JP2008265761A - Reticle case - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a reticle case capable of smoothly detaching a lid from a case body without any shock or the like and opening the case body even when a space between the case body and the lid is sealed over the entire periphery by an elastic seal member. <P>SOLUTION: The reticle case includes a case body 1, a lid 2, a releasable locking member 3(3A), and a case opening spring 15 arranged between the case body 1 and the lid 2 so as to push up the lid 2 from the case body 1 when the locking member 3(3A) is released. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a reticle case for storing a reticle, which is a photomask used in a stepper, one by one in a semiconductor manufacturing process.

In general, a reticle case used in a semiconductor manufacturing process includes a case main body, a lid that is detachably placed on the case main body from above, and a seal that seals a gap between the case main body and the lid over the entire circumference. A member and a releasable locking member for holding the state where the lid is put on the case main body are provided. When taking out the stored reticle, the lock by the lock member is released, and then the lid is pulled upward by a robot hand or the like and peeled off from the case body (for example, Patent Document 1).
JP 2004-173273 A

  In a reticle case or the like described in Patent Document 1, foreign substances and chemical substances contained in the outside air are obtained by sandwiching a sealing member made of a resilient material in a gap between the case main body and the lid. It is possible to obtain an excellent performance that does not enter the reticle case.

  However, since such a seal member is provided, when the lid is pulled upward to take out the reticle, the lid is detached from the case body by the pressure contact force of the seal member that is elastically deformed. It may not be peeled off smoothly. Specifically, when the lid body is separated from the case body, an impact may be generated due to a phenomenon such as the case body being lifted once together with the lid body and then dropped. When such an impact occurs, not only the reticle may be damaged, but also dust generated in the reticle case may adversely affect the reticle.

  The present invention allows the lid to be smoothly removed from the case main body and opened without any impact even if the gap between the case main body and the lid is sealed all around by the elastic sealing member. An object of the present invention is to provide a reticle case that can be used.

  In order to achieve the above object, a reticle case of the present invention is a reticle case for storing one reticle in a semiconductor manufacturing process, and a reticle placing member on which a reticle is placed is disposed. A case main body, a reticle pressing member for pressing the reticle placed on the reticle mounting member from above, and a lid body that is detachably covered from the upper side of the case main body, and a lid body that covers the case main body A releasable lock for holding the cover body covered with a sealing member made of an elastic material that seals the gap between the case body and the cover body over the entire circumference when the cover body is placed And a case opening spring disposed between the case body and the lid so as to push up the lid from the case body when the lock member is released. And those are.

  The case opening spring may be fixedly attached to the lid, and a fixing hole into which a pin protruding from the back surface of the lid is press-fitted is formed at the fixed end of the case opening spring. It may be. In addition, a spring receiving member with which the action end of the case opening spring abuts may be provided on the case body.

  The case opening spring may be a leaf spring, and the two case opening springs may be integrally formed with a common fixed end. In this case, the lid is formed in a rectangular shape and integrally formed. Two sets of two formed case opening springs are provided, and one set of case opening springs is arranged along one side of the lid, and another set of plates along the opposite side of the lid A spring may be arranged. The case opening spring may be formed of a plastic material having conductivity, and specifically may be formed of a polymer material in which a conductive material is kneaded.

  Further, in the reticle case of the present invention, the lock member is attached to the lid body so as to be slidable in the horizontal direction, and a locking piece for locking the lid body to the case body, and in a direction for locking the lid body to the case body. A lock spring formed of a coil spring that biases the lock piece, and the lock spring may be attached to the outer wall surface of the lid body in a vertical direction.

  Conventionally, since the lock spring is formed of a leaf spring and its end is attached to the outer wall surface of the lid, the reaction force of the urging force of the lock spring deforms the outer wall of the lid into distortion. The pressure contact state of the seal member becomes partially incomplete, and there is a possibility that leakage occurs in the seal portion. However, with such a configuration, it is possible to provide a reticle case in which the outer wall portion of the lid body is not deformed into distortion and the hermetic seal by the seal member is held without failure. The lock piece may be attached to an arm that is rotatably attached to the lid, and the lock spring may urge the arm.

