TWI685281B - Laminated structure - Google Patents

Laminated structure Download PDF

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TWI685281B
TWI685281B TW104133692A TW104133692A TWI685281B TW I685281 B TWI685281 B TW I685281B TW 104133692 A TW104133692 A TW 104133692A TW 104133692 A TW104133692 A TW 104133692A TW I685281 B TWI685281 B TW I685281B
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adhesive layer
layer
printed wiring
flexible printed
resin composition
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TW104133692A
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TW201625078A (en
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宮部英和
小池直之
林亮
横山裕
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日商太陽油墨製造股份有限公司
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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/09Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/095Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having more than one photosensitive layer
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/28Applying non-metallic protective coatings

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Architecture (AREA)
  • Structural Engineering (AREA)
  • Materials For Photolithography (AREA)
  • Non-Metallic Protective Coatings For Printed Circuits (AREA)

Abstract

提供可滿足作為可撓性印刷配線板絕緣膜要求的性能,且即使在彎折部分與實裝部分之一次形成流程中亦適用的構造體。又,提供具有以其硬化物作為保護膜(例如,覆蓋膜或阻焊劑)的可撓性印刷配線板。 Provides a structure that can meet the performance required as an insulating film of a flexible printed wiring board and is applicable even in the process of forming a bent portion and a mounted portion at one time. In addition, a flexible printed wiring board having its cured product as a protective film (for example, a cover film or a solder resist) is provided.

具有由鹼顯影性樹脂組成物而成之接著層(A),以及由形成於接著層(A)上方之感光性樹脂組成物而成之保護層(B),且接著層(A)與保護層(B)之膜厚的比例為A/B=0.5~50,接著層(A)之顯影速度(a)與保護層(B)之顯影速度(b)的比例為a/b=1.1~100的積層構造體,使用該積層構造體之乾膜及可撓性印刷配線板。 It has an adhesive layer (A) made of an alkali-developable resin composition, and a protective layer (B) made of a photosensitive resin composition formed above the adhesive layer (A), and the adhesive layer (A) and protection The ratio of the film thickness of the layer (B) is A/B=0.5~50, and the ratio of the development speed (a) of the subsequent layer (A) to the development speed (b) of the protective layer (B) is a/b=1.1~ The laminated structure of 100 uses the dry film and flexible printed wiring board of the laminated structure.

Description

積層構造體 Laminated structure

本發明係關於積層構造體,特別是關於有用於可撓性印刷配線板之絶緣膜的積層構造體,以及使用其之乾膜及可撓性印刷配線板。 The present invention relates to a laminated structure, in particular, a laminated structure having an insulating film for a flexible printed wiring board, a dry film using the same, and a flexible printed wiring board.

近年來,由於智慧手機及平板終端的普及而導致電子機器的小型薄型化,使得電路基板的小尺寸化已成為必要。因此,可彎折收納之可撓性印刷配線板的用途增大,且對於該可撓性印刷配線板追求比以往更高之可靠性。 In recent years, the popularization of smart phones and tablet terminals has led to the miniaturization and thinning of electronic devices, making the size of circuit boards smaller. Therefore, the applications of flexible printed wiring boards that can be folded and stored are increased, and the reliability of the flexible printed wiring boards is higher than in the past.

相對於此,目前作為確保可撓性印刷配線板之絕緣可靠性的絕緣膜,廣泛採用了混裝流程,其折彎部分(彎曲部)係使用以耐熱性及彎曲性等機械特性優異之聚醯亞胺作為基底的覆蓋膜(例如參照專利文獻1,2);實裝部分(非彎曲部)係使用電器絕緣性等優異並能夠細微加工的感光性樹脂組成物。 In contrast, currently, as an insulating film for ensuring the insulation reliability of flexible printed wiring boards, a hybrid packaging process is widely adopted, and the bent portion (bending portion) is made of a polymer having excellent mechanical properties such as heat resistance and bendability. A cover film with acetylenimine as a base (for example, refer to Patent Documents 1 and 2); and the mounting portion (non-curved portion) uses a photosensitive resin composition that is excellent in electrical insulation and the like and can be finely processed.

亦即,由於以耐熱性及彎曲性等機械特性優異的聚醯亞胺作為基底之覆蓋膜需要透過模具沖孔來加 工,故對細微佈線較不適合。因此,對於需要細微佈線之晶片實裝部分,對其部分地併用可光微影加工之鹼顯影型感光性樹脂組成物(阻焊劑)是有必要的。 That is, the coating film based on polyimide with excellent mechanical properties such as heat resistance and bendability needs to be punched through the die to add Work, so it is less suitable for fine wiring. Therefore, it is necessary to partially use an alkali-developable photosensitive resin composition (solder resist) that can be processed by photolithography for a wafer mounting portion that requires fine wiring.

先前技術文獻 Prior technical literature 專利文獻 Patent Literature

專利文獻1:日本特開昭62-263692號公報 Patent Document 1: Japanese Patent Laid-Open No. 62-263692

專利文獻2:日本特開昭63-110224號公報 Patent Document 2: Japanese Patent Laid-Open No. 63-110224

如此,在可撓性印刷配線板的製造步驟中無法採用貼合覆蓋膜之步驟與形成阻焊劑之步驟的混裝流程,故成本性及作業性不佳便成為問題。 In this way, in the manufacturing process of the flexible printed wiring board, the mixing process of the step of attaching the cover film and the step of forming the solder resist cannot be used, so the cost and workability are poor.

針對於此,雖然已探討過將作為阻焊劑之絕緣膜或覆蓋膜之絕緣膜應用於可撓性印刷配線板的阻焊劑及覆蓋膜兩者之事,但可完全滿足兩者性能要求的材料卻仍未達到實用化。特別是對於可撓性印刷配線板,係追求實現了同時兼備下述特性的素材:對於作為阻焊劑之絕緣膜所要求的鹼顯影性,以及對於作為覆蓋膜之絕緣膜所要求的耐熱性及彎曲性等機械特性。 In view of this, although the application of an insulating film as a solder resist or an insulating film for a covering film to both the solder resist and the covering film of a flexible printed wiring board has been discussed, materials that can fully meet the performance requirements of both But it has not yet reached practicality. Especially for flexible printed wiring boards, materials that achieve both the following characteristics are required: alkali developability required for insulating films as solder resists, and heat resistance and heat resistance required for insulating films as cover films Mechanical properties such as flexibility.

此處本發明之目的係提供可滿足作為可撓性印刷配線板絕緣膜要求的性能,且即使在彎折部分與實裝部分之一次形成流程中亦適用的構造體。此外,提供具有 以其硬化物作為保護膜(例如,覆蓋膜或阻焊劑)的可撓性印刷配線板。 The object of the present invention here is to provide a structure that can satisfy the performance required as an insulating film of a flexible printed wiring board and can be applied even in the process of forming a bent portion and a mounted portion at one time. In addition, provide Flexible printed wiring board using its hardened material as a protective film (for example, cover film or solder resist).

為解決前述課題,本發明之特徵係具有由鹼顯影性樹脂組成物而成的接著層(A),以及形成於該接著層(A)上之由感光性樹脂組成物而成的保護層(B),且前述接著層(A)與前述保護層(B)的膜厚的比例:A/B=0.5~50;前述接著層(A)之顯影速度(a)與前述保護層(B)之顯影速度(b)的比例:a/b=1.1~100。 In order to solve the aforementioned problems, the present invention is characterized by having an adhesive layer (A) formed of an alkali-developable resin composition, and a protective layer formed of a photosensitive resin composition formed on the adhesive layer (A) ( B), and the ratio of the thickness of the adhesive layer (A) to the protective layer (B): A/B=0.5-50; the development speed (a) of the adhesive layer (A) and the protective layer (B) The ratio of the developing speed (b): a/b=1.1~100.

對於本發明之積層構造體,較佳者係不論前述接著層(A)及前述保護層(B),均可透過光照射使其圖型化。又,本發明之積層構造體可適用於可撓性印刷配線板之彎曲部及非彎曲部中的至少任一者;具體而言,用於可撓性印刷配線板之覆蓋膜、阻焊劑及層間絕緣材料中的至少任一用途是可行的。 It is preferable that the laminated structure of the present invention can be patterned by light irradiation regardless of the adhesive layer (A) and the protective layer (B). In addition, the laminated structure of the present invention can be applied to at least any one of the bent portion and the non-bent portion of the flexible printed wiring board; specifically, the cover film, the solder resist and the At least any one of the interlayer insulating materials is feasible.

又,本發明中乾膜之特徵,係前述本發明之積層構造體至少有單面被薄膜支撐或保護。 In addition, the dry film of the present invention is characterized in that at least one side of the laminated structure of the present invention is supported or protected by a thin film.

此外,本發明中可撓性印刷配線板之特徵,係在可撓性印刷配線基板上直接形成前述本發明之積層構造體層,或者在前述本發明之乾膜上形成積層構造體層;再透過光照射使其圖型化,再以顯影液一次地形成圖型來得到絕緣膜。再者,本發明中所謂之「圖型」係指圖型形狀的硬化物,即是絕緣膜。 In addition, the feature of the flexible printed wiring board of the present invention is that the laminated structure layer of the present invention is directly formed on the flexible printed wiring board, or the laminated structure layer is formed on the dry film of the present invention; Irradiation is used to pattern the pattern, and the pattern is formed once with the developer to obtain an insulating film. Furthermore, the "pattern" in the present invention refers to a hardened product of a pattern shape, that is, an insulating film.

根據本發明,能夠實現可滿足作為可撓性印刷配線板絕緣膜要求的性能,且亦適用於彎折部分與實裝部分之一次形成流程的積層構造體,以及使用該構造體的乾膜及可撓性印刷配線板。 According to the present invention, it is possible to realize a layered structure that can satisfy the performance required as an insulating film for a flexible printed wiring board, and is also suitable for a process of forming a bent portion and a mounted portion at a time, and a dry film and a dry film using the structure Flexible printed wiring board.

1‧‧‧可撓性印刷配線基材 1‧‧‧ Flexible printed wiring substrate

2‧‧‧銅電路 2‧‧‧Copper circuit

3‧‧‧接著層 3‧‧‧Next layer

4‧‧‧保護層 4‧‧‧Protection layer

5‧‧‧遮罩 5‧‧‧Mask

[圖1]模示性顯示本發明的可撓性印刷配線板之製造方法範例的步驟圖。 [Fig. 1] A step diagram schematically showing an example of the manufacturing method of the flexible printed wiring board of the present invention.

以下將本發明之實施方式參照圖示並詳細說明。 Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

(積層構造體) (Laminated structure)

本發明之積層構造體係具有由鹼顯影性樹脂組成物而成的接著層(A),與在該接著層(A)上所形成之由感光性樹脂組成物而成的保護層(B),且前述接著層(A)與前述保護層(B)的膜厚的比例為A/B=0.5~50,前述接著層(A)之顯影速度(a)與前述保護層(B)之顯影速度(b)的比例為a/b=1.1~100。 The laminated structure system of the present invention has an adhesive layer (A) made of an alkali-developable resin composition, and a protective layer (B) formed of a photosensitive resin composition formed on the adhesive layer (A), And the ratio of the film thickness of the adhesive layer (A) and the protective layer (B) is A/B=0.5~50, the development speed (a) of the adhesive layer (A) and the development speed of the protective layer (B) The ratio of (b) is a/b=1.1~100.

