TWI662323B - Glass film laminated body and manufacturing method of liquid crystal panel - Google Patents

Glass film laminated body and manufacturing method of liquid crystal panel Download PDF

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TWI662323B
TWI662323B TW103139058A TW103139058A TWI662323B TW I662323 B TWI662323 B TW I662323B TW 103139058 A TW103139058 A TW 103139058A TW 103139058 A TW103139058 A TW 103139058A TW I662323 B TWI662323 B TW I662323B
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glass film
glass
support
liquid crystal
crystal panel
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TW103139058A
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Chinese (zh)
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TW201531767A (en
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松本保弘
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日商日本電氣硝子股份有限公司
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B17/00Layered products essentially comprising sheet glass, or glass, slag, or like fibres
    • B32B17/06Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/04Interconnection of layers
    • B32B7/06Interconnection of layers permitting easy separation
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/02Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/033Apparatus for opening score lines in glass sheets
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C27/00Joining pieces of glass to pieces of other inorganic material; Joining glass to glass other than by fusing
    • C03C27/06Joining glass to glass by processes other than fusing
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/133305Flexible substrates, e.g. plastics, organic film
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/133308Support structures for LCD panels, e.g. frames or bezels
    • G02F1/133331Cover glasses
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2457/00Electrical equipment
    • B32B2457/20Displays, e.g. liquid crystal displays, plasma displays
    • B32B2457/202LCD, i.e. liquid crystal displays

Abstract

本發明係提供一種玻璃膜層積體及液晶面板之製造方法,可以謀求玻璃膜操作性的提升,且防止光點不良及破損的發生。 The invention provides a glass film laminate and a method for manufacturing a liquid crystal panel, which can improve the operability of a glass film and prevent the occurrence of defective light spots and breakage.

一種玻璃膜層積體(1),在滿足支撐體(11)之支撐玻璃(12)層積玻璃膜(10)而製作出的玻璃膜層積體(1),僅在玻璃膜(10)之跟支撐玻璃(12)的接觸面(10a)側為相反側的面之有效面(10b)側,在玻璃膜(10)的外周緣具備倒角部(15)。 A glass film laminate (1) is a glass film laminate (1) produced by laminating a glass film (10) on a supporting glass (12) that supports a support (11), and only on the glass film (10) The contact surface (10a) side of the support glass (12) is the effective surface (10b) side of the surface on the opposite side, and the chamfered portion (15) is provided on the outer peripheral edge of the glass film (10).

Description

玻璃膜層積體及液晶面板之製造方法 Glass film laminated body and manufacturing method of liquid crystal panel

本發明係有關玻璃膜層積體及液晶面板之製造方法之技術。 The present invention relates to a technology for manufacturing a glass film laminate and a liquid crystal panel.

從節省空間化的觀點而言,近年,取代從前普及的CRT型顯示器,而液晶顯示器、電漿顯示器、有機EL顯示器等平板顯示器正普及。 From the standpoint of saving space, in recent years, CRT-type displays, which have been popular in the past, are replaced, and flat-panel displays such as liquid crystal displays, plasma displays, and organic EL displays are spreading.

接著,在這些平板顯示器,仍存在著更為薄型化的需求。 Next, in these flat panel displays, there is still a demand for thinner.

近年,對於被使用在平板顯示器等裝置之基板或防護玻璃,實現更為薄化與高可撓性之需求提高。 In recent years, there has been an increasing demand for a substrate or a cover glass used in a device such as a flat panel display to be thinner and more flexible.

對於玻璃基板賦予可撓性,玻璃基板的薄化是有效的,下述專利文獻1便提出厚度200μm以下之玻璃膜。 The glass substrate is effective in imparting flexibility to the glass substrate, and the following Patent Document 1 proposes a glass film having a thickness of 200 μm or less.

對被使用在平板顯示器或太陽電池等電子裝置之玻璃基板,進行加工處理或洗淨處理等種種製造關聯處理。 Glass substrates used in electronic devices such as flat-panel displays and solar cells are subjected to various manufacturing-related processes such as processing or cleaning.

可是,在薄化被使用在該等電子裝置的玻璃基板時,因為玻璃是脆性材料,所以問題在於隨多少的應力變化會 致使玻璃破損,在進行上述各種電子裝置製造關聯處理時,處置上是非常困難的。 However, when glass substrates used in such electronic devices are thinned, since glass is a brittle material, the problem is how much the stress changes. As a result, the glass is broken, and it is very difficult to handle the above-mentioned various electronic device manufacturing-related processes.

加上,厚度200μm以下的玻璃膜雖富於可撓性,而在進行處理時難以進行定位、使圖案成形時發生偏差等問題也是存在的。 In addition, although a glass film having a thickness of 200 μm or less is rich in flexibility, problems such as difficulty in positioning during processing, and deviation in forming a pattern also exist.

此外,為了使薄化的玻璃膜的處置性提升,下述專利文獻1係提出在支撐玻璃上層積玻璃膜之玻璃膜層積體。 In addition, in order to improve the handleability of a thinned glass film, the following Patent Document 1 proposes a glass film laminate in which a glass film is laminated on a supporting glass.

根據此,即使採用單體而沒有強度或剛性的玻璃膜,支撐玻璃的剛性較高,因而在處理時使玻璃膜層積體全體之定位變得較為容易。 According to this, even if a glass film having no strength or rigidity is used as a single body, the rigidity of the supporting glass is high. Therefore, it is easier to position the entire glass film laminate during processing.

此外,處理結束後,可以讓玻璃膜不破損且快速地從支撐玻璃剝離。 In addition, after the treatment is completed, the glass film can be quickly peeled from the supporting glass without breaking.

如果將玻璃膜層積體的厚度做成跟從前的玻璃基板的厚度相同,則也可以共用從前的玻璃基板用的電子裝置製造線,來製造電子裝置。 If the thickness of the glass film laminate is made the same as that of the previous glass substrate, the electronic device manufacturing line for the previous glass substrate may be shared to manufacture electronic devices.

[先前技術文獻] [Prior technical literature] [專利文獻] [Patent Literature]

[專利文獻1]日本特開2011-183792號公報 [Patent Document 1] Japanese Patent Laid-Open No. 2011-183792

在專利文獻1所示之採用玻璃膜層積體作為 液晶面板用基板之場合下,存在針對塗布在玻璃膜上的聚醯亞胺(Polyimide)配向膜之摩擦步驟。接著,摩擦步驟之問題,係在將聚醯亞胺配向膜用摩擦輥朝一定方向摩擦時,摩擦輥會因與玻璃膜的邊緣部接觸而磨耗,破碎的摩擦布纖維散布在玻璃膜的有效面上,而在液晶面板引起光點不良之缺陷。 As shown in Patent Document 1, a glass film laminate is used as In the case of a substrate for a liquid crystal panel, there is a rubbing step for a polyimide alignment film coated on a glass film. Next, the problem of the rubbing step is that when the rubbing roller for polyimide alignment film is rubbed in a certain direction, the rubbing roller will wear due to contact with the edge of the glass film, and the broken friction cloth fibers are effectively dispersed in the glass film. On the surface, the defect of defective light spots is caused in the liquid crystal panel.

於是,期待可以抑制摩擦玻璃膜時的摩擦輥磨耗、防止光點不良的發生。 Therefore, it is expected that the abrasion of the rubbing roller at the time of rubbing the glass film can be prevented and the occurrence of light spot defects can be prevented.

此外,專利文獻1所示之玻璃膜層積體之問題,係在使玻璃膜和支撐玻璃分離時,當玻璃膜的邊緣部有微細的凹凸時,會以該凹凸為起點產生龜裂而至破損。上述微細的凹凸,係在將玻璃膜沿著刻畫線割斷時,在該割斷部之刻畫線的形成部產生的。 In addition, the problem of the glass film laminate shown in Patent Document 1 is that when the glass film is separated from the supporting glass, when there are fine irregularities on the edge of the glass film, cracks may occur from the irregularities as a starting point. damaged. The fine unevenness is generated when the glass film is cut along the scribe line, and is formed in the formation portion of the scribe line of the cut portion.

於是,期待可以抑制剝離玻璃膜時的破損發生,使玻璃膜的產出率提升。 Therefore, it is expected that the occurrence of damage during peeling of the glass film can be suppressed, and the yield of the glass film can be improved.

本發明係有鑑於如此現狀之課題,其目的就是提供一種可以謀求玻璃膜操作性的提升、且防止光點不良及破損發生之玻璃膜層積體及液晶面板之製造方法。 The present invention is conceived in view of such a situation, and an object thereof is to provide a method for manufacturing a glass film laminate and a liquid crystal panel, which can improve the operability of a glass film and prevent the occurrence of light spot defects and damage.

本發明所欲解決之課題係如上述,其次說明供解決此課題用之手段。 The problem to be solved by the present invention is as described above, and the means for solving this problem will be described next.

本案之第1發明為一種玻璃膜層積體,在支撐體層積玻璃膜而製作出的玻璃膜層積體,其特徵係僅在 前述玻璃膜之跟前述支撐體的接觸面側為相反側的面之有效面側,在前述玻璃膜的外周緣具備倒角部。 The first invention of the present invention is a glass film laminate, which is a glass film laminate produced by laminating a glass film on a support. The contact surface side of the glass film with the support is an effective surface side of a surface on the opposite side, and a chamfered portion is provided on an outer peripheral edge of the glass film.

本案之第2發明係前述倒角部之倒角量在前述玻璃膜厚度的50%以下。 The second invention of the present case is that the chamfering amount of the chamfered portion is 50% or less of the thickness of the glass film.

本案之第3發明係前述玻璃膜被形成刻畫線而且沿著前述刻畫線被割斷,選擇形成前述刻畫線之側的面作為前述有效面。 The third invention of the present case is that the glass film is formed with a scribed line and is cut along the scribed line, and a surface on the side where the scribed line is formed is selected as the effective surface.

