TWI665457B - Measuring system and its measuring method thereof - Google Patents

Measuring system and its measuring method thereof Download PDF

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TWI665457B
TWI665457B TW107105044A TW107105044A TWI665457B TW I665457 B TWI665457 B TW I665457B TW 107105044 A TW107105044 A TW 107105044A TW 107105044 A TW107105044 A TW 107105044A TW I665457 B TWI665457 B TW I665457B
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measurement
item
procedure
specific
test
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TW107105044A
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TW201935024A (en
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林祐瑄
劉大綱
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京元電子股份有限公司
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Abstract

本發明係提供一種量測系統,包含:主控裝置以及複數個量測工作站。 每個量測工作站各自與主控裝置連結,且各自對應一待測元件;其中,量測工作站根據主控裝置的指令而同時對所對應的待測元件進行共同項目量測程序,且量測工作站更依照所對應的待測元件的需求而各自進行可調整量測項目的特定需求項目量測程序,其中至少二特定需求項目量測程序的部分進行期間會重疊。 The invention provides a measurement system, which includes: a main control device and a plurality of measurement stations. Each measurement workstation is connected to the main control device and corresponds to a component under test. Among them, the measurement workstation simultaneously performs a common project measurement procedure on the corresponding component under test according to the instruction of the main control device, and measures The workstations further perform specific demand item measurement procedures of adjustable measurement items according to the requirements of the corresponding components to be tested, in which at least two specific demand item measurement procedures have overlapping periods.

Description

量測系統及其量測方法 Measuring system and measuring method

本發明係關於一種量測系統及其量測方法,特別係一種適用於量測多個積體電路的量測系統及其量測方法。 The invention relates to a measuring system and a measuring method, and particularly relates to a measuring system and a measuring method suitable for measuring a plurality of integrated circuits.

習知的積體電路(Integrated circuit,IC)雖可同步進行量測,但除了共同量測的項目可以同時進行外,其餘量測項目皆必須依序進行,即一個IC的量測結束後才會輪到下一個IC,因此若IC數量較多,就必須耗費大量的時間成本。此外,IC在接收量測訊號後,可能需要一段反應時間,而習知的量測機制必須等到所有IC的反應時間皆結束後,才能進行後續的量測,由於每個IC的反應時間不一定相同,因此亦會耗費許多等待時間。另外,有些IC的特性必須在反應時間結束後馬上進行量測項目,因此這些IC的習知量測機制必須是一個IC的反應時間與量測項目結束後,才輪到下一個IC進行反應時間與量測項目,如此將耗費更多的時間,造成效率非常低落。 Although the conventional integrated circuit (IC) can perform measurement simultaneously, except for the common measurement items, the other measurement items must be performed sequentially, that is, after the measurement of an IC is completed The next IC is the turn, so if the number of ICs is large, a lot of time cost must be consumed. In addition, after the IC receives the measurement signal, it may take a period of response time, and the conventional measurement mechanism must wait until the response time of all ICs is over before the subsequent measurement, because the response time of each IC is not necessarily Same, so it will take a lot of waiting time. In addition, the characteristics of some ICs must be measured immediately after the end of the response time, so the conventional measurement mechanism of these ICs must be the response time of one IC and the end of the measurement item before the next IC's response time. And measurement items, this will take more time, resulting in very low efficiency.

有鑑於此,本發明提供一種量測系統及其量測方法,來解決上述的問題。 In view of this, the present invention provides a measurement system and a measurement method to solve the above problems.

本發明的一目的係提供一種量測系統,包含:一主控裝置以及複數個量測工作站。量測工作站各自與主控裝置連結,且量測工作站各自對應一待測元件;其中量測工作站根據主控裝置的指令而同時對所對應的待測元件進行一共同項目量測程序,且該等量測工作站更依照所對應的待測元件的需求而各自進行可調整量測項目的一特定項目量測程序,其中至少二特定需求項目量測程序的部分進行期間會重疊。藉此,本發明可節省大量的時間成本。 An object of the present invention is to provide a measurement system including: a main control device and a plurality of measurement stations. The measurement workstations are each connected to the main control device, and each of the measurement workstations corresponds to a component under test; wherein the measurement workstation simultaneously performs a common project measurement procedure on the corresponding component under test according to the instruction of the main control device, and the The isometry workstation further performs a specific item measurement procedure of an adjustable measurement item according to the requirements of the corresponding DUT, and at least two specific requirement item measurement procedure parts overlap during the execution period. Therefore, the present invention can save a lot of time and cost.

在一實施例中,當待測元件的共同項目量測程序及特定量測項目程序完成後,量測工作站各自將一量測結果傳送至主控裝置。在一實施例中,待測元件的特定項目量測程序是在二共同項目量測程序之間進行。在一實施例中,共同項目量測程序或特定項目量測程序包括積體電路的訊號反應期間與實際量測期間。在一實施例中,量測工作站各自進行特定項目量測程序。在一實施例中,當該等待測元件的該共同項目量測程序完成後,每個量測工作站更依照所對應的待測元件的該共同項目量測程序的量測結果來調整該待測元件的該特定項目量測程序。且更進一步地,當每個待測元件的該特定項目量測程序調整完後,該等待測元件各自接收對應其特定項目量測程序的一量測訊號,並進入各自的訊號反應期間,並於訊號反應期間結束後進入各自的該特定項目量測程序;其中,當其中一待測元件的訊號反應出現異常時,其餘待測元件持續進行所對應的訊號反應期間,並於訊號反應期間結束後進入各自的該特定項目量測程序。 In one embodiment, after the common item measurement procedure and the specific measurement item procedure of the components to be tested are completed, the measurement workstations respectively transmit a measurement result to the main control device. In one embodiment, the specific item measurement procedure of the device under test is performed between two common item measurement procedures. In one embodiment, the common item measurement procedure or the specific item measurement procedure includes a signal response period of the integrated circuit and an actual measurement period. In one embodiment, the measurement workstations each perform a specific project measurement procedure. In an embodiment, after the common item measurement procedure of the waiting-for-measurement component is completed, each measurement workstation further adjusts the test-measurement according to the measurement result of the common item measurement procedure of the corresponding DUT. The component-specific measurement procedure for this component. Furthermore, after the specific item measurement procedure of each DUT is adjusted, the waiting-measurement element receives a measurement signal corresponding to its specific item measurement procedure, and enters its respective signal response period, and After the end of the signal response period, each of them enters the measurement process of the specific item. Among them, when the signal response of one of the components under test is abnormal, the other components under test continue to perform the corresponding signal response period, and the signal response period ends. Then enter their respective measurement procedures for that specific item.

本發明的另一目的係提供一種量測方法,由一量測系統執行,其中量測系統包括一主控裝置及該主控裝置連結的複數個量測工作站,其中量測工作站各自對應一待測元件,量測方法包含以下步驟:使量測工作站根據主控 裝置的指令而同時對所對應的待測元件進行一共同項目量測程序;以及使量測工作站依照所對應的待測元件的需求而各自進行可調整量測項目的一特定項目量測程序,其中至少二特定需求項目量測程序的部分進行期間會重疊。藉此,本發明可節省大量的時間成本。 Another object of the present invention is to provide a measurement method executed by a measurement system. The measurement system includes a main control device and a plurality of measurement workstations connected to the main control device. Measuring element, the measuring method includes the following steps: making the measuring station according to the main control Instructions of the device and simultaneously perform a common item measurement procedure on the corresponding DUT; and enable the measurement workstation to perform a specific item measurement procedure on each of the adjustable measurement items according to the requirements of the corresponding DUT, At least two of the specific demand item measurement procedures will have overlapping periods. Therefore, the present invention can save a lot of time and cost.