  In the reticle case of the present invention, a plurality of reticle pressing members are provided, and are attached to the lid so as to come into contact with three of the four sides of the reticle formed in a rectangular shape from obliquely above. A reticle stopper that abuts against the other side from the side may be provided so as to protrude upward from the case body.

  In the conventional reticle case, since the reticle pressing member is formed so as to abut on all four sides of the reticle obliquely from above, it is difficult to downsize the reticle case to a predetermined size. With this configuration, it is possible to provide a reticle case in which the reticle case is reduced to a predetermined size by effectively using the internal space of the reticle case. The reticle stopper may be formed of a nonconductive plastic material.

  In the reticle case of the present invention, at least the case main body and the lid may be formed of a conductive plastic material, and all members contacting the reticle may be formed of a non-conductive plastic material. The mounting member is integrally formed with the case body by a conductive plastic material and protrudes upward from the case body, and a cap formed of a non-conductive plastic material and covered at least on the top of the protrusion It may have a shape member.

  According to the present invention, the case opening spring is disposed between the case body and the lid body so that the lid body is pushed up from the case body when the lock member is released, so that the gap between the case body and the lid body is increased. Even if the gap is sealed over the entire circumference by an elastic seal member, the lid can be smoothly removed from the case body and released without any impact.

Embodiments of the present invention will be described below with reference to the drawings.
FIG. 2 is an external perspective view of a reticle case for storing the reticle 100, which is a photomask used in a stepper, one by one in a semiconductor manufacturing process. The reticle 100 is stored in a space surrounded by a case main body 1 shown by a broken line and a lid body 2 that is detachably attached to the case main body 1 from above. The reticle 100 has, for example, a square shape with a side of 6 inches (15.24 cm), and the thickness thereof is, for example, 1/4 inch (6.35 mm).

  Reference numeral 3 denotes a lock member for holding the cover body 2 in a state where the cover body 2 is put on the case body 1. By pulling the lock member 3 outward as indicated by an arrow A, the cover body 2 and the case body 1. And unlocked. Reference numeral 4 denotes two breathing valves attached to the front side of the lid body 2 so as to communicate the inside and outside of the reticle case. A more detailed description of the lock member 3 and the breathing valve 4 will be described later.

  At least one chemical absorber 5 is attached to the inner wall portion of the lid 2 to absorb the pollutant gas that adversely affects the reticle 100 in the reticle case. In the chemical absorber 5, for example, a chemical adsorbent is surrounded by a porous membrane filter (membrane filter) through which gas passes but solid particles do not pass and is sealed inside.

  Reference numeral 6 denotes a top flange for engaging a robot hand (not shown), which is fixedly attached to the lid 2 so as to protrude upward from the upper surface of the lid 2 with a gap. Reference numeral 7 denotes a recess for attaching an RFID tag (wireless tag), which is formed to be recessed on the outer surface of the lid 2.

  FIG. 3 is an exploded perspective view of the reticle case, and illustration of the reticle 100 is omitted. FIG. 4 is a plan view schematically showing the arrangement state of each member in the reticle case. The members provided in the case body 1 are illustrated by thick broken lines, and the members provided in the lid 2 are thin broken lines. It is shown in the figure. FIGS. 5 and 6 are cross-sectional views taken along the line VV shown in FIG. 4. FIG. 5 shows a state where the reticle case is closed, and FIG. 6 shows a state where the reticle case is opened. The case body 1 and the lid body 2 are not connected by a hinge or the like, and the lid body 2 is attached / detached in a direction perpendicular to the surface of the reticle 100.

