JP2001298078A - Housing case - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a housing case which can cope with the recent high integration of semiconductor elements, and is inexpensive, and does not take labor and time, in view of prevention of adhesion of particles within a case to a product, in a case which stores a product such as photo masks or the like. SOLUTION: This is a case for housing thin plate form product 180 such as photomask, mask blank glass board, wafer, or the like. This is provided with an adhesive layer to cause dust to stick to the inside of the case, and the adhesive layer is a sticky resin layer 130.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a case for accommodating thin-plate products such as photomasks, mask blanks, glass substrates, wafers and the like, which are used when manufacturing semiconductor devices.

[0002]

2. Description of the Related Art In recent years, the density of semiconductor elements (chips) has been drastically increased, and mass production of 64M DRAM having a 0.35 μm design rule has already begun.
We are moving into the era of 6MDRAM. Furthermore, recently, chip reduction aimed at cost reduction is remarkable,
The chip size is reduced by miniaturizing the MDRAM to the 0.25 design rule or miniaturizing the 256 MDRAM to the 0.18 design rule. For example, 64 MDRA
If M is a 0.2 μm design rule, about 16 MDRAM
The chip size is the same as the above, and the bit cost is about 1
/ 4. Development of 0.18μm design rule completed
It is expected that development of a 0.15 μm design rule will be completed in 2000. Under such circumstances, a reticle for directly reducing and projecting on a wafer is required to have high precision and high quality.

For this reason, a reticle for forming a semiconductor element and a mask for fabricating the reticle (hereinafter referred to as “reticle”).
With respect to the mask blanks and the glass substrates used for these, collectively referred to as photomasks, and methods of storing and transporting the same, there is a demand for a method that does not adversely affect the quality. For cases that store thin-plate products such as photomasks, mask blanks, glass substrates, wafers, etc., conventionally, in order to maintain the cleanliness of the products, when using the cases, the air inside the case is blown by air blow. Blow off dust (hereinafter also referred to as particles), clean the case, spray antistatic paint to prevent dust from adhering, store the product,
Further, the upper lid and the lower lid of the case are fitted to each other to seal the case, so that air from outside is shut off. A method has also been proposed in which the upper and lower lids of the case are fitted and hermetically sealed, and then the inside of the case is evacuated or filled with clean nitrogen gas or the like.

However, in the case of the above-described conventional case, dust may be generated due to friction when the upper and lower lids of the case are opened and closed. Further, depending on the state of the dust, the dust may not be blown off by air blow, and the antistatic function may deteriorate with use. For this reason, with the increasing degree of integration of semiconductor elements, it has not been possible to say that dust (particles) in the case is sufficiently prevented from adhering to the product in a conventional case for storing a product such as a photomask. Was. And also store the product, the top lid of the case,
In the case where the inside of the case is evacuated after the lower lid is fitted and sealed, there is a problem that the cost of the case increases because the case structure needs to be strengthened. In the case of the method of filling, after fitting and sealing the upper lid and the lower lid of the case, clean nitrogen gas, etc.
There is a problem that it takes time and effort to fill the space.

[0005]

As described above, in the case of accommodating products such as photomasks, with the recent high integration of semiconductor devices, it is necessary to prevent dust in the case from adhering to the products. It is no longer enough. Also, various methods have been proposed for preventing dust (particles) in the case from adhering to the product. However, there have been respective problems, and measures have been required. The present invention is a case corresponding to these, and is a case for accommodating a product such as a photomask. In order to prevent dust (particles) in the case from adhering to the product, the present invention has been applied to the recent high integration of semiconductor elements. The purpose of the present invention is to provide an inexpensive storage case that can be used and that is inexpensive and requires little time and effort.

[0006]

The storage case according to the present invention comprises:
A case for accommodating a thin plate-shaped product such as a photomask, a mask blank, a glass substrate, a wafer, or the like, wherein an adhesion layer for adhering dust is provided inside the case. And in the above, the adhesive layer is an adhesive resin layer. Further, in the above, the adhesive layer is provided in the form of an adhesive resin sheet, and is characterized by being detachably provided in the form of an adhesive resin sheet. In the above, the adhesive resin layer is a silicon-based adhesive. In the above, the adhesive resin layer is a polyamide-based adhesive. Alternatively, in the above, the adhesion layer is a charging layer, and the adhesion layer is provided in the form of a chargeable sheet and is detachably provided in the form of a chargeable sheet. It is characterized by the following.

