TWI681172B - 靜電編碼器 - Google Patents

靜電編碼器 Download PDF

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Publication number
TWI681172B
TWI681172B TW104142073A TW104142073A TWI681172B TW I681172 B TWI681172 B TW I681172B TW 104142073 A TW104142073 A TW 104142073A TW 104142073 A TW104142073 A TW 104142073A TW I681172 B TWI681172 B TW I681172B
Authority
TW
Taiwan
Prior art keywords
electrode
detection
electrodes
transmission
relay
Prior art date
Application number
TW104142073A
Other languages
English (en)
Chinese (zh)
Other versions
TW201632838A (zh
Inventor
近藤大生
Original Assignee
日商東方馬達股份有限公司
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Filing date
Publication date
Application filed by 日商東方馬達股份有限公司 filed Critical 日商東方馬達股份有限公司
Publication of TW201632838A publication Critical patent/TW201632838A/zh
Application granted granted Critical
Publication of TWI681172B publication Critical patent/TWI681172B/zh

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
    • G01D5/2412—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap
    • G01D5/2415—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap adapted for encoders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/245—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using a variable number of pulses in a train
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R21/00—Arrangements for measuring electric power or power factor
    • G01R21/10—Arrangements for measuring electric power or power factor by using square-law characteristics of circuit elements, e.g. diodes, to measure power absorbed by loads of known impedance
    • G01R21/12—Arrangements for measuring electric power or power factor by using square-law characteristics of circuit elements, e.g. diodes, to measure power absorbed by loads of known impedance in circuits having distributed constants
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G01R27/14—Measuring resistance by measuring current or voltage obtained from a reference source
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G01R27/26—Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
    • G01R27/2605—Measuring capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/2648—Characterising semiconductor materials
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R35/00—Testing or calibrating of apparatus covered by the other groups of this subclass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R3/00—Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2832—Specific tests of electronic circuits not provided for elsewhere
    • G01R31/2836—Fault-finding or characterising
    • G01R31/2837—Characterising or performance testing, e.g. of frequency response

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
TW104142073A 2014-12-17 2015-12-15 靜電編碼器 TWI681172B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2014255350A JP6156747B2 (ja) 2014-12-17 2014-12-17 静電エンコーダ
JP2014-255350 2014-12-17

Publications (2)

Publication Number Publication Date
TW201632838A TW201632838A (zh) 2016-09-16
TWI681172B true TWI681172B (zh) 2020-01-01

Family

ID=56126506

Family Applications (2)

Application Number Title Priority Date Filing Date
TW104142073A TWI681172B (zh) 2014-12-17 2015-12-15 靜電編碼器
TW108130267A TWI699515B (zh) 2014-12-17 2015-12-15 靜電編碼器

Family Applications After (1)

Application Number Title Priority Date Filing Date
TW108130267A TWI699515B (zh) 2014-12-17 2015-12-15 靜電編碼器

Country Status (7)

Country Link
US (1) US10551219B2 (enExample)
EP (2) EP3486614B1 (enExample)
JP (1) JP6156747B2 (enExample)
KR (1) KR101957957B1 (enExample)
CN (1) CN107003154B (enExample)
TW (2) TWI681172B (enExample)
WO (1) WO2016098613A1 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102017126271A1 (de) * 2017-11-09 2019-05-09 Webasto SE Positionierung von Motoren mittels kapazitiver Messung
JP2021055997A (ja) * 2017-12-13 2021-04-08 株式会社村田製作所 回転型エンコーダ
CN109211092B (zh) * 2017-12-15 2019-06-21 重庆理工大学 一种基于交变电场的绝对式时栅角位移传感器
CN108253882A (zh) * 2018-04-10 2018-07-06 中国工程物理研究院电子工程研究所 一种微马达的角度测量装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2133889A (en) * 1983-01-19 1984-08-01 Lucas Ind Plc Capacitance displacement transducers
EP0435429A1 (en) * 1989-10-10 1991-07-03 Mitutoyo Corporation Method and apparatus for simultaneous sensing of angular and axial position
TW573116B (en) * 1999-04-19 2004-01-21 Netzer Prec Motion Sensors Ltd Capacitive displacement encoder

Family Cites Families (15)

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Publication number Priority date Publication date Assignee Title
US4429307A (en) 1982-01-29 1984-01-31 Dataproducts Corporation Capacitive transducer with continuous sinusoidal output
US4477860A (en) * 1983-09-19 1984-10-16 Cain Encoder Company Electrode array
CH690043A5 (de) * 1994-11-23 2000-03-31 Heidenhain Gmbh Dr Johannes Verfahren zum Lagebestimmen eines sich bewegenden Körpers.
JP3625530B2 (ja) 1995-06-12 2005-03-02 ヒューレット・パッカード・カンパニー 位置検出装置及び位置検出方法
JP2001183163A (ja) * 1999-12-28 2001-07-06 Mitsutoyo Corp 変位測定装置
GB0121934D0 (en) * 2001-09-12 2001-10-31 Europ Technology For Business Angular rate sensors
JP4090939B2 (ja) * 2002-05-29 2008-05-28 ニッタ株式会社 静電容量式センサおよびその製造方法
JP2005061964A (ja) * 2003-08-11 2005-03-10 Yazaki Corp 回転角センサ
JP3956369B2 (ja) * 2004-02-16 2007-08-08 本田技研工業株式会社 静電容量型センサ
KR100972623B1 (ko) * 2008-04-16 2010-07-28 (주)케이엠비앤센서 비접촉 정전용량식 회전 센서 및 그를 이용한 각도검출회로
JP5263822B2 (ja) * 2008-08-20 2013-08-14 株式会社青電舎 回転式静電型エンコーダ
DE102009043977A1 (de) * 2008-12-12 2010-06-17 Fanuc Ltd. Kapazitiver Codierer
US20100148802A1 (en) 2008-12-15 2010-06-17 Fanuc Ltd Capacitance-type encoder
EP2330388B1 (en) 2009-12-04 2013-09-04 Hengstler GmbH Method of determining an absolute angle of rotation of a capacitive motion encoder
CN103017803A (zh) 2011-09-27 2013-04-03 常州科教城新能源汽车工程技术研究院 编码器码盘

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2133889A (en) * 1983-01-19 1984-08-01 Lucas Ind Plc Capacitance displacement transducers
EP0435429A1 (en) * 1989-10-10 1991-07-03 Mitutoyo Corporation Method and apparatus for simultaneous sensing of angular and axial position
TW573116B (en) * 1999-04-19 2004-01-21 Netzer Prec Motion Sensors Ltd Capacitive displacement encoder

Also Published As

Publication number Publication date
WO2016098613A1 (ja) 2016-06-23
EP3486614A1 (en) 2019-05-22
US20170350731A1 (en) 2017-12-07
TW201945694A (zh) 2019-12-01
EP3236214A4 (en) 2018-05-30
KR20170095989A (ko) 2017-08-23
KR101957957B1 (ko) 2019-07-04
JP2016114559A (ja) 2016-06-23
EP3486614B1 (en) 2020-01-29
CN107003154A (zh) 2017-08-01
TW201632838A (zh) 2016-09-16
EP3236214B1 (en) 2020-08-12
TWI699515B (zh) 2020-07-21
US10551219B2 (en) 2020-02-04
JP6156747B2 (ja) 2017-07-05
CN107003154B (zh) 2019-09-10
EP3236214A1 (en) 2017-10-25

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