本案之第4發明係前述支撐體為支撐玻璃。 The 4th invention of this case is the said support body is a support glass.

本案之第5發明係在前述支撐玻璃直接層積前述玻璃膜,而前述玻璃膜與前述支撐玻璃相互接觸之各個接觸面之表面粗度Ra皆為2.0nm以下。 The fifth invention of the present case is that the glass film is directly laminated on the support glass, and the surface roughness Ra of each contact surface where the glass film and the support glass are in contact with each other is 2.0 nm or less.

本案之第6發明係一種液晶面板之製造方法,具有在支撐體上層積玻璃膜來製作玻璃膜層積體之第1步驟,在前述玻璃膜之表面形成液晶配向膜之第2步驟,包含用摩擦輥朝一定方向摩擦前述液晶配向膜的表面之摩擦步驟,在前述玻璃膜層積體之前述玻璃膜的表面形成液晶元件、製作附支撐體之液晶面板之第3步驟,與從前述附支撐體之液晶面板將前述支撐體剝離、製作液晶面板之第4步驟等之液晶面板之製造方法,其特徵係在前述第2步驟之前,僅在前述玻璃膜之跟前述支撐體的接觸面側為相反側的面之有效面側,在前述玻璃膜的外周緣形成倒角部。 The sixth invention of the present case is a method for manufacturing a liquid crystal panel, which includes a first step of manufacturing a glass film laminate by laminating a glass film on a support, and a second step of forming a liquid crystal alignment film on the surface of the glass film, including The rubbing step of rubbing the surface of the liquid crystal alignment film with a rubbing roller in a certain direction, the third step of forming a liquid crystal element on the surface of the glass film of the glass film laminate, and manufacturing a liquid crystal panel with a support, and The liquid crystal panel is a method for manufacturing a liquid crystal panel in which the support is peeled off and the fourth step of manufacturing the liquid crystal panel is characterized in that before the second step, only the contact surface side of the glass film with the support is On the effective surface side of the opposite surface, a chamfered portion is formed on the outer peripheral edge of the glass film.

本案之第7發明係前述倒角部之倒角量在前述玻璃膜厚度的50%以下。 The seventh invention of the present case is that the chamfered amount of the chamfered portion is 50% or less of the thickness of the glass film.

本案之第8發明係前述玻璃膜被形成刻畫線而且沿著該刻畫線被割斷,選擇形成前述刻畫線之側的面作為前述有效面。 An eighth invention of the present case is that the glass film is formed with a scribed line and is cut along the scribed line, and the side on which the scribed line is formed is selected as the effective surface.

本發明之效果,係發揮以下所示之類的效果。 The effects of the present invention are as follows.

根據本案之第1發明,在液晶面板用基板使用玻璃膜之場合下,能夠抑制摩擦輥的磨耗。 According to the first invention of the present application, when a glass film is used as the substrate for a liquid crystal panel, abrasion of the friction roller can be suppressed.

藉此,在採用玻璃膜層積體來製作液晶面板之場合下,能夠抑制光點不良的發生。 Thereby, when a glass film laminated body is used to manufacture a liquid crystal panel, the occurrence of light spot defects can be suppressed.

根據本案之第2發明,在將玻璃膜與支撐體分離時,能夠防止玻璃膜的破損。 According to the second aspect of the present invention, when the glass film is separated from the support, the glass film can be prevented from being damaged.

根據本案之第3發明,能夠防止藥液等浸透到玻璃膜的下面。 According to the third aspect of the present invention, it is possible to prevent the chemical solution or the like from penetrating the lower surface of the glass film.

藉此,能夠防止隨著藥液而讓玻璃膜與支撐體局部地緊貼,進而,防止剝離時的玻璃膜破損。 Thereby, it is possible to prevent the glass film and the support from being closely adhered to each other with the chemical solution, and further, to prevent the glass film from being broken during peeling.

根據本案之第4發明,可易於調合玻璃膜與支撐玻璃之熱膨脹係數,即使在製造關聯處理時進行熱處理後,也可形成不易熱彎曲或破裂等之玻璃膜層積體。 According to the fourth invention of the present case, the thermal expansion coefficients of the glass film and the supporting glass can be easily blended, and even after heat treatment during manufacturing-related processing, a glass film laminate that is not easily warped or cracked can be formed.

根據本案之第5發明,可讓玻璃膜與支撐玻璃以平滑的表面們接觸因而密貼性佳,即使不使用接著劑也能使玻璃膜與支撐玻璃強固地安定層積。 According to the fifth invention of the present case, the glass film and the supporting glass can be brought into contact with smooth surfaces, so that the adhesiveness is good, and the glass film and the supporting glass can be strongly and stably laminated without using an adhesive.

根據本案之第6發明,在液晶面板用基板使 用玻璃膜之場合下,能夠抑制摩擦輥的磨耗。 According to the sixth invention of the present application, a substrate for a liquid crystal panel is used. When a glass film is used, abrasion of the rubbing roller can be suppressed.

藉此,在採用玻璃膜之液晶面板,能夠抑制光點不良的發生。 Thereby, in a liquid crystal panel using a glass film, it is possible to suppress the occurrence of light spot defects.

根據本案之第7發明,在將玻璃膜與支撐玻璃分離時,能夠防止玻璃膜的破損。 According to the seventh invention of the present invention, when the glass film is separated from the supporting glass, the glass film can be prevented from being damaged.

根據本案之第8發明,能夠防止藥液等浸透到玻璃膜的下面。 According to the eighth aspect of the present invention, it is possible to prevent the chemical solution or the like from penetrating the lower surface of the glass film.

藉此,能夠防止隨著藥液而讓玻璃膜與支撐玻璃局部地緊貼,進而,防止剝離時的玻璃膜破損。 With this, it is possible to prevent the glass film and the supporting glass from being closely adhered to each other with the chemical solution, and further to prevent the glass film from being broken during peeling.

1‧‧‧玻璃膜層積體 1‧‧‧ glass film laminate

3‧‧‧液晶面板 3‧‧‧ LCD panel

4‧‧‧附支撐玻璃之液晶面板 4‧‧‧ LCD panel with supporting glass

10‧‧‧玻璃膜 10‧‧‧ glass film

10a‧‧‧接觸面 10a‧‧‧contact surface

10b‧‧‧有效面 10b‧‧‧Effective

11‧‧‧支撐體 11‧‧‧ support

12‧‧‧支撐玻璃 12‧‧‧ Support glass

12a‧‧‧接觸面 12a‧‧‧contact surface

15‧‧‧倒角部 15‧‧‧Chamfer

16‧‧‧畫線面 16‧‧‧line drawing

圖1係顯示玻璃膜層積體之製作狀況之立體模式圖。 FIG. 1 is a three-dimensional schematic diagram showing the manufacturing status of the glass film laminate.

圖2係顯示玻璃膜製作方法(溢流下拉法;overflow downdraw)之側面視剖面模式圖。 FIG. 2 is a schematic side sectional view showing a method for manufacturing a glass film (overflow downdraw method).

圖3係用以說明玻璃膜與支撐玻璃的接合機制之模式圖,(a)圖示氫氧基們的氫結合狀況,(b)則圖示介在水分子之氫結合狀況。 FIG. 3 is a schematic diagram for explaining a bonding mechanism between a glass film and a supporting glass, (a) illustrates a state of hydrogen bonding of hydroxyl groups, and (b) illustrates a state of hydrogen bonding between water molecules.

圖4係顯示玻璃膜層積體之另一實施型態之模式圖。 FIG. 4 is a schematic diagram showing another embodiment of the glass film laminate.

圖5係顯示關於本發明一實施型態之玻璃膜層積體之側面視模式圖,(a)係倒角部為C倒角之場合,(b)係倒角部為R倒角之場合,(c)係倒角量為50%以下之場合。 Fig. 5 is a schematic side view of a glass film laminate according to an embodiment of the present invention, (a) when the chamfered portion is C-chamfered, and (b) when the chamfered portion is R-chamfered (C) When the chamfer amount is 50% or less.

圖6係顯示玻璃膜層積體之側面視模式圖,(a)係 以畫線側之面作為接觸面之場合,(b)係在接觸面側設置倒角部之場合,(c)則是倒角量超過50%之場合。 Fig. 6 is a schematic side view of a glass film laminate, (a) When the line-side surface is used as the contact surface, (b) is a case where a chamfered portion is provided on the contact surface side, and (c) is a case where the chamfered amount exceeds 50%.

圖7顯示關於本發明一實施型態之液晶面板的製造方法之側面視模式圖。 7 is a schematic side view of a method for manufacturing a liquid crystal panel according to an embodiment of the present invention.

圖8係顯示附支撐玻璃之液晶面板之側面視模式圖。 FIG. 8 is a schematic side view of a liquid crystal panel with a supporting glass.

圖9係圖示比較隨著倒角部形成狀況的差異導致之瑕疵情況發生數不同之實驗結果。 FIG. 9 is a graph comparing and comparing the experimental results of the number of occurrences of defects caused by the difference in the formation condition of the chamfered portion.

以下,針對關於本發明之玻璃膜層積體最佳的實施型態,參照圖面且加以說明。 Hereinafter, the best embodiment of the glass film laminate of the present invention will be described with reference to the drawings.

關於本發明一實施型態之玻璃膜層積體1,如圖1所示,係藉由將玻璃膜10與支撐體11層積而被製作出來。 As shown in FIG. 1, a glass film laminate 1 according to an embodiment of the present invention is produced by laminating a glass film 10 and a support 11.

玻璃膜10係採用矽酸鹽玻璃,以採用石英玻璃、硼矽玻璃較佳,而採用無鹼玻璃最佳。 The glass film 10 is made of silicate glass, preferably quartz glass, borosilicate glass, and alkali-free glass.

