TWI662633B - Bumping process and flip chip structure - Google Patents

Abstract

The invention provides a bump process and a flip-chip structure. The bump process includes the following steps. A photoresist layer is formed on the wafer. Each wafer region of the wafer has a plurality of pads, and includes a first region and a second region. The photoresist layer is patterned to form a plurality of first openings exposing a plurality of pads in each wafer region, and to form at least one second opening in at least one wafer region. The first region has a plurality of first openings. The area ratio of the patterned photoresist layer in the first region is smaller than the area ratio of the patterned photoresist layer in the second region. The second opening is located between the first region and the second region. The area of each first opening is smaller than the area of the second opening. A plurality of conductive bumps are formed in the plurality of first openings, and a pseudo bump is formed in the second opening. The patterned photoresist layer is removed.

Description

Bump process and flip-chip structure

The invention relates to a bump manufacturing process and a flip-chip structure, and in particular to a bump manufacturing process including forming a pseudo-bump and a flip-chip structure having a pseudo-bump.

The process of forming bumps on a wafer includes forming a patterned photoresist layer on the wafer, which has a plurality of openings exposing a plurality of pads on the wafer surface. Next, a plurality of conductive bumps are formed in the plurality of openings. Finally, the wafer is singulated to form a plurality of flip-chip structures.

In the above process, the processes including baking and curing the patterned photoresist layer and forming the conductive bumps will all release heat energy, and cause the photoresist layer to expand due to heat. The patterned photoresist layer on each wafer area in the wafer can be divided into dense opening areas and sparse opening areas according to the area ratio occupied by the openings. The area ratio of the patterned photoresist layer in the sparse area of the opening is relatively large, so its expansion amount in the sparse area of the opening is also large. In this way, the patterned photoresist layer in the dense area of the opening will be squeezed, so that the opening in the dense area will be distorted and deformed, and the patterned photoresist layer in the dense area of the opening may be peeled off and generated between the structure and the underlying structure. Void. In this way, the distance between adjacent openings in the dense area of the opening may be shortened, and the plating solution forming the conductive bumps may penetrate into the gap and cause the plating, thereby causing the distance between adjacent conductive bumps to be shortened or The problem of short circuit between adjacent conductive bumps.

The invention provides a bump manufacturing process and a flip-chip structure, which can avoid the problems of shortening the distance between adjacent conductive bumps or shorting the adjacent conductive bumps.

The bump process of the present invention includes the following steps. A photoresist layer is formed on the wafer. The wafer includes a plurality of wafer regions. Each wafer region has a plurality of pads, and each wafer region includes at least a first region and at least a second region adjacent to each other. The photoresist layer is patterned to form a plurality of first openings exposing a plurality of pads in each wafer region, and to form at least one second opening in at least one wafer region. At least one first region of each wafer region has a plurality of first openings arranged along a first direction. The area ratio of the patterned photoresist layer in the at least one first region is smaller than the area ratio of the patterned photoresist layer in the adjacent at least one second region. The at least one second opening is located between the at least one first area and the at least one second area, and extends adjacent to the plurality of first openings arranged along the first direction in the at least one first area. The area of each first opening in the at least one first region is smaller than the area of at least one second opening. A plurality of conductive bumps are formed in the plurality of first openings, and at least one pseudo-bump is formed in the at least one second opening. The patterned photoresist layer is removed.

The flip-chip structure of the present invention includes a wafer, a plurality of conductive bumps, and at least one pseudo-bump. The wafer has a plurality of pads. The wafer includes at least a first region and at least a second region adjacent to each other. The plurality of conductive bumps are disposed on the plurality of pads. The at least one first region has a plurality of conductive bumps arranged along a first direction. The area ratio occupied by the regions not covered by the plurality of conductive bumps in at least one first region is smaller than the area ratio occupied by adjacent at least one second region. At least one pseudo bump is disposed on the wafer and is located between at least a first region and at least a second region. The at least one pseudo-bump extends adjacent to the plurality of conductive bumps arranged along the first direction in the at least one first region. An area of each of the conductive bumps in the at least one first region is smaller than an area of at least one quasi-bump.

