TWI680086B - Reticle pod and retainer thereof - Google Patents

Abstract

The invention provides a photomask box and a holding member thereof. The holding member mainly includes a supporting body, at least one strip-shaped supporting member, an elastic body, and at least one fixing hole. Wherein, the at least one strip-shaped supporting member is disposed on the supporting body, the elastic body has at least one opening, and the elastic body covers the supporting body and each strip-shaped supporting member extends upward a distance beyond each of the openings. The at least one fixing hole is disposed on the supporting body and the elastic body. The holding member is disposed in a photomask box through the at least one fixing hole.

Description

Photomask box and its holder

The invention provides a photomask box and a holding member thereof, in particular to a holding member that covers the supporting body by an elastic body and a photomask box using the same.

In the semiconductor process industry, the photomasks used in etching technologies such as yellow light lithography will vary according to the size of the substrate used in the process, and photomasks of different sizes are used.

In many types of semiconductor processes, the substrates and photomasks used in the manufacture of thin film transistor liquid crystal display (TFT-LCD) processes usually have larger sizes before they can be used to make Large semiconductor components and used in large size panels.

For such large size photomasks, special carriers are often required to assist in providing storage and transmission. In view of the fact that the large-size photomask is a fragile plate-like sheet, the traditional large-size photomask storage box is often provided with rubber or silicone retaining members at the four corners of the periphery. When the upper cover and the lower cover of the large-size photomask box are closed, the large-size photomask is resisted by a total of eight points at four corners. Provides certain stability and damping capabilities, reducing the problem of large-size photomasks being damaged due to collision or shaking.

The same technology was later widely used in photomask storage or transfer boxes of various sizes. Baoding photomasks are reduced by similar techniques to reduce their chance of being damaged by a physical collision. However, similar holders still have certain disadvantages. For example, after long-term use of silicone rubber or rubber, it comes into direct contact with the photomask for a period of time, which easily causes sticking to the photomask and peeling, and even marks on the photomask. However, the effect of using other damping materials is not good when applied to the holding effect of the photomask.

In order to solve the problems mentioned in the prior art, the present invention provides a photomask box and a holder thereof. First, the retaining member mainly includes a supporting body, at least one strip-shaped supporting member, an elastic body, and at least one fixing hole. Wherein, the at least one strip-shaped support is provided on the support body, the elastic body has at least one opening, the elastic body covers the support body and each strip-shaped support extends upward a distance beyond each of the openings. The at least one fixing hole is provided on the supporting body and the elastic body. Finally, the holding member is disposed in a photomask box through the at least one fixing hole.

Based on the selection of the holding member of the present invention, the photomask box applied by the present invention mainly includes an upper cover, a lower cover and at least one holding member. Wherein, the lower cover and the upper cover are paired closely to form an inner surface, and the at least one retaining member is disposed on the inner surface.

In the photomask box, each of the holding members includes a supporting body, at least one strip-shaped supporting member, an elastic body, and at least one fixing hole. The at least one strip-shaped support member is disposed on the support body, and the elastic body has at least one opening, and the elastic body covers the support body and each strip-shaped support member extends upward a distance beyond each of the openings. The at least one fixing hole is provided on the supporting body and the elastic body.

The foregoing brief description of the present invention aims to provide a basic description of several aspects and technical features of the present invention. The brief description of the present invention is not a detailed description of the present invention. Therefore, its purpose is not to specifically list the key or important elements of the present invention, nor to define the scope of the present invention, but merely to present several concepts of the present invention in a concise manner.

In order to understand the technical features and practical effects of the present invention, and can be implemented in accordance with the contents of the description, the preferred embodiment shown in the drawings is further described in detail as follows:

Please refer to FIG. 1 and FIG. 2 at the same time. FIG. 1 is a schematic structural diagram of a holding member according to an embodiment of the present invention; FIG.

As shown in FIG. 1, the retaining member 10 of this embodiment in FIG. 1 mainly includes a supporting body 100, at least one strip-shaped supporting member 101, an elastic body 102, and at least one fixing hole 104 a. Wherein, at least one strip-shaped support member 101 is disposed on the support body 100, and the elastic body 102 has at least one opening 103, the elastic body 102 covers the support body 100 and extends each strip-shaped support member 101 beyond each opening 103 A distance. In this way, when the strip-shaped supporting member 101 abuts against the photomask R (refer to FIG. 5 first), there is no physical contact with the elastic body 102.

