TWI704336B - Optical inspection apparatus - Google Patents

Abstract

The present disclosure provides an optical inspection apparatus that includes an optical scanning device, at least one reflective sensor, a transmission member, and a processor. The reflective sensor is disposed on the optical scanning device, and the processor is electrically connected to the optical scanning device, the reflective sensor and the transmission member. The transmission member is configured to transmit a tested object. After the reflective sensor senses the tested object, the processor controls the transmission member to temporarily stop transmitting the tested object, so that the optical scanning device can optically scan the tested object.

Description

Optical inspection equipment

The present invention relates to a detection device, and particularly relates to an optical detection device.

Optical inspection is the use of machine vision as the inspection standard technology to improve the shortcomings of traditional manual optical instruments for inspection.

The current automatic X-ray inspection machine is mainly based on the contrast sensor on the conveyor when entering the plate. However, in actual application, if the thickness of the object to be measured is different, the contrast sensor cannot use a unified threshold, which causes the operator to adjust the sensor threshold according to the difference of the thickness. In addition, the contrast sensor has higher requirements for the flatness of the conveyor in different plate widths due to the limitation of the pointing angle.

However, the current contrast sensor on the conveyor is used as the stop plate sensing. When the thickness of the test object becomes thinner, the range of light shielding becomes smaller, and the test object cannot stop at the correct position, causing abnormal detection. .

The present invention proposes an optical detection device to improve the problems of the prior art.

In an embodiment of the present invention, the optical detection device provided by the present invention includes an optical scanning device, at least one reflective sensor, a transmission mechanism, and a processor. The reflective sensor is arranged on the optical scanning device, and the processor is electrically connected to the optical scanning device, the reflective sensor and the transmission mechanism. The transmission mechanism is used to transmit the object to be measured. After the reflective sensor detects the object, the processor controls the transmission mechanism to suspend the transmission of the object to be measured, so that the optical scanning device can perform optical scanning of the object to be measured.

In an embodiment of the present invention, the optical scanning device includes an X-ray generator and an X-ray detector. The X-ray generator is located on one side of the transmission mechanism, and the X-ray detector is located on the other side of the transmission mechanism. The X-ray generator is used to generate X-rays, and the X-ray detector is used to detect the X-rays output from the X-ray generator and passing through the object to be tested.

In an embodiment of the present invention, the reflective sensor is disposed on at least one of the X-ray generator and the X-ray detector.

In an embodiment of the present invention, the reflective sensor includes a first reflective sensor and a second reflective sensor. The first reflective sensor is arranged on the X-ray generator. When the first reflective sensor senses the object to be measured, the processor controls the transmission mechanism to decelerate and transmit the object to be measured. The second reflective sensor is arranged on the X-ray generator. The second reflective sensor and the first reflective sensor are spaced apart from each other. When the second reflective sensor detects the object to be measured, The processor controls the transmission mechanism to suspend the transmission of the object under test.

In an embodiment of the present invention, the X-ray generator has an X-ray output port, and the first reflective sensor and the second reflective sensor are respectively disposed on opposite sides of the X-ray output port.

In an embodiment of the present invention, the reflective sensor includes a first reflective sensor and a second reflective sensor. The first reflective sensor is arranged on the X-ray generator. When the first reflective sensor senses the object to be measured, the processor controls the transmission mechanism to decelerate and transmit the object to be measured. The second reflective sensor is arranged on the X-ray detector, the second reflective sensor and the first reflective sensor are spaced apart from each other, when the second reflective sensor senses the object to be measured , The processor controls the transmission mechanism to suspend the transmission of the object under test.

In an embodiment of the present invention, the reflective sensor includes a first reflective sensor and a second reflective sensor. The first reflective sensor is arranged on the X-ray detector. When the first reflective sensor detects the object to be measured, the processor controls the transmission mechanism to decelerate and transmit the object to be measured. The second reflective sensor is arranged on the X-ray generator. The second reflective sensor and the first reflective sensor are spaced apart from each other. When the second reflective sensor detects the object to be measured, The processor controls the transmission mechanism to suspend the transmission of the object under test.

In an embodiment of the present invention, the reflective sensor includes a first reflective sensor and a second reflective sensor. The first reflective sensor is arranged on the X-ray detector. When the first reflective sensor detects the object to be measured, the processor controls the transmission mechanism to decelerate and transmit the object to be measured. The second reflective sensor is arranged on the X-ray detector, the second reflective sensor and the first reflective sensor are spaced apart from each other, when the second reflective sensor senses the object to be measured , The processor controls the transmission mechanism to suspend the transmission of the object under test.