Based on the above, by providing a second opening between the first area having a smaller area ratio of the photoresist layer and the second area having a larger area ratio of the photoresist layer, the second opening can be dried in the photoresist layer. During the curing process and the formation of the conductive bumps and pseudo-bumps, the absorption of the photoresist layer is heated, and the pushing from the second region toward the first region occurs. And because the area of the second opening is larger than the area of each first opening, the second opening can withstand a larger amount of deformation. Therefore, the deformation of the first opening in the first region due to being pushed can be reduced, and the probability that the photoresist layer in the first region is peeled off to generate a gap with the underlying structure can be reduced. In this way, the problems of shortening the distance between adjacent conductive bumps or short-circuiting the adjacent conductive bumps caused by the plating solution plating can be avoided.

In order to make the above features and advantages of the present invention more comprehensible, embodiments are hereinafter described in detail with reference to the accompanying drawings.

FIG. 1A to FIG. 1D are schematic perspective views of a bump forming process for forming a flip-chip structure according to an embodiment of the present invention. FIG. 1E is a schematic top view of the flip-chip structure of FIG. 1D. The bump manufacturing process of this embodiment includes the following steps.

Referring to FIG. 1A, the wafer W includes a plurality of wafer regions C, and each wafer region C has a plurality of pads P. In detail, the multilayer metal wire structure in the wafer W is merged to the uppermost layer to form a plurality of pads P on the surface of the wafer W. Generally, the wafer W is covered with a passivation layer (not shown), and the passivation layer has a plurality of openings to expose the pads P. In addition, the wafer W is, for example, a semiconductor wafer or a silicon on insulator (SOI) wafer. The material of the semiconductor wafer may include silicon, germanium, gallium arsenide, silicon carbide, indium arsenide, indium phosphide, or other semiconductor materials. Referring to FIG. 1B at the same time, each chip region C includes a first region 102 and a second region 104 adjacent to each other. In particular, a plurality of pads P are located in the first region 102. The second region 104 may not have pads P, or the number of pads P in the second region 104 is smaller than the number of pads P in the first region 102. For brevity, only one of the plurality of wafer regions C is shown in FIGS. 1A to 1D. In this embodiment, the wafer region C includes a plurality of first regions 102 and a second region 104. In other embodiments, each chip region C may have a single number of first regions 102 and a plurality of second regions 104. The present invention is not limited to the number of the first regions 102 and the second regions 104. In this embodiment, the seed layer 100 can be selectively formed on the wafer W. The material of the seed layer 100 may include a metal, an alloy, or a metal compound. For example, the metal may include gold, silver, or copper. The method for forming the seed layer 100 may include a physical vapor deposition (PVD) method, such as sputtering.

Next, a photoresist layer 106 is formed on the wafer W. The photoresist layer 106 is then patterned to form a plurality of first openings 108 in each wafer region C, and at least one second opening 110 is formed in at least one of the plurality of wafer regions C. The plurality of first openings 108 respectively expose a plurality of pads P. A method of patterning the photoresist layer 106 is, for example, a photolithography process using steps including exposure, development, and the like. It should be noted that the “first opening 108 exposes the pad P” described herein means that the first opening 108 is the position where the pad P is exposed. More specifically, the first opening 108 is in the crystal. The orthographic projection on the circle W and the orthographic projection of the pad P on the wafer W overlap. In this embodiment, the first opening 108 is to expose the seed layer 100 on the pad P. In addition, the first region 102 of the wafer region C has a plurality of first openings 108 arranged along the first direction D1. The area ratio of the patterned photoresist layer 106 a in the first region 102 is smaller than the area ratio of the patterned photo resist layer 106 a in the adjacent second region 104. In other words, the area of the patterned photoresist layer 106 a on the unit area in the first region 102 is smaller than the area on the unit area in the second region 104. In detail, in this embodiment, the second region 104 does not have the first openings 108, and the first region 102 has the densely arranged first openings 108. Therefore, 0.1 x 0.1mm ² per unit area of view, the patterned photoresist layer 106a on the second area 104 occupied by the unit area is the area of 0.1 x 0.1mm ^2, in which the first region 102 and The area occupied by the medium unit area is 0.1 x 0.1 mm ² after subtracting the area of the first opening 108.