在一實施例中,更包含步驟:當待測元件的共同項目量測程序及特定項目量測程序完成後,藉由量測工作站將一量測結果傳送至主控裝置。在一實施例中,待測元件的特定項目量測程序是在二共同項目量測程序之間進行。在一實施例中,共同項目量測程序或該特定項目量測程序包括積體電路的訊號反應期間與實際量測期間。在一實施例中,量測工作站各自進行該特定項目量測程序。在一實施例中,其中使每個量測工作站依照所對應的該待測元件的需求而各自進行可調整量測項目的特定項目量測程序之步驟更包含子步驟:當該等待測元件的該共同項目量測程序完成後,根據各待測元件的該共同項目量測程序的量測結果,分別調整各待測元件的該特定項目量測程序。且更進一步地,當每個待測元件的該特定項目量測程序調整完後,使每個待測元件各自接收對應其特定項目量測程序的一量測訊號,並進入各自的訊號反應期間,並於訊號反應期間結束後進入各自的該特定項目量測程序;其中,當其中待測元件的訊號反應出現異常時,使其餘待測元件持續進行所對應的訊號反應期間,並於訊號反應期間結束後進入各自的該特定項目量測程序。 In one embodiment, the method further includes the steps of: after the common item measurement procedure and the specific item measurement procedure of the components to be tested are completed, transmitting a measurement result to the main control device through the measurement workstation. In one embodiment, the specific item measurement procedure of the device under test is performed between two common item measurement procedures. In one embodiment, the common item measurement program or the specific item measurement program includes a signal response period of the integrated circuit and an actual measurement period. In an embodiment, the measurement workstations each perform the specific item measurement procedure. In an embodiment, the steps of causing each measurement station to perform a specific item measurement procedure of an adjustable measurement item according to the corresponding requirements of the device under test further include sub-steps: After the common item measurement program is completed, the specific item measurement program of each test element is adjusted according to the measurement results of the common item measurement program of each test element. Furthermore, after the measurement procedure of the specific item of each DUT is adjusted, each DUT receives a measurement signal corresponding to its specific item measurement procedure and enters its own signal response period. , And enter the respective specific item measurement procedure after the signal response period ends; when the signal response of the component under test is abnormal, the remaining signal components continue to perform the corresponding signal response period, and the signal response After the end of the period, enter each of the specific project measurement procedures.

1‧‧‧量測系統 1‧‧‧ measurement system

10‧‧‧主控裝置 10‧‧‧Master Control Device

21~24‧‧‧量測工作站 21 ~ 24‧‧‧Measurement Workstation

30‧‧‧量測機台 30‧‧‧Measuring machine

41~44‧‧‧待測元件 41 ~ 44‧‧‧DUT

50‧‧‧伺服器 50‧‧‧Server

S21~S25‧‧‧步驟 Steps S21 ~ S25‧‧‧‧

Test_com‧‧‧共同項目量測程序 Test_com‧‧‧Common project measurement procedure

Test_1~Test_4‧‧‧特定項目量測程序 Test_1 ~ Test_4‧‧‧‧Specific project measurement procedures

O1‧‧‧重疊期間 O1‧‧‧ Overlap period

S31~S36‧‧‧步驟 S31 ~ S36‧‧‧step

S41~S47‧‧‧步驟 S41 ~ S47‧‧‧step

S51~S56‧‧‧步驟 S51 ~ S56‧‧‧step

S61~S66‧‧‧步驟 S61 ~ S66‧‧‧step

圖1是本發明第一實施例的量測系統的系統架構示意圖; 圖2是本發明第一實施例的量測系統所執行的量測方法的步驟流程圖;圖3(A)是本發明第一實施例的量測系統的量測方法的詳細流程圖;圖3(B)是本發明第一實施例的量測情形與習知技術的運作情形比較示意圖;圖4(A)是本發明第二實施例的量測系統的量測方法的詳細流程圖;圖4(B)是本發明第二實施例的量測情形與習知技術的運作情形比較示意圖;圖5(A)是本發明第三實施例的量測系統的量測方法的詳細流程圖;圖5(B)是本發明第三實施例的量測情形與習知技術的運作情形比較示意圖;圖6(A)是本發明第四實施例的量測系統的量測方法的詳細流程圖 1 is a schematic diagram of a system architecture of a measurement system according to a first embodiment of the present invention; 2 is a flowchart of the steps of the measurement method performed by the measurement system of the first embodiment of the present invention; FIG. 3 (A) is a detailed flowchart of the measurement method of the measurement system of the first embodiment of the present invention; 3 (B) is a schematic diagram of a comparison between the measurement situation of the first embodiment of the present invention and the operation of the conventional technology; FIG. 4 (A) is a detailed flowchart of the measurement method of the measurement system of the second embodiment of the present invention; FIG. 4 (B) is a schematic diagram of a comparison between the measurement situation of the second embodiment of the present invention and the operation of the conventional technology; FIG. 5 (A) is a detailed flowchart of the measurement method of the measurement system of the third embodiment of the present invention 5 (B) is a schematic diagram of a comparison between the measurement situation of the third embodiment of the present invention and the operation of the conventional technology; FIG. 6 (A) is a detailed flow of the measurement method of the measurement system of the fourth embodiment of the present invention Figure

圖6(B)是本發明第四實施例的量測方法的運作情形示意圖。 FIG. 6 (B) is a schematic diagram of the operation of the measurement method according to the fourth embodiment of the present invention.

以下將透過多個實施例說明本發明的量測設備的實施態樣及運作原理。本發明所屬技術領域中具有通常知識者,透過上述實施例可理解本發明的特徵及功效,而可基於本發明的精神,進行組合、修飾、置換或轉用。 In the following, implementation examples and operation principles of the measurement device of the present invention will be described through multiple embodiments. Those with ordinary knowledge in the technical field to which the present invention pertains can understand the features and effects of the present invention through the above-mentioned embodiments, and can combine, modify, replace or divert based on the spirit of the present invention.

本文所指的“連接”一詞係包括直接連接或間接連接等態樣,且並非限定。本文中關於”當…”、”…時”的一詞係表示”當下、之前或之後”,且並非限定。此外,本發明記載多個功效(或元件)時,若在多個功效(或元件)之間使用“或”一詞,係表示功效(或元件)可獨立存在,但亦不排除多個功效(或元件)可同時存在的態樣。另外,本發明中關於“連接”一詞,係表示包含直接連接及無線連接之態樣。再者,說明書中所使用的序數例如“第一實施例”、“第二實施例”等之用詞,以修飾本發明之實施例,其本身並不意含及代表實施例 有任何之前的序數,也不代表某一實施例與另一實施例的順序,該些序數的使用僅用來修飾不同的實施例,且不限定本發明只具有這些實施例。 The term "connected" as used herein includes aspects such as direct connection or indirect connection, and is not limited. The word "When ...", "... 时" in this article means "present, before or after" and is not limited. In addition, when multiple effects (or elements) are described in the present invention, if the word "or" is used between multiple effects (or elements), it means that the effects (or elements) can exist independently, but it does not exclude multiple effects. (Or elements) can exist simultaneously. In addition, the term "connected" in the present invention means a form including direct connection and wireless connection. Furthermore, the ordinal numbers used in the description, such as "first embodiment", "second embodiment", etc., to modify the embodiments of the present invention, are not intended to represent or represent the embodiments themselves. Any previous ordinal number does not represent the order of an embodiment and another embodiment. The use of these ordinal numbers is only used to modify different embodiments, and the invention is not limited to these embodiments.