使玻璃膜10含有鹼成分時,表面會發生陽離子脫落,產生所謂的陽離子置換現象,使構造上變粗。該場合下,使玻璃膜10彎曲而被使用的話,會隨著經年劣化而有從變粗糙的部分破損之可能性。 When the glass film 10 contains an alkali component, cations fall off on the surface, so-called cation replacement phenomenon occurs, and the structure becomes coarse. In this case, when the glass film 10 is bent and used, it may be damaged from a roughened portion as it ages.

又,在此,稱作無鹼玻璃係指實質上並不含鹼成分(鹼金屬氧化物)之玻璃,具體而言,鹼成分為3000ppm以下之玻璃。 The term "alkali-free glass" used herein refers to glass that does not substantially contain an alkali component (alkali metal oxide), and specifically, a glass having an alkali component of 3000 ppm or less.

本發明所用的無鹼玻璃之鹼成分含有量,以1000ppm 以下為佳,在500ppm以下更佳,300ppm以下最佳。 The alkali component content of the alkali-free glass used in the present invention is 1000 ppm The following are preferred, more preferably below 500 ppm, and most preferably below 300 ppm.

玻璃膜10的厚度,以300μm以下為佳,以5~200μm更佳,5~100μm最佳。 The thickness of the glass film 10 is preferably 300 μm or less, more preferably 5 to 200 μm, and most preferably 5 to 100 μm.

藉此,能更薄化玻璃膜10的厚度,並賦予適切的可撓性。 Thereby, the thickness of the glass film 10 can be made thinner, and appropriate flexibility can be provided.

厚度更薄化的玻璃膜10,雖然容易發生操作性困難、並且定位失敗或圖案化時撓曲等問題,但能夠藉由使用後述的支撐體11而容易進行電子裝置製造關聯處理等。 Although the glass film 10 having a thinner thickness is prone to problems such as operability difficulties, positioning failure, and deflection during patterning, it is possible to easily perform processing related to electronic devices and the like by using a support 11 described later.

又,當玻璃膜10的厚度未滿5μm時,其疑慮在於往往會使玻璃膜10的強度變得不足、讓玻璃膜10難以從支撐體11剝離。 When the thickness of the glass film 10 is less than 5 μm, there is a concern that the strength of the glass film 10 may be insufficient and the glass film 10 may be difficult to peel from the support 11.

支撐體11,只要可以支撐玻璃膜10,針對其材質並未特別限定,能夠使用合成樹脂板、天然樹脂板、木板、金屬板、玻璃板、陶瓷板,結晶化玻璃板等。此外,針對支撐體11的厚度也並未特別限定,可以是因應選擇作為支撐體之材質的剛性,來選擇支撐體11的適宜厚度。在以改善玻璃膜10操作性等為目的之場合,也可以使用PET膜等樹脂膜。 The material of the support 11 is not particularly limited as long as it can support the glass film 10, and a synthetic resin plate, a natural resin plate, a wood board, a metal plate, a glass plate, a ceramic plate, a crystallized glass plate, or the like can be used. In addition, the thickness of the support body 11 is also not particularly limited, and an appropriate thickness of the support body 11 may be selected in accordance with the rigidity of the material selected as the support body. When the purpose is to improve the operability of the glass film 10 or the like, a resin film such as a PET film may be used.

如圖1所示,支撐體11最好是使用支撐玻璃12。藉此,即使在電子裝置製造關聯處理時伴隨熱處理,也能讓由於膨脹率差異導致的熱彎曲或玻璃膜10的破裂等不容易發生,可以維持玻璃膜層積體1安定的層積狀態。 As shown in FIG. 1, the supporting body 11 is preferably a supporting glass 12. Thereby, even if heat treatment is performed during the processing related to the manufacture of the electronic device, thermal bending due to the difference in expansion coefficient, cracking of the glass film 10, and the like are less likely to occur, and the stable laminated state of the glass film laminate 1 can be maintained.

支撐玻璃12,跟玻璃膜10同樣地,採用矽酸鹽玻璃、石英玻璃、硼矽玻璃、無鹼玻璃等。 As for the support glass 12, similarly to the glass film 10, silicate glass, quartz glass, borosilicate glass, alkali-free glass, etc. are used.

針對支撐玻璃12,最好是使用跟玻璃膜10在30~380℃下的熱膨脹係數的差為5×10-7/℃以內之玻璃。 For the supporting glass 12, it is preferable to use glass having a difference in thermal expansion coefficient between the glass film 10 and 30 × 380 ° C. within 5 × 10 -7 / ° C.

接著,從抑制膨脹率差異之觀點而言,支撐玻璃12與玻璃膜10最好是使用具有同一組成之玻璃。 Next, from the viewpoint of suppressing the difference in expansion coefficient, it is preferable to use glass having the same composition as the support glass 12 and the glass film 10.

支撐玻璃12的厚度最好是400μm以上。當支撐玻璃12的厚度未滿400μm時,在以單體處置支撐玻璃12之場合下,於強度方面會有問題發生之疑慮。支撐玻璃12的厚度,係以400~700μm為佳,以500~700μm最佳。 The thickness of the support glass 12 is preferably 400 μm or more. When the thickness of the support glass 12 is less than 400 μm, there is a concern that a problem may occur in terms of strength when the support glass 12 is handled by a single body. The thickness of the supporting glass 12 is preferably 400 to 700 μm, and most preferably 500 to 700 μm.

藉此,可以使支撐玻璃12確實地支撐玻璃膜10,而且可以有效地抑制在將玻璃膜10從支撐玻璃12剝離時可能發生的玻璃膜10破損。 Accordingly, the supporting glass 12 can surely support the glass film 10, and the glass film 10 can be effectively prevented from being damaged when the glass film 10 is peeled from the supporting glass 12.

又,在塗布液晶配向膜時,在未圖示的定位器上載置玻璃膜層積體1之場合下,支撐玻璃12的厚度未滿400μm(例如300μm等,跟玻璃膜10同一厚度)亦可。 When the liquid crystal alignment film is applied, when the glass film laminate 1 is placed on a positioner (not shown), the thickness of the support glass 12 may be less than 400 μm (for example, 300 μm, etc., the same thickness as the glass film 10). .

於本實施型態使用之玻璃膜10及支撐玻璃12,利用下拉法而成形較佳,利用溢流下拉法而成形更佳。 The glass film 10 and the support glass 12 used in this embodiment are better formed by the down-draw method, and more preferably formed by the overflow down-draw method.

特別是,圖2所示之溢流下拉法,係一種在成形時讓玻璃板雙面並不跟成形構件接觸之成形法,能在所得到的玻璃板的雙面(透光面)不容易產生傷痕,即使不研磨也可得到高的表面品級。當然,本發明使用之玻璃膜10及支撐玻璃12,也可以是利用浮式法或流孔下引法、轉出 法、垂直引上法、再伸延法等而成形的。 In particular, the overflow down-draw method shown in FIG. 2 is a molding method in which the double-sided glass plate is not brought into contact with the molding member during molding, and it is not easy to obtain the double-sided (light-transmitting surface) of the obtained glass plate. Scratches occur, and high surface grades can be obtained without polishing. Of course, the glass film 10 and the supporting glass 12 used in the present invention may also be floated out or floated down. Method, vertical pull-in method, re-extension method, etc.

在圖2所示之溢流下拉法,剛從剖面為楔形的成形體20的下端部21流下之後的玻璃帶材(glass-ribbon)G,利用冷卻輥22邊被限制幅方向的收縮邊往下方被拉長直到薄到指定厚度。其次,藉由將前述達到指定厚度的玻璃帶材G用未圖示的徐冷爐(annealing;退火)逐漸冷卻、除去玻璃帶材G的熱變形、將玻璃帶材G切斷成指定尺寸,讓玻璃膜10及支撐玻璃12分別成形。 In the overflow down-draw method shown in FIG. 2, the glass ribbon (G-ribbon) G immediately after flowing down from the lower end portion 21 of the formed body 20 having a wedge-shaped cross-section is cooled down by the cooling roller 22 while being restricted in the width direction. The bottom is stretched until thin to the specified thickness. Next, the glass ribbon G having a predetermined thickness is gradually cooled in an annealing furnace (not shown) to remove the thermal deformation of the glass ribbon G, and the glass ribbon G is cut to a predetermined size, so that the glass The film 10 and the support glass 12 are respectively formed.

以下,說明了採用支撐玻璃12作為支撐體11之實施型態。針對因支撐玻璃12材質所特有說明處以外之部分,亦可以酌情將支撐玻璃12一詞換成支撐體11。 Hereinafter, an embodiment in which the supporting glass 12 is used as the supporting body 11 will be described. For parts other than the specific explanation due to the material of the supporting glass 12, the term supporting glass 12 may be replaced with the supporting body 11 as appropriate.

如圖1所示,在玻璃膜10,設定接觸面10a與有效面10b。 As shown in FIG. 1, in the glass film 10, a contact surface 10 a and an effective surface 10 b are set.

接觸面10a,係在跟支撐玻璃12層積時,跟該支撐玻璃12相對、接觸之側的面。 The contact surface 10 a is a surface on the side opposite to and in contact with the support glass 12 when it is laminated with the support glass 12.

此外,有效面10b,係跟接觸面10a為相反側的面,為被施予元件形成等製造關聯處理之側的面。 The effective surface 10b is a surface on the opposite side to the contact surface 10a, and is a surface on the side subjected to manufacturing-related processing such as element formation.

再者,在此之圖示雖省略,但在玻璃膜10的周緣部係形成倒角部。於後段詳述該倒角部。 Although not shown here, chamfered portions are formed in the peripheral portion of the glass film 10. The chamfered portion will be described in detail in a subsequent paragraph.

此外,如圖1所示,在支撐玻璃12,設定接觸面12a與搬送面12b。 As shown in FIG. 1, a contact surface 12 a and a conveying surface 12 b are set on the support glass 12.

接觸面12a,係在跟玻璃膜10層積時,跟該玻璃膜10相對、接觸之側的面。 The contact surface 12 a is a surface on the side opposite to and in contact with the glass film 10 when laminated with the glass film 10.

