TW201718369A - Transport system and transport method - Google Patents

Abstract

A transport system is provided with a first track, a second track, a plurality of overhead transport vehicles, and a storage device. An overhead transport vehicle travels along the first track and the second track and transports an object to be transported. The storage device can transfer the object to be transported, to each of a first storage section to which the overhead transport vehicle stopped on the first track can transfer the object to be transported, a second storage section to which the overhead transport vehicle stopped on the second track can transfer the object to be transported, and a device port to which the overhead transport vehicle stopped on the second track can transfer the object to be transported.

Description

Transfer system and transfer method

The contents of this manual relate to the transport system and the transport method.

As a transport system applied to, for example, a semiconductor manufacturing factory, there are known those having the following components: a first rail and a second rail; an overhead transport vehicle that travels along the first rail and the second rail, respectively; and a scaffolding device. The object to be transported is transported by the overhead transport vehicle that is stopped by the first rail and the second rail (see, for example, Patent Document 1).

[Previous Technical Literature] [Patent Literature]

[Patent Document 1] Japanese Patent No. 4470576

In the transfer system as described above, it is necessary to efficiently transport the object to be transported to the device of the semiconductor processing apparatus from the viewpoint of improving the operation rate of the semiconductor processing apparatus.

Therefore, in one aspect of the present invention, an object of the present invention is to provide a transport system and a transport method capable of improving the transport efficiency of a transported object to a device.

A transport system according to an aspect of the present invention includes: a first track and a first 2 rails; a plurality of overhead transport vehicles, which are respectively transported along the first rail and the second rail to transport the objects to be transported; and a storage device that can transfer the transported objects to the first storage unit and the second In the storage unit and the device, the first storage unit can transfer the object to be transported by the overhead transport vehicle that is stopped by the first rail, and the second storage unit can transfer the transported object to the overhead transport vehicle that is stopped by the second rail. The device is capable of transporting the object to be transported by the overhead transport vehicle that is stopped by the second track.

In the transport system, the overhead transport vehicle stopped in the first rail can transfer the transported object to the first storage unit, and the overhead transport vehicle stopped in the second rail can transfer the transported object to the second storage unit. . By this, it is possible to transfer the object to be transported to the storage device of the first storage unit, the second storage unit, and the device, thereby increasing the number of conveyed objects to the device, and as a result, the object to be transported can be lifted. The transport efficiency of the device.

In the transport system according to the aspect of the present invention, the storage device may include a moving support table that is movable between the first storage unit and the second storage unit and supports the object to be transported, and a transfer mechanism that can The objects to be transported are transferred to the mobile support table and the device 分别, respectively. Thereby, the configuration of the transfer mechanism can be simplified.

In the transport system according to the aspect of the present invention, the storage device may include a first fixed support that supports the object to be transported in the first storage unit, and a second fixed support that supports the object to be transported in the second storage unit. And a transfer mechanism that can transfer the objects to be transported to the first fixed support, the second fixed support, and the device 分别, respectively. Thereby, the constitution of the support table can be simplified.

In the transport system according to the aspect of the present invention, one of the inner rail and the outer rail which is an annular shape when the first rail system is viewed from the vertical direction, and the inner rail and the outer rail of the second rail system may be used. Part of the other. Therefore, in the transport system having a practical track layout, the object to be transported can be lifted. Transfer efficiency.

In the transport system according to the aspect of the present invention, the first rail and the second rail may extend in parallel with each other at the same height in the vertical direction. Thereby, in the conveyance system in which the ceiling height is restricted, the conveyance efficiency of the conveyed object to the apparatus can be improved.

In the transport system according to the aspect of the present invention, the overhead transport vehicle may include: a gripping mechanism that can hold the object to be transported; a lifting mechanism that can lift and lower the gripping mechanism; and a moving mechanism that can move the elevating mechanism along the first The direction in which the track and the second track are aligned is the same as the position of the first storage unit and the second storage unit in the direction in which the first track and the second track extend, and the direction in which the first track and the second track are aligned The third storage unit is provided at a position different from the storage unit and the second storage unit. With this configuration, the transported objects can be transferred to the first storage unit, the second storage unit, and the third storage unit by the overhead transport vehicle at the same stop position of each of the first rail and the second rail. The lifting efficiency of the conveyed object to the device.