[0007]

The storage case according to the present invention is a case for storing a product such as a photomask by adopting such a structure. In view of preventing dust (particles) in the case from adhering to the product, the storage case has recently been developed. It is possible to provide an inexpensive storage case that does not require much labor and time. Specifically, it is a case for storing thin plate products such as photomasks, mask blanks, glass substrates, and wafers, and more specifically by providing an adhesion layer for adhering dust inside the case. This is achieved by providing an adhesive layer composed of an adhesive resin layer or a charging layer in the form of a sheet, and being detachably disposed in the form of a sheet. That is, dust generated by friction when opening and closing the upper and lower lids of the case, dust that could not be blown off by air blow, and dust generated (floating) due to deterioration of the antistatic function were attached to the adhesion layer. This makes it possible to prevent adhesion to products. Since the adhesive layer is detachably disposed in the form of a sheet, the adhesive layer can be easily replaced, and the adhesive force can be maintained at a predetermined level or more when the product is used. Examples of the adhesive resin layer used as the adhesion layer include a silicone adhesive and a polyamide adhesive.

[0008]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A storage case according to an embodiment of the present invention will be described. FIG. 1A is a schematic view of a first example of an embodiment of a storage case of the present invention, and FIG.
FIG. 2A is a cross-sectional view illustrating a cross-sectional structure of an adhesive sheet in which an A1 part in FIG. 1A is enlarged, and FIG. 2A is a schematic view of a second example of an embodiment of a storage case of the present invention. , FIG. 1 (b)
FIG. 1A is a cross-sectional view illustrating a cross-sectional structure of an adhesive sheet in which a portion B1 in FIG. 1A is enlarged, and FIG. 3 is a diagram illustrating a holding jig. In FIG. 1, the lock mechanism is not shown. In FIG. 1, 100 and 101 are storage cases, 11
0 is the upper lid, 110S is the inner surface, 111 is the mask holder, 1
13 is a fitting portion, 120 is a lower lid portion (also referred to as a bottom portion), 12
0S is an inner surface, 121 is a mask receiver, 121A is a taper portion, 123 is a fitting portion, 130 is an adhesive resin layer, 135 is an adhesive resin sheet, 136 is a base film, 137
Reference numerals a and 137b denote an adhesive layer, 140 denotes a holding jig, 150 denotes an elastic material, 160 denotes a projection (also referred to as a pin), and 180 denotes a product (photomask).

A first embodiment of the storage case according to the present invention will be described below with reference to FIG. This example is a storage case for a photomask which is used for transporting a product and used repeatedly. In a state where the upper lid 110 is open, the lower lid (bottom) 12 is opened.
1, a photomask 180 is set in the mask receiver 121, and as shown in FIG. 1, with the upper lid 110 closed, the photomask 180 is pressed by the mask holder 111 of the upper lid 110, and the mask holder 111 of the upper lid 110 is , Lower lid (bottom)
The photomask 180 is interposed between the mask receivers 121 of 120 and the position thereof is fixed. The upper lid 110 and the lower lid (bottom) 120 are fitted by fitting portions 113 and 123, and are further locked by a lock mechanism (not shown). Then, in the storage case of this example, an adhesive resin layer is provided on the inner side surface 110S of the upper lid 110 and on the inner side surface 120S of the lower lid (bottom) 120, as shown in FIG. 1B.

In the storage case 100, an upper lid 110 and a lower lid (bottom) 120 are provided with fitting portions 113 and 123, both of which are fitted and locked, the inside of the case is almost sealed, and the inside is contaminated by an external atmosphere. Take a difficult structure. As the material of the storage case 100, an ABS resin, an acrylic resin, an aluminum plate, or the like is used, and a material that is difficult to be charged is desirable. The lower cover (bottom) 120 contains the product 180 in the case 10.
As shown in FIG. 1 (a), the tapered portion 121 descends toward the inside of the product so that it does not slide in the horizontal direction within 0.
A, a receiving portion 121 is provided, and a holding portion 111 for holding the product 180 is provided on the upper lid 110. When the case is closed, the upper lid 110 is prevented from shifting vertically in the product surface. The product is pressed to the receiving portion 121 side of the lower lid (bottom portion) 120 by the pressing portion 111. Top lid 1
As the material of the ten holding portions 111, a resin having elasticity (such as silicon) is preferably used. In addition, lower lid (bottom)
As shown in FIG. 3, instead of receiving portion 121 of elastic member 120, elastic member 150 or the like which is pressed by a projection (also referred to as a pin) 160 fixed to upper lid 110 and deforms inward in the horizontal direction within the product has a predetermined range. Receiving part 140 movably supported by
Depending on the method, there is also a method that is fixed. Also in this case, a holding portion for holding the product 180 may be provided on the upper lid as in this example.