圖1是本發明第一實施例的量測系統1的系統架構示意圖。如圖1所示,量測系統1包含一主控裝置10以及複數個量測工作站21~24。主控裝置10可與該等量測工作站21~24連結,因此該等量測工作站21~24可接收主控裝置10傳送的指令。該等量測工作站21~24可對應複數個待測元件41~44,其中每個量測工作站21~24可各自對應一個待測元件41~44,例如量測工作站21可對應待測元件41等,因此每個量測工作站21~24可控制一個待測元件41~44的量測程序。其中,該等量測工作站21~24可根據該主控裝置10的指令而同時進行一共同項目量測程序,以使該等待測元件41~44進行共同項目之量測。此外,該等量測工作站21~24可依照所對應的待測元件41~44的需求而各自進行一特定項目量測程序,且特定項目量測程序的量測項目可根據每個待測元件41~44共同項目之量測結果而動態調整(例如量測工作站21可根據待測元件41共同項目之量測結果而相應調整量測項目)。另外,至少二量測工作站(例如量測工作站21與量測工作站22)的特定項目量測程序的部分進行期間會重疊。需注意的是,本實施例中關於量測工作站21~24及待測元件41~44的數量僅是舉例,實際上本發明可具備更多或更少的數量。接下來將更詳細地說明本發明的元件及特徵。 FIG. 1 is a schematic diagram of a system architecture of a measurement system 1 according to a first embodiment of the present invention. As shown in FIG. 1, the measurement system 1 includes a main control device 10 and a plurality of measurement stations 21 to 24. The main control device 10 can be connected to the measurement stations 21 to 24, so the measurement stations 21 to 24 can receive instructions transmitted by the main control device 10. The measurement workstations 21 to 24 may correspond to a plurality of DUTs 41 to 44. Each of the measurement workstations 21 to 24 may correspond to a DUT 41 to 44, for example, the measurement workstation 21 may correspond to the DUT 41. Etc. Therefore, each measuring station 21 ~ 24 can control a measuring program of a DUT 41 ~ 44. Wherein, the measurement stations 21 to 24 may simultaneously perform a common item measurement procedure according to an instruction of the main control device 10, so that the waiting measurement elements 41 to 44 perform a common item measurement. In addition, these measurement workstations 21 to 24 can each perform a specific item measurement procedure according to the requirements of the corresponding DUT 41 to 44, and the measurement items of the specific item measurement procedure can be based on each DUT The measurement results of the common items 41 to 44 are dynamically adjusted (for example, the measurement station 21 can adjust the measurement items accordingly according to the measurement results of the common items 41 of the device to be tested). In addition, part of the measurement procedure of the specific item of the at least two measurement stations (for example, the measurement station 21 and the measurement station 22) may overlap. It should be noted that the number of the measurement stations 21 to 24 and the number of components to be measured 41 to 44 in this embodiment are merely examples, and in fact, the present invention may have a larger or smaller number. Next, the elements and features of the present invention will be described in more detail.

在一實施例中,主控裝置10可以是具備網路功能的電子裝置,且可具備處理器或控制器,例如桌上型電腦、工業電腦、筆記型電腦、智慧型手機、平板電腦、或其它類似裝置,且不限於此。在另一實施例中,主控裝置10亦可以投過其它形式實現,例如是架設於伺服器上的工作站、平台,或者是安 裝於電子裝置的主程式等,且不限於此。為使本發明更清楚,以下皆以主控裝置10為電腦的態樣來說明。 In an embodiment, the main control device 10 may be an electronic device with a network function, and may include a processor or a controller, such as a desktop computer, an industrial computer, a notebook computer, a smart phone, a tablet computer, or Other similar devices are not limited to this. In another embodiment, the main control device 10 may also be implemented in other forms, such as a workstation, a platform, or a security station mounted on a server. The main program and the like installed in the electronic device are not limited thereto. In order to make the present invention clearer, the following description uses the state where the main control device 10 is a computer as an example.

在一實施例中,量測工作站21~24可以是具備網路功能的電子裝置,且可具備處理器或控制器,例如可以是桌上型電腦、工業電腦、筆記型電腦、智慧型手機、平板電腦、或其它類似裝置,且不限於此。在另一實施例中,量測工作站21~24亦可以透過其它形式實現,例如是架設於伺服器上的工作站、平台、網頁,或者是安裝於電子裝置上的主程式等,又或者可直接設置於量測機台上,以作為量測機台的控制程式,且不限於此。為使說明更清楚,以下皆以量測工作站21~24為電腦的態樣來說明。此外,在一實施例中,一個量測工作站可對應一待測元件,但在其它實施例中,一個量測工作站亦可對應多個待測元件,因此“每個量測工作站各自對應一待測元件”的記載並不表示本發明限定為一個量測工作站僅對應一待測元件。而為使本發明更清楚,以下皆以一量測工作站對應一待測元件的態樣進行說明。 In an embodiment, the measurement workstations 21 to 24 may be electronic devices with network functions, and may be provided with a processor or controller. For example, the measurement workstations 21 to 24 may be desktop computers, industrial computers, notebook computers, smart phones, A tablet, or other similar device, and is not limited to this. In another embodiment, the measurement workstations 21 to 24 can also be implemented in other forms, such as a workstation, platform, webpage set up on a server, or a main program installed on an electronic device, or they can be directly It is set on the measuring machine as the control program of the measuring machine, and it is not limited to this. In order to make the description clearer, the following description is based on the measurement of the measuring stations 21 to 24 as a computer. In addition, in one embodiment, one measurement workstation can correspond to one component under test, but in other embodiments, one measurement workstation can also correspond to multiple components under test, so "each measurement workstation corresponds to one The description of “measurement element” does not mean that the present invention is limited to a measurement workstation corresponding to only one element to be measured. In order to make the present invention clearer, the following description is based on a measurement station corresponding to a component under test.