The transport system according to the aspect of the present invention may further include a controller that controls the operation of the overhead transport vehicle and the storage device, and the controller is configured to transfer the transported object to the first storage unit when the first rail is stopped. Controlling the operation of the overhead transport vehicle, and controlling the operation of the storage device by transferring the transported object from the first storage unit to the second storage unit, and transferring the transported object from the second storage unit to the device The way to control the operation of the storage device. Thereby, the conveyed object can be transferred to the apparatus 不仅 not only the overhead transport vehicle that is stopped by the second rail but also the overhead transport vehicle that is stopped by the first rail.

A transport method according to one aspect of the present invention is the transport method implemented in the transport system described above, comprising: a first step of transporting an overhead transport vehicle to a first track a step of transferring the transported object to the first storage unit while stopping; a second step of storing the transported object from the first storage unit to the second storage unit; and a third step of storing the transported device The step of transferring the object to be transported from the second storage unit to the device.

In the above-described transport method, the transported object can be transported to the device by the overhead transport vehicle that is stopped by the first rail, and the transported object can be transported to the device. effectiveness.

According to an aspect of the present invention, it is possible to provide a transport system and a transport method capable of improving the transport efficiency of a transported object to a device.

1‧‧‧Transportation system

10‧‧‧ Track

11‧‧‧1 track

12‧‧‧2nd track

13‧‧‧ inter-process track

14‧‧‧In-process orbit

14a‧‧‧ inside track

14b‧‧‧Outer track

14c, 14d‧‧‧ branch track

15‧‧‧ branch track

20‧‧‧Elevated transport vehicle

21‧‧‧Control institutions

22‧‧‧Land

23‧‧‧ Lifting mechanism

24‧‧‧Mobile agencies

30‧‧‧Storage device

30a‧‧‧First Storage Department

30b‧‧‧Second Storage Department

31‧‧‧Frame

31a, 31b, 31c‧‧‧open areas

32‧‧‧Mobile support table

33‧‧‧Fixed support table

34, 35‧‧‧Transportation agencies

34a‧‧‧Control organization

35a‧‧‧Control organization

36‧‧‧1st fixed support

37‧‧‧2nd fixed support

40‧‧‧Storage scaffolding

40a‧‧‧3rd Storage Department

41‧‧‧Fixed support table

50‧‧‧ Controller

60‧‧‧Storage scaffolding

90‧‧‧FOUP (transported)

91‧‧‧Flange

100‧‧‧Semiconductor processing unit

101‧‧‧Devices

A‧‧‧ direction

B‧‧‧ directions

Fig. 1 is a plan view showing a conveying system according to an embodiment of the present invention.

Figure 2 is a partial front elevational view of the transport system of Figure 1.

Figure 3 is a partial side elevational view of the transport system of Figure 1.

Figure 4 is a partial plan view of the transport system of Figure 1.

Fig. 5 is a partial front elevational view showing the conveying system of the first modification.

Fig. 6 is a plan view showing a conveying system of a second modification.

Fig. 7 is a partial front elevational view showing the conveying system of the third modification.

Fig. 8 is a partial front elevational view showing the conveying system of the fourth modification.

Fig. 9 is a plan view showing a conveying system of a fourth modification.

Fig. 10 is a partial front elevational view showing the conveying system of the fifth modification.

Hereinafter, an embodiment of the present invention will be described in detail with reference to the drawings. In the drawings, the same or equivalent parts are denoted by the same reference numerals and are omitted. Repeat the instructions.