The second opening 110 is located between the first region 102 and the second region 104. The second opening 110 extends adjacent to the plurality of first openings 108 arranged in the first region 102 along the first direction D1. In addition, an area of each of the first openings 108 in the first region 102 is smaller than an area of the second openings 110. In this embodiment, the first region 102 includes a first region 102a and a first region 102b, which are respectively adjacent to two relatively long sides of the wafer region C. The second region 104 is located between the first region 102a and the first region 102b, the second opening 110a is located between the first region 102a and the second region 104, and the second opening 110b is located between the first region 102b and the second region 104 . The second opening 110a and the second opening 110b extend adjacent to the first openings 108 arranged in the first region 102a and the first region 102b along the first direction D1, respectively. In this embodiment, the second opening 110a and the second opening 110b may have some intervals G1 and G2, respectively, so that the second opening 110a and the second opening 110b respectively form intermittent multiple line segments. By disconnecting the continuous second openings 110a and the second openings 110b respectively at the intervals G1 and G2, it is possible to avoid the formation of the excessively long second openings 110. The excessively long second opening 110 may cause the patterned photoresist layer 106a between the second opening 110 and the adjacent first opening 108 to have a large difference in length and width, as if forming a continuous long photoresist. The expansion effect of the photoresist is large, and it is easy to cause the patterned photoresist layer 106a to deform or generate a central collapse problem. In addition, the positions of the interval G1 and the interval G2 may be arranged in an offset manner, that is, the projections of the interval G1 and the interval G2 in the longitudinal direction of the vertical wafer region C will not overlap. When the positions of the interval G1 and the interval G2 correspond to each other, the patterned photoresist layer 106a forms a long photoresistor in the direction of the long side of the wafer region C in the interval G1, the second region 104, and the interval G2. Therefore, displacing the gap G1 and the gap G2 can avoid the generation of a long photoresist with a large swelling effect, thereby reducing the probability of the patterned photoresist layer 106a being deformed there.

Referring to FIG. 1C, a plurality of conductive bumps 112 are formed in the plurality of first openings 108, and a pseudo bump 114 is formed in the second opening 110. After that, the patterned photoresist layer 106a is removed. In some embodiments, the conductive bump 112 and the pseudo-bump 114 may be formed at the same time. In other words, the material and the formation method of the conductive bump 112 may be the same as the material and the formation method of the pseudo bump 114, respectively. For example, the materials of the conductive bumps 112 and the pseudo-bumps 114 may include metals, alloys, or metal compounds. The metal may include gold, silver or copper. In addition, a method for forming the conductive bumps 112 and the pseudo-bumps 114 may include an electrolytic plating method, a chemical plating method, and the like. In other embodiments, the conductive bumps 112 and the pseudo-bumps 114 may be formed in different steps. In other words, the materials and forming methods of the conductive bumps 112 may be different from those of the pseudo bumps 114 and the forming methods, respectively.