  As shown in FIG. 4, the case main body 1 and the lid body 2 are each formed in a rectangular shape close to a square by a conductive plastic material. Specifically, for example, conductive fillers such as carbon fibers or carbon nanotubes or the like in thermoplastic polymer materials such as PC (polycarbonate), PBT (polybutyl terephthalate) or PEEK (polyetheretherketone). Such conductive nanotubes are formed of a kneaded material.

  And when the cover 2 is put on the case main body 1, it is made of an elastic material such as a polyolefin elastomer for sealing the gap between the case main body 1 and the cover 2 over the entire circumference. The seal member 8 is disposed seamlessly along the gap between the case body 1 and the lid body 2.

  As shown in FIG. 5, the seal member 8 is fitted in a mounting groove formed on the entire periphery of the outer edge portion of the case body 1. Then, the tip of the lip-shaped portion formed on the seal member 8 so as to protrude toward the side is in a state of being elastically deformed by being pressed against the inner peripheral surface of the opening of the lid body 2, so that the case body The gap between 1 and the lid 2 is hermetically sealed, and entry of dust, contaminated gas, etc. into the reticle case is prevented. The inner peripheral surface of the opening of the lid body 2 to which the seal member 8 is pressure-contacted is formed in a slope shape that gradually spreads toward the opening end side. Accordingly, the pressure contact force (seal force) of the seal member 8 is weakened as the cover 2 is covered with the case body 1 in a shallower manner.

  As shown in FIG. 4, two sets of the lock members 3 are arranged inside the outer wall portions of the front surface (right surface in FIG. 4) and the rear surface (left surface in FIG. 4) of the lid body 2. . As shown in FIG. 7, each lock member 3 includes a lock piece 3 </ b> A provided to be slidable in the horizontal direction so as to enter and exit a lock piece engaging recess 11 formed on the bottom surface of the case body 1. . The lock piece 3A is formed with a hole for engaging an external lock release arm (not shown).

  3 A of lock pieces are provided in the front-end | tip of the arm 3B attached to the cover body 2 so that rotation is possible centering on the spindle 3D. Further, the lock spring 3 </ b> C, which is a compression coil spring for always urging the lock piece 3 </ b> A into the lock piece engaging recess 11, is compressed between the inner surface of the outer wall of the lid 2 and the arm 3 </ b> B. The arm 3B is urged by being arranged in a state.

  The lock spring 3 </ b> C is attached to the outer wall surface of the lid body 2 in a vertical direction, and biases the arm 3 </ b> B in the vertical direction with respect to the outer wall surface of the lid body 2. As a result, the force applied to the lid body 2 from the lock spring 3C acts in a direction perpendicular to the outer wall surface of the lid body 2, so that the lid body 2 is not deformed (distorted) and the hermetic seal by the seal member 8 is achieved. Retained without failing.

  The lock piece engaging recess 11 is formed on the bottom surface of the case body 1, and when the lock piece 3A is engaged in the lock piece engaging recess 11 as shown in FIG. As shown, the lid 2 cannot be removed from the case body 1. Then, as shown in FIG. 8, the lock piece 3A is pulled outward as shown by the arrow A against the urging force of the lock spring 3C by an external unlocking arm, and the lock piece engaging recess 11 When the state is pulled out, the locked state is released, and the reticle 2 can be opened by removing the lid 2 from the case body 1.

  Returning to FIGS. 3 and 4, reference numeral 12 denotes four reticle placement members on which the reticle 100 is placed, which are arranged at positions where the inner portions of the four corners of the reticle 100 are placed. Desirably, reticle mounting member 12 is configured to support reticle 100 in as small an area as possible.

  As shown in an enlarged view in FIG. 9, each reticle mounting member 12 is formed integrally with a case main body 1 by a conductive plastic material and protrudes upward from the case main body 1 to a protrusion 12 </ b> A, for example, PEE (polyethylene). The cap-shaped member 12B made of a non-conductive polymer material having elasticity such as an elastomer is covered. The cap-shaped member 12 </ b> B only needs to be covered on at least the top of the reticle mounting member 12 that comes into contact with the reticle 100.