此外,搬送面12b係跟接觸面12a相反側的面,並在 玻璃膜層積體1被搬送過搬送輥上時,接在該搬送輥之側的面。 In addition, the conveying surface 12b is a surface opposite to the contact surface 12a, and When the glass film laminated body 1 is conveyed on a conveying roller, it is connected to the surface on the side of the conveying roller.

圖1中,在支撐玻璃12上層積著略同一面積的玻璃膜10,但也可以是讓支撐玻璃12突出玻璃膜10之方式層積。 In FIG. 1, a glass film 10 having a substantially the same area is laminated on the supporting glass 12. However, the supporting glass 12 may be laminated so as to protrude from the glass film 10.

此場合下,支撐玻璃12從玻璃膜10之超出量係以0.5~10mm為佳,以0.5~1mm更佳。 In this case, the excess of the supporting glass 12 from the glass film 10 is preferably 0.5 to 10 mm, and more preferably 0.5 to 1 mm.

支撐玻璃12的超出量減少,能夠確保更擴大玻璃膜10的有效面10b的面積。 The excess amount of the support glass 12 is reduced, and the area of the effective surface 10 b of the glass film 10 can be ensured to be further enlarged.

此外,在玻璃膜層積體1,最好是在四邊全部,讓支撐玻璃12超出玻璃膜10。 In addition, in the glass film laminated body 1, it is preferable that all of the four sides are covered so that the supporting glass 12 extends beyond the glass film 10.

此外,在支撐玻璃12上層積玻璃膜10之步驟,也可以於減壓下進行。藉此,即便在層積時有氣泡發生,在此後的減壓、真空步驟下氣泡增大,結果能防止於真空步驟內玻璃破損等之瑕疵。 The step of laminating the glass film 10 on the support glass 12 may be performed under reduced pressure. Thereby, even if bubbles occur during lamination, bubbles increase in the subsequent decompression and vacuum steps, and as a result, defects such as glass breakage in the vacuum step can be prevented.

玻璃膜10的接觸面10a、與支撐玻璃12的接觸面12a之表面粗度Ra最好是2.0nm以下。藉此,可讓玻璃膜與支撐玻璃以平滑的表面們接觸因而密貼性佳,即使不使用接著劑也能使玻璃膜與支撐玻璃強固地安定層積。 The surface roughness Ra of the contact surface 10a of the glass film 10 and the contact surface 12a of the support glass 12 is preferably 2.0 nm or less. Thereby, the glass film and the supporting glass can be brought into contact with smooth surfaces, so that the adhesiveness is good, and the glass film and the supporting glass can be firmly and stably laminated even without using an adhesive.

為了將玻璃膜10與支撐玻璃12在沒有接著劑下強固地層積,本發明使用之玻璃膜10及支撐玻璃12之各個接觸面10a、12a的表面粗度Ra,各在1.0nm以下為佳,在0.5nm以下更佳,0.2nm以下最佳。 In order to strongly laminate the glass film 10 and the support glass 12 without an adhesive, the surface roughness Ra of each contact surface 10a, 12a of the glass film 10 and the support glass 12 used in the present invention is preferably 1.0 nm or less, It is more preferably below 0.5 nm, and most preferably below 0.2 nm.

本實施型態中,將玻璃膜10與支撐玻璃12相互接觸之側的面之表面粗度Ra設定各為2.0nm以下,第1步驟中,藉由將相互接觸之側的面的表面粗度Ra各為2.0nm以下之玻璃膜10與支撐玻璃12予以層積、將玻璃膜10對著支撐玻璃12強固地固定,來製作玻璃膜層積體1。 In the present embodiment, the surface roughness Ra of the surface on the side where the glass film 10 and the support glass 12 are in contact with each other is set to 2.0 nm or less. In the first step, the surface roughness of the surface on the side where the glass is in contact with each other is set. A glass film 10 and a support glass 12 each having a Ra of 2.0 nm or less are laminated, and the glass film 10 is firmly fixed against the support glass 12 to produce a glass film laminate 1.

玻璃膜10與支撐玻璃12之各接觸面10a、12a的表面粗度Ra平滑化成2.0nm以下時,在使該等二個平滑的玻璃基板密貼之場合下玻璃基板們在沒有接著劑下緊貼成可以剝離的程度而形成玻璃膜層積體1。此現象係依照以下機制而推測的。 When the surface roughness Ra of each contact surface 10a, 12a of the glass film 10 and the support glass 12 is smoothed to 2.0 nm or less, when the two smooth glass substrates are closely adhered, the glass substrates are tightened without an adhesive. The glass film laminated body 1 was formed so that it might peel. This phenomenon is speculated according to the following mechanism.

考慮如圖3(a)所示,藉由在玻璃膜10的表面(接觸面10a)與支撐玻璃12的表面(接觸面12a)被形成之氫氧基彼此的氫鍵吸引到一起。或者,考慮如圖3(b)藉由使玻璃膜10與支撐玻璃12的界面13讓存在的水分子中介並形成氫鍵而讓玻璃膜10與支撐玻璃12相互地緊貼。 It is considered that, as shown in FIG. 3 (a), the surfaces of the glass film 10 (the contact surface 10 a) and the surface of the support glass 12 (the contact surface 12 a) are attracted to each other by the hydrogen bonds of the hydroxyl groups. Alternatively, as shown in FIG. 3 (b), the glass film 10 and the support glass 12 can be closely adhered to each other by interposing the water molecules existing at the interface 13 between the glass film 10 and the support glass 12 to form hydrogen bonds.

又,本實施型態,是在支撐玻璃12上直接層積玻璃膜10,但也可以如圖4所示,在玻璃膜10與支撐玻璃12之間使用樹脂層14使之層積。由於玻璃膜10最後會被剝離,所以樹脂層14最好是使用微黏性者。樹脂層14,可以使用聚乙烯、聚氯乙烯、聚對苯二甲酸乙二酯、聚偏二氯乙烯、聚丙烯、聚乙烯醇、聚酯、聚碳酸酯、聚苯乙烯、聚丙烯腈、乙烯-醋酸乙烯酯共聚物、乙烯-乙烯醇共聚物、乙烯-甲基丙烯酸共聚物、尼龍、賽璐 玢(cellophane)、矽氧樹脂等;樹脂層14,針對材質本身具有黏性之場合可以僅僅使用基材、或使用在基材的雙面另外塗布黏著劑、或沒有基材而僅有黏著層。 In this embodiment, the glass film 10 is directly laminated on the support glass 12. However, as shown in FIG. 4, a resin layer 14 may be laminated between the glass film 10 and the support glass 12. Since the glass film 10 will eventually be peeled off, the resin layer 14 is preferably made of a slightly adhesive material. As the resin layer 14, polyethylene, polyvinyl chloride, polyethylene terephthalate, polyvinylidene chloride, polypropylene, polyvinyl alcohol, polyester, polycarbonate, polystyrene, polyacrylonitrile, Ethylene-vinyl acetate copolymer, ethylene-vinyl alcohol copolymer, ethylene-methacrylic acid copolymer, nylon, celluloid Cellophane, silicone resin, etc .; the resin layer 14 can be used only for the base material when the material itself is tacky, or coated on both sides of the base material with an additional adhesive, or there is no base material and only the adhesive layer .

另一方面,玻璃膜10的有效面10b的表面粗度、或支撐玻璃12的搬送面12b的表面粗度並未特別受限定。 On the other hand, the surface roughness of the effective surface 10b of the glass film 10 or the surface roughness of the transport surface 12b of the support glass 12 is not particularly limited.

亦即,關於本實施型態之玻璃膜層積體1,係使用支撐玻璃12來作為支撐體11。 That is, regarding the glass film laminated body 1 of this embodiment, the support glass 12 is used as the support body 11.

根據此類之構成,可易於調合玻璃膜10與支撐玻璃12之熱膨脹係數,即使在製造關聯處理時進行熱處理後,也可形成不易熱彎曲或破裂等之玻璃膜層積體1。 According to such a structure, the thermal expansion coefficients of the glass film 10 and the support glass 12 can be easily adjusted, and even after the heat treatment during the manufacturing-related processing, the glass film laminate 1 that is not easily warped or cracked can be formed.

此外,關於本實施型態之玻璃膜層積體1,係在支撐玻璃12直接層積玻璃膜10,玻璃膜10與支撐玻璃12相互接觸之各自接觸面10a、12a的表面粗度Ra皆為2.0nm以下。 In addition, regarding the glass film laminate 1 of this embodiment, the glass film 10 is directly laminated on the support glass 12, and the surface roughness Ra of the respective contact surfaces 10 a and 12 a of the glass film 10 and the support glass 12 that are in contact with each other is 2.0nm or less.

藉由此類之構成,可讓玻璃膜10與支撐玻璃12以平滑的表面們接觸因而密貼性佳,即使不使用接著劑也可使玻璃膜10與支撐玻璃12強固地安定層積。 With such a structure, the glass film 10 and the supporting glass 12 can be brought into contact with each other on a smooth surface, so that the adhesiveness is good, and the glass film 10 and the supporting glass 12 can be strongly and stably laminated without using an adhesive.

其次,針對關於本發明一實施型態之玻璃膜層積體1之倒角部的形成狀況,採用圖5、圖6予以說明。 Next, the formation of the chamfered portion of the glass film laminate 1 according to an embodiment of the present invention will be described with reference to FIGS. 5 and 6.