However, the thermal energy generated during the curing of the patterned photoresist layer 106a and the formation of the conductive bumps 112 and the pseudo-bumps 114 will cause the patterned photoresist layer 106a to expand thermally. Since the area proportion of the patterned photoresist layer 106a in the second region 104 is larger than the area proportion thereof in the first region 102, the expansion of the patterned photoresist layer 106a in the second region 104 The amount is greater than the amount of its expansion in the first zone 102. In this way, the patterned photoresist layer 106 a in the second region 104 is pushed from the second region 104 toward the first region 102 after being heated. However, the densely arranged first openings 108 in the first region 102 make the structure of the patterned photoresist layer 106a in the first region 102 like many thin photoresist walls. When the patterned photoresist layer 106a is heated, When pushed from the second region 104 toward the first region 102 later, these photoresist walls are extremely prone to distortion, which in turn causes the photoresist wall to peel off and create a gap with the seed layer 100 below. By providing a second opening 110 between the first region 102 and the second region 104, when the patterned photoresist layer 106a is thermally expanded, the second opening 110 can absorb the patterned photoresist layer 106a from the second The pushing from the area 104 prevents the photoresist wall in the first area 102 from being pushed and distorted. In addition, since the area of the second opening 110 is larger than the area of the first opening 108, the second opening 110 can withstand a large amount of deformation. Therefore, deformation of the first opening 108 caused by being pushed when the patterned photoresist layer 106a is thermally expanded can be reduced. Furthermore, since the amount of deformation of the patterned photoresist layer 106a in the first region 102 is reduced, the amount of relative displacement between the seed layer 100 and the patterned photoresist layer 106a due to different expansion rates is also reduced. Can be lowered. Therefore, a gap can be prevented from being generated between the seed layer 100 and the patterned photoresist layer 106a. In this way, the problems that the conductive bumps 112 extend into the gap caused by the plating solution penetration can be avoided, and the problems of shortening the distance between adjacent conductive bumps 112 or shorting the adjacent conductive bumps 112 can be avoided. In addition, since the second opening 110 absorbs the pushing of the patterned photoresist layer 106a in the second region 104 during the formation of the conductive bump 112 and the pseudo-bump 114, the outline of the second opening 110 may be affected. Distort, or make the second opening 110 non-smooth outline. Therefore, the quasi-bump 114 formed in the second opening 110 may have a distorted or non-smooth outline (not shown).

Referring to FIG. 1D, in some embodiments, the seed layer 100 exposed by the conductive bumps 112 and the pseudo bumps 114 can be removed after the patterned photoresist layer 106 a is removed. A method of removing a portion of the seed layer 100 may include isotropic etching, such as wet etching. So far, the flip-chip structure 10 of this embodiment has been formed.

Next, FIG. 1D and FIG. 1E are used to explain the flip-chip structure 10 of this embodiment. The flip-chip structure 10 includes a wafer (wafer region C), a plurality of conductive bumps 112, and at least one pseudo bump 114.

The wafer (wafer region C) has a plurality of pads P (refer to FIG. 1A), and includes at least one first region 102 and at least one second region 104 adjacent to each other. The plurality of conductive bumps 112 are disposed on the plurality of pads P. The at least one first region 102 has a plurality of conductive bumps 112 arranged along the first direction D1. The area ratio occupied by the regions not covered by the plurality of conductive bumps 112 in the at least one first region 102 is smaller than the area ratio occupied in the at least one second region 104. In other words, the area that is not covered by the plurality of conductive bumps 112 in the first area 102 per unit area is smaller than the area that it occupies in the second area 104. At least one pseudo bump 114 is disposed on the wafer (wafer region C) and is located between at least one first region 102 and at least one second region 104. The at least one pseudo bump 114 extends adjacent to the plurality of conductive bumps 112 arranged along the first direction D1 in the at least one first region 102. The area of each of the conductive bumps 112 in the at least one first region 102 is smaller than the area of the at least one quasi-bump 114. In this embodiment, at least one quasi-bump 114 extending adjacent to the plurality of conductive bumps 112 arranged along the first direction D1 in the at least one first region 102 is a plurality of intermittent line segments.

Based on the above, when the patterned photoresist layer 106a is thermally expanded, the second opening 110 can absorb the pushing of the patterned photoresist layer 106a from at least one second region 104, thereby avoiding at least one first region The patterned photoresist layer 106a in 102 is pushed and distorted. In addition, since the area of the second openings 110 is larger than the area of each of the first openings 108, the second openings 110 can withstand a large amount of deformation. Therefore, the deformation caused by the first opening 108 being pushed can be reduced. In this way, the problems of shortening the distance between adjacent conductive bumps 112 or shorting the adjacent conductive bumps 112 can be avoided. In addition, the amount of relative displacement between the seed layer 100 and the patterned photoresist layer 106a due to different expansion rates can be reduced, and generation between the seed layer 100 and the patterned photoresist layer 106a can be avoided. Void. In this way, the problems that the conductive bumps 112 extend into the gap caused by the plating solution penetration can be avoided, and the problems of shortening the distance between adjacent conductive bumps 112 or shorting the adjacent conductive bumps 112 can be avoided.