為了使用鹼顯影液進行圖型化,樹脂組成物 必須具有鹼溶解性。在積層構造體的情形中,若於保護層使用耐熱性優異之樹脂組成物,則因難以給該耐熱性優良之樹脂組成物賦予溶解性,故其顯影速度遲緩,結果造成了難以圖型化的問題。 In order to use alkaline developer for patterning, the resin composition Must have alkali solubility. In the case of a laminated structure, if a resin composition excellent in heat resistance is used for the protective layer, it is difficult to impart solubility to the resin composition excellent in heat resistance, so the development speed is slow, resulting in difficulty in patterning The problem.

本發明者們為解決此課題,故著眼於保護層與接著層的膜厚及顯影速度並深入探討,結果發現藉由讓保護層與接著層之膜厚的比例以及保護層與接著層之顯影速度的比例分別落於前述範圍內便可解決前述課題,並使本發明臻至完成。 In order to solve this problem, the inventors focused on the film thickness and development speed of the protective layer and the adhesive layer and conducted in-depth discussions. As a result, they found that by allowing the ratio of the film thickness of the protective layer and the adhesive layer and the development of the protective layer and the adhesive layer If the speed ratio falls within the aforementioned range, the aforementioned problems can be solved and the invention can be completed.

即,發現到將使用了顯影速度較慢的樹脂組成物之保護層,層合在使用了比該保護層之樹脂組成物顯影速度更快的樹脂組成物之接著層上方,並使兩者的膜厚的比例及顯影速度的比例分別落於前述範圍內後,即使保護層之顯影速度遲緩且難以透過鹼顯影進行圖型化,另外即使出現殘渣,但因為接著層之顯影速度快速,結果能夠將兩者完全沖洗掉,使積層構造整體的顯影速度落於實現範圍內。 That is, it was found that a protective layer using a resin composition with a slower development speed was laminated over a subsequent layer using a resin composition with a faster development speed than the resin composition of the protective layer, and the When the ratio of the film thickness and the ratio of the development speed fall within the aforementioned ranges, even if the development speed of the protective layer is slow and it is difficult to pattern through alkali development, and even if residues are present, the development speed of the subsequent layer is fast, which results in The two are completely washed away, so that the overall development speed of the laminated structure falls within the realized range.

為了讓鹼顯影性與耐熱性及彎曲性等機械特性更良好地兼備,前述膜厚的比例為A/B=0.5~50,較佳為A/B=1.0~30、更佳為A/B=2.0~10,又前述顯影速度的比例為a/b=1.1~100、較佳為a/b=2.0~50、更佳為a/b=3.0~30。 In order to make the mechanical properties such as alkali developability, heat resistance, and flexibility more favorable, the ratio of the aforementioned film thickness is A/B=0.5-50, preferably A/B=1.0-30, and more preferably A/B =2.0~10, and the ratio of the aforementioned development speed is a/b=1.1-100, preferably a/b=2.0-50, more preferably a/b=3.0-30.

膜厚的比例在A/B=50以下時,由於積層構造體的層厚中具有耐熱性之保護層(B)所佔的比例較大,其 顯影性良好且能得到充分的耐熱性。又,在A/B=0.5以上時,由於顯影性良好之接著層(A)比例較大,其耐熱性良好且能夠透過鹼顯影進行圖型化。 When the ratio of the film thickness is A/B=50 or less, since the protective layer (B) having heat resistance accounts for a large proportion of the layer thickness of the laminated structure, its The developability is good and sufficient heat resistance can be obtained. Moreover, when A/B=0.5 or more, since the ratio of the adhesive layer (A) with good developability is large, it has good heat resistance and can be patterned by alkali development.

顯影速度的比例在a/b=1.1以上時,由於相對於顯影困難的保護層(B)接著層(A)之顯影速度相對較快,使其能夠透過鹼顯影進行圖型化。又,在a/b=100以下時,由於對接著層(A)之鹼水溶液的溶解性是適當的,且圖型形狀安定,使得鍍敷耐性等諸特性亦良好。 When the ratio of the development speed is a/b=1.1 or more, the development speed of the protective layer (B) and the adhesion layer (A) relative to the development difficulty is relatively fast, so that it can be patterned by alkali development. In addition, when a/b=100 or less, the solubility in the alkali aqueous solution of the adhesive layer (A) is appropriate, and the pattern shape is stable, so that various characteristics such as plating resistance are also good.

積層構造體在顯影時,為了保護層及接著層之各層溶解於鹼水溶液中所需的時間定為顯影時間〔秒〕,各層的膜厚定為膜厚〔μm〕時,顯影速度係以下述式表示。 During development of the laminated structure, the time required for the protective layer and the adhesive layer to dissolve in the alkaline aqueous solution is defined as the development time [sec], and when the film thickness of each layer is determined as the film thickness [μm], the development speed is as follows Expression.

顯影速度〔μm/秒〕=膜厚〔μm〕/顯影時間〔秒〕 Development speed [μm/sec] = film thickness [μm] / development time [sec]

(保護層(B)) (Protective layer (B))

保護層(B)之感光性樹脂組成物的成分並無特別限制,例如可使用以往當作阻焊劑組成物使用之含有:含羧基樹脂或含羧基感光性樹脂、具有乙烯性不飽和鍵的化合物、光聚合起始劑及熱反應性化合物的光硬化性熱硬化性樹脂組成物,以及含有:含羧基樹脂、光鹼產生劑及熱反應性化合物的感光性熱硬化性樹脂組成物。 The composition of the photosensitive resin composition of the protective layer (B) is not particularly limited. For example, a compound containing a carboxyl group-containing resin or a carboxyl group-containing photosensitive resin and having an ethylenically unsaturated bond can be used as a solder resist composition in the past. , A photo-curable thermosetting resin composition of a photopolymerization initiator and a thermoreactive compound, and a photosensitive thermosetting resin composition containing: a carboxyl group-containing resin, a photobase generator, and a thermoreactive compound.

其中保護層(B)又以由耐熱性、強靭性優異的含有具有醯亞胺環或醯亞胺前驅體骨架之鹼溶解性樹脂的樹脂組成物所構成者為佳。 Among them, the protective layer (B) is preferably composed of a resin composition containing an alkali-soluble resin having an amide imide ring or an amide imide precursor skeleton, which is excellent in heat resistance and toughness.

本發明中所謂的具有醯亞胺環或醯亞胺前驅體骨架之鹼溶解性樹脂,係指具有羧基及酸酐基等之鹼溶解性基,與醯亞胺環或醯亞胺前驅體骨架者。關於向該鹼溶解性樹脂導入醯亞胺環或醯亞胺前驅體骨架,可使用周知慣用的手法。例如可舉出讓羧酸酐成分與胺成分及異氰酸酯成分中任一者或兩者發生反應所得之樹脂。醯亞胺化可進行熱醯亞胺化亦可進行化學醯亞胺化,或併用此等來製造亦可。 In the present invention, the so-called alkali-soluble resin having an amide imide ring or amide imide precursor skeleton means an alkali-soluble group having a carboxyl group or an acid anhydride group, etc., and an amide imide ring or amide imide precursor skeleton. . For introducing an imide ring or an imide precursor skeleton into the alkali-soluble resin, a well-known and usual method can be used. For example, a resin obtained by allowing a carboxylic anhydride component to react with either or both of an amine component and an isocyanate component can be mentioned. The imidate can be thermally imidate or chemically imidate, or they can be used in combination.

此處,作為羧酸酐成分雖然可舉出四羧酸酐及三羧酸酐等,但並不限定於此等酸酐,只要是具有與胺基或異氰酸酯基反應之酸酐基及羧基的化合物,便可含有其衍生物來使用。又,此等羧酸酐成分可以單獨或組合使用。 Here, the carboxylic acid anhydride component includes tetracarboxylic acid anhydride and tricarboxylic acid anhydride, but it is not limited to these acid anhydrides, as long as it is a compound having an acid anhydride group and a carboxyl group that react with an amine group or an isocyanate group, it may contain Use its derivatives. In addition, these carboxylic anhydride components can be used alone or in combination.

