TWI678529B - Apparatus and method for detecting defect of optical film - Google Patents

Apparatus and method for detecting defect of optical film Download PDF

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TWI678529B
TWI678529B TW105102026A TW105102026A TWI678529B TW I678529 B TWI678529 B TW I678529B TW 105102026 A TW105102026 A TW 105102026A TW 105102026 A TW105102026 A TW 105102026A TW I678529 B TWI678529 B TW I678529B
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optical film
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TW201631313A (en
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金種佑
Jong Woo Kim
朴真用
Jin Yong Park
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南韓商東友精細化工有限公司
Dongwoo Fine-Chem Co., Ltd.
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8851Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • GPHYSICS
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    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
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    • GPHYSICS
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    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/89Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8914Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the material examined
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8851Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8854Grading and classifying of flaws
    • G01N2021/8858Flaw counting
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8851Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8854Grading and classifying of flaws
    • G01N2021/8877Proximity analysis, local statistics
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

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Abstract

本發明提供一種光學薄膜缺陷檢測裝置及方法。本發明的光學薄膜缺陷檢測裝置包含:接收部,從至少1個檢查裝置,接收光學薄膜輥(roll)的缺陷資訊;缺陷位置決定部,根據前述缺陷資訊,決定與前述光學薄膜輥相對應的二維平面上的缺陷位置;搜索部,根據前述缺陷位置,搜索前述平面上,有已設定的數目以上的缺陷存在的區域;及缺陷檢測部,根據前述搜索過的區域所含的缺陷的數目及缺陷間的間隔,檢測週期性缺陷。 The invention provides an optical film defect detection device and method. The optical film defect detection device of the present invention includes a receiving unit that receives defect information of an optical film roll from at least one inspection device; a defect position determination unit determines a corresponding one of the optical film rolls based on the defect information. Defect locations on a two-dimensional plane; a search unit that searches for areas on the plane where more than a set number of defects exist based on the defect locations; and a defect detection unit that searches for the number of defects contained in the searched areas And the interval between defects to detect periodic defects.

Description

光學薄膜缺陷檢測裝置及方法 Optical film defect detection device and method

本發明係關於一種技術,其用以檢測光學薄膜的製程過程中發生的缺陷。 The present invention relates to a technology for detecting defects occurring during the manufacturing process of an optical film.

一般而言,於光學薄膜輥(roll)的製程過程中,在一定區域發生許多缺陷時,將該區域視為特別管理區域,由品檢人員進一步進行檢查。 Generally speaking, during the manufacturing process of an optical film roll, when many defects occur in a certain area, the area is regarded as a special management area and further inspected by the quality inspection personnel.

此時,品檢人員觀察缺陷檢測分布圖(二維圖),判斷是否為週期性缺陷。然而,品檢人員間的熟練度不同,且不易察覺由於缺陷檢測圖之X/Y軸的縮尺(scale)變化所造成的缺陷間的間隔基準的差異,因此難以對於數目眾多的輥,進行正確且具一貫性的週期性缺陷的確認及管理。進而言之,由品檢人員進行檢查時,發生檢查作業需要許多費用及時間的問題點。 At this time, the quality inspector observes the defect detection distribution map (two-dimensional graph) to determine whether it is a periodic defect. However, the proficiency of the quality inspection personnel is different, and it is difficult to detect the difference in the gap reference between the defects caused by the change in the X / Y axis scale of the defect detection chart, so it is difficult to correctly perform for a large number of rollers And the consistent identification and management of periodic defects. In addition, when an inspection by a quality inspector is carried out, there are problems that require a lot of cost and time for the inspection operation.

先行技術文獻 Advance technical literature 專利文獻 Patent literature

[專利文獻1]韓國特開2003-0046267號公報 [Patent Document 1] Korean Patent Laid-Open No. 2003-0046267

本發明之目的在提供一種缺陷檢測裝置及方法,用以檢測光學薄膜的製程過程 中發生的週期性缺陷。 An object of the present invention is to provide a defect detection device and method for detecting a manufacturing process of an optical film. Defects that occur periodically.

1.一種光學薄膜缺陷檢測裝置,包含:接收部,從至少1個檢查裝置,接收光學薄膜輥(roll)的缺陷資訊;缺陷位置決定部,根據前述缺陷資訊,決定與前述光學薄膜輥相對應的二維平面上的缺陷位置;搜索部,根據前述缺陷位置,搜索前述二維平面上,有已設定的數目以上的缺陷存在的區域;及缺陷檢測部,根據前述搜索過的區域所含的缺陷的數目及缺陷間的間隔,檢測週期性缺陷。 An optical film defect detection device comprising: a receiving unit that receives defect information of an optical film roll from at least one inspection device; a defect position determination unit that determines a correspondence with the optical film roll based on the defect information A defect position on a two-dimensional plane; a search unit that searches for a region on the two-dimensional plane where there are more than a set number of defects on the two-dimensional plane; and a defect detection unit that detects Detects periodic defects by the number of defects and the interval between defects.

2.如前述項目1之光學薄膜缺陷檢測裝置,其中前述搜索部對於各個缺陷位置,設定包含前述各個缺陷位置的一定大小的搜索區域,以前述各個缺陷位置為中心,依序變更前述搜索區域的位置,搜索各搜索區域中,有前述已設定的數目以上的缺陷存在的區域。 2. The optical film defect detection device according to the aforementioned item 1, wherein the search unit sets a search area of a certain size including each of the defect locations for each defect location, and sequentially changes the search area of the search area with the respective defect locations as the center. The position is searched in each of the search areas, and there are areas in which more than the previously set number of defects exist.

3.如前述項目1之光學薄膜缺陷檢測裝置,其中前述搜索部設定以各個缺陷位置為中心座標之一定大小的複數個搜索區域,搜索各搜索區域中,有前述已設定的數目以上的缺陷存在的區域。 3. The optical film defect detection device according to the aforementioned item 1, wherein the search unit sets a plurality of search areas of a certain size with each defect position as a center coordinate, and searches each search area for the presence of more than the previously set number of defects. Area.

4.如前述項目1之光學薄膜缺陷檢測裝置,其中前述搜索部將前述二維平面,分割為一定大小的複數個搜索區域,搜索分割的各搜索區域中,有前述已設定的數目以上的缺陷存在的區域。 4. The optical film defect detection device according to the aforementioned item 1, wherein the search section divides the two-dimensional plane into a plurality of search areas of a certain size, and each of the search search and division areas has more than the set number of defects. Existing area.

5.如前述項目1之光學薄膜缺陷檢測裝置,其中前述搜索部 於前述二維平面,設定一定大小的搜索區域,恰以一定距離,依序變更前述搜索區域的位置,搜索各搜索區域中,有前述已設定的數目以上的缺陷存在的區域。 5. The optical film defect detection device according to the aforementioned item 1, wherein the searching section On the two-dimensional plane, a search area of a certain size is set, and the position of the search area is sequentially changed by a certain distance, and each search area is searched for areas in which there are more than the set number of defects.

6.如前述項目1之光學薄膜缺陷檢測裝置,其中前述缺陷檢測部包含:記憶體部,儲存前述搜索過的區域的位置;候補區域決定部,根據前述搜索過的區域的位置,決定缺陷候補區域;及缺陷判斷部,根據前述缺陷候補區域所含的缺陷的數目及缺陷間的間隔,判斷前述缺陷候補區域內有無前述週期性缺陷的存在。 6. The optical film defect detection device according to the aforementioned item 1, wherein the defect detection section includes: a memory section that stores a position of the searched region; a candidate region determination unit determines a defect candidate based on the position of the searched region; A region; and a defect judging unit, based on the number of defects included in the defect candidate region and the interval between the defects, to determine whether the periodic defect exists in the defect candidate region.

7.如前述項目6之光學薄膜缺陷檢測裝置,其中前述候補區域決定部將前述搜索過的區域,決定為前述缺陷候補區域。 7. The optical film defect detection device according to the item 6, wherein the candidate region determining section determines the searched region as the defect candidate region.

8.如前述項目7之光學薄膜缺陷檢測裝置,其中前述候補區域決定部於搜索過的區域中,存在有重疊或連續的區域時,統合前述重疊或連續的區域,將經統合的區域決定為前述缺陷候補區域。 8. The optical film defect detection device according to the item 7, wherein the candidate region determining unit is configured to integrate the overlapping or continuous regions when there is an overlapping or continuous region in the searched region, and determine the integrated region as The aforementioned defect candidate area.

9.如前述項目8之光學薄膜缺陷檢測裝置,其中前述候補區域決定部對於搜索過的區域或前述經統合的區域的各個,將包含各區域所含的全部缺陷的最小尺寸的區域,決定為前述缺陷候補區域。 9. The optical film defect detection device according to the item 8, wherein the candidate region determining unit determines, for each of the searched region or the integrated region, a region having a minimum size including all defects included in each region as The aforementioned defect candidate area.

10.如前述項目6之光學薄膜缺陷檢測裝置,其中前述記憶體部利用二維陣列,儲存前述搜索過的區域的位置資訊。 10. The optical film defect detection device according to the item 6, wherein the memory section uses a two-dimensional array to store position information of the searched area.