As shown in FIG. 1, the transport system 1 includes a rail 10, a plurality of overhead transport vehicles 20, a plurality of storage devices 30, a plurality of storage racks 40, and a controller 50. The track 10 is mounted near the ceiling of a semiconductor manufacturing facility having a plurality of semiconductor processing apparatuses 100. The overhead transport vehicle 20 is an overhead vehicle (OHT; Overhead Hoist Transfer), and moves in a direction along the rail 10 in a state of being suspended under the rail 10. However, the overhead transport vehicle 20 sometimes reciprocates along a portion of the track 10 along the track 10 (moving bidirectionally in the direction in which the track 10 extends). The overhead transport vehicle 20 transports an open wafer transfer cassette (FOUP) to a device of each semiconductor processing apparatus 100 before storing a plurality of semiconductor wafers. The storage device 30 and the storage rack 40 are provided corresponding to the respective semiconductor processing apparatuses 100. The controller 50 controls the operation of each overhead transport vehicle 20 and each storage device 30. Further, instead of the controller 50, a controller that controls the operation of each overhead transport vehicle 20 and a controller that controls the operation of each storage device 30 may be provided. In this case, the controllers can communicate with each other to realize the control performed by the transport system 1 by the transport method and the like described later.

The rail 10 constitutes an inter-process rail 13, an in-process rail 14, and a branch rail 15. The overhead transport vehicle 20 can travel between the inter-process rails 13 and the in-process rails 14 via the branch rails 15. The in-process rail 14 includes an inner rail 14a, an outer rail 14b, and branch rails 14c, 14d. The inner rail 14a and the outer rail 14b are annular when viewed from the vertical direction, and the outer rail 14b surrounds the plurality of inner rails 14a when viewed from the vertical direction. The overhead transport vehicle 20 can reciprocate between the inner rail 14a and the outer rail 14b via the branch rail 14c, and can reciprocate between the adjacent inner rails 14a via the branch rail 14d.

In the transport system 1, the first array of the first track 11 and the second track 12 are constituted by one of the inner rail 14a and the outer rail 14b. The first rail 11 is one of the straight portions of the inner rail 14a, and the second rail 12 is a portion of the straight portion of the outer rail 14b. The first track 11 and the second track 12 of each group extend at the same height in the vertical direction and parallel to each other. Further, each of the semiconductor processing apparatuses 100 is provided on the outer side of the second rail 12 when viewed from the vertical direction.

As shown in FIGS. 2, 3 and 4, the storage device 30 has a frame 31, a plurality of moving support tables 32, a plurality of fixed support tables 33, and a transfer mechanism 34. The frame 31 is provided above the plurality of devices 101 of the semiconductor processing apparatus 100 and below the second track 12. The FOUP 90 as a conveyed object of the overhead transport vehicle 20 is placed on each of the mobile support bases 32 and the fixed support bases 33. That is, each of the mobile support tables 32 and each of the fixed support tables 33 supports the FOUP 90. Further, a plurality of devices 101 are disposed below the second track 12 along the direction A in which the first track 11 and the second track 12 extend.

In the frame 31, opening regions 31a, 31b, and 31c (see Fig. 3) are provided. Each of the plurality of opening regions 31a penetrates in the vertical direction and faces each of the devices 101 in the vertical direction. Each of the movement support bases 32 is provided on the frame 31 so as to be slidably movable between a position covering the lower end portion of each of the opening regions 31a and a position below the first rail 11. The plurality of opening regions 31b penetrate in the vertical direction, respectively, and are located on both sides of the plurality of opening regions 31a in the direction A. Each of the fixed support bases 33 is fixed to the frame 31 so as to cover the lower end portions of the respective opening regions 31b. The opening regions 31c penetrate in the vertical direction and the direction A, respectively, and are located above the plurality of opening regions 31a and 31b. The transfer mechanism 34 is provided in the frame 31 so that the opening region 31c can be moved along the direction A.