作為四羧酸酐,係可舉出焦蜜石酸二酐、3,3’,4,4’-二苯甲酮四羧酸二酐、3,3’,4,4’-聯苯四羧酸二酐、4,4’-氧基二酞酸二酐、1,2,3,4-苯四羧酸二酐、3,3”,4,4”-三聯苯基四羧酸二酐、3,3''',4,4'''-四聯苯基四羧酸二酐、3,3'''',4,4''''-五聯苯基四羧酸二酐、亞甲基-4,4’-二酞酸二酐、1,1-亞乙烯基-4,4’-二酞酸二酐、2,2-亞丙基-4,4’-二酞酸二酐、1,2-伸乙基-4,4’-二酞酸二酐、1,3-三亞甲基-4,4’-二酞酸二酐、1,4-四亞甲基-4,4’-二酞酸二酐、1,5-五亞甲基-4,4’-二酞酸二酐、硫基-4,4’-二酞酸二酐、磺醯基-4,4’-二酞酸二酐、1,3-雙(3,4-二羧基苯基)-1,1,3,3-四甲基矽氧烷二酐、1,3-雙(3,4-二羧基苯基)苯二酐、1,4- 雙(3,4-二羧基苯基)苯二酐、1,3-雙(3,4-二羧基苯氧基)苯二酐、1,4-雙(3,4-二羧基苯氧基)苯二酐、1,3-雙〔2-(3,4-二羧基苯基)-2-丙基〕苯二酐、1,4-雙〔2-(3,4-二羧基苯基)-2-丙基〕苯二酐、雙〔3-(3,4-二羧基苯氧基)苯基〕甲烷二酐、2,3,6,7-萘四羧酸二酐、1,2,5,6-萘四羧酸二酐、3,4,9,10-苝四羧酸二酐、2,3,6,7-蒽四羧酸二酐、1,2,7,8-菲四羧酸二酐、1,2,3,4-丁烷四羧酸二酐、1,2,3,4-環丁烷四羧酸二酐、環戊烷四羧酸二酐、環己烷-1,2,3,4-四羧酸二酐、環己烷-1,2,4,5-四羧酸二酐、3,3’,4,4’-聯環己基四羧酸二酐、羰基-4,4’-雙(環己烷-1,2-二羧酸)二酐、亞甲基-4,4’-雙(環己烷-1,2-二羧酸)二酐、1,2-伸乙基-4,4’-雙(環己烷-1,2-二羧酸)二酐、1,1-亞乙烯基-4,4’-雙(環己烷-1,2-二羧酸)二酐、2,2-亞丙基-4,4’-雙(環己烷-1,2-二羧酸)二酐、乙二醇雙偏苯三酸酯二酐、1,2-(伸乙基)雙(偏苯三酸酐)、1,3-(三亞甲基)雙(偏苯三酸酐)、1,4-(四亞甲基)雙(偏苯三酸酐)、1,5-(五亞甲基)雙(偏苯三酸酐)、1,6-(六亞甲基)雙(偏苯三酸酐)、1,7-(七亞甲基)雙(偏苯三酸酐)、1,8-(八亞甲基)雙(偏苯三酸酐)、1,9-(九亞甲基)雙(偏苯三酸酐)、1,10-(十亞甲基)雙(偏苯三酸酐)、1,12-(十二亞甲基)雙(偏苯三酸酐)、1,16-(六十亞甲基)雙(偏苯三酸酐)、1,18-(十八亞甲基)雙(偏苯三酸酐)等。 Examples of the tetracarboxylic anhydride include pyromellic dianhydride, 3,3',4,4'-benzophenone tetracarboxylic dianhydride, and 3,3',4,4'-biphenyltetracarboxylic acid. Acid dianhydride, 4,4'-oxydiphthalic dianhydride, 1,2,3,4-benzenetetracarboxylic dianhydride, 3,3”,4,4”-terphenylphenyltetracarboxylic dianhydride , 3,3''',4,4'''-Tetraphenylphenyltetracarboxylic dianhydride, 3,3'''',4,4''''-Pentaphenyltetracarboxylic dianhydride , Methylene-4,4'-diphthalic dianhydride, 1,1-vinylidene-4,4'-diphthalic dianhydride, 2,2-propylene-4,4'-diphthalide Acid dianhydride, 1,2-ethylidene-4,4'-diphthalic dianhydride, 1,3-trimethylene-4,4'-diphthalic dianhydride, 1,4-tetramethylene -4,4'-diphthalic dianhydride, 1,5-pentamethylene-4,4'-diphthalic dianhydride, thio-4,4'-diphthalic dianhydride, sulfonyl- 4,4'-Diphthalic dianhydride, 1,3-bis(3,4-dicarboxyphenyl)-1,1,3,3-tetramethylsiloxane dianhydride, 1,3-bis( 3,4-dicarboxyphenyl)phthalic anhydride, 1,4- Bis(3,4-dicarboxyphenyl)phthalic anhydride, 1,3-bis(3,4-dicarboxyphenoxy)phthalic anhydride, 1,4-bis(3,4-dicarboxyphenoxy ) Phthalic anhydride, 1,3-bis[2-(3,4-dicarboxyphenyl)-2-propyl]phthalic anhydride, 1,4-bis[2-(3,4-dicarboxyphenyl )-2-propyl]phthalic anhydride, bis[3-(3,4-dicarboxyphenoxy)phenyl]methanedianhydride, 2,3,6,7-naphthalenetetracarboxylic dianhydride, 1, 2,5,6-Naphthalene tetracarboxylic dianhydride, 3,4,9,10-perylene tetracarboxylic dianhydride, 2,3,6,7-anthracene tetracarboxylic dianhydride, 1,2,7,8 -Phenanthrene tetracarboxylic dianhydride, 1,2,3,4-butane tetracarboxylic dianhydride, 1,2,3,4-cyclobutane tetracarboxylic dianhydride, cyclopentane tetracarboxylic dianhydride, Cyclohexane-1,2,3,4-tetracarboxylic dianhydride, cyclohexane-1,2,4,5-tetracarboxylic dianhydride, 3,3',4,4'-bicyclohexyl tetra Carboxylic dianhydride, carbonyl-4,4'-bis(cyclohexane-1,2-dicarboxylic acid) dianhydride, methylene-4,4'-bis(cyclohexane-1,2-dicarboxyl Acid) dianhydride, 1,2-ethylidene-4,4'-bis(cyclohexane-1,2-dicarboxylic acid) dianhydride, 1,1-vinylidene-4,4'-bis( (Cyclohexane-1,2-dicarboxylic acid) dianhydride, 2,2-propylene-4,4'-bis(cyclohexane-1,2-dicarboxylic acid) dianhydride, ethylene glycol Trimellitic dianhydride, 1,2-(ethylidene)bis(trimellitic anhydride), 1,3-(trimethylene)bis(trimellitic anhydride), 1,4-(tetramethylene)bis(trimellitic anhydride), 1,5-(pentamethylene)bis(trimellitic anhydride), 1,6-(hexamethylene)bis(trimellitic anhydride), 1,7-(heptamethylene)bis(trimellitic anhydride), 1,8-( Octamethylene)bis(trimellitic anhydride), 1,9-(nonamethylene)bis(trimellitic anhydride), 1,10-(decamethylene)bis(trimellitic anhydride), 1,12-(dodecylmethylene ) Bis (trimellitic anhydride), 1,16-(hexamethylene) bis(trimellitic anhydride), 1,18-(octadecylidene) bis(trimellitic anhydride), etc.

作為三羧酸酐,係可舉出例如苯三甲酸酐及氫化苯三甲酸酐等。 Examples of tricarboxylic anhydrides include trimellitic anhydride and hydrogenated trimellitic anhydride.

作為胺成分雖可使用脂肪族二胺、芳香族二 胺等之二胺及脂肪族聚醚胺等之多元胺,但並不限定於此等胺類。又,此等胺成分亦可單獨或組合使用。 As the amine component, aliphatic diamines and aromatic diamines can be used Diamines such as diamines and polyamines such as aliphatic polyetheramines are not limited to these amines. In addition, these amine components can also be used alone or in combination.

作為二胺,係可舉出例如p-伸苯基二胺(PPD)、1,3-苯二胺、2,4-甲苯二胺、2,5-甲苯二胺、2,6-甲苯二胺等之單苯核二胺,4,4’-二胺基二苯醚、3,3’-二胺基二苯醚、3,4’-二胺基二苯醚等之二胺基二苯醚類,4,4’-二胺基二苯基甲烷、3,3’-二甲基-4,4’-二胺基聯苯、2,2’-二甲基-4,4’-二胺基聯苯、3,3’-二胺基二苯醚、3,4’-二胺基二苯醚、4,4’-二胺基二苯醚、3,3’-二胺基二苯基硫化物、3,4’-二胺基二苯基硫化物等之二苯核二胺,1,3-雙(3-胺基苯基硫化物)苯、1,3-雙(4-胺基苯基硫化物)苯、1,4-雙(4-胺基苯基硫化物)苯等之三苯核二胺,3,3’-雙(3-胺基苯氧基)聯苯、3,3’-雙(4-胺基苯氧基)聯苯、4,4’-雙(3-胺基苯氧基)聯苯、2,2-雙〔3-(3-胺基苯氧基)苯基〕丙烷、2,2-雙〔3-(4-胺基苯氧基)苯基〕丙烷、2,2-雙〔4-(3-胺基苯氧基)苯基〕丙烷、2,2-雙〔4-(4-胺基苯氧基)苯基〕丙烷等之四苯核二胺等之芳香族二胺;1,2-二胺基乙烷、1,3-二胺基丙烷、1,4-二胺基丁烷、1,5-二胺基戊烷、1,6-二胺基已烷等之脂肪族二胺。作為脂肪族聚醚胺係可舉出乙二醇(及/或)丙二醇系之多元胺等。又,亦可使用如同下述之具有羧基的胺類。 Examples of the diamine include p-phenylene diamine (PPD), 1,3-phenylenediamine, 2,4-toluenediamine, 2,5-toluenediamine, and 2,6-toluenediamine. Monophenyl nuclear diamines such as amines, diamino diamines such as 4,4'-diaminodiphenyl ether, 3,3'-diaminodiphenyl ether, 3,4'-diaminodiphenyl ether Phenyl ethers, 4,4'-diaminodiphenylmethane, 3,3'-dimethyl-4,4'-diaminobiphenyl, 2,2'-dimethyl-4,4' -Diaminobiphenyl, 3,3'-diaminodiphenyl ether, 3,4'-diaminodiphenyl ether, 4,4'-diaminodiphenyl ether, 3,3'-diamine Diphenyl nuclear diamine such as diphenyl sulfide, 3,4'-diaminodiphenyl sulfide, 1,3-bis(3-aminophenyl sulfide)benzene, 1,3-bis (4-aminophenyl sulfide) benzene, 1,4-bis (4-aminophenyl sulfide) benzene and other triphenyl nuclear diamine, 3,3'-bis(3-aminophenoxy ) Biphenyl, 3,3'-bis(4-aminophenoxy) biphenyl, 4,4'-bis(3-aminophenoxy) biphenyl, 2,2-bis (3-(3 -Aminophenoxy)phenyl]propane, 2,2-bis[3-(4-aminophenoxy)phenyl]propane, 2,2-bis[4-(3-aminophenoxy ) Phenyl]propane, 2,2-bis[4-(4-aminophenoxy)phenyl]propane and other aromatic diamines such as tetraphenyl nuclear diamine; 1,2-diaminoethane , 1,3-diaminopropane, 1,4-diaminobutane, 1,5-diaminopentane, 1,6-diaminohexane and other aliphatic diamines. Examples of the aliphatic polyetheramines include ethylene glycol (and/or) propylene glycol-based polyamines and the like. In addition, amines having a carboxyl group as described below can also be used.

作為具有羧基之胺,係可舉出3,5-二胺基苯甲酸、2,5-二胺基苯甲酸、3,4-二胺基苯甲酸等之二胺基苯甲酸類、3,5-雙(3-胺基苯氧基)苯甲酸、3,5-雙(4-胺基 苯氧基)苯甲酸等之胺基苯氧基苯甲酸類、3,3’-二胺基-4,4’-二羧基聯苯等之羧基聯苯化合物類、3,3’-二胺基-4,4’-二羧基二苯基甲烷、3,3’-二羧基-4,4’-二胺基二苯基甲烷、2,2-雙〔4-胺基-3-羧基苯基〕丙烷等之羧基二苯基烷烴類、3,3’-二胺基-4,4’-二羧基二苯醚、4,4’-二胺基-3,3’-二羧基二苯醚等之羧基二苯醚化合物、3,3’-二胺基-4,4’-二羧基二苯基碸、4,4’-二胺基-3,3’-二羧基二苯基碸等之二苯基碸化合物等。 Examples of the amine having a carboxyl group include diaminobenzoic acids such as 3,5-diaminobenzoic acid, 2,5-diaminobenzoic acid, and 3,4-diaminobenzoic acid. 5-bis(3-aminophenoxy)benzoic acid, 3,5-bis(4-amino) (Phenoxy) benzoic acid and other amino phenoxy benzoic acids, 3,3'-diamino-4,4'-dicarboxybiphenyl and other carboxy biphenyl compounds, 3,3'-diamine -4,4'-dicarboxydiphenylmethane, 3,3'-dicarboxy-4,4'-diaminodiphenylmethane, 2,2-bis[4-amino-3-carboxybenzene Carboxyldiphenylalkanes such as propane, 3,3'-diamino-4,4'-dicarboxydiphenyl ether, 4,4'-diamino-3,3'-dicarboxydiphenyl Carboxy diphenyl ether compounds such as ethers, 3,3'-diamino-4,4'-dicarboxydiphenyl sulfone, 4,4'-diamino-3,3'-dicarboxydiphenyl ash Such as diphenyl benzene compound and so on.

作為異氰酸酯成分,雖然可使用芳香族二異氰酸酯及其異構物或多聚體,脂肪族二異氰酸酯類、脂環式二異氰酸酯類及其異構物等之二異氰酸酯或其他泛用的二異氰酸酯類,但並不限定於此等異氰酸酯。又,此等異氰酸酯成分亦可單獨或組合使用。 As the isocyanate component, aromatic diisocyanates and their isomers or polymers, diisocyanates such as aliphatic diisocyanates, alicyclic diisocyanates and their isomers, or other general diisocyanates can be used , But not limited to these isocyanates. In addition, these isocyanate components can also be used alone or in combination.

作為二異氰酸酯,係可舉出例如4,4’-二苯基甲烷二異氰酸酯、甲苯二異氰酸酯、萘二異氰酸酯、伸茬基二異氰酸酯、聯苯二異氰酸酯、二苯基碸二異氰酸酯、二苯基醚二異氰酸酯等之芳香族二異氰酸酯及其異構物、多聚體、六亞甲基二異氰酸酯、異佛酮二異氰酸酯、二環己基甲烷二異氰酸酯等之脂肪族二異氰酸酯類,或氫化之芳香族二異氰酸酯的脂環式二異氰酸酯類及異構物,或其他汎用的二異氰酸酯類。 Examples of the diisocyanate include 4,4′-diphenylmethane diisocyanate, toluene diisocyanate, naphthalene diisocyanate, stubble diisocyanate, biphenyl diisocyanate, diphenyl sulfone diisocyanate, and diphenyl Aromatic diisocyanates such as ether diisocyanate and their isomers, polymers, hexamethylene diisocyanate, isophorone diisocyanate, dicyclohexylmethane diisocyanate and other aliphatic diisocyanates, or hydrogenated aromatics Alicyclic diisocyanates and isomers of group diisocyanates, or other commonly used diisocyanates.