在一實施例中,待測元件41~44可以是積體電路(IC)或其它需要進行電性測試的電子元件。為使本發明更清楚,以下皆以待測元件41~44為IC的態樣進行說明。在一實施例中,待測元件41~44可置於一量測機台30的載體上,且待測元件41~44各自可具有多個接腳(PIN),接腳可與量測機台30的訊號輸出端電性連接,意即量測機台30可傳送訊號至待測元件41~44的接腳,以測試接腳是否正常。在一實施例中,一個量測機台30可同時量測複數個待測元件41~44,且量測機台30可分為多個子部分,每個子部分可各自對待測元件41~44進行不同量測,意即每個子部分可根據每個待測元件41~44共同項目之量測結果,傳送不同的量測訊號,但不限於此。此外,量測機台30可由量測工作站21~24來控制,例 如量測工作站21~24執行量測程式,使控制量測機台30執行實際的量測,藉此完成量測程序,但不限於此。 In one embodiment, the DUTs 41 to 44 may be integrated circuits (ICs) or other electronic components that need to be electrically tested. In order to make the present invention clearer, the following descriptions are based on the state where the DUTs 41 to 44 are ICs. In one embodiment, the DUTs 41 to 44 can be placed on the carrier of a measuring machine table 30, and the DUTs 41 to 44 can each have multiple pins (PIN), and the pins can be connected to the measuring machine. The signal output terminal of the station 30 is electrically connected, which means that the measuring machine 30 can send signals to the pins of the DUT 41 to 44 to test whether the pins are normal. In an embodiment, one measuring machine 30 can measure a plurality of test elements 41 to 44 at the same time, and the measuring machine 30 can be divided into a plurality of sub-sections, and each sub-section can be performed on each of the test elements 41-44. Different measurement means that each sub-section can transmit different measurement signals according to the measurement results of common items 41 to 44 of each DUT, but it is not limited to this. In addition, the measuring machine 30 can be controlled by the measuring stations 21-24, for example For example, the measurement stations 21 to 24 execute a measurement program, so that the control measurement machine 30 performs the actual measurement, thereby completing the measurement procedure, but it is not limited thereto.

在一實施例中,量測系統1可更包含一伺服器50。伺服器50可儲存包含多種測試項目的測試程式,主控裝置10可藉由網路從伺服器50下載測試程式,而量測工作站21~24可從主控裝置10處取得測試程式,並根據對應的待測元件41~44找出對應的測試項目,藉此進行量測程序。須注意的是,伺服器50並不限定為只儲存單一測試程式,意即不同量測項目可整合在同一個測試程式中,亦可分散為多個測試程式。 In one embodiment, the measurement system 1 may further include a server 50. The server 50 can store test programs containing various test items, the main control device 10 can download the test programs from the server 50 through the network, and the measurement stations 21 to 24 can obtain the test programs from the main control device 10, and Corresponding DUTs 41 to 44 find the corresponding test items, and perform the measurement procedure. It should be noted that the server 50 is not limited to storing only a single test program, which means that different measurement items can be integrated in the same test program, or can be dispersed into multiple test programs.

在一實施例中,共同項目量測程序可定義為所有待測元件41~44皆需測試的項目,因此待測元件41~44亦可同時進行共同項目量測程序。在一實施例中,特定項目量測程序則可根據每個待測元件41~44的特性而調整其量測項目,因此對於待測元件41~44而言,其特定項目量測程序可能具有不同的量測項目。此外,根據待測元件41~44的特性,其在接收量測訊號後,需經過一段訊號反應時間才會對量測訊號產生回應,因此這類型的待測元件41~44的特定項目量測程序可包含積體電路的訊號反應期間及特定量測項目的實際量測期間,但並非限定。 In one embodiment, the common item measurement program can be defined as an item that all of the DUTs 41 to 44 need to be tested, so the DUT 41 to 44 can also perform the common item measurement program at the same time. In an embodiment, the specific item measurement program can adjust its measurement items according to the characteristics of each of the DUTs 41-44. Therefore, for the DUT 41-44, the specific item measurement program may have Different measurement items. In addition, according to the characteristics of the DUT 41 ~ 44, after receiving the measurement signal, it takes a period of signal response time to respond to the measurement signal. Therefore, this type of DUT 41 ~ 44 measures specific items The program may include the signal response period of the integrated circuit and the actual measurement period of a specific measurement item, but is not limited.

接著將詳細說明本發明的量測方法。圖2是本發明第一實施例的量測系統1所執行的量測方法的步驟流程圖,並請同時參考圖1。首先步驟S21被執行,主控裝置10從伺服器50處下載測試程式,並傳送測試程式至量測工作站21~24。之後步驟S22被執行,主控裝置10傳送訊息至量測工作站21~24,以告知量測工作站21~24進入量測程序。之後步驟S23被執行,量測工作站21~24執行測試程式,並控制量測機台30對待測元件41~44進行共同項目量測程序。之後,步 驟S24被執行,當待測元件41~44的共同項目量測完成後,量測工作站21~24各自進行特定項目量測程序,其中特定項目量測程序的量測項目可依照每個待測元件41~44的需求而各自調整,且每個待測元件41~44的特定項目量測程序可同步進行,但並非限定。之後步驟S25被執行,當量測完成後,量測工作站21~24各自將量測結果傳送至主控裝置10,並由主控裝置10彙整量測結果。 Next, the measurement method of the present invention will be described in detail. FIG. 2 is a flowchart of the steps of the measurement method performed by the measurement system 1 according to the first embodiment of the present invention. Please refer to FIG. 1 at the same time. First, step S21 is executed. The main control device 10 downloads a test program from the server 50 and sends the test program to the measurement workstations 21-24. Step S22 is then executed, and the main control device 10 sends a message to the measurement stations 21 to 24 to inform the measurement stations 21 to 24 to enter the measurement procedure. Step S23 is then executed, the measurement stations 21 to 24 execute a test program, and control the measurement machine 30 to perform a common item measurement procedure on the components 41 to 44 to be measured. After Step S24 is executed. After the common item measurement of the components to be tested 41 to 44 is completed, the measurement workstations 21 to 24 each perform a specific item measurement program, and the measurement items of the specific item measurement program can be measured according to each of the measurement items The requirements of the components 41 to 44 are adjusted individually, and the specific item measurement procedure of each of the components to be tested 41 to 44 can be performed simultaneously, but it is not limited. Step S25 is then performed. After the measurement is completed, the measurement stations 21 to 24 respectively transmit the measurement results to the main control device 10, and the main control device 10 aggregates the measurement results.

需注意的是,雖然本實施例中的共同項目量測程序的進行時間早於特定項目量測程序的進行時間,但在其它實施例中,亦可以是特定項目量測程序先進行,等到待測元件41~44的特定項目量測程序皆完成後,才開始進行共同項目量測程序。此外,在一實施例中,待測元件41~44的特定項目量測程序的進行時間可介於兩個共同項目量測程序之間,而在另一實施例中,共同項目量測程序的進行時間可介於兩個特定項目量測程序之間,且並非限定。 It should be noted that although the execution time of the common item measurement program in this embodiment is earlier than the execution time of the specific item measurement program, in other embodiments, the specific item measurement program may be performed first and wait until After the specific item measurement procedures of the measurement elements 41 to 44 are completed, the common item measurement procedure is started. In addition, in one embodiment, the execution time of the specific item measurement procedure of the DUT 41 to 44 may be between two common item measurement procedures, and in another embodiment, the time of the common item measurement procedure The execution time may be between two specific project measurement procedures and is not limited.

藉此,由量測工作站21~24各自控制待測元件41~44的量測,本發明將可根據待測元件41~44的需求而各自且同步進行特定的測量項目,以節省大量的時間。 In this way, the measurement stations 21 to 24 control the measurement of the DUTs 41 to 44 respectively, and the present invention can perform specific measurement items individually and synchronously according to the needs of the DUTs 41 to 44 to save a lot of time .