  Reference numerals 13 shown in FIGS. 3 and 4 are six reticle pressing members for pressing the reticle 100 mounted on the four reticle mounting members 12 from above. The non-conductive plastic material (polymer material) is used. As shown in FIG. 4, two reticle pressing members 13 are arranged at a position where they abut against each of the front edge and the left and right edges of the reticle 100 with a space between each other.

  As shown in FIG. 5, each reticle pressing member 13 has both ends fitted and fixed in holes formed in the inner surface of the lid 2 so as to be recessed, and is formed at an angle of approximately 45 ° when viewed from the side. The slope portion is attached to the edge of the reticle 100 so as to be elastically abutted in a leaf spring shape from obliquely outward (obliquely upward). As a result, the position of the reticle 100 in the reticle case is restricted except for the back side.

  3 and 4 again, reference numeral 14 designates the position of the reticle 100 by abutting from the side against the side of the reticle 100 where the reticle pressing member 13 does not abut (in other words, 4). A reticle stopper that abuts the side of the rear surface of the reticle 100 in a state of being placed on each of the reticle placement members 12 from the rear, and is formed of a non-conductive plastic material (polymer material). The case body 1 is fixed with screws so as to protrude upward from the body 1. The contact state of reticle stopper 14 with respect to reticle 100 is also clearly shown in FIG.

  In this way, the elastic reticle pressing member 13 attached to the lid 2 is brought into contact with the three sides of the reticle 100 obliquely from the outside, and the reticle stopper 14 erected from the case body 1 is used as the reticle 100. By adopting a configuration in which the reticle 100 is brought into contact with the other side, the reticle 100 can be stably fixed at a predetermined position in the reticle case, and the reticle case can be made to have a predetermined size by effectively using the internal space of the reticle case. Can be reduced in size.

  Reference numeral 15 denotes a case opening spring disposed between the case body 1 and the lid body 2 so as to push up the lid body 2 from the case body 1 when the lock member 3 is brought into the unlocked state shown in FIG. .

  The case opening spring 15 is made of a conductive plastic material. Specifically, for example, a conductive material such as a conductive filler or a conductive filler is kneaded with a polymer material having spring properties such as PEEK (polyetheretherketone). However, you may form with another material.

  The case opening spring 15 of this embodiment is a leaf spring, and as shown in an enlarged view in FIG. 10, the two case opening springs 15 are integrally formed in a state of sharing a fixed end at the boundary portion, and the fixing is performed. Two fixing holes 15A are formed in the end portion. The other end side of each case opening spring 15 is a working end, and a contact surface 15B that contacts a spring receiving surface 17A of a spring receiving member 17 described later is formed at the working end portion. The contact surface 15B is formed in a flat plate shape facing the spring receiving surface 17A.

  As shown in FIGS. 3 and 4, there are two spring receiving members 17 that are equally spaced apart from each other at the inner positions of the left and right sides of the case body 1 (the upper side and the lower side in FIG. 4). A total of four are erected on the upper surface of the case body 1. Such a spring receiving member 17 is screwed and fixed to the case body 1, and its top surface is a substantially flat spring receiving surface 17 </ b> A that contacts the contact surface 15 </ b> B of the case opening spring 15.

  As described above, two sets (two in total) of the case opening springs 15 that are integrally formed as described above are provided, and one set of the case opening springs 15 extends along the right side of the lid 2. A pair of other case opening springs 15 are arranged along the left side of the lid 2. As a result, the case opening spring 15 and the spring receiving member 17 are arranged utilizing the space that does not interfere with the reticle 100 in the reticle case, and the opening force acts evenly between the case body 1 and the lid 2. Can be made.