11.如前述項目6之光學薄膜缺陷檢測裝置,其中前述缺陷檢測部於前述缺陷候補區域,以前述輥的長度方向為基準,當同一行所含的缺陷的數目為已設定之值以上,且該行所含的缺陷間的間隔中之同一間隔的數目為已設 定之值以上時,判斷為前述週期性缺陷。 11. The optical film defect detection device according to the item 6, wherein the defect detection section is based on the length direction of the roller in the defect candidate area, and when the number of defects contained in the same row is equal to or greater than a set value, and The number of identical intervals among the intervals between defects contained in this row is set When the value is greater than or equal to the predetermined value, it is judged as the aforementioned periodic defect.

12.如前述項目1之光學薄膜缺陷檢測裝置,其中前述缺陷檢測部包含:缺陷檢測資訊生成部,其於檢測到前述週期性缺陷時,生成缺陷檢測資訊,而前述缺陷檢測資訊包含有關光學薄膜的製程線之前述週期性缺陷的發生位置的資訊。 12. The optical film defect detection device according to the aforementioned item 1, wherein the defect detection section includes: a defect detection information generating section that generates defect detection information when the periodic defect is detected, and the defect detection information includes relevant optical films Information on the occurrence of the aforementioned periodic defects in the process line of.

13.如前述項目12之光學薄膜缺陷檢測裝置,其中前述缺陷檢測資訊生成部將前述缺陷檢測資訊,傳送至製程管理系統的管理者的終端裝置、前述光學薄膜的製程線的作業人員的終端裝置、及製程線上的警報裝置中之至少一者。 13. The optical film defect detection device according to the item 12, wherein the defect detection information generating section transmits the defect detection information to a terminal device of a manager of a process management system, and a terminal device of a worker of a process line of the optical film. And at least one of the alarm devices on the process line.

14.一種光學薄膜缺陷檢測方法,包含如下階段:從至少1個檢查裝置,接收光學薄膜輥(roll)的缺陷資訊的階段;根據前述缺陷資訊,決定與前述光學薄膜輥相對應的二維平面上的缺陷位置的階段;根據前述缺陷位置,搜索前述二維平面上,有已設定的數目以上的缺陷存在的區域的階段;及根據前述搜索過的區域所含的缺陷的數目及缺陷間的間隔,檢測週期性缺陷的階段。 14. An optical film defect detection method, comprising the following steps: a stage of receiving defect information of an optical film roll from at least one inspection device; and determining a two-dimensional plane corresponding to the optical film roll according to the defect information Stage of defect positions on the basis of the above; a stage of searching the aforementioned two-dimensional plane for a region having more than a set number of defects on the two-dimensional plane according to the aforementioned defect position; and according to the number of defects contained in the previously searched region and between defects Interval, the stage of detecting periodic defects.

15.如前述項目14之光學薄膜缺陷檢測方法,其中前述搜索階段對於前述二維平面的各個缺陷位置,設定包含前述各個缺陷位置的一定大小的搜索區域,以前述各個缺陷位置為中心,依序變更前述搜索區域的位置,搜索各搜索區域中,有前述已設定的數目以上的缺陷存在的區域。 15. The optical film defect detection method according to the aforementioned item 14, wherein in the search stage, for each defect position of the two-dimensional plane, a search area of a certain size including the respective defect positions is set, with the respective defect positions as the center in order. The position of the search area is changed, and in each search area, areas in which more than the previously set number of defects exist are searched.

16.如前述項目14之光學薄膜缺陷檢測方法,其中前述搜索階段 設定以各個缺陷位置為中心座標之一定大小的複數個搜索區域,搜索各搜索區域中,有前述已設定的數目以上的缺陷存在的區域。 16. The optical film defect detection method according to the aforementioned item 14, wherein the aforementioned search stage A plurality of search areas of a certain size are set with each defect position as the center coordinate, and in each search area, an area in which more than the previously set number of defects exist is searched.

17.如前述項目14之光學薄膜缺陷檢測方法,其中前述搜索階段將前述二維平面,分割為一定大小的複數個搜索區域,搜索分割的各搜索區域中,有前述已設定的數目以上的缺陷存在的區域。 17. The optical film defect detection method according to the aforementioned item 14, wherein the search stage divides the two-dimensional plane into a plurality of search areas of a certain size, and each of the search search divided areas has more than the set number of defects. Existing area.

18.如前述項目14之光學薄膜缺陷檢測方法,其中前述搜索階段於前述平面,設定一定大小的搜索區域,依序變更前述搜索區域的位置,搜索各搜索區域中,有前述已設定的數目以上的缺陷存在的區域。 18. The optical film defect detection method according to the aforementioned item 14, wherein the search stage is on the plane, a search area of a certain size is set, the position of the search area is sequentially changed, and each search area is searched for more than the previously set number The area where the defect exists.

19.如前述項目14之光學薄膜缺陷檢測方法,其中前述檢測階段包含如下階段:儲存前述搜索過的區域的位置的階段;根據前述搜索過的區域的位置,決定缺陷候補區域的階段;及根據前述缺陷候補區域所含的缺陷的數目及缺陷間的間隔,判斷前述缺陷候補區域內有無前述週期性缺陷的存在的階段。 19. The optical film defect detection method according to the foregoing item 14, wherein the detection stage includes the following stages: a stage of storing the position of the searched region; a stage of determining a candidate defect region based on the position of the searched region; and The number of defects included in the defect candidate area and the interval between the defects determine the stage of the existence of the periodic defect in the defect candidate area.

20.如前述項目19之光學薄膜缺陷檢測方法,其中前述決定缺陷候補區域的階段,將前述搜索過的區域,決定為前述缺陷候補區域。 20. The optical film defect detection method according to the aforementioned item 19, wherein in the aforementioned stage of determining a candidate candidate region, the previously searched region is determined as the aforementioned candidate candidate region.

21.如前述項目20之光學薄膜缺陷檢測方法,其中前述決定缺陷候補區域的階段,於前述搜索過的區域中,存在有重疊或連續的區域時,統合前述重疊或連續的區域,將經統合的區域決定為前述缺陷候補區域。 21. The optical film defect detection method according to the item 20, wherein in the aforementioned stage of determining a candidate defect area, when there is an overlapped or continuous area in the searched area, the overlapped or continuous area is integrated, and the integration is performed. Is determined as the aforementioned defect candidate area.

22.如前述項目21之光學薄膜缺陷檢測方法,其中前述決定缺陷候補區域的階段,對於前述搜索過的區域或前述經統合的區域的各個,將包含各區域所含的全部缺陷的最小尺寸的區域,決定為前述缺陷候補區域。 22. The optical film defect detection method according to the aforementioned item 21, wherein in the step of determining a candidate defect area, for each of the searched area or the integrated area, the minimum size of all defects contained in each area will be included. The region is determined as the aforementioned defect candidate region.

23.如前述項目19之光學薄膜缺陷檢測方法,其中前述儲存階段利用二維陣列,儲存前述搜索過的區域的位置資訊。 23. The optical film defect detection method according to item 19, wherein the storage stage uses a two-dimensional array to store position information of the searched area.

24.如前述項目19之光學薄膜缺陷檢測方法,其中前述判斷階段於前述缺陷候補區域,以前述輥的長度方向為基準,當同一行所含的缺陷的數目為已設定之值以上,且該行所含的缺陷間的間隔中之同一間隔的數目為已設定之值以上時,判斷為前述週期性缺陷。 24. The optical film defect detection method according to the aforementioned item 19, wherein the aforementioned judging stage is in the aforementioned defect candidate area, based on the length direction of the aforementioned roller, when the number of defects contained in the same row is more than a set value, and When the number of the same intervals among the intervals between the defects included in the rows is a set value or more, it is determined as the aforementioned periodic defects.

25.如前述項目14之光學薄膜缺陷檢測方法,其中進一步包含:於檢測到前述週期性缺陷時,生成缺陷檢測資訊的階段,而前述缺陷檢測資訊包含有關光學薄膜的製程線之前述週期性缺陷的發生位置的資訊。 25. The optical film defect detection method according to the aforementioned item 14, further comprising: a stage of generating defect detection information when the aforementioned periodic defects are detected, and the aforementioned defect detection information includes the aforementioned periodic defects related to a process line of the optical film Of where it happened.

26.如前述項目25之光學薄膜缺陷檢測方法,其中進一步包含:將前述缺陷檢測資訊,傳送至製程管理系統的管理者的終端裝置、前述光學薄膜的製程線的作業人員的終端裝置、及製程線上的警報裝置中之至少一者的階段。 26. The optical film defect detection method according to the aforementioned item 25, further comprising: transmitting the foregoing defect detection information to a terminal device of a manager of a process management system, a terminal device of an operator of a process line of the optical film, and a process Stage of at least one of the online alarm devices.

27.一種電腦程式,其與硬體結合,且儲存於記錄媒體,用以執行如下階段:從至少1個檢查裝置,接收光學薄膜輥(roll)的缺陷資訊的階段;根據前述缺陷資訊,決定與前述光學薄膜輥相對應的二維平面上的缺陷位置的階段;根據前述缺陷位置,搜索前述二維平面上,有已設定的數目以上的缺陷存在的區域的階段;及根據前述搜索過的區域所含的缺陷的數目及缺陷間的間隔,檢測週期性缺陷的階段。 27. A computer program combined with hardware and stored in a recording medium for performing the following stages: a stage of receiving defect information of an optical film roll from at least one inspection device; a decision is made based on the aforementioned defect information A stage of a defect position on a two-dimensional plane corresponding to the optical film roll; a stage of searching for a region on the two-dimensional plane where there are more than a set number of defects, based on the defect position; and The number of defects in the area and the interval between defects, the stage of detecting periodic defects.