如以上說明之具有醯亞胺環或醯亞胺前驅體骨架的鹼溶解性樹脂亦可含有醯胺鍵。其為異氰酸酯與羧酸反應所得之醯胺鍵亦可,或由其他反應所得亦可。再 者,具有由其他加成及縮合而成之鍵結亦可。 As described above, the alkali-soluble resin having an amide imide ring or amide imine precursor skeleton may also contain an amide bond. It may be an amide bond obtained by the reaction of isocyanate and carboxylic acid, or may be obtained by other reactions. again Alternatively, it may have a bond formed by other additions and condensations.

又,關於向該鹼溶解性樹脂之醯亞胺環或醯亞胺前驅體骨架的導入,係使用周知慣用的:具有羧基及酸酐基中任一者或兩者的鹼溶解性聚合物、寡聚物或單體亦可;例如,將此等周知慣用之鹼溶解性樹脂類單獨地或與上述羧酸酐成分組合,並與上述胺/異氰酸酯類反應而得之樹脂亦可。 In addition, as for the introduction of the amide imine ring or the amide imine precursor skeleton of the alkali-soluble resin, a well-known and commonly used alkali-soluble polymer or oligomer having either or both of a carboxyl group and an acid anhydride group is used. Polymers or monomers may also be used; for example, these well-known and commonly used alkali-soluble resins may be used alone or in combination with the above-mentioned carboxylic acid anhydride component and reacted with the above-mentioned amine/isocyanate.

關於此類具有鹼溶解性基與醯亞胺環或醯亞胺前驅體骨架之鹼溶解性樹脂的合成係可使用周知慣用的有機溶劑。作為該有機溶劑只要是不會與原料之羧酸酐類、胺類、異氰酸酯類反應,且可溶解此等原料的溶劑就沒有問題,其構造並無特別限制。其中因為原料之溶解性較高,故以N,N-二甲基甲醯胺、N,N-二甲基乙醯胺、N-甲基-2-吡咯啶酮、二甲基亞碸、γ-丁內酯等之非質子性溶劑為佳。 For the synthesis of such an alkali-soluble resin having an alkali-soluble group and an amide imine ring or amide imine precursor skeleton, a well-known and commonly used organic solvent can be used. As the organic solvent, there is no problem as long as it does not react with carboxylic acid anhydrides, amines, and isocyanates of the raw materials, and can dissolve these raw materials, and its structure is not particularly limited. Among them, because of the high solubility of the raw materials, N,N-dimethylformamide, N,N-dimethylacetamide, N-methyl-2-pyrrolidone, dimethylsulfoxide, Aprotic solvents such as γ-butyrolactone are preferred.

如以上說明之具有羧基或酸酐基等之鹼溶解性基與醯亞胺環或醯亞胺前驅體骨架的鹼溶解性樹脂,為了對應光微影步驟,故其酸價以20~200mgKOH/g為佳,又以60~150mgKOH/g更佳。該酸價在20mgKOH/g以上時,對鹼的溶解性增加,並使顯影性良好,再者由於與光照射後之熱硬化成分的交聯度較高,故可得到充分的顯影對比。又,該酸價在200mgKOH/g以下時,在後述之光照射後之PEB(POST EXPOSURE BAKE)步驟中可抑制所謂的熱霧,且可增加流程餘裕。 As described above, the alkali-soluble resin having an alkali-soluble group such as a carboxyl group or an acid anhydride group and an amide imide ring or amide imide precursor skeleton, in order to correspond to the photolithography step, its acid value is 20 to 200 mgKOH/g Preferably, 60~150mgKOH/g is better. When the acid value is 20 mgKOH/g or more, the solubility in alkalis increases and the developability is good. Furthermore, since the degree of crosslinking with the thermosetting component after light irradiation is high, a sufficient development contrast can be obtained. In addition, when the acid value is 200 mgKOH/g or less, the so-called hot mist can be suppressed in the PEB (POST EXPOSURE BAKE) step after light irradiation described later, and the flow margin can be increased.

又,該鹼溶解性樹脂的分子量在考慮顯影性及硬化塗膜特性後,以質量平均分子量1,000~100,000為佳,又以2,000~50,000更佳。該分子量在1,000以上時,在曝光、PEB後可獲得充分的耐顯影性及硬化物性。又,分子量在100,000以下時其鹼溶解性增加,且顯影性提升。 In addition, after considering the developability and the characteristics of the cured coating film, the molecular weight of the alkali-soluble resin is preferably a mass average molecular weight of 1,000 to 100,000, and more preferably 2,000 to 50,000. When the molecular weight is 1,000 or more, sufficient development resistance and hardening physical properties can be obtained after exposure and PEB. In addition, when the molecular weight is 100,000 or less, the alkali solubility increases and the developability improves.

含有具有醯亞胺環或醯亞胺前驅體骨架之鹼溶解性樹脂的樹脂組成物,在使用光鹼產生劑時,通常鹼溶解性樹脂之外,含有光鹼產生劑及熱反應性化合物;在使用光聚合起始劑時,鹼可溶性樹脂之外,含有光聚合起始劑及具有乙烯性不飽和鍵的化合物。又,作為樹脂成分,亦可併用含羧基之胺甲酸酯樹脂、含羧基之酚醛清漆樹脂等。 A resin composition containing an alkali-soluble resin having an amide imide ring or an amide imide precursor skeleton, when using a photobase generator, usually contains a photobase generator and a heat-reactive compound in addition to the alkali-soluble resin; When a photopolymerization initiator is used, in addition to the alkali-soluble resin, a photopolymerization initiator and a compound having an ethylenically unsaturated bond are contained. In addition, as the resin component, a carboxyl group-containing urethane resin, a carboxyl group-containing novolac resin, and the like may be used in combination.

光鹼產生劑係一種化合物,其透過紫外線及可見光等之光照射而分子構造產生變化,或者藉由分子裂解,生成一種以上之可作為後述之熱反應性化合物的聚合反應觸媒功能的鹼性物質。作為鹼性物質係可舉出例如二級胺、三級胺。 A photobase generator is a compound that changes its molecular structure through the irradiation of light such as ultraviolet light and visible light, or by molecular cleavage, generates more than one type of alkalinity that can serve as a polymerization catalyst function for heat-reactive compounds described below substance. Examples of the basic substance system include secondary amines and tertiary amines.

作為光鹼產生劑,係可舉出例如α-胺基苯乙酮化合物、肟酯化合物、或具有醯氧基亞胺基、N-甲醯基化芳香族胺基、N-醯基化芳香族胺基、硝苄基胺甲酸酯基及烷氧基苄基胺甲酸酯基等之取代基的化合物等,其中又以肟酯化合物、α-胺基苯乙酮化合物為佳。作為α-胺基苯乙酮化合物,特別是以具有2個以上氮原子者為佳。 Examples of the photobase generator include, for example, α-aminoacetophenone compounds, oxime ester compounds, or having an oxyimino group, N-methylated aromatic amine group, and N-acetylated aromatic Compounds having a substituent such as a family amine group, a benzylcarbamate group, an alkoxybenzylcarbamate group, etc., among which oxime ester compounds and α-aminoacetophenone compounds are preferred. The α-aminoacetophenone compound is particularly preferably one having 2 or more nitrogen atoms.

α-胺基苯乙酮化合物係分子中具有安息香醚鍵,在受到光照射後發生分子內部的裂解,生成發揮硬化觸媒作用的鹼性物質(胺)。作為α-胺基苯乙酮化合物的具體實例,可使用(4-嗎啉基苯甲醯基)-1-苄基-1-二甲基胺基丙烷(IRGACURE 369、商品名、BASF JAPAN公司製)、4-(甲基硫基苯甲醯基)-1-甲基-1-嗎啉基乙烷(IRGACURE 907、商品名、BASF JAPAN公司製)或2-(二甲基胺基)-2-〔(4-甲基苯基)甲基〕-1-〔4-(4-嗎啉基)苯基〕-1-丁酮(IRGACURE 379、商品名、BASF JAPAN公司製)等之市售化合物或其溶液。 The α-aminoacetophenone compound-based molecule has a benzoin ether bond, and after being irradiated with light, it cracks inside the molecule to generate an alkaline substance (amine) that functions as a hardening catalyst. As a specific example of the α-aminoacetophenone compound, (4-morpholinobenzoyl)-1-benzyl-1-dimethylaminopropane (IRGACURE 369, trade name, BASF JAPAN Corporation) can be used System), 4-(methylthiobenzyl)-1-methyl-1-morpholinylethane (IRGACURE 907, trade name, manufactured by BASF JAPAN) or 2-(dimethylamino) -2-[(4-methylphenyl)methyl]-1-[4-(4-morpholinyl)phenyl]-1-butanone (IRGACURE 379, trade name, manufactured by BASF JAPAN), etc. Commercially available compounds or their solutions.

作為肟酯化合物,只要是可經由光照射生成鹼性物質的化合物任何皆可使用。作為該肟酯化合物,係可舉出市售品之BASF JAPAN公司製的CGI-325、IRGACURE-OXE01、IRGACURE-OXE02,ADEKA公司製N-1919、NCI-831等。又,日本專利第4344400號公報中所記載的,分子內具有2個肟酯基之化合物亦可適合使用。 As the oxime ester compound, any compound that can generate an alkaline substance by light irradiation can be used. As the oxime ester compound, commercially available products include CGI-325, IRGACURE-OXE01, IRGACURE-OXE02 manufactured by BASF JAPAN, N-1919, NCI-831 manufactured by ADEKA, and the like. In addition, as described in Japanese Patent No. 4344400, a compound having two oxime ester groups in the molecule can also be suitably used.

此種光鹼產生劑,可單獨使用一種,亦可兩種以上組合使用。樹脂組成物中光鹼產生劑的調配量,較佳為相對於100質量份之熱反應性化合物為0.1~40質量份,更佳為0.1~30質量份。在0.1質量份以上時,可得到良好的光照射部/未照射部分之耐顯影性對比。又,在40質量份以下時其硬化物特性提升。 Such photobase generators may be used alone or in combination of two or more. The compounding amount of the photobase generator in the resin composition is preferably 0.1 to 40 parts by mass, more preferably 0.1 to 30 parts by mass relative to 100 parts by mass of the heat-reactive compound. At 0.1 parts by mass or more, a good contrast in development resistance of the light-irradiated portion/non-irradiated portion can be obtained. In addition, when the amount is 40 parts by mass or less, the characteristics of the cured product improve.

熱反應性化合物係具有可因熱產生硬化反應 之官能基的樹脂,可舉出環氧樹脂、多官能氧雜環丁烷化合物等。 Thermally reactive compounds have a hardening reaction due to heat Examples of the functional group resin include epoxy resins and polyfunctional oxetane compounds.