The at least one fixing hole 104b and the at least one fixing hole 104a are sequentially disposed on the support body 100 (FIG. 2) and the elastic body 102 (FIG. 1). The holding member 10 is disposed in the photomask box 200 through the aforementioned at least one fixing hole (104a and 104b) (refer to FIGS. 4 and 5 first).

In this embodiment, the material of the elastic body 102 may be silicone or rubber, and the material of the supporting body 100 may be plastic. Furthermore, in this embodiment, the plastic material selected for supporting the body 100 is polyaryletherketone (PEEK); and the rubber of the elastic body 102 is a thermoplastic rubber (Thermo-Plastic-Rubber, TPR). As shown in FIG. 1, a combination of at least one stabilization wing 106 of at least one stabilization rib 105 is further provided on the periphery of the elastic body 102 in this embodiment.

In the embodiment of FIG. 1, since the plastic material selected for the supporting body 100 and the strip-shaped supporting member 101 thereof is a polyaryletherketone (PEEK), it can be used to resist the photomask R (see FIG. 5) It is also wear-resistant, avoiding the effect of generating tiny particles. In addition, since the supporting body 100 is covered by the elastic body 102, the damping characteristics of the material of the elastic body 102 itself can effectively slow down the photomask R resisted by the at least one support 101 of the supporting body 100 due to shaking and collision, thereby Damage caused.

Please refer to FIG. 3 and FIG. 4 at the same time. FIG. 3 is a schematic diagram of an appearance structure of a photomask box according to an embodiment of the present invention; and FIG.

As shown in FIG. 3, the embodiment of FIG. 3 shows a photomask box 200 to which the holder 10 of the embodiment of FIG. 1 is applied. The photomask box 200 mainly includes an upper cover 201, a lower cover 202, and at least one holding member 10 in FIG. 1. Next, as shown in FIGS. 3 and 4, the lower cover 202 and the upper cover 201 are mated to form an inner surface 203 (only the inner surface 203 of the upper cover 201 is taken as an example in FIG. 4).

In this embodiment, the photomask box 200 is a photomask storage box, and furthermore is a large-size photomask box, and the large-size photomask box can be further used to carry a photomask R (as shown in FIG. 5). Plate-like sheet). The R dimension of the photomask is 800 millimeters (mm) long and 920-960 millimeters (mm) wide. Of course, in other possible implementation forms, the mask box may also be a mask transfer box or an extreme ultraviolet mask box (EUV Pod).

In the embodiment shown in FIG. 4, as a large-size photomask box 200, at least one tongue groove 204 is provided on the peripheral edge of the inner surface 203, and each of the holding members 10 passes through at least one fixing hole (104 a Or 104b) is fixed in each tongue groove 204.

Please refer to FIG. 5, which is a cross-sectional structural view of a resist mask according to an embodiment of the present invention. As shown in FIG. 5, in this embodiment, when the upper cover 201 and the lower cover 202 of the photomask box 200 are closed and the holders 10 provided on the periphery of the inner surface 203 of the photomask 200 are clamped up and down, The mask R is held by the strip-shaped support 101a of the upper cover 201 and the strip-shaped support 101b of the lower cover 202. Since the material of the strip-shaped supporting member 101a and the strip-shaped supporting member 101b in this embodiment is polyetheretherketone (PEEK), the problem that micro particles are easily generated due to contact with the photomask R can be avoided.

In addition, due to the material characteristics of Polyaryletherketone (PEEK), problems such as sticking to the mask R and even peeling in the traditional technology can be directly avoided. As can be seen from the cross-section of FIG. 5, when the retaining member 10 is fixed in the tenon groove 204, the elastic body 102 can provide an effective damping means for the supporting body 100 and the strip-shaped supporting member 101 b, which greatly reduces The problem that the mask R is damaged due to shaking or collision.