如圖5(a)(b)所示,關於本實施型態之玻璃膜層積體1方面,為了防止摩擦布的磨耗,而在磨耗主要因素之玻璃膜10的邊緣部(周緣部)形成倒角部15。 As shown in FIG. 5 (a) and (b), regarding the glass film laminate 1 according to this embodiment, in order to prevent the abrasion of the friction cloth, the edge portion (peripheral portion) of the glass film 10 which is the main factor of abrasion is formed Chamfer 15

倒角部15,係對著玻璃膜10,將其周緣部利用研削等手法做成倒角。作為倒角部15的形成方法,係能使用使用研磨磨石或研削磨石、研磨帶等之機械性倒角方法,或使用氫氟酸等之化學性倒角方法、利用燃燒器或雷射照射等之熱的倒角方法。 The chamfered portion 15 faces the glass film 10, and the peripheral portion is chamfered by a method such as grinding. As the method of forming the chamfered portion 15, a mechanical chamfering method using a grinding stone, a grinding stone, a grinding belt, or the like, a chemical chamfering method using hydrofluoric acid, or the like, a burner or a laser can be used. Chamfering method by radiating heat.

此外,倒角部15係能夠採用圖5(a)所示之類的C倒角(倒角角度為45度)之型態、或圖5(b)所示之類的R倒角之型態。 In addition, the chamfered portion 15 can be a C-chamfered type (chamfered angle of 45 degrees) as shown in FIG. 5 (a), or an R-chamfered type as shown in FIG. 5 (b). state.

又,倒角部15並不受限於C倒角或R倒角之型態,可以採用組合C倒角與R倒角之型態、或將倒角角度做成45度以外之型態等種種型態。 In addition, the chamfered portion 15 is not limited to a C-chamfered or R-chamfered shape, and a combination of a C-chamfered and R-chamfered shape or a shape other than 45 degrees may be used. Various types.

此外,玻璃膜層積體1之倒角部15,係做成僅在玻璃膜10的有效面10b側形成之構成。 The chamfered portion 15 of the glass film laminate 1 is configured to be formed only on the effective surface 10 b side of the glass film 10.

再者,關於本實施型態之玻璃膜層積體1方面,最好如圖5(a)(b)(c)所示,選擇玻璃膜10的畫線面16側當作有效面10b,在畫線面16側的周緣部形成倒角部15。 Furthermore, regarding the glass film laminate 1 of this embodiment, it is preferable to select the drawing surface 16 side of the glass film 10 as the effective surface 10b as shown in FIGS. 5 (a) (b) (c). A chamfered portion 15 is formed on a peripheral edge portion on the drawing surface 16 side.

又,在此稱「畫線面」,係意味被形成供割斷用之割斷線(刻畫線)、沿著刻畫線被割斷之玻璃膜之,被形成前述刻畫線之側的面。 The term “line drawing surface” used herein refers to a surface formed on the side of the above-mentioned drawing line by forming a cutting line (engraving line) for cutting and a glass film cut along the drawing line.

圖6(a)係顯示作為關於本發明一實施型態之玻璃膜層積體,將倒角部15僅形成在玻璃膜10的有效面10b側之玻璃膜層積體1a。 FIG. 6 (a) shows a glass film laminate 1 a in which a chamfered portion 15 is formed only on the effective surface 10 b side of the glass film 10 as a glass film laminate according to an embodiment of the present invention.

只是,玻璃膜層積體1a方面,選擇玻璃膜10的畫線 面16側為接觸面10a,這點上並不同於圖5(a)(b)(c)所示之玻璃膜層積體1。 However, for the glass film laminate 1a, the drawing of the glass film 10 is selected. The surface 16 side is the contact surface 10a, which is different from the glass film laminate 1 shown in FIG. 5 (a) (b) (c) in this point.

玻璃膜層積體1a方面,如圖6(a)所示,藉由使玻璃膜10的畫線面16的端部被形成之畫線痕跡,讓對有效面10b進行加工處理或洗淨處理等時所用的藥液等浸透,而在玻璃膜10和支撐玻璃12之界面13形成藥液等之浸透部17。以此方式,由於在玻璃膜10和支撐玻璃12之界面13形成浸透部17時,因浸透部17的藥液等會導致玻璃膜10和支撐玻璃12緊貼,而在玻璃膜10剝離時,有可能使玻璃膜10發生破損。 With regard to the glass film laminate 1a, as shown in FIG. 6 (a), the effective surface 10b is processed or cleaned by drawing a line mark formed on the end of the line drawing surface 16 of the glass film 10. The chemical solution or the like used for the permeation is permeated, and an infiltration part 17 of the chemical solution or the like is formed at the interface 13 between the glass film 10 and the support glass 12. In this way, when the infiltration portion 17 is formed at the interface 13 between the glass film 10 and the support glass 12, the glass film 10 and the support glass 12 are closely adhered due to the chemical solution or the like of the infiltration portion 17, and when the glass film 10 is peeled off, The glass film 10 may be damaged.

亦即,玻璃膜層積體1a方面,雖可以利用倒角部15來防止摩擦布的磨耗,但在玻璃膜10剝離時卻有可能使玻璃膜10發生破損。因此可以說,相較於玻璃膜層積體1a,圖5(a)所示之玻璃膜層積體1是更好的型態。 That is, in the glass film laminate 1a, although the chamfered portion 15 can be used to prevent abrasion of the rubbing cloth, the glass film 10 may be damaged when the glass film 10 is peeled. Therefore, it can be said that the glass film laminate 1 shown in FIG. 5 (a) is a better type than the glass film laminate 1a.

亦即,在關於本實施型態之玻璃膜層積體1,玻璃膜10被形成刻畫線而且沿著刻畫線被割斷,選擇被形成刻畫線之側的面的畫線面16當作有效面10b。 That is, in the glass film laminate 1 according to this embodiment, the glass film 10 is formed with a scribe line and is cut along the scribe line. The scribe line surface 16 on the side where the scribe line is formed is selected as the effective surface. 10b.

根據此類之構成,能夠防止玻璃膜10的下面讓藥液浸透。藉此,能夠防止隨著藥液而讓玻璃膜10與支撐體11局部地緊貼,進而,防止剝離時的玻璃膜10破損。 With such a configuration, it is possible to prevent the chemical solution from being impregnated into the lower surface of the glass film 10. Thereby, it is possible to prevent the glass film 10 and the support body 11 from being brought into close contact with each other with the chemical solution, and further to prevent the glass film 10 from being broken during peeling.

此外,圖6(b)係例示將倒角部15形成在接觸面10a側之玻璃膜層積體1b。 6 (b) illustrates a glass film laminate 1b in which the chamfered portion 15 is formed on the contact surface 10a side.

玻璃膜層積體1b方面,隨著使倒角部15讓在對有效面10b進行加工處理或洗淨處理等時所用的藥液等浸透, 而在玻璃膜10和支撐玻璃12之界面13形成藥液等之浸透部17,由於在浸透部17使玻璃膜10和支撐玻璃12緊貼著,而在玻璃膜10剝離時提高了玻璃膜10發生破損之可能性。此外,該圖6(b)所示之型態方面,也不能利用倒角部15來防止摩擦布的磨耗。 With respect to the glass film laminate 1b, as the chamfered portion 15 is allowed to permeate the chemical solution or the like used in processing or cleaning the effective surface 10b, On the interface 13 between the glass film 10 and the support glass 12, an infiltration portion 17 such as a chemical solution is formed. Since the glass film 10 and the support glass 12 are in close contact with each other in the infiltration portion 17, the glass film 10 is improved when the glass film 10 is peeled off. The possibility of damage. In addition, in the aspect shown in FIG. 6 (b), the chamfered portion 15 cannot be used to prevent abrasion of the friction cloth.

因此,關於本實施型態之玻璃膜層積體1、1a,並不包含如圖6(b)所示之類的在接觸面10a側形成倒角部15的型態的玻璃膜層積體1b、或在玻璃膜10的接觸面10a和有效面10b的雙方形成倒角部15、15之型態等。 Therefore, the glass film laminates 1 and 1a according to the embodiment do not include the glass film laminates of the type in which the chamfered portions 15 are formed on the contact surface 10a side as shown in FIG. 6 (b). 1b, or the shape of the chamfered portions 15, 15 formed on both the contact surface 10a and the effective surface 10b of the glass film 10.

亦即,關於本實施型態之玻璃膜層積體1,係在支撐體11層積玻璃膜10而製作出的層積體;僅在玻璃膜10之跟支撐體11的接觸面10a側為相反側的面之有效面10b側,在玻璃膜10的外周緣具備倒角部15。 That is, the glass film laminate 1 according to this embodiment is a laminate made by laminating the glass film 10 on the support 11; only on the contact surface 10a side of the glass film 10 and the support 11 is On the side of the effective surface 10 b of the surface on the opposite side, a chamfered portion 15 is provided on the outer peripheral edge of the glass film 10.

再又,關於本實施型態之玻璃膜層積體1方面,最好是把倒角部15的倒角量做成玻璃膜10厚度的50%以下之構成。 Furthermore, regarding the glass film laminate 1 according to this embodiment, it is preferable that the chamfered amount of the chamfered portion 15 be 50% or less of the thickness of the glass film 10.

如圖5(c)所示,玻璃膜層積體1方面,係將倒角部15的倒角量H做成玻璃膜10厚度d的50%以下。 As shown in FIG. 5 (c), in the glass film laminate 1, the chamfering amount H of the chamfered portion 15 is set to 50% or less of the thickness d of the glass film 10.

另一方面,圖6(c)所示之玻璃膜層積體1c方面,與玻璃膜層積體1同樣地,倒角部15係做成僅在玻璃膜10的有效面10b側形成之構成。 On the other hand, as for the glass film laminate 1c shown in FIG. 6 (c), as with the glass film laminate 1, the chamfered portion 15 is formed only on the effective surface 10b side of the glass film 10. .

此外,玻璃膜層積體1c方面,與玻璃膜層積體1同樣地,係選擇玻璃膜10的畫線面16側當作有效面10b。 The glass film laminate 1c is similar to the glass film laminate 1 in that the drawing line 16 side of the glass film 10 is selected as the effective surface 10b.