上述之環氧樹脂係具有環氧基之樹脂,可使用任何周知的環氧樹脂。具體而言,可舉出分子中具有二個環氧基之二官能性環氧樹脂,以及分子中具有大量環氧基之多官能環氧樹脂等。此外,亦可是加氫過之二官能環氧化合物。 The above-mentioned epoxy resin is a resin having an epoxy group, and any well-known epoxy resin can be used. Specifically, a bifunctional epoxy resin having two epoxy groups in the molecule, and a multifunctional epoxy resin having a large number of epoxy groups in the molecule can be given. In addition, it may be a hydrogenated bifunctional epoxy compound.

作為上述環氧樹脂,係可舉出雙酚A型環氧樹脂、溴化環氧樹脂、酚醛清漆型環氧樹脂、雙酚F型環氧樹脂、氫化雙酚A型環氧樹脂、環氧丙基胺型環氧樹脂、乙內醯脲型環氧樹脂、脂環式環氧樹脂、三羥基苯基甲烷型環氧樹脂、聯二甲苯酚型或聯苯酚型環氧樹脂或該等混合物;雙酚S型環氧樹脂、雙酚A酚醛清漆型環氧樹脂、四苯酚基乙烷型環氧樹脂、雜環類環氧樹脂、二環氧丙基酞酸酯樹脂、四環氧丙基二甲苯酚乙烷樹脂、含有萘基的環氧樹脂、具有二環戊二烯骨架的環氧樹脂、甲基丙烯酸環氧丙酯共聚系環氧樹脂、環己基馬來醯亞胺及甲基丙烯酸環氧丙酯之共聚環氧樹脂、CTBN改質環氧樹脂等。 Examples of the epoxy resin include bisphenol A epoxy resin, brominated epoxy resin, novolac epoxy resin, bisphenol F epoxy resin, hydrogenated bisphenol A epoxy resin, and epoxy resin. Propylamine type epoxy resin, hydantoin type epoxy resin, alicyclic epoxy resin, trihydroxyphenylmethane type epoxy resin, bixylenol type or biphenol type epoxy resin or mixtures thereof ; Bisphenol S type epoxy resin, bisphenol A novolak type epoxy resin, tetraphenol ethane type epoxy resin, heterocyclic epoxy resin, diglycidyl phthalate resin, tetrapropylene oxide Xylenol ethane resin, epoxy resin containing naphthyl group, epoxy resin with dicyclopentadiene skeleton, epoxy methacrylate copolymer epoxy resin, cyclohexyl maleimide and methyl Copolymer epoxy resin based on glycidyl acrylate, CTBN modified epoxy resin, etc.

此等環氧樹脂係可單獨一種使用,亦可兩種以上併用。 These epoxy resins can be used alone or in combination of two or more.

作為上述熱反應性化合物之調配量,其與鹼溶解性樹脂之當量比(羧基等之鹼溶解性基:環氧基等之熱反應性基)較佳者為1:0.1~1:10。藉由如此配合比的 範圍,可成為使顯影良好且容易形成微細圖型者。上述當量比係以1:0.2~1:5更佳。 As the compounding amount of the heat-reactive compound, the equivalent ratio to the alkali-soluble resin (alkali-soluble group such as carboxyl group: thermally-reactive group such as epoxy group) is preferably 1:0.1 to 1:10. With such a ratio The range can be good for developing and easy to form fine patterns. The above equivalent ratio is preferably 1:0.2~1:5.

作為光聚合起始劑係可使用周知的光聚合起始劑,例如可舉出α-胺基苯乙酮系光聚合起始劑、醯基膦氧化物系光聚合起始劑、安息香化合物、苯乙酮化合物、蔥醌化合物、噻吨酮化合物、縮酮化合物、二苯甲酮化合物、三級胺化合物及氧葱酮化合物等。 As the photopolymerization initiator system, a well-known photopolymerization initiator can be used, and examples thereof include an α-aminoacetophenone-based photopolymerization initiator, an acylphosphine oxide-based photopolymerization initiator, a benzoin compound, Acetophenone compounds, onion quinone compounds, thioxanthone compounds, ketal compounds, benzophenone compounds, tertiary amine compounds, oxyonion compounds, etc.

又,作為具有乙烯性不飽和鍵之化合物係可使用周知的化合物,2-羥基乙基丙烯酸酯、2-羥基丙基丙烯酸酯等之羥基烷基丙烯酸酯類;乙二醇、甲氧基四乙二醇、聚乙二醇、丙二醇等之甘醇之單或二丙烯酸酯類;己二醇、三羥甲基丙烷、季戊四醇、二季戊四醇、三-羥基乙基異三聚氰酸酯等之多元醇或此等之環氧乙烷加成物或環氧丙烷加成物等之多元丙烯酸酯類;苯氧基丙烯酸酯、雙酚A二丙烯酸酯、及此等之酚類的環氧乙烷加成物或環氧丙烷加成物等之丙烯酸酯類等。 In addition, as the compound having an ethylenic unsaturated bond, well-known compounds such as hydroxyalkyl acrylates such as 2-hydroxyethyl acrylate and 2-hydroxypropyl acrylate; ethylene glycol and methoxy tetra Mono- or diacrylates of glycols such as ethylene glycol, polyethylene glycol, and propylene glycol; hexanediol, trimethylolpropane, pentaerythritol, dipentaerythritol, tri-hydroxyethyl isocyanurate, etc. Polyhydric alcohols such as polyhydric alcohols or these ethylene oxide adducts or propylene oxide adducts; phenoxy acrylates, bisphenol A diacrylates, and these phenolic ethylene oxides Acrylates such as alkane adducts or propylene oxide adducts.

(接著層(A)) (Next layer (A))

作為構成接著層(A)之鹼顯影性樹脂組成物,只要是包含下述樹脂之組成物即可,光硬化性樹脂組成物及熱硬化性樹脂組成物均可使用:含有酚性羥基、硫醇基及羧基中一種以上之官能基,且可以鹼溶液顯影之樹脂。較佳者可舉出包含:具有2個以上酚性羥基之化合物、含羧基樹脂、具有酚性羥基及羧基之化合物、具有2個以上硫醇基 之化合物的樹脂組成物,可使用周知慣用之物。 As the alkali-developable resin composition constituting the adhesive layer (A), as long as it is a composition containing the following resins, both photocurable resin compositions and thermosetting resin compositions can be used: containing phenolic hydroxyl groups and sulfur One or more functional groups in alcohol group and carboxyl group, and can be developed by alkaline solution. Preferred examples include compounds containing two or more phenolic hydroxyl groups, carboxyl group-containing resins, compounds having phenolic hydroxyl groups and carboxyl groups, and two or more thiol groups As the resin composition of the compound, well-known and usual ones can be used.

具體而言,可舉出例如以往作為阻焊劑組成物使用之光硬化性熱硬化性樹脂組成物,其包含:含羧基樹脂或含羧基感光性樹脂、具有乙烯性不飽和鍵之化合物、光聚合起始劑、及熱反應性化合物。又,亦可使用包含:含羧基之胺甲酸酯樹脂、具有羧基之樹脂、光鹼產生劑及熱硬化成分的樹脂組成物。該樹脂組成物係以由光鹼產生劑生成的鹼作為觸媒,藉由曝光後的加熱使具有羧基之胺甲酸酯樹脂及熱硬化成分進行加成反應,未曝光部分可藉由以鹼溶液去除進行顯影。 Specifically, for example, a photocurable thermosetting resin composition conventionally used as a solder resist composition includes: a carboxyl group-containing resin or a carboxyl group-containing photosensitive resin, a compound having an ethylenic unsaturated bond, and photopolymerization Starter, and thermally reactive compounds. Moreover, a resin composition containing a carboxyl group-containing urethane resin, a resin having a carboxyl group, a photobase generator, and a thermosetting component can also be used. The resin composition uses an alkali generated by a photobase generator as a catalyst, and the urethane resin having a carboxyl group and a thermosetting component undergo an addition reaction by heating after exposure. The unexposed part can be added by alkali The solution is removed for development.

作為構成了用於接著層(A)之樹脂組成物的各種材料,除了可使用周知慣用之物以外,用於上述保護層(B)者亦同樣地可以使用。 As various materials constituting the resin composition used for the adhesive layer (A), in addition to the well-known conventional ones, those used for the protective layer (B) can be used in the same manner.

關於用於上述接著層(A)及保護層(B)之樹脂組成物,能以提升所得之硬化物的可撓性及指觸乾燥性為目的來調配周知慣用的高分子樹脂。作為此種高分子樹脂,係可舉出纖維素系、聚酯系、苯氧基樹脂系聚合物、聚乙烯縮醛系、聚乙烯丁醛系、聚醯胺系、聚醯胺醯亞胺系黏合劑聚合物、嵌段共聚物、彈性體等。該高分子樹脂可使用單獨一種,亦可併用兩種以上。 Regarding the resin composition used for the adhesive layer (A) and the protective layer (B), a well-known and commonly used polymer resin can be formulated for the purpose of improving the flexibility and dryness of the obtained cured product. Examples of such polymer resins include cellulose-based, polyester-based, phenoxy resin-based polymers, polyvinyl acetal-based, polyvinyl butyral-based, polyamidoamine, and polyamidoamide. Binder polymer, block copolymer, elastomer, etc. The polymer resin may be used alone or in combination of two or more.

又,為了抑制硬化物的硬化收縮並提升密合性、硬度等特性,在接著層(A)及保護層(B)所使用之樹脂組成物中可調配無機填充劑。作為此種無機填充劑可舉出例如硫酸鋇、無定型二氧化矽、熔融二氧化矽、球狀二氧 化矽、滑石、黏土、碳酸鎂、碳酸鈣、氧化鋁、氫氧化鋁、氮化矽、氮化鋁、氮化硼、新堡矽藻土等。 In addition, in order to suppress curing shrinkage of the cured product and improve characteristics such as adhesion and hardness, an inorganic filler may be blended into the resin composition used for the adhesive layer (A) and the protective layer (B). Examples of such inorganic fillers include barium sulfate, amorphous silica, fused silica, and spherical dioxide. Silica, talc, clay, magnesium carbonate, calcium carbonate, alumina, aluminum hydroxide, silicon nitride, aluminum nitride, boron nitride, Newcastle diatomite, etc.

為了樹脂組成物的調製,以及塗佈於基材和載體膜時的黏度調整,在接著層(A)及保護層(B)所使用之樹脂組成物中可使用有機溶劑。作為此種有機溶劑係可舉出酮類、芳香族烴類、甘醇醚類、甘醇醚乙酸酯類、酯類、醇類、脂肪族烴、石油系溶劑等。此種有機溶劑可使用單獨一種,或以兩種以上之混合物使用亦可。 In order to prepare the resin composition and adjust the viscosity when applied to the base material and the carrier film, an organic solvent can be used in the resin composition used for the adhesive layer (A) and the protective layer (B). Examples of such organic solvent systems include ketones, aromatic hydrocarbons, glycol ethers, glycol ether acetates, esters, alcohols, aliphatic hydrocarbons, and petroleum-based solvents. Such organic solvent may be used alone or in a mixture of two or more.

在接著層(A)及保護層(B)所使用之樹脂組成物中,應其所需可再調配著色劑、巰基化合物、密合促進劑、抗氧化劑、紫外線吸收劑等成分,這些可使用在電子材料領域中周知慣用之物。又,可適當地調配微細二氧化矽、水滑石、有機膨土、蒙脫石等周知慣用的增黏劑、聚矽氧系、氟系、高分子系等之消泡劑及均染劑、矽烷耦合劑、防鏽劑等周知慣用的添加劑類。 In the resin composition used for the adhesive layer (A) and the protective layer (B), colorants, mercapto compounds, adhesion promoters, antioxidants, ultraviolet absorbers and other components can be formulated as needed, and these can be used It is well known in the field of electronic materials. In addition, well-known and commonly used thickeners such as fine silica, hydrotalcite, organic bentonite, montmorillonite, defoamers and leveling agents such as polysilicone, fluorine, polymer, etc. Well-known and commonly used additives such as silane coupling agent and rust inhibitor.