In an embodiment of the present invention, the reflective sensor is a single reflective sensor, and the single reflective sensor is arranged on the X-ray generator or the X-ray detector. When the sensor detects the object to be measured, the processor predicts the stopping time point according to the transmission speed of the transmission mechanism, and then stops the transmission mechanism from transmitting the object to be measured at the stopping time point.

In an embodiment of the present invention, the test object is a circuit board.

In summary, the technical solution of the present invention has obvious advantages and beneficial effects compared with the prior art. With the technical solution of the present invention, the stop method of the reflective sensor on the optical scanning device (that is, stop the transmission of the object to be measured), the stop position can be set by the processor through software, which improves the stability of the stop, and the operator No need to change the hardware settings.

Hereinafter, the above description will be described in detail by way of implementation, and a further explanation will be provided for the technical solution of the present invention.

In order to make the above and other objects, features, advantages and embodiments of the present invention more obvious and understandable, the description of the attached symbols is as follows:

100, 200, 300, 400, 500, 600, 700‧‧‧Optical inspection equipment

110‧‧‧Optical scanning device

112‧‧‧X-ray generator

113‧‧‧X-ray output port

114‧‧‧X-ray detector

120‧‧‧Reflective sensor

130‧‧‧Transmission parts

140‧‧‧Processor

190‧‧‧Object to be tested

210, 310, 410, 510‧‧‧The first reflective sensor

220, 320, 420, 520‧‧‧Second reflective sensor

610‧‧‧Reflective sensor

710‧‧‧Reflective sensor

In order to make the above and other objectives, features, advantages and embodiments of the present invention more comprehensible, the description of the accompanying drawings is as follows: Figure 1 is a schematic front view of an optical inspection device according to an embodiment of the present invention; And FIGS. 2-7 are schematic side views of optical inspection equipment according to various embodiments of the present invention.

In order to make the description of the present invention more detailed and complete, please refer to the attached drawings and various embodiments described below. The same numbers in the drawings represent the same or similar elements. On the other hand, well-known elements and steps are not described in the embodiments to avoid unnecessary limitations on the present invention.

In the implementation and the scope of the patent application, the description of "connection" can generally refer to a component that is indirectly coupled to another component through other components, or that one component is directly connected to another component without other components.

In the implementation and the scope of the patent application, the description of "electrical connection" can generally refer to a component that is electrically connected to another component indirectly through other components, or that a component is physically connected to another component without going through other components. Another element.

In the implementation mode and the scope of the patent application, unless the article is specifically limited in the context, "a" and "the" can generally refer to a single or plural.

FIG. 1 is a schematic front view of an optical inspection device 100 according to an embodiment of the present invention. As shown in FIG. 1, the optical inspection equipment 100 includes an optical scanning device 110, at least one reflective sensor 120, a transmission mechanism 130 and a processor 140. In terms of architecture, the reflective sensor 120 is disposed on the optical scanning device 110, and the processor 140 is electrically connected to the optical scanning device 110, the reflective sensor 120 and the transmission mechanism 130. For example, the transmission component 130 may be a conveyor, which includes components such as a stepping motor, a conveyor belt, etc., and the processor 140 may be a central processing unit, a controller, or other processing circuits.

In operation, the transmission mechanism 130 is used to transmit the object to be measured 190. After the reflective sensor 120 senses the object to be measured 190, the processor 140 controls the transmission mechanism 130 to suspend the transmission of the object to be measured 190 to enable optical scanning The device 110 can perform optical scanning on the object 190 under test. For example, the test object 190 can be a circuit board, a semiconductor wafer, a display panel, or other objects.

In FIG. 1, the optical scanning device 110 includes an X-ray generator 112 and an X-ray detector 114. Structurally, the X-ray generator 112 is located on one side of the transmission mechanism 130, and the X-ray detector 114 is located on the other side of the transmission mechanism 130. In operation, the X-ray generator 112 is used to generate X-rays, and the X-ray detector 114 is used to detect the X-rays output from the X-ray generator and transmitted through the object 190. In this embodiment, the X-ray generator 112 is located above the transmission mechanism 130, and the X-ray detector 114 is located below the transmission mechanism 130, but this does not limit the present invention. In other embodiments, the X-ray generator 112 may be located below the transmission mechanism 130, and the X-ray detector 114 may be located above the transmission mechanism 130. Those skilled in the art should flexibly choose one according to the needs at the time.