若依據本發明,藉由自動判斷光學薄膜所含的週期性缺陷有無發生,無論光學薄膜的生產量多寡,均可藉由一貫的基準來管理光學薄膜的品質,並且可藉由縮短週期性缺陷的檢測時間,來提升生產性。 According to the present invention, by automatically judging the occurrence of periodic defects contained in an optical film, regardless of the production volume of the optical film, the quality of the optical film can be managed by a consistent benchmark, and the periodic defects can be shortened by Inspection time to improve productivity.

又,若依據本發明,藉由可迅速掌握並通知光學薄膜的週期性缺陷有無發生,可對於週期性缺陷的發生,迅速採取處置,減低光學薄膜的生產損失(Loss)。 In addition, according to the present invention, since the occurrence of periodic defects of the optical film can be quickly grasped and notified, the occurrence of the periodic defects can be promptly dealt with to reduce the loss of production of the optical film.

100‧‧‧光學薄膜缺陷檢測裝置 100‧‧‧ Optical film defect detection device

110‧‧‧接收部 110‧‧‧Receiving Department

120‧‧‧缺陷位置決定部 120‧‧‧Defect position determination section

130‧‧‧搜索部 130‧‧‧Search Department

140‧‧‧缺陷檢測部 140‧‧‧Defect detection department

141‧‧‧記憶體部 141‧‧‧Memory

142‧‧‧候補區域決定部 142‧‧‧Alternative area decision department

143‧‧‧缺陷判斷部 143‧‧‧Defect judgment department

144‧‧‧缺陷檢測資訊生成部 144‧‧‧Defect detection information generation department

第1圖為本發明一實施形態的光學薄膜缺陷檢測裝置的構成圖。 FIG. 1 is a configuration diagram of an optical film defect detection device according to an embodiment of the present invention.

第2圖為本發明一實施形態的缺陷檢測部的詳細構成圖。 Fig. 2 is a detailed configuration diagram of a defect detection unit according to an embodiment of the present invention.

第3圖係用以說明搜索存在有缺陷的區域的過程的例示圖。 FIG. 3 is an exemplary diagram for explaining a process of searching for a defective area.

第4圖係用以說明搜索存在有缺陷的區域的過程的例示圖。 FIG. 4 is an exemplary diagram for explaining a process of searching for a defective area.

第5圖係用以說明搜索存在有缺陷的區域的過程的例示圖。 FIG. 5 is an exemplary diagram for explaining a process of searching for a defective area.

第6圖係用以說明搜索存在有缺陷的區域的過程的例示圖。 FIG. 6 is an explanatory diagram for explaining a process of searching for a defective area.

第7圖係用以說明缺陷候補區域的設定的例示圖。 FIG. 7 is a diagram illustrating the setting of a defect candidate area.

第8圖係用以說明缺陷候補區域的設定的例示圖。 FIG. 8 is a diagram illustrating the setting of a defect candidate area.

第9圖係用以說明缺陷候補區域的設定的例示圖。 FIG. 9 is a diagram illustrating the setting of a defect candidate area.

第10圖係用以說明缺陷候補區域的設定的例示圖。 FIG. 10 is a diagram illustrating the setting of a defect candidate area.

第11圖係用以說明缺陷候補區域的設定的例示圖。 FIG. 11 is a diagram illustrating the setting of a defect candidate area.

第12圖係用以說明週期性缺陷的判斷過程的例示圖。 FIG. 12 is an illustration diagram for explaining a judgment process of a periodic defect.

第13圖係用以說明週期性缺陷的判斷過程的例示圖。 FIG. 13 is an illustration diagram for explaining a judgment process of a periodic defect.

第14圖為本發明一實施形態的光學薄膜缺陷檢測方法的流程圖。 FIG. 14 is a flowchart of a defect detection method for an optical film according to an embodiment of the present invention.

第15圖係表示本發明一實施形態的週期性缺陷的檢測過程的流程圖。 Fig. 15 is a flowchart showing a periodic defect detection process according to an embodiment of the present invention.

用以實施發明之形態 Forms used to implement the invention

以下參考圖式,說明本發明的具體實施形態。以下的詳細說明是為了有助於有關本說明書所記述的方法、裝置、及/或系統的包括性理解而提供。但該等說明僅是例示,本發明不受該等說明所限制。 Hereinafter, specific embodiments of the present invention will be described with reference to the drawings. The following detailed description is provided to assist in an inclusive understanding of the methods, devices, and / or systems described in this specification. However, these descriptions are merely examples, and the present invention is not limited by these descriptions.

說明本發明的實施形態時,在判斷對於相關連的習知技術的具體說明,有使本發明的要旨變得不明確之虞時,得省略其詳細說明。又,後述的用語係考慮本發明的功能而定義的用語,可依使用者、運用者的意圖或慣例等而不同。因此,其定義應基於本說明書整體的內容來進行。詳細說明中所使用的用語,僅用以記述本發明的實施形態,絕非限制性用語。只要不是明確就不同含意而使用,單數形式的表現均包含複數形式的含意。於本說明,諸如「包含」或「備有」的表現,係用以指稱任何特性、數字、階段、動作、要素、該等的一部分或組合,除所記述者以外,不得排除其以外的其他特性、數字、階段、動作、要素、該等的一部分或組合的存在或可能性而解釋。 When describing the embodiment of the present invention, when it is judged that the specific description of the related conventional technology may make the gist of the present invention unclear, the detailed description thereof may be omitted. The terminology described below is a term defined in consideration of the function of the present invention, and may be different depending on the intentions, conventions, and the like of users and operators. Therefore, the definition should be based on the entire content of this specification. The terms used in the detailed description are only used to describe the embodiments of the present invention, and are not intended to be restrictive. Different meanings are used as long as they are not clear. The expressions in the singular include the meaning in the plural. In this description, expressions such as "including" or "having" are used to refer to any characteristic, number, phase, action, element, part or combination of these. The existence or possibility of a characteristic, number, phase, action, element, part or combination of these.

第1圖為本發明一實施形態的光學薄膜缺陷檢測裝置的構成圖。 FIG. 1 is a configuration diagram of an optical film defect detection device according to an embodiment of the present invention.

參考第1圖,本發明一實施形態的光學薄膜缺陷檢測裝置100包含接收部110、缺陷位置決定部120、搜索部130及缺陷檢測部140。 Referring to FIG. 1, an optical film defect detection device 100 according to an embodiment of the present invention includes a receiving section 110, a defect position determination section 120, a search section 130, and a defect detection section 140.

接收部110從至少1個檢查裝置,接收光學薄膜輥(roll)的缺陷資訊。此時,各檢查裝置意味配置於光學薄膜的製程線上的不同位置,用以檢測光學薄膜的製程過程中發生的缺陷,生成有關檢測的缺陷的缺陷資訊的裝置。 The receiving unit 110 receives defect information of the optical film roll from at least one inspection device. At this time, each inspection device means a device that is arranged at different positions on the process line of the optical film and is used to detect defects occurring during the process of the optical film and generate defect information about the detected defects.

例如檢查裝置可構成如:包含於光學薄膜的製程線,配置於光學薄膜上面的攝影機模組,使用該攝影機模組拍攝光學薄膜,從拍攝的圖像檢測缺陷。又,因此。以光學薄膜為基準,可於攝影機模組所在面的相反面備有光源,攝影機模組亦可構成如:拍攝從光源放出並穿過光學薄膜的光。此時,由於當光學薄膜存在有缺陷時,該部分的光穿透度降低,因此可容易檢測缺陷。 For example, the inspection device can be constituted as follows: a process line included in the optical film, a camera module disposed on the optical film, and the camera module is used to photograph the optical film and detect defects from the captured image. Again, therefore. Based on the optical film, a light source may be provided on the opposite side of the face of the camera module. The camera module may also be configured to capture light emitted from the light source and passed through the optical film. At this time, when there is a defect in the optical film, the light transmittance of the portion is reduced, so the defect can be easily detected.

再者,由檢查裝置生成的缺陷資訊可包含檢測的缺陷的位置、大小、亮度、拍攝到檢測的缺陷的圖像、檢查開始時刻及結束時刻等。 Furthermore, the defect information generated by the inspection device may include the position, size, and brightness of the detected defect, the image of the detected defect, the start time and end time of the inspection, and the like.

缺陷位置決定部120根據從檢查裝置接收的缺陷資訊,決定與光學薄膜輥相對應的二維平面上的缺陷位置。 The defect position determination unit 120 determines a defect position on a two-dimensional plane corresponding to the optical film roll based on the defect information received from the inspection device.

例如缺陷位置決定部120可構成與光學薄膜輥的長度及寬度相對應的二維平面,統合從各檢查裝置接收的缺陷資訊,決定該二維平面的缺陷位置。此時,二維平面的缺陷位置可根據從各檢查裝置接收的缺陷資訊所含的缺陷位置來決定。又,光學薄膜輥的長度及寬度可採用預先設定之值。 For example, the defect position determination unit 120 may constitute a two-dimensional plane corresponding to the length and width of the optical film roll, integrate defect information received from each inspection device, and determine the defect position of the two-dimensional plane. At this time, the defect position on the two-dimensional plane can be determined based on the defect position included in the defect information received from each inspection device. The length and width of the optical film roll can be set in advance.