In the storage device 30, the region on each of the movement support tables 32 located below the first rail 11 functions as the first storage portion 30a, and is located at a position that covers the lower end portion of each of the opening regions 31a. The area on the stage 32 functions as the second storage unit 30b (see Fig. 4). The first storage unit 30a is a temporary storage area in which the overhead transport vehicle 20 that can stop the first rail 11 can transfer the FOUP 90. The second storage unit 30b is a temporary storage area in which the overhead transport vehicle 20 that can stop the second rail 12 can transfer the FOUP 90. The storage device 30 can transfer the FOUPs 90 to the plurality of first storage units 30a, the plurality of second storage units 30b, and the plurality of devices 101, respectively.

More specifically, the overhead transport vehicle 20 stopped at the first rail 11 can transfer the FOUP 90 to the mobile support base 32 located below the first rail 11. The overhead transport vehicle 20 stopped at the second rail 12 can transfer the FOUP 90 to the mobile support table 32 located at a position covering the lower end portion of the opening region 31a. When the moving support table 32 is positioned below the first rail 11 when the moving support table 32 is positioned below the first rail 11, the FOUP 90 can be placed in the opening area 31a (the lower end is moved by the movement support table 32). The device 101 below the uncovered open area 31a). The overhead transport vehicle 20 stopped at the second rail 12 can transfer the FOUP 90 to the fixed support base 33. Further, the overhead transport vehicle 20 has a gripping mechanism 21 that can hold the flange portion 91 of the FOUP 90, and a lifting mechanism 23 that can lift and lower the gripping mechanism 21 by feeding and feeding the belt 22 to which the gripping mechanism 21 is attached. And the lifting mechanism 21 is moved up and down by the lifting mechanism 23, and the FOUP 90 is transferred to the moving support table 32, the fixed support table 33, and the device 埠101, respectively.

Further, the transfer mechanism 34 can transfer the FOUPs 90 to the movable support table 32 and the fixed support table 33 which are located at positions below the lower end of the opening region 31a. When the moving support table 32 is located below the first rail 11, the transfer mechanism 34 can transfer the FOUP 90 to the opening area 31a (the opening area 31a where the lower end portion is not covered by the movement of the moving support table 32) ) Device 下方101 below. Further, the transfer mechanism 34 moves the FOUP 90 to the movable support table 32, the fixed support table 33, and the device 埠101 by raising and lowering the holding mechanism 34a of the flange portion 91 of the FOUP 90.

The storage rack 40 has a plurality of fixed support tables 41. The FOUP 90 is placed on each of the fixed support tables 41. That is, each of the fixed support tables 41 supports the FOUP 90. In the storage scaffolding 40, the area on each of the fixed support bases 41 functions as the third storage unit 40a (see FIG. 4). The third storage unit 40a is a temporary storage area in which the overhead transport vehicle 20 that can stop the first rail 11 can transfer the FOUP 90. Further, the overhead transport vehicle 20 further has a moving mechanism 24 that can move the elevating mechanism 23 in a direction parallel to the horizontal direction and perpendicular to the direction A (the direction in which the first rail 11 and the second rail 12 are aligned) B, and utilizes The moving mechanism 24 moves the elevating mechanism 23 inward and lifts and lowers the gripping mechanism 21 by the elevating mechanism 23, thereby transferring the FOUP 90 to each of the fixed support tables 41.

Each of the third storage units 40a is disposed in the direction A in which the first rail 11 and the second rail 12 extend, and is located at the same position as each of the first storage unit 30a and each of the second storage units 30b of the storage device 30. The direction in which the rails 11 and the second rails 12 are arranged is different from the position of each of the first storage portions 30a and the second storage portions 30b of the storage device 30. In other words, when viewed from the direction B, the third storage unit 40a is located on a line parallel to the vertical direction of the first storage unit 30a and the second storage unit 30b corresponding to the third storage unit 40a (see FIG. 3 and 4), when viewed from the direction A, it is not located in the first storage unit 30a and the second corresponding to the third storage unit 40a. The storage unit 30b is parallel to the vertical direction (see FIGS. 2 and 4). In addition, the third storage unit 40a is located above the first storage unit 30a and the second storage unit 30b corresponding to the third storage unit 40a, and corresponds to the third storage unit when viewed from the direction A. The first storage unit 30a and the second storage unit 30b of 40a are located inside (see Fig. 2). However, the third storage unit 40a may be located at the same height or lower side with respect to the first storage unit 30a and the second storage unit 30b corresponding to the third storage unit 40a.