接著將以數個實施例詳細說明本發明的量測方法流程以及與習知技術的效果差別。這些實施例僅是舉例,並非本發明的限定。 Next, several embodiments will be used to describe in detail the flow of the measurement method of the present invention and the effect difference from the conventional technology. These examples are merely examples and are not a limitation of the present invention.

首先說明第一實施例之態樣。圖3(A)是本發明第一實施例的量測系統1的量測方法的詳細流程圖,圖3(B)是本發明第一實施例的量測系統1的量測方法與習知技術的運作情形比較示意圖,並請同時參考圖1至圖3(B)。 First, the aspect of the first embodiment will be described. FIG. 3 (A) is a detailed flowchart of the measurement method of the measurement system 1 according to the first embodiment of the present invention, and FIG. 3 (B) is the measurement method and knowledge of the measurement system 1 according to the first embodiment of the present invention A schematic diagram of the operation of the technology, please refer to FIGS. 1 to 3 (B) at the same time.

如圖3(A)及圖3(B)所示,第一實施例的量測方法首先執行步驟S31,主控裝置10從伺服器50處下載測試程式,並傳送測試程式至量測工作站21~24。之後步驟S32被執行,主控裝置10傳送訊息至量測工作站21~24,以告知 量測工作站21~24進入量測程序。之後步驟S33被執行,量測工作站21~24執行測試程式,並控制量測機台30對待測元件41~44進行共同項目量測程序。步驟S31至S33與圖2的步驟S21至S23相似,故不再詳述,此外,待測元件41~44的共同項目量測程序(Test_com)是同時進行。之後,步驟S34被執行,當待測元件41~44的共同項目量測程序(Test_com)完成後,根據每個待測元件41~44的各自需求(例如根據共同項目量測程序(Test_com)的量測結果,但並非限定)而調整待測元件41~44各自的特定項目量測程序(Test_1~Test_4)。之後步驟S35被執行,同步進行待測元件41~44的特定項目量測程序(Test_1~Test_4),之後,步驟S36被執行,量測工作站21~24各自將量測結果傳送至主控裝置10,並由主控裝置10彙整量測結果。 As shown in FIGS. 3 (A) and 3 (B), the measurement method of the first embodiment first executes step S31. The main control device 10 downloads a test program from the server 50 and transmits the test program to the measurement workstation 21 ~ 24. Step S32 is then performed, and the main control device 10 sends a message to the measurement stations 21 to 24 to inform The measurement stations 21 ~ 24 enter the measurement program. Step S33 is then executed, the measurement stations 21 to 24 execute a test program, and control the measurement machine 30 to perform a common item measurement procedure on the components 41 to 44 to be measured. Steps S31 to S33 are similar to steps S21 to S23 in FIG. 2, so they will not be described in detail. In addition, the common item measurement procedures (Test_com) of the components to be tested 41 to 44 are performed simultaneously. After that, step S34 is executed. After the common item measurement procedure (Test_com) of the DUTs 41 to 44 is completed, according to the respective requirements of each of the DUTs 41 to 44 (for example, according to the common item measurement procedure (Test_com)). The measurement results are not limited, and the specific item measurement procedures (Test_1 ~ Test_4) of each of the DUTs 41 to 44 are adjusted. After that, step S35 is executed, and the specific item measurement procedures (Test_1 ~ Test_4) of the DUTs 41 to 44 are performed synchronously. After that, step S36 is executed, and the measurement stations 21 to 24 each transmit the measurement results to the main control device 10 The measurement results are aggregated by the main control device 10.

在此實施例中,待測元件41~44假設為四種相同類型的待測元件,而習知技術假設由單一電腦裝置控制所有待測元件41~44的量測。當共同項目量測程序(Test_com)完成後,習知技術的單一電腦裝置僅能依序進行待測元件41~44的特定項目量測程序(Test_1~Test_4),且必須等待同一類型的待測元件(例如待測元件41)的特定項目量測程序(例如Test_1)完成後,才能進行下一類型的待測元件(例如待測元件42)的特定項目量測程序(例如Test_2)。相較之下,本發明的量測系統1可具備多個量測工作站21~24,且量測工作站21~24各自控制待測元件41~44的量測,因此當共同項目量測程序(Test_com)完成後,量測工作站21~24可各自地且同步地進行待測元件41~44的特定項目量測程序(Test_1~Test_4)。如圖3所示,本發明可大幅減少習知技術的量測時間。 In this embodiment, the DUTs 41 to 44 are assumed to be four DUTs of the same type, and the conventional technology assumes that the measurement of all of the DUTs 41 to 44 is controlled by a single computer device. After the common project measurement procedure (Test_com) is completed, a single computer device of the conventional technology can only perform the specific project measurement procedures (Test_1 ~ Test_4) of the DUT 41 ~ 44 in sequence, and must wait for the same type of test After the specific item measurement program (for example, Test_1) of the component (for example, the device under test 41) is completed, the specific item measurement program (for example, Test_2) of the next type of device under test (for example, the device under test 42) can be performed. In comparison, the measurement system 1 of the present invention may be provided with a plurality of measurement stations 21 to 24, and the measurement stations 21 to 24 each control the measurement of the components to be measured 41 to 44. Therefore, when a common item measurement program ( After the completion of Test_com), the measurement workstations 21 to 24 can individually and synchronously perform specific project measurement procedures (Test_1 to Test_4) of the components to be tested 41 to 44. As shown in FIG. 3, the present invention can greatly reduce the measurement time of the conventional technology.

接著說明第二實施例之態樣。圖4(A)是本發明第二實施例的量測系統1的量測方法的詳細流程圖,圖4(B)是本發明第二實施例的量測系統1的量測 方法與習知技術的運作情形比較示意圖,並請同時參考圖1、圖2、圖4(A)及圖4(B)。 Next, an aspect of the second embodiment will be described. FIG. 4 (A) is a detailed flowchart of the measurement method of the measurement system 1 according to the second embodiment of the present invention, and FIG. 4 (B) is the measurement of the measurement system 1 according to the second embodiment of the present invention A schematic diagram of the comparison between the method and the operation of the conventional technology. Please refer to FIG. 1, FIG. 2, FIG. 4 (A) and FIG. 4 (B) at the same time.