然而,玻璃膜層積體1c方面,倒角部15的倒角量H 超過玻璃膜10厚度d的50%,這點,則跟玻璃膜層積體1不同。 However, in the glass film laminate 1c, the chamfering amount H of the chamfered portion 15 When it exceeds 50% of the thickness d of the glass film 10, it is different from the glass film laminate 1.

這場合下,由於在將玻璃膜10從支撐玻璃12剝離時,作用在倒角部15的彎曲應力有一部份會作用到拉張方向,因為彎曲應力,而有以倒角部15存在的微小的碎裂等為起點發生破損之憂慮。 In this case, when the glass film 10 is peeled from the support glass 12, a part of the bending stress acting on the chamfered portion 15 will be applied to the tensile direction. Because of the bending stress, there is a slight presence of the chamfered portion 15. Fragmentation of the starting point is the worry of breakage.

此類之構成的玻璃膜層積體1c方面,雖可以利用倒角部15來防止摩擦布的磨耗,但在玻璃膜10剝離時卻有可能使玻璃膜10發生破損。 In the glass film laminate 1c having such a structure, although the chamfered portion 15 can be used to prevent abrasion of the rubbing cloth, the glass film 10 may be damaged when the glass film 10 is peeled.

因此可以說,相較於玻璃膜層積體1c,圖5(c)所示之玻璃膜層積體1是更好的型態。 Therefore, it can be said that the glass film laminate 1 shown in FIG. 5 (c) is a better type than the glass film laminate 1c.

玻璃膜層積體1方面,由於在將玻璃膜10從支撐玻璃12剝離時,作用在倒角部15的彎曲應力有一部份會作用到壓縮方向,因為彎曲應力,而能夠抑制起因於倒角部15存在的微小的碎裂等之破損發生。 With respect to the glass film laminate 1, when the glass film 10 is peeled from the support glass 12, a part of the bending stress acting on the chamfered portion 15 acts on the compression direction, and the bending stress can suppress the cause of the chamfering. Damage such as minute chipping in the portion 15 occurs.

又,如果倒角部15的表面粗度小,則摩擦布的磨耗減低效果、或起因於碎裂的破損之防止效果會提高,因而,最好使倒角部15的表面粗度極力小化。 In addition, if the surface roughness of the chamfered portion 15 is small, the effect of reducing the abrasion of the friction cloth or the effect of preventing damage due to chipping will increase. Therefore, it is desirable to minimize the surface roughness of the chamfered portion 15 .

亦即,在關於本實施型態之玻璃膜層積體1,倒角部15之倒角量H係玻璃膜10厚度d的50%以下(亦即,H≦d/2)。 That is, in the glass film laminate 1 according to this embodiment, the chamfering amount H of the chamfered portion 15 is 50% or less of the thickness d of the glass film 10 (that is, H ≦ d / 2).

根據此類之構成,就能在分離玻璃膜10和支撐體11時,防止玻璃膜10破損。 With such a configuration, the glass film 10 can be prevented from being damaged when the glass film 10 and the support 11 are separated.

其次,針對關於本發明一實施型態之液晶面 板之製造方法,用圖7、圖8來說明。 Secondly, with regard to a liquid crystal panel according to an embodiment of the present invention, A method for manufacturing the plate will be described with reference to FIGS. 7 and 8.

關於本實施型態之液晶面板3之製造方法方面,玻璃膜層積體1,如圖7所示方式,在第1步驟藉由層積玻璃膜10與支撐體11而被製作。又,本實施型態方面,將在玻璃膜10上被形成液晶面板3之型態之玻璃膜層積體1,稱作附支撐玻璃之液晶面板4。換言之,從附支撐玻璃之液晶面板4將支撐玻璃12剝離‧除去者即為液晶面板3(參照圖7)。 Regarding the manufacturing method of the liquid crystal panel 3 of this embodiment, the glass film laminate 1 is manufactured by laminating the glass film 10 and the support 11 in the first step as shown in FIG. 7. In addition, in the aspect of this embodiment, the glass film laminate 1 in the form of a liquid crystal panel 3 formed on the glass film 10 is referred to as a liquid crystal panel 4 with a supporting glass. In other words, if the support glass 12 is peeled off and removed from the liquid crystal panel 4 with the support glass, it is the liquid crystal panel 3 (see FIG. 7).

玻璃膜層積體1,在第2步驟,係在玻璃膜10上塗布由聚醯亞胺材料所構成的液晶配向膜31。 In the second step, the glass film laminate 1 is coated on the glass film 10 with a liquid crystal alignment film 31 made of a polyimide material.

關於本實施型態之液晶面板3之製造方法之第3步驟方面,如圖7所示,在製作附支撐玻璃之液晶面板4時,用摩擦輥5朝一定方向來摩擦玻璃膜10的液晶配向膜31,使液晶分子朝指定方向排列。 Regarding the third step of the method for manufacturing the liquid crystal panel 3 in this embodiment, as shown in FIG. 7, when the liquid crystal panel 4 with a supporting glass is manufactured, the liquid crystal alignment of the glass film 10 is rubbed with the rubbing roller 5 in a certain direction. The film 31 aligns liquid crystal molecules in a predetermined direction.

摩擦輥5,係在滾子面具備由再生纖維素纖維等所構成被施以導電處理之布材之滾子狀構件,被構成可以繞著輥軸轉動,構成能夠朝指定方向轉動、同時朝一定方向摩擦液晶配向膜31。 The friction roller 5 is a roller-shaped member provided on the roller surface with a conductive material made of regenerated cellulose fiber and the like. The roller is configured to be rotatable around a roller axis, and is capable of rotating in a predetermined direction and at the same time. The liquid crystal alignment film 31 is rubbed in a certain direction.

液晶配向膜31,係藉著以摩擦輥5朝一定方向摩擦,而讓聚醯亞胺材料的分子朝一定方向配向。 The liquid crystal alignment film 31 is aligned in a certain direction by rubbing the rubbing roller 5 in a certain direction.

以此方式使摩擦輥5,因為具備由再生纖維素纖維等所構成的滾子面,所以,當摩擦液晶配向膜31時的摩擦力於玻璃膜10的邊緣部等局部地施力過大時,就具有該施力過大部位的纖維磨耗而破碎之性質。 In this way, the friction roller 5 is provided with a roller surface composed of regenerated cellulose fibers and the like. Therefore, when the frictional force when rubbing the liquid crystal alignment film 31 is locally excessively exerted on the edge portion of the glass film 10 or the like, The fiber has a property of abrasion and breakage at the excessively applied force.

在關於本實施型態之液晶面板3之製造方法,倒角部15之形成可以是進行直到第3步驟(亦即摩擦步驟)進行之前,或是在比第1步驟前面,或是在第1步驟和第2步驟之間進行。換言之,也可以於玻璃膜10的狀態下形成倒角部15之後,藉由進行第1步驟而在支撐玻璃12上層積被形成倒角部15的玻璃膜10。此場合下,就能夠容易地在玻璃膜10製作倒角部15。或者,也可以在製作第1步驟後的玻璃膜層積體1之後,藉由僅把被層積在支撐玻璃12上的玻璃膜10進行倒角,來形成倒角部15。此場合下,能夠防止進行倒角時所發生的玻璃粉在層積時成為氣泡的原因。 Regarding the manufacturing method of the liquid crystal panel 3 in this embodiment, the formation of the chamfered portion 15 may be performed until the third step (that is, the rubbing step) is performed, or before the first step, or before the first step. Perform between step 2 and step 2. In other words, after the chamfered portion 15 is formed in the state of the glass film 10, the glass film 10 on which the chamfered portion 15 is formed may be laminated on the support glass 12 by performing the first step. In this case, the chamfered portion 15 can be easily formed in the glass film 10. Alternatively, after the glass film laminate 1 after the first step is manufactured, the chamfered portion 15 may be formed by chamfering only the glass film 10 laminated on the support glass 12. In this case, it is possible to prevent the glass frit generated during the chamfering from causing bubbles during lamination.

以此方式,能夠藉由在玻璃膜10的有效面10b側形成倒角部15,來防止在摩擦步驟時於摩擦輥5與玻璃膜10的邊緣部之間所發生的摩擦力過大,藉此,能夠抑制構成摩擦輥5的摩擦布磨耗而破碎之情事。 In this way, by forming the chamfered portion 15 on the effective surface 10b side of the glass film 10, it is possible to prevent the frictional force generated between the friction roller 5 and the edge portion of the glass film 10 from being excessive during the rubbing step, thereby It is possible to prevent the friction cloth constituting the friction roller 5 from being worn out and broken.

再者,第3步驟方面,如圖8所示,將藉著摩擦而被配向的液晶配向膜31於彩色濾光片側玻璃基板6予以密封同時施以液晶的注入(未圖示)等,而在玻璃膜10上形成液晶元件32。 In the third step, as shown in FIG. 8, the liquid crystal alignment film 31 that is aligned by friction is sealed on the color filter-side glass substrate 6 and the liquid crystal is injected (not shown). A liquid crystal element 32 is formed on the glass film 10.

又,圖8所示之型態方面,雖是將彩色濾光片側玻璃基板6與玻璃膜10直接黏接,但也可以酌情使用周知的玻璃粉(glass frit)或間隔件等來黏接彩色濾光片側玻璃基板6與玻璃膜10。此外,圖7、圖8所示之型態方面,在彩色濾光片側玻璃基板6也使用支撐玻璃12(支撐體 11)。此外,本實施型態所使用之層積彩色濾光片側玻璃基板6與支撐玻璃12(支撐體11)之玻璃膜層積體,也具有跟本發明之玻璃膜層積體1同樣的構成。 In the aspect shown in FIG. 8, although the color filter-side glass substrate 6 and the glass film 10 are directly adhered, a known glass frit, a spacer, or the like may be used for adhesion as appropriate. The color filter-side glass substrate 6 and the glass film 10. In addition, in the form shown in FIGS. 7 and 8, the supporting glass 12 (supporting body) is also used for the color filter-side glass substrate 6. 11). In addition, the glass film laminated body of the laminated color filter-side glass substrate 6 and the supporting glass 12 (supporting body 11) used in this embodiment also has the same configuration as the glass film laminated body 1 of the present invention. .