It should be understood that although FIG. 1 shows that the reflective sensor 120 is placed on the X-ray generator 112, for example, the reflective sensor 120 is placed on the side of the X-ray output port 113 of the X-ray generator 112. , But the present invention is not limited to this. In practice, the reflective sensor 120 is disposed on at least one of the X-ray generator 112 and the X-ray detector 114. For example, the reflective sensor 120 can be a red light sensor, a blue light sensor, an invisible light sensor (such as an infrared sensor), a laser light sensor or other non-X-ray sensors. To avoid interference with the X-ray generator 112 and the X-ray detector 114.

In order to further explain the above-mentioned reflective sensor 120, please refer to Figures 2-7 respectively. Figures 2-7 are optical inspection devices 200, 300, 400, 500, 600 according to various embodiments of the present invention. , 700 schematic side view.

In FIG. 2, the reflective sensor 120 includes a first reflective sensor 210 and a second reflective sensor 220. In terms of architecture, the first reflective sensor 210 is disposed on the X-ray generator 112, the second reflective sensor 220 is disposed on the X-ray generator 112, the first reflective sensor 210 and the second reflective sensor The type sensors 220 are spaced apart from each other. Specifically, the X-ray generator 112 has an X-ray output port 113, and the first reflective sensor 210 and the second reflective sensor 220 are respectively disposed on opposite sides of the X-ray output port 113 to save space.

During operation, the object to be measured 190 is transferred by the transmission mechanism 130, and passes through the first reflective sensor 210 and then the second reflective sensor 220. When the first reflective sensor 210 senses the object 190, the processor 140 controls the transmission mechanism 130 to decelerate and transmit the object 190. Next, when the second reflective sensor 220 detects the object 190, the processor 140 controls the transmission mechanism 130 to suspend the transmission of the object 190, so that the X-ray generator 112 generates X-rays, and X-ray detection The detector 114 detects the X-ray output from the X-ray generator 112 and transmitted through the object 190. Thereby, the X-ray generator 112 and the X-ray detector 114 can optically scan the object 190 under test.

Or, before performing optical scanning, for example, the processor 140 can confirm the actual stop position of the object 190 and the target position (such as a system preset value) through the X-ray generator 112 and the X-ray detector 114 The processor 140 can fine-tune the position of the object 190 or move the X-ray generator 112 and/or the X-ray detector 114 through the transmission mechanism 130 to eliminate the influence of the offset and allow the optical The optical scanning of the detection device 200 is more accurate.

In FIG. 3, the reflective sensor 120 includes a first reflective sensor 310 and a second reflective sensor 320. In terms of architecture, the first reflective sensor 310 is disposed on the X-ray generator 112, the second reflective sensor 320 is disposed on the X-ray detector 114, the first reflective sensor 310 and the second The reflective sensors 320 are staggered from each other in the vertical projection, and the first reflective sensor 310 is disposed on the X-ray output port 113 on the side closest to the traveling direction of the object 190.

During operation, the object to be measured 190 is transported by the transmission mechanism 130 and passes through the first reflective sensor 310 and then the second reflective sensor 320. When the first reflective sensor 310 senses the object 190, the processor 140 controls the transmission mechanism 130 to decelerate and transmit the object 190. Next, when the second reflective sensor 320 detects the object 190, the processor 140 controls the transmission mechanism 130 to suspend the transmission of the object 190, so that the X-ray generator 112 generates X-rays and X-ray detection The detector 114 detects the X-ray output from the X-ray generator 112 and transmitted through the object 190. Thereby, the X-ray generator 112 and the X-ray detector 114 can optically scan the object 190 under test.

Or, before performing optical scanning, for example, the processor 140 can confirm the actual stop position of the object 190 and the target position (such as a system preset value) through the X-ray generator 112 and the X-ray detector 114 The processor 140 can fine-tune the position of the object 190 or move the X-ray generator 112 and/or the X-ray detector 114 through the transmission mechanism 130 to eliminate the influence of the offset and allow the optical The optical scanning of the detection device 300 is more accurate.

In FIG. 4, the reflective sensor 120 includes a first reflective sensor 410 and a second reflective sensor 420. Structurally, the first reflective sensor 410 is disposed on the X-ray detector 114, the second reflective sensor 420 is disposed on the X-ray generator 112, the first reflective sensor 410 and the second The reflective sensors 420 are staggered in vertical projection, and the second reflective sensor 420 is disposed on the X-ray output port 113 on the side farthest from the traveling direction of the object 190.