  As shown in FIG. 5, the case opening spring 15 is fixed to the lid body 2 by a pin that is protruded from the back surface of the lid body 2 and tightly pressed into the fixing hole 15 </ b> A. The spring receiving surface 17 </ b> A of the spring receiving member 17 is located above the surface (upper surface) of the reticle 100. When the case body 1 and the lid body 2 are locked by the lock member 3, the contact surfaces 15B of the case release springs 15 abut on the spring reception surfaces 17A of the spring support members 17, respectively. Is elastically deformed, and the urging force generated from the case opening spring 15 acts to push up the lid body 2 from the case body 1 and open it. The urging force is preferably in the range of about 0.2 to 1.2 kg as a whole.

  As shown in FIG. 6, when the lid 2 is separated from the case body 1, the contact surface 15 </ b> B of the case opening spring 15 is separated from the spring receiving surface 17 </ b> A of the spring receiving member 17, and the case opening spring 15. Has returned to its original shape which is not elastically deformed. In this state, all the reticle pressing members 13 are separated from the reticle 100.

  In the reticle case configured as described above, the case body 1 and the lid body 2 are locked by the lock piece 3A of the lock member 3 as shown in FIG. When the piece 3A is pulled outward from the inside of the lock piece engaging recess 11 as indicated by an arrow A and the lock is released, the case opening spring 15 acting between the case body 1 and the lid 2 is released. Due to the urging force, the lid body 2 is lifted with respect to the case body 1, and as a result, the gap between the case body 1 and the lid body 2 is not sealed by the seal member 8. Alternatively, the sealing force of the sealing member 8 is very weak.

  Thus, even if the gap between the case body 1 and the lid body 2 is sealed over the entire circumference by the elastic seal member 8, the lid body 2 can be removed without impact or the like. The reticle case can be smoothly removed from the main body 1 and opened, and the reticle case can be opened without adversely affecting the reticle 100.

  As shown in FIGS. 1 and 5, etc., the breathing valve 4 that communicates the inside and outside of the reticle case incorporates a membrane filter 4A that allows gas to pass but does not pass solid particles having a size of, for example, 0.1 μm or more. The lid 2 is open in a direction along the surface of the reticle 100. As a result, clean outside air is given to the surface of the reticle 100 through the breathing valve 4 in a state where the lid 2 is locked to the case body 1.

  In the reticle case of this embodiment, the cap-shaped member 12B, the reticle pressing member 13 and the spring receiving member 17 that are in contact with the reticle 100 are formed of a non-conductive plastic material and do not contact the reticle 100. The main parts such as the case main body 1 and the lid 2 are made of a conductive plastic material. As a result, the case body 1 and the lid body 2 are less likely to be charged, so that the impurity particles from the external environment are not attracted and the reticle 100 is less likely to be contaminated, and most of the surface area of the reticle case is electrically conductive. By having it, even if a charge is applied to the non-conductive portion, it is possible to obtain an effect such that it is not substantially charged due to quick leakage. Since the reticle 100 is electrically insulated from the case main body 1 and the lid 2 and the like, it is difficult to be adversely affected electrically from the outside.

  Note that when PC (polycarbonate) containing conductive carbon is used as the plastic material constituting the case body 1 and the lid body 2 and the like, transparency cannot be obtained, but there is an effect that the generation of pollutant gas is extremely reduced. .

  In addition, this invention is not limited to the said embodiment, For example, the shape, arrangement | positioning, etc. of the case opening spring 15 include the various aspects which are not described in this specification.