As the locking mechanism, a method of making a hole in the upper lid 110 and the lower lid (bottom) 120 and locking with a pin, or a method of fixing the upper lid 110 and the lower lid (bottom) 120 with a slide lock can be cited. . As a method of fixing by a slide lock, for example, as shown in a part of the cross section in FIG. 4, the sum (411L + 421L) of the heights (widths) 411L and 421L of the upper lid 410 and the lower lid 420 are respectively provided. Rail 41 changing gradually
1, 421 are provided, and the slide portion 430 is attached to the rail 411,
There is a device that locks or unlocks the device by sliding it while fitting it in the 421.

In order to absorb an error in the shape (thickness) of the product, an elastic resin (such as silicon) is preferably used for the holding portion 111 of the upper lid and the receiving portion 121 of the lower lid.

The composition of the adhesive resin layer 130 varies depending on the physical properties of the product 180 and the case.
Use different polyamide adhesives. Adhesive resin layer 1
30 is used after being applied to the inner surface of the case 100 and dried to some extent. In this example, the inner surface 110S of the upper lid 110 and the inner surface 120S of the lower lid (bottom) 120
Although the adhesive resin layer is provided over almost the entire area, it is not always necessary to cover the entire area. Needless to say, the larger the area where the adhesive resin layer 130 is provided, the higher the probability of adhering dust (particles).

A second embodiment of the storage case according to the present invention will be described. The second example uses a detachable adhesive resin sheet 135 instead of the adhesive resin layer 130 in the first example, and is on the inner surface 110S of the upper lid 110 and on the inner surface 120S of the lower lid (bottom) 120. As shown in FIG. 2 (b), an adhesive resin layer sheet 13 having an adhesive layer on both sides
5 is adhered by the adhesive layer 137a on one side thereof, and is provided so as to be detachably fixed. The adhesive resin layers 137a and 137 of the adhesive resin sheet 135 shown in FIG.
After b is applied to the base film 136 and dried to some extent, b is used. In the case of this example, since the adhesive resin sheet 135 is replaced, the adhesive resin layer 137a on the adhesive surface side of the adhesive resin sheet 135 with the case 100 does not affect the case 100 and has no adhesive residue. Select a resin without. The adhesive resin layers 137a and 137b
As in the case of the adhesive resin layer 130 of the first example, the composition is changed according to the physical properties of the product 180 and the case, and a silicone adhesive, a polyamide adhesive, and the like are selectively used. It is not necessary that the adhesive resin layer 137a and the adhesive resin layer 137b have the same composition. As the base film 136, PET (polyethylene terephthalate), vinyl chloride, a polyolefin sheet, or the like is used. In the case of this example, the width of the adhesive resin sheet 135 corresponds to the inner surface 110S of the upper lid 110.
It is provided on the inner surface 120S of the upper and lower lid (bottom) 120, and as in the first example, the inner surface 110S of the upper lid 110,
The adhesive resin layer is not provided on almost the entire inner surface 120S of the lower lid (bottom) 120. Also in the case of this example, it goes without saying that the larger the area where the adhesive resin sheet 135 is provided, the higher the probability of adhering dust (particles). Otherwise, the first
The description is omitted here.

A third embodiment of the storage case according to the present invention will be described. The third example uses a chargeable sheet in place of the adhesive resin sheet 135 in the second example. Examples of the chargeable sheet include PET, a soft vinyl chloride sheet, and a polyethylene film.
In this example, after the one surface of the chargeable sheet is attached to the case, the sheet is rubbed to charge the sheet, and to attract and adhere dust having reverse ions. The other points are the same as in the first example, and the description is omitted.

As a modified example, the adhesive resin layer of the first example or the adhesive resin sheet 135 of the second example may be used.
And the storage case in which the charging sheet of the third example is disposed together.