During operation, the object to be measured 190 is transferred by the transmission mechanism 130 and passes through the first reflective sensor 410 and then the second reflective sensor 420. When the first reflective sensor 410 senses the object 190, the processor 140 controls the transmission mechanism 130 to decelerate and transmit the object 190. Next, when the second reflective sensor 420 senses the object 190, the processor 140 controls the transmission mechanism 130 to suspend the transmission of the object 190 so that the X-ray generator 112 generates X-rays, and X-ray detection The detector 114 detects the X-ray output from the X-ray generator 112 and transmitted through the object 190. Thereby, the X-ray generator 112 and the X-ray detector 114 can optically scan the object 190 under test.

Or, before performing optical scanning, for example, the processor 140 can confirm the actual stop position of the object 190 and the target position (such as a system preset value) through the X-ray generator 112 and the X-ray detector 114 The processor 140 can fine-tune the position of the object 190 or move the X-ray generator 112 and/or the X-ray detector 114 through the transmission mechanism 130 to eliminate the influence of the offset and allow the optical The optical scanning of the detection device 400 is more accurate.

In FIG. 5, the reflective sensor 120 includes a first reflective sensor 510 and a second reflective sensor 520. In terms of architecture, the first reflective sensor 510 is arranged on the X-ray detector 114, the second reflective sensor 520 is arranged on the X-ray detector 114, and the first reflective sensor 510 and the second The two reflective sensors 520 are spaced apart from each other. Specifically, the first reflective sensor 510 is closer to the traveling direction of the object 190 than the second reflective sensor 520 is.

During operation, the test object 190 is transported by the transmission mechanism 130, and passes through the first reflective sensor 510 first, and then the second reflective sensor 520. When the first reflective sensor 510 senses the object 190, the processor 140 controls the transmission mechanism 130 to decelerate and transmit the object 190. Next, when the second reflective sensor 520 senses the test object 190, the processor 140 controls the transmission mechanism 130 to suspend the transmission of the test object 190, so that the X-ray generator 112 generates X-rays and X-ray detection The detector 114 detects the X-ray output from the X-ray generator 112 and transmitted through the object 190. Thereby, the X-ray generator 112 and the X-ray detector 114 can optically scan the object 190 under test.

Or, before performing optical scanning, for example, the processor 140 can confirm the actual stop position of the object 190 and the target position (such as a system preset value) through the X-ray generator 112 and the X-ray detector 114 The processor 140 can fine-tune the position of the object 190 or move the X-ray generator 112 and/or the X-ray detector 114 through the transmission mechanism 130 to eliminate the influence of the offset and allow the optical The optical scanning of the detection device 500 is more accurate.

In FIG. 6, the reflective sensor 120 includes a single reflective sensor 610. In terms of architecture, the reflective sensor 610 is disposed on the X-ray generator 112. Specifically, the reflective sensor 610 can be disposed on the side of the X-ray output port 113 closest to the traveling direction of the object 190.

During operation, the test object 190 is transferred by the transmission mechanism 130. When the reflective sensor 610 senses the object 190, the processor 140 predicts the stop time point according to the transmission speed of the transmission mechanism 130, and then stops the transmission mechanism 130 from transmitting the object 190 at the stop time point. , The X-ray generator 112 generates X-rays, and the X-ray detector 114 detects the X-rays output from the X-ray generator 112 and transmitted through the object 190. Thereby, the X-ray generator 112 and the X-ray detector 114 can optically scan the object 190 under test.

Or, before performing optical scanning, for example, the processor 140 can confirm the actual stop position of the object 190 and the target position (such as a system preset value) through the X-ray generator 112 and the X-ray detector 114 The processor 140 can fine-tune the position of the object 190 or move the X-ray generator 112 and/or the X-ray detector 114 through the transmission mechanism 130 to eliminate the influence of the offset and allow the optical The optical scanning of the detection device 600 is more accurate.

In Figure 7, the reflective sensor 120 includes a single reflective sensor 710. In terms of architecture, the reflective sensor 710 is disposed on the X-ray detector 114.

During operation, the test object 190 is transferred by the transmission mechanism 130. When the reflective sensor 710 senses the object 190, the processor 140 predicts the stop time point according to the transmission speed of the transmission mechanism 130, and then stops the transmission mechanism 130 from transmitting the object 190 at the stop time point. , The X-ray generator 112 generates X-rays, and the X-ray detector 114 detects the X-rays output from the X-ray generator 112 and transmitted through the object 190. Thereby, the X-ray generator 112 and the X-ray detector 114 can optically scan the object 190 under test.

Or, before performing optical scanning, for example, the processor 140 can confirm the actual stop position of the object 190 and the target position (such as a system preset value) through the X-ray generator 112 and the X-ray detector 114 The processor 140 can fine-tune the position of the object 190 or move the X-ray generator 112 and/or the X-ray detector 114 through the transmission mechanism 130 to eliminate the influence of the offset and allow the optical The optical scanning of the detection device 700 is more accurate.