In the transport system 1 configured as described above, as an example, the following transport method is implemented. First, the controller 50 moves the FOUP 90 to the first storage unit 30a (that is, the moving support table 32 located below the first rail 11) when the first rail 11 is stopped, and the overhead transport vehicle 20 The action is controlled. As a result, the overhead transport vehicle 20 stops at the first rail 11 and transfers the FOUP 90 to the first storage unit 30a (first step). Next, the controller 50 moves the support table 32 so that the FOUP 90 is transferred from the first storage unit 30a to the second storage unit 30b (that is, on the movement support table 32 at a position covering the lower end portion of the opening region 31a). The position corresponding to the first storage unit 30a is moved to a position corresponding to the second storage unit 30b (second step). Next, the controller 50 controls the operation of the storage device 30 so that the FOUP 90 is transferred from the second storage unit 30b to the device 埠101. That is, the storage device 30 operates the transfer mechanism 34, and transfers the FOUP 90 placed on the second storage unit 30b to the transfer mechanism 34. Next, the storage device 30 moves the movement support base 32 from the second storage unit 30b to the first storage unit 30a. Next, the storage device 30 operates the transfer mechanism 34 to transfer the FOUP 90 to the device 埠 101 (third step).

As described above, in the transport system 1, the overhead transport vehicle 20 stopped in the first rail 11 can transfer the FOUP 90 to the first storage unit 30a, and the overhead transport vehicle 20 stopped in the second rail 12 can transfer the FOUP 90. The second storage unit 30b. By this, the FOUP 90 can be transferred to the storage unit 30 of the first storage unit 30a, the second storage unit 30b, and the device 分别101, and the number of the FOUP 90 can be increased to the device 埠101. As a result, the FOUP 90 can be improved. The transfer efficiency to the device 101.

In the transport system 1, the storage device 30 has a movement support table 32 and a transfer mechanism 34. Then, the movement support table 32 is movable between the first storage unit 30a and the second storage unit 30b, and the transfer mechanism 34 can transfer the FOUP 90 to the movement support table 32 and the device 埠101, respectively. By using the configuration that can be moved between the first storage unit 30a and the second storage unit 30b as the movement support table 32, the configuration of the transfer mechanism 34 can be simplified.

In the conveyance system 1, the first rail 11 is a part of the annular inner rail 14a when viewed in the vertical direction, and the second rail 12 is a part of the annular outer rail 14b when viewed from the vertical direction. Thereby, in the transport system 1 having a practical track layout, the transport efficiency of the FOUP 90 to the device cassette 101 can be improved.

In the transport system 1, the first rail 11 and the second rail 12 extend at the same height in the vertical direction and parallel to each other. Thereby, in the conveyance system 1 in which the ceiling height is restricted, the conveyance efficiency of the FOUP 90 to the apparatus 埠101 can be improved.

In the transport system 1, the overhead transport vehicle 20 includes a grip mechanism 21, a lifting mechanism 23, and a moving mechanism 24. Then, in the direction A in which the first rail 11 and the second rail 12 extend, the positions of the first storage unit 30a and the second storage unit 30b are the same, and the direction in which the first rail 11 and the second rail 12 are arranged is the same. The third storage unit 40a is provided at a position where the positions of the storage unit 30a and the second storage unit 30b are different. By this, the FOUP 90 can be transferred to the first storage unit 30a, the second storage unit 30b, and the third storage unit 40a by the overhead transport vehicle 20 at the same stop position of each of the first rail 11 and the second rail 12, Therefore, the FOUP90 can be further improved on the device 埠101 Send efficiency.