FIG. 2A to FIG. 2B are three-dimensional schematic diagrams of a bump manufacturing process for forming a flip-chip structure according to another embodiment of the present invention. FIG. 2C is a schematic top view of the flip-chip structure of FIG. 2B. The flip-chip structure 20 and the bump forming process of the present embodiment are similar to the flip-chip structure 10 and the bump-forming process of forming the flip-chip structure 10 shown in FIGS. 1A to 1E, respectively. Only the differences will be described below, and the same or similar points will not be described again. In addition, the same element numbers represent the same or similar components.

Referring to FIG. 2A and FIG. 2B, the first region 102 in this embodiment may include a first region 102a, a first region 102b, a first region 102c, and a first region 102d. The second region 104 may include a second region 104a, a second region 104b, a second region 104c, and a second region 104d. Taking the first region 102a as an example, the patterned photoresist layer 106a forms a plurality of first openings 108 arranged along the first direction D1 in the first region 102a. In addition, the first openings 108 are further along the second direction D2 is arranged in three rows. The angle θ between the first direction D1 and the second direction D2 is greater than 0 degrees and less than or equal to 90 degrees. In this embodiment, the second region 104a, the second region 104b, and the second region 104c are adjacent to three sides of the first region 102a, respectively. The patterned photoresist layer 106a does not form the first openings 108 in the second region 104a, and forms some first openings 108 in the second region 104b and the second region 104c, respectively. The first openings 108 in the first region 102a, the second region 104b, and the second region 104c expose the positions of the pads P. However, the number of the first openings 108 in the second region 104b and the second region 104c is much smaller than the number of the first openings 108 in the first region 102a. In more detail, after the first opening 108 is formed, the area ratio of the patterned photoresist layer 106a in the first region 102a is smaller than that in the second region 104a, the second region 104b, or the second region 104c. The proportion of area occupied. In other words, the area proportion of the patterned photoresist layer 106a in the first region 102a is smaller than the area proportion thereof in the second region 104a, the second region 104b, or the second region 104c. Correspondingly, the second opening 110 may include a second opening 110a, a second opening 110b, and a second opening 110c. The second opening 110a is located between the first area 102a and the second area 104a without the first opening 108, and the second opening 110b and the second opening 110c are located respectively in the first area 102a and the second area having some first openings 108 Between the region 104b and the second region 104c. The second opening 110a extends adjacent to the first opening 108 arranged in the first direction 102 along the first direction D1, and the second opening 110b and the second opening 110c are adjacent to the first opening arranged along the second direction D2 An opening 108 extends. In addition, in this embodiment, a second opening 110a may be formed between the first region 102a and the edge of the wafer (wafer region C). In other words, the two second openings 110a, 110b, and 110c surround the periphery of the first region 102a. In this way, the patterned photoresist layer 106a in the first region 102a can be reduced in multiple directions by being pushed from the patterned photoresist layer 106a in the adjacent second region 104. Furthermore, the patterned photoresist layer 106a in the first region 102a is prevented from being distorted.

Taking the first region 102a as an example, the pseudo-bumps 114 formed later include pseudo-bumps 114a, 114-b and 114c. A pseudo bump 114a is formed in the second opening 110a, a pseudo bump 114b is formed in the second opening 110b, and a pseudo bump 114c is formed in the second opening 110c. Accordingly, the pseudo-bumps 114a, 114b, and 114c surround the first region 102a. In this way, the problems of shortening the distance between adjacent conductive bumps 112 or shorting the adjacent conductive bumps 112 in the first region 102a can be reduced in multiple directions.