如圖4(A)及4(B)所示,第二實施例的量測方法首先執行步驟S41至步驟S43;由於步驟S41至S43與圖2的步驟S21至S23相似,故不再詳述。之後,步驟S44被執行,當待測元件41~44的共同項目量測程序(Test_com)完成後,根據待測元件41~44的各自需求(例如根據共同項目量測程序(Test_com)的量測結果,但並非限定)而調整待測元件41~44各自的特定項目量測程序(Test_1~Test_4)。之後步驟S45被執行,待測元件41~44各自接收對應其特定項目量測程序(Test_1~Test_4)的量測訊號,並進入各自的訊號反應時間。假如有待測元件(例如待測元件44)的訊號反應出現異常時,則進行步驟S45(b),該待測元件44等待訊號異常結束,且其餘待測元件(待測元件41~43)持續進行其訊號反應時間與後續量測。之後,步驟S46被執行,於訊號反應完成後,訊號反應正常的待測元件(例如Test_1~Test_3)各自進行特定項目量測程序(Test_1~Test_3),因此,較早完成訊號反應且正常的待測元件,將會直接進行其特定項目量測程序。之後,步驟S47被執行,當每個待測元件41~44的特定項目量測程序(Test_1~Test_4)完成後,量測工作站21~24各自將量測結果傳送至主控裝置10,並由主控裝置10彙整量測結果。 As shown in FIGS. 4 (A) and 4 (B), the measurement method of the second embodiment first executes steps S41 to S43; since steps S41 to S43 are similar to steps S21 to S23 of FIG. 2, they are not described in detail . After that, step S44 is executed. After the common item measurement procedures (Test_com) of the DUTs 41 to 44 are completed, according to the respective needs of the DUTs 41 to 44 (for example, measurement according to the common project measurement program (Test_com) As a result, but not limited to, the specific item measurement procedures (Test_1 to Test_4) of each of the DUTs 41 to 44 are adjusted. Step S45 is then performed. Each of the DUTs 41 to 44 receives a measurement signal corresponding to its specific item measurement procedure (Test_1 to Test_4) and enters its respective signal response time. If the signal response of the DUT (for example, DUT 44) is abnormal, step S45 (b) is performed. The DUT 44 waits for the abnormal end of the signal, and the remaining DUTs (DUT 41 to 43) Continue to perform its signal response time and subsequent measurements. After that, step S46 is executed. After the signal response is completed, the test components (for example, Test_1 ~ Test_3) with a normal signal response each perform a specific item measurement procedure (Test_1 ~ Test_3). Therefore, the signal response is completed earlier and normally wait The measuring element will directly carry out its specific project measurement procedure. After that, step S47 is executed. When the specific item measurement procedure (Test_1 ~ Test_4) of each of the DUTs 41 to 44 is completed, the measurement stations 21 to 24 respectively transmit the measurement results to the main control device 10, and The main control device 10 aggregates the measurement results.

在此實施例中,待測元件41~44為四種相同類型的待測元件,且針對相同或不同的量測訊號會具有不同的訊號反應期間,因此待測元件41~44在進行實際量測之前,必須先等待訊號反應期間結束。此外,習知技術是由單一電腦裝置控制所有待測元件41~44的量測。在進行量測(例如特定量測項目程序Test_1~Test_4)時,習知技術的電腦裝置控制量測機台(圖4B未顯示)傳送量測訊號至待測元件41~44,待測元件41~44針對量測訊號的需等待反應,此時必需等待所 有待測元件41~44的訊號反應期間結束後才能進行實際量測,因此習知技術將會耗費大量的時間等待待測元件41~44對訊號產生反應。此外,當有待測元件的反應出現異常時(例如待測元件44),雖其它待測元件41~43的訊號反應期間已結束,仍必需等到待測元件44的異常結束後,才能開始進行實際量測,如此又將耗費更多的時間成本。相較之下,本發明的量測系統1具備多個量測工作站21~24,且量測工作站21~24各自控制待測元件41~44的量測,因此可各自進行待測元件41~44的訊號反應期間及實際量測期間。藉此,即便待測元件44的反應出現異常時,其它待測元件41~43仍可各自進行實際量測,因此可節省大量的時間成本。 In this embodiment, the DUTs 41 to 44 are four types of DUTs of the same type, and have different signal response periods for the same or different measurement signals. Therefore, the DUTs 41 to 44 are performing actual measurement. Before the test, you must wait for the end of the signal response period. In addition, the conventional technology controls the measurement of all the DUTs 41 to 44 by a single computer device. During the measurement (for example, the specific measurement item program Test_1 ~ Test_4), the computer device of the known technology controls the measurement machine (not shown in FIG. 4B) to transmit the measurement signal to the DUT 41 to 44, and the DUT 41 ~ 44 Need to wait for the response to the measurement signal. The actual measurement can only be performed after the signal response period of the DUTs 41 to 44 ends, so the conventional technology will spend a lot of time waiting for the DUTs 41 to 44 to respond to the signals. In addition, when the response of the DUT (such as DUT 44) is abnormal, although the signal response period of other DUTs 41 to 43 has ended, it is necessary to wait for the abnormal end of DUT 44 to begin. The actual measurement will take more time and cost. In comparison, the measurement system 1 of the present invention includes multiple measurement stations 21 to 24, and each of the measurement stations 21 to 24 controls the measurement of the DUTs 41 to 44. Therefore, the DUTs 41 to 44 can be performed individually. 44 signal response period and actual measurement period. Therefore, even when the response of the DUT 44 is abnormal, the other DUTs 41 to 43 can still perform actual measurement respectively, so a lot of time and cost can be saved.

需注意的是,圖4B的實施例雖以特定量測項目程序Test_1~Test_4來舉例說明訊號反應期間的情況,但該領域技術人士可知此共同項目量測程序亦有可能需要等待訊號反應期間結束後才能開始進行量測,且不限於此。 It should be noted that although the embodiment of FIG. 4B uses a specific measurement item program Test_1 ~ Test_4 as an example to describe the situation of the signal response period, those skilled in the art know that this common project measurement procedure may also need to wait for the signal response period to end The measurement can be started only after that, and it is not limited to this.

接著說明第三實施例之態樣。圖5(A)是本發明第三實施例的量測系統1的量測方法的詳細流程圖,圖5(B)是本發明第三實施例的量測系統1的量測方法與習知技術的運作情形比較示意圖,並請同時參考圖1、圖2、圖5(A)及圖5(B)。需注意的是,第三實施例中的待測元件41~44屬於訊號反應時間結束後須馬上進行量測的類型。 Next, an aspect of the third embodiment will be described. Fig. 5 (A) is a detailed flowchart of the measurement method of the measurement system 1 according to the third embodiment of the present invention, and Fig. 5 (B) is the measurement method and knowledge of the measurement system 1 of the third embodiment of the present invention A schematic diagram of the operation of the technology, please refer to FIG. 1, FIG. 2, FIG. 5 (A) and FIG. 5 (B) at the same time. It should be noted that the DUTs 41 to 44 in the third embodiment belong to a type that must be measured immediately after the signal response time ends.

如圖5(A)及圖5(B)所示,第三實施例的量測方法係首先執行步驟S51至步驟S53;由於步驟S51至S53與圖2的步驟S21至S23相似,故不再詳述。之後,步驟S54被執行,當待測元件41~44的共同項目量測程序(Test_com)完成後,根據待測元件41~44的各自需求(例如根據共同項目量測程序(Test_com)的量測結果,但並非限定)而調整待測元件41~44各自的特定項目量測程序 (Test_1~Test_4)。之後步驟S55被執行,待測元件41~44同步且各自接收對應其特定項目量測程序(Test_1~Test_4)的量測訊號,並進入各自的訊號反應時間,且每個待測元件41~44於其訊號反應時間結束後,係馬上進行其特定項目量測程序。之後,步驟S56被執行,當每個待測元件41~44的特定項目量測程序(Test_1~Test_4)完成後,量測工作站21~24各自將量測結果傳送至主控裝置10,並由主控裝置10彙整量測結果。 As shown in FIG. 5 (A) and FIG. 5 (B), the measurement method of the third embodiment first executes steps S51 to S53; since steps S51 to S53 are similar to steps S21 to S23 of FIG. 2, no longer Elaborate. After that, step S54 is executed. After the common item measurement procedures (Test_com) of the DUTs 41 to 44 are completed, according to the respective needs of the DUTs 41 to 44 (for example, the measurement according to the common project measurement program (Test_com)) (Results, but not limited) and adjust the specific item measurement procedures for each of the DUTs 41 to 44 (Test_1 ~ Test_4). Then step S55 is executed, the DUTs 41 to 44 are synchronized and each receives a measurement signal corresponding to its specific project measurement procedure (Test_1 to Test_4), and enters its own signal response time, and each DUT 41 to 44 Immediately after its signal response time has elapsed, its specific project measurement procedures are performed. After that, step S56 is executed. When the specific item measurement program (Test_1 ~ Test_4) of each of the DUTs 41 to 44 is completed, the measurement workstations 21 to 24 respectively transmit the measurement results to the main control device 10, and The main control device 10 aggregates the measurement results.

