bulldozing operation of the operated unit of the shank of connecting rod.
3. apparatus for handling goods as claimed in claim 2, it is characterised in that the apparatus for handling goods possesses the control shifting
The control unit of kinetoplast, the support operational body and the switching part,
The control unit performs control as described below:Mobile control, it will set in advance relative to the transfer position of unloading article
Fixed position is set to move at target, the moving body is moved to from mobile initial place at the mobile target;Unloading Control,
It makes the move portion from the 2nd position after the move portion is risen to the 2nd position from the 1st position
Drop to the 3rd position, the article being supported on the support is unloaded to the transfer position;And control is kept,
It is in the Unloading Control, in the state of the move portion is located at the 2nd position, by the maintaining part from the holding
Releasing state is switched to the hold mode,
Before the moving body is reached at the mobile target using the mobile control, start holding for the Unloading Control
OK.
4. the apparatus for handling goods as any one of claim 1 ~ 3, it is characterised in that the moving body is by being disposed in
Moved in the state of rail support on ceiling along the track,
The supporting mass is located at the lower section of the track and by the moving body hanger bearing.
5. a kind of apparatus for handling goods, the apparatus for handling goods possesses:
Moving body, it is moved along moving direction;
Supporting mass, it is supported and supports articles by the moving body;
Support operational body, it makes the supporting mass be moved along the vertical direction relative to the moving body;The apparatus for handling goods
It is characterised by,
The moving body possesses:Possesses the 2nd move portion of wheel;2nd support, its relative to the 2nd move portion vertically
Direction is movably concatenated and supports the supporting mass;2nd elastic portion, it is between the 2nd move portion and the described 2nd
Between support, and elastic deformation is freely along the vertical direction;Keep the 2nd maintaining part of the 2nd support;And switching institute
The 2nd switching part of the state of the 2nd maintaining part is stated,
2nd switching part switches the state of the 2nd maintaining part between the 2nd hold mode and the 2nd holding releasing state,
2nd hold mode is that the 2nd support is maintained to the state of set position, institute relative to the 2nd move portion
Stating the 2nd holding releasing state is the holding released to the 2nd support and the 2nd support is moved relative to the described 2nd
State freely is moved along the vertical direction in dynamic portion.
Applications Claiming Priority (2)
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JP2016-176981 | 2016-09-09 | ||
JP2016176981A JP6702106B2 (en) | 2016-09-09 | 2016-09-09 | Article carrier |
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CN107804640A true CN107804640A (en) | 2018-03-16 |
CN107804640B CN107804640B (en) | 2021-08-06 |
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KR (1) | KR102304194B1 (en) |
CN (1) | CN107804640B (en) |
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Cited By (1)
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JP7234754B2 (en) * | 2019-04-04 | 2023-03-08 | 村田機械株式会社 | overhead carrier |
JP7131696B2 (en) * | 2019-04-24 | 2022-09-06 | 村田機械株式会社 | Shock absorbers, stacker cranes, transport systems and fixtures for shock absorbers |
US20220415686A1 (en) * | 2019-05-13 | 2022-12-29 | Murata Machinery, Ltd. | Overhead conveyance vehicle |
JP7238736B2 (en) * | 2019-11-13 | 2023-03-14 | 株式会社ダイフク | Article lifting device |
EP4109502A4 (en) * | 2020-03-13 | 2024-05-01 | Murata Machinery Ltd | Gripper device, conveyance vehicle, and conveyance method |
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Also Published As
Publication number | Publication date |
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TWI719238B (en) | 2021-02-21 |
CN107804640B (en) | 2021-08-06 |
TW201811645A (en) | 2018-04-01 |
KR20180028940A (en) | 2018-03-19 |
JP6702106B2 (en) | 2020-05-27 |
KR102304194B1 (en) | 2021-09-17 |
JP2018039659A (en) | 2018-03-15 |
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