In the transport system 1, the controller 50 controls the operation of the overhead transport vehicle 20 so that the FOUP 90 is transferred to the first storage unit 30a when the first rail 11 is stopped, and the FOUP 90 is transferred from the first storage unit 30a. The operation of the storage device 30 is controlled to the second storage unit 30b, and the operation of the storage device 30 is controlled such that the FOUP 90 is transferred from the second storage unit 30b to the device 101. As a result, the overhead transport vehicle 20 that can be stopped not only from the second rail 12 but also the overhead transport vehicle 20 that has been stopped by the first rail 11 can transfer the FOUP 90 to the device 埠101, so that the FOUP 90 can be lifted. 101 transfer efficiency.

Although an embodiment of the present invention has been described above, the embodiment of the present invention is not limited to the above embodiment. For example, the storage rack 40 may not be provided as shown in FIG. In this case, the distance between the semiconductor processing apparatuses 100 facing each other can be reduced. Further, as shown in FIG. 6, the first rail 11 and the second rail 12 may be a part of a straight portion of the rails 10 adjacent to each other (here, the in-process rails 14 arranged in a branched and merged manner). . Further, as shown in FIG. 7, the transport system 1 may be configured such that the first rail 11 and the first storage unit 30a are located above the semiconductor processing apparatus 100. In this case, the area above the semiconductor processing apparatus 100 can be effectively utilized.

Further, as shown in FIG. 8, the first rail 11 may be provided at a position shifted from the position above the first storage portion 30a in the direction B. In this case, the overhead transport vehicle 20 stopped at the first rail 11 can also transfer the FOUP 90 to the first storage unit 30a by using the moving mechanism 24. Then, in this case, as shown in FIG. 9, for example, a common storage shelf 60 can be provided on both sides of each storage device 30 in the direction A in which the first rail 11 and the second rail 12 extend. Both the overhead transport vehicle 20 stopped at the first rail 11 and the overhead transport vehicle 20 stopped at the second rail 12 will be The FOUP 90 is transferred to each storage rack 60.

Further, as shown in FIG. 10, the storage device 30 may have a first fixed support table 36 that supports the FOUP 90 in the first storage unit 30a, and a second fixed support table 37 that supports the FOUP 90 in the second storage unit 30b; The transfer mechanism 35 can transfer the FOUP 90 to the first fixed support table 36, the second fixed support table 37, and the device 埠101, respectively. In this example, the second storage unit 30b (second fixed support table 37) and the device 埠101 are provided directly below the second rail 12, but are disposed in the direction in which the first rail 11 and the second rail 12 extend. A position on which A deviates from each other. In other words, the second storage unit 30b (second fixed support table 37) is provided at a position that is offset from directly above the apparatus 埠101. The transfer mechanism 35 is movable right in the direction A in which the first rail 11 and the second rail 12 extend, directly above the second storage portion 30b (second fixed support table 37) and directly above the apparatus 101. Further, the transfer mechanism 35 can move and raise and lower the grip mechanism 35a of the flange portion 91 of the FOUP 90 in the direction B. Thereby, the transfer mechanism 35 can transfer the FOUP 90 to the first fixed support table 36, the second fixed support table 37, and the device 埠101, respectively. Further, the overhead transport vehicle 20 that has moved on the second rail 12 can be stopped immediately above the apparatus 埠101, and the FOUP 90 can be transferred to the apparatus 埠101 via the area between the transfer rails of the transfer mechanism 35. According to this example, since the first fixed support table 36 and the second fixed support table 37 are fixed, the configuration can be simplified.

Further, the following transfer method can also be implemented. In the storage device 30, the first storage unit 30a and the second storage unit 30b on the upstream side of the first rail 11 and the second rail 12 (for example, two moving support tables 32 on the upstream side in FIG. 4) It is only for the delivery of the overhead transport vehicle 20 (for storage). In addition, the first storage unit 30a and the second storage unit 30b (for example, the two mobile support tables 32 on the downstream side in FIG. 4) on the downstream side of the first rail 11 and the second rail 12 are used as overhead transport vehicles. Delivery of 20 Dedicated (exclusive). As a result, the FOUP 90 is placed on the overhead transport vehicle 20 of the mobile support table 32 on the upstream side, and the movement of the FOUP 90 from the downstream mobile support base 32 can be efficiently performed and then transferred.