搜索部130根據由缺陷位置決定部120決定的缺陷位置,搜索於二維平面上,有已設定的數目以上的缺陷存在的區域。 The search unit 130 searches an area on the two-dimensional plane where there are more than a set number of defects, based on the defect positions determined by the defect position determination unit 120.

例如搜索部130設定一定大小的搜索區域,一面於二維平面上,巡視設定的搜索區域,一面計算搜索區域內所含的缺陷數,藉此可搜索有已設定的數目以上的缺陷存在的區域。關於此,參考第3圖至第6圖來具體說明。 For example, the search unit 130 sets a search area of a certain size, while scanning the set search area on a two-dimensional plane, and calculates the number of defects contained in the search area, thereby searching for areas with more than a set number of defects. . This will be specifically described with reference to FIGS. 3 to 6.

於第3圖至第6圖,以虛線所示區域表示探索區域,以圓圈所示部分表示缺陷位置。再者,於第3圖至第6圖,將搜索區域表示為四角形的形狀,但不限定於此。例如搜索形狀為圓形,或依據使用者的選擇變形為適當的形狀均可。又,搜索 形狀的尺寸例如可考慮計算負荷、計算的正確性等,由使用者來設定。 In Figs. 3 to 6, the area shown by the dotted line represents the search area, and the area shown by the circle represents the defect location. In addition, in FIG. 3 to FIG. 6, the search area is shown as a quadrangular shape, but it is not limited to this. For example, the search shape may be circular or may be transformed into an appropriate shape according to a user's selection. Again, search The size of the shape can be set by the user in consideration of calculation load, calculation accuracy, and the like.

依據本發明一實施形態,搜索部130可對於二維平面所含的各個缺陷位置,設定包含各個缺陷位置的一定大小的搜索區域。然後,搜索部130能以各個缺陷位置為中心,變更搜索區域的位置,搜索各搜索區域中,有已設定的數目以上的缺陷存在的區域。 According to an embodiment of the present invention, the search unit 130 may set a search area of a certain size including each defect position for each defect position included in the two-dimensional plane. Then, the search unit 130 can change the position of the search area around each defect position, and search each search area for a region in which there are more than a set number of defects.

具體而言,參考第3圖,搜索部130可設定二維平面300上所含的複數個缺陷中,包含特定缺陷310的搜索區域321。然後,搜索部130可計算設定的搜索區域321內的缺陷數,判斷缺陷數是否為已設定的數目以上。 Specifically, referring to FIG. 3, the search unit 130 may set a search area 321 including a specific defect 310 among a plurality of defects included in the two-dimensional plane 300. Then, the search unit 130 may calculate the number of defects in the set search area 321 and determine whether the number of defects is equal to or greater than the set number.

接著,搜索部130可以缺陷310的位置為中心,將搜索區域321恰以一定距離往X軸方向移動,於移動後的位置,計算搜索區域322內的缺陷數,判斷缺陷數是否為已設定的數目以上。 Next, the search unit 130 may use the position of the defect 310 as the center, move the search area 321 toward the X axis direction by a certain distance, and calculate the number of defects in the search area 322 at the moved position to determine whether the number of defects is set. More than that.

接著,搜索部130可以缺陷310的位置為中心,將搜索區域322恰以一定距離進一步往X軸方向移動,於移動後的位置,計算搜索區域323內的缺陷數,判斷缺陷數是否為已設定的數目以上。 Next, the search unit 130 may use the position of the defect 310 as the center, and further move the search area 322 toward the X axis direction by a certain distance. At the moved position, calculate the number of defects in the search area 323 to determine whether the number of defects is set More than that.

接著,搜索部130可以缺陷310的位置為中心,將搜索區域323恰以一定距離往Y軸方向移動,於移動後的位置,計算搜索區域324內的缺陷數,判斷缺陷數是否為已設定的數目以上。 Next, the search unit 130 may use the position of the defect 310 as the center, move the search area 323 toward the Y axis direction by a certain distance, and calculate the number of defects in the search area 324 at the moved position to determine whether the number of defects is set. More than that.

如此,搜索部130可以特定缺陷310為中心,將搜索區域恰以一定距離,依序往X軸及Y軸方向移動,於各個位置,計算搜索區域內的缺陷數,搜索包含已設定的數目以上的缺陷的區域。 In this way, the search unit 130 may specify the defect 310 as the center, move the search area in a certain distance and sequentially move in the X-axis and Y-axis directions, calculate the number of defects in the search area at each position, and search includes more than the set number Defective area.

再者,於圖示的例中,搜索區域的移動距離可由使用者預先設定。 Furthermore, in the example shown in the figure, the moving distance of the search area can be set in advance by the user.

又,搜索部130可對於二維平面300所含的各個缺陷,以同樣方式設定搜索區域,一面移動於設定的搜索區域,一面於各個位置,判斷搜索區域內所含的缺陷數,是否為已設定的數目以上。 In addition, the search unit 130 may set a search area for each defect contained in the two-dimensional plane 300 in the same manner, while moving to the set search area and at each position, to determine whether the number of defects contained in the search area is already More than the set number.

另,依據本發明的其他實施形態,搜索部130可於二維平面,設定以各個缺陷位置為中心座標的一定大小的搜索區域,搜索各搜索區域中,有已設定的數目以上的缺陷存在的區域。 In addition, according to another embodiment of the present invention, the search unit 130 may set a search area of a certain size centered on each defect position on a two-dimensional plane, and search each search area for a set number of defects or more. region.

作為具體例,參考第4圖,搜索部130對於二維平面400上所含的各個缺陷,可設定以各缺陷為中心座標的一定大小的搜索區域410、420、430、440、450。然後,搜索部130可對於各個搜索區域410、420、430、440、450,計算缺陷數,搜索包含已設定的數目以上的缺陷的區域。 As a specific example, referring to FIG. 4, the search unit 130 may set search areas 410, 420, 430, 440, 450 of a certain size with each defect as a center coordinate for each defect included in the two-dimensional plane 400. Then, the search unit 130 may calculate the number of defects for each of the search areas 410, 420, 430, 440, and 450, and search for an area including more than a set number of defects.

另,依據本發明進一步其他的實施形態,搜索部130可將二維平面,分割為一定大小的複數個搜索區域,搜索分割的各搜索區域中,有已設定的數目以上的缺陷存在的區域。 In addition, according to still another embodiment of the present invention, the search unit 130 may divide the two-dimensional plane into a plurality of search areas of a certain size, and in each search area that is searched and divided, there are areas in which a set number of defects exist.

作為具體例,參考第5圖,搜索部130可將二維平面500,分割為一定大小的搜索區域510、520、530、540。然後,搜索部130可計算各個搜索區域510、520、530、540所含的缺陷數,判斷是否包含已設定的數目以上的缺陷。 As a specific example, referring to FIG. 5, the search unit 130 may divide the two-dimensional plane 500 into search areas 510, 520, 530, and 540 of a certain size. Then, the search unit 130 may calculate the number of defects included in each of the search areas 510, 520, 530, and 540, and determine whether or not a defect having a set number or more is included.

另,依據本發明進一步其他的實施形態,搜索部130可於二維平面,設定一定大小的搜索區域,於二維平面內,依序變更搜索區域的位置,搜索各搜索區域中,有已設定的數目以上的缺陷存在的區域。 In addition, according to still another embodiment of the present invention, the search unit 130 may set a search area of a certain size on a two-dimensional plane, and sequentially change the position of the search area within the two-dimensional plane. The number of defects above the area.

作為具體例,參考第6圖,搜索部130可將二維平面600上的特定位置,設定一定大小的搜索區域610。然後,搜索部130可於設定的搜索區域610計算缺陷數,判 斷缺陷數是否為已設定的數目以上。 As a specific example, referring to FIG. 6, the search unit 130 may set a specific position on the two-dimensional plane 600 to a search area 610 with a certain size. Then, the search unit 130 may calculate the number of defects in the set search area 610, and determine Whether the number of broken defects is more than the set number.

接著,搜索部130可使搜索區域610,恰以一定距離依序往Y軸方向移動,於各個位置,計算搜索區域620、630、640、650內的缺陷數,判斷缺陷數是否為已設定的數目以上。 Next, the search unit 130 can cause the search area 610 to sequentially move in the Y-axis direction at a certain distance, and calculate the number of defects in the search areas 620, 630, 640, and 650 at each position to determine whether the number of defects is set. More than that.

再者,不能使搜索區域再往Y軸方向移動時,搜索部130可使搜索區域,恰以一定距離往X軸方向移動後,計算搜索區域660內的缺陷數,判斷缺陷數是否為已設定的數目以上。 Furthermore, when the search area cannot be moved further in the Y-axis direction, the search unit 130 may move the search area to the X-axis direction by a certain distance, and calculate the number of defects in the search area 660 to determine whether the number of defects is set. More than that.

接著,搜索部130可使搜索區域660,恰以一定距離再次依序往X軸方向移動,於各個位置,計算搜索區域內的缺陷數,判斷缺陷數是否為已設定的數目以上。 Next, the search unit 130 can move the search area 660 to the X-axis direction in sequence again at a certain distance, calculate the number of defects in the search area at each position, and determine whether the number of defects is more than the set number.