In summary, the technical solution of the present invention has obvious advantages and beneficial effects compared with the prior art. With the technical solution of the present invention, the stop method of the reflective sensor on the optical scanning device (that is, stop the transmission of the object to be measured), the stop position can be set by the processor through software, which improves the stability of the stop, and the operator No need to change the hardware settings.

Although the present invention has been disclosed in the above embodiments, it is not intended to limit the present invention. Anyone familiar with the art can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the protection of the present invention The scope shall be subject to those defined in the attached patent scope.

100‧‧‧Optical Inspection Equipment

110‧‧‧Optical scanning device

112‧‧‧X-ray generator

113‧‧‧X-ray output port

114‧‧‧X-ray detector

120‧‧‧Reflective sensor

130‧‧‧Transmission parts

140‧‧‧Processor

190‧‧‧Object to be tested

Claims (8)

An optical detection equipment, comprising: an optical scanning device; at least one reflective sensor arranged on the optical scanning device; a transmission mechanism for transmitting an object to be tested; and a processor electrically connected to the The optical scanning device, the reflective sensor, and the transmission mechanism. After the reflective sensor detects the object to be measured, the processor controls the transmission mechanism to suspend the transmission of the object to be measured, so that the optical The scanning device can perform optical scanning of the object under test, wherein the optical scanning device includes: an X-ray generator located on one side of the transmission mechanism, the X-ray generator for generating X-rays; and an X-ray detector located at On the other side of the transmission mechanism, the X-ray detector is used to detect the X-ray output from the X-ray generator and transmitted through the object to be measured, wherein the reflective sensor is disposed on the X-ray generator and On at least one of the X-ray detectors, the processor confirms the offset between the actual stopping position of the object under test and the preset target position of the system through the X-ray generator and the X-ray detector, The processor fine-tunes the position of the object to be measured through the transmission mechanism or moves at least one of the X-ray generator and the X-ray detector. The optical inspection device according to claim 1, wherein the reflective sensor comprises: a first reflective sensor arranged on the X-ray generator, when the first reflective sensor senses When the object to be tested, the processor controls the transmission The moving part decelerates and transmits the object to be measured: and a second reflective sensor is arranged on the X-ray generator, the second reflective sensor and the first reflective sensor are spaced apart from each other, when When the second reflective sensor senses the object under test, the processor controls the transmission mechanism to suspend transmission of the object under test. The optical inspection device according to claim 2, wherein the X-ray generator has an X-ray output port, and the first reflective sensor and the second reflective sensor are respectively disposed opposite to the X-ray output port On both sides. The optical inspection device according to claim 1, wherein the reflective sensor comprises: a first reflective sensor arranged on the X-ray generator, when the first reflective sensor senses When the object is to be measured, the processor controls the transmission mechanism to decelerate and transmit the object to be measured: and a second reflective sensor disposed on the X-ray detector, the second reflective sensor and The first reflective sensors are spaced apart from each other, and when the second reflective sensor senses the object under test, the processor controls the transmission mechanism to suspend the transmission of the object under test. The optical inspection device according to claim 1, wherein the reflective sensor comprises: a first reflective sensor disposed on the X-ray detector, when the first reflective sensor senses When the object under test is reached, the processor controls the transmission mechanism to decelerate and transmit the object under test: and A second reflective sensor is disposed on the X-ray generator. The second reflective sensor and the first reflective sensor are spaced apart from each other. When the second reflective sensor senses When the object under test is reached, the processor controls the transmission mechanism to suspend the transmission of the object under test. The optical inspection device according to claim 1, wherein the reflective sensor comprises: a first reflective sensor disposed on the X-ray detector, when the first reflective sensor senses When reaching the object under test, the processor controls the transmission mechanism to decelerate and transmit the object under test: and a second reflective sensor disposed on the X-ray detector, the second reflective sensor It is spaced apart from the first reflective sensor, and when the second reflective sensor senses the object under test, the processor controls the transmission mechanism to stop transmitting the object under test. The optical inspection device according to claim 1, wherein the reflective sensor is a single reflective sensor, and the single reflective sensor is disposed on the X-ray generator or the X-ray detector When the single reflective sensor senses the object under test, the processor predicts a stop time point according to the transmission speed of the transmission part, and then stops the transmission part at the stop time point The test object. The optical inspection device according to claim 1, wherein the object to be tested is a circuit board.

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