本發明之積層構造體中,從對銅電路之追蹤性的觀點來看,接著層(A)以較保護層(B)更厚者為佳。 In the laminated structure of the present invention, from the viewpoint of traceability to the copper circuit, the adhesive layer (A) is preferably thicker than the protective layer (B).

本發明之積層構造體係可使用於可撓性印刷配線板之彎曲部分及非彎曲部分中的至少任一者,理想的是可用於兩者,藉此可讓具備充分對彎折耐久性之可撓性印刷配線板同時改善成本及作業性。具體而言,本發明之積層構造體係可用作可撓性印刷配線板之覆蓋膜、阻焊劑及層間絕緣材料中的至少任一用途。 The laminated structure system of the present invention can be used for at least any one of the curved portion and the non-curved portion of a flexible printed wiring board, and ideally can be used for both, thereby allowing sufficient bending durability The flexible printed wiring board improves both cost and workability. Specifically, the laminated structure system of the present invention can be used as at least any one of a cover film, a solder resist, and an interlayer insulating material of a flexible printed wiring board.

(可撓性印刷配線板的製造方法) (Manufacturing method of flexible printed wiring board)

在本發明中,係在可撓性印刷配線基材上直接或透過乾膜來形成上述積層構造體層,再透過光照射使之圖型化,然後藉由顯影液一次地形成圖型來形成絕緣膜,可獲得可撓性印刷配線板。雖然以往在阻焊劑層單層之彎曲性等特性不佳,若按照本發明製成由接著層(A)與保護層(B)而成之積層構造體,並且保護層與接著層之膜厚的比例及保護層與接著層之顯影速度的比例分別落於前述範圍內,可使鹼顯影性與耐熱性及彎曲性等機械特性良好地兼備。 In the present invention, the above-mentioned build-up structure layer is formed directly or through a dry film on the flexible printed wiring substrate, and then patterned by light irradiation, and then patterned by a developer to form an insulation at a time Film, a flexible printed wiring board can be obtained. Although the characteristics of the single layer of the solder resist layer in the past are not good, if a laminated structure composed of an adhesive layer (A) and a protective layer (B) is formed according to the present invention, and the thickness of the protective layer and the adhesive layer The ratio of the ratio and the development speed of the protective layer and the adhesive layer fall within the aforementioned ranges, respectively, so that the alkali developability, mechanical properties such as heat resistance and flexibility can be satisfactorily combined.

以下,關於由本發明之積層構造體製造本發明之可撓性印刷配線板的方法之一例中,接著層(A)及保護層(B)兩者使用了含有光鹼產生劑及熱反應性化合物之樹脂組成物之情形,基於圖1所示之步驟圖來說明。此外,在使用以往作為阻焊劑組成物所使用的含有含羧基樹脂或含羧基感光性樹脂、具有乙烯性不飽和鍵之化合物、光聚合起始劑、及熱反應性化合物之光硬化性熱硬化性樹脂組成物之情形中,可採取與阻焊劑相同的步驟。 In the following, in one example of the method for manufacturing the flexible printed wiring board of the present invention from the laminated structure of the present invention, both the adhesive layer (A) and the protective layer (B) contain a photobase generator and a heat-reactive compound. The case of the resin composition is explained based on the step diagram shown in FIG. In addition, photocurable thermosetting using a carboxyl group-containing resin or a carboxyl group-containing photosensitive resin, a compound having an ethylenic unsaturated bond, a photopolymerization initiator, and a heat-reactive compound conventionally used as a solder resist composition In the case of a reactive resin composition, the same steps as the solder resist can be taken.

〔積層步驟〕 [Stacking steps]

積層步驟係在基材上形成本發明之積層構造體的步驟。圖1中的積層步驟係顯示在已形成銅電路2之可撓性印刷配線基材1上,形成由接著層3及保護層4而成之積層構造體的狀態,前述接著層3係由鹼顯影型樹脂組成物所構成。 The layering step is a step of forming the layered structure of the present invention on the substrate. The lamination step in FIG. 1 shows the state of forming a laminated structure composed of the adhesive layer 3 and the protective layer 4 on the flexible printed wiring substrate 1 on which the copper circuit 2 has been formed. The adhesive layer 3 is made of alkali The development type resin composition.

此處構成積層構造體之各層,例如,可藉由將構成接著層3及保護層4之樹脂組成物依序塗佈、乾燥於基材上,以直接形成接著層3及保護層4的方法;或者將構成接著層3及保護層4之樹脂組成物各自以乾膜的型態依序層合於基材上的方法來形成。又,亦可藉由已成為二層構造之乾膜形態的積層構造體層合於基材上的方法來形成。此種情形下使積層構造體的至少單面以薄膜支撐或保護。作為使用的薄膜係可使用能夠從積層構造體剝離的塑膠薄膜。關於薄膜的厚度雖無特別限制,但一般而言在10~150μm的範圍適當地選擇。從塗膜強度的觀點來看,各層間之介面亦可是融合的。 Here, the layers constituting the laminated structure can be formed, for example, by directly coating and drying the resin composition constituting the adhesive layer 3 and the protective layer 4 on the substrate to form the adhesive layer 3 and the protective layer 4 directly Or, the resin composition constituting the adhesive layer 3 and the protective layer 4 are each formed by sequentially laminating on the substrate in the form of a dry film. Alternatively, it may be formed by a method of laminating a laminated structure having a two-layer structure in the form of a dry film on a substrate. In this case, at least one side of the laminated structure is supported or protected by a thin film. As the used film system, a plastic film that can be peeled off from the laminated structure can be used. Although the thickness of the film is not particularly limited, it is generally appropriately selected in the range of 10 to 150 μm. From the viewpoint of the strength of the coating film, the interfaces between the layers can also be fused.

樹脂組成物對基材之塗佈方法係以刮刀塗佈機、唇式塗佈機、逗點式塗佈機、薄膜塗佈機等周知的方法即可。又,乾燥方法係使用熱風循環式乾燥爐、IR爐、加熱板、對流烘箱等具備以蒸氣為加熱方式之熱源者,並使其逆流接觸乾燥機內之熱風的方法,以及用噴嘴噴射支撐體的方法等周知的方法即可。 The coating method of the resin composition to the base material may be a well-known method such as a blade coater, a lip coater, a comma coater, and a film coater. In addition, the drying method is a method using a hot air circulation type drying furnace, an IR furnace, a heating plate, a convection oven, etc., having a heat source using steam as a heating method, and making it contact the hot air in the dryer countercurrent, and spraying the support with a nozzle Known methods.

此處,基材係已預先形成電路之可撓性印刷配線基材。又,為了獲得預期效果以外的其他效果,在接著層3及保護層4之間亦可設置附加層。 Here, the base material is a flexible printed wiring base material in which circuits have been previously formed. In addition, in order to obtain effects other than the expected effects, an additional layer may be provided between the adhesive layer 3 and the protective layer 4.

〔光照射步驟〕 [Light irradiation steps]

光照射步驟係對負型之圖型形狀以光照射讓樹脂組成物中所含之光鹼產生劑活性化,使光照射部硬化的步驟。 在此光照射步驟中,藉由在保護層4上配置遮罩5,並對負型之圖型形狀進行光照射,使樹脂組成物所含之光鹼產生劑活性化,使光照射部硬化。 The light irradiation step is a step of activating the photobase generator contained in the resin composition by irradiating the negative pattern shape with light to harden the light irradiation portion. In this light irradiation step, by disposing the mask 5 on the protective layer 4 and irradiating the negative pattern shape with light, the photobase generator contained in the resin composition is activated to harden the light irradiation portion .

在此步驟中,由於在光照射部生成之鹼而使得光鹼產生劑不安定化,並產生來自光鹼產生劑之鹼性物質(以下有時簡稱為「鹼」)。此產生之鹼會讓光鹼產生劑不安定化,進而鹼再產生。藉由以此方式生成鹼並化學性增殖至各層深處,被認為是可充分地硬化至各層深處。在其後之熱硬化時,由於此鹼在用作鹼顯影性樹脂與熱反應性化合物之加成反應觸媒的同時,亦進行加成反應,故在光照射部中的各層均充分地熱硬化至深層。由於此情況之樹脂組成物的硬化係例如藉由熱反應之環氧的開環反應,相較於以光反應進行的情形更能抑制應變或硬化收縮。 In this step, the photobase generator is unstable due to the base generated in the light irradiation section, and an alkaline substance derived from the photobase generator (hereinafter sometimes simply referred to as "base") is generated. The generated base will make the photobase generator unstable, and then the base will be regenerated. By generating alkali in this way and chemically propagating deep into each layer, it is considered to be sufficiently hardened to the depth of each layer. In the subsequent thermal hardening, since this base is used as an addition reaction catalyst for the alkali-developable resin and the heat-reactive compound, it also undergoes an addition reaction, so each layer in the light irradiation section is sufficiently thermally hardened Deep. Since the hardening of the resin composition in this case is, for example, the ring-opening reaction of the epoxy by thermal reaction, the strain or hardening shrinkage can be suppressed more than in the case of the photo reaction.

作為在光照射中使用的光照射機,係可使用直接描繪裝置(例如,藉由來自電腦之CAD資料,直接以雷射描繪圖像的雷射直接成像裝置)、搭載了金屬鹵素燈之光照射機、搭載了(超)高壓水銀燈之光照射機、搭載了水銀短弧燈之光照射機、或使用了(超)高壓水銀燈等之紫外線燈的直接描繪裝置。圖型形狀之光照射用遮罩係負型遮罩。 As a light irradiator used in light irradiation, a direct drawing device (for example, a laser direct imaging device that directly draws an image with a laser using CAD data from a computer), light equipped with a metal halogen lamp Direct drawing device for irradiation machine, light irradiation machine equipped with (ultra) high-pressure mercury lamp, light irradiation machine equipped with mercury short-arc lamp, or ultraviolet lamp using (ultra) high pressure mercury lamp. The pattern-shaped light irradiation mask is a negative mask.

作為活性能量射線係使用最大波長在350~410nm範圍內的雷射光或散射光為佳。藉由讓最大波長落於此範圍中,可效率良好地使光鹼產生劑活性化。只要是使用此範圍的雷射光,雷射的種類不論是氣體雷射或固 體雷射均可。又,雖然其光照射量係依膜厚等而異,但一般為100~1500mJ/cm2,較佳為300~1500mJ/cm2的範圍內。 As the active energy ray system, it is preferable to use laser light or scattered light with a maximum wavelength in the range of 350 to 410 nm. By allowing the maximum wavelength to fall within this range, the photobase generator can be efficiently activated. As long as the laser light in this range is used, the type of laser can be either a gas laser or a solid laser. In addition, although the amount of light irradiation varies depending on the film thickness and the like, it is generally 100 to 1500 mJ/cm 2 , preferably 300 to 1500 mJ/cm 2 .