藉由該類方式,搜索部130可一面於搜索區域內,巡視二維平面600全區域,一面於各個位置計算搜索區域內的缺陷數,搜索有已設定的數目以上的缺陷存在的區域。 With this type of method, the search unit 130 can scan the entire area of the two-dimensional plane 600 in the search area, calculate the number of defects in the search area at each position, and search for an area with more than a set number of defects.

再者,於第6圖圖示的例中,搜索區域的移動方向及移動距離可由使用者預先設定。 Furthermore, in the example shown in FIG. 6, the moving direction and moving distance of the search area can be set in advance by the user.

缺陷檢測部140可根據由搜索部130搜索到的區域所含的缺陷的數目及缺陷間的間隔,檢測週期性缺陷。在此,週期性不良意味於一定間隔週期性發生的缺陷。具體而言,缺陷檢測部140可根據由搜索部130搜索的區域,設定1個以上的缺陷候補區域。又,缺陷檢測部140可於設定的缺陷候補區域,以光學薄膜輥的長度方向為基準,計算缺陷的數目。此時,缺陷的數目為已設定之值以上時,算出缺陷間的間隔,檢測週期性缺陷。 The defect detection unit 140 may detect a periodic defect based on the number of defects contained in the area searched by the search unit 130 and the interval between the defects. Here, cyclical badness means a defect that occurs periodically at a certain interval. Specifically, the defect detection unit 140 may set one or more defect candidate regions based on the region searched by the search unit 130. In addition, the defect detection unit 140 may calculate the number of defects in the set candidate defect area based on the longitudinal direction of the optical film roll. At this time, when the number of defects is equal to or greater than the set value, the interval between defects is calculated, and periodic defects are detected.

第2圖為本發明一實施形態的缺陷檢測部140的詳細構成圖。 FIG. 2 is a detailed configuration diagram of the defect detection unit 140 according to an embodiment of the present invention.

參考第2圖,本發明一實施形態的缺陷檢測部140包含記憶體部141、候補區域決定部142、缺陷判斷部143及缺陷檢測資訊生成部144。 2, a defect detection unit 140 according to an embodiment of the present invention includes a memory unit 141, a candidate region determination unit 142, a defect determination unit 143, and a defect detection information generation unit 144.

記憶體部141可儲存由搜索部130搜索過、有已設定的數目以上的缺陷存在的區域的位置。具體而言,記憶體部141可儲存由搜索部130搜索過的區域的二維平面上的位置。依據本發明一實施形態,記憶體部141可採用以對應於二維平面的二維陣列所構成的影像緩衝器的形態來實現,利用二維陣列,儲存由搜索部120搜索過的區域的位置。 The memory unit 141 may store the position of an area searched by the search unit 130 and having a set number of defects. Specifically, the memory unit 141 may store a position on a two-dimensional plane of a region searched by the search unit 130. According to an embodiment of the present invention, the memory unit 141 may be implemented in the form of an image buffer constituted by a two-dimensional array corresponding to a two-dimensional plane. The two-dimensional array is used to store the position of the area searched by the search unit 120. .

候補區域決定部142可根據儲存於記憶體部141之搜索過的區域的位置,決定1個以上的缺陷候補區域。 The candidate region determination unit 142 may determine one or more defect candidate regions based on the positions of the searched regions stored in the memory unit 141.

例如候補區域決定部142可將儲存於記憶體部141的各個搜索過的區域,決定為缺陷候補區域。 For example, the candidate region determination unit 142 may determine each searched region stored in the memory unit 141 as a defect candidate region.

此時,依據本發明一實施形態,候補區域決定部142係於儲存於記憶體部141的搜索過的區域中,存在有重疊或連續的區域時,統合重疊或連續的區域,將經統合的區域決定為缺陷候補區域。此時,為了統合重疊或連續的區域,亦可利用諸如Blob Labeling(連結體標示)運算法等標示(Labeling)運算法。 At this time, according to an embodiment of the present invention, the candidate region determination unit 142 is a searched region stored in the memory unit 141, and when there is an overlapping or continuous region, the overlapping or continuous region is integrated, and the integrated The area is determined as a defect candidate area. At this time, in order to integrate overlapping or continuous areas, a labeling algorithm such as the Blob Labeling algorithm can also be used.

作為具體例,參考第7圖,在與光學薄膜輥相對應的二維平面710上,由搜索部120搜索過的區域711、712、713,可分別儲存於由二維陣列構成的記憶體部141的儲存區域720的對應位置721、722、723。 As a specific example, referring to FIG. 7, on the two-dimensional plane 710 corresponding to the optical film roll, the areas 711, 712, and 713 searched by the search unit 120 can be stored in a memory portion composed of a two-dimensional array, respectively. Corresponding positions 721, 722, and 723 of the storage area 720 of 141.

此時,候補區域決定部142可將由搜索部130搜索過的區域,即721、722、723的區域,分別決定為缺陷候補區域。 At this time, the candidate region determination unit 142 may determine the regions searched by the search unit 130, that is, the regions of 721, 722, and 723, as the defect candidate regions, respectively.

作為其他例,於第7圖,由於721的區域與722的區域為連續的區域,因此候補區 域決定部142可將721的區域與722的區域,如第8圖所示例,統合為1個區域724,將經統合的區域724、及723的區域,分別決定為缺陷候補區域。 As another example, in FIG. 7, since the area of 721 and the area of 722 are continuous areas, the candidate area The domain determining unit 142 may combine the areas of 721 and 722 into one area 724 as shown in the example of FIG. 8, and determine the areas of the integrated areas 724 and 723 as defect candidate areas, respectively.

作為其他例,參考第9圖,在與光學薄膜輥相對應的二維平面910上,由搜索部120搜索過的區域911、912、913,可分別儲存於由二維陣列構成的記憶體部141的儲存區域920的對應位置921、922、923。 As another example, referring to FIG. 9, on the two-dimensional plane 910 corresponding to the optical film roll, the regions 911, 912, and 913 searched by the search unit 120 may be stored in a memory unit composed of a two-dimensional array, respectively. Corresponding positions 921, 922, and 923 of the storage area 920 of 141.

此時,候補區域決定部142可將由搜索部130搜索過的區域,即921、922、923的區域,分別決定為缺陷候補區域。 At this time, the candidate region determination unit 142 may determine the regions searched by the search unit 130, that is, the regions of 921, 922, and 923, as the defect candidate regions, respectively.

作為其他例,由於儲存於記憶體部141之搜索過的區域中,921的區域與922的區域為重疊的區域,因此候補區域決定部142可將921的區域與922的區域,如第10圖所示例,統合為1個區域924,將經統合的區域924、及923的區域,分別決定為缺陷候補區域。 As another example, since the searched region stored in the memory unit 141, the region of 921 and the region of 922 are overlapped regions, the candidate region determining unit 142 may compare the region of 921 and the region of 922 as shown in FIG. 10 In the example shown, one area 924 is integrated, and the integrated areas 924 and 923 are determined as defect candidate areas, respectively.

另,依據本發明一實施形態,候補區域決定部142可對於由搜索部130搜索過的區域或經統合的區域的各個區域,將包含各區域所含的全部缺陷的最小尺寸的區域,決定為缺陷候補區域。 In addition, according to an embodiment of the present invention, the candidate area determination unit 142 may determine, as each area of the area searched by the search unit 130 or the integrated area, a minimum-size area including all defects included in each area as Defect candidate area.

作為具體例,參考第10圖及第11圖,候補區域決定部142可對於經統合的區域924及未被統合的區域923的各個區域,設定包含各區域所含的全部缺陷的最小區域925、926,將設定的最小區域925、926分別決定為缺陷候補區域。 As a specific example, referring to FIGS. 10 and 11, the candidate region determination unit 142 may set a minimum region 925 including all defects included in each region for each of the integrated region 924 and the unintegrated region 923. 926. The set minimum regions 925 and 926 are respectively determined as defect candidate regions.

再者,於第11圖所示例中,表示最小區域為四角形形狀,但不限定於此,最小區域的形狀亦可為例如圓形等各種形狀。 Furthermore, in the example shown in FIG. 11, the smallest area is shown as a quadrangular shape, but the shape is not limited to this. The shape of the smallest area may be various shapes such as a circle.

缺陷判斷部143係於各個缺陷候補區域,以光學薄膜輥的長度方向為基準,根據同一行所含的缺陷的數目及前述同一行所含的缺陷間的間隔,來檢測週期性缺 陷。 The defect judging unit 143 is based on each defect candidate area, and detects the periodic defects based on the number of defects contained in the same line and the interval between the defects contained in the same line based on the length direction of the optical film roll. trap.

作為具體例,參考第12圖,缺陷判斷部143係於各個缺陷候補區域1210、1220,以光學薄膜輥的長度方向為基準,計算同一行所含的缺陷的數目,藉此可判斷是否有已設定的數目以上的缺陷存在。例如用以判斷週期性缺陷存在的缺陷的數目若為3,就缺陷候補區域1210的情況而言,包含3個以上缺陷的行不存在,但就缺陷候補區域1220的情況而言,包含4個缺陷的行1221存在。 As a specific example, referring to FIG. 12, the defect judging unit 143 is attached to each of the defect candidate regions 1210 and 1220, and calculates the number of defects included in the same line based on the length direction of the optical film roll, thereby determining whether there is any Defects above the set number exist. For example, if the number of defects used to determine the existence of periodic defects is three, in the case of the defect candidate area 1210, a row containing three or more defects does not exist, but in the case of the defect candidate area 1220, it includes four Defective row 1221 exists.