In addition, in this embodiment, in order to further prevent the retaining member 10 from falling or peeling from the tenon groove 204, in addition to being fixed through the elastic body 102 and the hole 104 on the supporting body 100 (see FIG. 2), the elastic body 102 is further fixed on the elastic body 102. A stabilization rib 105 is provided. As shown in FIG. 5, in this embodiment, the stabilizing rib 105 is embedded in the side wall of the tenon slot 204, which greatly increases the friction between the elastic body 102 and the tenon slot 204, making it more difficult for the holder 10 to be affected by external forces. Dropped or peeled from the tongue groove 204.

In addition, the design of the stabilizing rib 105 is more conducive to demolding operations in industrial manufacturing, and it can bring a considerable degree of progressive technical features whether it is used or manufactured. Similarly, the stabilizer wing 106 shown in FIG. 1 also has the same function.

However, the above are only the preferred embodiments of the present invention. When the scope of implementation of the present invention cannot be limited in this way, that is, the simple changes and modifications made in accordance with the scope of the patent application and the description of the present invention still belong to the present invention. Covered.

10‧‧‧ holding parts

100‧‧‧ Support Ontology

101‧‧‧ strip support

101a‧‧‧ strip support

101b‧‧‧ strip support

102‧‧‧elastic body

103‧‧‧ opening

104a‧‧‧Fixing holes

104b‧‧‧Fixing holes

105‧‧‧ stabilizer

106‧‧‧ Stable Wing

200‧‧‧Mask box

201‧‧‧ Upper cover

202‧‧‧ lower cover

203‧‧‧Inner surface

204‧‧‧ Tenon groove

R‧‧‧Photomask

FIG. 1 is a schematic structural diagram of a holding member according to an embodiment of the present invention.
FIG. 2 is a schematic structural diagram of a supporting body and a strip-shaped supporting member according to an embodiment of the present invention.
FIG. 3 is a schematic diagram of an appearance structure of a photomask box according to an embodiment of the present invention.
FIG. 4 is a schematic view of a setting position of a holding member according to an embodiment of the present invention.
FIG. 5 is a sectional structural view of a resist mask according to an embodiment of the present invention.

Claims (12)

A retaining member comprising:
A supporting ontology;
At least one strip-shaped support member provided on the support body;
An elastic body having at least one opening, the elastic body covering the support body and allowing each of the strip-shaped support members to extend upward a distance beyond each of the openings; and at least one fixing hole provided in the support body and the elastic On the body
Wherein, the holding member is disposed in a photomask box through the at least one fixing hole. The holder according to claim 1, wherein the material of the elastic body is silicon rubber or rubber. The holding member according to claim 2, wherein the support body and the at least one support member are made of plastic. The holder according to claim 3, wherein the plastic is polyaryletherketone (PEEK). The holder according to claim 4, wherein the rubber is a thermoplastic rubber (Thermo-Plastic-Rubber, TPR). The holding member according to claim 1, wherein at least one stabilizing rib, at least one stabilizing wing, or a combination thereof is further provided on the periphery of the elastic body. A mask box containing:
One cover
The lower cover is mated with the upper cover to form an inner surface; and at least one retaining member is disposed on the inner surface, and each of the retaining members includes:
A supporting ontology;
At least one strip-shaped support member provided on the support body;
An elastic body having at least one opening, the elastic body covering the support body and allowing each of the strip-shaped support members to extend upward a distance beyond each of the openings; and at least one fixing hole provided in the support body and the elastic On the body. The mask box according to claim 7, wherein the mask box is a mask transfer box, a mask storage box, or an extreme ultraviolet mask box. The photomask box according to claim 8, wherein the photomask storage box is a large-size photomask box. The photomask box according to claim 9, wherein at least one tenon groove is provided on each of the peripheral edges of the inner surface of the large-size photomask box, and each of the holding members is fixed to each of the plurality of through the at least one fixing hole. In the tongue and groove. The mask box according to claim 9, wherein the large-size mask box further carries a mask, and the size of the mask is 800 mm (mm) in length and 920-960 mm (mm) in width. . The photomask box according to claim 10, wherein at least one stabilizing rib, at least one stabilizing wing, or a combination thereof is further provided on the periphery of the elastic body.