An example of a processing operation for storing and transporting a clean photomask using the storage case of the first example will be briefly described below. An adhesive resin is applied to the previously cleaned storage case. The resin material is selected so that the resist applied to the photomask hardly has a chemical change or the like. After applying the resin, the resist is allowed to stand for a certain time to evaporate volatile components. Then, case 10
0 with the photomask 180 in the case 100
On the predetermined position (receiving portion 121) of the lower lid (bottom portion) 120, and fits the fitting portion 113 of the upper lid 110 with the fitting portion 123 of the lower lid.
, Lock and close the case. In this way,
The state shown in FIG. 1A is obtained. When the case is opened and closed, friction occurs between the upper lid 110 and the lower lid (bottom) 120 to generate dust, and the dust accumulates in the case. This dust adheres to the adhesive resin layer 130 and does not affect the photomask 180.
Thereafter, the case is conveyed to a predetermined position. At this time, dust is also generated due to the vibration caused by the conveyance.
0 to eliminate the effect on the photomask 180. Finally, the case is transported to the destination and installed, but the charge amount of the case changes depending on the installation environment. In this case, dust tends to fly out into the air due to a change in potential, but is attached to the adhesive resin layer 130, so that the influence on the photomask 180 can be prevented. Such a case for transport is generally used repeatedly, but in the case of repeated use, the case is washed and spilled dust is removed every prescribed use, and the adhesive resin layer 130 is applied again. To reuse.

When a clean photomask is stored and transported by using the storage case of the second example, the adhesive resin layer is placed in the case as compared with the case of using the storage case of the first example. Installation work can be simplified. The work of arranging the adhesive resin layer in the case only requires exchanging the adhesive resin sheet 135.

[0019]

As described above, the present invention relates to a case for accommodating a product such as a photomask and the like, and in view of preventing dust (particles) in the case from adhering to the product, the height of recent semiconductor devices has been improved. Inexpensive storage case for integration
This makes it possible to provide a storage case that requires less time and effort.

[Brief description of the drawings]

FIG. 1A is a schematic view of a first example of an embodiment of a storage case according to the present invention, and FIG.
It is sectional drawing which shows the cross-section of the adhesive sheet which expanded and showed one part.

FIG. 2A is a schematic view of a second example of the embodiment of the storage case of the present invention, and FIG.
It is sectional drawing which shows the cross-section of the adhesive sheet which expanded and showed one part.

FIG. 3 is a view for explaining another form of receiving portion;

FIG. 4 is a cross-sectional view for explaining a method of fixing by a slide lock.

[Explanation of symbols]

 100, 101 Storage case 110 Upper lid 110S Inner side surface 111 Mask holder 113 Fitting part 120 Lower lid part (also referred to as bottom part) 120S Inner side surface 121 Mask receiver 121A Tapered part 123 Fitting part 130 Adhesive resin layer 135 Adhesive resin sheet 136 Base film 137a, 137b Adhesive layer 140 Holding jig 150 Elastic material 160 Projection (also referred to as pin) 180 Product (photomask) 400 Storage case 410 Upper lid 411 Rail 411L Rail height (width) 413 Fitting part 420 Lower lid 421 Rail 421L Height (width) of rail 423 Fitting part 430 Sliding part

 ────────────────────────────────────────────────── ─── Continued on the front page (72) Inventor Yoshihisa Shiya 1-1-1 Ichigaya-Kaga-cho, Shinjuku-ku, Tokyo F-term in Dai Nippon Printing Co., Ltd. (reference) 3E062 AB10 BA20 3E096 AA01 BA15 BB03 CA01 CB03 DA14 DB06 FA03 GA03 5F031 CA02 CA05 CA07 DA12 EA14 EA19 PA26 5F046 AA21

Claims (7)

[Claims] 1. A storage case for storing a thin plate-shaped product such as a photomask, a mask blank, a glass substrate, and a wafer, wherein the storage case has an adhesion layer for adhering dust inside the case. . 2. The storage case according to claim 1, wherein the adhesion layer is an adhesive resin layer. 3. The method according to claim 1, wherein the adhesion layer comprises:
A storage case provided in the form of an adhesive resin sheet, which is detachably provided in the form of an adhesive resin sheet. 4. The storage case according to claim 1, wherein the adhesive resin layer is a silicone-based adhesive. 5. The storage case according to claim 1, wherein the adhesive resin layer is a polyamide-based adhesive. 6. The storage case according to claim 1, wherein the adhesion layer is a charging layer. 7. The storage case according to claim 6, wherein the adhesion layer is provided in the form of a chargeable sheet, and is detachably provided in the form of a chargeable sheet.