因此,缺陷判斷部143對於包含4個缺陷的行1221,如第13圖所示範例,算出缺陷間的間隔1310,計算同一間隔的數目。此時,同一間隔的數目為已設定的數目以上時,缺陷判斷部143可判斷為週期性缺陷。例如假定用以判斷週期性缺陷而已設定的同一間隔的數目為3,且行1221所含的缺陷間的間隔為同一間隔,由於在行1221,同一間隔的數目為4,因此缺陷判斷部143可最終判斷為,於相當於光學薄膜輥的行1221的位置,存在有週期性缺陷。 Therefore, the defect determination unit 143 calculates the interval 1310 between the defects and calculates the number of the same interval for the row 1221 including four defects, as in the example shown in FIG. 13. At this time, when the number of the same interval is equal to or greater than the set number, the defect determination unit 143 may determine that it is a periodic defect. For example, it is assumed that the number of identical intervals that have been set to determine periodic defects is 3, and the interval between defects included in line 1221 is the same interval. Since the number of identical intervals is 4 in line 1221, the defect judging unit 143 can finally It is determined that there is a periodic defect at a position corresponding to the row 1221 of the optical film roll.

缺陷檢測資訊生成部144可於檢測到週期性缺陷時,生成有關檢測的週期性缺陷的缺陷檢測資訊。此時,缺陷檢測資訊可包含例如有關光學薄膜的製程線之週期性缺陷的發生位置的資訊,光學薄膜的製程線之週期性缺陷的發生位置可根據光學薄膜上檢測到的週期性缺陷的發生位置來算出。例如缺陷檢測資訊生成部144可以光學薄膜的製程線之光學薄膜的搬運方向為基準,根據從光學薄膜的開始位置,到於光學薄膜檢測到的週期性缺陷的發生位置為止的距離,判斷光學薄膜的製程線之週期性缺陷的發生位置。 When the periodic defect is detected, the defect detection information generating unit 144 may generate defect detection information about the detected periodic defect. At this time, the defect detection information may include, for example, information on the occurrence positions of the periodic defects on the process line of the optical film, and the occurrence positions of the periodic defects on the process line of the optical film may be based on the occurrence of the periodic defects detected on the optical film. Position to calculate. For example, the defect detection information generating unit 144 can determine the optical film based on the distance from the starting position of the optical film to the occurrence position of the periodic defect detected by the optical film based on the transport direction of the optical film in the process line of the optical film. Occurrence of periodic defects in the process line.

另,依據本發明一實施形態,缺陷檢測資訊生成部144可將生成的缺陷檢測資訊,傳送至例如製程管理系統的管理者的終端裝置、製程線的作業人員的終端 裝置、或者製程線上的警報裝置,藉此對於週期性缺陷的發生,進行迅速的處置。 In addition, according to an embodiment of the present invention, the defect detection information generating unit 144 may transmit the generated defect detection information to, for example, a terminal device of a manager of a process management system or a terminal of an operator of a process line. The device or the alarm device on the process line can quickly deal with the occurrence of periodic defects.

第14圖為本發明一實施形態的光學薄膜的缺陷檢測方法的流程圖。 FIG. 14 is a flowchart of a defect detection method of an optical film according to an embodiment of the present invention.

參考第14圖,光學薄膜缺陷檢測裝置100從至少1個檢查裝置,接收光學薄膜輥(roll)的缺陷資訊(1410)。 Referring to FIG. 14, the optical film defect detection device 100 receives defect information of an optical film roll from at least one inspection device (1410).

其後,光學薄膜缺陷檢測裝置100根據接收的缺陷資訊,決定與光學薄膜輥相對應的二維平面上的缺陷位置(1420)。 Thereafter, the optical film defect detection device 100 determines a defect position on a two-dimensional plane corresponding to the optical film roll based on the received defect information (1420).

其後,光學薄膜缺陷檢測裝置100根據決定的缺陷位置,搜索二維平面上,有已設定的數目以上的缺陷存在的區域(1430)。 Thereafter, the optical film defect detection device 100 searches for a region on the two-dimensional plane where there are more than a set number of defects, based on the determined defect position (1430).

例如光學薄膜缺陷檢測裝置100可對於二維平面的各個缺陷位置,設定包含各個缺陷位置的一定大小的搜索區域,以各個缺陷位置為中心,依序變更搜索區域的位置,搜索各搜索區域中,有已設定的數目以上的缺陷存在的區域。 For example, the optical film defect detection device 100 may set a search area of a certain size including each defect position for each defect position on a two-dimensional plane, and sequentially change the position of the search area with each defect position as the center, and search each search area. There are areas where a set number of defects exist.

作為其他例,光學薄膜缺陷檢測裝置100可設定二維平面所含的各個缺陷位置為中心座標之一定大小的複數個搜索區域,搜索各搜索區域中,有已設定的數目以上的缺陷存在的區域。 As another example, the optical film defect detection device 100 may set a plurality of search areas of a certain size in which each defect position contained in the two-dimensional plane is a central coordinate, and search each search area for a region in which more than a set number of defects exist. .

作為進一步其他例,光學薄膜缺陷檢測裝置100可將二維平面,分割為一定大小的複數個搜索區域,搜索各搜索區域中,有前述已設定的數目以上的缺陷存在的區域。 As yet another example, the optical film defect detection device 100 may divide a two-dimensional plane into a plurality of search areas of a certain size, and search each search area for areas in which more than the previously set number of defects exist.

作為進一步其他例,光學薄膜缺陷檢測裝置100可於二維平面,設定一定大小的搜索區域,恰以一定距離,依序變更前述搜索區域的位置,搜索各搜索區域中,有已設定的數目以上的缺陷存在的區域。 As a further example, the optical film defect detection device 100 may set a search area of a certain size on a two-dimensional plane, and change the position of the aforementioned search area in sequence at a certain distance, and search each search area for a set number or more. The area where the defect exists.

其後,光學薄膜缺陷檢測裝置100根據搜索過的區域所含的缺陷的數目及缺陷間的間隔,檢測週期性缺陷(1440)。 Thereafter, the optical film defect detection device 100 detects periodic defects based on the number of defects contained in the searched area and the interval between the defects (1440).

其後,光學薄膜缺陷檢測裝置100生成有關檢測到的週期性缺陷的缺陷檢測資訊(1450)。此時,缺陷檢測資訊可包含例如有關光學薄膜的製程線之週期性缺陷的發生位置的資訊。 Thereafter, the optical film defect detection device 100 generates defect detection information on the detected periodic defects (1450). At this time, the defect detection information may include, for example, information about the occurrence position of the periodic defect in the process line of the optical film.

其後,光學薄膜缺陷檢測裝置100將生成的缺陷檢測資訊,傳送至例如製程管理系統的管理者的終端裝置、製程線的作業人員的終端裝置、或者製程線上的警報裝置(1460)。 Thereafter, the optical film defect detection device 100 transmits the generated defect detection information to, for example, a terminal device of a manager of a process management system, a terminal device of a worker on a process line, or an alarm device on a process line (1460).

第15圖係表示本發明一實施形態的週期性缺陷的檢測過程的流程圖。 Fig. 15 is a flowchart showing a periodic defect detection process according to an embodiment of the present invention.

參考第15圖,光學薄膜缺陷檢測裝置100儲存第14圖的搜索階段1430搜索過的區域的位置(1510)。此時,光學薄膜缺陷檢測裝置100可利用二維陣列,儲存搜索過的區域的位置資訊。 Referring to FIG. 15, the optical film defect detection device 100 stores the position of the area searched in the search stage 1430 of FIG. 14 (1510). At this time, the optical film defect detection device 100 may use a two-dimensional array to store position information of the searched area.

其後,光學薄膜缺陷檢測裝置100根據搜索過的區域的位置,決定缺陷候補區域(1520)。 Thereafter, the optical film defect detection device 100 determines a defect candidate region based on the position of the searched region (1520).

例如光學薄膜缺陷檢測裝置100可將搜索過的區域的各個,決定為缺陷候補區域。 For example, the optical film defect detection device 100 may determine each of the searched regions as a defect candidate region.

作為其他例,光學薄膜缺陷檢測裝置100可於搜索過的區域中,存在有重疊或連續的區域時,統合重疊或連續的區域,將經統合的區域決定為缺陷候補區域。 As another example, the optical film defect detection device 100 may integrate the overlapping or continuous areas when the searched area has overlapping or continuous areas, and determine the integrated area as a defect candidate area.

作為進一步其他例,光學薄膜缺陷檢測裝置100可對於搜索過的區域或經統合的區域的各個,將包含各區域所含的全部缺陷的最小尺寸區域,決定為缺陷候補區域。 As still another example, the optical film defect detection device 100 may determine, as each of the searched regions or the integrated regions, a minimum size region including all defects included in each region as a candidate defect region.

其後,光學薄膜缺陷檢測裝置100根據缺陷候補區域所含的缺陷的數目及缺陷間的間隔,判斷有無週期性缺陷存在(1530)。 Thereafter, the optical film defect detection device 100 determines the presence or absence of a periodic defect based on the number of defects contained in the defect candidate area and the interval between the defects (1530).