在此實施例中,待測元件41~44為四種相同類型的待測元件,且針對相同或不同的量測訊號具有不同的反應時間,且待測元件41~44具有在反應時間結束後必須馬上進行量測的特性。由於習知技術是由單一電腦裝置控制所有待測元件41~44的量測,其在進行實際量測之前除了必須等待待測元件41~44的訊號反應期間結束之外,由於待測元件41~44在反應時間結束後必須馬上進行量測,因此其架構必須配置成依序等待相同類型的待測元件(例如待測元件41)的訊號反應期間及實際量測期間皆結束後,才能進行下一個待測元件(例如待測元件42)的訊號反應期間及實際量測期間;由此可知,本實施例的量測時間將會比前述實施例的量測時間更長,因此耗費更多時間成本。相較之下,本發明的量測系統1具備多個量測工作站21~24,且量測工作站21~24各自控制待測元件41~44的量測程序,因此可各自地進行待測元件41~44的訊號反應期間及鄰接訊號反應期間的實際量測期間。因此,即便待測元件41~44在訊號反應完成後必須立即進行量測,待測元件41~43仍可獨立各自進行量測程序,如此將可節省大量的時間成本。 In this embodiment, the DUTs 41 to 44 are four DUTs of the same type, and have different response times for the same or different measurement signals, and the DUTs 41 to 44 have The characteristics that must be measured immediately. Because the conventional technology controls the measurement of all the DUTs 41 to 44 by a single computer device, it must wait for the end of the signal response period of DUTs 41 to 44 before performing the actual measurement. ~ 44 must be measured immediately after the reaction time is over, so its architecture must be configured to wait for the signal response period of the same type of DUT (such as DUT 41) in sequence and the actual measurement period to complete before it can be performed. The signal response period and actual measurement period of the next DUT (such as DUT 42); it can be seen that the measurement time in this embodiment will be longer than the measurement time in the previous embodiment, so it will consume more Time costs. In comparison, the measurement system 1 of the present invention is provided with a plurality of measurement stations 21 to 24, and the measurement stations 21 to 24 each control the measurement programs of the DUT 41 to 44, so the DUT can be performed individually The signal measurement period of 41 ~ 44 and the actual measurement period of the adjacent signal reaction period. Therefore, even if the DUTs 41 to 44 must be measured immediately after the signal response is completed, the DUTs 41 to 43 can still perform the measurement procedure independently, which will save a lot of time and cost.

接著說明第四實施例之態樣。圖6(A)是本發明第四實施例的量測系統1的量測方法的詳細流程圖,圖6(B)是本發明第四實施例的量測方法的運作情形示意圖,並請同時參考圖3。 Next, an aspect of the fourth embodiment will be described. FIG. 6 (A) is a detailed flowchart of the measurement method of the measurement system 1 according to the fourth embodiment of the present invention, and FIG. 6 (B) is a schematic diagram of the operation of the measurement method of the fourth embodiment of the present invention. Refer to Figure 3.

如圖6(A)及圖6(B)所示,首先步驟S61至S63被執行;由於步驟S61至S63與圖2之步驟S21至S23相似,故不再詳述。之後步驟S64被執行,當待測元件41~44的共同項目量測完成後,量測工作站21~24各自進行特定項目量測程序,其中特定項目量測程序的量測項目可依照每個待測元件41~44的需求而各自調整。之後步驟S65被執行,待測元件41~44各自進行特定項目量測程序(Test_1~Test_4),且至少二待測元件(例如待測元件41、42)的特定項目量測程序(Test_1、Test_2)的進行期間至少部分重疊。之後步驟S66被執行,當每個待測元件41~44的特定項目量測程序(Test_1~Test_4)完成後,量測工作站21~24各自將量測結果傳送至主控裝置10,並由主控裝置10彙整量測結果。 As shown in FIG. 6 (A) and FIG. 6 (B), first steps S61 to S63 are performed; since steps S61 to S63 are similar to steps S21 to S23 of FIG. 2, they will not be described in detail. Step S64 is then performed. After the common item measurement of the DUTs 41 to 44 is completed, the measurement workstations 21 to 24 each perform a specific item measurement program, and the measurement items of the specific item measurement program can be determined according to each The requirements of the measuring elements 41 to 44 are adjusted individually. Step S65 is then performed, and the DUTs 41 to 44 each perform a specific item measurement procedure (Test_1 to Test_4), and at least two DUT (eg, DUTs 41 and 42) specific item measurement procedures (Test_1, Test_2) ) At least partially overlap. Step S66 is then performed. When the specific item measurement procedure (Test_1 ~ Test_4) of each of the DUTs 41 to 44 is completed, the measurement workstations 21 to 24 respectively transmit the measurement results to the main control device 10, and the main control device 10 The control device 10 aggregates the measurement results.

在此實施例中,待測元件41~44的特定需求項目量測程序可各自進行,且不限定為同步進行。舉例來說,待測元件42的特定需求項目量測程序(Test_2)可以在待測元件41的特定需求項目量測程序(Test_1)開始進行的一段時間後才開始進行,且不限於此。因此,本發明的量測方式可定義為至少二待測元件(例如待測元件41、42)的特定需求項目量測程序(例如Test_1、Test_2)的部分進行期間會重疊(例如重疊期間O1)。 In this embodiment, the specific demand item measurement procedures of the DUTs 41 to 44 can be performed individually, and are not limited to be performed simultaneously. For example, the specific demand item measurement program (Test_2) of the DUT 42 may be started after a period of time when the specific demand item measurement program (Test_1) of the DUT 41 is started, and is not limited thereto. Therefore, the measurement method of the present invention can be defined as that at least two components under test (eg, components under test 41, 42) require specific measurement items (such as Test_1, Test_2) to overlap during the execution period (such as overlapping period O1) .

藉此,本發明可各自同步進行待測元件的特定需求量測程序,且可適用各種類型的待測元件,可大幅減少量測的時間,並提升量測的效率。 In this way, the present invention can perform the specific requirements measurement procedures of the DUTs simultaneously, and can be applied to various types of DUTs, which can greatly reduce the measurement time and improve the measurement efficiency.