In addition, the extension length of the second opening 110a in the first direction D1 may be greater than the length of the adjacent first openings 108 distributed in the same direction. In other words, the end of the second opening 110a may extend beyond the plurality of first openings 108 (the outermost one) arranged in the first region 102a along the first direction D1. Similarly, the extension length of the second opening 110b or the second opening 110c in the second direction D2 may be greater than the length of the adjacent first openings 108 distributed in the same direction. That is, the end of the second opening 110b or the second opening 110c may also extend beyond the plurality of first openings 108 (the outermost one) arranged along the second direction D2 in the first region 102a. In this way, the extension length of the pseudo bump 114a in the first direction D1 may be greater than the length of the adjacent multiple conductive bumps 112 distributed in the same direction. The extension length of the pseudo-bump 114b or the pseudo-bump 114c in the second direction D2 may be greater than the length of the adjacent multiple conductive bumps 112 distributed in the same direction. Moreover, the second opening 110a may be a plurality of intermittent line segments, so as to avoid the formation of the excessively long second opening 110a. The excessively long second opening 110a will cause the patterned photoresist layer 106a between the second opening 110a and the adjacent first opening 108 to have a large difference in length and width, that is, a continuous long photoresistor will be formed. The expansion effect of the resist is large, so it is easy to cause the patterned photoresist layer 106a to be deformed or cause a central collapse problem. In addition, at least one of the second openings 110 (for example, the second opening 110b) may be selectively connected to at least one first opening 108 adjacent thereto. Correspondingly, at least one of the quasi-bumps 114 (for example, quasi-bump 114 b) formed subsequently may be connected to at least one conductive bump 112 adjacent to the quasi-bump 114 b. Therefore, the patterned photoresist layer 106a between the second opening 110b and the adjacent first opening 108 is divided into two sections by the connection section therebetween, which can also prevent the formation of an expansion effect there. Large long photoresist, which reduces the problem of deformation or central collapse of the patterned photoresist layer 106a.

In summary, by providing a second opening between the first area with a small area ratio of the photoresist layer and the second area with a large area ratio of the photoresist layer, the second opening can be made in the photoresist During the process of baking and curing the layer and forming the conductive bumps and pseudo-bumps, the absorption of the photoresist layer is heated, and the pushing from the second region toward the first region occurs. And because the area of the second opening is larger than the area of each first opening, the second opening can withstand a larger amount of deformation. Therefore, the deformation of the first opening in the first region due to being pushed can be reduced, and the probability that the photoresist layer in the first region is peeled off to generate a gap with the underlying structure can be reduced. In this way, the problems of shortening the distance between adjacent conductive bumps or short-circuiting the adjacent conductive bumps caused by the plating solution plating can be avoided.

Although the present invention has been disclosed as above with the examples, it is not intended to limit the present invention. Any person with ordinary knowledge in the technical field can make some modifications and retouching without departing from the spirit and scope of the present invention. The protection scope of the present invention shall be determined by the scope of the attached patent application.

10, 20‧‧‧ flip-chip structure

100‧‧‧ seed layer

102, 102a, 102b, 102c, 102d ‧‧‧ District 1

104, 104a, 104b, 104c, 104d ‧‧‧ District 2

106‧‧‧Photoresist layer

106a‧‧‧ patterned photoresist layer

108‧‧‧ first opening

110, 110a, 110b, 110c‧‧‧Second opening

112‧‧‧Conductive bump

114, 114a, 114b, 114c

C‧‧‧Chip Area

D1‧‧‧ first direction

D2‧‧‧ Second direction

G1, G2‧‧‧ interval

P‧‧‧ pad

W‧‧‧ Wafer

θ‧‧‧ angle

FIG. 1A to FIG. 1D are schematic perspective views of a bump forming process for forming a flip-chip structure according to an embodiment of the present invention. FIG. 1E is a schematic top view of the flip-chip structure of FIG. 1D. FIG. 2A to FIG. 2B are three-dimensional schematic diagrams of a bump manufacturing process for forming a flip-chip structure according to another embodiment of the present invention. FIG. 2C is a schematic top view of the flip-chip structure of FIG. 2B.