例如光學薄膜缺陷檢測裝置100可以缺陷候補區域的輥的長度方向為基準,根據同一行所含的缺陷的數目為已設定之值以上,且該含所含的缺陷間的間隔中,同一間隔的數目為已設定之值以上時,判斷為週期性缺陷。 For example, the optical film defect detection device 100 may use the length direction of the roller in the defect candidate area as a reference, and the number of defects included in the same row is equal to or greater than a set value. Among the intervals between the included defects, the same interval When the number is more than the set value, it is judged as a periodic defect.

於第15圖及第16圖的流程圖,分為複數個階段來表示前述方法,但至少一部分的階段可改變順序執行、與其他階段組合執行、省略、細分階段執行、或附加未圖示的1個以上的階段而執行均可。 The flowcharts in Figures 15 and 16 are divided into multiple stages to represent the aforementioned method, but at least some of the stages can be executed in a different order, combined with other stages, omitted, subdivided into stages, or added to the flowchart not shown. It can be executed in more than one stage.

另,本發明的實施形態可包含電腦可讀取的記憶媒體,該記憶媒體包含為了以電腦執行本說明書記述的方法的程式。前述電腦可讀取的記憶媒體可單獨或組合包含程式指令、區域資料檔、區域資料構造等。前述媒體為特別設計為本發明用而構成,或於電腦軟體領域一般會使用的媒體均可。電腦可讀取的記憶媒體的範例包含:硬碟、軟磁碟及磁帶等磁性媒體;CD-ROM、DVD等光學記錄媒體;軟磁碟等磁性-光學媒體;及ROM、RAM、快閃記憶體等特別構成為儲存程式指令而執行的硬體裝置。程式指令的範例不僅包含如由編譯器寫成的機械語碼,還可包含利用直譯器,可由電腦執行的高階語言碼。 The embodiment of the present invention may include a computer-readable storage medium including a program for executing a method described in this specification by a computer. The foregoing computer-readable memory media may include program instructions, regional data files, regional data structures, etc., alone or in combination. The aforementioned media may be specially designed for the purpose of the present invention, or may be media generally used in the field of computer software. Examples of computer-readable storage media include: magnetic media such as hard disks, floppy disks, and magnetic tapes; optical recording media such as CD-ROMs and DVDs; magnetic-optical media such as floppy disks; and ROM, RAM, flash memory, etc. A hardware device specially constructed to execute program instructions. Examples of program instructions include not only mechanical codes written by a compiler, but also high-level language codes that can be executed by a computer using an interpreter.

以上說明了本發明的數個實施形態,但該等實施形態是例示作為範例,並未意圖限定發明的範圍。該等新實施形態得以其他各種形態來實施,可於不脫離發明要旨的範圍,進行各種省略、置換、變更。該等實施形態或其變形包含於發明的範圍或要旨,並且包含於申請專利範圍所記載的發明、及其同等的範圍內。 As mentioned above, although several embodiment of this invention was described, these embodiment is shown as an example, and it does not intend to limit the scope of the invention. These new embodiments can be implemented in various other forms, and various omissions, substitutions, and changes can be made without departing from the scope of the invention. These embodiments and modifications thereof are included in the scope or gist of the invention, and are included in the invention described in the scope of patent application, and the equivalent scope thereof.

Claims (27)