It is side surface sectional drawing which shows the state of the moment of the lock release of the reticle case in embodiment which concerns on this invention. 1 is an external perspective view of a reticle case in an embodiment according to the present invention. It is a disassembled perspective view of the reticle case in the embodiment according to the present invention. It is a plane schematic diagram which shows the arrangement | positioning relationship of each member of the reticle case in embodiment which concerns on this invention. It is side surface sectional drawing (VV sectional drawing in FIG. 4) in the state where the cover body was locked to the case main body of the reticle case in embodiment which concerns on this invention. It is side surface sectional drawing of the state in which the cover body was removed from the case main body of the reticle case in embodiment which concerns on this invention. It is a back sectional view of a locking member in an embodiment concerning the present invention. It is a back sectional view in the state where the lock of the lock member in an embodiment concerning the present invention was canceled. It is side surface sectional drawing of the reticle mounting member single-piece | unit in embodiment which concerns on this invention. It is a single-piece | unit perspective view of the case open spring in embodiment which concerns on this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Case main body 2 Cover body 3 Lock member 3A Lock piece 3B Arm 3C Lock spring 8 Seal member 11 Lock piece engagement recessed part 12 Reticle mounting member 12A Protrusion part 12B Cap-shaped member 13 Reticle pressing member 14 Reticle stopper 15 Case release spring 15A Fixing hole 15B Abutting surface 17 Spring receiving member 17A Spring receiving surface 100 Reticle

Claims (14)

A reticle case for storing one reticle in a semiconductor manufacturing process,
A case body in which a reticle placing member on which the reticle is placed is disposed;
A lid that is provided with a reticle pressing member for pressing the reticle in a state of being mounted on the reticle mounting member from above, and is detachably covered from above on the case body;
A sealing member made of an elastic material that seals the gap between the case body and the lid body over the entire circumference when the lid body is covered with the case body; and the lid body on the case body A releasable locking member for holding the covered state;
A case opening spring disposed between the case body and the lid body so as to push up the lid body from the case body when the lock member is released;
Reticle case characterized in that is provided. The reticle case according to claim 1, wherein the case opening spring is fixedly attached to the lid.   3. A reticle case according to claim 2, wherein a fixing hole into which a pin protruding from the back surface of the lid is press-fitted is formed at a fixed end of the case opening spring.   The reticle case according to claim 2, wherein a spring receiving member is provided on the case body so that a working end of the case opening spring comes into contact therewith.   The reticle case according to any one of claims 1 to 4, wherein the case opening spring is a leaf spring, and the two case opening springs are formed integrally with a fixed end.   The lid body is formed in a rectangular shape, and two sets of the two case opening springs integrally formed are provided, and one set of the case opening springs is arranged along one side of the lid body. The reticle case according to claim 5, wherein another set of leaf springs is disposed along the opposite side of the lid.   The reticle case according to claim 1, wherein the case opening spring is formed of a conductive plastic material.   The reticle case according to claim 7, wherein the case opening spring is formed of a polymer material in which a conductive material is kneaded.   The lock member is attached to the lid body so as to be slidable in the horizontal direction and locks the lid body with respect to the case body, and the lock piece in the direction to lock the lid body to the case body. 2. A reticle case according to claim 1, further comprising a lock spring comprising a biasing coil spring, wherein the lock spring is attached in a direction perpendicular to the outer wall surface of the lid.   The reticle case according to claim 9, wherein the lock piece is attached to an arm rotatably attached to the lid body, and the lock spring biases the arm.   A plurality of the reticle pressing members are provided, and are attached to the lid so as to abut against three of the four sides of the reticle formed in a rectangular shape from obliquely above, and against the other side of the reticle 2. The reticle case according to claim 1, wherein a reticle stopper that abuts from the side is provided so as to protrude upward from the case body.   The reticle case according to claim 11, wherein the reticle stopper is formed of a non-conductive plastic material.   13. The method according to claim 1, wherein at least the case main body and the lid are formed of a conductive plastic material, and all members that contact the reticle are formed of a non-conductive plastic material. Reticle case as described.   The reticle mounting member is integrally formed with the case body by a conductive plastic material and protrudes upward from the case body, and is formed of a non-conductive plastic material and at least the top of the protrusion The reticle case according to claim 13, further comprising a cap-shaped member coated on the reticle.

Images