作為用在液晶元件32密封之基板,跟前述的玻璃膜10同樣地,可以採用由矽酸鹽玻璃、石英玻璃、硼矽玻璃、無鹼玻璃等所構成的彩色濾光片側玻璃基板6。 As the substrate used for sealing the liquid crystal element 32, similar to the aforementioned glass film 10, a color filter-side glass substrate 6 made of silicate glass, quartz glass, borosilicate glass, alkali-free glass, or the like can be used.

針對彩色濾光片側玻璃基板6,最好是使用跟玻璃膜10在30~380℃下的熱膨脹係數的差為5×10-7/℃以內之玻璃。 For the color filter-side glass substrate 6, it is preferable to use glass having a difference in thermal expansion coefficient between the glass film 10 and 30 × 380 ° C. within 5 × 10 -7 / ° C.

藉此,即使製作的液晶面板3的週邊環境溫度改變,也不易發生因膨脹率的差導致之熱彎曲或玻璃膜10及彩色濾光片側玻璃基板6的破裂等,而可以做成不易破損的液晶面板3。 Thereby, even if the ambient temperature of the manufactured liquid crystal panel 3 is changed, thermal bending due to the difference in expansion coefficient, cracking of the glass film 10 and the color filter-side glass substrate 6 and the like are unlikely to occur, and it is possible to make it difficult to break. The LCD panel 3.

接著,從抑制膨脹率差異之觀點而言,彩色濾光片側玻璃基板6與玻璃膜10最好是使用具有同一組成之玻璃。 Next, from the viewpoint of suppressing the difference in expansion coefficient, it is preferable to use glass having the same composition as the color filter-side glass substrate 6 and the glass film 10.

彩色濾光片側玻璃基板6的厚度,以300μm以下為佳,以5~200μm更佳,5~100μm最佳。藉此,能更薄化彩色濾光片側玻璃基板6的厚度,並賦予適切的可撓性。當彩色濾光片側玻璃基板6的厚度未滿5μm時,則有彩色濾光片側玻璃基板6的強度往往不足之疑慮。 The thickness of the color filter-side glass substrate 6 is preferably 300 μm or less, more preferably 5 to 200 μm, and most preferably 5 to 100 μm. Thereby, the thickness of the color filter-side glass substrate 6 can be made thinner, and appropriate flexibility can be provided. When the thickness of the color filter-side glass substrate 6 is less than 5 μm, the strength of the color filter-side glass substrate 6 may be insufficient.

如圖7所示,關於本實施型態之液晶面板3之製造方法方面,在第4步驟,將附支撐玻璃之液晶面板 4之支撐玻璃12和玻璃膜10剝離,來製作被形成液晶元件32之型態之玻璃膜10之液晶面板3。 As shown in FIG. 7, regarding the manufacturing method of the liquid crystal panel 3 of this embodiment, in a fourth step, the liquid crystal panel with a supporting glass will be The support glass 12 and the glass film 10 of 4 are peeled off to produce the liquid crystal panel 3 of the glass film 10 in the form of the liquid crystal element 32.

關於本實施型態之液晶面板3之製造方法之第4步驟,係將附支撐玻璃之液晶面板4分離成液晶面板3(玻璃膜10)和支撐玻璃12之步驟。 The fourth step of the method for manufacturing the liquid crystal panel 3 of this embodiment mode is a step of separating the liquid crystal panel 4 with supporting glass into a liquid crystal panel 3 (glass film 10) and a supporting glass 12.

例如,在從支撐玻璃12將液晶面板3剝離時,可以藉由一邊在玻璃膜10與支撐玻璃12之界面13插入楔體(未圖示)、一邊將玻璃膜10的端部朝從支撐玻璃12離開之方向拉伸來進行剝離。此外,針對在彩色濾光片側玻璃基板6也存在支撐玻璃12之場合,係能夠藉著跟這同樣的方法來剝離支撐玻璃12與彩色濾光片側玻璃基板6。 For example, when the liquid crystal panel 3 is peeled from the support glass 12, the end of the glass film 10 can be faced from the support glass by inserting a wedge (not shown) at the interface 13 between the glass film 10 and the support glass 12. 12 Stretch in the direction of separation to peel. When the support glass 12 is also present on the color filter-side glass substrate 6, the support glass 12 and the color filter-side glass substrate 6 can be peeled off by the same method.

以此方式,關於本實施型態之液晶面板3之製造方法,係一種具有:在滿足支撐體11的支撐玻璃12上層積玻璃膜10來製作玻璃膜層積體1之第1步驟,在玻璃膜10的表面形成液晶配向膜31之第2步驟,包含將液晶配向膜31的表面以摩擦輥5朝一定方向摩擦之摩擦步驟、且在玻璃膜層積體1之玻璃膜10的表面形成液晶元件32,來製作滿足附支撐體的液晶面板之附支撐玻璃之液晶面板4之第3步驟,從附支撐玻璃之液晶面板4將支撐玻璃12剝離來製作液晶面板3之第4步驟等之液晶面板3之製造方法;在比第2步驟前面,僅在玻璃膜10之跟支撐玻璃12的接觸面10a側相反側的面之有效面10b側,做成在玻璃膜10的外周緣形成倒角部15之構 成。 In this way, regarding the manufacturing method of the liquid crystal panel 3 according to this embodiment, there is a first step of manufacturing a glass film laminated body 1 by laminating a glass film 10 on a supporting glass 12 that satisfies the supporting body 11, and The second step of forming the liquid crystal alignment film 31 on the surface of the film 10 includes a rubbing step of rubbing the surface of the liquid crystal alignment film 31 with a rubbing roller 5 in a certain direction, and forming liquid crystal on the surface of the glass film 10 of the glass film laminate 1 Element 32, which is the third step to produce a liquid crystal panel 4 with a supporting glass that meets a liquid crystal panel with a supporting body, and peels the supporting glass 12 from the liquid crystal panel 4 with a supporting glass to produce a liquid crystal such as the fourth step of the liquid crystal panel 3. Method for manufacturing panel 3; before the second step, only the effective surface 10b side of the surface of the glass film 10 opposite to the contact surface 10a side of the supporting glass 12 is formed to form a chamfer on the outer peripheral edge of the glass film 10 Department 15 to make.

接著,利用此類之構成,能夠在將玻璃膜10使用在液晶面板用基板之場合,抑制摩擦輥5的磨耗。 Next, with such a configuration, when the glass film 10 is used as a substrate for a liquid crystal panel, the abrasion of the friction roller 5 can be suppressed.

藉此,在採用玻璃膜層積體1來製作液晶面板3之場合下,能夠抑制光點不良的發生。 Thereby, when the liquid crystal panel 3 is manufactured using the glass film laminated body 1, it is possible to suppress the occurrence of light spot defects.

其次,針對採用關於本發明一實施型態之玻璃膜層積體來製造液晶面板之場合下不良的發生狀況,用圖9來說明。 Next, the occurrence of defects in the case where a liquid crystal panel is manufactured using the glass film laminate according to an embodiment of the present invention will be described with reference to FIG. 9.

圖9係改變倒角部之有無、倒角量、倒角部之形成狀況、有效面之設定狀況等各條件,總結從玻璃膜製造液晶面板之場合下於各條件下的瑕疵情況的發生件數。 Fig. 9 is a summary of the occurrence of defects under various conditions when changing the conditions such as the presence or absence of chamfered portions, the amount of chamfered portions, the formation status of the chamfered portions, and the setting status of the effective surface. number.

又,以下所示之各實施例及比較例方面,作為玻璃膜及支撐玻璃是使用Nippon Electric Glass Co.,Ltd製之無鹼玻璃(產品名:OA-10G)。 In each of the examples and comparative examples described below, as the glass film and supporting glass, alkali-free glass (product name: OA-10G) manufactured by Nippon Electric Glass Co., Ltd. was used.

此外,玻璃膜係使用尺寸368×468、厚度0.2t之玻璃膜;支撐玻璃則使用尺寸370×470、厚度0.5t之支撐玻璃。 In addition, the glass film is a glass film with a size of 368 × 468 and a thickness of 0.2t; the support glass uses a support glass with a size of 370 × 470 and a thickness of 0.5t.

關於實施例1~實施例3之各玻璃膜層積體,係相當於關於本發明之玻璃膜層積體,是在玻璃膜的周緣部形成倒角部。 Each of the glass film laminates of Examples 1 to 3 corresponds to the glass film laminate of the present invention, and a chamfered portion is formed at the peripheral edge portion of the glass film.

倒角部,係利用編號#2000的圓盤磨石、以角度成45度之方式做成C倒角。 The chamfered part is C-chamfered by using a disc millstone of the number # 2000 to make an angle of 45 degrees.

另一方面,關於比較例1之玻璃膜層積體,並不在玻璃膜的周緣部形成倒角部,並不相當於關於本發 明之玻璃膜層積體。 On the other hand, the glass film laminate of Comparative Example 1 does not form a chamfered portion at the peripheral edge portion of the glass film, and does not correspond to the present invention. Mingzhi glass film laminate.

此外,關於比較例1之玻璃膜層積體方面,係選擇畫線面作為玻璃膜之有效面。 In addition, regarding the glass film laminate of Comparative Example 1, the drawing surface was selected as the effective surface of the glass film.

關於實施例1之玻璃膜層積體,係選擇畫線面作為玻璃膜之有效面,並在該有效面側的周緣部形成倒角部,且將倒角量設在玻璃膜厚度(200μm)的50%以下的量之90μm。 Regarding the glass film laminate of Example 1, a drawing line was selected as the effective surface of the glass film, a chamfered portion was formed on the peripheral edge portion of the effective surface side, and the chamfered amount was set to the thickness of the glass film (200 μm). The amount is less than 50% of 90 μm.