一種光學薄膜缺陷檢測裝置,包含:接收部,從至少1個檢查裝置,接收光學薄膜輥(roll)的缺陷資訊;缺陷位置決定部,根據前述缺陷資訊,決定與前述光學薄膜輥相對應的二維平面上的缺陷位置;搜索部,設定一定大小的搜索區域,並根據前述缺陷位置,在改變前述搜索區域的位置的同時,搜索前述二維平面上,有已設定的數目以上的缺陷存在的區域;及缺陷檢測部,根據前述搜索過的區域所含的缺陷的數目及缺陷間的間隔,檢測週期性缺陷。An optical film defect detection device includes a receiving unit that receives defect information of an optical film roll from at least one inspection device; a defect position determining unit determines two corresponding to the optical film roll according to the defect information. Defect locations on the two-dimensional plane; the search unit sets a search area of a certain size, and searches for the presence of more than a set number of defects on the two-dimensional plane while changing the position of the search area based on the defect location. Regions; and a defect detection unit that detects periodic defects based on the number of defects contained in the searched region and the interval between the defects. 如申請專利範圍第1項之光學薄膜缺陷檢測裝置,其中前述搜索部係對於各個缺陷位置,設定包含前述各個缺陷位置的前述搜索區域,以前述各個缺陷位置為中心,依序變更前述搜索區域的位置,搜索各搜索區域中,有前述已設定的數目以上的缺陷存在的區域。For example, the optical film defect detection device of the first patent application range, wherein the search unit sets the search area including the respective defect locations for each defect location, and sequentially changes the search area of the search area with the respective defect locations as the center. The position is searched in each of the search areas, and there are areas in which more than the previously set number of defects exist. 如申請專利範圍第1項之光學薄膜缺陷檢測裝置,其中前述搜索區域係包含以各個缺陷位置為中心座標之一定大小的複數個搜索區域,前述搜索部搜索各搜索區域中,有前述已設定的數目以上的缺陷存在的區域。For example, the optical film defect detection device of the first patent application range, wherein the foregoing search area includes a plurality of search areas of a certain size with each defect position as a center coordinate, and the search unit searches each of the search areas, including the previously set Areas where more than a few defects exist. 如申請專利範圍第1項之光學薄膜缺陷檢測裝置,其中前述搜索區域包括將前述二維平面,分割為一定大小的複數個搜索區域,前述搜索部搜索前述分割的各搜索區域中,有前述已設定的數目以上的缺陷存在的區域。For example, the optical film defect detection device according to the first patent application range, wherein the search area includes the two-dimensional plane divided into a plurality of search areas of a certain size, and the search section searches the divided search areas, including An area where a set number or more of defects exist. 如申請專利範圍第1項之光學薄膜缺陷檢測裝置,其中前述搜索部恰以一定距離,依序變更前述搜索區域的位置,搜索各搜索區域中,有前述已設定的數目以上的缺陷存在的區域。For example, the optical film defect detection device of the first patent application range, wherein the search unit sequentially changes the position of the search area at a certain distance, and searches each search area for areas in which more than the previously set number of defects exist. . 如申請專利範圍第1項之光學薄膜缺陷檢測裝置,其中前述缺陷檢測部包含:記憶體部,儲存前述搜索過的區域的位置;候補區域決定部,根據前述搜索過的區域的位置,決定缺陷候補區域;及缺陷判斷部,根據前述缺陷候補區域所含的缺陷的數目及缺陷間的間隔,判斷前述缺陷候補區域內有無前述週期性缺陷的存在。For example, the optical film defect detection device of the first patent application range, wherein the defect detection section includes: a memory section that stores the position of the searched area; a candidate area determination section determines a defect based on the position of the searched area The candidate area; and the defect judgment unit, based on the number of defects contained in the defect candidate area and the interval between the defects, determines whether the periodic defect exists in the defect candidate area. 如申請專利範圍第6項之光學薄膜缺陷檢測裝置,其中前述候補區域決定部將前述搜索過的區域,決定為前述缺陷候補區域。For example, the optical film defect detection device of the sixth scope of the application for patent, wherein the candidate region determining section determines the searched region as the defect candidate region. 如申請專利範圍第7項之光學薄膜缺陷檢測裝置,其中前述候補區域決定部係於搜索過的區域中,存在有重疊或連續的區域時,統合前述重疊或連續的區域,將經統合的區域決定為前述缺陷候補區域。For example, the optical film defect detection device of the seventh scope of the application for a patent, wherein the candidate area determination unit is located in the searched area, and when there is an overlapping or continuous area, the overlapping or continuous area is integrated, and the integrated area is integrated. It is determined as the aforementioned defect candidate area. 如申請專利範圍第8項之光學薄膜缺陷檢測裝置,其中前述候補區域決定部係對於搜索過的區域或前述經統合的區域的各個,將包含各區域所含的全部缺陷的最小尺寸的區域,決定為前述缺陷候補區域。For example, the optical film defect detection device of the eighth patent application range, wherein the candidate region determination unit is an area having the smallest size of all defects contained in each region for each of the searched region or the integrated region, It is determined as the aforementioned defect candidate area. 如申請專利範圍第6項之光學薄膜缺陷檢測裝置,其中前述記憶體部利用二維陣列,儲存前述搜索過的區域的位置資訊。For example, the optical film defect detection device of the sixth scope of the patent application, wherein the memory section uses a two-dimensional array to store position information of the searched area. 如申請專利範圍第6項之光學薄膜缺陷檢測裝置,其中前述缺陷檢測部係於前述缺陷候補區域,以前述輥的長度方向為基準,當同一行所含的缺陷的數目為已設定之值以上,且該行所含的缺陷間的間隔中之同一間隔的數目為已設定之值以上時,判斷為前述週期性缺陷。For example, the optical film defect detection device of the sixth scope of the application for patent, wherein the aforementioned defect detection section is located in the aforementioned candidate area of the defect, and based on the length direction of the aforementioned roller, when the number of defects contained in the same row is more than a set value When the number of the same interval among the intervals between the defects included in the row is equal to or greater than the set value, it is judged as the aforementioned periodic defect. 如申請專利範圍第1項之光學薄膜缺陷檢測裝置,其中前述缺陷檢測部包含缺陷檢測資訊生成部,其於檢測到前述週期性缺陷時,生成缺陷檢測資訊,而前述缺陷檢測資訊包含有關光學薄膜的製程線之前述週期性缺陷的發生位置的資訊。For example, the optical film defect detection device of the first patent application range, wherein the aforementioned defect detection section includes a defect detection information generating section which generates defect detection information when the aforementioned periodic defects are detected, and the aforementioned defect detection information includes relevant optical films Information on the occurrence of the aforementioned periodic defects in the process line of. 如申請專利範圍第12項之光學薄膜缺陷檢測裝置,其中前述缺陷檢測資訊生成部將前述缺陷檢測資訊,傳送至製程管理系統的管理者的終端裝置、前述光學薄膜的製程線的作業人員的終端裝置、及製程線上的警報裝置中之至少一者。For example, the optical film defect detection device of the 12th patent application scope, wherein the aforementioned defect detection information generating section transmits the aforementioned defect detection information to a terminal device of a manager of a process management system, and a terminal of an operator of a process line of the aforementioned optical film At least one of a device and an alarm device on a process line. 一種光學薄膜缺陷檢測方法,包含如下階段:從至少1個檢查裝置,接收光學薄膜輥(roll)的缺陷資訊的階段;根據前述缺陷資訊,決定與前述光學薄膜輥相對應的二維平面上的缺陷位置的階段;設定一定大小的搜索區域,並根據前述缺陷位置,在改變前述搜索區域的位置的同時,搜索前述二維平面上,有已設定的數目以上的缺陷存在的區域的階段;及根據前述搜索過的區域所含的缺陷的數目及缺陷間的間隔,檢測週期性缺陷的階段。An optical film defect detection method includes the following stages: a stage of receiving defect information of an optical film roll from at least one inspection device; and determining a two-dimensional plane corresponding to the optical film roll according to the foregoing defect information. The stage of the defect location; a stage of setting a search area of a certain size, and searching for the area on the two-dimensional plane where there are more than a set number of defects, while changing the position of the search area based on the defect location; and The period of periodic defects is detected based on the number of defects contained in the searched area and the interval between the defects. 如申請專利範圍第14項之光學薄膜缺陷檢測方法,其中前述搜索階段係對於前述二維平面的各個缺陷位置,設定包含前述各個缺陷位置的前述搜索區域,以前述各個缺陷位置為中心,依序變更前述搜索區域的位置,搜索各搜索區域中,有前述已設定的數目以上的缺陷存在的區域。For example, the defect detection method of optical film defect No. 14 of the application, wherein the aforementioned search stage is to set the aforementioned search area including the aforementioned respective defect positions for each of the aforementioned defect positions of the two-dimensional plane, centering on the aforementioned respective defect positions in order, The position of the search area is changed, and in each search area, areas in which more than the previously set number of defects exist are searched. 如申請專利範圍第14項之光學薄膜缺陷檢測方法,其中前述搜索區域包含以各個缺陷位置為中心座標的複數個搜索區域,前述搜索階段搜索各搜索區域中,有前述已設定的數目以上的缺陷存在的區域。For example, the defect detection method for an optical film according to item 14 of the patent application, wherein the search area includes a plurality of search areas with each defect position as a center coordinate, and each search area is searched in the search stage, and there are more than the previously set number of defects. Existing area. 如申請專利範圍第14項之光學薄膜缺陷檢測方法,其中前述搜索區域包括將前述二維平面,分割為一定大小的複數個搜索區域,前述搜索階段搜索分割的各搜索區域中,有前述已設定的數目以上的缺陷存在的區域。For example, the optical film defect detection method for item 14 of the patent application range, wherein the aforementioned search area includes dividing the aforementioned two-dimensional plane into a plurality of search areas of a certain size, and among the search areas divided during the aforementioned search stage, there are the aforementioned settings The number of defects above the area. 如申請專利範圍第14項之光學薄膜缺陷檢測方法,其中前述搜索階段依序變更前述搜索區域的位置,搜索各搜索區域中,有前述已設定的數目以上的缺陷存在的區域。For example, in the method for detecting an optical film defect according to item 14 of the patent application, the search phase sequentially changes the position of the search area, and searches each search area for areas in which more than the previously set number of defects exist. 如申請專利範圍第14項之光學薄膜缺陷檢測方法,其中前述檢測階段包含如下階段:儲存前述搜索過的區域的位置的階段;根據前述搜索過的區域的位置,決定缺陷候補區域的階段;及根據前述缺陷候補區域所含的缺陷的數目及缺陷間的間隔,判斷前述缺陷候補區域內有無前述週期性缺陷的存在的階段。For example, the method for detecting an optical film defect according to item 14 of the patent application, wherein the aforementioned detection stage includes the following stages: a stage of storing the position of the searched region; a stage of determining a candidate defect region based on the position of the searched region; and Based on the number of defects included in the defect candidate area and the interval between the defects, it is determined whether there is a stage in which the periodic defect exists in the defect candidate area. 如申請專利範圍第19項之光學薄膜缺陷檢測方法,其中前述決定缺陷候補區域的階段,係將前述搜索過的區域,決定為前述缺陷候補區域。For example, in the method for detecting a defect of an optical film according to item 19 of the application, in the aforementioned stage of determining a candidate candidate region, the previously searched region is determined as the aforementioned candidate candidate region. 如申請專利範圍第20項之光學薄膜缺陷檢測方法,其中前述決定缺陷候補區域的階段,係於前述搜索過的區域中,存在有重疊或連續的區域時,統合前述重疊或連續的區域,將經統合的區域決定為前述缺陷候補區域。For example, the optical film defect detection method of the patent application No. 20, wherein the aforementioned stage of determining candidate defect areas is in the searched area, and when there are overlapping or continuous areas, the overlapping or continuous areas are integrated, and The integrated area is determined as the aforementioned defect candidate area. 如申請專利範圍第21項之光學薄膜缺陷檢測方法,其中前述決定缺陷候補區域的階段,係對於前述搜索過的區域或前述經統合的區域的各個,將包含各區域所含的全部缺陷的最小尺寸的區域,決定為前述缺陷候補區域。For example, the optical film defect detection method of the scope of application for patent No. 21, wherein the aforementioned stage for determining candidate defect areas is the minimum of all defects contained in each area for the searched area or the integrated area. The area of the size is determined as the aforementioned defect candidate area. 如申請專利範圍第19項之光學薄膜缺陷檢測方法,其中前述儲存階段利用二維陣列,儲存前述搜索過的區域的位置資訊。For example, the defect detection method for an optical film according to item 19 of the application, wherein the storage stage uses a two-dimensional array to store the position information of the searched area. 如申請專利範圍第19項之光學薄膜缺陷檢測方法,其中前述判斷階段係於前述缺陷候補區域,以前述輥的長度方向為基準,當同一行所含的缺陷的數目為已設定之值以上,且該行所含的缺陷間的間隔中之同一間隔的數目為已設定之值以上時,判斷為前述週期性缺陷。For example, the optical film defect detection method for item 19 of the patent application range, wherein the aforementioned judgment stage is in the aforementioned candidate area of the defect, based on the length direction of the aforementioned roller, and when the number of defects contained in the same row is more than a set value, When the number of the same intervals among the intervals between the defects included in the row is a set value or more, it is judged as the aforementioned periodic defect. 如申請專利範圍第14項之光學薄膜缺陷檢測方法,其中進一步包含於檢測到前述週期性缺陷時,生成缺陷檢測資訊的階段,而前述缺陷檢測資訊包含有關光學薄膜的製程線之前述週期性缺陷的發生位置的資訊。For example, the method for detecting defect of an optical film according to item 14 of the application, further includes a stage of generating defect detection information when the aforementioned periodic defect is detected, and the aforementioned defect detection information includes the aforementioned periodic defect related to the process line of the optical film Of where it happened. 如申請專利範圍第25項之光學薄膜缺陷檢測方法,其中進一步包含將前述缺陷檢測資訊,傳送至製程管理系統的管理者的終端裝置、前述光學薄膜的製程線的作業人員的終端裝置、及製程線上的警報裝置中之至少一者的階段。For example, the optical film defect detection method of the scope of application for patent No. 25, which further includes transmitting the aforementioned defect detection information to a terminal device of a manager of a process management system, a terminal device of an operator of a process line of the aforementioned optical film, and a process Stage of at least one of the online alarm devices. 一種電腦程式,其與硬體結合,且儲存於記錄媒體,用以執行如下階段:從至少1個檢查裝置,接收光學薄膜輥(roll)的缺陷資訊的階段;根據前述缺陷資訊,決定與前述光學薄膜輥相對應的二維平面上的缺陷位置的階段;設定一定大小的搜索區域,並根據前述缺陷位置,在改變前述搜索區域的位置的同時,搜索前述二維平面上,有已設定的數目以上的缺陷存在的區域的階段;及根據前述搜索過的區域所含的缺陷的數目及缺陷間的間隔,檢測週期性缺陷的階段。A computer program that is integrated with hardware and stored in a recording medium to perform the following stages: a stage of receiving defect information of an optical film roll from at least one inspection device; and based on the foregoing defect information, a decision is made with the foregoing The stage of the defect position on the two-dimensional plane corresponding to the optical film roll; a search area of a certain size is set, and according to the defect position, the position of the search area is changed, and the two-dimensional plane is searched. A stage of an area in which more than a number of defects are present; and a stage of detecting a periodic defect based on the number of defects contained in the searched area and the interval between the defects.
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