〔加熱步驟〕 [Heating step]

加熱步驟係指透過加熱讓光照射部硬化,並可藉由在光照射步驟中所產生之鹼使硬化直至深處。該加熱步驟係藉由在光照射步驟後加熱接著層3及保護層4,使光照射部硬化之步驟,係稱為所謂「PEB(POST EXPOSURE BAKE)步驟」的步驟。據此,藉由光照射步驟中產生之鹼使各層充分地硬化至深處,可得到硬化特性優異的圖型層。 The heating step refers to hardening the light irradiated part by heating, and can be hardened to the depth by the alkali generated in the light irradiation step. This heating step is a step called the "PEB (POST EXPOSURE BAKE) step" by heating the adhesive layer 3 and the protective layer 4 after the light irradiation step to harden the light irradiation part. According to this, each layer is sufficiently hardened to the depth by the alkali generated in the light irradiation step, and a patterned layer excellent in hardening characteristics can be obtained.

例如,加熱步驟係以低於未受照射之樹脂組成物的發熱開始溫度或發熱峰值溫度,且高於已受光照射之樹脂組成物的發熱開始溫度或發熱峰值溫度的溫度來加熱為佳。藉由如此加熱可選擇性地僅硬化光照射部。 For example, the heating step is preferably performed at a temperature lower than the heat generation start temperature or heat generation peak temperature of the unirradiated resin composition and higher than the heat generation start temperature or heat generation peak temperature of the resin composition that has been irradiated with light. By such heating, only the light irradiation part can be selectively hardened.

此時之加熱溫度係以樹脂組成物中的光照射部熱硬化,但未照射部分不熱硬化的溫度為佳。加熱溫度係例如80~140℃,藉由加熱溫度定為80℃以上,可使光照射部充分地硬化。另一方面,藉由加熱溫度定為140℃以下,可選擇性地僅硬化光照射部。加熱時間係例如10~100分鐘。加熱方法與上述乾燥方法相同。再者,由於未照射部分中沒有從光鹼產生劑產生鹼,故熱硬化被抑制。 The heating temperature at this time is preferably a temperature at which the light-irradiated portion in the resin composition is thermally cured, but the unirradiated portion is not thermally cured. The heating temperature is, for example, 80 to 140°C. By setting the heating temperature to 80°C or higher, the light irradiation portion can be sufficiently hardened. On the other hand, by setting the heating temperature to 140° C. or lower, only the light irradiated portion can be selectively cured. The heating time is, for example, 10 to 100 minutes. The heating method is the same as the drying method described above. In addition, since no alkali is generated from the photobase generator in the unirradiated portion, thermal hardening is suppressed.

〔顯影步驟〕 〔Development steps〕

顯影步驟係藉由鹼顯影去除未照射部分,以形成負型之圖型層者。圖1中的顯影步驟,係顯示藉由以鹼性水溶液使接著層3及保護層4顯影,去除未照射部分並形成負型之圖型層的步驟。作為顯影方法係可使用浸漬法、沐浴法、噴霧法、刷塗法等周知的方法。又,作為顯影液係可使用氫氧化鉀、氫氧化鈉、碳酸鈉、碳酸鉀、磷酸鈉、矽酸鈉、氨、乙醇胺等之胺類、氫氧化四甲基銨水溶液(TMAH)等之鹼水溶液或此等之混合液。 In the development step, the non-irradiated portion is removed by alkali development to form a negative pattern layer. The development step in FIG. 1 shows the step of developing the adhesion layer 3 and the protective layer 4 with an alkaline aqueous solution to remove unirradiated portions and form a negative pattern layer. As the development method, well-known methods such as a dipping method, a shower method, a spray method, and a brush coating method can be used. In addition, as the developer, amines such as potassium hydroxide, sodium hydroxide, sodium carbonate, potassium carbonate, sodium phosphate, sodium silicate, ammonia, ethanolamine, and tetramethylammonium hydroxide aqueous solution (TMAH) can be used. An aqueous solution or a mixture of these.

〔第二光照射步驟〕 [Second light irradiation step]

在顯影步驟之後,係以包含第二光照射步驟為佳。此第二光照射步驟係為了使光照射步驟之圖型層內尚未活性化之殘留光鹼產生劑產生活性化並使鹼產生,應其所需而照射紫外線的步驟。第二光照射步驟中的紫外線波長及光照射量(曝光量)可與上述光照射步驟相同,亦可相異。光照射量(曝光量)係例如150~2000mJ/cm2After the development step, it is preferable to include the second light irradiation step. This second light irradiation step is a step of irradiating ultraviolet rays as needed to activate the residual photobase generator that has not been activated in the pattern layer of the light irradiation step and generate alkali. The ultraviolet wavelength and light irradiation amount (exposure amount) in the second light irradiation step may be the same as or different from the light irradiation step described above. The light irradiation amount (exposure amount) is, for example, 150 to 2000 mJ/cm 2 .

〔熱硬化步驟〕 [Thermosetting step]

在顯影步驟之後,係以再包含熱硬化(後硬化)之熱硬化步驟為佳。此熱硬化步驟係為了使圖型層充分地熱硬化,而應其所需進行熱硬化(後硬化)的步驟。在顯影步驟後第二光照射步驟及熱硬化步驟皆進行的情形中,熱硬化步驟係於第二光照射步驟之後進行為佳。 After the development step, it is preferable to further include a thermal curing step (post-curing). This thermal hardening step is a step of performing thermal hardening (post-hardening) as necessary in order to sufficiently thermally harden the pattern layer. In the case where both the second light irradiation step and the heat curing step are performed after the development step, the heat curing step is preferably performed after the second light irradiation step.

此熱硬化步驟,係藉由因光照射步驟或者光照射步驟及第二光照射步驟而由光鹼產生劑產生之鹼來使圖型層充分地熱硬化。熱硬化步驟的時間點由於未照射部分已經去除,故熱硬化步驟可用未照射之樹脂組成物的硬化反應開始溫度以上的溫度進行,藉此可使圖型層充分地熱硬化。加熱溫度係例如150℃以上。 In this thermal hardening step, the pattern layer is sufficiently thermally hardened by the base generated by the photobase generator due to the light irradiation step or the light irradiation step and the second light irradiation step. Since the non-irradiated portion has been removed at the time of the thermal curing step, the thermal curing step can be performed at a temperature above the curing reaction start temperature of the unirradiated resin composition, whereby the patterned layer can be sufficiently thermally cured. The heating temperature is, for example, 150°C or higher.

實施例 Examples

以下使用實施例更詳細地說明本發明。 The present invention is explained in more detail below using examples.

(合成例1) (Synthesis Example 1)

<具有醯亞胺環之鹼溶解性樹脂的合成> <Synthesis of alkali-soluble resin with amide imine ring>

在安裝了攪拌機、氮導入管、分餾環及冷卻環之可分離式三口燒瓶中,添加3,5-二胺基苯甲酸12.5g、2,2’-雙〔4-(4-胺基苯氧基)苯基〕丙烷8.2g、NMP 30g、γ-丁內酯30g、4,4’-氧基二酞酸酐27.9g、苯三甲酸酐3.8g,並在氮氣環境下以室溫、100rpm攪拌4小時。接著添加甲苯20g,並以矽浴溫度180℃、150rpm餾去甲苯及水並同時攪拌4小時,得到含醯亞胺環之鹼溶解性樹脂溶液。其後,以使固形分成為30質量%之方式添加γ-丁內酯。所得樹脂溶液係固形分酸價86mgKOH/g、Mw10000。 In a separable three-necked flask equipped with a stirrer, nitrogen introduction tube, fractionation ring and cooling ring, add 3,5-diaminobenzoic acid 12.5g, 2,2'-bis[4-(4-aminobenzene Oxy)phenyl]propane 8.2g, NMP 30g, γ-butyrolactone 30g, 4,4'-oxydiphthalic anhydride 27.9g, trimellitic anhydride 3.8g, and stirred at room temperature and 100rpm under a nitrogen atmosphere 4 hours. Next, 20 g of toluene was added, and toluene and water were distilled off at a silicon bath temperature of 180° C. and 150 rpm while stirring for 4 hours to obtain an alkali-soluble resin solution containing an imidate ring. Thereafter, γ-butyrolactone was added so that the solid content became 30% by mass. The resulting resin solution had a solid content acid value of 86 mgKOH/g and Mw10000.

(合成例2) (Synthesis Example 2)

<含羧基之胺甲酸酯樹脂的合成> <Synthesis of urethane resin containing carboxyl group>

在具備攪拌裝置、溫度計及冷凝器之反應容器中放入由1,5-戊二醇及1,6-已二醇所衍生之聚碳酸酯二醇(旭化成化學(股)製、T5650J、數平均分子量800)2400g(3莫耳)、二羥甲基丙酸603g(4.5莫耳),以及作為單羥基化合物之2-羥基乙基丙烯酸酯238g(2.6莫耳)。接著放入作為聚異氰酸酯之異佛酮二異氰酸酯1887g(8.5莫耳),攪拌並同時加熱至60℃後停止,然後在反應容器內溫度開始下降之時再度加熱,並以80℃持續攪拌,再以紅外線吸收譜確認異氰酸酯基之吸收譜(2280cm-1)已消失後結束反應。其後以使固形分成為50質量%之方式添加卡必醇乙酸酯,所得之含羧基之胺甲酸酯樹脂之固形分酸價為50mg KOH/g。 A polycarbonate diol derived from 1,5-pentanediol and 1,6-hexanediol (Asahi Kasei Chemicals Co., Ltd. product, T5650J, number The average molecular weight is 800) 2400 g (3 mol), dimethylol propionic acid 603 g (4.5 mol), and 238 g (2.6 mol) of 2-hydroxyethyl acrylate as a monohydroxy compound. Then put in 1887g (8.5 moles) of isophorone diisocyanate as polyisocyanate, stir and heat to 60°C, then stop, then reheat when the temperature in the reaction vessel begins to drop, and continue stirring at 80°C, then After confirming the absorption spectrum (2280 cm -1 ) of the isocyanate group by infrared absorption spectrum, the reaction was terminated. Thereafter, carbitol acetate was added so that the solid content became 50% by mass, and the solid content acid value of the resulting carboxyl group-containing urethane resin was 50 mg KOH/g.

<構成各層之樹脂組成物的調製> <Preparation of resin composition constituting each layer>

遵從下述表1及表2中記載之調配法,分別調配實施例及比較例中所記載的材料,並以攪拌機預先混合後,再以三輥輾磨機捏合,調製出構成接著層及保護層之樹脂組成物。表中之值只要無特別說明,即為質量份。 The materials described in the examples and comparative examples were prepared according to the blending methods described in Tables 1 and 2 below, and mixed in advance with a blender, and then kneaded with a three-roll mill to prepare the adhesive layer and protection. The resin composition of the layer. Unless otherwise specified, the values in the table are parts by mass.

<接著層(A)之形成> <Formation of Adhesive Layer (A)>

準備已形成銅厚18μm之電路的可撓性印刷配線基材,並使用MEC公司製的CB-801Y進行前處理。其後在已進行前處理之可撓性印刷配線基材上,以使乾燥後之膜厚成為下述表1及表2所示的膜厚之方式塗佈各接著層用 之樹脂組成物。其後用熱風循環式乾燥爐以80℃/30分鐘進行乾燥,形成由樹脂組成物而成之接著層(A)。另外,關於比較例1並未形成接著層。 Prepare a flexible printed wiring substrate on which a circuit with a copper thickness of 18 μm has been formed, and use CB-801Y manufactured by MEC Corporation for pretreatment. After that, on the flexible printed wiring substrate that has been pre-treated, each adhesive layer is applied so that the film thickness after drying becomes the film thickness shown in Tables 1 and 2 below The resin composition. Thereafter, it was dried at 80°C/30 minutes in a hot-air circulation type drying furnace to form an adhesive layer (A) made of a resin composition. In addition, in Comparative Example 1, no adhesive layer was formed.