又,關於實施例1之玻璃膜層積體,係對應前述之玻璃膜層積體1。 The glass film laminate of Example 1 corresponds to the glass film laminate 1 described above.

關於實施例2之玻璃膜層積體,係選擇跟畫線面為相反側的面當作玻璃膜之有效面,並在該有效面側的周緣部形成倒角部,且將倒角量設在玻璃膜厚度的50%以下的量之90μm。接著,關於實施例2之各玻璃膜層積體方面,係選擇畫線面作為接觸面。 Regarding the glass film laminate of Example 2, the surface opposite to the line drawing surface was selected as the effective surface of the glass film, and a chamfered portion was formed on the peripheral edge portion of the effective surface side, and the chamfering amount was set. It is 90 μm in an amount of 50% or less of the thickness of the glass film. Next, regarding each of the glass film laminates of Example 2, a drawing surface is selected as the contact surface.

又,關於實施例2之玻璃膜層積體,係對應前述之玻璃膜層積體1a。 The glass film laminate of Example 2 corresponds to the aforementioned glass film laminate 1a.

關於實施例3之玻璃膜層積體,係選擇畫線面作為玻璃膜之有效面,並在該有效面側的周緣部形成倒角部,且將倒角量設在超過玻璃膜厚度的50%的量之110μm。 Regarding the glass film laminate of Example 3, the drawing surface was selected as the effective surface of the glass film, and a chamfered portion was formed on the peripheral edge portion of the effective surface side, and the chamfering amount was set to 50 which exceeds the thickness of the glass film. The amount in% is 110 μm.

又,關於實施例3之玻璃膜層積體,係對應前述之玻璃膜層積體1c。 The glass film laminate of Example 3 corresponds to the aforementioned glass film laminate 1c.

接著,針對關於實施例1~實施例3及比較例1之各玻璃膜層積體,分別準備20個樣品,導入液晶顯 示裝置之製造步驟,確認是否發生藥液浸透玻璃膜層積體的界面之、及摩擦步驟下是否發生摩擦布產生塵埃。 Next, for each of the glass film laminates of Examples 1 to 3 and Comparative Example 1, 20 samples were prepared and introduced into a liquid crystal display. The manufacturing steps of the device are shown, and it is confirmed whether a chemical solution permeates the interface of the glass film layered body, and whether friction cloth generates dust during the rubbing step.

此外,針對各自20個樣品,確認在將玻璃膜從支撐玻璃剝離時是否發生玻璃膜破損。 In addition, for each of the 20 samples, it was confirmed whether the glass film was broken when the glass film was peeled from the support glass.

根據圖9所示之實驗結果,關於比較例1之玻璃膜層積體方面,「摩擦導致的塵埃產生」之結果為20個樣品全部發生。 According to the experimental results shown in FIG. 9, regarding the glass film laminate of Comparative Example 1, the result of “dust generation due to friction” was that all 20 samples occurred.

另一方面,根據圖9所示之實驗結果,關於實施例1之玻璃膜層積體方面,在20個樣品全部,「剝離時的破損」、「摩擦導致的塵埃產生」、「藥液浸透導致的破損」等任一瑕疵情況皆未發生。 On the other hand, according to the experimental results shown in FIG. 9, regarding the glass film laminate of Example 1, in all of the 20 samples, “breakage during peeling”, “dust generation due to friction”, and “permeation of chemical liquid” Neither defect, such as "damage caused by it".

此外,關於實施例2之玻璃膜層積體方面,結果,雖然「摩擦導致的塵埃產生」為20個樣品全部並未發生,但「剝離時的破損」為20個樣品之中有2個發生、「藥液浸透導致的破損」則是20個樣品之中有5個發生。 In addition, regarding the glass film laminate of Example 2, as a result, although "the generation of dust by friction" was not detected in all 20 samples, "breakage during peeling" was observed in 2 of 20 samples. "The damage caused by the penetration of the medicinal solution" occurred in 5 of the 20 samples.

再者,關於實施例3之玻璃膜層積體方面,結果,「摩擦導致的塵埃產生」及「藥液浸透導致的破損」為20個樣品全部未發生,但是,「剝離時的破損」則是20個樣品之中有5個發生。 In addition, regarding the glass film laminate of Example 3, as a result, "dust generation due to friction" and "breakage caused by penetration of the medicinal solution" did not occur in all 20 samples, but "breakage during peeling" was It happened 5 out of 20 samples.

亦即,根據本實驗結果,關於實施例1~實施例3之各玻璃膜層積體(亦即,各玻璃膜層積體1)方面,能夠確實防止「摩擦導致的塵埃產生」。 That is, according to the results of this experiment, regarding each of the glass film laminates (that is, each glass film laminate 1) of Examples 1 to 3, "dust generation due to friction" can be reliably prevented.

亦即,能夠確認藉由在玻璃膜的有效面側的周緣部設 置倒角部是可以有效抑制摩擦步驟下摩擦布產生塵埃。 That is, it can be confirmed that by providing a peripheral edge portion on the effective surface side of the glass film Setting the chamfered portion can effectively prevent dust from being generated by the friction cloth in the friction step.

此外,根據本實驗結果,關於實施例1之玻璃膜層積體(亦即,玻璃膜層積體1)方面,是能夠確實防止「藥液浸透導致的破損」與「剝離時的破損」。 In addition, according to the results of this experiment, regarding the glass film laminate (that is, the glass film laminate 1) of Example 1, it is possible to reliably prevent "damage due to penetration of a chemical solution" and "damage during peeling".

亦即,能夠確認,藉由選擇畫線面作為玻璃膜的有效面、而且將倒角量設在玻璃膜厚度的50%以下,可以有效地抑制剝離時的破損、能實現玻璃膜的產出率提升。 That is, it can be confirmed that by selecting a line drawing surface as the effective surface of the glass film and setting the chamfer amount to 50% or less of the thickness of the glass film, it is possible to effectively suppress breakage at the time of peeling and realize the output of the glass film. Rate increase.

Claims (6)

一種玻璃膜層積體,在支撐體層積玻璃膜而製作出的玻璃膜層積體,其特徵係前述支撐體與前述玻璃膜係可剝離地被層積,僅在前述玻璃膜之跟前述支撐體的接觸面側為相反側的面之有效面側,在前述玻璃膜的外周緣具備倒角部;前述玻璃膜被形成刻畫線,而且沿著前述刻畫線被割斷,選擇被形成前述刻畫線之側的面作為前述有效面。A glass film laminate is a glass film laminate produced by laminating a glass film on a support. The glass film laminate is characterized in that the support and the glass film are peelably laminated, and the support is only between the glass film and the support. The contact surface side of the body is the effective surface side of the surface on the opposite side, and a chamfered portion is provided on the outer periphery of the glass film; the glass film is formed with a scribe line, and is cut along the scribe line, and the scribe line is selected to be formed. The side surface is used as the effective surface. 如申請專利範圍第1項記載之玻璃膜層積體,其中,前述倒角部之倒角量係前述玻璃膜厚度的50%以下。The glass film laminate according to item 1 of the scope of the patent application, wherein the chamfered amount of the chamfered portion is 50% or less of the thickness of the glass film. 如申請專利範圍第1或2項記載之玻璃膜層積體,其中,前述支撐體係支撐玻璃。The glass film laminate according to item 1 or 2 of the scope of patent application, wherein the aforementioned support system supports glass. 如申請專利範圍第3項記載之玻璃膜層積體,其中,在前述支撐玻璃直接層積前述玻璃膜,而前述玻璃膜與前述支撐玻璃相互接觸之各個接觸面之表面粗度Ra皆為2.0nm以下。For example, the glass film laminate according to item 3 of the scope of the patent application, wherein the glass film is directly laminated on the support glass, and the surface roughness Ra of each contact surface where the glass film and the support glass are in contact with each other is 2.0. nm or less. 一種液晶面板之製造方法,具有在支撐體上可剝離地層積玻璃膜來製作玻璃膜層積體之第1步驟,在前述玻璃膜之表面形成液晶配向膜之第2步驟,包含用摩擦輥朝一定方向摩擦前述液晶配向膜的表面之摩擦步驟,在前述玻璃膜層積體之前述玻璃膜的表面形成液晶元件、製作附支撐體之液晶面板之第3步驟,與從前述附支撐體之液晶面板將前述支撐體剝離、製作液晶面板之第4步驟之液晶面板之製造方法,其特徵係前述玻璃膜被形成刻畫線,而且沿著該刻畫線被割斷,在前述第2步驟之前,僅在前述玻璃膜之跟前述支撐體的接觸面側為相反側的面之有效面側,在前述玻璃膜的外周緣形成倒角部;選擇前述玻璃膜之被形成前述刻畫線之側的面作為前述有效面。A method for manufacturing a liquid crystal panel includes a first step of laminating a glass film on a support to produce a glass film laminate, and a second step of forming a liquid crystal alignment film on the surface of the glass film, including using a rubbing roller to The rubbing step of rubbing the surface of the liquid crystal alignment film in a certain direction, the third step of forming a liquid crystal element on the surface of the glass film of the glass film laminate, manufacturing a liquid crystal panel with a support body, and the liquid crystal from the support body The panel is a method for manufacturing a liquid crystal panel in which the support is peeled off and the fourth step of manufacturing a liquid crystal panel is characterized in that the glass film is formed with a engraved line and cut along the engraved line. Before the second step, only The contact surface side of the glass film with the support is the effective surface side of the opposite surface, and a chamfered portion is formed on the outer periphery of the glass film; the surface of the glass film on the side where the scribed line is formed is selected as the foregoing. Effective surface. 如申請專利範圍第5項記載之液晶面板之製造方法,其中,前述倒角部之倒角量係前述玻璃膜厚度的50%以下。For example, the method for manufacturing a liquid crystal panel according to item 5 of the scope of patent application, wherein the chamfered amount of the chamfered portion is 50% or less of the thickness of the glass film.
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