Further, the object to be transported by the transport system according to the embodiment of the present invention is not limited to the FOUP in which a plurality of semiconductor wafers are accommodated, and may be another container in which a glass wafer, a photomask, or the like is housed. Further, the transport system according to one aspect of the present invention is not limited to being applied to a semiconductor manufacturing factory, and may be applied to other facilities.

11‧‧‧1 track

12‧‧‧2nd track

20‧‧‧Elevated transport vehicle

21‧‧‧Control institutions

22‧‧‧Land

23‧‧‧ Lifting mechanism

24‧‧‧Mobile agencies

30‧‧‧Storage device

30a‧‧‧First Storage Department

30b‧‧‧Second Storage Department

31‧‧‧Frame

32‧‧‧Mobile support table

33‧‧‧Fixed support table

34‧‧‧Transportation mechanism

34a‧‧‧Control organization

40‧‧‧Storage scaffolding

40a‧‧‧3rd Storage Department

41‧‧‧Fixed support table

90‧‧‧FOUP (transported)

91‧‧‧Flange

100‧‧‧Semiconductor processing unit

101‧‧‧Devices

B‧‧‧ directions

Claims (8)

A transport system including: a first rail and a second rail; and a plurality of overhead transport vehicles, wherein the transported objects are transported along the first rail and the second rail, respectively; and a storage device The transported object is transferred to the first storage unit, the second storage unit, and the device 埠, and the first storage unit is configured to transfer the transported object to the overhead transport vehicle that is stopped by the first rail. The storage unit is configured to transfer the conveyed object to the overhead conveyance vehicle that is stopped by the second rail, and the apparatus is configured to transfer the conveyed object to the overhead conveyance vehicle that is stopped by the second rail. The transport system according to claim 1, wherein the storage device includes a moving support table that is movable between the first storage unit and the second storage unit, and supports the object to be conveyed; and a transfer mechanism. The objects to be conveyed can be transferred to the moving support table and the device 分别, respectively. The transport system according to claim 1, wherein the storage device includes: a first fixed support that supports the object to be transported in the first storage unit; and a second fixed support that supports the And a transfer mechanism that transfers the conveyed objects to the first fixed support table, the second fixed support table, and the device 分别, respectively. The transport system according to any one of claims 1 to 3, wherein the first rail is one of one of an inner rail and an outer rail that is annular when viewed in a vertical direction, and the second rail is the One of the inner rail and the other of the outer rails Minute. The transport system according to any one of claims 1 to 4, wherein the first rail and the second rail extend in parallel with each other at the same height in the vertical direction. The transport system of claim 5, wherein the overhead transport vehicle has: a gripping mechanism that can hold the transported object; an elevating mechanism that can raise and lower the gripping mechanism; and a moving mechanism that can cause the elevating mechanism to follow the The first track and the second track are arranged in the direction of the first track and the second track extending in the same direction as the first storage unit and the second storage unit, and the first track and the A third storage unit is provided at a position different from the positions of the first storage unit and the second storage unit in the direction in which the second track is arranged. The transport system according to any one of claims 1 to 6, further comprising: a controller for controlling an operation of the overhead transport vehicle and the storage device, wherein the controller stops the first track Controlling the operation of the overhead transport vehicle by transferring the transported material to the first storage unit, and controlling the operation of the storage device by transferring the transported object from the first storage unit to the second storage unit The operation of the storage device is controlled such that the object to be conveyed is transferred from the second storage unit to the device. A transport method according to any one of claims 1 to 7, further comprising: a first step of stopping the above-described overhead by the overhead transport vehicle move a step of transferring the transported object to the first storage unit; a second step of the step of transferring the transported object from the first storage unit to the second storage unit; and a third step The storage device transfers the conveyed material from the second storage unit to the device 埠.