Claims (13)

A bump process includes: forming a photoresist layer on a wafer, the wafer including a plurality of wafer regions, wherein each wafer region has a plurality of pads, and each wafer region includes at least one first A region and at least a second region; patterning the photoresist layer to form a plurality of first openings exposing the plurality of pads in each wafer region, and forming at least one in at least one wafer region A second opening, wherein the at least one first region of each wafer region has a plurality of the first openings arranged along a first direction, and the patterned photoresist layer is in the at least one first region The ratio of the area occupied by the area is smaller than the area occupied by the patterned photoresist layer in the adjacent at least one second area, and the at least one second opening is located in the at least one first area and Extending between the at least one second region and adjacent to a plurality of the first openings arranged along the first direction in the at least one first region, An area of each first opening is smaller than an area of the at least one second opening; A plurality of openings formed in the conductive bumps, and at least a second opening formed in at least a bump to the quasi; and removing the patterned photoresist layer over. The bump process according to item 1 of the patent application scope, wherein before forming the photoresist layer, it further comprises forming a seed layer on the wafer, and after removing the patterned photoresist layer The method further includes removing a seed layer exposed by the plurality of conductive bumps and the at least one pseudo-bump. The bump manufacturing process according to item 1 of the scope of patent application, wherein the at least one second opening does not expose the plurality of pads. The bump process according to item 1 of the scope of patent application, wherein the plurality of first openings of the patterned photoresist layer in the at least one first region are further arranged along a second direction. At least two rows, the at least one second region adjacent to the first region includes two second regions, the at least one second opening includes two second openings, and the two second openings are respectively located at Between the at least one first region and the two second regions, and adjacent to a plurality of the first openings arranged along the first direction in the at least one first region and along A plurality of the first openings arranged in the second direction extend, and an included angle between the first direction and the second direction is greater than 0 degrees and less than or equal to 90 degrees. The bump process according to item 1 of the scope of patent application, wherein an end portion of the at least one second opening of the patterned photoresist layer extends beyond the first region along the first A plurality of the first openings arranged in one direction. The bump manufacturing process according to item 1 of the scope of patent application, wherein the at least one first portion extending adjacent to the plurality of first openings arranged along the first direction in the at least one first area The two openings are intermittent multiple line segments. According to the bump process of claim 1, the at least one second opening surrounds the at least one first region. A flip-chip structure includes: a wafer having a plurality of pads, the wafer including at least a first region and at least a second region adjacent to each other; a plurality of conductive bumps disposed on the plurality of contacts; A pad, wherein the at least one first region has a plurality of the conductive bumps arranged along a first direction, and an area not covered by the plurality of conductive bumps is located in the at least one first region The area ratio occupied is smaller than the area ratio occupied in the adjacent at least one second region; and at least one quasi bump is disposed on the wafer and is located in the at least one first region and the at least one Between a second region, wherein the at least one pseudo-bump extends adjacent to a plurality of the conductive bumps arranged along the first direction in the at least one first region, and the at least one An area of each conductive bump in the first region is smaller than an area of the at least one pseudo-bump. The flip-chip structure according to item 8 of the scope of patent application, wherein the at least one pseudo-bump is connected to at least one conductive bump in the at least one first region. The flip-chip structure according to item 8 of the patent application scope, wherein the plurality of conductive bumps in the first region are further arranged in at least two rows along a second direction, adjacent to the first The at least one second region of the region includes two second regions, the at least one pseudo-bump includes two pseudo-bumps, and the two pseudo-bumps are respectively located in the at least one first region and the two Between a plurality of second regions and adjacent to the plurality of conductive bumps arranged along the first direction in the at least one first region and the plurality of the conductive bumps arranged along the second direction, respectively The conductive bump extends, wherein an included angle between the first direction and the second direction is greater than 0 degrees and less than or equal to 90 degrees. The flip-chip structure according to item 8 of the scope of patent application, wherein an end of the at least one pseudo-bump extends beyond a plurality of the conductive bumps arranged along the first direction in the at least one first region Piece. The flip-chip structure according to item 8 of the scope of the patent application, wherein the at least one parasitic element extending adjacent to a plurality of the conductive bumps arranged along the first direction in the at least one first region The bump is a plurality of intermittent line segments. The flip-chip structure according to item 8 of the patent application scope, wherein the at least one pseudo-bump surrounds the at least one first region.