上述實施例僅係為了方便說明而舉例而已,本發明所主張之權利範圍自應以申請專利範圍所述為準,而非僅限於上述實施例。 The above embodiments are merely examples for the convenience of description. The scope of the claimed rights of the present invention should be based on the scope of the patent application, rather than being limited to the above embodiments.

Claims (10)

一種量測系統,包含:一主控裝置;以及複數個量測工作站,各自與該主控裝置連結,且每個量測工作站各自對應一待測元件;其中,該等量測工作站根據該主控裝置的一指令而同時對所對應的該待測元件進行一共同項目量測程序,且該等量測工作站更依照所對應的該待測元件的需求而各自進行可調整量測項目的一特定需求項目量測程序,其中至少二特定需求項目量測程序的部分進行期間會重疊;其中當該等待測元件的該共同項目量測程序完成後,每個量測工作站更依照所對應的待測元件的該共同項目量測程序的量測結果來調整該待測元件的該特定項目量測程序;其中當每個待測元件的該特定項目量測程序調整完後,該等待測元件各自接收對應其特定項目量測程序的一量測訊號,並進入各自的訊號反應期間,並於訊號反應期間結束後進入各自的該特定項目量測程序;其中,當其中一待測元件的訊號反應出現異常時,其餘待測元件持續進行所對應的訊號反應期間,並於訊號反應期間結束後進入各自的該特定項目量測程序。A measurement system includes: a main control device; and a plurality of measurement stations, each of which is connected to the main control device, and each measurement station corresponds to a component to be tested; wherein, the measurement stations are based on the main An instruction from the control device and simultaneously perform a common item measurement procedure on the corresponding DUT, and the measurement workstations each perform an adjustable measurement item according to the corresponding needs of the DUT. Specific demand item measurement procedures, in which at least two specific demand item measurement procedures are partially overlapped during the execution period; wherein when the common item measurement procedure of the waiting-for-measurement component is completed, each measurement workstation is more in accordance with the corresponding The measurement result of the common item measurement program of the test component is used to adjust the specific item measurement program of the test component; wherein when the specific item measurement program of each test component is adjusted, the waiting test component Receives a measurement signal corresponding to its specific project measurement procedure, and enters its respective signal response period, and enters its own after the signal response period ends. A certain item measurement procedure; when an abnormal signal response occurs in one of the components under test, the remaining components under test continue to perform the corresponding signal response period, and enter their respective specific item measurement procedures after the signal response period ends . 如申請專利範圍第1項所述的量測系統,其中當該等待測元件的該共同項目量測程序及該特定量測項目程序完成後,該等量測工作站各自將一量測結果傳送至該主控裝置。The measurement system according to item 1 of the scope of patent application, wherein when the common item measurement procedure and the specific measurement item procedure of the awaiting measurement element are completed, the measurement stations each transmit a measurement result to The master control device. 如申請專利範圍第1項所述的量測系統,其中該等待測元件的該特定項目量測程序是在二共同項目量測程序之間進行。The measurement system according to item 1 of the scope of patent application, wherein the specific item measurement procedure of the waiting-for-measurement element is performed between two common item measurement procedures. 如申請專利範圍第1項所述的量測系統,其中該共同項目量測程序或該特定項目量測程序包括一積體電路的訊號反應期間與一實際量測期間。The measurement system according to item 1 of the scope of patent application, wherein the common item measurement procedure or the specific item measurement procedure includes a signal response period of an integrated circuit and an actual measurement period. 如申請專利範圍第1項所述的量測系統,其中該等量測工作站同步進行該特定項目量測程序。The measurement system according to item 1 of the scope of patent application, wherein the measurement stations perform the measurement procedure of the specific item synchronously. 一種量測方法,由一量測系統執行,其中該量測系統包括一主控裝置及與該主控裝置連結的複數個量測工作站,其中每個量測工作站各自對應一待測元件,該量測方法包含以下步驟:使每個量測工作站根據該主控裝置的一指令而同時對所對應的該待測元件進行一共同項目量測程序;以及使每個量測工作站依照所對應的該待測元件的需求而各自進行可調整量測項目的一特定項目量測程序,其中至少二特定需求項目量測程序的部分進行期間會重疊;其中使每個量測工作站依照所對應的該待測元件的需求而各自進行可調整量測項目的一特定項目量測程序之步驟更包含子步驟:當該等待測元件的該共同項目量測程序完成後,根據各待測元件的該共同項目量測程序的量測結果,分別調整各待測元件的該特定項目量測程序;以及當每個待測元件的該特定項目量測程序調整完後,使每個待測元件各自接收對應其特定項目量測程序的一量測訊號,並進入各自的訊號反應期間,並於訊號反應期間結束後進入各自的該特定項目量測程序;其中,當其中一待測元件的訊號反應出現異常時,使其餘待測元件持續進行所對應的訊號反應期間,並於訊號反應期間結束後進入各自的該特定項目量測程序。A measurement method is executed by a measurement system, wherein the measurement system includes a main control device and a plurality of measurement workstations connected to the main control device, wherein each measurement workstation corresponds to a component to be tested, the The measurement method includes the following steps: each measurement station simultaneously performs a common item measurement procedure on the corresponding component under test according to an instruction of the main control device; and each measurement station performs a corresponding measurement procedure according to the corresponding A specific item measurement procedure of an adjustable measurement item is separately performed for the demand of the component under test, in which at least two specific demand item measurement procedure parts are overlapped in duration; each measurement station is caused to correspond to the corresponding one The steps of a specific item measurement procedure for each of the components under test that can be adjusted for measurement can further include sub-steps: after the common item measurement procedure for the waiting component under test is completed, according to the common for each component under test, The measurement results of the item measurement program, respectively adjust the specific item measurement program of each DUT; and when the specific item quantity of each DUT is adjusted After the procedure is adjusted, each DUT receives a measurement signal corresponding to its specific item measurement procedure, and enters its own signal response period, and enters its own specific item measurement procedure after the signal response period ends. Wherein, when the signal response of one of the DUTs is abnormal, the remaining DUTs continue to perform the corresponding signal response period, and enter their respective specific item measurement procedures after the signal response period ends. 如申請專利範圍第6項所述的量測方法,其中更包含步驟:當該等待測元件的該共同項目量測程序及該特定項目量測程序完成後,藉由該等量測工作站將一量測結果傳送至該主控裝置。The measurement method according to item 6 of the scope of patent application, further comprising the step of: after the common item measurement procedure and the specific item measurement procedure of the awaiting measurement element are completed, a The measurement results are transmitted to the main control device. 如申請專利範圍第6項所述的量測方法,其中該等待測元件的該特定項目量測程序是在二共同項目量測程序之間進行。The measurement method according to item 6 of the patent application scope, wherein the specific item measurement procedure of the waiting-for-measurement element is performed between two common item measurement procedures. 如申請專利範圍第6項所述的量測方法,其中該共同項目量測程序或該特定項目量測程序包括一積體電路的訊號反應期間與一實際量測期間。The measurement method according to item 6 of the scope of patent application, wherein the common item measurement procedure or the specific item measurement procedure includes a signal response period of an integrated circuit and an actual measurement period. 如申請專利範圍第9項所述的量測方法,其中該等量測工作站同步進行該特定項目量測程序。The measurement method according to item 9 of the scope of patent application, wherein the measurement stations perform the measurement procedure of the specific item simultaneously.
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