<保護層(B)之形成> <Formation of protective layer (B)>

在上述接著層(A)上,以使乾燥後之膜厚成為下述表1及表2所示的膜厚之方式塗佈各保護層用之樹脂組成物。其後用熱風循環式乾燥爐以80℃/30分鐘進行乾燥,形成由樹脂組成物而成之保護層(B)。 On the adhesive layer (A), the resin composition for each protective layer was applied so that the film thickness after drying became the film thickness shown in Table 1 and Table 2 below. Thereafter, it was dried at 80°C/30 minutes in a hot-air circulation type drying furnace to form a protective layer (B) made of a resin composition.

接著層(A)及保護層(B)的合計膜厚全為20μm。 The total film thickness of the next layer (A) and the protective layer (B) is all 20 μm.

<膜厚之測定> <Measurement of film thickness>

膜厚係使用三豐公司製測微計MDC-25MX進行測定。 The film thickness was measured using a micrometer MDC-25MX manufactured by Mitutoyo Corporation.

<顯影速度之測定> <Measurement of development speed>

在已形成銅厚18μm之電路的可撓性印刷配線基材上塗佈各樹脂組成物,並用熱風循環式乾燥爐以80℃/30分鐘進行乾燥。其後將基材浸漬於30℃‧1質量%之碳酸鈉水溶液中,測定到塗膜溶解為止的時間。到塗膜溶解為止的時間定為顯影時間〔秒〕、膜厚定為膜厚〔μm〕時,顯影速度以下述式表示。 Each resin composition was coated on the flexible printed wiring substrate on which a circuit with a copper thickness of 18 μm had been formed, and dried at 80° C./30 minutes in a hot-air circulation type drying furnace. After that, the substrate was immersed in a 30°C‧1% by mass sodium carbonate aqueous solution, and the time until the coating film was dissolved was measured. When the time until the coating film is dissolved is defined as the development time [sec] and the film thickness is defined as the film thickness [μm], the development speed is expressed by the following formula.

顯影速度〔μm/秒〕=膜厚〔μm〕/顯影時間〔秒〕。 Development speed [μm/sec] = film thickness [μm]/development time [sec].

<鹼顯影性、焊料耐熱性及鍍金耐性> <Alkali developability, solder heat resistance and gold plating resistance>

對於具備以上述所得之積層構造體的基材,藉由ORC公司製的HMW 680GW(金屬鹵化物燈、散射光)以曝光量500mJ/cm2對負型之圖型形狀進行光照射。接著進行以90℃加熱處理60分鐘。其後,將基材浸漬在30℃‧1質量%之碳酸鈉水溶液中進行顯影3分鐘,評估可否進行鹼顯影性。評估係以目視進行,且用以下的基準來評估。 With respect to the base material provided with the laminated structure obtained as described above, a negative pattern shape was irradiated with an exposure amount of 500 mJ/cm 2 by HMW 680GW (metal halide lamp, scattered light) manufactured by ORC Corporation. Next, heat treatment at 90°C was performed for 60 minutes. Thereafter, the base material was immersed in a 30°C‧1% by mass sodium carbonate aqueous solution for development for 3 minutes to evaluate whether alkali developability was possible. The evaluation is carried out visually and is evaluated using the following criteria.

○:可無殘渣顯影 ○: No residue can be developed

×:有顯影殘渣 ×: Development residue

接著,使用熱風循環式乾燥爐進行150℃/60分鐘熱處理,得到圖型形狀之硬化塗膜。對於所得之硬化塗膜,在此評估基材上塗佈松香系助焊劑,並在預先設定260℃的焊料槽內浸漬20秒(10秒×2次),再以異丙醇洗淨助焊劑之後,用玻璃紙黏膠帶進行剝離試驗,並針對膨脹、剝離、變色等用以下基準進行評估。 Next, a hot air circulation type drying furnace was used to perform heat treatment at 150°C/60 minutes to obtain a pattern-shaped cured coating film. For the obtained cured coating film, apply a rosin-based flux on the evaluation substrate, and immerse it in a solder bath set at 260°C for 20 seconds (10 seconds × 2 times), and then wash the flux with isopropyl alcohol After that, a peel test was performed with cellophane adhesive tape, and the following criteria were evaluated for swelling, peeling, discoloration, etc.

○:完全未發現變化者 ○: No change found at all

×:發生膨脹、剝離者 ×: Those who swell or peel off

又,對於所得之硬化塗膜使用市售品之無電解鎳鍍鍍敷浴及無電解金鍍敷浴,以80~90℃、鎳5μm、金0.05μm的條件進行鍍敷。對於鍍敷過的評估基材以目視評估有無鍍敷滲透。 In addition, for the obtained cured coating film, a commercially available electroless nickel plating plating bath and electroless gold plating bath were used, and plating was performed under the conditions of 80 to 90° C., nickel 5 μm, and gold 0.05 μm. The plated evaluation substrate was visually evaluated for plating penetration.

○:無滲透者 ○: No infiltrator

×:基材與塗膜之間確認到有滲透者 ×: Infiltration is confirmed between the substrate and the coating film

所得之結果表示於下述之表1及表2中。 The results obtained are shown in Tables 1 and 2 below.

Figure 104133692-A0202-12-0027-1
※5:二環戊二烯型環氧樹脂(DIC(股)製)※6:雙酚A型環氧樹脂(分子量400)(三菱化學(股)製)※7:肟型光鹼產生劑(BASF JAPAN公司製)※8:2-(二甲基胺基)-2-〔(4-甲基苯基)甲基〕-1-〔4-(4-嗎啉基)苯基〕-1-丁酮(BASF JAPAN公司製)※9:雙酚F型酸改質環氧丙烯酸酯(日本化藥(股)製)※10:硫酸鋇(堺化學(股)製)
Figure 104133692-A0202-12-0027-1
※5: Dicyclopentadiene-type epoxy resin (DIC (product)) ※6: Bisphenol A-type epoxy resin (molecular weight 400) (Mitsubishi Chemical (product)) ※7: Oxime-type photobase generator (Manufactured by BASF JAPAN) ※8: 2-(dimethylamino)-2-[(4-methylphenyl)methyl]-1-[4-(4-morpholinyl)phenyl]- 1-Butanone (manufactured by BASF JAPAN) ※9: Bisphenol F-type acid-modified epoxy acrylate (manufactured by Nippon Kayaku Co., Ltd.) ※10: barium sulfate (manufactured by Sakai Chemical Co., Ltd.)

Figure 104133692-A0202-12-0029-2
Figure 104133692-A0202-12-0029-2

從上述表1及表2所示之評估結果可明白,確認了實施例之可撓性印刷配線板顯示出良好的顯影性及耐熱性。相對於此,瞭解因為比較例1僅由具有醯亞胺環之樹脂組成物的保護層所構成,故雖其耐熱性良好,但顯影性不佳,使用一般的碳酸鈉顯影是不可能的。又,在比較例2中由於接著層薄,且接著層與保護層之膜厚的比例 脫離本發明之範圍,故雖其耐熱性良好,但結果還是顯影性變差。再者,在比較例3中由於接著層與保護層之膜厚的比例依然脫離本發明之範圍,故雖其顯影性良好,但結果耐熱性變差。在比較例4中,關於膜厚的比例雖然位於本發明之範圍內,但由於接著層與保護層的顯影速度相同,兩者之顯影速度的比例超出本發明之範圍,故結果還是顯影性變差。在比較例5中由於顯影速度的比例脫離本發明之範圍,故雖其顯影性良好,但結果耐熱性變差。 As is clear from the evaluation results shown in Tables 1 and 2 above, it was confirmed that the flexible printed wiring boards of Examples showed good developability and heat resistance. On the other hand, it is understood that Comparative Example 1 is composed only of the protective layer of the resin composition having an amide imide ring, so although its heat resistance is good, the developability is not good, and development using general sodium carbonate is impossible. Also, in Comparative Example 2, since the adhesive layer is thin, and the ratio of the thickness of the adhesive layer to the protective layer Deviating from the scope of the present invention, although its heat resistance is good, the result is that the developability is deteriorated. Furthermore, in Comparative Example 3, since the ratio of the thickness of the adhesive layer to the protective layer is still out of the scope of the present invention, although the developability is good, the heat resistance is deteriorated as a result. In Comparative Example 4, although the ratio of the film thickness is within the scope of the present invention, since the development speed of the adhesive layer and the protective layer are the same, the ratio of the development speed of the two exceeds the scope of the present invention, so the result is that the developability changes difference. In Comparative Example 5, since the ratio of the development speed deviates from the scope of the present invention, although the development property is good, the heat resistance is deteriorated as a result.

1‧‧‧可撓性印刷配線基材 1‧‧‧ Flexible printed wiring substrate

2‧‧‧銅電路 2‧‧‧Copper circuit

3‧‧‧接著層 3‧‧‧Next layer

4‧‧‧保護層 4‧‧‧Protection layer

5‧‧‧遮罩 5‧‧‧Mask

Claims (6)

一種積層構造體,其特徵為具有由鹼顯影性樹脂組成物而成之接著層(A)與在該接著層(A)上所形成之由包含具有醯亞胺環或醯亞胺前驅體骨架的鹼溶解性樹脂的感光性樹脂組成物而成之保護層(B),前述接著層(A)與前述保護層(B)之膜厚的比例為A/B=0.5~50,前述接著層(A)之顯影速度(a)與前述保護層(B)之顯影速度(b)的比例為a/b=1.1~100。 A laminated structure characterized by having an adhesive layer (A) made of an alkali-developable resin composition and a precursor skeleton formed on the adhesive layer (A) containing an imide ring or an imide precursor The protective layer (B) of the photosensitive resin composition of the alkali-soluble resin, the ratio of the thickness of the adhesive layer (A) to the protective layer (B) is A/B=0.5~50, the adhesive layer The ratio of the development speed (a) of (A) to the development speed (b) of the aforementioned protective layer (B) is a/b=1.1~100. 如請求項1之積層構造體,其中前述接著層(A)與前述保護層(B)皆可藉由光照射而圖型化。 The laminated structure according to claim 1, wherein both the adhesive layer (A) and the protective layer (B) can be patterned by light irradiation. 如請求項1之積層構造體,其係用於可撓性印刷配線板之彎曲部及非彎曲部之中至少任一者。 The laminated structure according to claim 1, which is used for at least any one of the curved portion and the non-curved portion of the flexible printed wiring board. 如請求項1之積層構造體,其係用於可撓性印刷配線板之覆蓋層、阻焊劑及層間絕緣材料之中至少任一種的用途。 The laminated structure according to claim 1, which is used for at least any one of the covering layer, the solder resist, and the interlayer insulating material of the flexible printed wiring board. 一種乾膜,其特徵為如請求項1~4中任一項之積層構造體之至少單面以薄膜支撐或保護而成。 A dry film characterized in that at least one side of the laminated structure according to any one of claims 1 to 4 is supported or protected by a film. 一種可撓性印刷配線板,其特徵為具備由下述而成之絕緣膜:於可撓性印刷配線基板上直接形成如請求項1~4中任一項之積層構造體之層、或以如請求項5之乾膜形成積層構造體之層後,藉由光照射進行圖型化,再以顯影液使圖型一次地形成而成之絕緣膜。 A flexible printed wiring board is characterized by having an insulating film formed by directly forming a layered structure of any one of claims 1 to 4 on the flexible printed wiring board, or After the dry film of claim 5 is formed into a layered structure, the pattern is patterned by light irradiation, and then the pattern is formed once with a developer to form the pattern.
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